EP4214467A1 - Capteur vibrant avec unité d'hybridation - Google Patents
Capteur vibrant avec unité d'hybridationInfo
- Publication number
- EP4214467A1 EP4214467A1 EP21777508.9A EP21777508A EP4214467A1 EP 4214467 A1 EP4214467 A1 EP 4214467A1 EP 21777508 A EP21777508 A EP 21777508A EP 4214467 A1 EP4214467 A1 EP 4214467A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- transducers
- detection signal
- detection
- electronic
- processing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional [3D] vibrators, e.g. wine glass-type vibrators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
Definitions
- the present invention relates to an inertial rotation sensor with a vibrating resonator.
- a rotation sensor is a device measuring the component of the angular rotation speed vector which is collinear with an axis of the sensor called the sensitive axis.
- Inertial rotation sensors comprising a mechanical resonator, such as a bell or beams, associated with transducers arranged to keep the resonator vibrating and transmit a measurement to a processing unit arranged to generate information, called "electric angle". , supposedly representative of the integral of the projection, on the sensitive axis of the resonator, of the speed of rotation undergone by the sensor.
- the electrical angle is affected by different faults and errors.
- the angle bias depends on the initial conditions and is eliminated by a discrete derivation when calculating the angular velocity.
- the velocity bias and the scale factor of the inertial sensor are by nature n-periodic functions of the electrical angle.
- the Fourier coefficients characterizing bias in speed and scale factor depend on the individual defects of realization of the inertial sensors. An individual calibration step carried out in the factory makes it possible to compensate for the effects of these faults in the operational temperature range of the inertial sensor, but this operation is imperfect and, moreover, has no effect on the evolution of the parameters which is due to ageing.
- the navigation units use the inertial sensors so as to minimize as much as possible the effect of drift harmonics and the effect of the scale factor. Nevertheless, the techniques used for these purposes have no effect on the zero harmonic so that the implementation must imperatively preserve the weakness of the drift of the latter.
- inertial rotation sensor comprising a vibrating resonator associated with at least two modally orthogonal transducers each formed by at least one pair of electrodes and connected via a multiplexing device to the same electronic unit of processing in such a way that each of the transducers forms in turn:
- excitation signals also called control signals
- detector transmitting successively via the same branch unit detection electronics for processing the measurement signals which will enable the development of the electrical angle .
- the same processing electronics develops, during a control phase, the excitation signals successively applied to the transducers playing the role of motor and successively collects then processes, during a detection phase, the measurement signals transmitted by all the transducers acting as detectors.
- the processing anisotropy, both in motorization and in detection, is therefore eliminated and the performance of the sensor is improved due to the minimization of the harmonic drift.
- the performance depends on the establishment time of the electronics which must be as short as possible compared to the duration of the detection and control phases. This results in the choice of electronics having a passband which is large compared to the inverse of the detection duration. This results in strong aliasing of the electronic noise during sampling, aliasing which greatly degrades the signal-to-noise ratio.
- the solution used to preserve the drift precision therefore has as its counterpart a strong degradation of the angle noise. This degradation, which is acceptable for navigation applications, is penalizing for piloting and prohibitive for stabilization.
- An object of the invention is to provide an inertial rotation sensor with a vibrating resonator which at least partially overcomes the aforementioned drawbacks.
- an inertial rotation sensor comprising a vibrating resonator associated with at least two first transducers connected to a first electronic processing unit via an electronic multiplexing device to operate successively in motorization mode and detection mode and to provide at least a first detection signal.
- the vibrating resonator is associated with at least two second transducers connected, via two charge amplifiers and two analog-digital converters, to a second electronic processing unit to operate in continuous time detection mode and supply at least one second signal of detection.
- the sensor comprises an electronic hybridization unit to form a third detection signal from the first detection signal and the second detection signal.
- the first transducers in control mode receive an excitation signal coming from the same processing unit and all the measurement signals emitted by the first transducers in detection mode are collected and processed by the same processing unit: 1' Processing anisotropy is eliminated allowing precise navigation.
