EP4229016A1 - Élément de verre à paroi structurée et procédé pour le fabriquer - Google Patents

Élément de verre à paroi structurée et procédé pour le fabriquer

Info

Publication number
EP4229016A1
EP4229016A1 EP21790795.5A EP21790795A EP4229016A1 EP 4229016 A1 EP4229016 A1 EP 4229016A1 EP 21790795 A EP21790795 A EP 21790795A EP 4229016 A1 EP4229016 A1 EP 4229016A1
Authority
EP
European Patent Office
Prior art keywords
glass element
wall
recess
roughness
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP21790795.5A
Other languages
German (de)
English (en)
Inventor
Andreas Ortner
Fabian Wagner
Markus HEISS-CHOUQUET
Michael DRISCH
Vanessa GLÄßER
Annika Hörberg
Lukas WALTER
Lars MÜLLER
David Sohr
Michael Kluge
Bernd Hoppe
Andreas KOGLBAUER
Stefan Muth
Ulrich Peuchert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Schott AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott AG filed Critical Schott AG
Publication of EP4229016A1 publication Critical patent/EP4229016A1/fr
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0738—Shaping the laser spot into a linear shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/55—Working by transmitting the laser beam through or within the workpiece for creating voids inside the workpiece, e.g. for forming flow passages or flow patterns
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/001—Other surface treatment of glass not in the form of fibres or filaments by irradiation by infrared light
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0015—Other surface treatment of glass not in the form of fibres or filaments by irradiation by visible light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/18—Sheet panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54—Glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Definitions

  • the invention relates to a plate-shaped glass element which has glassy material with a coefficient of thermal expansion below 10x 10' 6 K -1 and two opposite surfaces.
  • the glass element also has at least one recess connecting the two surfaces and opening into the surfaces, running through the glass of the glass element and having a recess depth which is transverse, preferably perpendicular, to at least one of the surfaces of the glass element and corresponds to a thickness of the glass element.
  • the recess has a recess wall that extends around the recess and abuts the two opposing surfaces.
  • the wall of the recess has a structure which has a multiplicity of rounded, dome-shaped depressions which adjoin one another.
  • glass elements which do not deform at all or only slightly when subjected to the action of force, from the thickness range between 300 ⁇ m and 3 mm, in special cases even up to 6 mm, can also be used.
  • the laser beam of an ultra-short pulse laser is directed onto one of the surfaces of the glass element and is concentrated to an elongated focus in the glass element using focusing optics, with the radiated energy of the laser beam producing a large number of filament-shaped channels in the volume of the glass element, the depth of which is transverse to the surface of the glass element runs, with the channels being arranged at a distance from one another,
  • defects/channels are preferably produced next to one another in such a way that a row of recesses represents a larger structure, ideally in the form of the recess(es) to be produced.
  • the damage/channels run in their longitudinal direction transverse to at least one surface, ideally both surfaces of the glass element.
  • the channels extend from one surface, and in particular perpendicularly from this surface through the glass element to the other, oppositely arranged surface and break through both surfaces.
  • the typical power of the laser source is particularly favorable in a range from 20 to 300 watts.
  • a pulse energy of the pulses and/or pulse packets of more than 400 microjoules is used, furthermore advantageously a total energy of more than 500 microjoules.
  • a suitable pulse duration of a laser pulse is in a range of less than 100 picoseconds, preferably less than 20 picoseconds.
  • FIG. 2 Schematic representation of a glass element with multiple defects
  • the frequency of a pulse packet can be, for example, 12 ns-48 ns, preferably around 20 ns, with the pulse energy being at least 200 microjoules and the burst energy correspondingly being at least 400 microjoules.
  • the roughness of the recess wall 11 of the recess 10 to be produced can already be specifically adjusted in advance by appropriate selection of certain values of these parameters.
  • the indentation sinks 14 essentially form one opposite the ridges 13 lowest point of the depressions, and preferably the ridges 13 have a highest point, or a highest line. However, the ridges 13 are only narrow in relation to the curvatures or bulges.
  • Figures 7 and 8 illustrate the dependency of the roughness that can be generated Recess wall 11 and/or outer wall 11 through the pitch and burst. It is clear here that the roughness or the measured mean roughness values (Ra), in particular with a high pitch from, for example, 12 pm and a high burst from, for example, 7, are particularly high, for example in the range of 3 pm or higher. On the other hand, the measured mean roughness values (Ra) from a pitch above 6 pm are comparatively high even with a very low burst between 1 and 2, for example greater than 1.5 pm.
  • a low pitch or a combination of a high pitch and high removal is advantageous in order to separate out at least one inner part 20 in order to widen the channels during the etching process to such an extent that they connect. This can be realized with a sufficiently high removal.
  • Worm shape is to be understood in the context of the invention in such a way that the ridges 13 form a non-uniform height around a depression 12 and in some areas have a height that can correspond to the depth of the depression, or at least is significantly lower than the height of a large part of the die Indentation surrounding ridge 13.
  • indentations 12 appear in the measurement image with an approximately uniform depth, so that the worm shape results from a row of individual indentations 12.
  • the recess wall 11 is formed significantly coarser, and thus also duller or rougher, when using a pulse duration of 10 ps (FIG. 10; mean roughness value of 0.50 ⁇ m) than when using a pulse duration of 1 ps (Fig. 9; average roughness of 0.38 pm).
  • the mean roughness value (Ra) can therefore be set particularly precisely by varying the pulse duration.
  • the transmission of the glass element can be measured, for example, in such a way that the light passes through the surface 2 of the glass element 1 is passed through, or the degree of reflection of light from a wall is determined by means of reflection measurements, which can then be subtracted from the overall measurement result of the transmission measurements.
  • 14 shows the results of a reflection measurement.
  • Optical waveguide or a fiber probe light was directed onto the wall 11, 4, and the light reflected from the wall 11, 4 was recorded in the wavelength range between 300 nm and 1000 nm.
  • the recorded measurement results make it clear that the degree of reflection can be adjusted by the roughness of the wall 11, 4, or a desired degree of reflection based on the

