EP4260103A1

EP4260103A1 - Optical angular encoder

Info

Publication number: EP4260103A1
Application number: EP21815505.9A
Authority: EP
Inventors: Benjamin BOUTHINON; Delphine DESCLOUX; Wilfrid Schwartz
Original assignee: Isorg SA
Current assignee: Isorg SA
Priority date: 2020-12-14
Filing date: 2021-11-22
Publication date: 2023-10-18
Also published as: WO2022128336A1; CN116569082A; US20240036240A1; FR3117611B1; FR3117611A1; KR20230113762A; JP2023553659A

Abstract

The present disclosure relates to an angular filter (23) for an image acquisition device (19), comprising a stack including: a first matrix (31) of first apertures (333) bounded by first walls (35) opaque to visible and/or infrared radiation; an array (27) of microlenses (29); and a second matrix (41) of second apertures (43) delimited by second walls (45) opaque to visible and/or infrared radiation.

Description

DESCRIPTION

TITLE: Optical angular filter

This application is based on, and claims the priority of, the French patent application FR2013150 filed on December 14, 2020 and entitled "Optical angular filter", which is considered to be an integral part of this description within the limits provided by the law.

Technical area

This description relates to an angular optical filter.

[0002] More particularly, the present description relates to an angular filter intended to be used within an optical system, for example, an imaging system or to be used to collimate the rays of a light source, in particular for a organic light-emitting diode (OLED) directional lighting application or optical inspection.

Prior technique

[0003] An angular filter is a device making it possible to filter incident radiation as a function of the incidence of this radiation and thus block the rays whose incidence is greater than a maximum incidence. Angle filters are frequently used in conjunction with image sensors.

Summary of the invention

[0004] There is a need to improve the known angular filters.

[0005] One embodiment overcomes all or part of the drawbacks of known angular filters. [0006] One embodiment provides an angular filter for an image acquisition device comprising a stack comprising: a first matrix of first openings delimited by first walls opaque to visible and/or infrared radiation; an array of microlenses; and a second matrix of second openings delimited by second walls opaque to visible and/or infrared radiation.

[0007] According to one embodiment, the number of second openings is at least twice as high as the number of first openings.

[0008] According to one embodiment, the number of first openings is at least twice as high as the number of second openings

[0009] According to one embodiment, the network of microlenses is located between the first matrix and the second matrix.

[0010] According to one embodiment, the second matrix is located between the array of microlenses and the first matrix.

[0011] According to one embodiment, the first matrix is located between the array of microlenses and the second matrix.

[0012] According to one embodiment: the structure comprising the network of microlenses and the first matrix is adapted to block incident rays having an incidence, with respect to the optical axes of the microlenses, greater than a first maximum incidence; and the second matrix is adapted to block incident rays having an incidence, with respect to the optical axes of the microlenses, greater than a second maximum incidence, the second maximum incidence being greater than the first maximum incidence.

According to one embodiment, the first maximum incidence which corresponds to the half-width at half the maximum transmittance is less than 10°, preferably less than 4°.

[0014] According to one embodiment, the second maximum incidence which corresponds to the half-width at half the maximum transmittance is greater than 15° and less than 60°.

[0015] According to one embodiment, the second maximum incidence is less than or equal to 30°.

[0016] According to one embodiment, the first openings are filled with air, with a partial vacuum or with a material that is at least partially transparent in the visible and infrared domains.

According to one embodiment, the second openings are filled with air, with a partial vacuum or with a material that is at least partially transparent in the visible and infrared domains.

[0018] According to one embodiment, a single microlens is directly above a first opening.

[0019]According to one embodiment, each microlens is directly above a single first opening.

[0020]According to one embodiment, the optical axis of each microlens is aligned with the center of a first aperture. [0021] One embodiment provides an image acquisition device comprising an angular filter as described above and an image sensor.

