EP4359358A1 - Élément en matériau cassant et friable à bord structuré, produit intermédiaire et procédé de fabrication dudit élément - Google Patents

Élément en matériau cassant et friable à bord structuré, produit intermédiaire et procédé de fabrication dudit élément

Info

Publication number
EP4359358A1
EP4359358A1 EP22733119.6A EP22733119A EP4359358A1 EP 4359358 A1 EP4359358 A1 EP 4359358A1 EP 22733119 A EP22733119 A EP 22733119A EP 4359358 A1 EP4359358 A1 EP 4359358A1
Authority
EP
European Patent Office
Prior art keywords
area
disc
intermediate product
brittle material
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22733119.6A
Other languages
German (de)
English (en)
Inventor
Andreas Ortner
Fabian Wagner
Markus HEISS-CHOUQUET
Vanessa GLÄßER
Heong Leong TEOH
Shiuh Liang LEE
Michael DRISCH
Ulrich Peuchert
Guangjun Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Schott AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott AG filed Critical Schott AG
Publication of EP4359358A1 publication Critical patent/EP4359358A1/fr
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
    • C03C17/09—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
    • C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
    • C03C21/002—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam

Definitions

  • the invention relates generally to the manufacture of elements from brittle material.
  • the invention relates to the manufacture of such elements by machining contours out of a disc-shaped workpiece.
  • US 2018/215647 A1 describes a method for introducing continuous channels into a plate-shaped glass element using an ultra-short pulse laser, the pulses of which are formed by focus-extending optics, and a subsequent etching process, which removes the channels that are adjacent to one another by etching away the material bridges in between. so that a structured component with a given geometry and special edge features ("calottes") is released and manufactured.
  • a structured component with a given geometry and special edge features (“calottes"
  • US 10941069 B2 describes a processing method for a plate-like workpiece with a layer of glass or glass ceramic, which is broken down into a number of incompletely separated sub-segments by laser-selective etching, with the sub-segments initially remaining connected to the rest of the workpiece by a network-like connection, with this residual connection still has an undercut on the top and bottom, i.e. structured (in only a partial area of the thickness).
  • US 10626040 B2 discloses a disc-shaped glass article that has been structured with two areas of damage, the second area of damage having at least one interruption, and which is separated after an etching process.
  • the damage fields can partially overlap and are introduced into the material with a laser process, which can also include ultra-short pulses.
  • the invention is therefore based on the object of producing small components made of glass and glass ceramics by laser-assisted etching with consistent quality and at the same time simplifying their handling during production and for further processing.
  • the basic idea here is that the small product produced after the laser-based contour definition step and subsequent etching remains connected to an adjacent holding section or other adjacent products by at least one web-like connection.
  • the holding section can fix one or more structured small products and can be implemented in a variety of geometric shapes such as one or more strips or as a surrounding frame.
  • the invention provides a disk-shaped element made of brittle material, with two opposite, in particular parallel, side surfaces and a circumferential edge surface, which determines the outer contour of the disk-shaped element, the edge surface having at least a first area and at least a second area, the first Area differs from the second area in its surface structure.
  • the first region has, in particular, an etched surface.
  • the second area represents a fracture surface.
  • the area of the at least one first area is larger than the area of the at least one second area. If there are several first and second areas, then this condition applies correspondingly to the added areas. Accordingly, in this case the total area of the first areas is larger than the total area of the second areas.
  • the first and second areas arranged side by side along the edge surface, or along the contour defined by the edge surface.
  • Particularly preferred brittle materials are glass ceramics and in particular glass.
  • the brittle material element is made by severing from a larger intermediate product. With the connection in the intermediate product, the handling of the element is significantly simplified.
  • the invention also provides a disk-shaped intermediate product made of brittle material for the production of the element, the intermediate product having a holding section and an element connected to the holding section via at least one connecting section, the element and the connecting section having an edge surface with an etched surface.
  • the width of the connecting section at the transition to the element is smaller than the length of the contour formed by the edge surface with the etched surface, so that by separating the element by breaking the brittle material at the connecting section, a separated element made of brittle material can be obtained, the edge surface of which is at least has a first area and at least one second area, the surface structure of the first area differing from the second area, the first area having an etched surface, and the second area being a fracture surface, and the area of the at least one first area is larger than the area of the at least one second area, and wherein the first and second areas are arranged next to one another in the direction along the edge surface or the outer contour defined by the edge surface.
  • the intermediate product made of brittle material can be produced by a method in which a disc of brittle material is provided and irradiated with a laser, the brittle material of the disc being at least partially transparent to the laser, the laser beam of the laser inside the disc material modifications.
  • the laser beam is scanned across the disk along a path such that the material modifications are adjacent to each other on the path.
  • the disk is then subjected to an etching process, with the material modifications being widened by the etching process to form channels that finally connect so that the disk is split along the path.
  • the path defines the contour of an element, which is connected to a holding portion via a connecting portion, so that a disc-shaped intermediate product according to this disclosure is obtained.
  • the connecting section can then be severed so that the element is detached from the holding section.
  • Fig. 1 shows a perspective view of a disc-shaped element made of brittle material.
  • FIG. 2 shows a section of the surface structure of a first area.
  • FIG. 3 shows different variants of intermediate products with elements made of brittle material, which are each connected to a holding section.
  • 4 to 6 show embodiments of several elements made of brittle material connected to a common holding section.
  • FIG. 7 illustrates process steps for producing an element 10 from brittle material.
  • Figure 8 shows an embodiment of a tiled intermediate.
  • FIG. 9 shows an apparatus for producing an intermediate product from brittle material.
  • FIG. 10 shows an element made of brittle material in plan view.
  • FIG. 11 shows, for the element of FIG. 10, a diagram of the distance from the position of the edge surface to the center of the surface as a function of the distance along the contour of the element.
  • Fig. 12 shows an example of an intermediate product with an element made of brittle material in the form of a gear.
  • Figures 16 and 17 show two electron micrographs of the edge face of an element made of brittle material.
  • Figure 19 shows Weibull plots of fracture toughness of glass elements.
  • Fig. 20 shows an intermediate product with a rectangular element made of brittle material.
  • 21 shows an embodiment with an element made of brittle material.
  • Fig. 22 shows an example of an electro-optical device with one element.
  • FIG. 23 shows an arrangement with an intermediate product on a carrier for separating elements.
  • FIG. 24 shows another arrangement for separating an element from a holding portion.
  • Fig. 1 shows a perspective view of a disc-shaped element 10 made of brittle material.
  • glass and glass ceramics in particular come into consideration as brittle materials. These materials are characterized, inter alia, by a generally high transparency, for example an average of more than 80% in the range from 270 nm to 2700 nm, which facilitates the preferred production, explained in more detail below, using a laser-assisted etching process.
