EP4386741A1 - Elektromechanische vorrichtung mit variabler resonanzfrequenz und akustische vorrichtung damit - Google Patents

Elektromechanische vorrichtung mit variabler resonanzfrequenz und akustische vorrichtung damit Download PDF

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Publication number
EP4386741A1
EP4386741A1 EP23215142.3A EP23215142A EP4386741A1 EP 4386741 A1 EP4386741 A1 EP 4386741A1 EP 23215142 A EP23215142 A EP 23215142A EP 4386741 A1 EP4386741 A1 EP 4386741A1
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EP
European Patent Office
Prior art keywords
loudspeaker
frequency
mobile
piezoelectric layer
electrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP23215142.3A
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English (en)
French (fr)
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EP4386741B1 (de
Inventor
Romain LIECHTI
Fabrice Casset
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • G10K9/122Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
    • G10K9/125Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means with a plurality of active elements
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • H04R17/10Resonant transducers, i.e. adapted to produce maximum output at a predetermined frequency
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003Mems transducers or their use

Definitions

  • the technical field of the invention is that of microsystems, in particular microsystems for acoustic applications.
  • the present invention relates to an electromechanical device and, in particular, to an electromechanical device whose resonance frequency can be modulated.
  • the present invention also relates to an acoustic device making use of an electromechanical device according to the invention.
  • a loudspeaker is used to transform an electrical signal into sound pressure.
  • speakers have been miniaturized for integration into computers, cell phones and wireless headphones.
  • the loudspeaker is an electro-mechano-acoustic transducer.
  • the operation of the loudspeaker involves the actuation of a membrane, coupled to the ambient air.
  • the electrical signal passes through a first electromechanical transducer which converts voltage into displacement.
  • a mechanical-acoustic transducer very often a membrane, then converts this displacement into acoustic pressure.
  • a good speaker is one that reproduces all frequencies in the audio band (20 Hz to 20 kHz) at the same amplitude, with a low distortion rate.
  • the lowest frequency at which a loudspeaker effectively produces sound is determined by the resonant frequency of the mechanical-acoustic transducer.
  • the membrane guidance system is more rigid and the mass of the membrane is lower, which increases the resonance frequency of the system and therefore reduces its bandwidth.
  • a sealed cavity is necessary to avoid destructive interference between the front and rear sound waves of the speaker. This hermetic cavity increases the apparent stiffness of the system and therefore its resonant frequency, thus reducing its bandwidth.
  • the level of pressure radiated by a loudspeaker depends on the volume of air accelerated by the loudspeaker. This volume of accelerated air depends on the product of the surface area and the maximum displacement of the membrane. In a context of miniaturization, the surface area of the membrane is greatly reduced, and a significant displacement is therefore necessary to obtain a satisfactory pressure level.
  • piezoelectric transduction Another means of transduction showing notable performance is piezoelectric transduction. Although not conferring displacements as large as electromagnetic transduction, piezoelectric transduction has the advantage of being compatible with micro-manufacturing processes. It is for example possible to use the bimetallic effect and an actuator positioned on a membrane in order to obtain relatively large displacements. However, this is not the only possible configuration. For example, in another configuration, the piezoelectric actuators are offset from the membrane, this solution making it possible to produce a “pistonic” movement of the latter (see for example the patent US9980051 B2 ).
  • Fig. 1 shows the frequency response of a MEMS loudspeaker, with a 100 mm 3 rear cavity and without this rear cavity. Increasing the resonant frequency removes much of the pressure radiated at low frequencies.
  • an electromechanical device whose frequency can be varied, and in particular lowered, according to needs.
  • an acoustic device equipped with such an electromechanical device so as to have a loudspeaker whose resonant frequency can vary, thus making it possible to reproduce all the frequencies of the audio band with substantially the same amplitude, with a low distortion rate, the loudspeaker also being compatible with micro-fabrication techniques.
  • the invention offers a solution to the problems mentioned above, by proposing an electromechanical device whose frequency can be varied, and in particular lowered, according to needs.
  • the invention also proposes an acoustic device making use of such an electromechanical device and in which the resonant frequency of the speaker(s) adapts to the frequency or frequencies of the acoustic signal emitted by said speaker(s).
  • the electromechanical device according to the invention is remarkable in that it comprises an electrical circuit connected to the second piezoelectric layer in parallel to the capacitance formed by said second layer and comprising an adjustable capacitance which can take a negative value.
  • the invention it is possible to vary the resonance frequency of the mobile element(s) (and therefore of the mobile mechanical structure) by varying the value of the adjustable capacitance.
  • the electromechanical device according to a first aspect of the invention may have one or more complementary characteristics among the following, considered individually or in all technically possible combinations.
  • the adjustable capacitance which can take a negative value is produced using an operational amplifier.
  • the adjustable capacitance which can take a negative value is produced by micro-fabrication.
  • the mobile mechanical structure consists of a mobile mechanical element in the form of a disc-shaped membrane, the first piezoelectric layer and the second piezoelectric layer being arranged on the surface of said membrane.
  • the mobile mechanical structure comprises a rigid surface configured to be able to perform a translation movement perpendicular to its surface, the mobile mechanical element(s) of the mobile mechanical structure being configured to actuate the rigid surface according to said movement.
  • each mobile mechanical element is produced using a beam embedded at one of its ends and guided, the first piezoelectric layer being arranged on a first part of an upper surface of the beam and the second piezoelectric layer being arranged on a second part of the upper surface of the beam.
  • each mobile element is made using a beam embedded at its two ends.
  • the resonant frequency of the loudspeaker is adjustable around the rest frequency of said loudspeaker and the digital signal processing means is configured to send the instantaneous frequency of the signal to the speaker, the latter being configured to adjust its resonant frequency to the instantaneous frequency of the electrical audio signal received on the input port.
  • audio electrical signal means an electrical signal corresponding to an electrical signal intended to be converted into an audio signal by one or more speakers.
  • the acoustic device according to a second aspect of the invention may have one or more complementary characteristics among the following, considered individually or in all technically possible combinations.
  • the acoustic device comprises a bandpass filter configured to isolate, from the electrical audio signal received on the input port, the electrical audio signal at a predetermined frequency, the electrical signal output from the bandpass filter being sent to the loudspeaker, the bandpass filter being configured to adjust its predetermined frequency to the instantaneous frequency of the signal received on the input port and determined by the digital signal processing means.
  • the resonance frequency of each speaker of the plurality of speakers is adjustable around the rest resonance frequency of the speaker considered in a range of predetermined frequencies
  • the means for processing a digital signal is configured to send, to each speaker of the plurality of speakers, the instantaneous frequency of the signal received on the input port having the highest amplitude in the predetermined frequency range associated with the loudspeaker considered, the latter being configured to adjust its resonant frequency to this instantaneous frequency, the bandpass filter associated with the loudspeaker considered being configured to adjust its predetermined frequency to this same instantaneous frequency .
  • the acoustic device according to a third aspect of the invention may have one or more complementary characteristics among the following, considered individually or in all technically possible combinations.
  • the resting resonance frequencies of the plurality of speakers are distributed based on the harmonics of a stringed instrument.
  • a first aspect of the invention illustrated in [ Fig. 2] to [Fig. 7 ] relates to an electromechanical device comprising at least one mobile mechanical structure SM (hereinafter mobile structure), said mobile structure SM comprising at least one mobile mechanical element EM (hereinafter mobile element) and, for each of these mobile elements EM, a first piezoelectric layer CP1, said first layer CP1 being arranged on a first part of the mobile element EM so as to be able to actuate said mobile element EM, and a second piezoelectric layer CP2, said second layer CP2 being arranged on a second part of the mobile element EM, distinct from the first part, so as to be able to convert the mechanical energy associated with the movement of the mobile element EM into electrical energy (thus the first layer CP1 and the second layer CP2 are separated from each other the other), the second layer CP2 forming a capacitor.
  • mobile structure comprising at least one mobile mechanical element EM (hereinafter mobile element) and, for each of these mobile elements
  • the electromechanical device according to the invention is remarkable in that it comprises an electrical circuit CEL connected to the second piezoelectric layer CP2, said electrical circuit comprising an adjustable capacitance which can take a negative value. Furthermore, this adjustable capacitance is in parallel with the capacitance formed by the second piezoelectric layer CP2 so that the equivalent capacitance can take a positive value or a negative value according to needs.
  • a piezoelectric layer CP1, CP2 acts as a transducer. Also, the electrical components connected to such a layer have an influence on the mechanical behavior of the mobile element EM on which said piezoelectric layer CP1, CP2 is deposited.
  • the electromechanical structure according to the invention is represented by an equivalent electrical circuit comprising a series resistor R g representing the output resistance of the amplifier (in charge of actuating the mobile element EM), a capacitor C pa representing the capacitive effect of the first piezoelectric layer CP1, a transformer ⁇ a representing the electromechanical transduction of the first piezoelectric layer CP1 (in other words, representing the conversion of the electrical energy supplied by the amplifier into mechanical energy of the mobile element EM), a resistance R ms representing the viscous losses in the mechanical domain suffered by the mobile element EM, an inductance M ms representing the mobile mass of the mobile element EM, a capacitance C ms representing the apparent stiffness of the mobile element EM relative to at the fixing point or points of fixing of said mobile element EM, a transformer S d representing the mechano-acoustic transduction, an impedance
  • the resonance frequency of the mobile element EM is increased or decrease by varying the negative value of the capacitance C n as shown in [ Fig. 3 ].
  • the frequency response of the mobile element EM is represented for different values of C ps + C n located between -1nF and -10nF.
  • the capacitance values are chosen so that the resonance frequency can be varied within a range of +/- 20% around the rest resonance frequency (corresponding to the situation in which the CEL circuit in parallel with the capacity formed by the second layer is open).
  • the adjustable capacitance is achieved using an operational amplifier.
  • R 1 , R 2 and VS not ′ take positive values, at least one of which may vary.
  • the value of VS not ′ can be varied.
  • the mobile structure SM according to the invention can adopt different configurations depending on the intended use.
  • the mobile structure SM consists of a mobile element EM in the form of a disk-shaped membrane, the first piezoelectric layer CP1 and the second piezoelectric layer CP2 being arranged on the surface of said membrane.
  • the diameter of the disc-shaped membrane is between 1 mm and 25 mm.
  • the first piezoelectric layer CP1 is located in a part of the surface of the membrane separated from the part of the surface of the membrane where the second piezoelectric layer CP2 is located, the separation between the two parts being located at the level of the inflection of the membrane (in a section according to the diameter of the latter), generally at 2/3 of the radius from the center of the membrane.
  • the first piezoelectric layer CP1 forms a disk in the center of the membrane and the second piezoelectric layer CP2 forms a ring around this disk.
  • the first layer CP1 forms a first ring and the second layer CP2 forms a second ring surrounding the first ring.
  • the mobile structure SM comprises a rigid surface SR configured to be able to carry out a translation movement perpendicular to its surface (movement represented by the dotted arrow in the figure), the mobile element(s) EM of the structure SM being configured to actuate the rigid surface SR according to said movement.
  • the equivalent electrical diagram and the operating principle remain the same as in the case introduced previously: the influence of the second piezoelectric layer CP2 present on each mobile element EM makes it possible to modify the resonance frequency of the mobile structure SM in his outfit.
  • each mobile element EM is produced using a beam embedded at one of its ends at the level of a frame CR and guided (taking into account the symmetry of the structure), the first piezoelectric layer CP1 being arranged on a first part of an upper surface of the beam and the second piezoelectric layer CP2 being arranged on a second part of the upper surface of the beam, distinct from the first part.
  • the boundary between the first part and the second part is located at a point of inflection of the beam (when the latter is set in motion).
  • this boundary is located at mid-length of the beam, that is to say at a distance L/2 from one end of the beam, L being the length of the beam.
  • each mobile element is made using a beam embedded at its two ends.
  • An electromechanical device can advantageously be used to produce a HP loudspeaker whose resonance frequency is variable, the resonance frequency of the loudspeaker being given by the frequency of the electromechanical device of said loudspeaker.
  • each HP loudspeaker comprises a mobile structure SM produced using a membrane such that presented to the [ Fig. 5A ] or at the [ Fig. 5B ].
  • each HP loudspeaker comprises a control circuit configured to determine, from a set frequency, the value of the negative capacitance making it possible to obtain a resonance frequency equal to the set frequency, the control circuit control being further configured to control the electrical circuit CEL of the electromechanical device according to the invention in order to obtain the value of the capacitance (and therefore the resonance frequency) desired.