Brief description of the drawings

These characteristics and advantages, as well as others, will be set out in detail in the following description of particular embodiments made on a non-limiting basis in relation to the attached figures, among which:

[0023] Figure 1 illustrates, in a sectional view, partial and schematic, an embodiment of an image acquisition system;

[0024] Figure 2 illustrates, in a sectional view, partial and schematic, an embodiment of an image acquisition device comprising an angular filter;

[0025] Figure 3 illustrates, in a sectional view, partial and schematic, another embodiment of an image acquisition device;

[0026] Figure 4 illustrates, in a sectional view, partial and schematic, another embodiment of an image acquisition device; and

FIG. 5 represents, by a graph, the transmittance of the angular filter of the device illustrated in FIG. 2 as a function of the incidence of the rays reaching the angular filter.

Description of embodiments

The same elements have been designated by the same references in the various figures. In particular, the structural and/or functional elements common to the various embodiments may have the same references and may have identical structural, dimensional and material properties. [0029] For the sake of clarity, only the steps and elements useful for understanding the embodiments described have been represented and are detailed. In particular, the realization of the image sensor and of the elements other than the angular filter has not been detailed, the embodiments and the modes of implementation described being compatible with the usual realizations of the sensor and of these other elements. .

[0030] In the following description, when reference is made to absolute position qualifiers, such as the terms "front", "rear", "up", "down", "left", "right", etc., or relative, such as the terms "above", "below", "upper", "lower", etc., or to qualifiers of orientation, such as the terms "horizontal", "vertical", etc. ., unless otherwise specified, reference is made to the orientation of the figures.

[0031] Unless otherwise specified, the expressions "about", "approximately", "substantially", and "about" mean to within 10%, preferably within 5%.

[0032] Unless otherwise specified, the expressions “all the elements”, “all the elements”, “each element”, mean between 95% and 100% of the elements.

[0033] Unless otherwise specified, the expression “it comprises only the elements” means that it comprises, at least 90% of the elements, preferably that it comprises at least 95% of the elements.

In the remainder of the description, unless otherwise specified, a layer or a film is said to be opaque to radiation when the transmittance of the radiation through the layer or the film is less than 10%. In the rest of the description, a layer or a film is said to be transparent to radiation when the transmittance of the radiation through the layer or film is greater than 10%. According to one embodiment, for the same optical system, all the elements of the optical system which are opaque to radiation have a transmittance which is less than half, preferably less than a fifth, more preferably less than a tenth, of the transmittance the weakest of the elements of the optical system transparent to said radiation. In the remainder of the description, the term "useful radiation" is used to refer to the electromagnetic radiation passing through the optical system in operation. In the remainder of the description, the term "optical element of micrometric size" refers to an optical element formed on one face of a support whose maximum dimension, measured parallel to said face, is greater than 1 μm and less than 1 mm.

[0035] Embodiments of optical systems will now be described for optical systems comprising a matrix of micrometric-sized optical elements in the case where each micrometric-sized optical element corresponds to a micrometric-sized lens, or microlens, composed two diopters. However, it is clear that these embodiments can also be implemented with other types of optical elements of micrometric size, each optical element of micrometric size being able to correspond, for example, to a Fresnel lens of micrometric size, to a micron-sized gradient index lens or to a micron-sized diffraction grating.

In the remainder of the description, visible light is electromagnetic radiation whose wavelength is between 400 nm and 700 nm, and, in this range, red light is electromagnetic radiation whose wavelength is between 600 nm and 700 nm. Infrared radiation is radiation electromagnetic wave whose wavelength is between 700 nm and 1 mm. In infrared radiation, a distinction is made in particular between near infrared radiation, the wavelength of which is between 700 nm and 1.7 μm.

[0037] Figure 1 illustrates, by a sectional view, partial and schematic, an embodiment of an image acquisition system 11.

The image acquisition system 11, illustrated in FIG. 1, comprises: an image acquisition device 13 (DEVICE); and a processing unit 15 (Processing Unit - PU).

The processing unit 15 preferably comprises signal processing means provided by the device 11, not shown in Figure 1. The processing unit 15 comprises, for example, a microprocessor.