  • the disc-shaped element 10 made of brittle material has two opposite, in particular parallel, side faces 100, 101.
  • the outer contour of the element 10 is formed by a peripheral edge surface 13 .
  • the edge surface 13 is subdivided into different sections or areas arranged next to one another. At least one first area 15 and at least one second area 17 are present.
  • the first region 15 has an etched surface.
  • the second area 17, on the other hand, is a fracture surface.
  • the area of the first area or areas 15 is larger than the area of the second area or areas 17.
  • the areas are not arranged one above the other as superimposed strips running parallel to the side areas 100, 101, but lie in the direction of tracing the contour, ie along the edge surface 13 next to one another. Accordingly, the one or more second regions 17 of the edge surface 13 adjoin at least one of the edges 19, 20, at which the edge surface 13 merges into the side surface 100, 101.
  • two second areas 17 are present. Since the second areas 17 are spaced apart from one another, a first area 15 with an etched surface is present between these two second areas 17 . A further first area extends along the edge surface 13 around the element 10 and adjoins the second areas 17 in each case at the two transitions facing away from one another. It is possible to provide only a single second area 17 . If the edge surface is not otherwise treated, then only a single first area 15 is present. However, an embodiment is preferred which, as in the example shown, has two or more second regions 17 spaced apart from one another. This is advantageous in order to enable a stable connection to the holding section while the element 10 can be easily separated.
  • the at least one second region 17 or the plurality of second regions 17 together have a width of at least 0.5%, preferably at least one percent of the largest lateral dimension of the element 10.
  • the largest lateral dimension is thus given by the length of a diagonal between two opposite corners.
  • At least the width of the second area 17, or the total width of several second areas, should be 20 ⁇ m, preferably at least 50 ⁇ m, more preferably at least 100 ⁇ m.
  • the etched surface of the first area which takes up the largest part of the edge area 13, is generally advantageous since such an edge area 13 has a high level of stability, ie a high (mechanical) (edge) strength.
  • the sum of all surface areas of the first region or regions 15 has a proportion of the total area of the edge surface 13 of at least 90%, preferably at least 95%, particularly preferably at least 98%, in particular at least 99%. to have.
  • the strength of a glass part is essentially determined by the properties of its surface, in particular by the microcracks running from the surface into the substrate material, the strength of the small component produced according to the invention is characterized by generally high strength in the majority of the surfaces exposed to the etching process (release process). .
  • the strength of the element 10 against a bending load on the edge surface 13 can be higher in a first area, in particular significantly higher, than in a second area 17.
  • Significantly higher strength is understood to mean a strength that is on average at least 50 MPa higher is.
  • a characteristic strength of 80-200 MPa is measured for an edge of a glass element that has been pre-damaged by filamenting with an ultra-short pulse laser and then broken.
  • a characteristic strength of more than 150 MPa to 500 MPa was measured in combination with an etching process and thus a formation of a surface as in a first region.
  • the characteristic strength a c results from fitting a two-parameter Weibull distribution to the experimentally determined data using the maximum likelihood method.
  • a member 10 made in accordance with this disclosure is tested for strength of individual sides/edges, such as with a 3-point or 4-point bend or step tube, a significant difference in characteristic strengths between edges showing a second Having area (i.e. removed/broken tiebars) and edges exist without a second area.
  • the surfaces in the second areas exposed by removing the web connections or holding sections have a lower mechanical strength and can therefore be used or provided as a predetermined breaking point.
  • the small component retains its high strength.
  • the second region or regions 17 can be used as a predetermined breaking point and taking this into account in the design.
  • a further advantage of subdividing the edge surface 13 into at least one first and at least one second region 15, 17 is the possibility of an alignment.
  • the second area can thus serve as an orientation mark for component alignment. For example, a robot can recognize this second area and use it to grip or install the element 10 with the intended orientation.
  • the number of second regions 17 introduced as fracture surfaces with changed strength is to be minimized.
  • the number of connecting sections and thus of the second regions is at most 50, preferably at most 10, more preferably at most 5 and very particularly preferably at most 3.
  • the structuring takes place in such a way that the small part is connected to the holding section with one or two connecting sections.
  • several connecting sections can fix the small part from different directions, in a preferred embodiment for reasons of stability from the same direction or even parallel.
  • the small part or element 10 is connected to the holding section by parallel connecting sections, preferably two parallel connecting sections.
  • the two types of areas 15, 17 can also differ in other features than the surface finish.
  • the edge surface can have different angles to the side surfaces 100, 101 in the two areas.
  • a taper angle can be present on both edges 19, 29 due to the etching process.
  • the second region 17 can also have an incline, so that one edge protrudes and/or the other edge is set back.
  • the first and second regions 15, 17 can also have different edge geometries or edge shapes in addition to different surface structures.
  • a taper angle of the edge surface can also be generated in a first area by the irradiation direction of the laser beam. In this case, filament-shaped damage running obliquely in the material is introduced, so that during etching an edge surface is produced with a surface lying correspondingly obliquely along the direction of the filaments.
  • the different surface structures of the first and second regions 15, 17 can be distinguished, inter alia, on the basis of one of the features roughness, degree of reflection, optical appearance.
  • the two areas 15, 17 are distinguishable, but have the same visual appearance or at least one that is indistinguishable to the naked eye.
  • the element 10 is preferably designed as a small product, for example for precision mechanical or micromechanical applications, such as design and functional elements, e.g. for the watchmaking industry, packaging (encapsulation) components for optoelectronic light emitters or encapsulation components for optoelectronic sensors.
  • the greatest lateral dimension of the element is preferably at most 100 mm, preferably at most 80 mm, particularly preferably at most 50 mm. Smaller components with a maximum lateral dimension of 30 mm can also be manufactured.
  • the largest lateral dimensions from 0.3 mm, in particular from 1 mm, preferably from 3 mm, particularly preferably from 5 mm are preferred.
  • FIG. 2 shows a section of the surface structure of a first area according to a preferred embodiment. It is generally preferred if the etched surface of the first region 15 has depressions 22 in the form of a spherical cap. In particular, the dome-shaped indentations can also adjoin one another more or less directly, so that adjacent indentations 22 are separated by ridges 24 . The depth of the dome-shaped or rounded indentations is preferably less than 5 ⁇ m. According to one embodiment, the lateral dimensions of the depressions 22 are on average in the range from 5 ⁇ m to 200 ⁇ m, preferably from 5 ⁇ m to 100 ⁇ m, in particular from 5 ⁇ m to 50 ⁇ m, particularly preferably from 5 ⁇ m to 20 ⁇ m.
  • the ridges 24 form polygonal delimitations of the dome-shaped depressions 22 when viewed from above on the first region 15.
  • the average lateral dimension of the dome-shaped depressions can be influenced by the duration of the etching process.