  • the control circuit is configured to determine the movement of the speaker using the second piezoelectric layer CP2 and, from this movement, the vibration frequency of the speaker.
  • Acoustic device comprising an electromechanical device with variable resonance frequency
  • the resonant frequency of the HP loudspeaker is adjustable around the rest frequency of said HP loudspeaker and the digital signal processing means MT is configured to send the instantaneous frequency of the signal to the HP loudspeaker, the latter being configured to, from this instantaneous frequency, adjust its resonance frequency.
  • the acoustic device DA can for example be integrated into a mobile phone, a tablet or any other equipment requiring small speakers and/or only requiring to reproduce a single frequency although variable over time (e.g. a buzzer in an electronic device).
  • the loudspeaker being produced using an electromechanical device DE according to a first aspect of the invention, it is possible to control the frequency of the latter by intermediate of the electrical circuit CEL of the electromechanical device DE and measure the movement of the speaker HP (and possibly, from this movement deduce the vibration frequency) and to control the variable capacitance in order to adjust the resonance frequency of the high -HP speaker.
  • the acoustic device DA comprises a band pass filter FPB configured to isolate, in the electrical audio signal received on the input port IN, the electrical audio signal at a predetermined frequency, the filtered electrical signal at the output of the filter being sent to the HP speaker.
  • the predetermined frequency of the FPB bandpass filter is adjusted according to the instantaneous frequency of the audio electrical signal received on the IN input port.
  • the FPB bandpass filter makes it possible to filter the parasitic signals to send to the HP loudspeaker only the signal at the instantaneous frequency of the input signal, the latter being by elsewhere the resonant frequency of the HP speaker.
  • the predefined frequency of the FPB bandpass filter and the resonant frequency of the HP loudspeaker are slaved to the instantaneous frequency of the input signal.
  • the instantaneous frequency of the input audio electrical signal is determined using a Short-Time Fourrier Transform (TFCT or STFT).
  • TFCT Short-Time Fourrier Transform
  • STFT Short-Time Fourrier Transform
  • Other methods well known to those skilled in the art can be used, such as a Hilbert Transform or even a derivative of the phase as a function of time.
  • the acoustic device DA is only configured to emit a single frequency, the instantaneous frequency of the input signal (this frequency can however vary over time). It can, however, be interesting to be able to transmit in a plurality of frequencies, for example to reproduce the sound emitted by a stringed instrument or to vary the sounds of a buzzer.
  • the acoustic device DA according to the invention is remarkable in that the resonance frequency of each HP speaker of the plurality of HP speakers is adjustable around the rest resonance frequency of the HP speaker considered. in a predetermined frequency range, and in that the digital signal processing means MT is configured to send, to each HP speaker of the plurality of HP speakers, the instantaneous frequency of the signal received on the port of input IN having the highest amplitude in the predetermined frequency range associated with the HP loudspeaker considered, said HP loudspeaker being configured to adjust its resonant frequency to this instantaneous frequency.
  • the FPB bandpass filter associated with the HP speaker considered is configured to adjust its predetermined frequency to this same frequency. instantaneous.
  • the frequency associated with the greatest signal amplitude is the one on which the control of the frequency of the signal will take place. resonance of the HP speaker and the predefined frequency of the FPB bandpass filter.
  • each HP speaker of the plurality of HP speakers is associated with a rest resonance frequency, different from the rest resonance frequency of the other HP speakers.
  • each HP loudspeaker of the plurality of HP loudspeakers is adjustable around the rest resonance frequency of the HP loudspeaker considered in a predetermined frequency range (this frequency range therefore defining a frequency band) .
  • There [ Fig. 11 ] represents the frequency response of eight HP loudspeakers, each curve being associated with a HP loudspeaker, each peak corresponding to the rest resonance frequency of the loudspeaker, the gray band surrounding each of the peaks representing the band of speaker frequency in which the resonant frequency can be adjusted.
  • the resting resonant frequencies of the HP speakers of the plurality of HP speakers are distributed according to the harmonics of a stringed instrument, for example a guitar, a piano, etc.
  • a stringed instrument for example a guitar, a piano, etc.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Circuit For Audible Band Transducer (AREA)
EP23215142.3A 2022-12-12 2023-12-08 Elektromechanische vorrichtung mit variabler resonanzfrequenz und akustische vorrichtung damit Active EP4386741B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR2213178A FR3143170B1 (fr) 2022-12-12 2022-12-12 Dispositif électromécanique à fréquence de résonance variable et dispositif acoustique associé

