EP4645366A3 - Verfahren zum betreiben einer ionenpumpe - Google Patents

Verfahren zum betreiben einer ionenpumpe

Info

Publication number
EP4645366A3
EP4645366A3 EP25203447.5A EP25203447A EP4645366A3 EP 4645366 A3 EP4645366 A3 EP 4645366A3 EP 25203447 A EP25203447 A EP 25203447A EP 4645366 A3 EP4645366 A3 EP 4645366A3
Authority
EP
European Patent Office
Prior art keywords
voltage
current
ion pump
pump
operating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP25203447.5A
Other languages
English (en)
French (fr)
Other versions
EP4645366A2 (de
Inventor
Tiziano Isoardi
Paolo Manassero
Chiara Paolini
Riccardo GARZELLA
Marco Marzot
Andrea BERTALLOT
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Priority to EP25203447.5A priority Critical patent/EP4645366A3/de
Publication of EP4645366A2 publication Critical patent/EP4645366A2/de
Publication of EP4645366A3 publication Critical patent/EP4645366A3/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
EP25203447.5A 2025-09-19 2025-09-19 Verfahren zum betreiben einer ionenpumpe Pending EP4645366A3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP25203447.5A EP4645366A3 (de) 2025-09-19 2025-09-19 Verfahren zum betreiben einer ionenpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP25203447.5A EP4645366A3 (de) 2025-09-19 2025-09-19 Verfahren zum betreiben einer ionenpumpe

Publications (2)

Publication Number Publication Date
EP4645366A2 EP4645366A2 (de) 2025-11-05
EP4645366A3 true EP4645366A3 (de) 2026-04-08

Family

ID=97065119

Family Applications (1)

Application Number Title Priority Date Filing Date
EP25203447.5A Pending EP4645366A3 (de) 2025-09-19 2025-09-19 Verfahren zum betreiben einer ionenpumpe

Country Status (1)

Country Link
EP (1) EP4645366A3 (de)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10629417B1 (en) * 2016-12-01 2020-04-21 ColdQuanta, Inc. Sputter ion pump with penning-trap current sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10629417B1 (en) * 2016-12-01 2020-04-21 ColdQuanta, Inc. Sputter ion pump with penning-trap current sensor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
BASU A ET AL: "Miniature Electrostatic, High-Vacuum Ion Pump Architecture Using A Nanostructured Field Emission Electron Source", JOURNAL OF PHYSICS: CONFERENCE SERIES, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 660, no. 1, 10 December 2015 (2015-12-10), pages 12027, XP020293759, ISSN: 1742-6596, [retrieved on 20151210], DOI: 10.1088/1742-6596/660/1/012027 *

Also Published As

Publication number Publication date
EP4645366A2 (de) 2025-11-05

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