  • the dome-shaped depressions are typically created at low removal rates and preferably using alkaline etching media such as KOH or NaOH solutions. However, etching with an acidic etching medium is also possible.
  • the material is removed at a removal rate of less than 15 ⁇ m, preferably less than 10 ⁇ m, particularly preferably less than 8 ⁇ m per hour.
  • the channels at the edge of the disk-shaped element can still be seen as laterally open, adjacent channels, or vice versa as ribs. These ribs remain where the channels meet during etching. If etching continues for a longer period after the channels have been combined, these structures balance out and a surface is created which, in addition to the dome-shaped depressions, has no superstructure in the form of half-open channels or ribs.
  • the average number of sides of the polygons formed with the ridges is less than eight, preferably less than seven.
  • the ridges 24 are relatively sharp compared to the curvature of the dome-shaped depressions.
  • the surface area of convexly curved areas, as they must be present approximately in the middle of the ridge, is only small.
  • the area proportion of convexly curved areas of the etched surface is preferably less than 5%, in particular less than 2%.
  • the structure of the surface which is caused in particular by low etching rates, is generally characterized by high edge strength, which is of particular advantage in the case of mechanically stressed small components.
  • FIG. 3 shows various embodiments of structured, disc-shaped intermediate products 1 made of brittle material.
  • the intermediate products each have an element 10 as a detachable material section, which has a connecting section 2 in the form of a preferably web-shaped Material bridge are connected to a holding portion 6.
  • the holding section 6 is designed as a frame.
  • the element 10 is arranged within the frame 8 or within the opening 9 defined by the frame 8 and is connected to the frame 8 or more generally to the holding section 6 via one or more connecting sections 2 .
  • the element 10 is connected to the frame 8 via a single connecting section 2 in the form of a web.
  • the inner edge surface 80 of the opening 9 of the frame-shaped holding element 6 generally has the same surface structure as the first region 19 of the edge surface 13 of the disk-shaped element 10, ie a particularly similar etched surface. This is advantageous because in this way the frame 8 is also given a high level of stability.
  • connecting sections 2 engaging on opposite sides of the element for holding the element 10 .
  • Two material bridges or connecting sections 2 are also provided in the examples in partial images (c) and (d).
  • the connecting portions 2 hold the element 10 on two different sides.
  • the longitudinal directions of the material bridges 2 are transverse here, in particular perpendicular to one another.
  • the connecting sections or material bridges 2 are arranged next to one another. The longitudinal directions of these connecting sections 2 are therefore essentially parallel.
  • the holding section 6 In order for the holding section 6 to be able to impart the necessary mechanical stability to the manufactured elements or small or very small products, it is preferred, without being restricted to the specific examples shown Embodiment larger in at least one lateral dimension than the connecting section 2 and/or the element 10.
  • the connecting section 2 generally has, without limitation to specific examples, a width of at least half a percent (0.5%), preferably at least one percent of the largest lateral dimension of the attached micro-product, respectively of the glass or glass-ceramic element 10, according to yet another alternative or additional embodiment, but at least a width of 100 ⁇ m.
  • the width of the connecting section is at most 50%, preferably at most 30%, particularly preferably at most 20%, particularly preferably at most 10% of the largest lateral dimension of the holding section 6 or of the connected to the connecting portion 2 glass or glass ceramic element 10 is.
  • the distance between at least two connecting sections 2 holding an element 10 is at least half as large, preferably at least as large , is particularly preferably at least twice as large as the thickness of the intermediate product 1 or of the element 10.
  • the mutual distance means the space between the edges of the connecting sections 2. Accordingly, according to this embodiment, the width of the first area 15 between the two second areas 17 in the example shown in FIG Connection sections at least 20 pm.
  • FIG. 3 Partial image (e) of FIG. 3 shows an example of an embodiment in which an element 10 with three connecting sections 2 is connected to the holding section 6 . It is also preferred here if the connecting sections 2 run essentially parallel. However, as explained above, it is generally advantageous, without limitation to the examples shown, if only a small number is provided by connecting sections. As in the case of the examples shown, it is advantageous if the number of connecting sections is at most 50, in particular at most 10, preferably at most 5 and particularly preferably between 1 and 3. A single connecting section 2 is often sufficient.
  • the aforementioned dimensions are preferably given for each element with the associated connecting section 2 .
  • the small component or element 10 is separated purely mechanically, i.e. by introducing mechanical stress at the transition point from element 10 to the connecting element 2. Separating processes carried out in this way can, however, cause tearing cracks in the small component or the connecting element 2, so that small material projections or shell-like indentations/incisions on the contour of the element 10 remain.
  • the transition area between the connecting element and the small component can be structured by introducing specific pre-damage with the aim of controlling the stress profile and thus the crack profile. Methods known from the prior art, such as mechanical scribing, or also laser-based methods such as ablation, stealth dicing, laser-based thermal cutting or filamenting along the desired dividing line can be used for this purpose.
  • a weakening structure 4 is provided, which runs along the envisaged dividing line between connecting section 2 and element 10 .
  • the weakening structure 4 between the connecting section 2 and the small component or element 10 can be structured by a filamenting process, in which a chain of through-holes with a diameter typically in the submicron range or filament-like damage, which can also be designed as through-holes, are formed along the desired contour or dividing line can, introduced at a predetermined distance by means of a focused ultra-short pulse laser.
  • a filamenting process in which a chain of through-holes with a diameter typically in the submicron range or filament-like damage, which can also be designed as through-holes, are formed along the desired contour or dividing line can, introduced at a predetermined distance by means of a focused ultra-short pulse laser.
  • the already structured intermediate product 1, with holding section 6, Connecting element 2 and element 10 are introduced into an ultra-short pulse laser system and processed accordingly.
  • a rupture edge pretreated by such a filamenting is advantageous compared to a rupture edge prepared without a weakening structure, for example, since the connection section 2 can be separated with a
  • these additional modifications are introduced perpendicularly to the direction of extension of the connecting element or elements and in addition to the already existing contour.
  • the weakening structure 4 can comprise an area of reduced thickness.
  • a reduction in thickness can take place by laser ablation.
  • a scribe line for example with a scribe tool such as a scribe wheel or a scribe diamond.
  • the weakening structure 4 can appear, for example, as a continuous or interrupted trench on at least one of the two surfaces (and thus as a local thinning), as a perforation (e.g. by filamenting with an ultrashort pulse laser) or by internal modification, e.g. in so-called stealth dicing.
  • the weakening structure can be detected with a light or electron microscope.
  • FIG. 4 to 6 show embodiments of intermediate products 1 in the form of structured disks made of brittle material, each of which has a plurality of elements 10 connected to a common holding section 6 .
  • the holding section 6 is designed in the form of a strip.