- the second transducers operate on the contrary in continuous time, that is to say that the second transducers of the inertial sensor are used as detector transducers physically separated from the transducers ensuring the command (the latter are here the first transducers in command mode) .
- the anti-aliasing filter prevents sampling from degrading the noise density of the analog signal near the resonant frequency so that angle noise is naturally low.
- the asymmetries of the electronic channels, on the one hand, and those of the detection transducers, on the other hand degrade the harmonic content of the electrical angle so that the second signal does not allow precise navigation.
- the hybridization unit combines the first detection signal and the second detection signal to provide a third detection signal which can thus benefit from the accuracy of the first detection signal and the low noise of the second detection signal.
- the vibrating resonator has a bell shape having a flat annular edge carrying at least one electrode extending opposite electrodes integral with a frame to form the first transducers and the second transducers.
- the sensor comprises two first transducers modally orthogonal and two second transducers modally orthogonal each formed of two pairs of electrodes;
- each transducer being formed of two pairs of electrodes.
- FIG. 1 is a schematic representation of a sensor according to the invention
- FIG. 2 is a schematic representation similar to that of FIG. 1 of the time-sharing assembly of this sensor;
- FIG. 3 is a schematic representation of a sensor according to a variant of the invention.
- the inertial rotation sensor comprises, in a manner known per se, a vibrating resonator 1 here having the shape of a bell.
- the vibrating resonator 1 is associated with transducers formed here of electrodes which are carried by an electrode holder frame and which extend facing an annular electrode carried by a plane annular edge of the resonator.
- the transducers here comprise first transducers 2.1 (here two in number referenced 2.11, 2.12) and second transducers 2.2 (here two in number referenced 2.21, 2.22). Every first transducer
- 2.1 comprises two pairs of electrodes (a pair consists of an electrode of the frame and of the annular electrode; within each pair, the electrodes are facing each other), the pairs being diametrically opposed to each other (the two pairs correspond to one channel), and each second transducer
- the transducers 2.1, 2.2 comprises two pairs of electrodes (within each pair, the electrodes face each other), the pairs being diametrically opposed to each other (the two pairs correspond to one channel).
- the transducers 2.1, 2.2 here have a uniform angular distribution and the electrodes fixed to the frame here have the same dimensions.
- the first transducers 2.11 and 2.12 are modally orthogonal.
- the second transducers 2.21 and 2.22 are modally orthogonal.
- the first transducers 2.1 are connected to a first electronic processing unit 6 via a multiplexing stage 5 to operate successively in motorization mode and in detection mode and to supply a first detection signal ⁇ t P .
- the multiplexing stage 5 is an electronic circuit arranged, in a manner known per se, to subject the annular electrode to a DC voltage and provide alternately:
- the single processing unit 6 is arranged to generate the control signals which are transmitted to the first transducers 2.1 to put them in control mode.
- the signal f is alternately transmitted via a terminal 16 to the first transducers 2.11 and 2.12 in command mode (corresponding to a command action time).
- the processing circuit also comprises a detection branch 9 comprising an input terminal 17 which alternately receives measurement signals from the first transducers 2.11 and 2.12 in detection mode (corresponding to a detection action time).
- Terminal input 17 is connected to the summing input of a charge amplifier 14 which converts a current signal i into a voltage signal.
- the detection branch 9 further comprises a corrector member 10 having a very high gain comparable to an infinite gain, followed by an analog/digital converter 11.
- the first detection signal 0 tp is deduced from the output signal of the analog/digital converter. digital 11 by a processing algorithm known in itself.
- the detection branch 9 is associated with the control branch 7 by switches 12 to form a feedback loop which is open during control action times and closed during detection action times.
- the feedback loop further comprises a component 13 ensuring a division by the equivalent impedance of the circuit and connected to the reverse terminal of the charge amplifier 14. It can be seen that the gain error and the phase error introduced during of the control by the gain k of the converter are thus eliminated during detection, which makes it possible to improve the performance of the sensor and to minimize the phase error on the quadrature control of the sensor.
- the second transducers 2.2 are connected, via a preprocessing stage 3, to a second electronic processing unit 4 to operate continuously in detection mode and supply a second detection signal 0 tc .
