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Definitions

• SEMICONDUCTOR DEVICES INCLUDING HYPER-ABRUPT JUNCTION REGION INCLUDING A SUPERLATTICE AND ASSOCIATED METHODS
• the present disclosure generally relates to semiconductor devices and, more particularly, to semiconductor devices including hyper-abrupt junctions and related methods.
• U.S. Patent No. 6,472,685 B2 to Takagi discloses a semiconductor device including a silicon and carbon layer sandwiched between silicon layers so that the conduction band and valence band of the second silicon layer receive a tensile strain. Electrons having a smaller effective mass, and which have been induced by an electric field applied to the gate electrode, are confined in the second silicon layer, thus, an n-channel MOSFET is asserted to have a higher mobility.
• U.S. Patent No. 4,937,204 to Ishibashi et al. discloses a superlattice in which a plurality of layers, less than eight monolayers, and containing a fractional or binary or a binary compound semiconductor layer, are alternately and epitaxially grown. The direction of main current flow is perpendicular to the layers of the superlattice.
• U.S. Patent No. 5,357,119 to Wang et al. discloses a Si-Ge short period superlattice with higher mobility achieved by reducing alloy scattering in the superlattice.
• U.S. Patent No. 5,683,934 to Candelaria discloses an enhanced mobility MOSFET including a channel layer comprising an alloy of silicon and a second material substitutionally present in the silicon lattice at a percentage that places the channel layer under tensile stress.
• U.S. Patent No. 5,216,262 to Tsu discloses a quantum well structure comprising two barrier regions and a thin epitaxially grown semiconductor layer sandwiched between the barriers.
• Each barrier region consists of alternate layers of Si02/Si with a thickness generally in a range of two to six monolayers. A much thicker section of silicon is sandwiched between the barriers.
• An article entitled“Phenomena in silicon nanostructure devices” also to Tsu and published online September 6, 2000 by Applied Physics and Materials Science & Processing, pp. 391 -402 discloses a semiconductor-atomic superlattice (SAS) of silicon and oxygen.
• the Si/O superlattice is disclosed as useful in a silicon quantum and light-emitting devices.
• a green electroluminescence diode structure was constructed and tested. Current flow in the diode structure is vertical, that is, perpendicular to the layers of the SAS.
• the disclosed SAS may include semiconductor layers separated by adsorbed species such as oxygen atoms, and CO molecules. The silicon growth beyond the adsorbed monolayer of oxygen is described as epitaxial with a fairly low defect density.
• One SAS structure included a 1.1 nm thick silicon portion that is about eight atomic layers of silicon, and another structure had twice this thickness of silicon.
• An article to Luo et al. entitled“Chemical Design of Direct-Gap Light-Emitting Silicon” published in Physical Review Letters, Vol. 89, No. 7 (August 12, 2002) further discusses the light emitting SAS structures of Tsu.
• U.S. Pat. No. 7,105,895 to Wang et al. discloses a barrier building block of thin silicon and oxygen, carbon, nitrogen, phosphorous, antimony, arsenic or hydrogen to thereby reduce current flowing vertically through the lattice more than four orders of magnitude.
• the insulating layer/barrier layer allows for low defect epitaxial silicon to be deposited next to the insulating layer.
• U.S. Pat. No. 6,376,337 to Wang et al. discloses a method for producing an insulating or barrier layer for semiconductor devices which includes depositing a layer of silicon and at least one additional element on the silicon substrate whereby the deposited layer is substantially free of defects such that epitaxial silicon substantially free of defects can be deposited on the deposited layer.
• a monolayer of one or more elements, preferably comprising oxygen, is absorbed on a silicon substrate.
• a semiconductor device may include a substrate and a hyper-abrupt junction region carried by the substrate.
• the hyper-abrupt junction region may include a first semiconductor layer having a first conductivity type, a superlattice layer on the first semiconductor layer, and a second semiconductor layer on the superlattice layer and having a second conductivity type different than the first conductivity type.