  • the holding section 6 does not surround the elements 10 here in the form of a ring or a frame.
  • at least one edge of the elements 10 is exposed without the holding section 6 hinders access.
  • This can be advantageous, for example when the glass or glass-ceramic elements 10 are gripped with pliers and separated from the holding section 6 .
  • a tool in the form of pliers can be provided as part of a robot in automated production.
  • glass or glass ceramic elements 10 are arranged in a matrix arrangement within a common opening 9 of the holding section 6 designed as a frame 8 .
  • the glass or glass-ceramic elements 10 are arranged on the holding section 6 in the form of a frame 8 in a row arrangement, in particular in a matrix arrangement with more than one row of elements 10 .
  • An arrangement with two rows within an opening 9 of the frame, as in the illustrated example, is particularly preferred. This enables the separate fastening of the elements 10 on opposite sides of the opening by means of the connecting sections 2.
  • a plurality of, in particular two, connecting sections 2 per element 10 can be provided. Similar to the example in FIG. 3, partial image (d), two parallel connecting sections 2 are provided here.
  • FIG. 6 a general embodiment is implemented, in which at least two elements 10 are arranged within the opening 9 of a holding section 6 designed as a frame 8, the two elements 10 having at least one connecting section 20, which extends from an element 10 extends to the other element 10 are connected to each other.
  • FIG. 7 illustrates process steps for fabricating a brittle material member 10 in accordance with this disclosure and as exemplified in FIG. 1 .
  • the method of making an intermediate product 1 and the method of making a disk-shaped element 10 of brittle material is based on the following steps: A disk 3 of brittle material is provided, as in Fig. 7 , partial image (a) shown.
  • glass or glass ceramics are used as brittle material, in particular: alkali-free (AF) glass, borosilicate glass, glasses with the Product designations AF32, AF35, AS87, D263, D263T, B270, MEMPAX, Willow, G-Leaf, EN-Al, BDA-E to consider.
  • AF alkali-free
  • borosilicate glass glasses with the Product designations AF32, AF35, AS87, D263, D263T, B270, MEMPAX, Willow, G-Leaf, EN-Al, BDA-E to consider.
  • Glasses that are particularly suitable for the production process with laser irradiation, formation of filament-shaped damage and subsequent etching with the union of widening channels along the filament-shaped damage are listed below.
  • the composition of the glass includes the following components in percentage by weight:
  • composition of the glass of the element 10 includes the following components:
  • composition of the glass includes the following components: given by:
  • the composition of the glass of element 10 includes the following components
  • coloring oxides such as NdiO 4 , Fe 2 O 3 , CoO, NiO, V 2 O 5 , MnO 2 , CuO, Cr 2 O 3 .
  • AS 2 O 3 , Sb 2 O 3 , SnO 2 , SO 3 , Cl, F and/or CeO 2 can be added as a refining agent, and the total amount of the entire composition is 100% by weight each.
  • the thickness of the disc 3 is preferably in the range of 20 gm to
  • the contour of the holding and connecting element and of the small product, or element 10 is defined.
  • the disc 3 made of brittle material is irradiated with a laser, the brittle material of the disc 3 being at least partially transparent to the laser, and the laser beam of the laser causing material modifications 5 in the interior of the disc 3 .
  • the laser beam is guided over the disk 3 along a path 50 so that the material modifications lie next to one another on the path 50 .
  • the pane 3 with the material modifications lying next to one another on the path 50 is shown in FIG. 7, partial image (b).
  • Modifications can include material changes, such as changes in the refractive index (locally limited or continuous), local thinning of the material in the form of trenches, cracks, cavities, internal damage in the substrate such as microcracks, local melting, through holes (cylindrical or more general shape) or filaments or filamentous damage be understood.
  • the etch may be etched with an acidic etching medium such as aqueous solutions of HF, HCl, H2SO4, HNO3 or other acids.
  • Etching with an alkaline etching medium such as potassium hydroxide solution, KOH, or sodium hydroxide solution, NaOH, is preferred.
  • the etching takes place in an alkaline etching medium with a pH greater than 12 and a complexing agent.
  • the complexing agent is selected in such a way that it complexes at least one of the components of the brittle material.
  • a complexing agent that forms complexes with alkaline earth metal ions, preferably calcium ions (Ca 2+ ).
  • a complexing agent is selected from the group of phosphates, preferably ATMP (nitrilotris(methylenephosphonic acid), phosphonic acids, salts of hydroxycarboxylic acids, preferably alkali metal gluconates, EDTA, and/or transition metal salts, in particular CrCh.
  • ATMP nitrilotris(methylenephosphonic acid)
  • phosphonic acids phosphonic acids
  • salts of hydroxycarboxylic acids preferably alkali metal gluconates, EDTA, and/or transition metal salts, in particular CrCh.
  • an etching solution can also be used which contains a silicate, preferably an alkali silicate, particularly preferably water glass, in dissolved form.
  • a silicate preferably an alkali silicate, particularly preferably water glass
  • the etching rate can be significantly increased. This effect can be observed in particular with high silicate concentrations in the etching solution.
  • the silicates also act as alkali carriers and thus increase the mobility or ion mobility of the hydroxide ions. This is particularly advantageous in embodiments with a very high hydroxide concentration in the etching solution.
  • the ion mobility of the hydroxide ions decreases with increasing concentration in the case of very concentrated alkalis, which also has an effect on the etching rate.
  • this effect can be at least partially compensated for by adding silicates as alkali carriers.
  • an element 14 complementary to the element 10 with the connecting section 2 detaches from the pane 3 .
  • Parts of the substrate that are not required fall out of the structured substrate during the etching process in parts (for example if auxiliary cuts were made before etching) or as a whole.
  • the contour of the element 10 can also be formed without detaching a complementary element 14, for example by only traversing the contour as a path with the laser beam and then following the path by etching a narrow slot in the etching process. Furthermore, it is also possible that, instead of a single complementary element 14, several smaller parts are detached in order to carve out the element 10.
  • the separating step in which the small component or element 10 is separated from its connecting elements along a defined separating line. Accordingly, a method for producing an element 10 is also provided, in which after the production of the intermediate product 1 the connecting section 2 is separated, so that the element 10 is detached from the holding section 6 . This step is shown in part (d) of Fig. 7.
  • the step shown in FIG. 7 (d) takes place at a different time from the manufacture of the intermediate product, i.e. significantly later and/or at a different location, for example for the installation of the element 10 in a device provided for this purpose, for example after a storage or transport process.
  • the advantage of an intermediate product 1 produced in this way is that the later small products or elements 10 are stabilized in position and can therefore be easily further processed by processing the intermediate product as a whole directly or with additional handling aids. Further process steps can be, without claiming to be complete, the coating of surfaces or parts of the surfaces, printing, renewed structuring, or combinations thereof.
