EP4076833A1 - Joining two components of a field device for processing and automation technology - Google Patents

Joining two components of a field device for processing and automation technology

Info

Publication number
EP4076833A1
EP4076833A1 EP20811588.1A EP20811588A EP4076833A1 EP 4076833 A1 EP4076833 A1 EP 4076833A1 EP 20811588 A EP20811588 A EP 20811588A EP 4076833 A1 EP4076833 A1 EP 4076833A1
Authority
EP
European Patent Office
Prior art keywords
joining
component
metal
components
silver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20811588.1A
Other languages
German (de)
French (fr)
Inventor
Sergey Lopatin
Igor Getman
Dietmar Leuthner
Pablo Ottersbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of EP4076833A1 publication Critical patent/EP4076833A1/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/006Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/001Interlayers, transition pieces for metallurgical bonding of workpieces
    • B23K35/007Interlayers, transition pieces for metallurgical bonding of workpieces at least one of the workpieces being of copper or another noble metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0244Powders, particles or spheres; Preforms made therefrom
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0244Powders, particles or spheres; Preforms made therefrom
    • B23K35/025Pastes, creams, slurries
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/226Non-corrosive coatings; Primers applied before welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/30Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/3013Au as the principal constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/30Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/302Cu as the principal constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/01Layered products comprising a layer of metal all layers being exclusively metallic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/01Layered products comprising a layer of metal all layers being exclusively metallic
    • B32B15/013Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of an iron alloy or steel, another layer being formed of a metal other than iron or aluminium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/01Layered products comprising a layer of metal all layers being exclusively metallic
    • B32B15/013Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of an iron alloy or steel, another layer being formed of a metal other than iron or aluminium
    • B32B15/015Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of an iron alloy or steel, another layer being formed of a metal other than iron or aluminium the said other metal being copper or nickel or an alloy thereof
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C19/00Alloys based on nickel or cobalt
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/18Ferrous alloys, e.g. steel alloys containing chromium
    • C22C38/40Ferrous alloys, e.g. steel alloys containing chromium with nickel
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C5/00Alloys based on noble metals
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00Coating starting from inorganic powder
    • C23C24/08Coating starting from inorganic powder by application of heat or pressure and heat
    • C23C24/10Coating starting from inorganic powder by application of heat or pressure and heat with intermediate formation of a liquid phase in the layer
    • C23C24/103Coating with metallic material, i.e. metals or metal alloys, optionally comprising hard particles, e.g. oxides, carbides or nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044Constructional details of non-semiconductive diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/19Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/02Iron or ferrous alloys
    • B23K2103/04Steel or steel alloys
    • B23K2103/05Stainless steel
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/08Non-ferrous metals or alloys
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/08Non-ferrous metals or alloys
    • B23K2103/12Copper or alloys thereof
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G01L1/183Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material

Definitions

  • the invention relates to a device consisting of at least a first and a second component, the first and the second component being components of a field device of process and automation technology, which can each be mechanically connected to a joining surface by means of a joint, as well as a method for producing a such device.
  • Various field devices that are used in industrial systems have already become known from the prior art.
  • Field devices are often used in process automation technology as well as in production automation technology. In principle, all devices that are used close to the process and that record and / or process process-relevant information are referred to as field devices.
  • Field devices are used to determine and / or influence process variables. Measuring devices or sensors are used to determine process variables.
  • Actuators are used to influence process variables. These are, for example, pumps or valves that can influence the flow of a liquid in a pipe or the fill level in a container.
  • field devices also include remote I / Os, radio adapters or, in general, devices that are arranged on the field level. Field devices can be mounted on containers or built into control cabinets or control rooms. A large number of such field devices are produced and sold by the Endress + Hauser Group.
  • field devices have components that are highly sensitive to the process variable and / or parameters that are decisive for determining the process variable.
  • Such sensitive components typically have well-defined physical properties in order to be able to determine the process variable reliably and reproducibly. Hence it is great
  • vibronic measuring devices with an oscillatable unit that can be excited to produce mechanical oscillations are used for point level detection.
  • the oscillatable unit can be designed as an oscillating fork with two rods attached to a membrane or as a single rod with only one rod as a resonator.
  • a piezoelectric or magnetoelectric drive is located on the back of the usually thin membrane, which excites the oscillatable unit to its resonance frequency. It is crucial here that the thin and sensitive membrane is fastened in the oscillatable unit in such a way that good oscillation transmission can take place.
  • Another example relates to pressure measuring devices which have a pressure-sensitive membrane in the direction of the process, which by means of a pressure sensor transmits a pressure acting from the process side to a pressure sensor.
  • a pressure chamber Under the side of the membrane facing away from the process, a pressure chamber is enclosed between the membrane and a carrier.
  • a bore which connects the pressure chamber with a pressure measuring chamber in which the pressure sensor is arranged, runs through the carrier.
  • the pressure chamber, bore and pressure measuring chamber are filled with a pressure-transmitting liquid that transmits the pressure acting on the membrane from the process side to the pressure sensor.
  • the pressure measuring chamber can be arranged spatially close to the pressure chamber or at a distance from it.
  • pressure sensors are also referred to as pressure transmitters and connect the pressure chamber to the pressure sensor by means of a pressure transmission line.
  • This design is particularly important for high-temperature processes, as the spatial distance between the pressure chamber and pressure sensor protects the pressure sensor from the high process temperatures.
  • the membrane of a pressure measuring device is usually made very thin in order to ensure the necessary pressure sensitivity.
  • Typical membrane thicknesses are between 25 ⁇ m and 150 gm.
  • the connection between membrane and carrier is therefore special
  • the membrane is very susceptible to bending and tension due to its low thickness.
  • known joining methods and their problems will be discussed using the example of the pressure transducer.
  • the membrane and carrier are connected to one another via a joint.
  • Methods known from metal processing, such as soldering or welding are used to join the two metallic components. Both in soldering and in welding, however, the choice of materials is or Material combinations that can be connected to one another by the respective process are limited.
  • a welding process used today for joining metallic supports and metallic membranes is laser beam welding. This can be used to create high-quality, pressure-resistant joints between supports made of stainless steel and membranes made of stainless steel or nickel alloys, such as alloys known under the brand name Hastelloy.
  • the weld seams produced during laser beam welding have a comparatively high surface roughness. Pressure transducers with rough surfaces can usually not be used in applications in which there are high demands on the hygiene and cleanability of the transducer.
  • weld seams increase the risk of corrosion, which in the long term can even lead to failure of the pressure transducer in the worst case.
  • This problem can be remedied in a manner known from the prior art by soldering the membrane flat onto the carrier.
  • a solder suitable for joining the materials of membrane and carrier usually a special alloy based on silver, copper or nickel, is introduced as a solder layer between the joining surfaces of carrier and membrane and melted under vacuum or in a protective gas atmosphere.
  • pressure transducers can be produced with very smooth surfaces that come into contact with the medium and thus meet high hygiene requirements.
  • soldering can only be used if the carrier and membrane have the same or at least similar coefficients of thermal expansion. The reason for this is that when soldering components with different thermal expansion coefficients, thermomechanical stresses arise due to the high soldering temperature required, which lead to permanent tension in the membrane.
  • the soldering temperature depends on the choice of solder and can easily be in the range of approx. 700 ° C to 1100 ° C with currently used solder. At these high temperatures, even comparatively small differences in the thermal expansion coefficients can lead to deformations and permanent stresses in the membrane, which have a lasting effect on its pressure transmission properties.
  • soldering cannot be used as a joining process because metals such as duplex and super-duplex steel lose their corrosion resistance at temperatures above 280-300 ° C.
  • components of these metals can be glued.
  • the bonded joint is not very robust with regard to rapidly changing process conditions, such as a temperature shock.
  • metallic or intermetallic joints are known from DE 102016112198 A1 and DE 102016112200 A1.
  • metallic joining means are applied to the respective joining surface of membrane and carrier and then the membrane and carrier are joined at their joining surfaces by thermocompression bonding or by reactive bonding.
  • Both documents disclose joining temperatures below 300 ° C., provided that at least one of the joining agents applied to the membrane or carrier contains tin. The comparatively low joining temperature reduces stresses in the membrane and the joint.
  • intermetallic joints with tin in particular are generally brittle, since tin partially oxidizes at these joining temperatures or during storage in air and thus prevents a homogeneous layer formation.
  • the object is achieved by a device according to the invention according to claim 1 and a method according to the invention for producing a device according to claim 14.
  • the device according to the invention consists of at least a first and a second component, the first and the second component being components of a field device of process and automation technology, which are each mechanically connected to one another at a joint surface by means of a joint, obtainable by a method which the comprises the following steps:
  • the joining material comprising at least particles which at least partially consist of a metal, the metal of the joining material being the same as the metal of the surface layers, and
  • Joining of the first and second component at their respective joining surface by heating at a joining temperature below 300 ° C.
  • the great advantage of the invention is that the joint between the two components is achieved at comparatively low joining temperatures. In this way, stresses in the two components and at the joint are avoided or at least greatly reduced. This is especially true if the two components are made of materials with different thermal expansion coefficients. The physical properties of the components defined before joining are retained after the two components have been joined. In contrast to a welding process, with the pressure transducer according to the invention a joint is obtained which does not have a high surface roughness but a smooth surface structure. As a result, the pressure transducer according to the invention is also suitable for hygienic applications.
  • the metal atoms can diffuse both between the individual particles and between the particles and the surface layers. This results in a uniform distribution of the metal atoms and thus a homogeneous joint and good adhesion. Delamination of the joining material is therefore ruled out.
  • the joining process can be accelerated by prestressing the two components at 1-50 MPa.
  • the surface layer can only be applied to the joining surface of the first and the second component in each case or, for example, the second component can also be provided completely with a surface layer.
  • the device relates to a pressure sensor, the first component being a metallic carrier and the second component being a metallic membrane arranged on the metallic carrier, including a pressure chamber. Joining at low joining temperatures is particularly advantageous here, since the membrane is very thin and therefore prone to tension.
  • the particles have silver or copper or gold as the metal.
  • Gold is highly resistant to corrosion. Silver oxides and silver salts are reduced to metallic silver at temperatures above 200-250 ° C. Should be the joint from If silver starts to oxidize on the surface over time, the resulting silver oxide would be returned to metallic silver in a process that is accompanied by temperatures above 200 ° C. A form of self-cleaning of the silver joint at corresponding temperatures is thus obtained.
  • the surface layer also has silver, copper or gold in accordance with the particles. The surface layer can also extend over the entire component. A thin gold layer, for example from a component that is in contact with a medium, protects the component from corrosion and forms a very effective diffusion barrier against hydrogen. Hydrogen, which diffuses, for example, into a pressure sensor or, more precisely, into the liquid in the pressure sensor, changes the
  • the particles include in particular silver nitrate, silver acetate, silver carbonate or silver oxide. As already described, temperatures above 200 ° C lead to a reduction of silver, starting from silver salts and silver oxide. Therefore, the use of particles with silver salts or silver oxide leads to the exposure of silver during joining.
  • the particles have a silver, copper or gold alloy.
  • the joining material advantageously comprises at least one liquid and / or a solvent and / or an additive.
  • the three additives mentioned serve to make it easier to apply the joining material to the respective joining surfaces of the first and second component.
  • the joining material can, for example, be given a paste-like structure through appropriate additives and can thus be painted onto the two joining surfaces without the joining material running from the two joining surfaces onto other surfaces of the two components.
  • the additives are either evaporated or decomposed.
  • the volume fraction of the at least one additive in the joining material is so low that the desorption or decomposition of the additive does not impair the joining process and the quality of the joint.
  • the diameter of the particles, which are at least partially made of metal is less than 1 ⁇ m.
  • Metallic particles with such a diameter have a high surface energy, which is why the particles sinter even at comparatively low temperatures, such as the joining temperature. Through the Diffusion of metal atoms between the particles creates a homogeneous joint.
  • the first component can be made of stainless steel, in particular duplex steel and / or super duplex steel, and / or unalloyed steel and / or Monel and / or a copper alloy
  • the second component is made of stainless steel, in particular duplex steel and / or super duplex steel, and / or Hastelloy and / or tantalum and / or Monel and / or titanium and / or zircon and / or a copper alloy and / or a silver alloy and / or a gold alloy.
  • the metallic surface layer is advantageously applied to the membrane and the carrier by means of galvanic processes or sputtering.
  • galvanic processes or sputtering Depending on the metal of the first and the second component, often only one of the two methods can be used to apply the metallic surface layer.
  • tantalum and zirconium cannot be electroplated in aqueous solutions, but have to be sputtered. It is crucial for the choice of the process that the surface layer adheres well to the respective component and does not peel off.
  • the metallic surface layer preferably has a thickness of 2 to 30 ⁇ m. With this thickness of the metallic surface layer, an optimal joint is obtained.
  • an additional adhesive layer is applied between the first component and the surface layer and between the second component and the surface layer, which connects the surface layer to the first and the second component.
  • These adhesive layers are necessary because not all metals of the two components adhere well directly to the metal of the surface layer.
  • the adhesive layer thus serves for the adhesion and connection between the two components and their respective surface layer.
  • a further embodiment provides that, in particular, gold or copper or chrome can be used as the adhesive layer.
  • the joining temperature is in particular in the range from 250.degree. C. to 280.degree.
  • the object on which the present invention is based is further achieved by a method for producing a device consisting of at least a first and a second component, the first and the second component being components of a field device of process and automation technology, which are each connected to a Joining surface can be mechanically connected by means of a joint, the method comprising the following steps:
  • the joining material comprising at least particles which at least partially consist of a metal, the metal of the joining material being the same as the metal of the surface layers, and
  • Joining of the first and second component at their respective joining surface by heating at a joining temperature below 300 ° C.
  • a homogeneous joint is obtained even at comparatively low joining temperatures, since the particles sinter even at low temperatures due to their high surface energy. Due to the low joining temperature, different metals of the first and the second component can also be joined to one another without stresses occurring in the components and / or the joint. A smooth joint is also obtained, which can also be used for hygienic applications.
  • the surface layer serves to connect the joining material to the first and second components and thus ensures that no delamination occurs.
  • the metal of the joining material and of the surface layer does not in all cases readily adhere to the metal of the first and second component.
  • the adhesive layer therefore serves to connect the surface layer to the first and the second component.
  • FIG. 1 shows a schematic representation of a pressure measuring device.
  • FIG. 2 shows a schematic representation of a pressure transducer according to the invention.
  • the present invention is applicable to a large number of different field devices. Without restricting the generality, however, for the sake of simplicity, the following description relates to a pressure measuring device as shown schematically in FIG. 1.
  • Corresponding pressure measuring devices are manufactured and sold by the applicant for example under the terms “Cerabar”, “Ceraphant” and “Deltabar”. The considerations can be applied analogously to other field devices which have at least one component with a high sensitivity to the process variable and / or to parameters that are decisive for determining the process variable.
  • the membrane 3 faces the process and adjoins the carrier 2.
  • the pressure sensor 12 is located at a certain distance from the membrane 3 and carrier 2. The pressure acting on the membrane 3 is transmitted to the pressure sensor 12 by means of a liquid (not shown).
  • FIG. 2 shows a possible embodiment of the device according to the invention using a pressure sensor 1.
  • the membrane 3 and the carrier 2 are arranged opposite one another, with mutually facing joining surfaces 4, 5, to which membrane 3 and carrier 2 can be connected.
  • a pressure chamber 9 is arranged between the membrane 3 and the carrier 2, to which a bore extending through the carrier 2 is connected.
  • the carrier 2 is made of stainless steel, in particular duplex steel and / or super duplex steel, and / or unalloyed steel and / or Monel and / or a copper alloy and the membrane 3 is made of stainless steel, in particular duplex steel and / or super duplex steel, and / or Hastelloy and / or tantalum and / or Monel and / or titanium and / or zirconium and / or a copper alloy and / or a silver alloy and / or a gold alloy can be manufactured.
  • An adhesive layer 10 is applied to the respective joining surface of membrane and carrier 4, 5.
  • the adhesive layer 10 can consist of adhesive gold, copper, chrome or other substances.
  • a surface layer 7 is applied to at least the joint surface of the membrane 5 and the joint surface of the carrier 4, for example by means of a galvanic process or by means of sputtering, the metal of the surface layers 7 being different from the metal of the carrier 2 and / or the metal of the membrane 3 .
  • a possible combination would be the coating of membrane 3 and carrier 2, both of which are made of stainless steel, with a layer of silver.
  • the metallic surface layer 7 advantageously has a thickness of 2 to 30 ⁇ m.
  • a joining material 8 is applied between the respective surface layers 7 in the region of the joining surface of membrane and carrier 4, 5, which at least Includes particles which at least partially consist of a metal.
  • the metal of the joining material 8 corresponds to the metal of the surface layers 7.
  • the particles contain, for example, gold, copper or silver, as well as alloys of these metals or also silver nitrate, silver acetate, silver carbonate or silver oxide.
  • the joining material 8 also consists at least of a liquid and / or a solvent and / or an additive.
  • the diameter of the particles is smaller than 1 ⁇ m, although other possibilities are not excluded. Joining takes place at joining temperatures below 300 ° C, for example at 250-280 ° C.
  • a device 1 of this type such as a pressure sensor, is produced by means of a method according to the invention by first coating the first and second components 2, 3 on at least their respective joining surfaces 4, 5 with a surface layer 7.
  • the surface layer 7 has a metal which is different from the metal of the first and second components 2, 3.
  • the joining material 8 is then applied to the respective joining surfaces of the two components 4, 5.
  • the joining material 8 comprises at least particles which at least partially consist of metal, the metal of the joining material 8 matching the metal of the surface layers 7, so that good adhesion between the joining material 8 and the surface layer 7 is obtained.
  • the two components 2, 3 are at their respective joining surfaces 4, 5 at a
  • Joining temperature below 300 ° C joined below 300 ° C joined.
  • the joining surfaces of the first and second components 4, 5 can first be coated with an adhesive layer 10 which connects the surface layer 7 to the first and second components 2, 3.

Abstract

The invention relates to a device (1) consisting of at least one first (2) and one second (3) component, wherein the first (2) and the second component (3) are components of a field device for processing and automation technology, which can each be mechanically connected at a joining surface (4, 5) by means of a joining point (6), with two metal surface layers (7) which are each applied at least to the joining surface of the first component (4) and the joining surface of the second component (5), wherein the metal of the surface layers (7) is different from the metal of the first (2) and/or the metal of the second component (3), and consisting of the joining point (6), wherein a joining material (8) is applied between the respective joining surfaces of the two components (4, 5), wherein the joining material (8) comprises at least particles at least partially consisting of a metal, wherein the metal of the joining material (8) corresponds with the metal of the surface layers (7), wherein the joining of the two components (2, 3) occurs at a joining temperature below 300°C.

Description

Fügen von zwei Bauteilen eines Feldgeräts der Prozess- und Automatisierungstechnik Joining of two components of a field device in process and automation technology
Die Erfindung betrifft eine Vorrichtung bestehend aus mindestens einem ersten und einem zweiten Bauteil, wobei das erste und das zweite Bauteil Komponenten eines Feldgeräts der Prozess- und Automatisierungstechnik sind, welche jeweils an einer Fügefläche mittels einer Fügestelle mechanisch verbindbar sind, sowie ein Verfahren zur Herstellung einer solchen Vorrichtung. Aus dem Stand der Technik sind bereits verschiedene Feldgeräte bekannt geworden, die in industriellen Anlagen zum Einsatz kommen. In der Prozessautomatisierungstechnik ebenso wie in der Fertigungsautomatisierungstechnik werden vielfach Feldgeräte eingesetzt. Als Feldgeräte werden im Prinzip alle Geräte bezeichnet, die prozessnah eingesetzt werden und die prozessrelevante Informationen erfassen und/oder verarbeiten. So werden Feldgeräte zur Bestimmung und/oder Beeinflussung von Prozessgrößen verwendet. Zur Bestimmung von Prozessgrößen dienen Messgeräte, bzw. Sensoren. Diese werden beispielsweise zur Druck- und Temperaturmessung, Leitfähigkeitsmessung, Durchflussmessung, pH-Messung, Füllstandmessung, etc. verwendet und erfassen die entsprechenden Prozessvariablen Druck, Temperatur, Leitfähigkeit, pH-Wert, Füllstand, Durchfluss etc. Zur Beeinflussung von Prozessgrößen werden Aktoren verwendet. Diese sind beispielsweise Pumpen oder Ventile, die den Durchfluss einer Flüssigkeit in einem Rohr oder den Füllstand in einem Behälter beeinflussen können. Neben den zuvor genannten Messgeräten und Aktoren werden unter Feldgeräten auch Remote I/Os, Funkadapter bzw. allgemein Geräte verstanden, die auf der Feldebene angeordnet sind. Feldgeräte können dabei an Behältern montiert oder in Schaltschränken oder Schaltwarten verbaut sein. Eine Vielzahl solcher Feldgeräte wird von der Endress+Hauser-Gruppe produziert und vertrieben. The invention relates to a device consisting of at least a first and a second component, the first and the second component being components of a field device of process and automation technology, which can each be mechanically connected to a joining surface by means of a joint, as well as a method for producing a such device. Various field devices that are used in industrial systems have already become known from the prior art. Field devices are often used in process automation technology as well as in production automation technology. In principle, all devices that are used close to the process and that record and / or process process-relevant information are referred to as field devices. Field devices are used to determine and / or influence process variables. Measuring devices or sensors are used to determine process variables. These are used, for example, for pressure and temperature measurement, conductivity measurement, flow measurement, pH measurement, level measurement, etc. and record the corresponding process variables pressure, temperature, conductivity, pH value, level, flow, etc. Actuators are used to influence process variables. These are, for example, pumps or valves that can influence the flow of a liquid in a pipe or the fill level in a container. In addition to the aforementioned measuring devices and actuators, field devices also include remote I / Os, radio adapters or, in general, devices that are arranged on the field level. Field devices can be mounted on containers or built into control cabinets or control rooms. A large number of such field devices are produced and sold by the Endress + Hauser Group.
In der Regel weisen Feldgeräte Bauteile auf, welche eine hohe Empfindlichkeit gegenüber der Prozessgröße und/oder Parametern, welche für die Bestimmung der Prozessgröße entscheidend sind, aufweisen. Derartig empfindliche Bauteile weisen typischerweise gut definierte physikalische Eigenschaften auf, um die Prozessgröße zuverlässig und reproduzierbar bestimmen zu können. Daher ist es von großerAs a rule, field devices have components that are highly sensitive to the process variable and / or parameters that are decisive for determining the process variable. Such sensitive components typically have well-defined physical properties in order to be able to determine the process variable reliably and reproducibly. Hence it is great
Bedeutung, dass die Empfindlichkeit dieser Bauteile bei der Montage und während des Prozesses nicht beeinträchtigt wird. Bei der Montage ist besonders darauf zu achten, dass beim Verbinden des empfindlichen Bauteils mit einem weiteren Bauteil oder mehreren weiteren Bauteilen die Eigenschaften des Bauteils nicht korrumpiert werden. Beispielsweise werden zur Grenzstandserfassung vibronische Messgeräte mit einer zu mechanischen Schwingungen anregbaren schwingfähigen Einheit eingesetzt. Die schwingfähige Einheit kann als Schwinggabel mit zwei an einer Membran befestigten Stäben ausgestaltet sein oder als Einstäbe mit nur einem Stab als Resonator. Typischerweise befindet sich auf der Rückseite der üblicherweise dünnen Membran ein piezoelektrischer oder magnetoelektrischer Antrieb, welche die schwingfähige Einheit auf ihre Resonanzfrequenz anregt. Hierbei ist entscheidend, dass die dünne und empfindliche Membran derart in der schwingfähigen Einheit befestigt wird, dass eine gute Schwingungsübertragung stattfinden kann. Meaning that the sensitivity of these components is not impaired during assembly and during the process. During assembly, particular care must be taken to ensure that the properties of the component are not corrupted when the sensitive component is connected to another component or several other components. For example, vibronic measuring devices with an oscillatable unit that can be excited to produce mechanical oscillations are used for point level detection. The oscillatable unit can be designed as an oscillating fork with two rods attached to a membrane or as a single rod with only one rod as a resonator. Typically, a piezoelectric or magnetoelectric drive is located on the back of the usually thin membrane, which excites the oscillatable unit to its resonance frequency. It is crucial here that the thin and sensitive membrane is fastened in the oscillatable unit in such a way that good oscillation transmission can take place.
Ein weiteres Beispiel betrifft Druckmessgeräte, welche in Richtung des Prozesses eine druckempfindliche Membran aufweisen, welche mittels eines Druckaufnehmers einen von der Prozessseite einwirkenden Druck an einen Drucksensor übertragen. Unter der vom Prozess abgewandten Seite der Membran ist eine Druckkammer zwischen der Membran und einem Träger eingeschlossen. Durch den Träger hindurch verläuft eine Bohrung, welche die Druckkammer mit einer Druckmesskammer verbindet, in welcher der Drucksensor angeordnet ist. Zusätzlich sind Druckkammer, Bohrung und Druckmesskammer mit einer den Druck übertragenden Flüssigkeit befüllt, die den von der Prozessseite auf die Membran einwirkenden Druck auf den Drucksensor überträgt. Je nach Bauweise des Druckmessgeräts kann die Druckmesskammer räumlich nahe zur Druckkammer oder entfernt von ihr angeordnet sein. Im letzteren Fall werden Druckaufnehmer auch als Druckmittler bezeichnet und verbinden die Druckkammer mittels einer Druckübertragungsleitung mit dem Drucksensor. Diese Bauweise ist besonders für Hochtemperaturprozesse wichtig, da durch die räumliche Distanz zwischen Druckkammer und Drucksensor der Drucksensor vor den hohen Prozesstemperaturen geschützt wird. Another example relates to pressure measuring devices which have a pressure-sensitive membrane in the direction of the process, which by means of a pressure sensor transmits a pressure acting from the process side to a pressure sensor. Under the side of the membrane facing away from the process, a pressure chamber is enclosed between the membrane and a carrier. A bore, which connects the pressure chamber with a pressure measuring chamber in which the pressure sensor is arranged, runs through the carrier. In addition, the pressure chamber, bore and pressure measuring chamber are filled with a pressure-transmitting liquid that transmits the pressure acting on the membrane from the process side to the pressure sensor. Depending on the construction of the pressure measuring device, the pressure measuring chamber can be arranged spatially close to the pressure chamber or at a distance from it. In the latter case, pressure sensors are also referred to as pressure transmitters and connect the pressure chamber to the pressure sensor by means of a pressure transmission line. This design is particularly important for high-temperature processes, as the spatial distance between the pressure chamber and pressure sensor protects the pressure sensor from the high process temperatures.
Die Membran eines Druckmessgeräts ist in der Regel sehr dünn ausgestaltet, um die nötige Druckempfindlichkeit zu gewährleisten. Typische Membranstärken liegen zwischen 25 pm und 150 gm. Der Verbindung von Membran und Träger kommt daher besondereThe membrane of a pressure measuring device is usually made very thin in order to ensure the necessary pressure sensitivity. Typical membrane thicknesses are between 25 μm and 150 gm. The connection between membrane and carrier is therefore special
Bedeutung zu, dass die Membran aufgrund ihrer geringen Stärke sehr anfällig für Verbiegungen und Verspannungen ist. Im Folgenden sollen bekannte Fügeverfahren und deren Problematiken anhand des Beispiels des Druckaufnehmers diskutiert werden. Bei aus dem Stand der Technik bekannten Druckaufnehmern mit einer metallischen Membran und einem metallischen Träger sind Membran und Träger über eine Fügestelle miteinander verbunden. Dabei werden zum Fügen der beiden metallischen Bauteile aus der Metallverarbeitung bekannte Verfahren, wie das Löten oder Schweißen eingesetzt. Sowohl beim Löten als auch beim Schweißen ist jedoch die Auswahl der Werkstoffe oder Werkstoffkombinationen, die durch das jeweilige Verfahren miteinander verbunden werden können, begrenzt. It is important that the membrane is very susceptible to bending and tension due to its low thickness. In the following, known joining methods and their problems will be discussed using the example of the pressure transducer. In the case of pressure transducers known from the prior art with a metallic membrane and a metallic carrier, the membrane and carrier are connected to one another via a joint. Methods known from metal processing, such as soldering or welding, are used to join the two metallic components. Both in soldering and in welding, however, the choice of materials is or Material combinations that can be connected to one another by the respective process are limited.
Ein heute zum Fügen von metallischen Trägern und metallischen Membranen eingesetztes Schweißverfahren ist das Laserstrahlschweißen. Hierüber lassen sich hochwertige, druckfeste Fügestellen zwischen Trägern aus Edelstahl und Membranen aus Edelstahl oder aus Nickellegierungen, wie z.B. unter dem Markennamen Hastelloy bekannte Legierungen, erzeugen. Beim Laserstrahlschweißen entstehende Schweißnähte weisen jedoch eine vergleichsweise hohe Oberflächenrauigkeit auf. Druckaufnehmer mit rauen Oberflächen können in der Regel nicht in Anwendungen eingesetzt werden, in denen hohe Anforderungen an die Hygiene und die Reinigbarkeit des Aufnehmers bestehen. Darüber hinaus erhöhen Schweißnähte die Gefahr von Korrosion, die auf Dauer im schlimmsten Fall sogar zum Ausfall des Druckaufnehmers führen kann. A welding process used today for joining metallic supports and metallic membranes is laser beam welding. This can be used to create high-quality, pressure-resistant joints between supports made of stainless steel and membranes made of stainless steel or nickel alloys, such as alloys known under the brand name Hastelloy. However, the weld seams produced during laser beam welding have a comparatively high surface roughness. Pressure transducers with rough surfaces can usually not be used in applications in which there are high demands on the hygiene and cleanability of the transducer. In addition, weld seams increase the risk of corrosion, which in the long term can even lead to failure of the pressure transducer in the worst case.
Diesem Problem kann in aus dem Stand der Technik bekannter Weise dadurch abgeholfen werden, dass die Membran flächig auf den Träger aufgelötet wird. Hierzu wird ein zur Fügung der Werkstoffe von Membran und Träger geeignetes Lot, in der Regel eine Speziallegierung auf Silber-, Kupfer- oder Nickelbasis, als Lotschicht zwischen die Fügeflächen von T räger und Membran eingebracht und unter Vakuum oder in einer Schutzgasatmosphäre aufgeschmolzen. Mit diesem Verfahren lassen sich Druckaufnehmer mit sehr glatten und damit hohe Hygieneanforderungen erfüllende, mediumsberührende Oberflächen erzeugen. This problem can be remedied in a manner known from the prior art by soldering the membrane flat onto the carrier. For this purpose, a solder suitable for joining the materials of membrane and carrier, usually a special alloy based on silver, copper or nickel, is introduced as a solder layer between the joining surfaces of carrier and membrane and melted under vacuum or in a protective gas atmosphere. With this method, pressure transducers can be produced with very smooth surfaces that come into contact with the medium and thus meet high hygiene requirements.
Lötungen können jedoch nur dann eingesetzt werden, wenn Träger und Membran gleiche oder zumindest ähnliche thermische Ausdehnungskoeffizienten aufweisen. Der Grund hierfür besteht darin, dass beim Löten von Bauteilen mit unterschiedlichen thermischen Ausdehnungskoeffizienten aufgrund der erforderlichen hohen Löttemperatur thermomechanische Spannungen entstehen, die zu bleibenden Verspannungen der Membran führen. Die Löttemperatur ist abhängig von der Wahl des Lotes und kann bei heute gängigen Loten ohne Weiteres im Bereich von ca. 700°C bis 1100°C liegen. Bei diesen hohen Temperaturen können bereits vergleichsweise geringe Unterschiede der thermischen Ausdehnungskoeffizienten zu Verformungen und zu bleibenden Verspannungen der Membran führen, die deren Druckübertragungseigenschaften nachhaltig beeinträchtigen. However, soldering can only be used if the carrier and membrane have the same or at least similar coefficients of thermal expansion. The reason for this is that when soldering components with different thermal expansion coefficients, thermomechanical stresses arise due to the high soldering temperature required, which lead to permanent tension in the membrane. The soldering temperature depends on the choice of solder and can easily be in the range of approx. 700 ° C to 1100 ° C with currently used solder. At these high temperatures, even comparatively small differences in the thermal expansion coefficients can lead to deformations and permanent stresses in the membrane, which have a lasting effect on its pressure transmission properties.
Darüber hinaus besteht beim Löten die Gefahr, dass während des Lötvorgangs flüssiges Lot in die Druckkammer eindringt. Eindringendes Lot führt zu einer unkontrollierten Reduktion des Innenvolumens der Druckkammer, zu einer unbestimmten Veränderung der Membranflexibilität und kann unter Umständen zu Einschränkungen oder Beeinträchtigungen der Auslenkungen führen, die die Membran in Abhängigkeit von einem darauf einwirkenden Druck erfährt. Ein weiterer Nachteil flächiger Lötungen besteht darin, dass sich zwischen den Fügeflächen von Träger und Membran aufgrund von Gaseinschlüssen Gasblasen im flüssigen Lot ausbilden können. Gasblasen können dazu führen, dass nach dem Abkühlen innerhalb der Fügestelle Hohlräume bestehen bleiben, die die Qualität der Fügestelle beinträchtigen. In addition, when soldering there is a risk that liquid solder will penetrate into the pressure chamber during the soldering process. Penetrating solder leads to an uncontrolled reduction of the internal volume of the pressure chamber, to an indefinite change in the flexibility of the membrane and can lead to restrictions or Lead to impairments of the deflections that the membrane experiences as a function of a pressure acting on it. Another disadvantage of planar soldering is that gas bubbles can form in the liquid solder between the joining surfaces of the carrier and membrane due to gas inclusions. Gas bubbles can cause cavities to remain inside the joint after cooling, which impair the quality of the joint.
Für manche Metalle ist Löten als Fügeverfahren auch deshalb nicht anwendbar, da Metalle wie Duplex- und Superduplexstahl bei Temperaturen über280-300°C ihre Korrosionsbeständigkeit verlieren. Bauteile dieser Metalle können alternativ geklebt werden. Jedoch ist die geklebte Fügestelle nicht sehr robust hinsichtlich sich schnell ändernder Prozessbedingungen, wie beispielsweise ein Temperaturschock. For some metals, soldering cannot be used as a joining process because metals such as duplex and super-duplex steel lose their corrosion resistance at temperatures above 280-300 ° C. Alternatively, components of these metals can be glued. However, the bonded joint is not very robust with regard to rapidly changing process conditions, such as a temperature shock.
Aus dem Stand der Technik sind beispielsweise metallische oder intermetallische Fügestellen aus der DE 102016112198 A1 und der DE 102016112200 A1 bekannt geworden. Hier werden metallische Fügemittel auf die jeweilige Fügefläche von Membran und Träger aufgebracht und anschließend die Membran und der Träger an ihren Fügeflächen durch eine Thermokompressionsbondung oder durch reaktives Bonden gefügt. In beiden Schriften sind Fügetemperaturen unter 300°C offenbart, sofern mindestens eins der auf Membran oder T räger aufgebrachten Fügemittel Zinn enthält. Die vergleichsweise niedrige Fügetemperatur reduziert Spannungen in der Membran und der Fügestelle. Jedoch sind insbesondere intermetallische Fügestellen mit Zinn in der Regel spröde, da Zinn bei diesen Fügetemperaturen oder während der Lagerung in Luft teilweise oxidiert und dadurch eine homogene Schichtbildung verhindert. From the prior art, for example, metallic or intermetallic joints are known from DE 102016112198 A1 and DE 102016112200 A1. Here metallic joining means are applied to the respective joining surface of membrane and carrier and then the membrane and carrier are joined at their joining surfaces by thermocompression bonding or by reactive bonding. Both documents disclose joining temperatures below 300 ° C., provided that at least one of the joining agents applied to the membrane or carrier contains tin. The comparatively low joining temperature reduces stresses in the membrane and the joint. However, intermetallic joints with tin in particular are generally brittle, since tin partially oxidizes at these joining temperatures or during storage in air and thus prevents a homogeneous layer formation.
Es ist eine Aufgabe der Erfindung einen Druckaufnehmer, sowie ein Verfahren zu dessen Herstellung anzugeben, der die vorgenannten Probleme überwindet. It is an object of the invention to provide a pressure transducer and a method for its production which overcomes the aforementioned problems.
Die Aufgabe wird gelöst durch eine erfindungsgemäße Vorrichtung gemäß Anspruch 1 , sowie ein erfindungsgemäßes Verfahren zur Herstellung einer Vorrichtung gemäß Anspruch 14. The object is achieved by a device according to the invention according to claim 1 and a method according to the invention for producing a device according to claim 14.
Die erfindungsgemäße Vorrichtung besteht aus mindestens einem ersten und einem zweiten Bauteil, wobei das erste und das zweite Bauteil Komponenten eines Feldgeräts der Prozess- und Automatisierungstechnik sind, welche jeweils an einer Fügefläche mittels einer Fügestelle mechanisch miteinander verbunden sind, erhältlich durch ein Verfahren, welches die folgenden Schritte aufweist: The device according to the invention consists of at least a first and a second component, the first and the second component being components of a field device of process and automation technology, which are each mechanically connected to one another at a joint surface by means of a joint, obtainable by a method which the comprises the following steps:
Beschichten von jeweils mindestens der Fügefläche des ersten und des zweiten Bauteils mit einer metallischen Oberflächenschicht, wobei das Metall der Oberflächenschichten von dem Metall des ersten und/oder dem Metall des zweiten Bauteils verschieden ist, Coating of at least the joining surface of the first and the second component with a metallic surface layer, the metal the surface layers are different from the metal of the first and / or the metal of the second component,
Aufträgen eines Fügematerials zwischen die jeweiligen Fügeflächen der beiden Bauteile, wobei das Fügematerial mindestens Partikeln umfasst, welche mindestens teilweise aus einem Metall bestehen, wobei das Metall des Fügematerials mit dem Metall der Oberflächenschichten übereinstimmt, und Application of a joining material between the respective joining surfaces of the two components, the joining material comprising at least particles which at least partially consist of a metal, the metal of the joining material being the same as the metal of the surface layers, and
Fügen des ersten und zweiten Bauteils an ihrer jeweiligen Fügefläche durch Erwärmen bei einer Fügetemperatur unter 300°C. Joining of the first and second component at their respective joining surface by heating at a joining temperature below 300 ° C.
Der große Vorteil der Erfindung liegt darin, dass die Fügestelle zwischen den beiden Bauteilen bei vergleichsweise niedrigen Fügetemperaturen erreicht wird. So werden Spannungen in den beiden Bauteilen und an der Fügestelle vermieden oder zumindest stark reduziert. Dies gilt insbesondere, wenn die beiden Bauteile aus Werkstoffen mit unterschiedlichen thermischen Ausdehnungskoeffizienten bestehen. Die vor dem Fügen definierten physikalischen Eigenschaften der Bauteile bleiben nach dem Fügen der beiden Bauteile erhalten. Im Gegensatz zu einem Schweißprozess wird beim erfindungsgemäßen Druckaufnehmers eine Fügestelle erhalten, welche keine hohe Oberflächenrauigkeit, sondern eine glatte Oberflächenstruktur aufweist. Dadurch ist der erfindungsgemäße Druckaufnehmer auch für hygienische Anwendungen geeignet. The great advantage of the invention is that the joint between the two components is achieved at comparatively low joining temperatures. In this way, stresses in the two components and at the joint are avoided or at least greatly reduced. This is especially true if the two components are made of materials with different thermal expansion coefficients. The physical properties of the components defined before joining are retained after the two components have been joined. In contrast to a welding process, with the pressure transducer according to the invention a joint is obtained which does not have a high surface roughness but a smooth surface structure. As a result, the pressure transducer according to the invention is also suitable for hygienic applications.
Durch den Einsatz desselben Metalls bei Fügematerial und den Oberflächenschichten können die Metallatome sowohl zwischen den einzelnen Partikeln diffundieren, als auch zwischen den Partikeln und den Oberflächenschichten. Dadurch wird eine gleichmäßige Verteilung der Metallatome und damit eine homogene Fügestelle und eine gute Haftung erreicht. Eine Delamination des Fügematerials ist damit ausgeschlossen. Der Fügeprozess kann durch ein Vorspannen der beiden Bauteile bei 1-50 MPa beschleunigt werden. Die Oberflächenschicht kann nur auf der Fügefläche von jeweils dem ersten und dem zweiten Bauteil aufgebracht sein oder es kann beispielsweise auch das zweite Bauteil komplett mit einer Oberflächenschicht versehen sein. By using the same metal for the joining material and the surface layers, the metal atoms can diffuse both between the individual particles and between the particles and the surface layers. This results in a uniform distribution of the metal atoms and thus a homogeneous joint and good adhesion. Delamination of the joining material is therefore ruled out. The joining process can be accelerated by prestressing the two components at 1-50 MPa. The surface layer can only be applied to the joining surface of the first and the second component in each case or, for example, the second component can also be provided completely with a surface layer.
In einer möglichen Ausgestaltung betrifft die Vorrichtung einen Druckaufnehmer, wobei das erste Bauteil ein metallischer Träger und das zweite Bauteil eine unter Einschluss einer Druckkammer auf dem metallischen Träger angeordnete metallische Membran ist. Hier ist das Fügen bei niedrigen Fügetemperaturen besonders vorteilhaft, da die Membran sehr dünn und damit anfällig für Verspannungen ist. In one possible embodiment, the device relates to a pressure sensor, the first component being a metallic carrier and the second component being a metallic membrane arranged on the metallic carrier, including a pressure chamber. Joining at low joining temperatures is particularly advantageous here, since the membrane is very thin and therefore prone to tension.
In einer Ausgestaltung weisen die Partikeln Silber oder Kupfer oder Gold als Metall auf. Gold ist in hohem Maße korrosionsbeständig. Silberoxide und Silbersalze werden bei Temperaturen über 200-250°C zu metallischem Silber reduziert. Sollte die Fügestelle aus Silber mit der Zeit an der Oberfläche anfangen zu oxidieren, würde das entstandene Silberoxid bei einem Prozess, welcher von Temperaturen über200°C begleitet wird, in metallisches Silber zurückgeführt werden. Somit wird eine Form von Selbstreinigung der Silberfügestelle bei entsprechenden Temperaturen erhalten. Wie bereits beschrieben, weist auch die Oberflächenschicht den Partikeln entsprechend Silber, Kupfer oder Gold auf. Die Oberflächenschicht kann sich dabei auch über das gesamte Bauteil ziehen. Eine dünne Goldschicht beispielsweise aus einem Bauteil, welches ein Medium berührt, schützt das Bauteil vor Korrosion und bildet eine sehr wirksame Diffusionssperre gegenüber Wasserstoff. Wasserstoff, welcher beispielsweise in einen Druckaufnehmer oder genauer in die Flüssigkeit im Druckaufnehmer diffundiert, verändert dieIn one embodiment, the particles have silver or copper or gold as the metal. Gold is highly resistant to corrosion. Silver oxides and silver salts are reduced to metallic silver at temperatures above 200-250 ° C. Should be the joint from If silver starts to oxidize on the surface over time, the resulting silver oxide would be returned to metallic silver in a process that is accompanied by temperatures above 200 ° C. A form of self-cleaning of the silver joint at corresponding temperatures is thus obtained. As already described, the surface layer also has silver, copper or gold in accordance with the particles. The surface layer can also extend over the entire component. A thin gold layer, for example from a component that is in contact with a medium, protects the component from corrosion and forms a very effective diffusion barrier against hydrogen. Hydrogen, which diffuses, for example, into a pressure sensor or, more precisely, into the liquid in the pressure sensor, changes the
Druckübertragungseigenschaften des Druckaufnehmers und kann im schlimmsten Fall sogar zum Ausfall des Druckaufnehmers führen. Auch eine Oberflächenschicht aus Silber schützt effektiv vor einem Eindringen von Wasserstoff in den Druckaufnehmer. In einerweiteren Ausgestaltung umfassen die Partikeln insbesondere Silbernitrat, Silberacetat, Silbercarbonat oder Silberoxid. We bereits beschrieben, führen Temperaturen über 200°C zu einer Reduktion von Silber, ausgehend von Silbersalzen und Silberoxid. Daher führt der Einsatz von Partikeln mit Silbersalzen oder Silberoxid zur Freistellung von Silber während des Fügens. Pressure transmission properties of the pressure transducer and in the worst case can even lead to failure of the pressure transducer. A surface layer made of silver also provides effective protection against the ingress of hydrogen into the pressure transducer. In a further embodiment, the particles include in particular silver nitrate, silver acetate, silver carbonate or silver oxide. As already described, temperatures above 200 ° C lead to a reduction of silver, starting from silver salts and silver oxide. Therefore, the use of particles with silver salts or silver oxide leads to the exposure of silver during joining.
Eine weitere Ausgestaltung sieht vor, dass die Partikeln eine Silber-, Kupfer- oder Goldlegierung aufweisen. Another embodiment provides that the particles have a silver, copper or gold alloy.
Vorteilhafterweise umfasst das Fügematerial neben den zumindest teilweise aus Metall bestehenden Partikeln mindestens eine Flüssigkeit und/oder ein Lösemittel und/oder ein Additiv. Die drei genannten Zusätze dienen zur leichteren Auftragung des Fügematerials auf die jeweiligen Fügeflächen von dem ersten und dem zweiten Bauteil. Das Fügematerial kann durch entsprechende Zusätze beispielsweise eine pastöse Struktur bekommen und dadurch auf die beiden Fügeflächen aufgestrichen werden, ohne dass das Fügematerial von den beiden Fügeflächen auf andere Flächen der beiden Bauteile läuft. Beim Erhitzen des Fügematerials auf die Fügetemperatur werden die Zusätze entweder abgedampft oder zersetzt. Idealerweise ist dabei der Volumenanteil des mindestens eines Zusatzes in dem Fügematerial so niedrig, dass die Desorption oder Zersetzung des Zusatzes den Fügeprozess und die Qualität der Fügestelle nicht beeinträchtigt. In addition to the particles, which are at least partially made of metal, the joining material advantageously comprises at least one liquid and / or a solvent and / or an additive. The three additives mentioned serve to make it easier to apply the joining material to the respective joining surfaces of the first and second component. The joining material can, for example, be given a paste-like structure through appropriate additives and can thus be painted onto the two joining surfaces without the joining material running from the two joining surfaces onto other surfaces of the two components. When the joining material is heated to the joining temperature, the additives are either evaporated or decomposed. Ideally, the volume fraction of the at least one additive in the joining material is so low that the desorption or decomposition of the additive does not impair the joining process and the quality of the joint.
In einer bevorzugten Ausgestaltung ist der Durchmesser der zumindest teilweise aus Metall bestehenden Partikeln kleiner als 1 pm. Metallische Partikeln mit einem derartigen Durchmesser weisen eine hohe Oberflächenenergie auf, weshalb die Partikeln schon bei vergleichsweise niedrigen Temperaturen, wie bei der Fügetemperatur, sintern. Durch die Diffusion von Metallatomen zwischen den Partikeln entsteht so eine homogene Fügestelle. In a preferred embodiment, the diameter of the particles, which are at least partially made of metal, is less than 1 μm. Metallic particles with such a diameter have a high surface energy, which is why the particles sinter even at comparatively low temperatures, such as the joining temperature. Through the Diffusion of metal atoms between the particles creates a homogeneous joint.
In einerweiteren Ausgestaltung ist die erste Bauteil aus Edelstahl, insbesondere Duplexstahl und/oder Superduplexstahl, und/oder unlegierten Stahl und/oder Monel und/oder einer Kupferlegierung fertigbar und das zweite Bauteil aus Edelstahl, insbesondere Duplexstahl und/oder Superduplexstahl, und/oder Hastelloy und/oder Tantal und/oder Monel und/oder Titan und/oder Zirkon und/oder einer Kupferlegierungen und/oder einer Silberlegierungen und/oder einer Goldlegierungen. In a further embodiment, the first component can be made of stainless steel, in particular duplex steel and / or super duplex steel, and / or unalloyed steel and / or Monel and / or a copper alloy, and the second component is made of stainless steel, in particular duplex steel and / or super duplex steel, and / or Hastelloy and / or tantalum and / or Monel and / or titanium and / or zircon and / or a copper alloy and / or a silver alloy and / or a gold alloy.
Vorteilhafterweise ist die metallische Oberflächenschicht mittels galvanischer Prozesse oder Sputtern auf die Membran und den Träger aufgebracht. Je nach Metall des ersten und des zweiten Bauteils kann oft nur eines der beiden Verfahren zur Aufbringung der metallischen Oberflächenschicht eingesetzt werden. Beispielsweise lassen sich Tantal und Zirkon in wässrigen Lösungen nicht galvanisch beschichten, sondern müssen gesputtert werden. Entscheidend für die Wahl des Verfahrens ist, dass die Oberflächenschicht auf dem jeweiligen Bauteil gut haftet und sich nicht ablöst. The metallic surface layer is advantageously applied to the membrane and the carrier by means of galvanic processes or sputtering. Depending on the metal of the first and the second component, often only one of the two methods can be used to apply the metallic surface layer. For example, tantalum and zirconium cannot be electroplated in aqueous solutions, but have to be sputtered. It is crucial for the choice of the process that the surface layer adheres well to the respective component and does not peel off.
Bevorzugterweise weist die metallische Oberflächenschicht eine Dicke von 2 bis 30 pm auf. Bei dieser Dicke der metallischen Oberflächenschicht wird eine optimale Fügestelle erhalten. The metallic surface layer preferably has a thickness of 2 to 30 μm. With this thickness of the metallic surface layer, an optimal joint is obtained.
In einer möglichen Ausgestaltung ist zwischen dem ersten Bauteil und der Oberflächenschicht und zwischen dem zweiten Bauteil und der Oberflächenschicht eine zusätzliche Haftschicht aufgetragen, welche die Oberflächenschicht jeweils mit dem ersten und dem zweiten Bauteil verbindet. Diese Haftschichten sind nötig, da nicht alle Metalle der beiden Bauteile direkt mit dem Metall der Oberflächenschicht gut haften. Die Haftschicht dient damit zur Haftung und Verbindung zwischen den beiden Bauteilen und ihrer jeweiligen Oberflächenschicht. In one possible embodiment, an additional adhesive layer is applied between the first component and the surface layer and between the second component and the surface layer, which connects the surface layer to the first and the second component. These adhesive layers are necessary because not all metals of the two components adhere well directly to the metal of the surface layer. The adhesive layer thus serves for the adhesion and connection between the two components and their respective surface layer.
Eine weitere Ausgestaltung sieht vor, dass als Haftschicht insbesondere Haftgold oder Kupfer oder Chrom einsetzbar sind. A further embodiment provides that, in particular, gold or copper or chrome can be used as the adhesive layer.
In einer bevorzugten Ausgestaltung liegt die Fügetemperatur insbesondere im Bereich von 250°C bis 280°C. In a preferred embodiment, the joining temperature is in particular in the range from 250.degree. C. to 280.degree.
Die der vorliegenden Erfindung zugrundeliegende Aufgabe wird ferner gelöst durch ein Verfahren zur Herstellung einer Vorrichtung bestehend aus mindestens einem ersten und einem zweiten Bauteil, wobei das erste und das zweite Bauteil Komponenten eines Feldgeräts der Prozess- und Automatisierungstechnik sind, welche jeweils an einer Fügefläche mittels einer Fügestelle mechanisch verbindbar sind, wobei das Verfahren folgende Schritte aufweist: The object on which the present invention is based is further achieved by a method for producing a device consisting of at least a first and a second component, the first and the second component being components of a field device of process and automation technology, which are each connected to a Joining surface can be mechanically connected by means of a joint, the method comprising the following steps:
Beschichten von jeweils mindestens der Fügefläche des ersten und des zweiten Bauteils mit einer metallischen Oberflächenschicht, wobei das Metall der Oberflächenschichten von dem Metall des ersten und/oder dem Metall des zweiten Bauteils verschieden ist, Coating of at least the joining surface of the first and the second component with a metallic surface layer, the metal of the surface layers being different from the metal of the first and / or the metal of the second component,
Aufträgen eines Fügematerials zwischen die jeweiligen Fügeflächen der beiden Bauteile, wobei das Fügematerial mindestens Partikeln umfasst, welche mindestens teilweise aus einem Metall bestehen, wobei das Metall des Fügematerials mit dem Metall der Oberflächenschichten übereinstimmt, und Application of a joining material between the respective joining surfaces of the two components, the joining material comprising at least particles which at least partially consist of a metal, the metal of the joining material being the same as the metal of the surface layers, and
Fügen des ersten und zweiten Bauteils an ihrer jeweiligen Fügefläche durch Erwärmen bei einer Fügetemperatur unter 300°C. Joining of the first and second component at their respective joining surface by heating at a joining temperature below 300 ° C.
Durch das Verwenden von zumindest teilweise aus Metall bestehenden Partikeln wird eine homogene Fügestelle schon bei vergleichsweise niedrigen Fügetemperaturen erhalten, da die Partikeln aufgrund ihrer hohen Oberflächenenergie schon bei niedrigen Temperaturn sintern. Durch die niedrige Fügetemperatur können auch verschiedene Metalle des ersten und des zweiten Bauteils miteinander gefügt werden, ohne dass Spannungen in den Bauteilen und/oder der Fügestelle auftreten. Es wird zudem eine glatte Fügestelle erhalten, welche auch für hygienische Anwendungen einsetzbar ist. Die Oberflächenschicht dient zur Verbindung des Fügematerials mit dem ersten und dem zweiten Bauteil und stellt so sicher, dass keine Delamination auftritt. By using particles that are at least partially made of metal, a homogeneous joint is obtained even at comparatively low joining temperatures, since the particles sinter even at low temperatures due to their high surface energy. Due to the low joining temperature, different metals of the first and the second component can also be joined to one another without stresses occurring in the components and / or the joint. A smooth joint is also obtained, which can also be used for hygienic applications. The surface layer serves to connect the joining material to the first and second components and thus ensures that no delamination occurs.
Vorteilhafterweise sieht das Verfahren einen zusätzlichen Schritt vor, The method advantageously provides an additional step
Beschichten der Fügefläche des ersten und des zweiten Bauteils mit jeweils einer Haftschicht, welche jeweils zwischen der Oberflächenschicht und dem ersten und zweiten Bauteil angeordnet ist. Coating the joining surface of the first and the second component with an adhesive layer each, which is arranged between the surface layer and the first and second component.
Das Metall des Fügematerials und der Oberflächenschicht haftet nicht in allen Fällen ohne weiteres mit dem Metall des ersten und des zweiten Bauteils. Die Haftschicht dient daher zur Verbindung der Oberflächenschicht mit dem ersten und dem zweiten Bauteil. The metal of the joining material and of the surface layer does not in all cases readily adhere to the metal of the first and second component. The adhesive layer therefore serves to connect the surface layer to the first and the second component.
Die erfindungsgemäße Lösung wird anhand der nachfolgenden Figuren Fig.1-2 näher erläutert. Es zeigt: The solution according to the invention is explained in more detail with reference to the following Figures Fig.1-2. It shows:
Fig. 1 eine schematische Darstellung eines Druckmessgeräts. 1 shows a schematic representation of a pressure measuring device.
Fig. 2 eine schematische Darstellung eines erfindungsgemäßen Druckaufnehmers. Die vorliegende Erfindung ist auf eine Vielzahl von unterschiedlicher Feldgeräts anwendbar. Ohne Beschränkung der Allgemeinheit bezieht sich die nachfolgende Beschreibung jedoch der Einfachheit halber auf ein Druckmessgerät, wie in Fig. 1 schematisch dargestellt. Entsprechende Druckmessgeräte werden von der Anmelderin beispielsweise unter dem Begriff „Cerabar“, „Ceraphant“ und „Deltabar“ hergestellt und vertrieben. Die Überlegungen lassen sich analog auf andere Feldgeräte anwenden, welche mindestens ein Bauteil mit einer hohen Empfindlichkeit gegenüber der Prozessgröße und/oder gegenüber Parametern, welche für die Bestimmung der Prozessgröße entscheidend sind, aufweisen. 2 shows a schematic representation of a pressure transducer according to the invention. The present invention is applicable to a large number of different field devices. Without restricting the generality, however, for the sake of simplicity, the following description relates to a pressure measuring device as shown schematically in FIG. 1. Corresponding pressure measuring devices are manufactured and sold by the applicant for example under the terms “Cerabar”, “Ceraphant” and “Deltabar”. The considerations can be applied analogously to other field devices which have at least one component with a high sensitivity to the process variable and / or to parameters that are decisive for determining the process variable.
Fig. 1 zeigt eine schematische Darstellung eines entsprechenden Druckessgeräts 11. Dabei ist die Membran 3 dem Prozess zugewandt und schließt sich an den Träger 2 an. Der Drucksensor 12 befindet sich in einer gewissen Entfernung von Membran 3 und Träger 2. Der auf die Membran 3 einwirkende Druck wird mittels einer Flüssigkeit (nicht gezeigt) an den Drucksensor 12 übertragen. 1 shows a schematic representation of a corresponding pressure measuring device 11. The membrane 3 faces the process and adjoins the carrier 2. The pressure sensor 12 is located at a certain distance from the membrane 3 and carrier 2. The pressure acting on the membrane 3 is transmitted to the pressure sensor 12 by means of a liquid (not shown).
Fig. 2 zeigt eine mögliche Ausgestaltung der erfindungsgemäßen Vorrichtung anhand eines Druckaufnehmers 1. Die Membran 3 und der Träger 2 sind gegenüberliegend, mit einander zugewandten Fügeflächen 4,5 angeordnet, an welchen Membran 3 und Träger 2 verbindbar sind. Zwischen Membran 3 und Träger 2 ist eine Druckkammer 9 angeordnet, an welche eine durch den Träger 2 verlaufende Bohrung anschließt. Der Träger 2 ist aus Edelstahl, insbesondere Duplexstahl und/oder Superduplexstahl, und/oder unlegierten Stahl und/oder Monel und/oder einer Kupferlegierung fertigbar und die Membran 3 ist aus Edelstahl, insbesondere Duplexstahl und/oder Superduplexstahl, und/oder Hastelloy und/oder Tantal und/oder Monel und/oder Titan und/oder Zirkon und/oder einer Kupferlegierungen und/oder einer Silberlegierungen und/oder einer Goldlegierungen fertigbar. 2 shows a possible embodiment of the device according to the invention using a pressure sensor 1. The membrane 3 and the carrier 2 are arranged opposite one another, with mutually facing joining surfaces 4, 5, to which membrane 3 and carrier 2 can be connected. A pressure chamber 9 is arranged between the membrane 3 and the carrier 2, to which a bore extending through the carrier 2 is connected. The carrier 2 is made of stainless steel, in particular duplex steel and / or super duplex steel, and / or unalloyed steel and / or Monel and / or a copper alloy and the membrane 3 is made of stainless steel, in particular duplex steel and / or super duplex steel, and / or Hastelloy and / or tantalum and / or Monel and / or titanium and / or zirconium and / or a copper alloy and / or a silver alloy and / or a gold alloy can be manufactured.
Auf die jeweilige Fügefläche von Membran und Träger 4,5 ist eine Haftschicht 10 aufgebracht. Die Haftschicht 10 kann aus Haftgold, Kupfer, Chrom oder weiteren Stoffen bestehen. Jeweils mindestens auf die Fügefläche der Membran 5 und der Fügefläche des Trägers 4 ist eine Oberflächenschicht 7 beispielsweise mittels eines galvanischen Prozesses oder mittels Sputtern aufgebracht, wobei das Metall der Oberflächenschichten 7 von dem Metall des Trägers 2 und/oder dem Metall der Membran 3 verschieden ist.An adhesive layer 10 is applied to the respective joining surface of membrane and carrier 4, 5. The adhesive layer 10 can consist of adhesive gold, copper, chrome or other substances. A surface layer 7 is applied to at least the joint surface of the membrane 5 and the joint surface of the carrier 4, for example by means of a galvanic process or by means of sputtering, the metal of the surface layers 7 being different from the metal of the carrier 2 and / or the metal of the membrane 3 .
Eine mögliche Kombination wäre die Beschichtung von Membran 3 und Träger 2, die beide aus Edelstahl sind, mit einer Schicht aus Silber. Vorteilhafterweise weist die metallische Oberflächenschicht 7 eine Dicke von 2 bis 30 pm auf. A possible combination would be the coating of membrane 3 and carrier 2, both of which are made of stainless steel, with a layer of silver. The metallic surface layer 7 advantageously has a thickness of 2 to 30 μm.
Zwischen den jeweiligen Oberflächenschichten 7 im Bereich der Fügefläche von Membran und Träger 4,5 ist ein Fügematerial 8 aufgetragen, welches mindestens Partikeln umfasst, welche mindestens teilweise aus einem Metall bestehen. Das Metall des Fügematerials 8 stimmt mit dem Metall der Oberflächenschichten 7 überein. Die Partikeln weisen beispielsweise Gold, Kupfer oder Silber, sowie Legierungen dieser Metalle auf oder auch Silbernitrat, Silberacetat, Silbercarbonat oder Silberoxid. Neben den Partikeln besteht das Fügematerial 8 mindestens noch aus einer Flüssigkeit und/oder einem Lösemittel und/oder einem Additiv. Der Durchmesser der Partikeln ist dabei kleiner als 1 pm, wobei andere Möglichkeiten nicht ausgeschlossen werden. Das Fügen erfolgt bei Fügetemperaturen unter 300°C, beispielsweise bei 250-280°C. Eine derartige Vorrichtung 1 wie ein Druckaufnehmer wird mittels eines erfindungsgemäßen Verfahrens hergestellt, indem zunächst das erste und das zweite Bauteil 2,3 auf mindestens ihrer jeweiligen Fügefläche 4,5 mit einer Oberflächenschicht 7 beschichtet werden. Die Oberflächenschicht 7 weist dabei ein Metall auf, welches von dem Metall des ersten und des zweiten Bauteils 2,3 verschieden ist. Anschließend wird das Fügematerial 8 auf die jeweiligen Fügeflächen der beiden Bauteile 4,5 aufgetragen.A joining material 8 is applied between the respective surface layers 7 in the region of the joining surface of membrane and carrier 4, 5, which at least Includes particles which at least partially consist of a metal. The metal of the joining material 8 corresponds to the metal of the surface layers 7. The particles contain, for example, gold, copper or silver, as well as alloys of these metals or also silver nitrate, silver acetate, silver carbonate or silver oxide. In addition to the particles, the joining material 8 also consists at least of a liquid and / or a solvent and / or an additive. The diameter of the particles is smaller than 1 μm, although other possibilities are not excluded. Joining takes place at joining temperatures below 300 ° C, for example at 250-280 ° C. A device 1 of this type, such as a pressure sensor, is produced by means of a method according to the invention by first coating the first and second components 2, 3 on at least their respective joining surfaces 4, 5 with a surface layer 7. The surface layer 7 has a metal which is different from the metal of the first and second components 2, 3. The joining material 8 is then applied to the respective joining surfaces of the two components 4, 5.
Das Fügematerial 8 umfasst mindestens Partikel, welche mindestens teilweise aus Metall bestehen, wobei das Metall des Fügematerials 8 mit dem Metall der Oberflächenschichten 7 übereinstimmt, so dass eine gute Haftung zwischen dem Fügematerial 8 und der Oberflächenschicht 7 erhalten wird. In einem weiteren Schritt werden die beiden Bauteile 2,3 an ihren jeweiligen Fügeflächen 4,5 bei einerThe joining material 8 comprises at least particles which at least partially consist of metal, the metal of the joining material 8 matching the metal of the surface layers 7, so that good adhesion between the joining material 8 and the surface layer 7 is obtained. In a further step, the two components 2, 3 are at their respective joining surfaces 4, 5 at a
Fügetemperatur von unter 300°C gefügt. Optional können die Fügeflächen des ersten und des zweiten Bauteils 4,5 vorm Aufträgen der Oberflächenschicht 7 zunächst mit einer Haftschicht 10 beschichtet werden, welche die Oberflächenschicht 7 mit dem ersten und dem zweiten Bauteil 2,3 verbindet. Joining temperature below 300 ° C joined. Optionally, before the surface layer 7 is applied, the joining surfaces of the first and second components 4, 5 can first be coated with an adhesive layer 10 which connects the surface layer 7 to the first and second components 2, 3.