• the superlattice may include a plurality of stacked groups of layers, with each group of layers comprising a plurality of stacked base
• the semiconductor device may further include a gate dielectric layer on the second semiconductor layer of the hyper-abrupt junction region, a gate electrode on the gate dielectric layer, and spaced apart source and drain regions adjacent the hyper-abrupt junction region.
• the hyper-abrupt junction region may further include an intrinsic semiconductor layer above or below the superlattice layer.
• the spaced apart source and drain regions may have the second conductivity type.
• the first and second semiconductor layers may each have a thickness in a range of 50nm to 300nm.
• the base semiconductor monolayers may comprise at least one of silicon and germanium, and the at least one non-semiconductor monolayer may comprise at least one of oxygen, nitrogen, fluorine, carbon and carbon-oxygen.
• a method for making semiconductor device may include forming a hyper-abrupt junction region on a substrate and including a first semiconductor layer having a first conductivity type, a superlattice layer on the first semiconductor layer, and a second semiconductor layer on the superlattice layer and having a second conductivity type different than the first conductivity type.
• the superlattice may include a plurality of stacked groups of layers, with each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.
• superlattice layers may be U-shaped.
• the method may further include forming a gate dielectric layer on the second semiconductor layer of the hyper-abrupt junction region, forming a gate electrode on the gate dielectric layer, and forming spaced apart source and drain regions adjacent the hyper-abrupt junction region.
• the hyper-abrupt junction region may further include an intrinsic semiconductor layer above or below the superlattice layer.
• the spaced apart source and drain regions may have the second conductivity type.
• the first and second semiconductor layers may each have a thickness in a range of 50nm to 300nm.
• the base semiconductor monolayers may comprise at least one of silicon and
• germanium, and the at least one non-semiconductor monolayer may comprise at least one of oxygen, nitrogen, fluorine, carbon and carbon-oxygen.
• FIG. 1 is a greatly enlarged schematic cross-sectional view of a superlattice for use in a semiconductor device in accordance with an example embodiment.
• FIG. 2 is a perspective schematic atomic diagram of a portion of the superlattice shown in FIG. 1.
• FIG. 3 is a greatly enlarged schematic cross-sectional view of another embodiment of a superlattice in accordance with an example embodiment.
• FIG. 4A is a graph of the calculated band structure from the gamma point (G) for both bulk silicon as in the prior art, and for the 4/1 Si/O superlattice as shown in FIGS. 1 -2.
• FIG. 4B is a graph of the calculated band structure from the Z point for both bulk silicon as in the prior art, and for the 4/1 Si/O superlattice as shown in FIGS. 1 -2.
• FIG. 4C is a graph of the calculated band structure from both the gamma and Z points for both bulk silicon as in the prior art, and for the 5/1 /3/1 Si/O superlattice as shown in FIG. 3.
• FIG. 5 is a schematic cross-sectional diagram of a JFET including a hyper-abrupt junction incorporating superlattices in accordance with an example embodiment.
• FIG. 6 is a schematic cross-sectional diagram of an IGFET including a hyper-abrupt junction incorporating superlattices in accordance with an example embodiment.
• FIG. 7 is a schematic cross-sectional diagram of another IGFET including a hyper-abrupt junction incorporating a single superlattice in accordance with an example embodiment.
• FIG. 8 is a schematic cross-sectional diagram of a varactor including a hyper-abrupt junction incorporating superlattices in accordance with an example embodiment.
• FIGS. 9A and 9B are schematic cross-sectional diagrams of other varactors including a hyper-abrupt junction incorporating a single superlattice in accordance with example embodiments.
• FIG. 10 is a flow diagram illustrating method aspects associated with fabrication of the devices of FIGS. 5-7.
• FIG. 11 is a flow diagram illustrating method aspects associated with fabrication of the devices of FIGS. 8-9.
• the MST technology relates to advanced
• semiconductor materials such as the superlattice 25 described further below.
