EP4135584A4 - Gräben zur reduzierung des übersprechens in mut-arrays - Google Patents

Gräben zur reduzierung des übersprechens in mut-arrays Download PDF

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Publication number
EP4135584A4
EP4135584A4 EP21870501.0A EP21870501A EP4135584A4 EP 4135584 A4 EP4135584 A4 EP 4135584A4 EP 21870501 A EP21870501 A EP 21870501A EP 4135584 A4 EP4135584 A4 EP 4135584A4
Authority
EP
European Patent Office
Prior art keywords
trenches
talk
reduction
cross
mut arrays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP21870501.0A
Other languages
English (en)
French (fr)
Other versions
EP4135584A1 (de
Inventor
Brian Bircumshaw
Sandeep Akkaraju
Drake Guenther
Haesung Kwon
Anthony Brock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Exo Imaging Inc
Original Assignee
Exo Imaging Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Exo Imaging Inc filed Critical Exo Imaging Inc
Publication of EP4135584A1 publication Critical patent/EP4135584A1/de
Publication of EP4135584A4 publication Critical patent/EP4135584A4/de
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629Square array
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/52Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/5269Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves involving detection or reduction of artifacts
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N7/00Ultrasound therapy
    • A61N7/02Localised ultrasound hyperthermia
    • A61N7/022Localised ultrasound hyperthermia intracavitary
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292Electrostatic transducers, e.g. electret-type
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/0093Detecting, measuring or recording by applying one single type of energy and measuring its conversion into another type of energy
    • A61B5/0095Detecting, measuring or recording by applying one single type of energy and measuring its conversion into another type of energy by applying light and detecting acoustic waves, i.e. photoacoustic measurements
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/06Measuring blood flow
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/48Diagnostic techniques
    • A61B8/485Diagnostic techniques involving measuring strain or elastic properties
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N7/00Ultrasound therapy
    • A61N2007/0043Ultrasound therapy intra-cavitary

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Animal Behavior & Ethology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Physics & Mathematics (AREA)
  • Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Pathology (AREA)
  • Biophysics (AREA)
  • Gynecology & Obstetrics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
EP21870501.0A 2021-03-29 2021-03-29 Gräben zur reduzierung des übersprechens in mut-arrays Pending EP4135584A4 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2021/024667 WO2022211778A1 (en) 2021-03-29 2021-03-29 Trenches for the reduction of cross-talk in mut arrays

Publications (2)

Publication Number Publication Date
EP4135584A1 EP4135584A1 (de) 2023-02-22
EP4135584A4 true EP4135584A4 (de) 2023-08-09

Family

ID=81845609

Family Applications (1)

Application Number Title Priority Date Filing Date
EP21870501.0A Pending EP4135584A4 (de) 2021-03-29 2021-03-29 Gräben zur reduzierung des übersprechens in mut-arrays

Country Status (7)

Country Link
EP (1) EP4135584A4 (de)
JP (1) JP7712682B2 (de)
KR (1) KR20230162525A (de)
CN (1) CN115968272A (de)
CA (1) CA3154568A1 (de)
IL (1) IL292511A (de)
WO (1) WO2022211778A1 (de)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040190377A1 (en) * 2003-03-06 2004-09-30 Lewandowski Robert Stephen Method and means for isolating elements of a sensor array
US20120319535A1 (en) * 2010-01-29 2012-12-20 Research Triangle Institute Methods for forming piezoelectric ultrasonic transducers, and associated apparatuses
US20200205776A1 (en) * 2017-06-30 2020-07-02 Koninklijke Philips N.V. Intraluminal ultrasound imaging device comprising a substrate separated into a plurality of spaced-apart segments, intraluminal ultrasound imaging device comprising a trench, and method of manufacturing
US20210078042A1 (en) * 2019-09-12 2021-03-18 Exo Imaging, Inc. Increased mut coupling efficiency and bandwidth via edge groove, virtual pivots, and free boundaries

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4804961B2 (ja) 2006-03-03 2011-11-02 オリンパスメディカルシステムズ株式会社 超音波振動子及びそれを搭載した体腔内超音波診断装置
US7741686B2 (en) * 2006-07-20 2010-06-22 The Board Of Trustees Of The Leland Stanford Junior University Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame
JP4271252B2 (ja) 2006-10-12 2009-06-03 オリンパスメディカルシステムズ株式会社 超音波振動子セル、超音波振動子エレメント、超音波振動子アレイ及び超音波診断装置
JP5677016B2 (ja) * 2010-10-15 2015-02-25 キヤノン株式会社 電気機械変換装置及びその作製方法
JP5961246B2 (ja) * 2011-03-22 2016-08-02 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 基板に対して抑制された音響結合を持つ超音波cmut
KR20150065067A (ko) 2013-12-04 2015-06-12 삼성전자주식회사 정전용량 미세가공 초음파 변환기 및 그 제조방법
KR102155695B1 (ko) 2014-02-12 2020-09-21 삼성전자주식회사 전기 음향 변환기
WO2017182344A1 (en) * 2016-04-19 2017-10-26 Koninklijke Philips N.V. Ultrasound transducer positioning
US10656007B2 (en) 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
JP7515182B2 (ja) * 2018-08-01 2024-07-12 エコー イメージング,インク. ハイブリッド端子を備えた超音波トランスデューサの統合のためのシステムおよび方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040190377A1 (en) * 2003-03-06 2004-09-30 Lewandowski Robert Stephen Method and means for isolating elements of a sensor array
US20120319535A1 (en) * 2010-01-29 2012-12-20 Research Triangle Institute Methods for forming piezoelectric ultrasonic transducers, and associated apparatuses
US20200205776A1 (en) * 2017-06-30 2020-07-02 Koninklijke Philips N.V. Intraluminal ultrasound imaging device comprising a substrate separated into a plurality of spaced-apart segments, intraluminal ultrasound imaging device comprising a trench, and method of manufacturing
US20210078042A1 (en) * 2019-09-12 2021-03-18 Exo Imaging, Inc. Increased mut coupling efficiency and bandwidth via edge groove, virtual pivots, and free boundaries

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2022211778A1 *

Also Published As

Publication number Publication date
CA3154568A1 (en) 2022-09-29
WO2022211778A1 (en) 2022-10-06
JP2024513615A (ja) 2024-03-27
EP4135584A1 (de) 2023-02-22
IL292511A (en) 2022-06-01
CN115968272A (zh) 2023-04-14
KR20230162525A (ko) 2023-11-28
JP7712682B2 (ja) 2025-07-24

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