The device 13 and the processing unit 15 are preferably connected by a connection 17. The device 13 and the processing unit 15 are, for example, integrated in the same circuit.

Figure 2 illustrates, in a sectional view, partial and schematic, an embodiment of an image acquisition device 19 comprising an angular filter.

The image acquisition device 19 shown in Figure 2 comprises, from bottom to top in the orientation of the figure: an image sensor 21; and an angular filter 23, covering the image sensor 21.

In the present description, the embodiments of the devices of FIGS. 2 to 4 are represented in space according to a direct orthogonal XYZ coordinate system, the Y axis of the XYZ mark being orthogonal to the upper face of the image sensor 21.

The image sensor 21 comprises an array of photon sensors 25, also called photodetectors. The photodetectors 25 are preferably arranged in matrix form. The photodetectors 25 may be covered with a protective coating and/or a color filter (not shown). The photodetectors 25 preferably all have the same structure and the same properties/characteristics. In other words, all the photodetectors 25 are substantially identical except for manufacturing differences. The image sensor 21 further comprises conductive tracks and switching elements, in particular transistors, not shown, allowing the selection of the photodetectors 25. The photodetectors 25 are preferably made of organic materials. The photodetectors 25 may correspond to organic photodiodes (OPD, Organic Photodiode), to organic photoresistors, to amorphous or monocrystalline silicon photodiodes integrated on a thin-film transistor substrate (TFT, Thin Film Transistor) or a transistor substrate. metal-oxide gate field effect, also called MOS (Metal Oxide Semiconductor) transistors.

The organic photodiodes 25 of the image sensor 21 comprise, for example, a mixture of poly(3,4-ethylenedioxythiophene) (PEDOT) and sodium poly(styrene sulfonate) (PSS). The substrate is for example made of silicon, preferably of monocrystalline silicon. The channel, source and drain regions of the TFT transistors are for example made of amorphous silicon (a-Si or amorphous Silicon), of indium, gallium, zinc and oxide (IGZO Indium Gallium Zinc Oxide) or of low temperature polycrystalline silicon (LTPS or Low Temperature Polycrystalline Silicon).

According to one embodiment, each photodetector 25 is adapted to detect visible radiation and/or infrared radiation.

The angular filter 23 comprises: an array 27 of microlenses 29 of micrometric size, for example plano-convex; a first matrix 31 or layer of first holes or openings 33 delimited by first walls 35 that are opaque in the visible and/or infrared domains; and a second matrix 41 of second holes 43 or openings delimited by second walls 45, the network 27 of microlenses 29 being located between the first matrix 31 and the second matrix 41.

According to one embodiment, the array 27 of microlenses 29 is formed on and in contact with a substrate or support 28, the substrate 28 then being interposed between the microlenses 29 and the first matrix 31.

The substrate 28, when present, can be made of a transparent polymer which does not absorb, at least, the wavelengths considered, here in the visible and infrared range. This polymer may in particular be poly(ethylene terephthalate) PET, poly(methyl methacrylate) PMMA, inecyclic olefin polymer (COP), polyimide (PI), polycarbonate (PC). The thickness of substrate 28 can vary between 1 μm and 100 μm, preferably between 10 μm and 100 μm. The substrate 28 can correspond to a colored filter, to a polarizer, to a half-wave plate or to a quarter-wave plate.

The microlenses 29 can be made of silica, of PMMA, of a positive photosensitive resin, of PET, of poly(ethylene naphthalate) (PEN), of COP, of polydimethylsiloxane (PDMS)/silicone, epoxy resin or acrylate resin. The microlenses 29 can be formed by creeping blocks of a photosensitive resin. The microlenses 29 can additionally be formed by molding on a layer of PET, PEN, COP, PDMS/silicone, epoxy resin or acrylate resin. The microlenses 29 are convergent microlenses each having a focal distance f of between 1 μm and 100 μm, preferably between 1 μm and 70 μm. According to one embodiment, all the microlenses 29 are substantially identical.

