ES2036469B1 - TEST STRUCTURE FOR THE MEASUREMENT OF LATERAL DIFFUSION IN TECHNOLOGIES DOPED FROM A POLISICILE, WITH CORRECTION OF MISALIGNMENT - Google Patents

TEST STRUCTURE FOR THE MEASUREMENT OF LATERAL DIFFUSION IN TECHNOLOGIES DOPED FROM A POLISICILE, WITH CORRECTION OF MISALIGNMENT

Info

Publication number
ES2036469B1
ES2036469B1 ES09101936A ES9101936A ES2036469B1 ES 2036469 B1 ES2036469 B1 ES 2036469B1 ES 09101936 A ES09101936 A ES 09101936A ES 9101936 A ES9101936 A ES 9101936A ES 2036469 B1 ES2036469 B1 ES 2036469B1
Authority
ES
Spain
Prior art keywords
lateral diffusion
polisicile
misalignment
doped
correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
ES09101936A
Other languages
Spanish (es)
Other versions
ES2036469A2 (en
ES2036469R (en
Inventor
M Perello
M Lozano
C Cane
J Anguita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consejo Superior de Investigaciones Cientificas CSIC
Original Assignee
Consejo Superior de Investigaciones Cientificas CSIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consejo Superior de Investigaciones Cientificas CSIC filed Critical Consejo Superior de Investigaciones Cientificas CSIC
Priority to ES09101936A priority Critical patent/ES2036469B1/en
Publication of ES2036469A2 publication Critical patent/ES2036469A2/en
Publication of ES2036469R publication Critical patent/ES2036469R/es
Application granted granted Critical
Publication of ES2036469B1 publication Critical patent/ES2036469B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

LA ESTRUCTURA DE TEST PARA LA MEDIDA DE LA DIFUSION LATERAL EN TECNOLOGIAS CON DOPADO A PARTIR DE POLISICILIO, CON CORRECCION DEL DESALINEAMIENTO ES UN DISPOSITIVO COMPUESTO DE VARIOS TRANSISTORES MOS DE VACIAMIENTO, DE DISTINTAS DIMENSIONES, CON CONTACTOS ENTERRADOS DISPUESTOS ALTERNATIVAMENTE A DERECHA E IZQUIERDA. LA ESTRUCTURA DEBE CONTENER CUATRO TRANSISTORES COMO MINIMO A PESAR DE QUE LA IMPLEMENTACION PRACTICA QUE SE PRESENTA CONTIENE NUEVE. LA MEDIDA QUE SE REALIZA ES DE TIPO ELECTRICO MEDIANTE AJUSTES LINEALES DE LA INVERSA DE LA CORRIENTE DE DRENADOR RESPECTO A LAS LONGITUDES DE LOS TRANSISTORES. SU APLICACION CONSISTE EN LA OBTENCION AUTOMATICA MEDIANTE MEDIDAS ELECTRICAS DE LA LONGITUD DE DIFUSION LATERAL EN PROCESOS DE AUTODOPADO A PARTIR DE MATERIAL POLICRISTALINO.THE TEST STRUCTURE FOR THE MEASUREMENT OF LATERAL DIFFUSION IN TECHNOLOGIES DOPED FROM A POLISICILE, WITH CORRECTION OF MISALIGNMENT IS A DEVICE COMPOSED OF VARIOUS DIFFERENT DIFFERENT DIFFERENT DIFFERENT DIFFERENT CONTACTS DIFFERENT DIFFERENT FROM EARLY. THE STRUCTURE MUST CONTAIN AT LEAST FOUR TRANSISTORS DESPITE THE PRACTICAL IMPLEMENTATION PRESENTED CONTAINS NINE. THE MEASURE THAT IS CARRIED OUT IS OF THE ELECTRICAL TYPE THROUGH LINEAR ADJUSTMENTS OF THE REVERSE OF THE DRAINAGE CURRENT WITH RESPECT TO THE LENGTHS OF THE TRANSISTORS. ITS APPLICATION CONSISTS IN THE AUTOMATIC OBTAINING THROUGH ELECTRICAL MEASURES OF THE LENGTH OF LATERAL DIFFUSION IN SELF-DOPTING PROCESSES FROM POLYCHRISTALLINE MATERIAL.

ES09101936A 1991-08-27 1991-08-27 TEST STRUCTURE FOR THE MEASUREMENT OF LATERAL DIFFUSION IN TECHNOLOGIES DOPED FROM A POLISICILE, WITH CORRECTION OF MISALIGNMENT Expired - Fee Related ES2036469B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES09101936A ES2036469B1 (en) 1991-08-27 1991-08-27 TEST STRUCTURE FOR THE MEASUREMENT OF LATERAL DIFFUSION IN TECHNOLOGIES DOPED FROM A POLISICILE, WITH CORRECTION OF MISALIGNMENT

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES09101936A ES2036469B1 (en) 1991-08-27 1991-08-27 TEST STRUCTURE FOR THE MEASUREMENT OF LATERAL DIFFUSION IN TECHNOLOGIES DOPED FROM A POLISICILE, WITH CORRECTION OF MISALIGNMENT

Publications (3)

Publication Number Publication Date
ES2036469A2 ES2036469A2 (en) 1993-05-16
ES2036469R ES2036469R (en) 1995-05-16
ES2036469B1 true ES2036469B1 (en) 1995-12-16

Family

ID=8273379

Family Applications (1)

Application Number Title Priority Date Filing Date
ES09101936A Expired - Fee Related ES2036469B1 (en) 1991-08-27 1991-08-27 TEST STRUCTURE FOR THE MEASUREMENT OF LATERAL DIFFUSION IN TECHNOLOGIES DOPED FROM A POLISICILE, WITH CORRECTION OF MISALIGNMENT

Country Status (1)

Country Link
ES (1) ES2036469B1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3335340A (en) * 1964-02-24 1967-08-08 Ibm Combined transistor and testing structures and fabrication thereof
US3440715A (en) * 1967-08-22 1969-04-29 Bell Telephone Labor Inc Method of fabricating integrated circuits by controlled process
US3650020A (en) * 1970-02-24 1972-03-21 Bell Telephone Labor Inc Method of monitoring semiconductor device fabrication
US4453127A (en) * 1982-06-09 1984-06-05 International Business Machines Corporation Determination of true electrical channel length of surface FET
DE3917702A1 (en) * 1989-05-31 1990-12-06 Siemens Ag METHOD FOR DETERMINING THE DIFFERENTIAL LENGTH OF MINORITY CHARGE CARRIERS IN A SEMICONDUCTOR CRYSTAL BODY BY MEANS OF AN ELECTROLYTIC CELL
DE3942861A1 (en) * 1989-12-23 1991-06-27 Bosch Gmbh Robert METHOD FOR DETERMINING THE POSITION OF A PN TRANSITION

Also Published As

Publication number Publication date
ES2036469A2 (en) 1993-05-16
ES2036469R (en) 1995-05-16

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FD1A Patent lapsed

Effective date: 20020425