ES2025710T3 - Disposicion para la limpieza o el tratamiento quimico de piezas de trabajo. - Google Patents
Disposicion para la limpieza o el tratamiento quimico de piezas de trabajo.Info
- Publication number
- ES2025710T3 ES2025710T3 ES198888101515T ES88101515T ES2025710T3 ES 2025710 T3 ES2025710 T3 ES 2025710T3 ES 198888101515 T ES198888101515 T ES 198888101515T ES 88101515 T ES88101515 T ES 88101515T ES 2025710 T3 ES2025710 T3 ES 2025710T3
- Authority
- ES
- Spain
- Prior art keywords
- chemical treatment
- workpieces
- cleaning
- arrangement
- wrapping box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
- H05K3/0088—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor for treatment of holes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0055—After-treatment, e.g. cleaning or desmearing of holes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0736—Methods for applying liquids, e.g. spraying
- H05K2203/0746—Local treatment using a fluid jet, e.g. for removing or cleaning material; Providing mechanical pressure using a fluid jet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Electroplating Methods And Accessories (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Coating Apparatus (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Absorbent Articles And Supports Therefor (AREA)
Abstract
LA INNOVACION SE TRATA DE UNA INSTALACION PARA LA DEPURACION O TRATAMIENTO QUIMICO DE PIEZAS DE TRABAJO, ESPECIALMENTE DE PLACAS DE CIRCUITO IMPRESO, MEDIANTE DISOLUCIONES, QUE SE DESPRENDEN DE TOBERAS SOBRE LA PIEZA DE TRABAJO, SE CARACTERIZA DE TAL MANERA, QUE ESTE SE FORMA DE UNA CAJA DE ENVUELTAS (3) CON CAJAS DE AFLUENCIA (5) DISPUESTAS BAJO TAL, DONDE LA CAJA DE ENVUELTAS (3) SE DISTRIBUYE MEDIANTE DE UN TABIQUE DE SEPARACION (4) EN DOS CAMARAS (7), DONDE SE ENCUENTRAN PLANOS DE PERFORACION (2), QUE ACOTAN LAS CAMARAS CONTRA LA PARED SUPERIOR DE ENVUELTAS, QUE ESTA FORMADA DE DOS MUESCAS DE LA TOBERA.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE8703114U DE8703114U1 (de) | 1987-02-25 | 1987-02-25 | Einrichtung zur Reinigung oder chemischen Behandlung von Werkstücken |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2025710T3 true ES2025710T3 (es) | 1992-04-01 |
Family
ID=6805344
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES198888101515T Expired - Lifetime ES2025710T3 (es) | 1987-02-25 | 1988-02-03 | Disposicion para la limpieza o el tratamiento quimico de piezas de trabajo. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4846202A (es) |
EP (1) | EP0280078B1 (es) |
JP (1) | JPH0448872Y2 (es) |
AT (1) | AT395721B (es) |
DE (2) | DE8703114U1 (es) |
ES (1) | ES2025710T3 (es) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3916693A1 (de) * | 1989-05-23 | 1990-11-29 | Schering Ag | Anordnung zur behandlung und/oder reinigung von gut, insbesondere von mit bohrungen versehenen leiterplatten |
US5095926A (en) * | 1990-01-16 | 1992-03-17 | Wegner Paul C | Apparatus for washing storage batteries |
US5195547A (en) * | 1991-11-01 | 1993-03-23 | Allegheny Plastics, Inc. | Pressurized weir for a fumeless pickling or cleaning system |
JPH05291228A (ja) * | 1992-04-07 | 1993-11-05 | Fujitsu Ltd | ウェーハ洗浄装置及び洗浄方法 |
DE19530989C1 (de) * | 1995-08-23 | 1997-03-13 | Atotech Deutschland Gmbh | Verfahren zum Filmstrippen |
US6269823B1 (en) * | 1998-05-04 | 2001-08-07 | Eagle-Picher Industries, Inc. | Can washing apparatus with plastic risers |
