EP3953586A1 - Module de chambre à vide - Google Patents

Module de chambre à vide

Info

Publication number
EP3953586A1
EP3953586A1 EP20721685.4A EP20721685A EP3953586A1 EP 3953586 A1 EP3953586 A1 EP 3953586A1 EP 20721685 A EP20721685 A EP 20721685A EP 3953586 A1 EP3953586 A1 EP 3953586A1
Authority
EP
European Patent Office
Prior art keywords
pump
vacuum
vacuum chamber
chamber
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20721685.4A
Other languages
German (de)
English (en)
Inventor
Andrew Cobbett
Richard HORLER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of EP3953586A1 publication Critical patent/EP3953586A1/fr
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F04D29/602—Mounting in cavities
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures

Definitions

  • the field of the invention relates to a vacuum chamber module and an apparatus.
  • a vacuum chamber module comprising: a pump wall defining a recess shaped to receive a multi-stage vacuum pump; a plurality of vacuum chambers, each vacuum chamber being configured to be pumped by a respective stage of the multi-stage vacuum pump, each vacuum chamber being defined at least partially by a portion of the pump wall, each vacuum chamber having an pumping port located at a different circumferential position on the pump wall for fluid communication with the respective stage of the multi-stage vacuum pump.
  • the vacuum chamber module may comprise a pump wall or enclosure which is shaped to form a recess or depression which can receive or accommodate at least a portion of a multi stage vacuum pump.
  • the module may comprise two or more vacuum chambers.
  • the vacuum chambers may be arranged to be pumped using an associated stage of the multi-stage vacuum pump.
  • Each of the vacuum chambers may be formed at least partially by a portion or part of the pump wall.
  • Each vacuum chamber may have a pumping port.
  • the pumping ports may be located at different positions around or in the pump wall to support fluid communication with the associated stage of the multi-stage vacuum pump.
  • the interstage ports extend circumferentially along the pump wall. Accordingly, the interstage ports may be defined by apertures formed by the absence of a section of the pump wall.
  • the interstage ports are located to be non-overlapping circumferentially along the pump wall.
  • each interstage port may extend around its own, different, circumferential portion of the pump wall.
  • the interstage ports are located at different positions along a longitudinal axis of the multi-stage vacuum pump. Accordingly, each interstage port may be positioned at different locations along the longitudinal rotor axis in order to align with the appropriate stage of the multi-stage vacuum pump.
  • the vacuum chambers extend along a common portion of the longitudinal axis. Accordingly, two or more vacuum chambers may both occupy the same portion of the longitudinal axis, which provides for a simpler and more compact arrangement.
  • adjacent vacuum chambers share a common dividing wall extending along the common portion of the longitudinal axis. Accordingly, a single wall may be provided between, and shared by, adjacent vacuum
  • the two vacuum chambers may be arranged side by side, both extending along the same portion of the longitudinal axis, which provides for a simpler and more compact arrangement.
  • the pump wall defines a pump chamber shaped to receive the multi-stage vacuum pump. Accordingly, the vacuum wall may be shaped as a pump chamber which accommodates the multi-stage vacuum pump.
  • the pump wall surrounds the multi-stage vacuum pump. Accordingly, the pump wall may surround or enclose the multi-stage vacuum pump.
  • the pump wall is cylindrical. Accordingly, the ports may be formed as part-cylindrical apertures.
  • the vacuum chambers have a pair of vacuum chamber walls extending radially outwards from the pump wall. Accordingly, at least two vacuum chambers may have walls which extend with a radially outward or tangential outward component, with respect to the pump axis, from the pump wall.
  • the vacuum chambers comprise a joining wall extending circumferentially joining the pair of vacuum chamber walls. Accordingly, the vacuum chambers may have a wall extending circumferentially, between said radial, or tangential walls,. Again, this provides for a simple and compact arrangement.