According to the present embodiment, the microlenses 29 and the substrate 28, when present, are preferably made of transparent or partially transparent materials, that is to say transparent in part of the spectrum considered for the targeted field, for example, imaging, over the range of wavelengths corresponding to the wavelengths used during the exposure of an object to be imaged.

The flat faces of the microlenses 29 face the first openings 33.

The thickness of the first walls 35 is called "hl". The walls 35 are, for example, opaque to the radiation detected by the photodetectors 25, for example absorbing and/or reflecting with respect to the radiation detected by the photodetectors 25. The walls 35 absorb or reflect in the visible and/or the near infrared and/or the infrared. The walls 35 are, for example, opaque at wavelengths comprised between 450 nm and 570 nm, used for imaging (for example biometrics and fingerprint imaging) and/or opaque at wavelengths red and 1 infrared.

In the present description, the upper face of the layer 31 is the face of the layer 31 located at the interface between the layer 31 and the substrate 28 (or if necessary the array of microlenses 29). Also referred to as the lower face of the layer 31 is the face of the layer 31 located opposite the upper face.

In Figure 2, the openings 33 are shown with a trapezoidal section in the YZ plane. Generally, each opening 33 can be square, rectangular or funnel-shaped. Each opening 33, seen from above (that is to say in the XZ plane), can have a circular, oval or polygonal shape, for example triangular, square, rectangular or trapezoidal. Each opening 33, viewed from above, has a preferably circular shape. The width of an opening 33 is defined as the characteristic dimension of the opening 33 in the plane XZ. For example, for an opening 33 having a square section in the XZ plane, the width corresponds to the dimension of one side and for an opening 33 having a circular section in the XZ plane, the width corresponds to the diameter of the opening 33. In the example represented, the width of the openings 33, at the level of the upper face of the layer 31, is greater than the width of the openings 33, at the level of the lower face of the layer 31. , the center of an opening 33 is called the point situated at the intersection of the axis of symmetry of the openings 33 and of the lower face of the layer 31. For example, for circular openings 33, the center of each opening 33 is located on the axis of revolution of the opening 33.

According to one embodiment, the first openings 33 are arranged in rows and in columns. The rows, the columns, can be staggered, that is to say that two successive rows, two successive columns, are misaligned. The openings 33 can all have substantially the same dimensions. We call "wl" the diameter openings 33 (measured at the base of the openings, that is to say at the interface with the substrate 28 or the microlenses 29). "PI" is the repetition pitch of the openings 33, that is to say the distance, along the X axis or the Z axis, between the centers of two successive openings 33 of a row or a column.

Each first aperture 33 is preferably associated with a single microlens 29 of the first matrix 31. The optical axes of the microlenses 29 are preferably aligned with the centers of the apertures 33 of the first matrix 31. The diameter of the microlenses 29 is preferably greater than the maximum section (measured perpendicular to the optical axes) of the openings 33.

The pitch PI can be between 4 μm and 50 μm, for example equal to approximately 15 μm. The height hl can be between 1 μm and 1 mm, preferably be between 1 μm and 20 μm. The width wl can preferably be between 1 μm and 50 μm, for example be equal to around 10 μm.

According to the embodiment illustrated in Figure 2, each photodetector 25 is associated with four openings 33 (it is for example associated with two openings 33 along the axis

X and two openings 33 along the Z axis). In practice, the resolution of the angular filter 23 can be more than four times higher than the resolution of the image sensor 21. In other words, in practice, there can be more than four times more first openings 33 than photodetectors 25.

The structure associating the array 27 of microlenses

29 and the first matrix 31 is adapted to filter the incident radiation as a function of the incidence of the radiation relative to the optical axes of the microlenses 29 of the array 27. In other words, the structure is adapted to filter the incident rays, arriving on the microlenses, according to their incidences. The structure associating the network 27 of microlenses 29 and the first matrix 31 is adapted to block the rays of the incident radiation whose respective incidences relative to the optical axes of the microlenses 29 of the filter 23 are greater than a first maximum incidence. This structure is adapted to allow only rays to pass whose incidence relative to the optical axes of the microlenses 29 is less than the first maximum incidence. For example, the structure only lets through incident rays having an incidence of less than 45°, preferably less than 30°, more preferably less than 10°, even more preferably less than 4°, for example of the order of 3 .5° .

The first openings 33 are, for example, filled with air, with a partial vacuum or with a material that is at least partially transparent in the visible and infrared domains. The filling material of the openings 33 optionally forms a layer 37 on the lower face of the first matrix 31 so as to cover the first walls 35 and planarize said lower face of the first matrix 31.

The microlenses 29 are preferably covered by a layer 39 of planarization. Layer 39 is made of a material that is at least partially transparent in the visible and infrared domains, it can then play the role of a color filter.

According to the embodiment illustrated in FIG. 2, the second matrix is located above the network 27 of microlenses 29. More precisely, the second matrix is located on the upper face of the layer 39. The thickness of the second walls 45 is called "h2". The second walls 45 are, for example, of the same nature and of the same opacity as the first walls 35.

In Figure 2, the openings 43 are shown with a section in the rectangular YZ plane. In general, each opening 33 can have a square, triangular, trapezoidal shape or have the shape of a funnel. Each opening 43, seen from above (XZ plane), can have a circular, oval or polygonal shape, for example triangular, square, rectangular or trapezoidal. Each opening 43, viewed from above, has a preferably circular shape.

According to one embodiment, the second openings 43 are arranged in rows and in columns. The openings can be staggered. The openings 43 can all have substantially the same dimensions (except for manufacturing variations). The width or diameter of the openings 43 is called "w2" (measured at the base of the openings, that is to say at the interface with the layer 39). According to one embodiment, the openings 43 are arranged regularly along the rows and along the columns. “P2” is the repetition pitch of the openings 43, that is to say the distance in top view between the centers of two successive openings 43 of a row or of a column.

According to the embodiment illustrated in FIG. 2, there are at least twice as many, preferably at least four times as many second openings 43 as first openings 33. Thus the pitch P2 is less than the pitch PI and the width w2 is less than width wl . An advantage of providing a pitch P2 less than the pitch PI, and therefore a number of openings 43 greater than the number of openings 41, is that this makes it possible not to have any impact on the quality of the image formed on the sensor (derived from Nyquist theory) . In particular, in the example of FIG. 2, the matrix 41 does not will not be imaged on the sensor through the array 31. This is particularly true when the pitch P2 of the array 41 is at least twice and preferably at least 4 times less than the pitch P1 of the array 31. An alternative solution would be to perfectly align the 2 matrices but this can be relatively complex to implement. Providing a difference in pitch, preferably by a factor at least equal to 2, makes it possible not to have to make this alignment.

According to one embodiment, there are at least twice as many, preferably at least four times more, first openings 33 than second openings 43. Thus the pitch PI is less than the pitch P2 and the width wl is less than the width w2.

The pitch P2 can be between 4 μm and 50 μm, for example equal to around 6 μm. The height h2 can be between 1 μm and 100 mm, preferably be between 1 μm and 50 μm. The width w2 can preferably be between 1 μm and 45 μm, for example be equal to around 4 μm.

The second openings 43 are, for example, filled with air, a partial vacuum or a material at least partially transparent in the visible and infrared domains, for example a material used as a filter. color .

The second matrix 41 is adapted to filter the incident radiation as a function of the incidence of the radiation with respect to the Y axis. The second matrix 41 is adapted to only let through rays having an incidence less than a second maximum incidence, strictly greater than the first maximum incidence. In other words, the second matrix 41 is adapted to allow only rays to pass, arriving on the matrix 41, having an incidence less than the second maximum incidence. The second maximum incidence is preferably greater than 15°. The second maximum incidence is preferably less than 60°, preferably less than or equal to 30°. In other words, the second matrix 41 is adapted to block the incident rays whose respective incidences, with respect to the Y axis, are greater than the second maximum incidence.