DE05075545T1 (de) | 1998-05-20 | 2006-08-31 | Process Automation International Ltd., Tai Po | Vorrichtung zur Elektroplattierung |
US6261425B1 (en) | 1998-08-28 | 2001-07-17 | Process Automation International, Ltd. | Electroplating machine |
US6539963B1 (en) | 1999-07-14 | 2003-04-01 | Micron Technology, Inc. | Pressurized liquid diffuser |
JP4215900B2 (ja) * | 1999-08-13 | 2009-01-28 | アルプス電気株式会社 | ウェット処理用ノズル装置およびウェット処理装置 |
DE10255884B4 (de) * | 2002-11-29 | 2006-05-11 | Atotech Deutschland Gmbh | Düsenanordnung |
DE102004002421A1 (de) * | 2004-01-16 | 2005-08-18 | Atotech Deutschland Gmbh | Düsenanordnung |
DE102004053337A1 (de) * | 2004-11-04 | 2006-05-11 | Steag Hama Tech Ag | Verfahren und Vorrichtung zum Behandeln von Substraten und Düseneinheit hierfür |
DE102011004232B4 (de) | 2011-02-16 | 2024-04-18 | Ecoclean Gmbh | Düsenmodul und Reinigungsvorrichtung mit Düsenmodul |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2026027A (en) * | 1934-06-27 | 1935-12-31 | Ralph E Evans | Gas burner |
US2295522A (en) * | 1940-09-12 | 1942-09-08 | Linde Air Prod Co | Blowpipe head |
US2414874A (en) * | 1942-09-17 | 1947-01-28 | Union Carbide & Carbon Corp | Welding |
US3682185A (en) * | 1970-03-10 | 1972-08-08 | James J Murray | Plated wire manufacturing cell |
US3687145A (en) * | 1970-06-26 | 1972-08-29 | Inland Steel Co | Quench system |
US4227550A (en) * | 1975-05-12 | 1980-10-14 | Bowles Fluidics Corporation | Liquid oscillator having control passages continuously communicating with ambient air |
FR2335268A2 (fr) * | 1974-01-04 | 1977-07-15 | Fives Cail Babcock | Dispositif de pulverisation notamment pour le refroidissement de produits coules en continu |
US4076222A (en) * | 1976-07-19 | 1978-02-28 | Schaming Edward J | Runout cooling method and apparatus for metal rolling mills |
US4161285A (en) * | 1977-12-22 | 1979-07-17 | United Technologies Corporation | Laser nozzle construction |
DE2906648C3 (de) * | 1979-02-21 | 1981-09-10 | Alfred Kärcher GmbH & Co, 7057 Winnenden | Spritzdüsenanordnung für Hochdruckreinigungsgeräte |
US4367597A (en) * | 1979-12-13 | 1983-01-11 | Nippon Steel Corporation | Gas-liquid cooling apparatus |
GB2096490B (en) * | 1981-04-13 | 1984-12-05 | Davey Loewy Ltd | Spraying apparatus |
DE3528575A1 (de) * | 1985-08-06 | 1987-02-19 | Schering Ag | Verfahren und einrichtung zur reinigung, aktivierung und/oder metallisierung von bohrloechern in horizontal gefuehrten leiterplatten |
-
1987
- 1987-02-25 DE DE8703114U patent/DE8703114U1/de not_active Expired
-
1988
- 1988-02-03 DE DE8888101515T patent/DE3864537D1/de not_active Expired - Lifetime
- 1988-02-03 ES ES198888101515T patent/ES2025710T3/es not_active Expired - Lifetime
- 1988-02-03 EP EP88101515A patent/EP0280078B1/de not_active Expired - Lifetime
- 1988-02-22 US US07/162,492 patent/US4846202A/en not_active Expired - Fee Related
- 1988-02-23 AT AT0044088A patent/AT395721B/de not_active IP Right Cessation
- 1988-02-25 JP JP1988023100U patent/JPH0448872Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
AT395721B (de) | 1993-02-25 |
EP0280078A2 (de) | 1988-08-31 |
JPH0448872Y2 (es) | 1992-11-17 |
ATA44088A (de) | 1992-07-15 |
DE3864537D1 (de) | 1991-10-10 |
JPS63149288U (es) | 1988-09-30 |
EP0280078A3 (en) | 1989-03-08 |
DE8703114U1 (de) | 1987-04-09 |
EP0280078B1 (de) | 1991-09-04 |
US4846202A (en) | 1989-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
Ref document number: 280078 Country of ref document: ES |
|
FD1K | Utility model lapsed |
Effective date: 19990405 |