ATE156907T1 - Mikromechanischer sensor - Google Patents
Mikromechanischer sensorInfo
- Publication number
- ATE156907T1 ATE156907T1 AT93906671T AT93906671T ATE156907T1 AT E156907 T1 ATE156907 T1 AT E156907T1 AT 93906671 T AT93906671 T AT 93906671T AT 93906671 T AT93906671 T AT 93906671T AT E156907 T1 ATE156907 T1 AT E156907T1
- Authority
- AT
- Austria
- Prior art keywords
- sensing elements
- sensing
- outgoing
- supported
- substantially similar
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB929205711A GB9205711D0 (en) | 1992-03-16 | 1992-03-16 | Micromechanical sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE156907T1 true ATE156907T1 (de) | 1997-08-15 |
Family
ID=10712234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT93906671T ATE156907T1 (de) | 1992-03-16 | 1993-03-15 | Mikromechanischer sensor |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0632880B1 (de) |
JP (1) | JPH08504266A (de) |
AT (1) | ATE156907T1 (de) |
DE (1) | DE69313104T2 (de) |
ES (1) | ES2107010T3 (de) |
GB (2) | GB9205711D0 (de) |
WO (1) | WO1993019343A1 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5658698A (en) * | 1994-01-31 | 1997-08-19 | Canon Kabushiki Kaisha | Microstructure, process for manufacturing thereof and devices incorporating the same |
DE4439238A1 (de) * | 1994-11-03 | 1996-05-09 | Telefunken Microelectron | Kapazitiver Beschleunigungssensor |
US5880369A (en) * | 1996-03-15 | 1999-03-09 | Analog Devices, Inc. | Micromachined device with enhanced dimensional control |
US6088463A (en) | 1998-10-30 | 2000-07-11 | Microtronic A/S | Solid state silicon-based condenser microphone |
US6829131B1 (en) | 1999-09-13 | 2004-12-07 | Carnegie Mellon University | MEMS digital-to-acoustic transducer with error cancellation |
WO2003017717A2 (en) | 2001-08-17 | 2003-02-27 | Carnegie Mellon University | Method and apparatus for reconstruction of soundwaves from digital signals |
US7142682B2 (en) | 2002-12-20 | 2006-11-28 | Sonion Mems A/S | Silicon-based transducer for use in hearing instruments and listening devices |
US7049051B2 (en) | 2003-01-23 | 2006-05-23 | Akustica, Inc. | Process for forming and acoustically connecting structures on a substrate |
US6936524B2 (en) | 2003-11-05 | 2005-08-30 | Akustica, Inc. | Ultrathin form factor MEMS microphones and microspeakers |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4783237A (en) * | 1983-12-01 | 1988-11-08 | Harry E. Aine | Solid state transducer and method of making same |
FR2558263B1 (fr) * | 1984-01-12 | 1986-04-25 | Commissariat Energie Atomique | Accelerometre directif et son procede de fabrication par microlithographie |
US4953387A (en) * | 1989-07-31 | 1990-09-04 | The Regents Of The University Of Michigan | Ultrathin-film gas detector |
DE69113632T2 (de) * | 1990-08-17 | 1996-03-21 | Analog Devices Inc | Monolithischer beschleunigungsmesser. |
-
1992
- 1992-03-16 GB GB929205711A patent/GB9205711D0/en active Pending
-
1993
- 1993-03-15 GB GB9418784A patent/GB2280038B/en not_active Expired - Fee Related
- 1993-03-15 EP EP93906671A patent/EP0632880B1/de not_active Expired - Lifetime
- 1993-03-15 JP JP5516352A patent/JPH08504266A/ja active Pending
- 1993-03-15 WO PCT/GB1993/000532 patent/WO1993019343A1/en active IP Right Grant
- 1993-03-15 ES ES93906671T patent/ES2107010T3/es not_active Expired - Lifetime
- 1993-03-15 AT AT93906671T patent/ATE156907T1/de not_active IP Right Cessation
- 1993-03-15 DE DE69313104T patent/DE69313104T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO1993019343A1 (en) | 1993-09-30 |
GB9418784D0 (en) | 1994-11-02 |
DE69313104T2 (de) | 1997-12-11 |
EP0632880B1 (de) | 1997-08-13 |
GB9205711D0 (en) | 1992-04-29 |
DE69313104D1 (de) | 1997-09-18 |
GB2280038A (en) | 1995-01-18 |
JPH08504266A (ja) | 1996-05-07 |
EP0632880A1 (de) | 1995-01-11 |
GB2280038B (en) | 1995-11-22 |
ES2107010T3 (es) | 1997-11-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |