EP4168676A1

EP4168676A1 - Micro diaphragm pumping device

Info

Publication number: EP4168676A1
Application number: EP20735496.0A
Authority: EP
Inventors: Agnes Bussmann; Lorenz GRÜNERBEL; Christian Wald; Sebastian Kibler
Original assignee: Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Current assignee: Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date: 2020-06-17
Filing date: 2020-06-17
Publication date: 2023-04-26
Also published as: WO2021254611A1; JP2023529992A; DE112020007326A5; US20230121697A1

Abstract

The invention relates to a micro diaphragm pumping device for pumping a fluid. The micro diaphragm pumping device comprises: - a pump chamber, to which an inlet valve for letting the fluid into the pump chamber, an outlet valve for letting the fluid out of the pump chamber, and a diaphragm device for varying the volume of the pump chamber are assigned, the diaphragm device having a planar actuator for deforming the diaphragm device; and - an influencing device for influencing the planar actuator in order to influence the volume of the pump chamber; wherein the diaphragm device has a planar diaphragm body, which delimits the pump chamber; wherein the planar actuator is disposed on a side of the planar diaphragm body facing away from the pump chamber; wherein the planar actuator is fastened to the planar diaphragm body by means of an electrically insulating adhesive layer so that the planar actuator is electrically insulated from the diaphragm body; wherein at least an embedded portion of a support body, on which or in which a deformation sensor for sensing deformation of the diaphragm device is disposed in order to sense the volume of the pump chamber, is disposed within the electrically insulating adhesive layer; wherein the influencing device, the planar actuator, and the deformation sensor form a closed control circuit for controlling the volumetric flow rate of the micro diaphragm pumping device.

Description

Micromembrane pumping device

description

The present invention relates to a micromembrane pump device for pumping a fluid. Micromembrane pump devices are known, for example, from the documents AU 2015308144 A1 and US 20160153444 A1.

The object of the present invention is to improve such known micromembrane pump devices.

The object is achieved by a micromembrane pump device for pumping a fluid, which has the following features: a pump chamber which has an inlet valve for admitting the fluid into the pump chamber, an outlet valve for discharging the fluid from the pump chamber and a membrane device for varying a volume of the The pumping chamber is assigned, the membrane device having a plate-shaped actuator for deforming the membrane device; and an influencing device for influencing the plate-shaped actuator so as to influence the volume of the pump chamber; wherein the membrane device has a plate-shaped membrane body delimiting the pump chamber; wherein the plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber; wherein the plate-shaped actuator is attached to the plate-shaped membrane body by means of an electrically insulating adhesive layer, so that the plate-shaped actuator is electrically insulated from the membrane body; wherein at least one embedded section of a carrier body is arranged within the electrically insulating adhesive layer, on which or in which a Deformation sensor is arranged to detect a deformation of the membrane device, so as to detect the volume of the pump chamber; wherein the influencing device, the plate-shaped actuator and the deformation sensor form a closed control loop for regulating a ratio between a change in volume of the pump chamber during a working cycle of the micromembrane pump device and a duration of the working cycle of the micromembrane pump device.

The fluid to be pumped can be a liquid or a gas. The pumping chamber is a closed cavity into which the respective fluid can be admitted via an inlet valve and from which the respective fluid can be discharged via an outlet valve. The inlet valve and the outlet valve can each be a passive valve.

The membrane device is part of a housing which surrounds the pump chamber and which is so elastically deformable that the volume of the pump chamber changes, so that when the volume increases, the fluid is sucked into the pump chamber, and when the volume decreases, the fluid is pressed out of the pump chamber. A defined volume flow of the fluid can thus be brought about by periodically increasing and decreasing the volume of the pump chamber.

In order to bring about such volume changes in the pump chamber, the membrane device has a plate-shaped actuator which is designed to deform the membrane device in such a way that the volume of the pump chamber changes. The plate-shaped actuator is preferably an electrically operated actuator.

A plate-shaped design of a body is understood to mean that the body has a significantly smaller extension in one spatial direction than in the other two spatial directions. The actuator can be designed round or polygonal in a plan view.

Furthermore, an influencing device is provided which influences the plate-shaped actuator in order to achieve the desired change in volume of the pump chamber to influence. The influencing device can be an electrical influencing device which generates electrical signals which are fed to the actuator in order to influence it.

The membrane device has an elastically deformable membrane body which delimits the pump chamber and is plate-shaped. The membrane body can for example be attached to a frame or a holder of the housing. However, it can also be designed in one piece with other parts of the housing.

The plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber. It is therefore not in direct contact with the fluid to be pumped, which in particular simplifies the transmission of electrical signals from the influencing device to the actuator.

The plate-shaped actuator is attached to the plate-shaped membrane body by means of an electrically insulating adhesive layer. The adhesive layer is designed to transfer forces from the actuator to the diaphragm body in order to enable deformation of the diaphragm body and thus a change in volume of the pump chamber. The electrically insulated design of the adhesive layer has the effect that the plate-shaped actuator is electrically insulated from the membrane body. As a result, it is even then possible to use a plate-shaped actuator which, on its side inclined towards the membrane body, is electrically supplied independently of the mass when the membrane body is electrically conductive.

The actuator can have a height between 30 pm and 2000 pm, in particular between 45 pm and 1500 pm, in order to ensure the necessary forces. It should have high rigidity, good adhesive properties, resistance to environmental influences (moisture, solvents, temperature, radiation (which is often used for sterilization in medical devices)). In addition, it should be break-proof, durable and electrically dielectric-proof.

The electrically insulated design of the adhesive layer is also advantageous if the membrane body is designed to be electrically insulating, since in this case an electric field strength between the actuator and the fluid to be pumped is is reduced, so that electrical flashovers between the actuator and the fluid can be prevented. This is particularly advantageous when the plate-shaped actuator is operated with higher electrical voltages, for example in the range from 20 V to 400 V.

The adhesive layer should be made as thin as possible on both sides of the embedded section of the carrier body. It should have high rigidity, good adhesive properties, resistance to environmental influences (moisture, solvents, temperature, radiation (which is often used for sterilization in medical devices)). In addition, it should be break-proof, durable, non-conductive and electrically dielectric-proof.

An embedded section of a carrier body is arranged within the electrically insulating adhesive layer, on the surface or inside of which a deformation sensor is arranged, which can detect the volume of the pump chamber over time by detecting a deformation of the membrane device.

The embedded portion of the carrier body can be thinner than 500 μm in order to ensure the required flexibility. It should have high rigidity, good adhesive properties, resistance to environmental influences (moisture, solvents, temperature, radiation (which is often used for sterilization in medical devices). In addition, it should be unbreakable, durable, non-conductive and electrical be puncture resistant.

The influencing device, the plate-shaped actuator and the deformation sensor form a closed control loop for regulating the relationship between a change in volume of the pump chamber (2) during a working cycle of the micromembrane pump device (1) and a duration of the working cycle of the Fluids.

A closed-loop control circuit for influencing a physical variable in a technical process or other systems is generally referred to as a closed-loop control circuit. What is essential here is the direct or indirect feedback of the current value of the controlled variable to the controller, which counteracts a deviation from the setpoint (negative feedback lung). It is the controller's task to regulate the disturbance variables and to determine the time behavior of the controlled variable with regard to the static and dynamic behavior according to the specified requirements.

In the context of the present invention, the influencing device takes on the task of a controller. The controlled variable here is the ratio between the change in volume of the pump chamber during a working cycle of the micromembrane pump device and a duration of the working cycle. The working cycle comprises a phase in which the fluid is let into the pump chamber via the inlet valve and a further phase in which the fluid is let out via the outlet valve. In trouble-free operation, this ratio corresponds to the volume flow of the respective fluid. The volume flow is measured indirectly from the knowledge of the duration of the work cycles, which is specified by the influencing device, and from the knowledge of the deformation of the membrane device, which is detected by the deformation sensor.

The indirect measurements are transmitted to an influencing device so that if the volume flow deviates from a target value, the control of the plate-shaped actuator can be changed so that the desired volume flow is set. In particular, the volume flow can be influenced by increasing or decreasing the amplitude of the change in volume of the pump chamber. Likewise, a frequency of the change in volume of the pump chamber can be increased or decreased.

It has been shown that such an indirect measurement of the volume flow is much faster and more precise as well as simpler and cheaper than a direct measurement of the volume flow with known flow sensors, which have an impeller, for example, so that disturbance variables are regulated much better can be. The proposed micromembrane pump device is also superior to those pump devices in which individual disturbance variables, for example temperatures and pressures, are detected by sensors and used in an open-loop control circuit of the pump device. With the proposed control loop, the volume flow can be controlled much more precisely than is the case with an unregulated control device. The use of a deformation sensor and its arrangement in the adhesive layer between the membrane body and the actuator allows a highly precise feedback of the actual value of the volume flow to the influencing device.

External influences, also known as disturbance variables, can be precisely regulated on the volume flow. Disturbance variables which can be regulated by the micromembrane pump device according to the invention are:

- Pressures, for example the pressure of the fluid upstream of the inlet valve, the pressure of the fluid downstream of the outlet valve or the pressure on the outside of the membrane device.

Temperatures, for example of the fluid or of the environment of the micromembrane pump device, which can lead to tension in the membrane device or to a changed characteristic curve of the actuator. For example, in a piezoceramic actuator, the technically relevant d31 coefficient is temperature-dependent.

Changes in the properties of the fluid, which can lead to a change in the effective change in volume of the pump chamber with constant control of the actuator, in particular when pumping liquids. Here, for example, a change in viscosity, caused by a change in temperature or a change in the composition of the fluid, leads to different inflow and outflow times and thus to a different volume flow.

- Tolerances of the mechanical components of the micromembrane pump device, for example the housing of the pump chamber, the inlet valve, the outlet valve, the actuator or the membrane body. In this way, different volume flows for different micromembrane pump devices of the same series due to geometric deviations (bending, fluctuations in thickness, parallelism errors) of the mechanical components can be avoided.

- Tolerances when connecting the mechanical components of the micromembrane pump device, for example when forming the adhesive layer. The micromembrane pump device according to the invention can always be used with advantage when a high-precision metering of a fluid, for example when mixing different fluids, is required. In particular, it can be used in the medical field for dosing drugs or for mixing drug components.

According to a preferred development of the invention, the adhesive layer lies flat, in particular all over, on a side of the plate-shaped actuator facing the membrane body and / or the adhesive layer lies flat, in particular over the entire surface, on a side of the membrane body facing the plate-shaped actuator. In this way, forces generated by the actuator can be safely transmitted to the adhesive layer and from the adhesive layer to the membrane body. In particular, this results in a high rigidity of the arrangement as well as an insensitivity to high shear forces, which ultimately serves the metering accuracy.

According to an expedient development of the invention, the adhesive layer comprises a hardened liquid adhesive, a hardened adhesive paste and / or an adhesive film. Liquid adhesives, adhesive pastes and adhesive films are easy to handle in the manufacture of the diaphragm pump device and have sufficiently good adhesive properties to safely transfer the necessary forces from the actuator to the diaphragm body, so that the metering accuracy is increased.

According to a preferred development of the invention, the adhesive layer comprises a temperature-hardening material, an anaerobically hardening material, a material hardening by UV radiation, a material hardening by an activator, a material hardening by humidity, a material hardening by drying and / or a hot melt adhesive material. Such adhesive materials are easy to handle in the manufacture of the diaphragm pump device and have sufficiently good adhesive properties to safely transfer the required forces from the actuator to the diaphragm body, so that the metering accuracy is increased.

According to an advantageous development of the invention, the plate-shaped actuator is an electromagnetic actuator, a single-layer or multi-layer piezoelectric actuator Shape memory actuator or a bimetallic actuator. Single-layer piezoelectric actuators have an electrical connection on their underside and an electrical connection on their upper side. Since the adhesive layer is non-conductive within the scope of the invention, the single-layer piezoelectric actuator can be fed symmetrically with respect to ground. In the case of multiple layers, both electrical contacts are arranged on the side facing the man's body, with the non-conductive properties of the adhesive layer preventing a short circuit. Shape memory actuators or bimetallic actuators can also be used without problems due to the insulating properties of the adhesive layer.

According to an expedient development of the invention, the carrier body comprises one or more electrically insulating materials. Polyimides, for example, are particularly suitable.

According to an expedient development of the invention, the carrier body comprises glass, one or more semiconductor materials, one or more composite materials, one or more polymeric materials or one or more ceramic materials.

According to an advantageous development of the invention, the deformation sensor is a strain gauge, in particular a resistive, capacitive or piezoresistive strain gauge.

According to an expedient development of the invention, the deformation sensor is a force sensor.

According to an expedient development of the invention, the membrane body comprises a metal, a semiconductor material and / or a plastic.

According to an expedient development of the invention, at least part of an electronic evaluation system for evaluating signals from the deformation sensor is arranged on or in the carrier body. This can improve the immunity to interference, which ultimately benefits the metering accuracy.

According to a preferred development of the invention, the influencing device is used to identify operational faults in the micromembrane pump device formed on the basis of measurement signals from the deformation sensor. During operation of the micromembrane pump device, operational malfunctions can occur again and again. For example, the inlet valve or the outlet valve can become jammed by particles, the actuator can fail, an air bubble can get into the pump chamber in the case of a liquid fluid, and many other things. Such malfunctions can be recognized in the measurement signals of the deformation sensor, since they influence the deformation of the membrane device or have a direct influence on the actuator.

According to an expedient development of the invention, the carrier body has a non-embedded section which is led out of the adhesive layer, contacts for picking up measurement signals from the deformation sensor being attached to the non-embedded section, which contacts are electrically connected to the deformation sensor are. The electrical connections between the contacts for the deformation sensor and the deformation sensor can be formed on or in the carrier body so that they are mechanically protected and electrically isolated both from the actuator and from the membrane body.

According to an expedient development of the invention, a heating wire is arranged on or in the embedded section. The heating wire allows the fluid to be pumped to be heated. In addition, the heating wire can be used during the manufacture of the micromembrane pump device to heat the adhesive layer, to cure it, provided the adhesive layer comprises a material which is cured by temperature. The heating wire can have electrical energy applied to it by the influencing device or by an external device.

According to an expedient development of the invention, the carrier body has a non-embedded section which is led out of the adhesive layer, contacts for applying electrical energy to the heating wire being attached to the non-embedded section, which are electrically connected to the heating wire. The electrical connections between the contacts for the heating wire and the heating wire can be formed on or in the carrier body so that they are mechanically protected and electrically isolated both from the actuator and from the membrane body. According to an expedient development of the invention, a temperature sensor is arranged on or in the embedded section. Measurement signals from the temperature sensor can be fed, for example, to the influencing device or to an external device which applies electrical energy to the heating wire. In this way, the heating effect of the heating wire can be regulated during manufacture of the micromembrane pump device or during operation of the micromembrane pump device.

According to an expedient development of the invention, the carrier body has a non-embedded section which is led out of the adhesive layer, contacts for picking up measurement signals from the temperature sensor being attached to the non-embedded section, which contacts are electrically connected to the temperature sensor are. The electrical connections between the contacts for the temperature sensor and the temperature sensor can be formed on or in the carrier body so that they are mechanically protected and electrically isolated both from the actuator and from the membrane body.

According to an advantageous development of the invention, a condition sensor, in particular a humidity sensor or a chemical sensor, for checking a condition of the adhesive layer is arranged on or in the embedded section. The measurement signals of the condition sensor can be fed to the influencing device. In this way, the influencing device can detect an aging-related deterioration or deterioration in the condition of the adhesive layer caused by external influences before the adhesive layer fails, because this can be advantageous in medical applications in particular.

According to an advantageous development of the invention, the carrier body has a non-embedded section which is led out of the adhesive layer, contacts for picking up measurement signals from the status sensor being attached to the non-embedded section, which are electrically connected to the status sensor. The electrical connections between the contacts for the state sensor and the state sensor can be formed on or in the carrier body so that they are mechanically protected and electrically isolated both from the actuator and from the membrane body. According to an expedient development of the invention, the embedded section of the carrier body, viewed in a direction from the plate-shaped actuator to the plate-shaped membrane body, has an area which is smaller than an area of the plate-shaped membrane body facing the embedded section of the carrier body, and which is less than an area of the plate-shaped actuator facing the embedded section of the carrier body. This ensures that the adhesive layer is at least partially continuous in the specified direction from the actuator to the membrane body. This results in particularly good force transmission between the actuator and the membrane body.

According to an advantageous development of the invention, the embedded section of the support body has at least one through hole which extends from a side of the embedded section of the support body facing the plate-shaped actuator to a side of the embedded section of the support body facing the plate-shaped membrane body. This has the effect that the adhesive layer extends in the area of the through hole in the direction from the actuator to the membrane body without interruption from the actuator to the membrane body. This leads to a particularly good power transmission between the actuator and the membrane body.

According to an expedient development of the invention, the embedded section of the carrier body, viewed in a direction from the plate-shaped actuator to the plate-shaped membrane body, has an edge which has indentations. In the area of the indentations, the adhesive layer extends without interruption from the actuator to the membrane body. Since a large part of the forces generated by the actuator is transferred to the adhesive layer in an edge area of the actuator, this results in a particularly good transfer of the forces from the actuator to the membrane body.

The present invention and its advantages are described in more detail below with reference to figures.

FIG. 1 shows a first exemplary embodiment of a micromembrane pump device according to the present invention in a schematic side view; FIG. 2 shows a second exemplary embodiment of a micromembrane pump device according to the present invention in a schematic side view;

FIG. 3 shows a third exemplary embodiment of a micromembrane pump device according to the present invention in a schematic side view;

FIG. 4 shows an exemplary actuator, an exemplary carrier body and an exemplary membrane body for a micromembrane pump device according to the present invention in a schematic three-dimensional exploded view;

FIG. 5 shows an exemplary support body with an exemplary deformation sensor for a micromembrane pump device according to the present invention in a schematic plan view;

FIG. 6 shows a simplified partial view of a micromembrane pump device according to the present invention in a schematic side view in a state of rest;

FIG. 7 shows a simplified partial view of a micromembrane pump device according to the present invention in a schematic side view when a fluid is being admitted; and

FIG. 8 shows a simplified partial view of a micromembrane pump device according to the present invention in a schematic side view when a fluid is being discharged.

Identical or similar elements or elements with the same or equivalent function are given the same or similar reference symbols below. In the following description, exemplary embodiments with a large number of features of the present invention are described in more detail in order to provide a better understanding of the invention. It should be noted, however, that the present invention can also be implemented with the omission of some of the features described. It should also be noted that the features shown in the various exemplary embodiments can also be combined in other ways, unless this is expressly excluded or would lead to contradictions.

Figure 1 shows a first embodiment of a micromembrane pump device 1 according to the present invention in a schematic side view.

The micromembrane pump device 1 for pumping a fluid FL has the following features: a pump chamber 2, which has an inlet valve 3 for admitting the fluid FL into the pump chamber 2, an outlet valve 4 for discharging the fluid FL from the pump chamber 2 and a membrane device 5 for varying a volume of the pump chamber 1 is assigned, the membrane device 5 having a plate-shaped actuator 6 for deforming the membrane device 5; and an influencing device 7 for influencing the plate-shaped actuator 6 so as to influence the volume of the pump chamber 2; the membrane device 5 having a plate-shaped membrane body 8 delimiting the pump chamber 2; wherein the plate-shaped actuator 6 is arranged on a side of the plate-shaped membrane body 8 facing away from the pump chamber 2; wherein the plate-shaped actuator 6 is fastened to the plate-shaped membrane body 8 by means of an electrically insulating adhesive layer 9, so that the plate-shaped actuator 6 is electrically insulated from the membrane body 8; wherein within the electrically insulating adhesive layer 9 at least one embedded The third section 10 of a carrier body 11 is arranged, on which or in which a deformation sensor 12 for detecting a deformation of the membrane device 5 is arranged, so as to detect the volume of the pump chamber 2; The influencing device 7, the plate-shaped actuator 6 and the deformation sensor 12 form a closed control loop for regulating a ratio between a change in volume of the pump chamber (2) during a working cycle of the micromembrane pump device (1) and a duration of the working cycle of the micromembrane pump device 1.

According to a preferred development of the invention, the adhesive layer 9 lies flat, in particular over the entire area, on a side of the plate-shaped actuator 6 facing the membrane body 8 and / or the adhesive layer 9 lies flat, in particular over the entire area, on a side of the plate-shaped actuator 6 facing Side of the membrane body 8.

According to an advantageous development of the invention, the adhesive layer 9 comprises a hardened liquid adhesive, a hardened adhesive paste and / or an adhesive film.

According to an advantageous development of the invention, the adhesive layer 9 comprises a temperature-hardening material, an anaerobically hardening material, a material hardening by UV radiation, a material hardening by an activator, a material hardening by humidity, a material hardening by drying and / or a hot melt adhesive material.

According to an expedient development of the invention, the plate-shaped actuator 6 is an electromagnetic actuator, a single-layer or multi-layer piezoelectric actuator, a shape memory actuator or a bimetallic actuator.

According to an advantageous development of the invention, the carrier body 11 comprises one or more electrically insulating materials. According to an expedient development of the invention, the carrier body 11 comprises glass, one or more semiconductor materials, one or more composite materials, one or more polymeric materials or one or more ceramic materials.

According to an advantageous development of the invention, the deformation sensor 12 is a strain gauge, in particular a resistive, capacitive or piezoresistive strain gauge.

According to an expedient development of the invention, the deformation sensor 12 is a force sensor.

According to an expedient development of the invention, the membrane body 8 comprises a metal, a semiconductor material and / or a plastic.

According to an expedient development of the invention, at least part of an electronic evaluation system for evaluating signals from the deformation sensor 12 is arranged on or in the carrier body 11.

According to an expedient further development of the invention, the influencing device 7 is designed to detect malfunctions in the micromembrane pump device 1 on the basis of measurement signals MS from the deformation sensor 12.

According to an expedient development of the invention, the carrier body 11 has a non-embedded section 13 which is led out of the adhesive layer 9, contacts 14 for picking up measurement signals MS from the deformation sensor being attached to the non-embedded section 13 are electrically connected to the deformation sensor.

In the exemplary embodiment in FIG. 1, the deformation sensor 12 is electrically connected to contacts 14 which are arranged on the non-embedded section 13 of the carrier body 11. The contacts 14 are in turn electrically connected to the influencing device 7 via a measuring line 15, so that measurement signals MS from the deformation sensor 12 can be transmitted to the influencing device 7. Based on the measurement signals MS, the influencing direction 7 control signals ST, which are transmitted via a control line 16 to the actuator 6 and control it. The control signals ST can also be used to supply power to the actuator 6.

FIG. 2 shows a second exemplary embodiment of a micromembrane pump device 1 according to the present invention in a schematic side view. The exemplary embodiment in FIG. 2 is based on the exemplary embodiment in FIG. 1, so that only the differences are described and explained below.

According to a preferred development of the invention, a heating wire 17 is arranged on or in the embedded section 10.

According to an advantageous development of the invention, the carrier body 11 has a non-embedded section 13 which is led out of the adhesive layer 9, contacts 18 for applying electrical energy EE to the heating wire 17 being attached to the non-embedded section 13 which are electrically connected to the heating wire 17.

According to an advantageous development of the invention, a temperature sensor 20 is arranged on or in the embedded section 10.

According to an expedient development of the invention, the carrier body 11 has a non-embedded section 13 which is led out of the adhesive layer 9, contacts 21 for picking up measurement signals TMS from the temperature sensor 20 being attached to the non-embedded section 13 are electrically connected to the temperature sensor 20.

In the exemplary embodiment in FIG. 2, the heating wire 17 is electrically connected to contacts 18 which are formed on the non-embedded section 13 of the carrier body 11. The contacts 18 are connected to the influencing device 7 via a supply line 19, so that the influencing device 7 can supply the heating wire 17 with electrical energy EE. In this way, the fluid FL can be heated in a controlled manner by the influencing device 7. Likewise, during the manufacture of the micromembrane pump device 1, the adhesive layer 9 can be heated in order to harden it. The electrical energy EE could, however can also be provided by a device that is independent of the influencing device 7.

Furthermore, the temperature sensor 20 is connected to contacts 21 which are formed on the non-embedded section 13 of the carrier body 11. The contacts 21 are connected to the influencing device 7 via a measuring line 22, so that measurement signals TMS from the temperature sensor 20 can be transmitted to the influencing device 7. The measuring signals TMS can be used by the influencing device 7 to regulate the heating power of the heating wire 17.

FIG. 3 shows a third exemplary embodiment of a micromembrane pump device 1 according to the present invention in a schematic side view. The exemplary embodiment in FIG. 3 is based on the exemplary embodiment in FIG. 1, so that only the differences are described and explained below.

According to an advantageous development of the invention, a condition sensor 23, in particular a humidity sensor or a chemical sensor, for checking a condition of the adhesive layer 9 is arranged on or in the embedded section 10.

According to an expedient development of the invention, the carrier body 11 has a non-embedded section 13 which is led out of the adhesive layer 9, contacts 24 for picking up measurement signals ZMS from the status sensor 23 being attached to the non-embedded section 13 are electrically connected to the state sensor 23.

In the embodiment of FIG - Sensors 23 can be transmitted to the influencing device 7. The measuring signals ZMS can be used by the influencing device 7 for early detection of a malfunction of the micromembrane pump device 1 due to damage to the adhesive layer 9. FIG. 4 shows an exemplary actuator 6, an exemplary carrier body 11 and an exemplary membrane body 8 for a micromembrane pump device 1 according to the present invention in a schematic three-dimensional exploded view.

According to an advantageous further development invention, the embedded section 10 of the carrier body 11, viewed in a direction RI from the plate-shaped actuator 6 to the plate-shaped membrane body 8, has an area 26 which is smaller than an area facing the embedded section 10 of the carrier body 11 27 of the plate-shaped membrane body 8, and which is smaller than a surface 28 of the plate-shaped actuator 6 facing the embedded section 10 of the carrier body 11.

According to an expedient development of the invention, the embedded section 10 of the carrier body 11 has at least one through hole 29 which extends from a side of the embedded section 10 of the carrier body 11 facing the plate-shaped actuator 6 to a side of the carrier body 11 facing the plate-shaped membrane body 8 embedded portion 10 of the support body 11 is enough.

FIG. 5 shows an exemplary support body with an exemplary deformation sensor 12 for a micromembrane pump device 1 according to the present invention in a schematic plan view.

