EP4707609A3 - Rotor für eine turbomolekularpumpe und turbomolekularpumpe - Google Patents

Rotor für eine turbomolekularpumpe und turbomolekularpumpe

Info

Publication number
EP4707609A3
EP4707609A3 EP25227685.2A EP25227685A EP4707609A3 EP 4707609 A3 EP4707609 A3 EP 4707609A3 EP 25227685 A EP25227685 A EP 25227685A EP 4707609 A3 EP4707609 A3 EP 4707609A3
Authority
EP
European Patent Office
Prior art keywords
turbomolecular pump
shaft
rotor
bore
axial extent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP25227685.2A
Other languages
English (en)
French (fr)
Other versions
EP4707609A2 (de
Inventor
Jan Hofmann
Maximilian Birkenfeld
Martin Lohse
Michael Schweighöfer
Tobias Stoll
Sebastian Südwasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP25227685.2A priority Critical patent/EP4707609A3/de
Publication of EP4707609A2 publication Critical patent/EP4707609A2/de
Publication of EP4707609A3 publication Critical patent/EP4707609A3/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/053—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die vorliegende Offenbarung betrifft einen Rotor für eine Turbomolekularpumpe mit zumindest einer Turbomolekularpumpstufe, der eine drehbar lagerbare Welle umfasst, die eine mit einer Rotationsachse der Welle koaxial angeordnete Bohrung aufweist, wobei die Bohrung eine axiale Erstreckung aufweist, die mehr als 40%, insbesondere mehr als 45%, bevorzugt mehr als 50% einer axialen Erstreckung der Welle beträgt, und die einen Durchmesser aufweist, der in einem sich über mehr als 70%, insbesondere mehr als 80%, bevorzugt mehr als 90% der axialen Erstreckung der Bohrung erstreckenden Abschnitt mehr als 50%, insbesondere mehr als 65%, bevorzugt mehr als 80% des Durchmessers der Welle beträgt.
EP25227685.2A 2025-12-30 2025-12-30 Rotor für eine turbomolekularpumpe und turbomolekularpumpe Pending EP4707609A3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP25227685.2A EP4707609A3 (de) 2025-12-30 2025-12-30 Rotor für eine turbomolekularpumpe und turbomolekularpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP25227685.2A EP4707609A3 (de) 2025-12-30 2025-12-30 Rotor für eine turbomolekularpumpe und turbomolekularpumpe

Publications (2)

Publication Number Publication Date
EP4707609A2 EP4707609A2 (de) 2026-03-11
EP4707609A3 true EP4707609A3 (de) 2026-07-29

Family

ID=98176323

Family Applications (1)

Application Number Title Priority Date Filing Date
EP25227685.2A Pending EP4707609A3 (de) 2025-12-30 2025-12-30 Rotor für eine turbomolekularpumpe und turbomolekularpumpe

Country Status (1)

Country Link
EP (1) EP4707609A3 (de)

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
US4309143A (en) * 1976-11-29 1982-01-05 Kernforschungsanlage Julich Gmbh Vane-disk type turbomolecular pump and etching method of manufacture of vane disks
EP0437671A1 (de) * 1990-01-16 1991-07-24 Alcatel Cit Lecksuchanlage mit zwei konzentrischen Holweckpumpen
WO2005019654A1 (de) * 2003-08-20 2005-03-03 Leybold Vacuum Gmbh Kombinierter antrieb mit lagerung
US20070258836A1 (en) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vacuum pump
US20090035123A1 (en) * 2004-11-01 2009-02-05 Ian David Stones Vacuum pump
EP2597313A2 (de) * 2011-11-26 2013-05-29 Pfeiffer Vacuum Gmbh Schnell drehender Rotor für eine Vakuumpumpe
US20130177453A1 (en) * 2004-11-01 2013-07-11 Edwards Limited Pumping arrangement
US20190207445A1 (en) * 2016-09-05 2019-07-04 Edwards Limited Vacuum pump assembly
EP2933497B1 (de) * 2014-04-17 2020-10-07 Pfeiffer Vacuum GmbH Vakuumpumpe
EP4108932A1 (de) * 2022-09-29 2022-12-28 Pfeiffer Vacuum Technology AG Rezipient und hochvakuumpumpe
WO2024033318A1 (en) * 2022-08-09 2024-02-15 Leybold Gmbh Vacuum pump with eddy current damper
EP4459131A2 (de) * 2024-09-12 2024-11-06 Pfeiffer Vacuum Technology AG Turbomolekularvakuumpumpe mit optimierter sperrgaszufuhr
EP4644703A1 (de) * 2025-08-27 2025-11-05 Pfeiffer Vacuum Technology AG Turbomolekularpumpe

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
US4309143A (en) * 1976-11-29 1982-01-05 Kernforschungsanlage Julich Gmbh Vane-disk type turbomolecular pump and etching method of manufacture of vane disks
EP0437671A1 (de) * 1990-01-16 1991-07-24 Alcatel Cit Lecksuchanlage mit zwei konzentrischen Holweckpumpen
WO2005019654A1 (de) * 2003-08-20 2005-03-03 Leybold Vacuum Gmbh Kombinierter antrieb mit lagerung
US20130177453A1 (en) * 2004-11-01 2013-07-11 Edwards Limited Pumping arrangement
US20090035123A1 (en) * 2004-11-01 2009-02-05 Ian David Stones Vacuum pump
US20070258836A1 (en) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vacuum pump
EP2597313A2 (de) * 2011-11-26 2013-05-29 Pfeiffer Vacuum Gmbh Schnell drehender Rotor für eine Vakuumpumpe
EP2933497B1 (de) * 2014-04-17 2020-10-07 Pfeiffer Vacuum GmbH Vakuumpumpe
US20190207445A1 (en) * 2016-09-05 2019-07-04 Edwards Limited Vacuum pump assembly
WO2024033318A1 (en) * 2022-08-09 2024-02-15 Leybold Gmbh Vacuum pump with eddy current damper
EP4108932A1 (de) * 2022-09-29 2022-12-28 Pfeiffer Vacuum Technology AG Rezipient und hochvakuumpumpe
EP4459131A2 (de) * 2024-09-12 2024-11-06 Pfeiffer Vacuum Technology AG Turbomolekularvakuumpumpe mit optimierter sperrgaszufuhr
EP4644703A1 (de) * 2025-08-27 2025-11-05 Pfeiffer Vacuum Technology AG Turbomolekularpumpe

Also Published As

Publication number Publication date
EP4707609A2 (de) 2026-03-11

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Inventor name: HOFMANN, JAN

Inventor name: BIRKENFELD, MAXIMILIAN

Inventor name: LOHSE, MARTIN

Inventor name: SCHWEIGHOEFER, MICHAEL

Inventor name: STOLL, TOBIAS

Inventor name: SUEDWASSER, SEBASTIAN

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Ipc: F04D 19/04 20060101AFI20260619BHEP

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Ipc: F04D 29/32 20060101ALI20260619BHEP