EP3973258A1 - Interferometereinrichtung und verfahren zum herstellen einer interferometereinrichtung - Google Patents
Interferometereinrichtung und verfahren zum herstellen einer interferometereinrichtungInfo
- Publication number
- EP3973258A1 EP3973258A1 EP20730194.6A EP20730194A EP3973258A1 EP 3973258 A1 EP3973258 A1 EP 3973258A1 EP 20730194 A EP20730194 A EP 20730194A EP 3973258 A1 EP3973258 A1 EP 3973258A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- interferometer
- unit
- base substrate
- opening
- base plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000758 substrate Substances 0.000 claims abstract description 56
- 239000004020 conductor Substances 0.000 claims description 21
- 230000003595 spectral effect Effects 0.000 claims description 16
- 230000000694 effects Effects 0.000 claims description 12
- 238000011156 evaluation Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 4
- 230000001419 dependent effect Effects 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1213—Filters in general, e.g. dichroic, band
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
Definitions
- the present invention relates to an interferometer device and a
- Miniaturized spectrometers with Fabry-Perot interferometers can be manufactured as a compact component and comprise a housing with an optical window, whereby a filter can usually be fixed on an inside with an adhesive.
- a negative pressure or even a vacuum can prevail and a defined atmosphere can be developed, so that as far as possible no gas attenuation occurs during operation and the mirror distances in the FPI can be changed quickly (tuning via the wavelengths of the light to be transmitted or filtered) to achieve short measurement times.
- negative pressure however, a tensile force can be triggered on the adhesive connection and the robustness of the spectrometer can thereby be reduced.
- Spectrometer with a Fabry-Perot interferometer described wherein a housing comprises an optical window (light transmission unit) and this can be provided with a band-pass filter coating and the window can be fixed on an inside of a metal cover by means of an adhesive. Disclosure of the invention
- the present invention provides an interferometer device according to claim 1 and a method for manufacturing an interferometer device according to claim 1
- the idea on which the present invention is based consists in specifying an interferometer device which, by means of fewer components, shields a small-scale component, in particular a filter element, with a low overall height and one against stray light and environmental influences
- Detector device allows. An incident light can be filtered and / or the angle of incidence can be restricted through a robust optical window.
- the interferometer device comprises a
- Interferometer unit with a base substrate, which comprises an electrical conductor connection, with a Fabry-Perot unit, which on the
- Base substrate is arranged and forms a first cavity over the base substrate and is connected to the electrical conductor connection, and with a
- Detector device which is arranged on the base substrate and is arranged in the first cavity between the base substrate and the interferometer unit and is connected to the electrical conductor connection; a housing which comprises a base plate and a cover structure, wherein the cover structure is arranged on the base plate and encloses a second cavity between the cover structure and the base plate, the base plate or the cover structure comprising an opening which is surrounded by side walls that extend to a surface of the Base plate or the
- the Cover structure extend vertically; and wherein the interferometer unit is arranged in the second cavity and in a direction of incidence of light through the opening, so that the interferometer unit with the Fabry-Perot unit faces the opening.
- the base substrate can advantageously be shaped as a wiring substrate.
- the first cavity below the Fabry-Perot unit can be shielded from outside light from the lateral sides and only that from the
- Interferometer unit which can act as a filter for the outside light, allow transmitted light to pass into the first cavity.
- the interferometer device enables a spectrometer that is as inexpensive as possible, but nevertheless powerful
- the interferometer device can be produced as a small-scale, compact (package) detector arrangement with few components. Furthermore, a mechanically robust and largely hermetic sealing of the cavities can be achieved by means of a cover structure and a
- Window element for closing an optical opening can be achieved.
- the cone of incidence of the incident light can be restricted, which can lead to a higher resolution since obliquely incident rays can be shielded. In this way, unwanted reflections can also be reduced or avoided, which could fall past the interferometer unit onto the detector.
- the interferometer device comprises at least one filter device which spans the opening inside or outside the housing.
- the filter device comprises a spectral filter for incident radiation and / or an angle-selective element.
- the opening comprises a round or circular cross section when viewed from a direction of incidence of light.
- the opening forms a cylinder with the side walls, which extends from the
- Base plate or extends perpendicularly away from the cover structure.
- the base substrate is placed on contact pins which are fastened in the base plate or the cover structure.