- the preprocessing stage 3 is an electronic circuit which comprises, for each of the second transducers 2.2, a charge amplifier 3.1 having an input connected to this second transducer 2.2, an anti-aliasing filter 3.2 having an input connected to a output of the charge amplifier 3.1, and an analog-digital converter 3.3 having an input connected to an output of the anti-aliasing filter 3.2 and an output connected to an input of the electronic processing unit 4.
- Each second transducer 2.2 thus forms a detection chain with the charge amplifiers 3.1, anti-aliasing filter 3.2, and analog-digital converter 3.3 which are connected to it.
- the 3.3 analog-to-digital converter is arranged to have a high resolution and a high sampling frequency so that the noise density due to the analog-to-digital conversion is negligible (the level of noise tolerated by different users being variable, it does not there is no absolute rule but we obtain very good results with for example 20 bits and 1MHz).
- the anti-aliasing filter 3.2 is arranged to eliminate the frequencies above half the sampling frequency so that the noise density of the analog signal in the vicinity of the resonance frequency is not degraded by the sampling. Naturally low angle noise is thus obtained.
- the electronic processing unit 4 is known per se and is arranged to produce the second detection signal Ote from the signals supplied by the second transducers 2.2.
- the sensor comprises an electronic hybridization unit 20 to form a third detection signal 0 from the first detection signal 0t P and from the second detection signal 0tc .
- the electronic hybridization unit 20 here comprises:
- a low-pass filter 21 having an input connected to the first electronic processing unit 6 to receive the first detection signal 0t P and an output connected to a first input of an adder 23 having an output supplying the third detection signal 0;
- a high-pass filter 22 having an input connected to the second processing unit 4 to receive the second detection signal Ote and an output connected to a second input of adder 23.
- the low-pass filter 21 and the high-pass filter 22 have complementary transfer functions, ie their sum is equal to 1 at all frequencies.
- the first transducer 2.11 will successively have an action time cl (corresponding to the control mode of the transducer) and a detection time dl (corresponding to the detection mode of the transducer) whose transition from one to the other is controlled by the first electronic processing unit 6;
- the first transducer 2.12 will also successively have an action time c2 and a detection time d2, the transition from one to the other is controlled by the first electronic processing unit 6;
- the second transducers 2.21 and 2.22 are continuous time detectors and the second electronic processing unit 4 permanently processes the measurement signals, which are transmitted to it by the second transducers 2.2 via the preprocessing stage 3, to produce the second signal detection 0tc;
- the electronic hybridization unit generates the third detection signal 0 from the first detection signal 0t p and from the second detection signal 0t c .
- the third detection signal 0 thus results from a low-frequency readjustment of the second detection signal 0tc by the first detection signal 0t p .
- the sensor has a single multiplexing stage combining the first two transducers to a single processing unit and operating in multiplexing makes it possible to eliminate not only the anisotropy between the control chains and the detection chains of the first transducers depending on whether they are in control or detection mode, but also the crosstalk between control and detection for each first transducer so that the performance of the sensor is further improved.
- the invention is applicable to existing inertial sensors from the moment when the number of transducers is sufficient to form a group operating as detectors in continuous time and a group operating alternately as detectors and as motors.
- the sensor according to the variant of FIG. 3 differs from the sensor previously described in that it comprises sixteen electrodes secured to the electrode holder frame instead of eight electrodes.
- the transducers here include four first transducers 2.1 (referenced 2.11 to 2.14) and four second transducers 2.2 (referenced 2.21 to 2.24).
- Each first transducer 2.1 comprises two pairs of electrodes (namely an electrode of the frame and the annular electrode; within each pair, the electrodes are facing each other), the pairs being diametrically opposite the to each other (the two pairs correspond to a channel) .
- Each second transducer 2.2 comprises two pairs of electrodes (within each pair, the electrodes face each other), the pairs being diametrically opposed to each other (the two pairs correspond to a way) .
- the transducers 2.1, 2.2 here have a uniform angular distribution and the electrodes fixed to the frame here have the same dimensions.