• EF is the Fermi energy
• T is the temperature
• E(k,n) is the energy of an electron in the state corresponding to wave vector k and the n th energy band
• the indices i and j refer to Cartesian coordinates x, y and z
• the integrals are taken over the Brillouin zone (B.Z.)
• the summations are taken over bands with energies above and below the Fermi energy for electrons and holes respectively.
• Applicant’s definition of the conductivity reciprocal effective mass tensor is such that a tensorial component of the conductivity of the material is greater for greater values of the corresponding component of the conductivity reciprocal effective mass tensor.
• the superlattices described herein set the values of the conductivity reciprocal effective mass tensor so as to enhance the conductive properties of the material, such as typically for a preferred direction of charge carrier transport.
• the inverse of the appropriate tensor element is referred to as the conductivity effective mass.
• the conductivity effective mass for electrons/holes as described above and calculated in the direction of intended carrier transport is used to distinguish improved materials.
• Applicant has identified improved materials or structures for use in semiconductor devices. More specifically, Applicant has identified materials or structures having energy band structures for which the appropriate conductivity effective masses for electrons and/or holes are substantially less than the
• these structures may also be formed or used in such a manner that they provide piezoelectric, pyroelectric, and/or ferroelectric properties that are
• the materials or structures are in the form of a superlattice 25 whose structure is controlled at the atomic or molecular level and may be formed using known techniques of atomic or molecular layer deposition.
• the superlattice 25 includes a plurality of layer groups 45a-45n arranged in stacked relation, as perhaps best understood with specific reference to the schematic cross-sectional view of FIG. 1.
• Each group of layers 45a-45n of the superlattice 25 illustratively includes a plurality of stacked base semiconductor monolayers 46 defining a respective base semiconductor portion 46a-46n and an energy band-modifying layer 50 thereon.
• the energy band-modifying layers 50 are indicated by stippling in FIG. 1 for clarity of illustration.
• the energy band-modifying layer 50 illustratively includes one non semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.
• constrained within a crystal lattice of adjacent base semiconductor portions it is meant that at least some semiconductor atoms from opposing base semiconductor portions 46a-46n are chemically bound together through the non-semiconductor monolayer 50 therebetween, as seen in FIG. 2.
• this configuration is made possible by controlling the amount of non-semiconductor material that is deposited on semiconductor portions 46a-46n through atomic layer deposition techniques so that not all (i.e. , less than full or 100% coverage) of the available semiconductor bonding sites are populated with bonds to non-semiconductor atoms, as will be discussed further below.
• monolayers 46 of semiconductor material are deposited on or over a non
• the newly deposited semiconductor atoms will populate the remaining vacant bonding sites of the semiconductor atoms below the non-semiconductor monolayer.
• non-semiconductor monolayer may be possible.
• reference herein to a non semiconductor or semiconductor monolayer means that the material used for the monolayer would be a non-semiconductor or semiconductor if formed in bulk. That is, a single monolayer of a material, such as silicon, may not necessarily exhibit the same properties that it would if formed in bulk or in a relatively thick layer, as will be appreciated by those skilled in the art.
• the band modifying layers 50 may also cause the superlattice 25 to have a common energy band structure, while also advantageously functioning as an insulator between layers or regions vertically above and below the superlattice.
• this superlattice structure may also advantageously act as a barrier to dopant and/or material diffusion between layers vertically above and below the superlattice 25. These properties may thus advantageously allow the superlattice 25 to provide an interface for high-K dielectrics which not only reduces diffusion of the high-K material into the channel region, but which may also advantageously reduce unwanted scattering effects and improve device mobility, as will be
• the superlattice 25 may enjoy a higher charge carrier mobility based upon the lower conductivity effective mass than would otherwise be present.
• the superlattice 25 may further have a substantially direct energy bandgap that may be particularly advantageous for opto-electronic devices, for example.
• the superlattice 25 also illustratively includes a cap layer 52 on an upper layer group 45n.
• the cap layer 52 may comprise a plurality of base
• the cap layer 52 may have between 2 to 100 monolayers of the base semiconductor, and, more preferably between 10 to 50 monolayers.
• Each base semiconductor portion 46a-46n may comprise a base semiconductor selected from the group consisting of Group IV semiconductors,
• Group IV semiconductors also includes Group IV-IV semiconductors, as will be appreciated by those skilled in the art.
• the base semiconductor may comprise at least one of silicon and germanium, for example.
• Each energy band-modifying layer 50 may comprise a non
• the non-semiconductor is also desirably thermally stable through deposition of a next layer to thereby facilitate
• the non-semiconductor may be another inorganic or organic element or compound that is compatible with the given semiconductor processing as will be appreciated by those skilled in the art.
• the base semiconductor may comprise at least one of silicon and germanium, for example.
• the term monolayer is meant to include a single atomic layer and also a single molecular layer.
• the energy band modifying layer 50 provided by a single monolayer is also meant to include a monolayer wherein not all of the possible sites are occupied (i.e. , there is less than full or 100% coverage).
• a 4/1 repeating structure is illustrated for silicon as the base semiconductor material, and oxygen as the energy band-modifying material. Only half of the possible sites for oxygen are occupied in the illustrated example.
• this one-half occupation would not necessarily be the case as will be appreciated by those skilled in the art.
• a preferred occupation range is from about one-eighth to one-half of the possible oxygen sites being full, although other numbers may be used in certain embodiments.
• the number of silicon monolayers should desirably be seven or less so that the energy band of the superlattice is common or relatively uniform throughout to achieve the desired advantages.
• the 4/1 repeating structure shown in FIGS. 1 and 2, for Si/O has been modeled to indicate an enhanced mobility for electrons and holes in the X direction.
• the calculated conductivity effective mass for electrons is 0.26
• the 4/1 SiO superlattice in the X direction it is 0.12 resulting in a ratio of 0.46.
• the calculation for holes yields values of 0.36 for bulk silicon and 0.16 for the 4/1 Si/O superlattice resulting in a ratio of 0.44.
• the lower conductivity effective mass for the 4/1 Si/O embodiment of the superlattice 25 may be less than two-thirds the conductivity effective mass than would otherwise occur, and this applies for both electrons and holes.
• the superlattice 25 may further comprise at least one type of conductivity dopant therein, as will also be appreciated by those skilled in the art.
• FIG. 3 another embodiment of a superlattice 25’ in accordance with the invention having different properties is now described. In this embodiment, a repeating pattern of 3/1/5/1 is illustrated. More particularly, the lowest base semiconductor portion 46a’ has three monolayers, and the second lowest base semiconductor portion 46b’ has five monolayers. This pattern repeats throughout the superlattice 25’.
• the energy band-modifying layers 50’ may each include a single monolayer.
• the enhancement of charge carrier mobility is independent of orientation in the plane of the layers.
• all of the base semiconductor portions of a superlattice may be a same number of monolayers thick. In other embodiments, at least some of the base semiconductor portions may be a different number of monolayers thick. In still other embodiments, all of the base semiconductor portions may be a different number of monolayers thick.
• FIGS. 4A-4C band structures calculated using Density Functional Theory (DFT) are presented. It is well known in the art that DFT underestimates the absolute value of the bandgap. Flence all bands above the gap may be shifted by an appropriate“scissors correction.” Flowever the shape of the band is known to be much more reliable. The vertical energy axes should be interpreted in this light.
• DFT Density Functional Theory
• FIG. 4A shows the calculated band structure from the gamma point (G) for both bulk silicon (represented by continuous lines) and for the 4/1 Si/O
• the directions refer to the unit cell of the 4/1 Si/O structure and not to the conventional unit cell of Si, although the (001 ) direction in the figure does correspond to the (001 ) direction of the conventional unit cell of Si, and, hence, shows the expected location of the Si conduction band minimum.
