EP4432019B1 - Verfahren zur verringerung von schwingungen ausserhalb der ebene in einem resonatormechanismus mit flexibler drehführung - Google Patents

Verfahren zur verringerung von schwingungen ausserhalb der ebene in einem resonatormechanismus mit flexibler drehführung

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Publication number
EP4432019B1
EP4432019B1 EP23162547.6A EP23162547A EP4432019B1 EP 4432019 B1 EP4432019 B1 EP 4432019B1 EP 23162547 A EP23162547 A EP 23162547A EP 4432019 B1 EP4432019 B1 EP 4432019B1
Authority
EP
European Patent Office
Prior art keywords
flexible
rods
transverse
blades
oscillation frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP23162547.6A
Other languages
English (en)
French (fr)
Other versions
EP4432019A1 (de
Inventor
Gianni Di Domenico
Mohammad Hussein Kahrobaiyan
Dominique Lechot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Swatch Group Research and Development SA
Original Assignee
Swatch Group Research and Development SA
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Filing date
Publication date
Application filed by Swatch Group Research and Development SA filed Critical Swatch Group Research and Development SA
Priority to EP23162547.6A priority Critical patent/EP4432019B1/de
Priority to JP2024032987A priority patent/JP7700299B2/ja
Priority to US18/599,503 priority patent/US20240310783A1/en
Priority to CN202410306813.7A priority patent/CN118672105A/zh
Publication of EP4432019A1 publication Critical patent/EP4432019A1/de
Application granted granted Critical
Publication of EP4432019B1 publication Critical patent/EP4432019B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00Mechanisms for stabilising frequency
    • G04B17/04Oscillators acting by spring tension
    • G04B17/045Oscillators acting by spring tension with oscillating blade springs
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00Mechanisms for stabilising frequency
    • G04B17/32Component parts or constructional details, e.g. collet, stud, virole or piton
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B18/00Mechanisms for setting frequency
    • G04B18/02Regulator or adjustment devices; Indexing devices, e.g. raquettes
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B43/00Protecting clockworks by shields or other means against external influences, e.g. magnetic fields
    • G04B43/002Component shock protection arrangements
    • GPHYSICS
    • G04HOROLOGY
    • G04DAPPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D7/00Measuring, counting, calibrating, testing or regulating apparatus
    • G04D7/12Timing devices for clocks or watches for comparing the rate of the oscillating member with a standard
    • G04D7/1257Timing devices for clocks or watches for comparing the rate of the oscillating member with a standard wherein further adjustment devices are present
    • G04D7/1271Timing devices for clocks or watches for comparing the rate of the oscillating member with a standard wherein further adjustment devices are present for the control mechanism only (from outside the clockwork)

Definitions

  • the invention relates to a method for developing a clockwork resonator mechanism, comprising a structure and an anchor block from which is suspended at least one inertial element, a virtual pivot comprising a plurality of substantially longitudinal elastic blades, each fixed, at a first end to said anchor block, and at a second end to said inertial element.
  • the invention relates to the field of watchmaking resonators, and particularly those which include elastic blades acting as means of return for the operation of the oscillator.
  • the torsional stiffness of the suspension is a critical factor for most watch oscillators with at least one balance spring or elastic leaves providing flexible guidance, particularly for resonators with crossed leaves. Shock resistance also depends on this torsional stiffness; indeed, during impacts, the stress on the leaves quickly reaches very high values, thus reducing the travel the component can undergo before failing. Shock absorbers for watch components come in numerous variations. However, their primary purpose is to protect the fragile pivots of the resonator shaft, not the elastic elements, such as the traditional balance spring.
  • New mechanism architectures allow for maximizing the quality factor of a resonator, through the use of flexible guidance and a lever escapement with a very small angle lifting, according to the request CH15442016 on behalf of ETA Manufacture Horlogère Suisse and its subsidiaries, whose teachings are directly applicable to the present invention, and whose resonator can still be improved with regard to its shock sensitivity in certain specific directions.
  • the aim is therefore to protect the blades from breakage in the event of impacts. It has been observed that the shock-absorbing systems currently available for resonators with flexible guides protect the blades from impacts only in certain directions, but not in all directions, or that they have the drawback of allowing slight movement of the virtual pivot's mounting as it oscillates, which should be avoided as much as possible.
  • the demand CH5182018 or the request EP3561609A1 on behalf of ETA Manufacture Horlogère Suisse describes a watchmaking resonator mechanism, comprising a structure carrying, by a flexible suspension, an anchor block from which is suspended an inertial element oscillating according to a first degree of freedom in rotation RZ, under the action of restoring forces exerted by a virtual pivot comprising first elastic blades each fixed to said inertial element and said anchor block, the flexible suspension being arranged to allow a certain mobility of the anchor block in all degrees of freedom other than the first degree of freedom in rotation RZ in which only the inertial element is mobile to avoid any disturbance of its oscillation, and the stiffness of the suspension in the first degree of freedom in rotation RZ is much greater than the stiffness of the virtual pivot in this same first degree of freedom in rotation RZ.
  • the demand CH715526 or the request EP3561607 on behalf of ETA Manufacture Horlogère Suisse describes a watchmaking resonator mechanism, comprising a structure and an anchor block from which is suspended at least one inertial element arranged to oscillate in a first degree of freedom in rotation RZ around a pivot axis extending in a first direction Z, said inertial element being subjected to restoring forces exerted by a virtual pivot comprising a plurality of substantially longitudinal elastic blades, each fixed, at a first end to said anchor block, and at a second end to said inertial element, each said elastic blade being deformable essentially in an XY plane perpendicular to said first direction Z.
  • the inertial element When the resonator mechanism is operating, the inertial element oscillates around the Z-direction in the XY plane with a reference oscillation frequency. In addition, the inertial element undergoes secondary rotational oscillations around the X-direction on one hand, and around the Y-direction on the other. These secondary oscillations are called "out-of-plane" oscillation modes, meaning they occur outside the XY plane.
  • the invention aims to improve the demand resonance mechanism CH715526 or the request EP3561607 on behalf of ETA Swiss Watchmaking Manufacture to improve the flexible suspension and avoid the aforementioned disadvantages.
  • the invention relates to a method for developing a clockwork resonator mechanism, comprising a structure and an anchor block from which is suspended at least one inertial element arranged to oscillate in a first degree of freedom in rotation RZ around a pivot axis extending in a first direction Z, said inertial element being subjected to restoring forces exerted by a virtual pivot comprising a plurality of substantially longitudinal elastic blades, each fixed, at a first end to said anchor block, and at a second end to said inertial element, each said elastic blade being deformable essentially in an XY plane perpendicular to said first direction Z, said anchor block being suspended from said structure by a flexible suspension arranged to permit the mobility of said anchor block.
  • This process allows for the development of a resonator mechanism that controls and prevents significant secondary oscillations around the X and Y directions in planes perpendicular to the XY oscillation plane, such as the XZ or YZ planes. This results in a more precise resonator mechanism.
  • said flexible suspension comprising, between said anchor block and a first intermediate mass, which is fixed to said structure directly or via a flexible plate along said first direction Z, a flexibleally guided transverse translation table comprising at least two transverse flexible blades or rods, preferably straight, extending along said second direction X and symmetrically around a transverse axis intersecting said pivot axis, the first secondary oscillation frequency measured in the second stage is around the Y direction in the XZ plane.
  • the fourth step consists of substituting or adapting said flexible suspension by modifying the number of transverse flexible blades or rods of the transverse translation table.
  • the fourth step consists of substituting or adapting said flexible suspension, by modifying the stiffness of the transverse flexible blades or rods of the transverse translation table to be different.
  • the stiffness is modified by changing the thickness or length of the transverse flexible blades or rods of the transverse translation table.
  • the fourth step consists of substituting or adapting said flexible suspension by increasing the distance between at least two transverse flexible blades or rods of the transverse translation table, or even between all the transverse flexible blades or rods of the transverse translation table.
  • said flexible suspension comprising, between said anchor block and a second intermediate mass, a longitudinal translation table with flexible guidance, and comprising at least two longitudinal flexible blades or rods, preferably straight, and extending along said third direction Y and symmetrically around a longitudinal axis crossing said pivot axis, the secondary oscillation frequency measured in the second stage is around the direction X in the YZ plane.
  • the fourth step consists of substituting or adapting said flexible suspension by modifying the number of longitudinal flexible blades or rods of the longitudinal translation table.
  • the fourth step consists of substituting or adapting said flexible suspension by modifying the stiffness of the longitudinal flexible blades or rods of the longitudinal translation table.
  • the stiffness is modified by changing the thickness or length of the longitudinal flexible blades or rods of the longitudinal translation table.
  • the fourth step consists of substituting or adapting said flexible suspension by increasing the distance between at least two longitudinal flexible blades or rods, or even between all the longitudinal flexible blades or rods of the longitudinal translation table.
  • the same reference oscillation frequency is maintained in the fourth step as that measured in the first step.
  • the invention relates to a method 40 for developing a clockwork resonator mechanism, for example such as that shown in the figures 1 to 3
  • the development method 40 according to the invention is described in detail below in the description.
  • This embodiment of a clockwork resonator mechanism 100 comprises a structure 1 and an anchor block 30, from which is suspended at least one inertial element 2 arranged to oscillate in a first degree of freedom in rotation RZ about a pivot axis D extending in a first direction Z.
  • the inertial element 2 comprises a balance wheel 20.
  • the balance wheel has a bone-like shape, the balance wheel comprising a straight segment with a bulb at each end.
  • Each bulb can include small weights 29 to adjust the inertia of the inertial element 2.
  • This inertial element 2 is subjected to restoring forces exerted by a virtual pivot 200 comprising a plurality of substantially longitudinal elastic blades 3, each fixed at one end to the anchor block 30, and at one end to the inertial element 2.
  • Each elastic blade 3 is deformable essentially in an XY plane perpendicular to the first direction Z.
  • the principle is to use the torsional flexibility of a translation table to better manage the torsional stiffness of the suspension.
  • the blades of the XY tables are oriented so that the direction of greatest torsional flexibility points towards the axis of rotation of the resonator. Their torsional flexibility is controlled by bringing the blades closer together.
  • the flexible suspension 300 comprises, between the anchor block 30 and a first intermediate mass 303, which is fixed to the structure 1 directly or via a flexible plate 301 along the first direction Z, a transverse translation table 32 with flexible guidance, and which comprises transverse blades 320 or transverse flexible rods, straight and extending along the second direction X.
  • the flexible suspension 300 further comprises, between the anchor block 30 and a second intermediate mass 305, a longitudinal translation table 31 with flexible guidance, which includes longitudinal blades 310 or longitudinal flexible rods, straight and extending along the third direction Y. And, between the second intermediate mass 305 and the first intermediate mass 303, the table of transverse translation 32 with flexible guidance includes transverse blades 320 or transverse flexible rods, straight and extending along the second direction X.
  • the longitudinal axis D1 intersects the transverse axis D2, and in particular the longitudinal axis D1, the transverse axis D2, and the pivot axis D are concurrent.
  • the longitudinal translation table 31 and the transverse translation table 32 each comprise at least two flexible blades or rods, each blade or rod being characterized by its thickness along the second direction X when the blade or rod extends along the third direction Y or vice versa, by its height along the first direction Z, and by its length along the direction in which the blade or rod extends, the length being for example at least five times greater than the height, the height being at least as great as the thickness, and more particularly at least five times greater than this thickness, and more particularly still at least seven times greater than this thickness.
  • the transverse translation table 32 comprises at least two transverse flexible blades or rods, parallel to each other and of the same length.
  • figures 1 to 3 illustrate a non-limiting variant with four parallel transverse blades, and, more particularly, each consisting of two half-blades arranged on two superimposed levels, extending one beyond the other along the first Z direction.
  • These half-blades may be either entirely free relative to one another, or joined by bonding or similar means, or by SiO2 growth in the case of a silicon embodiment, or similar.
  • the longitudinal translation table 31, when present since it is optional, may follow the same construction principle. The number, arrangement, and cross-section of these blades or rods may vary without departing from the present invention.
  • the principle is to use the torsional flexibility of a translation table to better manage the torsional stiffness of the suspension.
  • the blades of the XY tables are oriented so that the direction of greatest torsional flexibility points towards the axis of rotation of the resonator. Their torsional flexibility is controlled by moving the blades closer together or further apart.
  • the flexible suspension 300 comprises, between the anchor block 30 and a first intermediate mass 303, which is fixed to the structure 1 directly or via a flexible plate 301 along the first direction Z, a transverse translation table 32 with flexible guidance, and which comprises transverse blades 320 or transverse flexible rods, straight and extending along the second direction X.
  • the flexible suspension 300 further comprises, between the anchor block 30 and a second intermediate mass 305, a longitudinal translation table 31 with flexible guidance, and which comprises longitudinal blades 310 or longitudinal flexible rods, straight and extending along the third direction Y.
  • the transverse translation table 32 with flexible guidance comprises transverse blades 320 or transverse flexible rods, straight and extending along the second direction X.
  • the longitudinal axis D1 intersects the transverse axis D2, and in particular the longitudinal axis D1, the transverse axis D2, and the pivot axis D are concurrent.
  • the longitudinal translation table 31 and the transverse translation table 32 each comprise at least two flexible blades or rods, each blade or rod being characterized by its thickness along the second direction X when the blade or rod extends along the third direction Y or vice versa, and by its height along the first direction Z, and by its length according to the direction in which the blade or rod extends, the length being for example at least five times greater than the height, the height being at least as great as the thickness, and more particularly at least five times greater than this thickness, and more particularly still at least seven times greater than this thickness.
  • the transverse translation table 32 comprises at least two transverse flexible blades or rods, parallel to each other and of the same length.
  • figures 1 to 3 illustrate a non-limiting variant with four parallel transverse blades, and, more particularly, each consisting of two half-blades arranged on two superimposed levels, extending one beyond the other along the first Z direction.
  • These half-blades may be either entirely free relative to one another, or joined by bonding or similar means, or by SiO2 growth in the case of a silicon embodiment, or similar.
  • the longitudinal translation table 31, when present since it is optional, may follow the same construction principle. The number, arrangement, and cross-section of these blades or rods may vary without departing from the present invention.
  • the transverse blades or rods of the transverse translation table 32 have a first plane of symmetry, which is parallel to the transverse axis D2, and which passes through the pivot axis D.
  • the transverse blades or rods of the transverse translation table 32 have a second plane of symmetry, which is parallel to the transverse axis D2, and orthogonal to the pivot axis D.
  • the longitudinal blades or straight flexible rods 310 are rods with a square or circular cross-section whose height is equal to the thickness.
  • the resonator mechanism 100 comprises a plate 301, having at least one flexible blade 302 extending in a plane perpendicular to the pivot axis D, and fixed to the structure 1 and the first intermediate mass 303, and which is arranged to allow mobility of the first intermediate mass 303 along the first Z direction.
  • the plate 301 comprises at least two coplanar flexible blades 302. Such a plate 301 is, however, optional if the height of the blades of the translation tables XY is small compared to the height of the flexible blades 3, in particular less than one-third of the height of the flexible blades 3.
  • the flexible suspension 300 is a single piece, preferably made of silicon.
  • the resonator mechanism 100 comprises a single-piece assembly, which includes at least the anchoring block 30, a base of at least one inertial element 2, the flexible pivot 200, the flexible suspension 300, the first intermediate mass 303, and the transverse translation table 32, and includes at least one breakable element 319 arranged to secure the components of the single-piece assembly during their assembly on the structure 1, and whose breaking releases all the moving components of the single-piece assembly.
  • the monobloc assembly still includes at least the second intermediate mass 305 and the longitudinal translation table 31.
  • the resonator mechanism 100 can thus advantageously comprise at least two superimposed elementary monoblock assemblies, each of which includes one level of the anchoring block 30, and/or a base of at least one inertial element 2, and/or the flexible pivot 200, and/or the flexible suspension 300, and/or the first intermediate mass 303, and/or the transverse translation table 32, and/or a breakable element 319; each elementary monoblock assembly can be assembled to at least one other elementary monobloc assembly by bonding or similar, by mechanical assembly, or by SiO2 growth in the case of a silicon execution, or similar.
  • such an elementary monobloc assembly still includes at least one level of the second intermediate mass 305 and/or the longitudinal translation table 31.
  • a method of adjusting 40 of the clockwork resonator mechanism is used to avoid significant secondary oscillations in planes perpendicular to the XY plane.
  • the method 40 comprises a first step 41 of measuring a reference oscillation frequency of the inertial element 2 around the Z direction in the XY plane. To this end, the number of oscillations of the inertial element 2 per second is measured. For example, a measurement method using a laser system, which is known to those skilled in the art, is employed.
  • a secondary oscillation frequency of the inertial element 2 is measured in a plane substantially perpendicular to the XY plane.
  • the oscillation frequency of the inertial element 2 is measured either around the X direction in the YZ plane, or around the Y direction in the XZ plane.
  • the secondary oscillation frequency is measured around both the X and Y directions in both the XZ and YZ planes.
  • a third step, 43 involves comparing the secondary oscillation frequency(ies) to the reference oscillation frequency. Specifically, it is checked whether the secondary oscillation frequency is significantly different from the reference oscillation frequency by a multiple of the reference oscillation frequency. If the secondary oscillation frequency is significantly different from the reference oscillation frequency by a multiple of the reference oscillation frequency, the flexible suspension 300 does not require modification or replacement.
  • the process 40 includes a fourth step 44.
  • the fourth step 44 consists either of adapting the flexible suspension 300, or of substituting the flexible suspension 300 with another flexible suspension, so as to have a geometric configuration different from the flexible suspension 300.
  • the secondary oscillation frequency changes, so that one can choose a secondary oscillation frequency that is substantially different from a multiple of the reference oscillation frequency.
  • the same reference oscillation frequency is maintained in the fourth step as that measured in the first step.
  • only the secondary oscillation frequency or frequencies are modified by changing or substituting the flexible suspension, but the reference frequency remains unchanged.
  • the flexible suspension 300 is substituted with another flexible suspension whose oscillatory properties are already known, in particular the secondary oscillation frequency or frequencies.
  • the method 40 may include a preliminary step 39 of measuring the reference frequency and the secondary oscillation frequency(ies) of a plurality of flexible suspensions having different configurations or geometries.
  • the flexible suspensions are, for example, classified according to their oscillatory properties, in particular according to their secondary oscillation frequencies.
  • the method 40 may further include a fifth verification step 45 in which the secondary oscillation frequency is measured after the adaptation or substitution of the flexible suspension 300 to verify that a value other than a multiple of the frequency is obtained. reference oscillation.
  • the flexible suspension 300 can again be modified or replaced if the measured secondary oscillation frequency is not satisfactory.
  • the geometry of the flexible suspension 300 is modified. For example, by acting on the flexible blades or flexible rods.
  • the fourth step consists of substituting or adapting said flexible suspension 300 by modifying the number of transverse 320 and/or longitudinal 310 flexible blades or rods.
  • each translation table 31, 32 there may be more or fewer flexible blades or rods 310, 320 than the original configuration of the flexible suspension 300.
  • the number of transverse flexible blades or rods 320 of the transverse translation table 32 is modified.
  • the number of longitudinal flexible blades or rods 310 of the longitudinal translation table 31 is modified.
  • the diagram shows a flexible suspension 300 equipped with a longitudinal translation table 31 comprising six longitudinal flexible blades or rods 310 between the anchor block 30 and the second intermediate mass 305.
  • the flexible suspension 300 is also equipped with a transverse translation table 32 comprising six transverse flexible blades or rods 320 between the first intermediate mass 303 and the second intermediate mass 305.
  • each translation table 31, 32 comprises one or two additional flexible blades or rods 310, 320 compared to the original flexible suspension of the figure 3 .
  • a second embodiment of step 44 consists of substituting or adapting said flexible suspension 300 by modifying the stiffness of the longitudinal 310 or transverse 320 flexible blades or rods of the flexible suspension 300.
  • the thickness of the longitudinal 310 or transverse 320 flexible blades or rods can be adjusted, or the length of the longitudinal 310 or transverse 320 flexible blades or rods can be adjusted to modify their stiffness.
  • the 310, 320 flexible blades or rods of the 300 flexible suspension are thicker than the flex blades of the original flexible suspension.
  • the fourth step 44 consists of increasing the distance between at least two longitudinal 310 and/or transverse 320 flexible blades or rods of the longitudinal 31 and/or transverse 32 translation table of the flexible suspension 300. By moving two flexible blades or rods 310, 320 apart, the secondary oscillation frequencies are modified.
  • the flexible suspension 300 comprises, for each longitudinal translation table 31 or transverse translation table 32, two groups of flexible blades or rods 310, 320, separated from each other.
  • the first three blades or rods have a spacing of the same initial distance between them, and the last three blades have a spacing of the same initial distance between them.
  • the third and fourth flexible leaves are spaced a second distance apart, respectively dX and/or dY , which is greater than the first distance.
  • Other flexible suspension 300 configurations are, of course, possible. For example, the distances between all the leaves are equal, but with a greater or lesser distance than the original configuration.
  • these adaptations or substitutions modify the secondary oscillation frequencies in a way that to ensure that they are far from the value of a multiple of the reference oscillation frequency of the inertial element in the XY plane.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Claims (12)

  1. Verfahren zur Justierung (40) eines Resonatormechanismus (100) in der Uhrmacherei, umfassend eine Trägerstruktur (1) und einen Verankerungsblock (30), an dem mindestens ein Trägheitselement (2) aufgehängt ist, das so angeordnet ist, dass es um einen ersten Freiheitsgrad in einer Drehbewegung RZ um eine erste Richtung Z verlaufende Drehachse (D) oszilliert, wobei das Trägheitselement (2) Rückstellkräften eines flexiblen Drehgelenks (200) unterliegt, das eine Vielzahl im Wesentlichen längs ausgerichteter elastischer Lamellen (3) umfasst, von denen jede mit einem ersten Ende an dem Verankerungsblock (30) und mit einem zweiten Ende an dem Trägheitselement (2) befestigt ist, wobei jede der elastischen Lamellen (3) im Wesentlichen in einer Ebene XY deformierbar ist, die senkrecht zur genannten ersten Richtung Z verläuft, wobei der Verankerungsblock (30) mittels einer flexiblen Aufhängung (300), die so ausgestaltet ist, dass sie die Beweglichkeit des Verankerungsblocks (30) erlaubt, an der Trägerstruktur (1) aufgehängt ist, dadurch gekennzeichnet, dass es umfasst:
    - einen ersten Schritt (41) zum Messen einer Referenzoszillationsfrequenz des Trägheitselements (2) um die Richtung Z in der Ebene XY;
    - einen zweiten Schritt (42) zum Messen mindestens einer sekundären Oszillationsfrequenz des Trägheitselements (2) um die Richtung X in der Ebene YZ oder um die Richtung Y in der Ebene XZ;
    - einen dritten Schritt (43) zum Vergleichen der sekundären Oszillationsfrequenz mit der Referenzoszillationsfrequenz, um zu überprüfen, dass die sekundäre Oszillationsfrequenz einen Wert aufweist, der sich wesentlich von einem Vielfachen der Referenzoszillationsfrequenz unterscheidet; und
    - falls die sekundäre Oszillationsfrequenz einen Wert aufweist, der nahe bei oder im Wesentlichen gleich einem Vielfachen der Referenzoszillationsfrequenz liegt, einen vierten Schritt (44) zur Anpassung der flexiblen Aufhängung (300) oder zum Austausch der flexiblen Aufhängung (300) durch eine andere flexible Aufhängung, um eine modifizierte Konfiguration der flexiblen Aufhängung (300) zu erhalten, sodass die sekundäre Oszillationsfrequenz sich wesentlich von einem Vielfachen der Referenzoszillationsfrequenz unterscheidet.
  2. Verfahren zur Abstimmung nach Anspruch 1, dadurch gekennzeichnet, dass die flexible Aufhängung (300) zwischen dem Verankerungsblock (30) und einer ersten Zwischenmasse (303), welche an der Trägerstruktur (1) direkt oder über eine entlang der ersten Richtung Z flexible Platte (301) befestigt ist, einen querbeweglichen Tisch (32) mit flexiblem Führungssystem umfasst, welcher mindestens zwei vorzugsweise geradlinige, quer ausgerichtete flexible Lamellen oder Stäbe (320) enthält, die sich entlang der zweiten Richtung X in Symmetrie um eine Querachse (D2) erstrecken, die die Drehachse (D) kreuzt, wobei die in dem zweiten Schritt (42) gemessene erste sekundäre Oszillationsfrequenz um die Richtung Y in der Ebene XZ verläuft.
  3. Verfahren zur Abstimmung nach Anspruch 2, dadurch gekennzeichnet, dass der vierte Schritt (44) darin besteht, die flexible Aufhängung (300) zu ersetzen oder anzupassen, indem die Anzahl der quer ausgerichteten flexiblen Lamellen oder Stäbe (320) des querbeweglichen Tisches (32) verändert wird.
  4. Verfahren zur Abstimmung nach Anspruch 2, dadurch gekennzeichnet, dass der vierte Schritt (44) darin besteht, die flexible Aufhängung (300) zu ersetzen oder anzupassen, indem die Steifigkeit der quer ausgerichteten flexiblen Lamellen oder Stäbe (320) des querbeweglichen Tisches (32) verändert wird.