  • the intermediate product 1 can be chemically tempered.
  • connection between the element 10 and the holding section 6 also facilitates handling during this further processing.
  • an alkaline, brittle material such as a glass or a glass ceramic with a sufficiently high Na 2 O content.
  • the content of Na O for this purpose is preferably at least 5% by weight.
  • the width of the connecting portion 2 is less than twice the depth of exchange (DoL).
  • DoL depth of exchange
  • the width of the connecting section 2 is less than four times the exchange depth or preferably less than three times the exchange depth (DoL). This makes sense especially with thicker glasses, on the one hand to still enable non-destructive cutting and on the other hand to limit the exchange depth.
  • a channel for example with a length of 10 ⁇ m, can be provided on the connecting section 2 .
  • the exchange bath can penetrate into the channel, so that a chemical bias is also generated around this channel.
  • the transition area from the connection section to the element 10 can also be chemically prestressed in the volume to such an extent that high stress differences at the breaking point are avoided.
  • the at least one channel can be inserted both in a side surface and in the edge surface.
  • the side surfaces 100, 101 can also have undergone structuring or other forms of further processing.
  • the surface exposed by the separating process has a different, second surface structure than in the first areas exposed by the etching process, for example a smooth surface in the case of a previous mechanical separating or in the case of a laser perforation by means of a filamentation process, typically an optically rough surface that is traversed by the opened vertical filamentation channels.
  • the edge surface 13 of the element 10 has a second area 17 with the area content corresponding to the cross section of the connection section 2 in the contact area of connection section 2 and element 10. Consequently, the sum of the proportions of the surface of the second area(s) 17 in the total area of the edge surface 13 is significantly smaller than the sum of the proportions of the first areas 15.
  • the proportion of the second areas 17 is preferably less than 20%, preferably less than 10%, particularly preferably less than 5%.
  • a surface proportion of less than 2% and in particular less than 1% is very particularly preferred.
  • Fig. 8 shows an example of an embodiment of an intermediate product 1 divided into fields.
  • the small component or element 10 located in the frame 8 can also be manufactured in a cascading manner by first structuring the pane 3 according to the geometry of the holding sections 6 in a first process step or is pre-damaged and in a second process step the structuring of the subfields in frame 8, connecting element 2 and element 10 is carried out.
  • the process parameters - such as the pitch - it can be ensured that only the elements 10 are released by the etching process, but not the perforation lines 26 between the frames 8.
  • the embodiment of the intermediate product 1 is based on the fact that the intermediate product 1 has several Holding sections 6 in the form of frames 8, at least one element 10 being arranged in each of the frames 8, which is connected to the frame 8 via at least one connecting section 2, the frames 8 being connected to one another in a separable manner via one or more perforation lines 26.
  • Alignment marks 28 in the form of through-holes can also be produced using the laser-assisted etching process used to define and carve out the contour of element 10 .
  • Alignment marks 28 in the form of through-holes can also be produced using the laser-assisted etching process used to define and carve out the contour of element 10 .
  • FIG. 8 in the case of several fields or frames 8 connected by perforation lines, all holding elements 6 in the form of frames can receive such alignment marks 28. After the frames 8 have been separated, this enables them to be aligned easily and precisely, for example for further processing.
  • the ultra-short pulse laser structuring is carried out inline in the production process of a substrate glass.
  • the integration of the laser structuring inline into a continuous drawing process in which a continuous glass ribbon is produced is being considered.
  • the thin glass can be manufactured using the downdraw or overflow fusion method.
  • the structured glass ribbon can either be directly etched inline.
  • the glass ribbon can be wound up into a roll or cut transversely to the feed direction of the glass ribbon by further processes and thus cut to a desired length in the feed direction.
  • the structuring, etching step and, if necessary, separation can be separated from one another in terms of time and space.
  • 9 shows a device 29 for producing a glass ribbon, which is further developed into a device for producing an intermediate product 1 according to this disclosure.
  • the device 29 is designed to wind up the initially unstructured pane 3 in the form of a continuous glass ribbon 30 into a roll 44 .
  • a glass melt 32 is pulled out of a nozzle 34 to form a glass ribbon 30 , with drawing rollers 36 arranged below the nozzle 34 exerting a tensile force on the glass emerging from the nozzle 34 .
  • the variant shown represents a downdraw process in which the glass emerges from a nozzle that is open at the bottom. In the overflow fusion process, the glass runs over the edges of an open-topped, elongated trough and then down the sides of the trough. Below the trough, the partial flows combine to form a glass ribbon.
  • the glass ribbon 30 is preferably deflected in the horizontal direction and moved with a transport device 38, for example with conveyor belts.
  • the structuring by introducing filament-like material modifications along a path 50, as shown in Fig. 7, partial image (b), takes place inline on the undivided glass ribbon 30 by means of an ultra-short pulse laser 40.
  • the laser beam 41 of the ultra-short pulse laser 40 is applied to the glass ribbon by means of beam optics 42 30 is focused and guided over the glass ribbon 30 along the desired path 50 .
  • the glass ribbon 30 is then wound onto a roll core 46 to form a roll 44 .
  • the glass ribbon 30 can be passed through an etching bath in order to expose the contour of the elements 10, as shown in FIG. 7, partial image (c).
  • the method and the device 29 according to this embodiment are therefore based on the fact that
  • a continuous glass ribbon as an unstructured disc 3 made of hard and brittle material 30 is produced in a continuous drawing process, wherein material modifications are inserted with the ultra-short pulse laser 40 during the drawing process on the moving, continuous glass ribbon 30 along the predetermined path 50 .
  • the one or more second areas 17 of the edge surface 13 can have a lower strength than the first areas 15, it is advantageous to provide the second areas where generally lower mechanical loads occur.
  • a second area 17 can be located where there is a minimum stress in a defined, for example symmetrical, load case.
  • the at least one second region 17 extends along positions on the edge surface 13 which are at a distance of at least 2/3 of the maximum distance from the center of the surface.
  • the at least one second area 17 extends along a section of the edge surface 13 which, in the event of a load, is mechanically loaded to a maximum of 80%, preferably a maximum of 60%, particularly preferably a maximum of 40% of the maximum load.
  • FIG. 10 shows an example of an L-shaped element 10 in a plan view of a side surface 100.
  • the surface center 103 does not have to lie within the side surface 100 of the element 10.
  • FIG. This is also the case with the element 10 shown.
  • Fig. 11 shows for the element from Fig. 10 a diagram of the distance d of the position of the edge surface or contour to the surface center as a function of the distance s along the contour of element 10.
  • Point 104 was chosen as the starting point, which is the point with minimum Distance of the contour to the center of the area 103 is.
  • the arrow indicates the direction along which the contour was traced.