• the (100) and (010) directions in the figure correspond to the (110) and (-110) directions of the conventional Si unit cell.
• the bands of Si on the figure are folded to represent them on the appropriate reciprocal lattice directions for the 4/1 Si/O structure.
• the conduction band minimum for the 4/1 Si/O structure is located at the gamma point in contrast to bulk silicon (Si), whereas the valence band minimum occurs at the edge of the Brillouin zone in the (001 ) direction which we refer to as the Z point.
• the greater curvature of the conduction band minimum for the 4/1 Si/O structure compared to the curvature of the conduction band minimum for Si owing to the band splitting due to the perturbation introduced by the additional oxygen layer.
• FIG. 4B shows the calculated band structure from the Z point for both bulk silicon (continuous lines) and for the 4/1 Si/O superlattice 25 (dotted lines). This figure illustrates the enhanced curvature of the valence band in the (100) direction.
• FIG. 4C shows the calculated band structure from both the gamma and Z point for both bulk silicon (continuous lines) and for the 5/1 /3/1 Si/O structure of the superlattice 25’ of FIG. 3 (dotted lines). Due to the symmetry of the 5/1 /3/1 Si/O structure, the calculated band structures in the (100) and (010) directions are equivalent. Thus the conductivity effective mass and mobility are expected to be isotropic in the plane parallel to the layers, i.e. perpendicular to the (001 ) stacking direction. Note that in the 5/1/3/1 Si/O example the conduction band minimum and the valence band maximum are both at or close to the Z point.
• the above described superlattice structures may advantageously be used to provide hyper-abrupt junctions in a variety of different semiconductor devices.
• thin (e.g., 50nm-300nm) P and N layers are grown adjacent to one another to form a super-junction channel.
• adjacent thin P and N layers will tend to compensate one another through diffusion, and will limit the mobility and amount of charge which may be effectively incorporated into the layers without degradation.
• a JFET 100 illustratively includes a semiconductor substrate 101 with a back gate 102 therein. Spaced-apart source and drain regions 104, 105 with respective contacts 106, 107 are formed on the back gate 102, and a hyper- abrupt junction region 108 is also formed on the back gate between the source and drain regions.
• back gate reach through regions 109 with contacts 110 are coupled to the back gate 102, and isolation regions 111 (e.g., an oxide) separate the back gate reach through regions from the source drain regions 104, 105. It should be noted that, in some embodiments, the back gate reach through regions 109 could instead extend from a back side of the substrate 101 rather than from the top/front side as shown, in which case the contact(s) 110 would be on the back side of the substrate.
• isolation regions 111 e.g., an oxide
• the hyper-abrupt junction region 108 illustratively includes a first semiconductor layer 112 having a first conductivity type (N or P), a first superlattice layer 125a on the first semiconductor layer, a second semiconductor layer 113 on the first superlattice layer and having a second conductivity type different than the first conductivity type (P or N), and a second superlattice layer 125b on the second semiconductor layer.
• a gate overlies the second superlattice layer 125b and illustratively includes a gate electrode 115, which will typically be the same conductivity type as the back gate 102 and the first
• the semiconductor layer 112 i.e. , the first conductivity type
• the semiconductor layer 113 and source/drain regions 104, 105 will be the same conductivity type (here the second conductivity type).
• the second semiconductor layer 113 of the hyper- abrupt junction region 108 defines a hyper-abrupt channel of the JFET 100.
• the superlattice layers 125a, 125b effectively block inter-diffusion and thus increase the available charge with higher mobility within the channel due to less ionized impurity scattering.
• the semiconductor layers 112, 113 and superlattices 125a, 125b may be formed in an alternating fashion as blanket layers across the substrate 101 , or selectively at the desired locations on the substrate to form the hyper-abrupt junction region 108, at Block 122.
• the superlattices 125a, 125b extend into the source and drain regions 104, 105, and into the back gate reach through regions 109, although the superlattices may be constrained within the channel region only in some embodiments, if desired.