  5. Verfahren zur Abstimmung nach Anspruch 4, dadurch gekennzeichnet, dass die Steifigkeit der quer ausgerichteten flexiblen Lamellen oder Stäbe (320) durch Veränderung der Dicke oder Länge der Lamellen oder Stäbe (320) des querbeweglichen Tisches (32) angepasst wird.
  6. Verfahren zur Abstimmung nach Anspruch 2, dadurch gekennzeichnet, dass der vierte Schritt (44) darin besteht, die flexible Aufhängung (300) zu ersetzen oder anzupassen, indem der Abstand (dy) zwischen mindestens zwei quer ausgerichteten flexiblen Lamellen oder Stäben (320) des querbeweglichen Tisches (32), oder zwischen allen quer ausgerichteten flexiblen Lamellen oder Stäben (320) des querbeweglichen Tisches (32) vergrößert wird.
  7. Verfahren zur Abstimmung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die flexible Aufhängung (300) zwischen dem Verankerungsblock (30) und einer zweiten Zwischenmasse (305) einen längsbeweglichen Tisch (31) mit flexiblem Führungssystem umfasst, der mindestens zwei vorzugsweise geradlinige, längs ausgerichtete flexible Lamellen oder Stäbe (310) enthält, die sich entlang der dritten Richtung Y in Symmetrie um eine Längsachse (D1) erstrecken, welche die Drehachse (D) kreuzt, wobei die in dem zweiten Schritt (42) gemessene sekundäre Oszillationsfrequenz um die Richtung X in der Ebene YZ verläuft.
  8. Verfahren zur Abstimmung nach Anspruch 7, dadurch gekennzeichnet, dass der vierte Schritt (44) darin besteht, die flexible Aufhängung (300) zu ersetzen oder anzupassen, indem die Anzahl der längs ausgerichteten flexiblen Lamellen oder Stäbe (310) des längsbeweglichen Tisches (31) verändert wird.
  9. Verfahren zur Abstimmung nach Anspruch 7, dadurch gekennzeichnet, dass der vierte Schritt (44) darin besteht, die flexible Aufhängung (300) zu ersetzen oder anzupassen, indem die Steifigkeit der längs ausgerichteten flexiblen Lamellen oder Stäbe (310) des längsbeweglichen Tisches (31) verändert wird.
  10. Verfahren zur Abstimmung nach Anspruch 9, dadurch gekennzeichnet, dass die Steifigkeit der längs ausgerichteten flexiblen Lamellen oder Stäbe (310) durch Veränderung der Dicke oder Länge der Lamellen oder Stäbe (310) des längsbeweglichen Tisches (31) angepasst wird.
  11. Verfahren zur Abstimmung nach Anspruch 7, dadurch gekennzeichnet, dass der vierte Schritt (44) darin besteht, die flexible Aufhängung (300) zu ersetzen oder anzupassen, indem der Abstand (dx) zwischen mindestens zwei längs ausgerichteten flexiblen Lamellen oder Stäben (310) oder zwischen sämtlichen längs ausgerichteten Lamellen oder Stäben (310) des längsbeweglichen Tisches (31) vergrößert wird.
  12. Verfahren zur Abstimmung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass in dem vierten Schritt (44) dieselbe Referenzoszillationsfrequenz beibehalten wird wie diejenige, die im ersten Schritt (41) gemessen wurde.
EP23162547.6A 2023-03-17 2023-03-17 Verfahren zur verringerung von schwingungen ausserhalb der ebene in einem resonatormechanismus mit flexibler drehführung Active EP4432019B1 (de)

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EP23162547.6A EP4432019B1 (de) 2023-03-17 2023-03-17 Verfahren zur verringerung von schwingungen ausserhalb der ebene in einem resonatormechanismus mit flexibler drehführung
JP2024032987A JP7700299B2 (ja) 2023-03-17 2024-03-05 面外振動を低減するために回転可撓性ガイドを有する振動子機構を作り出す方法
US18/599,503 US20240310783A1 (en) 2023-03-17 2024-03-08 Method for developing a resonator mechanism with a rotating flexible guide to reduce out-of-plane oscillations
CN202410306813.7A CN118672105A (zh) 2023-03-17 2024-03-18 用于设定具有旋转柔性引导件的谐振器机构以减少平面外摆动的方法

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EP4432019A1 (de) 2024-09-18

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