- the groups of first transducers (2.11, 2.13) and (2.12. 2.14) are modally orthogonal.
- the groups of second transducers (2.21, 2.23) and (2.22, 2.24) are modally orthogonal.
- the second transducers 2.21, 2.23 physically orthogonal to each other are each connected to an amplifier 3.1 whose output is connected for one to the positive input of an adder 3.15 and for the other to the negative input of this same adder 3.15.
- the second transducers 2.22, 2.24 physically orthogonal to each other are each connected to an amplifier 3.1 whose output is connected for one to the positive input of an adder 3.15 and for the other to the negative input of this same adder 3.15.
- Each adder 3.15 has an output connected to an anti-aliasing filter 3.2 connected as before to an analog/digital converter 3.3 connected to the electronic processing unit 4.
- the hybridization algorithm generates 0 taking into account the fact that the electrical angles ⁇ t P and ⁇ tc are shifted by 45°.
- the senor according to the invention can have a structure different from that described.
- the resonator may have another shape and for example comprise vibrating beams parallel to each other as in the sensors marketed under the "Quapason” brand by the company SAFRAN ELECTRONICS & DEFENSE or in the angular sensors known as "DELCO” (with for example a configuration with eight pairs of electrodes).
- the sensor can also be of the MEMS type such as that which is the subject of patent FR-A-2983574. Whatever the type of resonator, in time sharing, preferably one uses sequentially:
- the electronic processing and hybridization units may have a structure different from that described.
- the electronic processing and hybridization units can belong to the same electronic circuit or to separate electronic circuits.
- Anti-aliasing filters are optional.
- the transducers can be arranged according to a non-uniform angular distribution.
- the electrodes can have different sizes.
- the electrodes of the second transducers can have a larger surface area than the electrodes of the first transducers.
- the transducers can be capacitive, piezoelectric...
- each first transducer delivers after an analog/digital conversion a first detection signal and each second transducer delivers after an analog/digital conversion a second detection signal, and the electronic hybridization unit forms the third detection signal at from the first detection signals and the second detection signals.
- the transducers might not be modally orthogonal.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR2009433A FR3114146B1 (fr) | 2020-09-17 | 2020-09-17 | capteur vibrant avec unité d’hybridation |
| PCT/EP2021/075222 WO2022058303A1 (fr) | 2020-09-17 | 2021-09-14 | Capteur vibrant avec unité d'hybridation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP4214467A1 true EP4214467A1 (fr) | 2023-07-26 |
Family
ID=74553898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP21777508.9A Pending EP4214467A1 (fr) | 2020-09-17 | 2021-09-14 | Capteur vibrant avec unité d'hybridation |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12287206B2 (fr) |
| EP (1) | EP4214467A1 (fr) |
| CN (1) | CN116348738B (fr) |
| FR (1) | FR3114146B1 (fr) |
| WO (1) | WO2022058303A1 (fr) |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2863709B1 (fr) * | 2003-12-11 | 2006-02-17 | Sagem | Capteur de rotation inertiel a traitement isotrope |
| EP2191232B8 (fr) * | 2007-09-18 | 2012-02-08 | Atlantic Inertial Systems Limited | Améliorations concernant des capteurs de vitesse angulaire |