- At least one of the contact pins is electrically conductive or comprises an electrical conductor track.
- the interferometer unit comprises an evaluation unit which is based on the
- Base substrate is arranged, the detector device and the Fabry-Perot unit are arranged on the evaluation unit.
- the detector device and the Fabry-Perot unit are connected to an electrical conductor connection of the base substrate and / or an evaluation unit and are electrically contacted.
- the side walls comprise a light-absorbing coating on a side facing the opening.
- the spectral filter has areas with different areas in the lateral direction
- the detector device comprises several detector channels which are each aligned with the areas of different filter effects and can be read out separately.
- the interferometer unit comprises a Fabry-Perot interferometer.
- the Fabry-Perot interferometer can only transmit light of a certain wavelength for certain distances between the mirrors in the Fabry-Perot interferometer. Due to the direct arrangement of the Fabry-Perot interferometer and / or the detector device or at least the Fabry-Perot interferometer on the base substrate, the overall height of the Fabry-Perot interferometer.
- Interferometer device can advantageously be reduced, since the electrical wiring can also take place via the base substrate, for example with a conductive adhesive and / or with bonding wires.
- the detector device and / or the interferometer unit are with a
- the cover structure comprises lateral side walls and a metal.
- Interferometer means providing a base substrate which comprises at least one electrical conductor connection; arranging a detector device on the base substrate; arranging a Fabry-Perot unit on the base substrate such that a first cavity over the
- Base substrate is formed and the detector device is in the first cavity is located between the base substrate and the Fabry-Perot unit, the base substrate, the detector device and the Fabry-Perot unit being a
- Form interferometer unit providing a base plate and a cover structure and fastening the cover structure on the base plate in such a way that a second cavity between the cover structure and the base plate
- the bottom plate or the lid structure comprises an opening which is surrounded by side walls which extend perpendicular to a surface of the bottom plate or the lid structure; and wherein the interferometer unit is arranged in the second cavity and in a direction of incidence of light through the opening, so that the interferometer unit with the Fabry-Perot unit faces the opening.
- the procedure can also be through the already in connection with the
- Interferometer unit attached to the base substrate on contact pins, which are attached in the base plate or the cover structure.
- Filter device inside or outside the housing on the opening, spanning it, arranged.
- Fig. 2 shows a representation of method steps of a method for
- FIG. 1 shows a schematic side view of an interferometer device according to an embodiment of the present invention.
- the interferometer device 10 comprises an interferometer unit 1 with a base substrate 2, which includes an electrical conductor connection La, with a Fabry-Perot unit FPI, which is arranged on the base substrate 2 and forms a first cavity Kl above the base substrate 2 and with the electrical conductor connection La is connected, and with a detector device 3, which is arranged on the base substrate 2 and is arranged in the first cavity Kl between the base substrate 2 and the interferometer unit 1 and is connected to the electrical conductor connection La. Furthermore, the interferometer device 10 comprises a housing G which comprises a base plate BP and a cover structure 4, the cover structure 4 on the
- Base plate BP is arranged and a second cavity K2 between
- Lid structure 4 and base plate BP includes, wherein the base plate BP or the lid structure 4 comprises an opening 5 which is surrounded by side walls 5a which extend to a surface of the base plate BP or the
- Cover structure 4 extend vertically; and wherein the interferometer unit 1 is arranged in the second cavity K2 and in a light incidence direction L through the opening 5, approximately along an optical axis AA, so that the
- Interferometer unit 1 with the Fabry-Perot unit FPI facing the opening 5.
- a filter device 6 can open the opening 5 inside or outside the
- the opening 5 can have a round or circular cross-section in plan view from a direction of incidence of light L, but can also deviate therefrom. If the opening 5 is circular, it can form a cylinder with its side walls 5 a, which can extend perpendicularly away from the base plate BP or from the cover structure 4.
- the opening with the side walls itself acts as an angle-limiting for incident rays, since light rays with large angles of incidence with respect to the normal, i.e. optical axis AA, strike the side wall instead of the FPL.A reflection can then be prevented on the side wall 5a, for example through absorption.
- the side walls 5 a can comprise a light-absorbing coating 9 on a side facing the opening 5.
- the base substrate 2 can be placed on contact pins ST, for example at least two, which can be fastened in the base plate BP or the cover structure 4 (not shown). At least one of the contact pins ST can be electrically conductive or comprise an electrical conductor track, whereby the
- Base substrate and / or other components can be electrically contacted.