Publications (2)

Publication Number Publication Date
EP4386741A1 true EP4386741A1 (de) 2024-06-19
EP4386741B1 EP4386741B1 (de) 2025-09-03

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US (1) US12470876B2 (de)
EP (1) EP4386741B1 (de)
FR (1) FR3143170B1 (de)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3000354A1 (fr) * 2012-12-20 2014-06-27 Commissariat Energie Atomique Dispositif a membrane a deplacement controle
US9980051B2 (en) 2014-05-14 2018-05-22 USound GmbH MEMS loudspeaker having an actuator structure and a diaphragm spaced apart therefrom

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8520869B2 (en) * 2010-03-29 2013-08-27 Panasonic Corporation Piezoelectric acoustic transducer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3000354A1 (fr) * 2012-12-20 2014-06-27 Commissariat Energie Atomique Dispositif a membrane a deplacement controle
US9980051B2 (en) 2014-05-14 2018-05-22 USound GmbH MEMS loudspeaker having an actuator structure and a diaphragm spaced apart therefrom

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
KODAMA ET AL: "A study of sound shielding control of curved piezoelectric sheets connected to negative capacitance circuits", JOURNAL OF SOUND AND VIBRATION, ELSEVIER, AMSTERDAM , NL, vol. 311, no. 3-5, 31 October 2007 (2007-10-31), pages 898 - 911, XP022453325, ISSN: 0022-460X, DOI: 10.1016/J.JSV.2007.09.035 *
U. A. KORDE ET AL: "The effect of a negative capacitance circuit on the out-of-plane dissipation and stiffness of a piezoelectric membrane", SMART MATERIALS AND STRUCTURES, IOP PUBLISHING LTD., BRISTOL, GB, vol. 17, no. 3, 1 June 2008 (2008-06-01), pages 35017, XP020137041, ISSN: 0964-1726 *

Also Published As

Publication number Publication date
FR3143170A1 (fr) 2024-06-14
US12470876B2 (en) 2025-11-11
EP4386741B1 (de) 2025-09-03
US20240196136A1 (en) 2024-06-13
FR3143170B1 (fr) 2024-11-29

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