According to an advantageous further development of the invention, the embedded section 10 of the carrier body 11, viewed in the direction RI from the plate-shaped actuator 6 to the plate-shaped membrane body 8, has an edge 30 which has indentations 31.

FIG. 6 shows a simplified partial view of a micromembrane pump device 1 according to the present invention in a schematic side view in a state of rest. The actuator 6 is shown in its rest position, so that the membrane body 8 is also in its rest position.

FIG. 7 shows a simplified partial view of a micromembrane pump device 1 according to the present invention in a schematic side view when starting let a fluid FL. The actuator 6 is controlled in such a way that it moves in such a way that, together with the membrane body 8, it increases the volume of the pump chamber 2 compared to the volume that the pump chamber 2 occupies when the actuator 6 is in it Is in rest position.

FIG. 8 shows a simplified partial view of a micromembrane pump device according to the present invention in a schematic side view when a fluid is being discharged. The actuator 6 is controlled in such a way that it moves in such a way that, together with the membrane body 8, it reduces the volume of the pump chamber 2 compared to the volume that the pump chamber 2 occupies when the actuator 6 is in its rest position.

The volume flow of the fluid FL can be generated in that the actuator 6 is periodically moved back and forth between the position shown in FIG. 7 and the position shown in FIG. However, it is also conceivable that the volume flow of the fluid FL is generated by moving the actuator 6 back and forth between the position shown in FIG. 6 and the position shown in FIG. It is also conceivable that the volume flow of the fluid FL is generated by moving the actuator 6 back and forth between the position shown in FIG. 6 and the position shown in FIG.

Although specific embodiments of the invention are illustrated and described herein, it will be apparent to those skilled in the art to which the specific embodiments shown and described can be replaced by a variety of alternative and / or equivalent embodiments without departing from the subject matter of the present invention Invention deviate. This patent application intends to cover all adaptations or variations of the specific exemplary embodiments described. Therefore, it is intended that the invention be limited only by the subject matter of the appended claims and their equivalents.

Reference number:

1 micromembrane pumping device

2 pumping chamber

3 inlet valve 4 exhaust valve

5 membrane device

6 actuator

7 influencing device

8 membrane bodies

9 adhesive layer

10 embedded section

11 support body

12 deformation sensor

13 non-embedded section

14 contacts

15 test lead

16 control line

17 heating wire

18 contacts

19 Supply line

20 temperature sensor

21 contacts

22 test lead

23 condition sensor

24 contacts

25 test lead

26 area

27 area

28 area

29 through hole

30 edge

31 indentations

FL fluid

MS measurement signals

ST control signals

EE electrical energy

TMS measurement signals

DMF measurement signals

RI direction

Claims

1. Micromembrane pumping device for pumping a fluid (FL), comprising: a pumping chamber (2), which has an inlet valve (3) for admitting the fluid (FL) into the pumping chamber (2), an outlet valve (4) for discharging the fluid (FL ) from the pump chamber (2) and a membrane device (5) for varying a volume is assigned to the pump chamber (1), the membrane device (5) having a plate-shaped actuator (6) for deforming the membrane device (5); and an influencing device (7) for influencing the plate-shaped actuator (6) so as to influence the volume of the pump chamber (2); wherein the membrane device (5) has a plate-shaped membrane body (8) delimiting the pump chamber (2); wherein the plate-shaped actuator (6) is arranged on a side of the plate-shaped membrane body (8) facing away from the pump chamber (2); wherein the plate-shaped actuator (6) is attached to the plate-shaped membrane body (8) by means of an electrically insulating adhesive layer (9), so that the plate-shaped actuator (6) is electrically isolated from the membrane body (8); wherein at least one embedded section (10) of a carrier body (11) is arranged within the electrically insulating adhesive layer (9), on which or in which a deformation sensor (12) for detecting a deformation of the membrane device (5) is arranged, so as to to detect the volume of the pumping chamber (2); wherein the influencing device (7), the plate-shaped actuator (6) and the deformation sensor (12) form a closed control loop for regulating a ratio between a change in volume of the pump chamber (2) during a working cycle of the micromembrane pump device (1) and a duration of the working cycle of the micromembrane pump device ( 1) form.

2. Micromembrane pump device according to the preceding claim, wherein the adhesive layer (9) lies flat, in particular over the entire surface, on a side of the plate-shaped actuator (6) facing the membrane body (8) and / or wherein the adhesive layer (9) flat, in particular over the entire surface, rests against a side of the membrane body (8) facing the plate-shaped actuator (6).