- the contact pins can, for example, be inserted into recesses in the base substrate and held or fixed with connection areas t1.
- the connection areas t1 can be electrically conductive and advantageously flexible in order to be able to adapt flush to the inserted contact pins.
- the contact pins ST can be guided through recesses in the base plate BP and held there with sealing elements ml, which can nestle flush against the contact pins ST and can advantageously be opaque and electrically insulating.
- a tight housing G can be formed by the flush connection.
- the filter device 6 can comprise a spectral filter 6a for an incident radiation and / or an angle-selective element 6b.
- the angle-selective element can advantageously restrict the angle of incidence of the incident light. If the distribution of the angles of incidence is still centered by a certain angle with respect to a normal on the mirror surface of the interferometer unit, this can lead to a displacement of the entire interferometer unit
- the opening itself can also have an angle-selective effect, wherein the angle-selective element can support this or can be omitted.
- the spectral filter 6a can also be arranged on an inside or outside above the opening 5 or both and the angle-selective element 6b can be arranged on an inside or outside above the opening 5, for example different from one another or shaped as the same element, and both can be Spanning opening 5, preferably completely.
- the spectral filter 6a and the angle-selective element 6b can also be arranged in reverse at the opening 4, both can be present or only one of the two.
- the spectral filter 6a and / or the angle-selective element 6b can be fastened with an adhesive KL, for example electrically non-conductive, in the lateral edge region around the opening 5.
- the connection KL can comprise a solder connection, for example a metallic solder connection, which can have better long-term stability with regard to the hermeticity than adhesive connections.
- the spectral filter 6a can be used to prevent that through the opening 5
- the spectral filter 6a can thus be set up to allow only certain orders or wavelength ranges of the external light AL to pass into the interior of the first cavity K1 (and the second cavity). If there are several openings 5, the corresponding spectral filters can be designed for different wavelengths.
- the interferometer unit 1 can comprise an evaluation unit 7 which can be arranged on the base substrate 2, the detector device 3 and the Fabry-Perot unit FPI being able to be arranged on the evaluation unit 7.
- the cover structure 4 can comprise lateral side walls 4a and comprise a metal, wherein the side walls 4a can be attached to the base plate BP with a soldered or welded connection KL.
- the base substrate 2 can comprise a wiring substrate such as a printed circuit board (or LTCC).
- the electrical conductor connection La can advantageously comprise one or more conductor tracks, for example each as a metallization, and be applied to the front and / or back of the base substrate 2 and / or be integrated (embedded) in the base substrate 2.
- a direct electrical connection can be made from the conductor track by means of a wire contact DB
- the detector device 3 can comprise one or more detectors which can be arranged on top of one another or next to one another, for example those which can be sensitive in different wavelength ranges.
- the Fabry-Perot unit can comprise at least two mirror devices SP1 and SP2, which can be aligned in parallel and their spacing can be variable. Depending on the distance between the mirror devices, a certain wavelength of the light which falls through the opening 5 and filtered by the spectral filter and advantageously through the opening and / or the angle-selective element was selected, propagate in the direction of the detector device 3.
- the mirror devices SP1 and / or SP2 can each include a dielectric mirror with two high-index layers (for example made of silicon or a compound with silicon) and a low-index layer located in between (for example air or vacuum).
- a dielectric mirror with two high-index layers for example made of silicon or a compound with silicon
- a low-index layer located in between for example air or vacuum
- the Fabry-Perot interferometer can do several
- openings 5 can be present in the cover structure 4 or base plate BP, each of which can be assigned its own interferometer units, whereby different spectra (wavelengths) can be measured simultaneously.
- the interferometer device 10 can be designed as a module (with module housing) for a larger component, for example as a
- microelectromechanical spectrometer module microelectromechanical spectrometer module.
- both the detector device 3 and the interferometer unit 1 can be applied to the base substrate 2, advantageously directly, an overall height above and below the base substrate can be reduced.
- the interferometer device 10 can thus be implemented in a few steps (a few costly steps) and at reduced costs as a small-scale component which can be produced even with a reduced number of components.
- the interferometer device 10 and / or in particular the interferometer unit 1 can be a micromechanical
- Component be formed.