  • the corner points of the contour are denoted by the letters a, b, c, d, e, f in FIG. These points are also labeled and in the diagram of FIG clearly recognizable as peaks.
  • the maximum distance to the center of area 103 is found at corner e.
  • a dashed line is drawn which marks a value of 2/3 of the distance at point e.
  • the corner e has a distance of about 51 (in arbitrary units). The limit of 2/3 of this value is therefore around 34.
  • the preferred positions for connection to a connecting portion 2 are at the ends of the legs 105, 106.
  • the preferred attachment areas 107 are shown in dashed lines for clarity marked.
  • the corner d is also relatively far away from the center point 103, it still does not satisfy the condition of a distance of at least 2/3 of the maximum distance. In fact, this area would also be less suitable for attachment to the connecting section 2, since a fracture surface in the area of the corner d can be loaded with tensile stress in the event of a mechanical load that acts on the legs 105, 106.
  • 12 shows a further example in which the arrangement of the second areas or, in the case of the intermediate product 1, the position of the connection of the element 10 to the holding section 6 via the connection section(s) 2 satisfies the design specification explained above.
  • 12 shows an intermediate product 1 with a holding element 6 in the form of a frame.
  • an element 10 in the form of a toothed wheel is connected to the frame 8 via two connecting portions 2 .
  • the connecting sections 2 are connected to the element 10 at the outer edge of the teeth 108 .
  • These parts of the contour are at a greater distance from the center of the surface 103 than the indentations between the teeth 108.
  • These outer regions of the teeth 108 also have the maximum distance from the center of the surface 103 in the center of the gear.
  • edge surfaces In general, it is not only possible to produce edge surfaces with a rectilinear profile, in particular with a profile running essentially perpendicular to the side surfaces 100, 101. Rather, it is also possible to produce edge surfaces with a curved profile or cross section. In addition to an inwardly curved, that is to say concave, profile, it is also possible in particular to produce an outwardly curved profile. 13 shows a height profile of an edge surface 13 of an element 10 within a first region 15. The steep descents of the height profile to the minima at the x-positions of about
  • the edge face bulges outwards by an amount in the range from 10 pm to 15 pm.
  • Such a profiling can generally be achieved by inserting the filament-like damage completely or partially obliquely.
  • the etching removal rate can be influenced by generating filament-like damage that ends in the material at least on one side.
  • edge surface 13 with the etched surface in the first section to have a profile which curves outwards or inwards by at least 1% of the thickness of the element 10 .
  • Figures 14 and 15 are optical micrographs of an element made of glass.
  • the edge surface 13 of the element 10 is curved outwards, as in the example in FIG.
  • the element 10 has an annular part, which is adjoined by a rod-shaped section, which can be seen at the top right of the image.
  • the two areas 15, 17 can hardly be distinguished optically in the recording of FIG. 15 shows a further enlarged photograph of the edge surface 13 with the areas 15 and 17.
  • the transitions 18, recognizable as lines, between the areas 15, 17 are particularly visible here.
  • the broken edge of the second area 17 can hardly be distinguished optically from the etched surface of the first area. This is due in particular to the fact that the roughness of the two areas can be adapted to one another.
  • the roughness of the first area can be influenced by the etching parameters.
  • the roughness can be influenced, among other things, by the type and design of a weakening structure 4, for example the spacing of filament-like damage along a weakening line.
  • the ratio of the mean roughness value Ra of a first area 15 and an adjoining second area 17 is in the range from 0.75 to 1.25.
  • Both areas 15, 17, as in the example shown according to a preferred embodiment have an appearance similar to that of a polished area surface up. In particular, the two areas can therefore generally have the same visual appearance without being restricted to the example shown.
  • the second area 17 preferably represents a breaking edge, it is typically flat.
  • a different shape such as a convex or concave shape, can be achieved with certain measures. For example, several filament-like defects could be inserted at different angles as a weakening structure.
  • the height offset between a second area 17 and an adjoining first area 15 is less than 20 ⁇ m.
  • This feature is also fulfilled in the example shown in FIGS.
  • the second area 17 neither protrudes nor is it noticeably recessed.
  • This feature can be realized by a weakening structure 4 ending on the connecting section 2 close to the outer contour of the adjoining first region 15 or continuing this outer contour.
  • FIGS. 14, 15 elements made of glass.
  • the example of Figure 16 was taken at 200x magnification.
  • the second area 17 can be clearly seen here, which is adjoined by the first areas 15 on the left and right.
  • the dome-shaped indentations 22 in the first area can also be clearly seen.
  • the larger depressions 22 extending along the transition 18 can be clearly seen in the microscope image.
  • the formation of the depressions can be attributed to a change in the etching rate at the transition from the connecting section 2 to the element 10 when the contour is worked out in the etching bath.
  • Fig. 17 shows the edge surface magnified 500 times.
  • the filament-shaped damage 39 introduced by the ultra-short-pulse laser can also be seen in the fracture surface of the first area 17 as fine, dark, straight lines, since the fracture surface runs along the filament-shaped damage.
  • the damage is then present as partly half-open channels in the fracture surface.
  • the filament-shaped damage 39 runs from top to bottom in the image in FIG. 17, ie in the direction from one side surface to the opposite side surface of the element 10. The distance between the filament-shaped damage 39 is approximately 6 ⁇ m in the example shown.
  • the contour of the disc-shaped intermediate product with the connecting section 2 and the element 10 is preferably first worked out by filamenting and etching. Only then are the filament-shaped defects 39, which form the weakened structure 4 and are therefore visible in the fracture surface of the second area, inserted.
  • other variants are also conceivable, such as inserting all the filament-shaped damage and then masking the damage 39 in the connecting section 2 in order to prevent this damage 39 from being etched open.
  • the intermediate products 1, as shown by way of example in FIGS. 4 to 6, are coated after the structuring process (laser filamenting and subsequent etching process). Accordingly, the element 10 separated from the intermediate product can then also be provided with a coating, in particular an optically effective coating.
  • multi-layered layer systems consisting of alternating high-index coatings (usually TiCk, Ta 2 0s, NbiOs, HI ⁇ 2, ZrÜ2) and a low-index coating (preferably S1O2) of suitable thickness can be combined in order to achieve the desired optical properties.
  • Such multilayer coating systems can also be used for other coatings, such as antireflection coatings.
  • the optically effective coating comprises a plurality of layers with different refractive indices, in particular with alternating layers with a higher and relatively lower refractive index.
  • the method described here enables particularly small components to be manufactured and handled, in particular with lateral dimensions in the range from 1 mm to a maximum of 10 mm and with a thickness of the substrate material of 50 ⁇ m, but at least 70 ⁇ m to 400 ⁇ m.
  • a possible application of such a small element is the use as an IR cut filter, for example for a camera sensor in a mobile phone or in camera modules such as other portable electronic devices such as laptops or tablet PCs.