Bezugszeichenliste List of reference symbols
1 Vorrichtung bzw. Druckaufnehmer 1 device or pressure transducer
2 erstes Bauteil bzw. Träger 2 first component or carrier
3 zweites Bauteil bzw. Membran 3 second component or membrane
4 Fügefläche des ersten Bauteil bzw. des Trägers4 joining surface of the first component or the carrier
5 Fügefläche des zweiten Bauteils bzw. der Membran5 joining surface of the second component or the membrane
6 Fügestelle 6 joints
7 Oberflächenschicht 7 surface layer
8 Fügematerial 8 joining material
9 Druckkammer 9 pressure chamber
10 Haftschicht 10 adhesive layer
11 Druckmessgerät 11 Pressure gauge
12 Drucksensor 12 pressure sensor

Claims

Patentansprüche Claims
1 . Vorrichtung (1) bestehend aus mindestens einem ersten (2) und einem zweiten (3) Bauteil, wobei das erste (2) und das zweite Bauteil (3) Komponenten eines Feldgeräts der Prozess- und Automatisierungstechnik sind, welche jeweils an einer Fügefläche (4,5) mittels einer Fügestelle (6) mechanisch miteinander verbunden sind, erhältlich durch ein Verfahren, welches die folgenden Schritte aufweist: 1 . Device (1) consisting of at least a first (2) and a second (3) component, wherein the first (2) and the second component (3) are components of a field device of process and automation technology, each of which is attached to a joining surface (4 , 5) are mechanically connected to one another by means of a joint (6), obtainable by a method which has the following steps:
Beschichten von jeweils mindestens der Fügefläche (4,5) des ersten und des zweiten Bauteils (2,3) mit einer metallischen Oberflächenschicht (7), wobei das Metall der Oberflächenschichten (7) von dem Metall des ersten und/oder dem Metall des zweiten Bauteils (2,3) verschieden ist, Coating of at least the joining surface (4,5) of the first and the second component (2,3) with a metallic surface layer (7), the metal of the surface layers (7) from the metal of the first and / or the metal of the second Component (2,3) is different,
Aufträgen eines Fügematerials (8) zwischen die jeweiligen Fügeflächen (4,5) der beiden Bauteile (2,3), wobei das Fügematerial (8) mindestens Partikeln umfasst, welche mindestens teilweise aus einem Metall bestehen, wobei dasApplication of a joining material (8) between the respective joining surfaces (4,5) of the two components (2,3), the joining material (8) comprising at least particles which at least partially consist of a metal, the
Metall des Fügematerials (8) mit dem Metall der Oberflächenschichten (7) übereinstimmt, und The metal of the joining material (8) matches the metal of the surface layers (7), and
Fügen des ersten und zweiten Bauteils (2,3) an ihrer jeweiligen Fügefläche (4,5) durch Erwärmen bei einer Fügetemperatur unter 300°C. Joining of the first and second component (2,3) on their respective joining surface (4,5) by heating at a joining temperature below 300 ° C.
2. Vorrichtung nach Anspruch 1 , wobei die Vorrichtung einen Druckaufnehmer (1) betrifft, wobei das erste Bauteil ein metallischer Träger (2) und das zweite Bauteil eine unter Einschluss einer Druckkammer (9) auf dem metallischen Träger (2) angeordnete metallische Membran (3) ist. 2. Device according to claim 1, wherein the device relates to a pressure sensor (1), wherein the first component is a metallic carrier (2) and the second component is a metallic membrane (2) arranged on the metallic carrier (2), including a pressure chamber (9). 3) is.
3. Vorrichtung nach Anspruch 1 , wobei die Partikeln Silber oder Kupfer oder Gold als Metall aufweisen. 3. Device according to claim 1, wherein the particles have silver or copper or gold as the metal.
4. Vorrichtung nach Anspruch 1 , wobei die Partikeln insbesondere Silbernitrat, Silberacetat, Silbercarbonat oder Silberoxid umfassen. 4. The device according to claim 1, wherein the particles in particular comprise silver nitrate, silver acetate, silver carbonate or silver oxide.
5. Vorrichtung nach Anspruch 1 , wobei die Partikeln eine Silber-, Kupfer- oder Goldlegierung aufweisen. 5. The device of claim 1, wherein the particles comprise a silver, copper or gold alloy.
6. Vorrichtung nach mindestens einem der Ansprüche 1-5, wobei das Fügematerial (8) neben den zumindest teilweise aus Metall bestehenden Partikeln mindestens eine Flüssigkeit und/oder ein Lösemittel und/oder ein Additiv umfasst. 6. Device according to at least one of claims 1-5, wherein the joining material (8) comprises at least one liquid and / or a solvent and / or an additive in addition to the at least partially metal particles.
7. Vorrichtung nach mindestens einem der Ansprüche 1-6, wobei der Durchmesser der zumindest teilweise aus Metall bestehenden Partikeln kleiner als 1 pm ist. 7. The device according to at least one of claims 1-6, wherein the diameter of the particles consisting at least partially of metal is less than 1 μm.
8. Vorrichtung nach mindestens einem der Ansprüche 1-7, wobei das erste Bauteil (2) aus Edelstahl, insbesondere Duplexstahl und/oder Superduplexstahl, und/oder unlegierten Stahl und/oder Monel und/oder einer Kupferlegierung fertigbar ist, wobei das zweite Bauteil (3) aus Edelstahl, insbesondere Duplexstahl und/oder Superduplexstahl, und/oder Hastelloy und/oder Tantal und/oder Monel und/oder Titan und/oder Zirkon und/oder einer8. The device according to at least one of claims 1-7, wherein the first component (2) made of stainless steel, in particular duplex steel and / or super duplex steel, and / or unalloyed steel and / or Monel and / or a copper alloy can be manufactured, the second component (3) made of stainless steel, in particular duplex steel and / or super duplex steel, and / or Hastelloy and / or tantalum and / or Monel and / or titanium and / or zircon and / or a
Kupferlegierungen und/oder einer Silberlegierungen und/oder einer Goldlegierungen fertigbar ist. Copper alloys and / or a silver alloy and / or a gold alloy can be manufactured.
9. Vorrichtung nach mindestens einem der Ansprüche 1-8, wobei die metallische Oberflächenschicht (7) mittels galvanischer Prozesse oder9. The device according to at least one of claims 1-8, wherein the metallic surface layer (7) by means of galvanic processes or
Sputtern auf die beiden Bauteile (2,3) aufgebracht ist. Sputtering is applied to the two components (2,3).
10. Vorrichtung nach mindestens einem der Ansprüche 1-9, wobei die metallische Oberflächenschicht (7) eine Dicke von 2 bis 30 pm aufweist. 10. The device according to at least one of claims 1-9, wherein the metallic surface layer (7) has a thickness of 2 to 30 μm.
11 . Vorrichtung nach mindestens einem der Ansprüche 1-10, wobei zwischen dem ersten Bauteil (2) und der Oberflächenschicht (7) und zwischen dem zweiten Bauteil (3) und der Oberflächenschicht (7) eine zusätzliche Haftschicht (10) aufgetragen ist, welche die Oberflächenschicht (7) jeweils mit dem ersten und zweiten Bauteil (2,3) verbindet. 11. Device according to at least one of claims 1-10, wherein between the first component (2) and the surface layer (7) and between the second component (3) and the surface layer (7) an additional adhesive layer (10) is applied, which the surface layer (7) each connects to the first and second component (2,3).
12. Vorrichtung nach mindestens einem der Ansprüche 1-11 , wobei als Haftschicht (10) insbesondere Haftgold oder Kupfer oder Chrom einsetzbar sind. 12. The device according to at least one of claims 1-11, wherein in particular adhesive gold or copper or chromium can be used as the adhesive layer (10).
13. Vorrichtung nach mindestens einem der Ansprüche 1-12, wobei die Fügetemperatur insbesondere im Bereich von 250°C bis 280°C liegt. 13. Device according to at least one of claims 1-12, wherein the joining temperature is in particular in the range from 250 ° C to 280 ° C.
14. Verfahren zur Herstellung einer Vorrichtung (1) bestehend aus mindestens einem ersten (2) und einem zweiten Bauteil (3), wobei das erste und das zweite Bauteil14. A method for producing a device (1) consisting of at least a first (2) and a second component (3), the first and the second component
(2,3) Komponenten eines Feldgeräts der Prozess- und Automatisierungstechnik sind, welche jeweils an einer Fügefläche (4,5) mittels einer Fügestelle (6) mechanisch verbindbar sind, wobei das Verfahren folgende Schritte aufweist: Beschichten von jeweils mindestens der Fügefläche (4,5) des ersten und des zweiten Bauteils (2,3) mit einer metallischen Oberflächenschicht (7), wobei das Metall der Oberflächenschichten (7) von dem Metall des ersten und/oder dem Metall des zweiten Bauteils (2,3) verschieden ist, (2,3) Components of a field device in process and automation technology are each mechanically connectable to a joining surface (4,5) by means of a joining point (6), the method comprising the following steps: Coating of at least the joining surface (4 , 5) of the first and the second component (2,3) with a metallic surface layer (7), wherein the metal of the surface layers (7) is different from the metal of the first and / or the metal of the second component (2, 3),
Aufträgen eines Fügematerials (8) zwischen die jeweiligen Fügeflächen (4,5) der beiden Bauteile (2,3), wobei das Fügematerial (8) mindestens Partikeln umfasst, welche mindestens teilweise aus einem Metall bestehen, wobei dasApplication of a joining material (8) between the respective joining surfaces (4,5) of the two components (2,3), the joining material (8) comprising at least particles which at least partially consist of a metal, the
Metall des Fügematerials (8) mit dem Metall der Oberflächenschichten (7) übereinstimmt, und The metal of the joining material (8) matches the metal of the surface layers (7), and
Fügen des ersten und zweiten Bauteils (2,3) an ihrer jeweiligen Fügefläche (4,5) durch Erwärmen bei einer Fügetemperatur unter 300°C. Joining of the first and second component (2,3) on their respective joining surface (4,5) by heating at a joining temperature below 300 ° C.
15. Verfahren zur Herstellung einer Vorrichtung nach Anspruch 14, wobei zusätzlich folgender Schritt vorgesehen ist: 15. The method for producing a device according to claim 14, wherein the following step is additionally provided:
Beschichten der Fügefläche (4,5) des ersten und des zweiten Bauteils (2,3) mit jeweils einer Haftschicht (10), welche jeweils zwischen der Oberflächenschicht (7) und dem ersten und zweiten Bauteil (2,3) angeordnet ist. Coating the joining surface (4, 5) of the first and second component (2, 3) with an adhesive layer (10) each, which is arranged between the surface layer (7) and the first and second component (2, 3).
EP20811588.1A 2019-12-16 2020-11-20 Joining two components of a field device for processing and automation technology Pending EP4076833A1 (en)

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