The structure comprising the network 27 of microlenses 29 and the first matrix 31 of openings 33 theoretically makes it possible to block all the rays whose incidence is greater than the first maximum incidence. However, in practice, it is observed that certain rays of incidence greater than the first maximum incidence nevertheless manage to cross the first matrix 31. These are rays of incidence greater than the first maximum incidence which reach a microlens 29 and pass through the underlying opening 33 of a neighboring microlens 29. This phenomenon is called optical crosstalk or parasitic coupling and can lead to a drop in resolution of the photodetectors 25. The purpose of the second matrix 41 is to block the rays of incidences greater than the second maximum incidence and which could lead to optical crosstalk.

In Figure 2, each ray arrives with the same incidence on the upper face of the matrix 41 and on the microlenses 29. In Figure 2, when we speak of incident rays, we then speak of incident rays to the device of acquisition of images 19. The radiation incident on the device 19 comprises: rays 47 of zero incidence (perpendicular to the planar faces of the microlenses 29); rays 49 of incidence a strictly greater than 0° and less than or equal to the first maximum incidence, for example approximately 4°; rays 51 of incidence p strictly greater than the first maximum incidence and less than or equal to the second maximum incidence, for example approximately 20°; and rays 53 of incidence y strictly greater than the second maximum incidence.

Some of the rays incident on the device 19 are nevertheless blocked by the walls even though they have an incidence lower than the second maximum incidence. These are the rays which arrive on the upper faces of the walls 45 or on the side walls of the walls 45. The proportion of rays of incidence lower than the second maximum incidence and nevertheless blocked depends on the respective incidence of the rays. These rays of Angles of attack lower than the second maximum angle of attack and nevertheless blocked are not represented in figure 2.

[0075] The incident rays 47, 49 and 51 illustrated in FIG.

2 are the incident rays whose incidence is less than the second maximum incidence and which are neither blocked by the upper faces nor by the side walls of the walls 45.

Each ray 47 passes through the second matrix 41 and the array 27 of microlenses 29 emerging from the microlens 29 which it passes through so as to pass through the image focus of said microlens 29. The image focus of each microlens 29 is located on or near the lower face of the first array 31 of first apertures 33, at the center of the aperture 33 with which the microlens 29 is associated. The structure associating the network 27 of microlenses 29 and the first matrix 31 does not block the rays 47. Each ray 47 is therefore picked up by the image sensor 21 and more precisely by the photodetector 25 underlying the microlens 29 through which the ray 47 passes.

The rays 49 are similar to the rays 47, in their paths throughout the angular filter 23. Neither the second matrix 41 nor the structure associating the array 27 of microlenses 29 and the first matrix 31 block the rays 49. Each ray 49 is therefore picked up by the image sensor 21 and more precisely by the photodetector 25 underlying the microlens 29 through which said ray passes.

Each spoke 51 crosses the second matrix 41 so as to reach the microlenses 29. The spokes 51 are however blocked by the structure associating the array 27 of microlenses 29 and the first matrix 31, unlike the spokes 49 or 47. The spokes 51 therefore do not reach the photodetectors 25.

The rays 53, having incidences greater than the second maximum incidence are completely blocked by the second matrix 41. The rays 53 therefore do not reach the microlenses 29 and the photodetectors 25.

At the output of the angular filter 23, the image sensor 21 only picks up the rays 47 and 49, having incidences lower than the first maximum incidence.

[0081] Figure 3 illustrates, by a sectional view, partial and schematic, another embodiment of an image acquisition device 55.

More specifically, FIG. 3 illustrates an image acquisition device 55 similar to device 19 illustrated in FIG. 2, except that second matrix 41 is located between array 27 of microlenses 29 and first matrix 31 . In FIG. 3, the second matrix 41 is located between the array 27 of microlenses 29 and the substrate 28, however in practice, the second matrix 41 can be located between the substrate 28 and the first matrix 31.

According to the embodiment illustrated in FIG. 3, and unlike the device 19 illustrated in FIG. 2, the incident rays first reach the microlenses 29 and are deflected by them. The deflected rays are then filtered, by the second matrix 41 then by the first matrix 31.