- the spectral filter 6a can have areas with different filter effects in the lateral direction and / or the angle-selective element 6b can have areas with different angle-selective effects in the lateral direction.
- the detector device 3 can comprise (several) detector channels aligned or arranged relative to these areas of the spectral filter and / or the angle-selective element, each of which is aligned with the areas of different filter effect and can be read out separately, for example by an evaluation device (not shown).
- the interferometer device enables a high spectral resolution and a reduced signal-to-noise ratio to be achieved. Furthermore, the interferometer device can be distinguished by a low scatter of the mode of operation from module to module.
- FIG. 2 shows an illustration of method steps of a method for producing an interferometer device according to an exemplary embodiment of the present invention.
- a base substrate which comprises at least one electrical conductor connection; arranging a detector device Slb on the base substrate; placing a Fabry-Perot unit on top of the
- Base substrate such that a first cavity is formed above the base substrate and the detector device is located in the first cavity between the
- Base substrate and the Fabry-Perot unit is located, wherein the base substrate, the detector device and the Fabry-Perot unit form an interferometer unit; providing S2a a base plate, advantageously equipped with a filter device, and a cover structure, and securing S2b Cover structure on the base plate such that a second cavity is enclosed between the cover structure and base plate and both form a housing, the base plate or the cover structure comprising an opening which is surrounded by side walls which extend perpendicular to a surface of the base plate or the cover structure ; and where the
- Interferometer unit is arranged in the second cavity and in a direction of incidence of light through the opening, so that the interferometer unit with the Fabry-Perot unit faces the opening.
- the steps Sla to Sic can be used to shape the interferometer unit 1.
- steps S2a and S2b can take place with inclusion of the interferometer unit 1 in order to shape the housing G around the interferometer unit 1 and to shape the interferometer device 10 as a whole.
- Embodiment has been fully described above, it is not limited to it, but can be modified in many ways.
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102019207383.2A DE102019207383A1 (de) | 2019-05-21 | 2019-05-21 | Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung |
PCT/EP2020/063574 WO2020234139A1 (de) | 2019-05-21 | 2020-05-15 | Interferometereinrichtung und verfahren zum herstellen einer interferometereinrichtung |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3973258A1 true EP3973258A1 (de) | 2022-03-30 |
Family
ID=70975843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20730194.6A Withdrawn EP3973258A1 (de) | 2019-05-21 | 2020-05-15 | Interferometereinrichtung und verfahren zum herstellen einer interferometereinrichtung |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP3973258A1 (de) |
CN (1) | CN113825988A (de) |
DE (1) | DE102019207383A1 (de) |
WO (1) | WO2020234139A1 (de) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3770326B2 (ja) * | 2003-10-01 | 2006-04-26 | セイコーエプソン株式会社 | 分析装置 |
JP4432947B2 (ja) * | 2006-09-12 | 2010-03-17 | 株式会社デンソー | 赤外線式ガス検出器 |
US7911623B2 (en) * | 2007-08-07 | 2011-03-22 | Xerox Corporation | Fabry-Perot piezoelectric tunable filter |
CN105683725B (zh) * | 2013-10-31 | 2019-05-14 | 浜松光子学株式会社 | 光检测装置 |
JP6290594B2 (ja) * | 2013-10-31 | 2018-03-07 | 浜松ホトニクス株式会社 | 光検出装置 |
CN108139270B (zh) | 2015-10-02 | 2021-06-08 | 浜松光子学株式会社 | 光检测装置 |
US10386173B2 (en) * | 2015-11-19 | 2019-08-20 | Kris Vossough | Integrated sensory systems |
US20180188110A1 (en) * | 2016-12-29 | 2018-07-05 | Verifood, Ltd. | Fabry-perot spectrometer apparatus and methods |
-
2019
- 2019-05-21 DE DE102019207383.2A patent/DE102019207383A1/de not_active Withdrawn
-
2020
- 2020-05-15 CN CN202080037708.8A patent/CN113825988A/zh active Pending
- 2020-05-15 WO PCT/EP2020/063574 patent/WO2020234139A1/de unknown
- 2020-05-15 EP EP20730194.6A patent/EP3973258A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
DE102019207383A1 (de) | 2020-11-26 |
CN113825988A (zh) | 2021-12-21 |
WO2020234139A1 (de) | 2020-11-26 |
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