EP3997789A4 - Hybrid matching network topology - Google Patents

Hybrid matching network topology Download PDF

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Publication number
EP3997789A4
EP3997789A4 EP20836781.3A EP20836781A EP3997789A4 EP 3997789 A4 EP3997789 A4 EP 3997789A4 EP 20836781 A EP20836781 A EP 20836781A EP 3997789 A4 EP3997789 A4 EP 3997789A4
Authority
EP
European Patent Office
Prior art keywords
network topology
matching network
hybrid matching
hybrid
topology
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20836781.3A
Other languages
German (de)
French (fr)
Other versions
EP3997789A1 (en
Inventor
Anthony OLIVETI
Tigran POGHOSYAN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Comet Technologies USA Inc
Original Assignee
Comet Technologies USA Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Comet Technologies USA Inc filed Critical Comet Technologies USA Inc
Publication of EP3997789A1 publication Critical patent/EP3997789A1/en
Publication of EP3997789A4 publication Critical patent/EP3997789A4/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H03H7/40—Automatic matching of load impedance to source impedance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H11/00—Networks using active elements
    • H03H11/02—Multiple-port networks
    • H03H11/28—Impedance matching networks
    • H03H11/30—Automatic matching of source impedance to load impedance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32926—Software, data control or modelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24564—Measurements of electric or magnetic variables, e.g. voltage, current, frequency
EP20836781.3A 2019-07-09 2020-06-22 Hybrid matching network topology Pending EP3997789A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/506,373 US11107661B2 (en) 2019-07-09 2019-07-09 Hybrid matching network topology
PCT/US2020/038899 WO2021007017A1 (en) 2019-07-09 2020-06-22 Hybrid matching network topology

Publications (2)

Publication Number Publication Date
EP3997789A1 EP3997789A1 (en) 2022-05-18
EP3997789A4 true EP3997789A4 (en) 2023-08-30

Family

ID=74101708

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20836781.3A Pending EP3997789A4 (en) 2019-07-09 2020-06-22 Hybrid matching network topology

Country Status (6)

Country Link
US (1) US11107661B2 (en)
EP (1) EP3997789A4 (en)
JP (2) JP7479446B2 (en)
KR (1) KR20220030959A (en)
CN (1) CN114008919A (en)
WO (1) WO2021007017A1 (en)

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US11476091B2 (en) 2017-07-10 2022-10-18 Reno Technologies, Inc. Impedance matching network for diagnosing plasma chamber
US11521833B2 (en) 2017-07-10 2022-12-06 Reno Technologies, Inc. Combined RF generator and RF solid-state matching network
US11114279B2 (en) * 2019-06-28 2021-09-07 COMET Technologies USA, Inc. Arc suppression device for plasma processing equipment
US11596309B2 (en) * 2019-07-09 2023-03-07 COMET Technologies USA, Inc. Hybrid matching network topology
CN113541614B (en) * 2021-08-12 2024-01-30 南京汇君半导体科技有限公司 Power amplification module and terminal equipment
US20230317413A1 (en) * 2022-04-04 2023-10-05 COMET Technologies USA, Inc. Variable reactance device having isolated gate drive power supplies

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