• the gate electrode layer 115 may then be formed over the superlattice 125b, at Block 123, followed by a gate contact 116.
• the source and drain regions 106, 107 may be formed by doping with the appropriate conductivity type dopant (P-type for a P channel and vice-versa), at Block 125, and the back gate reach through regions 109 may be similarly formed. Isolation regions 117 are also formed to separate the source and drain contacts 106, 107 from the gate contact.
• the method of FIG. 10 illustratively concludes at Block 126
• the IGFET 200 illustratively includes a substrate 201 and a semiconductor layer 202 on the substrate.
• a hyper- abrupt junction region 208 is positioned within the semiconductor layer 202 and extends partially into the substrate 201.
• the hyper- abrupt junction region 208 is U-shaped and may be formed as a filled trench structure by depositing the above-noted layers successively within a trench extending through the semiconductor layer 202 into the substrate 201.
• a gate electrode layer 215 overlies the dielectric layer 228 and is surrounded by a gate dielectric layer 214.
• a body region 233 surrounds the gate dielectric layer and defines a conduction channel 240 adjacent the gate dielectric layer 232.
• a source region 234 Overlying the body region 233 is a source region 234, and overlying the source region and gate are first and second dielectric layers 235, 236.
• a source contact layer 237 e.g.,
• a semiconductor may be formed over the top side of the device 200 (i.e. , overlying the gate structure and semiconductor layer 202), and a drain contact layer 238 (e.g., a metal layer) may be formed on the back side of the substrate 201.
• a drain contact layer 238 e.g., a metal layer
• the hyper-abrupt junction region 208’ illustratively includes a single superlattice layer 225’. More particularly, in this example the hyper- abrupt junction region 208’ illustratively includes a first semiconductor layer 212’ having a first conductivity type (N or P), the superlattice layer 225’, a second semiconductor layer 213’ having a second conductivity type 213’ (P or N) opposite the first conductivity type, and an optional intrinsic semiconductor layer 239’.
• the remaining components of the IGFET 200’ may be similar to those described above with respect to FIG. 6.
• the varactor 300 illustratively includes a substrate
• the hyper-abrupt junction region 308 may be grown on the collector layer 303 of the substrate 301 (Block 132). More particularly, the hyper- abrupt junction region 308 illustratively includes a first semiconductor layer 312 having a first conductivity type (P or N), a first superlattice 325a on the first semiconductor layer, a second semiconductor layer 313 on the first superlattice layer having a second conductivity type different than (i.e. , opposite) the first conductivity type (N or P), and a second superlattice layer 325b on the second semiconductor layer.
• an anode region 340 and associated metal layer 341 are formed on the hyper-abrupt junction region 308, at Block 133.
• a reach through implant 342 and associated metal layer 343 are also formed (Block 134) to contact the cathode layer 302 of the substrate 301 (it should be noted that this may instead be formed as a backside contact if desired in some embodiments).
• the reach through implant 342 is laterally spaced apart from the hyper-abrupt junction 308 and extends from a surface of the collector layer 303 to the cathode layer 302.
• the reach through implant 342 may have an opposite conductivity type than the cathode layer 302 and collector layer 303, and the collector layer and first semiconductor layer 312 may have the same conductivity type.
• isolation regions 311 e.g., a dielectric
• the method of FIG. 11 concludes at Block 135.
• hyper-abrupt junction 308’ illustratively includes a single
• the hyper-abrupt junction 308’ illustratively includes the first semiconductor layer 312’, the superlattice 325’, an intrinsic semiconductor layer 339’, and a second semiconductor layer 340’ (which also serves as the anode region).
• Still another similar varactor 330” is shown in FIG. 9B, in which all of the components are the same as in the varactor 330’ except that the intrinsic layer 339” is below the superlattice layer 325” instead of above it.
• the remaining components of the varactors 330’, 330” may be similar to those described above with respect to FIG. 8.

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