For example, each ray 47, 49, 51 and 53 refracted by a microlens 29 is deflected by an angle so as to form an angle 5, a', p', y' with the optical axis of the microlens 29.

Those of the rays 47, 49, 51 and 53 arriving on the upper face of the second matrix 41 with an incidence greater than the second maximum incidence are blocked by the second matrix 41. In addition, those of the rays 47, 49, 51, 53 arriving on the network of microlenses 29 with incidence greater than the first maximum incidence are blocked by the first matrix 31.

[0087] Figure 4 illustrates, by a sectional view, partial and schematic, another embodiment of an image acquisition device 57.

More particularly, FIG. 4 illustrates an image acquisition device 57 similar to the device 55 illustrated in FIG. 3, except that the second matrix 41 is located between the first matrix 31 and the image sensor 21 .

According to the embodiment illustrated in FIG. 4, and unlike the device 19 illustrated in FIG. 2, the incident rays first reach the microlenses 29 and are deflected by them. The deflected rays are then filtered, by the first matrix 31 then by the second matrix 41.

[0090] Similarly to device 55, each ray 47, 49, 51 and 53 refracted by a microlens 29 is deflected by an angle so as to form an angle 5, a', p', y' with the axis microlens optics 29.

Those of the rays 47, 49, 51 and 53 arriving on the array 27 of microlenses 29 with an incidence greater than the first maximum incidence are blocked by the first matrix 31. Those of the rays 47, 49, 51, 53 arriving only the upper face of the second die with an incidence greater than the second maximum incidence are blocked by the second die 41.

More particularly, FIG. 5 illustrates three curves 59, 61 and 63 each representing the normalized transmittance (Transmission) of the rays in different parts of the angular filter 23 illustrated in FIG. 2, as a function of the incidence of said rays (Angles (°) ) .

The graph illustrated in FIG. 5 comprises: a curve 59 corresponding to the transmittance of the rays passing through the structure associating the array 27 of microlenses 29 and the first matrix 31; a curve 61 corresponding to the transmittance of the rays passing through the second matrix 41; and a curve 63 corresponding to the transmittance of the rays passing through the whole of the angular filter 23 as illustrated in FIG. 2. Each of the curves 59, 61 and 63 was obtained by a simulation in which: the focal length of the microlenses 29 is between 10 μm and 70 μm; the microlenses 29 are positioned on and in contact with a substrate 28 with a thickness of between 10 μm and 60 μm; the first openings 33 are trapezoidal in shape; the openings 33 have a width wl at the upper face of the matrix 31 of between 1 μm and 45 μm, a width at the level of the lower face of the matrix 31 of between 1 μm and 40 μm, a height hl of between 1% m and 50 μm, and a pitch PI of the order of 5 μm; the openings 43 are rectangular in shape; and the openings 43 have a width w2 of between 1 μm and 45 μm, a height h2 of between 1 μm and 50 μm and a pitch P2 of between 4 μm and 59 μm.

In practice, the combination of the network of microlenses and the first matrix, respectively the second matrix, does not make it possible to block clearly the rays whose incidence is greater than the first maximum incidence, respectively the second incidence. maximum. We then speak of blocking value, that is to say the first maximum incidence, respectively the second maximum incidence, as being the half-width at half the maximum transmittance of the grating 27 and of the matrix 31, respectively the matrix 41 or half-width at half-height of curve 59, respectively curve 61. That is to say that the rays whose incidence is equal to this value are blocked at 50%, the rays whose incidence is greater than this value are mostly unblocked and rays whose incidence is less than this value are mostly blocked by the association of the network of microlenses and the first matrix 31, respectively by the second matrix 41.

With the dimensions indicated above, the half-width at half-height of the curve 59 or half-width at half the maximum transmittance of the first matrix (HWHM: Half Width High Maximum) is equal to approximately 3, 5° and the half-width at half-height of the curve 61 or half-width at half the maximum transmittance of the second matrix is equal to approximately 20°.