  • an optically effective layer with the required optical properties is generally applied. The deposition of the layer is facilitated or even made possible in the first place by the predetermined positioning of the elements 10 by means of the connecting sections 2 and holding sections 6 .
  • the strength of the element is also an important variable for this area of application mentioned above.
  • the production of a high-strength filter element succeeds through a suitable combination of a coating process that follows the structuring process with a prestressing process that is carried out before or after.
  • a disc-shaped optical filter element in which the element 10 of brittle material is coated with an optical filter coating. Included at least one of the side surfaces 100, 101 can be provided with the optical filter coating, optionally there can also be a coating on both sides. The coatings can also differ.
  • the optical filter coating can be an IR-cut coating, ie a coating which absorbs or reflects radiation in the near infrared range in particular. It is typical for such an optical filter element that the substrate or the element 10 is transparent to the infrared radiation or, more generally, has a higher transmission for the infrared radiation than the filter coating.
  • the near infrared range is understood to mean a wavelength range from 0.7 ⁇ m to 2.5 ⁇ m.
  • a camera module having a sensor covered with a disc-shaped element 10 according to this disclosure, the disc-shaped element 10 forming an optical filter.
  • an optical filter coating can be provided on the element 10 as described above.
  • the glass of the disk-shaped element 10 can also be a filter glass.
  • FIG. 18 shows a camera module 52 such as can be used, for example, in a cell phone or another portable electronic device.
  • the camera module 52 includes a camera sensor 56 for image recording, a lens 58 and optionally a housing 59 for receiving and attaching the sensor 56 and lens 58.
  • An optical filter element 60 is applied to the light-sensitive layer of the sensor 56, for example glued on with a bond Layer 61.
  • the optical filter element 60 is formed by a coated element 10.
  • the optical filter coating 54 is designed in such a way that radiation in the near infrared range is largely reflected or absorbed, so that essentially only visible light impinges on the sensor.
  • the coating process is prestressed, preferably brazed. Prestressing the substrate, ahead.
  • the holding section(s) 6 and frame 8, as well as connecting sections 2, or the disk-shaped, brittle intermediate product 1 with the aforementioned parts are subjected as a whole to the prestressing process in the exchange bath.
  • the strengths of the components are of great importance, both in connection with the holding section and after they have been detached. The strengths are largely determined by the breaking strength of the respective edges.
  • the Weibull diagrams in FIG. 19 show typical values for the edge strength of a 100 ⁇ m thick ultra-thin glass, measured directly after filamenting, i.e.
  • the straight lines therefore represent the cumulative density functions of the fracture probability with the form parameter b and the scale parameter T.
  • the increase in strength as a result of the tempering process depends on the material and, as the example in FIG. 19 shows, significantly higher strength values can generally be achieved compared to non-tempered glass panes.
  • a disk-shaped intermediate product 1 is therefore provided, in which a weakening structure 4 runs along an intended dividing line between connecting section 2 and element 10, the weakening structure 4 having a chain of filament-like damage, and the intermediate product 1 being chemically prestressed. Both the element 10 and at least the connecting section 2 in the area of the weakening structure 4 are chemically prestressed.
  • an intermediate product 1 coated and/or prestressed according to this disclosure is separated at the holding section or sections 6 or material bridges, the result is the second regions 17 of the edge surface 13 already described above, which differ not only in terms of roughness values, as already described, but also by can distinguish their coating condition and strength from the first regions 13 of the edge face.
  • the possibly reduced strength of the edge surface in the second areas 17 makes it appear sensible, particularly in the case of a prestressed and coated intermediate product 1, for the material bridges/connecting sections 2 to contact the edge surface of the element 10 in those areas in which the reduced strength of the element 10 in the later use is acceptable.
  • the connecting or holding sections 6 are preferably arranged in the region of the corners or directly at the corners of the element 10, since the lowest stresses occur there in the event of a load.
  • An intermediate product 1 with correspondingly arranged connecting sections 2 is shown in FIG. 20.
  • the element 10 is now separated from the holding portion 6, what is generally obtained, without being limited to the example shown, is an element 10 having a shape with at least one corner, there being a second region 17 of the edge face, one edge of which has the corner of the element 10 coincides, respectively, with the second portion 17 terminating at the corner.
  • the distance from the edge of the second area to the corner is smaller than the width of the second area 17, preferably smaller than half the width of the second area 17.
  • FIG. 21 An embodiment with such an element 10 is shown in FIG. 21.
  • the second regions 17 do not end directly at the respective corners 110, but at a small distance therefrom.
  • the distances are smaller than the width of the second areas 17, even less than half the width of the second areas 17.
  • a small distance, as in the illustrated example, can be advantageous in order to prevent material from breaking out during detachment at the corner 110 and the resulting fracture surface of the second region becomes uneven.
  • the intermediate product 1 can be coated before a member 10 is separated.
  • the second regions 17 exposed at the material bridges by the separation process of a coated intermediate product 1 then consequently have no coating.
  • This embodiment is also shown in FIG.
  • the coating 70 is shown here as hatching.
  • the coating 70 may be at least partially present on the edge surface 13 as well.
  • an element 10 made of brittle material is provided according to another embodiment, in which at least one of the side surfaces 100, 101 and at least partially the edge surface 13 is provided with a coating 70, the coating 70 on the second area 17 is recessed or absent.
  • second areas created in this way can therefore be used, optionally after post-processing of the surfaces, in subsequent use for coupling in and/or out coupling of electromagnetic radiation, in particular visible (coherent or incoherent) electromagnetic radiation.
  • electromagnetic radiation in particular visible (coherent or incoherent) electromagnetic radiation.
  • Such elements are used, for example, as Light guide components or in biotechnology as microfluidic elements.
  • an electro-optical arrangement in general, without being restricted to the presence of specific coatings, which comprises at least one radiation source and/or a sensor, the radiation source and/or the sensor being arranged in such a way that radiation passes through the at least a second region 17 on the edge surface 13 of the element 10 made of brittle material is coupled in from the radiation source or is coupled out for detection with the sensor.
  • the transition area between element 10 and material bridge or connecting section 2 is provided with a weakening structure 4 along the target contour of element 10 and then coated by a sputtering process or another PVD method, for example with Cr/CrO.
  • the edge surface has the above-mentioned properties, i.e. one corresponding to the number of material bridges in the first and second sections 15, 17 subdivided edge surface 13, which has the above-mentioned coating at least outside the areas of the material webs, ie then on the first areas 15 and optionally also in the second areas 17 residues of the coating 70.
  • Fig. 22 shows an example of an electro-optical arrangement 71 with an element 10.
  • the electro-optical arrangement 71 comprises a radiation source 72 and a radiation sensor 74.
  • the element 10 has a coating 70, which is also present on the edge surface 13, but omits the second portions 17 as described above.