3. Micromembrane pump device according to one of the preceding claims, wherein the adhesive layer (9) comprises a hardened liquid adhesive, a hardened adhesive paste and / or an adhesive film.

4. Micromembrane pump device according to one of the preceding claims, wherein the adhesive layer (9) is a temperature-hardening material, an anaerobically hardening material, a material hardening by UV radiation, a material hardening by an activator, a material hardening by humidity Comprises material hardening by drying and / or a hot melt adhesive material.

5. Micromembrane pump device according to one of the preceding claims, wherein the plate-shaped actuator (6) is an electromagnetic actuator, a single-layer or multi-layer piezoelectric actuator, a shape memory actuator or a bimetallic actuator.

6. Micromembrane pump device according to one of the preceding claims, wherein the carrier body (11) comprises one or more electrically insulating materials.

7. Micromembrane pump device according to one of the preceding claims, wherein the carrier body (11) comprises glass, one or more semiconductor materials, one or more composite materials, one or more polymeric materials or one or more ceramic materials.

8. Micromembrane pump device according to one of the preceding claims, wherein the deformation sensor (12) is a strain gauge, in particular a resistive, capacitive or piezoresistive strain gauge.

9. Micromembrane pump device according to one of the preceding claims, wherein the deformation sensor (12) is a force sensor.

10. Micromembrane pump device according to one of the preceding claims, wherein the membrane body (8) comprises a metal, a semiconductor material and / or a plastic.

11. Micromembrane pump device according to one of the preceding claims, wherein at least part of a device for evaluating signals from the deformation sensor (12) is arranged on or in the carrier body (11).

12. Micromembrane pump device according to one of the preceding claims, wherein the influencing device (7) is designed to detect malfunctions in the micromembrane pump device (1) on the basis of measurement signals (MS) from the deformation sensor (12).

13. Micromembrane pump device according to one of claims 1 to 11, wherein the carrier body (11) has a non-embedded portion (13) which is led out of the adhesive layer (9), wherein on the non-embedded portion (13) contacts (14) to Pick-up of measurement signals (MS) of the deformation sensor (12) are attached, which are electrically connected to the deformation sensor (12).

14. Micromembrane pump device according to one of claims 1 to 12, wherein a heating wire (17) is arranged on or in the embedded section (10).

15. Micromembrane pump device according to the preceding claim, wherein the carrier body (11) has a non-embedded section (13) which is led out of the adhesive layer (9), with contacts (18) to the non-embedded section (13) Charging the heating wire (17) with electrical energy (EE) are attached, which are electrically connected to the heating wire (17).

16. Micromembrane pump device according to one of claims 1 to 12, a temperature sensor (20) being arranged on or in the embedded section (10).

17. Micromembrane pump device according to the preceding claim, wherein the carrier body (11) has a non-embedded section (13) which is led out of the adhesive layer (9), with contacts (21) on the non-embedded section (13) for Pick-up of measurement signals (TMS) of the temperature sensor (20) are attached, which are electrically connected to the temperature sensor (20).

18. Micromembrane pump device according to one of claims 1 to 12, a condition sensor (23), in particular a humidity sensor or a chemical sensor, for checking a condition of the adhesive layer (9) being arranged on or in the embedded section (10) .

19. Micromembrane pump device according to the preceding claim, wherein the carrier body (11) has a non-embedded section (13) which is led out of the adhesive layer (9), with contacts (24) to the non-embedded section (13) Pick-up of measurement signals (ZMS) of the status sensor (23) are attached, which are electrically connected to the status sensor (23).

20. Micromembrane pump device according to one of the preceding claims, wherein the embedded section (10) of the carrier body (11), viewed in a direction (RI) from the plate-shaped actuator (6) to the plate-shaped membrane body (8), has a surface (26) ), which is smaller than a surface (27) of the plate-shaped membrane body (8) facing the embedded section (10) of the support body (11), and which is smaller than an area (27) of the embedded section (10) of the support body ( 11) facing surface (28) of the plate-shaped actuator (6).

21. Micromembrane pump device according to one of the preceding claims, wherein the embedded portion (10) of the carrier body (11) has at least one through hole (29) which is from a side of the embedded portion (10) of the carrier body facing the plate-shaped actuator (6) (11) extends as far as a side of the embedded section (10) of the carrier body (11) facing the plate-shaped membrane body (8).

22. Micromembrane pump device according to one of claims 20 or 21, wherein the embedded section (10) of the carrier body (11), seen in the direction (RI) from the plate-shaped actuator (6) to the plate-shaped membrane body (8), has an edge (30) which has indentations (31).