The first curve 59 comprises two second peaks, called secondary peaks, for incidences of about 25° and -25°. The transmittance of rays having an incidence equal to approximately 25° is approximately equal to 0.05. These secondary peaks correspond to the passage, through the network of microlenses 29 or the first matrix 31, of rays having incidences of between about 20° and about 40°, picked up by a photodetector 25 close to the photodetector 25 underlying the microlens 29 or the aperture 33 through which the ray passes.

[0099] The second curve 61 is characteristic of a band pass filter allowing the rays whose incidences are between 20° and -20° to pass.

Mathematically, the values of curve 63 correspond to a multiplication of the value of curve 59 and the value of curve 61 for the same given incidence. The third curve 63 has, in comparison to curve 59, no secondary peaks. The transmittance of the rays beyond 20° then tends towards 0.

[0101] An advantage which appears is that the combination of two arrays of apertures makes it possible to completely block the incident rays having an incidence greater than the second maximum incidence. Complete blocking of incident rays having an incidence greater than the second maximum incidence makes it possible to reduce, or even eliminate, the optical crosstalk corresponding to the secondary peaks 63 .

[0102] Various embodiments and variants have been described. The person skilled in the art will understand that certain features of these various embodiments and variations could be combined, and other variations will occur to the person skilled in the art. The embodiments described are not limited to the examples of dimensions and materials mentioned above.

[0103] Finally, the practical implementation of the embodiments and variants described is within the abilities of those skilled in the art based on the functional indications given above.

Claims

CLAIMS Angular filter (23) for an image acquisition device (19; 55; 57) comprising a stack comprising: a first matrix (31) of first openings (33) delimited by first walls (35) opaque to radiation visible and/or infrared; an array (27) of microlenses (29); and a second matrix (41) of second openings (43) delimited by second walls (45) opaque to visible and/or infrared radiation, in which the pitch (P2) of the second matrix (41) is smaller than the pitch (PI ) of the first die (31). Angle filter according to claim 1, wherein the number of second apertures (43) is at least twice as high as the number of first apertures (33). Angled filter according to claim 1 or 2, in which the array (27) of microlenses (29) is located between the first array (31) and the second array (41). Angle filter according to claim 1 or 2, wherein the second array (41) is located between the array (27) of microlenses (29) and the first array (31). Angle filter according to claim 1 or 2, wherein the first array (31) is located between the microlens array (29) and the second array (41). Angled filter according to any one of Claims 1 to 5, in which: the structure comprising the array (27) of microlenses (29) and the first matrix (31) is adapted to block incident rays having an incidence, with respect to the optical axes of the microlenses (29), greater than a first maximum incidence; and the second matrix (41) is adapted to block incident rays having an incidence, with respect to the optical axes of the microlenses (29), greater than a second maximum incidence, the second maximum incidence being greater than the first maximum incidence. Angled filter according to claim 6, in which the first maximum incidence which corresponds to the half-width at half the maximum transmittance is less than 10°, preferably less than 4°. An angle filter as claimed in claim 6 or 7, wherein the second maximum incidence which corresponds to the half-width at half the maximum transmittance is greater than 15° and less than 60°. Angular filter according to any one of Claims 6 to 8, in which the second maximum incidence is less than or equal to 30°. . Angled filter according to any one of claims 1 to 9, in which the first openings (33) are filled with air, a partial vacuum or a material at least partially transparent in the visible and optical domains. infrared. . Angled filter according to any one of claims 1 to 10, wherein the second openings (43) are filled with air, a partial vacuum or a material at least partially transparent in the visible and optical domains. infrared.

. Angled filter according to any one of Claims 1 to 11, in which a single microlens (29) is directly above a first opening (33). . Angled filter according to any one of Claims 1 to 11, in which each microlens (29) is vertical to a single first opening (33). Angled filter according to any one of Claims 1 to 13, in wherein the optical axis of each microlens (29) is aligned with the center of a first aperture (33). . Image acquisition device (19; 55; 57) comprising an angular filter (23) according to any one of claims 1 to 14 and an image sensor (21).