| FR2932563B1 (fr) * | 2008-06-13 | 2010-06-18 | Sagem Defense Securite | Capteur de rotation inertiel a derive compensee. |
| US7912664B2 (en) * | 2008-09-11 | 2011-03-22 | Northrop Grumman Guidance And Electronics Company, Inc. | Self calibrating gyroscope system |
| FR2958030B1 (fr) * | 2010-03-23 | 2012-04-20 | Sagem Defense Securite | Procede et dispositif de mesure angulaire avec compensation de non linearites |
| US9013233B2 (en) * | 2010-09-14 | 2015-04-21 | Si-Ware Systems | Interface for MEMS inertial sensors |
| CN102497166B (zh) * | 2011-11-14 | 2014-04-02 | 北京理工大学 | 一种钟形振子的激励电路 |
| FR2983574B1 (fr) | 2011-12-06 | 2014-01-10 | Sagem Defense Securite | Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur |
| FI124794B (fi) * | 2012-06-29 | 2015-01-30 | Murata Manufacturing Co | Parannettu resonaattori |
| FI125238B (en) * | 2012-06-29 | 2015-07-31 | Murata Manufacturing Co | Improved vibration gyroscope |
| FI124624B (en) * | 2012-06-29 | 2014-11-14 | Murata Manufacturing Co | Improved oscillating gyroscope |
| EP2932192B1 (fr) * | 2012-12-12 | 2020-02-05 | The Regents of The University of California | Gyroscope à lecture de fréquence |
| GB201313389D0 (en) * | 2013-07-26 | 2013-09-11 | Atlantic Inertial Systems Ltd | Signal processing |
| JP6303411B2 (ja) * | 2013-11-07 | 2018-04-04 | セイコーエプソン株式会社 | 検出装置、センサー、電子機器及び移動体 |
| US9961451B2 (en) * | 2014-12-15 | 2018-05-01 | Stmicroelectronics S.R.L. | Differential-type MEMS acoustic transducer |
| US10030976B2 (en) * | 2015-05-13 | 2018-07-24 | Kionix, Inc. | Phase-based measurement and control of a gyroscope |
| FR3046154A1 (fr) * | 2015-12-28 | 2017-06-30 | Centre Nat Rech Scient | Procede d'amplification par un resonateur mecanique. |
| EP3455586B1 (fr) * | 2016-05-11 | 2020-08-19 | Murata Manufacturing Co., Ltd. | Boucle de détection secondaire à capacité de retour d'effort |
| US10365104B2 (en) * | 2016-05-11 | 2019-07-30 | Murata Manufacturing Co., Ltd. | Digital controller for a MEMS gyroscope |
| DE102016111134A1 (de) * | 2016-06-17 | 2017-12-21 | Endress+Hauser Gmbh+Co. Kg | Vibronischer Sensor |
| US10788395B2 (en) * | 2017-02-10 | 2020-09-29 | Aktiebolaget Skf | Method and device of processing of vibration sensor signals |
| WO2018157118A1 (fr) * | 2017-02-27 | 2018-08-30 | The Charles Stark Draper Laboratory, Inc. | Système et procédé d'étalonnage pour gyroscope à angle total |
| JP2018165618A (ja) * | 2017-03-28 | 2018-10-25 | セイコーエプソン株式会社 | 信号処理装置、検出装置、物理量測定装置、電子機器及び移動体 |
| JP6950460B2 (ja) * | 2017-10-31 | 2021-10-13 | セイコーエプソン株式会社 | 物理量検出回路、物理量検出装置、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器及び移動体 |
| EP3699610B1 (fr) * | 2019-02-22 | 2023-04-19 | NXP USA, Inc. | Circuit d'interface capacitance-tension |
| CN110865580B (zh) * | 2019-11-27 | 2022-07-26 | 中国船舶重工集团公司第七0七研究所 | 基于时分复用的半球谐振陀螺全差分控制系统及控制方法 |
| EP3913327B1 (fr) * | 2020-05-22 | 2023-05-17 | Murata Manufacturing Co., Ltd. | Gyroscope à essai automatique |
-
2020
- 2020-09-17 FR FR2009433A patent/FR3114146B1/fr active Active
-
2021
- 2021-09-14 WO PCT/EP2021/075222 patent/WO2022058303A1/fr not_active Ceased
- 2021-09-14 EP EP21777508.9A patent/EP4214467A1/fr active Pending
- 2021-09-14 US US18/026,675 patent/US12287206B2/en active Active
- 2021-09-14 CN CN202180069912.2A patent/CN116348738B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20230341227A1 (en) | 2023-10-26 |
| WO2022058303A1 (fr) | 2022-03-24 |
| US12287206B2 (en) | 2025-04-29 |
| FR3114146A1 (fr) | 2022-03-18 |
| FR3114146B1 (fr) | 2022-08-12 |
| CN116348738A (zh) | 2023-06-27 |
| CN116348738B (zh) | 2026-02-27 |
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