  • the coating 70 can be radiation-reflecting.
  • the radiation from the radiation source 72 can then be coupled into the element 10 through a second area 17 and exit again through a further second area 17 in order to be detected by a radiation sensor 74 .
  • a possible beam path is illustrated using an exemplary light beam 76 . If, for example, one of the side surfaces of the element 10 is not coated either, the radiation can interact with a medium here.
  • a basic idea of the method consists in simplifying the handling of the elements 10 by connecting them to the holding section 6 .
  • the connection section 2 is cut off, the element 10 is present in isolated form and from this point onwards it can again be difficult to handle.
  • the intermediate product 1 is attached to a carrier. According to a first development, the element 10 is separated from the holding section 6 while the element 10 is fixed on the carrier, and the element 10 remains connected to the carrier, in particular even after the separation.
  • the carrier is deformable, the element 10 being separated from the connecting section 2 by generating a mechanical stress on the connecting section 2 due to a deformation of the carrier.
  • the deforming can include stretching of the carrier and/or bending of the carrier. During bending, a bending stress is exerted on the connection section 2 since the intermediate product 1 is also bent by being fixed on the carrier. When the carrier is stretched, tensile stress occurs at the connecting portion 2 in a direction along the surface of the intermediate product 1.
  • the carrier can be designed as a film.
  • the intermediate product 1 can then be applied to a carrier in the form of a film in the form of a strip, if possible while avoiding the formation of air bubbles or other inclusions.
  • the film can itself be fastened to another holder frame (eg made of steel) so that the belt tension in the film is as constant as possible.
  • the element 10 is also fixed and secured during the subsequent separation process.
  • the element 10 can now be separated from the holding section 6 by a wide variety of process variants:
  • the geometric shape of the film holding frame is determined by the geometric shape of the assembly and the necessary stretching direction(s) during the separation process: While in the case of a round assembly, isotropic, i.e. angle-independent, equal stretching of the film in all directions is preferred, in In the case of rectangular assemblies, on the other hand, the directed, uniaxial stretching of the film is suitable for transferring a mechanical tensile stress in the area of the weakened material or generally at the connecting section 2 by stretching the film, and thus separating the element 10 from the holding section 2.
  • the intermediate product 1 is fixed on a carrier 77 in the form of a stretchable film 78 .
  • the foil 78 is in turn stretched with a stretching device 82 .
  • the clamping device 82 can, for example, comprise a suitable holding frame.
  • a force can then be exerted on the film 78 via the clamping device 82, as symbolized by the arrows labeled “F”. This stretches the film 78 and transfers the force as tension to the intermediate product.
  • the tensile stress runs accordingly along the surface of the intermediate product and leads to the separation at the connection section or sections 2.
  • a three-point bending process can be used, in which from one side of the arrangement of carrier and intermediate product a support is provided in the area carried out on the right and left of the weakening structure 4 or the connecting section 2 by means of two support beams/blades, while a blade from the opposite side places the connecting section itself under mechanical load and causes the connecting section 2, preferably a weakening structure 4, to break.
  • this process can also be carried out one after the other in different directions. A corresponding arrangement is shown in the example in FIG. 24.
  • the carrier 77 for example again in the form of a film 78 or another deformable base, is placed on two spaced supports 84 so that the connecting section 2 of the intermediate product fixed on the carrier 77 is between the supports 84 located.
  • a blade 86 presses the carrier 77 with the intermediate product from the opposite side of the supports, so that the carrier 77 together with the intermediate product are bent and bending stress is generated in the region of the connection portion 2 .
  • 24 shows the holding section 6 and the element 10 already in the separated state.
  • mechanical bending can be to guide the component-carrying film through a trough - for example attracted by vacuum - or preferably over a raised, for example rounded structure, in order to transfer mechanical stress to the connecting section of element 10 and holding section 6 and the trigger the separation process.
  • Suitable foils 78 can be embodied as single or multi-layer foils. As a rule, they comprise at least one backing film and a pressure-sensitive adhesive film, and optionally an additional release film. So-called blue tape or—in the case of elements 10 that are structured in a very complex manner—also UV-curing tape can be used as the adhesive tape. The adhesion of the tape should be large enough to the components, or elements 10 during the Maintaining machining processes, but still allows the individual components to be detached from the film without damaging them. In particular, the UV-curing film is particularly suitable here, since it has high adhesion in the non-cured state, while the adhesion is reduced by the curing process and enables the component to be detached. Another possibility is to fix the intermediate product 1 on the carrier 77 electrostatically.

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Abstract

L'invention vise à fabriquer de petits éléments structuraux en verre et en vitrocéramique, par gravure assistée par laser, avec une qualité constante et simultanément à simplifier leur manipulation pendant la fabrication et en vue d'un traitement ultérieur. A cet effet, il est prévu un élément (10) sous forme de plaque, composé d'un matériau cassant et friable, présentant deux faces latérales (100, 101) opposées, en particulier parallèles, et une face marginale (13) périphérique, qui définit le contour extérieur de l'élément (10) en forme de plaque, la face marginale (13) présentant au moins une première zone (15) et au moins une deuxième zone (17), la première zone (15) différant de la deuxième zone (17) par sa structure superficielle, la première zone (15) présentant une surface gravée, et la deuxième zone (17) constituant une surface de rupture, et la surface de ladite au moins une première zone (15) étant supérieure à la surface de ladite au moins une deuxième zone, les premières et les deuxièmes zones étant disposées l'une à côté de l'autre dans la direction s'étendant le long de la surface marginale (13).
EP22733119.6A 2021-06-24 2022-06-14 Élément en matériau cassant et friable à bord structuré, produit intermédiaire et procédé de fabrication dudit élément Pending EP4359358A1 (fr)

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DE102021116398.6A DE102021116398A1 (de) 2021-06-24 2021-06-24 Element aus sprödbrüchigem Material mit strukturierter Kante, Zwischenprodukt und Verfahren zur Herstellung des Elements
PCT/EP2022/066222 WO2022268585A1 (fr) 2021-06-24 2022-06-14 Élément en matériau cassant et friable à bord structuré, produit intermédiaire et procédé de fabrication dudit élément

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JP2016534008A (ja) * 2013-08-07 2016-11-04 トルンプフ レーザー− ウント ジュステームテヒニク ゲゼルシャフト ミット ベシュレンクテル ハフツングＴＲＵＭＰＦ Ｌａｓｅｒ− ｕｎｄ Ｓｙｓｔｅｍｔｅｃｈｎｉｋ ＧｍｂＨ 透明の、ガラス状の、ガラス質の、セラミックのかつ／又は結晶質の層を有する板状のワークピースを加工する方法、並びにこのようなワークピース用の分離装置、並びにこのようなワークピースから成る製品
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