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention concerne un élément de verre en forme de plaque qui présente un matériau de verre ayant des coefficients de dilatation thermique inférieurs à 10×10-6 K-1, et deux surface opposées. L'élément de verre présente par ailleurs au moins une cavité qui traverse le verre de l'élément de verre et qui présente une paroi qui s'étend sur le tour de l'ouverture et qui est adjacente aux deux surfaces opposées. La paroi de la cavité présente une structure qui présente une pluralité de creux en forme de calotte arrondie adjacents entre eux. Les creux et les arêtes qui entourent les creux confèrent une rugosité à la paroi de la cavité. La paroi de la cavité présente une rugosité moyenne (Ra) qui est inférieure à 5 µm, de préférence inférieure à 3 µm, de préférence encore inférieure à 1 µm. L'invention concerne par ailleurs un procédé pour réaliser l'élément de verre en forme de plaque à paroi structurée, la régulation des paramètres laser permettant de régler de manière ciblée la structure de la paroi de la cavité ou la rugosité.
EP21790795.5A 2020-10-13 2021-09-30 Élément de verre à paroi structurée et procédé pour le fabriquer Pending EP4229016A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102020126856.4A DE102020126856A1 (de) 2020-10-13 2020-10-13 Glaselement mit strukturierter Wandung und Verfahren zu dessen Herstellung
PCT/EP2021/077030 WO2022078774A1 (fr) 2020-10-13 2021-09-30 Élément de verre à paroi structurée et procédé pour le fabriquer

Publications (1)

Publication Number Publication Date
EP4229016A1 true EP4229016A1 (fr) 2023-08-23

Family

ID=78134920

Family Applications (1)

Application Number Title Priority Date Filing Date
EP21790795.5A Pending EP4229016A1 (fr) 2020-10-13 2021-09-30 Élément de verre à paroi structurée et procédé pour le fabriquer

Country Status (8)

Country Link
US (1) US20230311248A1 (fr)
EP (1) EP4229016A1 (fr)
JP (1) JP2023546072A (fr)
KR (1) KR20230086721A (fr)
CN (1) CN116323509A (fr)
DE (1) DE102020126856A1 (fr)
TW (1) TW202233537A (fr)
WO (1) WO2022078774A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022120050A1 (de) * 2022-08-09 2024-02-15 RENA Technologies GmbH Verfahren und System zum Substratätzen sowie Substrathalter

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018100299A1 (de) 2017-01-27 2018-08-02 Schott Ag Strukturiertes plattenförmiges Glaselement und Verfahren zu dessen Herstellung
DE102018110211A1 (de) 2018-04-27 2019-10-31 Schott Ag Verfahren zum Erzeugen feiner Strukturen im Volumen eines Substrates aus sprödharten Material
DE102018110210A1 (de) 2018-04-27 2019-10-31 Schott Ag Mikrofluidikzelle und Verfahren zu deren Herstellung

Also Published As

Publication number Publication date
JP2023546072A (ja) 2023-11-01
KR20230086721A (ko) 2023-06-15
TW202233537A (zh) 2022-09-01
WO2022078774A1 (fr) 2022-04-21
DE102020126856A1 (de) 2022-04-14
US20230311248A1 (en) 2023-10-05
CN116323509A (zh) 2023-06-23

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