  • the vacuum chambers extend radially from the pump chamber and are positioned circumferentially around the pump chamber.
  • the vacuum chambers may be positioned around the circumference of the pump chamber. That is, the chambers may be positioned at different circumferential positions around (the arc of) the circumference. Again, this provides for a simple and compact arrangement.
  • the vacuum chambers comprise inter-chamber apertures configured for fluid communication between the vacuum chambers.
  • the pump wall defines a recess shaped to receive at least one further vacuum pump.
  • each vacuum chamber has at least one pumping port located on the pump wall for fluid communication with at least one of the multi stage vacuum pump and the at least one further vacuum pump.
  • an apparatus comprising: the vacuum chamber module of the first aspect and its embodiments; and a multi stage vacuum pump.
  • Figure 1 A is a perspective sectional view of a vacuum chamber according to one embodiment incorporating a vacuum pump
  • Figures 1 B and 1 C are perspective views of the vacuum chamber of Figure 1A incorporating a vacuum pump;
  • Figure 1 D is the perspective view of Figure 1 C with the vacuum pump removed;
  • Figures 1 E and 1 F are perspective views of the vacuum chamber of Figure 1 A incorporating a vacuum pump;
  • Figure 2A is a perspective view of a main component of a vacuum chamber according to one embodiment incorporating a vacuum pump;
  • Figure 2B a perspective view of the main component of the vacuum chamber with the vacuum pump removed;
  • Figure 2C is a sectional perspective view of the main component of the vacuum chamber incorporating the vacuum pump
  • Figure 3A is a schematic illustration of a vacuum chamber according to one embodiment.
  • Figure 3B is a schematic illustration of a vacuum chamber according to one embodiment.
  • Embodiments provide a vacuum chamber module for use with a multi stage vacuum pump.
  • the vacuum chamber module has a central portion, typically a generally cylindrical chamber, within which the multi-stage vacuum pump is located.
  • a series of vacuum chambers shaped generally as radially- extending lobes or petals, are positioned circumferentially around the central pump chamber. Ports are formed in the wall of the pump chamber to fluidly couple the vacuum chambers with the appropriate stage within the multi-stage vacuum pump. This provides for a simple and compact arrangement which allows different vacuum chambers to be operated at different pressures.
  • each vacuum chamber can accommodate at least a portion of the footprint of the multi-stage vacuum pump, and by arranging the vacuum chambers generally side by side around the circumference of the pump, extending along the longitudinal length of the multi-stage vacuum pump, the overall height of the vacuum chamber module is constrained.
  • FIGS 1A to 1 F illustrate a vacuum chamber module 10 according to one embodiment.
  • the vacuum chamber module 10 is typically cast, then machined and is shaped to receive a vacuum pump 20.
  • the vacuum pump 20 is a multistage vacuum pump arranged as a so-called cartridge pump.
  • the vacuum pump 20 has a backing pump stage 20A, a first turbo molecular pump stage 20B and a second turbo molecular pump stage 20C. It will be appreciated that embodiments may have fewer or more stages and that different types of pumps may be provided at each stage.
  • the backing pump stage 20A, first turbo molecular pump stage 20B and second turbo molecular pump stage 20C share a common longitudinal axis A and occupy a generally-cylindrical space.
  • the vacuum chamber module 10 is provided with a pump chamber 30 which is generally-cylindrical in shape to receive the vacuum pump 20.
  • the vacuum chamber module 10 is provided with a first chamber 40, a second chamber 50 and a third chamber 60.
  • the second chamber 50 and the third chamber 60 extend radially from the pump chamber 30 and sit side-by-side, extending along the longitudinal axis A.
  • the first chamber 40 has a first pumping port 70 formed in a wall of the first chamber 40 shared with the pump chamber 30.
  • the first pumping port 70 couples with an inlet port 80 on the backing pump 20A.
  • the second chamber 50 has a primary interstage port 90 formed in a wall of the second chamber 50 shared with the pump chamber 30.
  • the third chamber 60 has a secondary interstage port 100 formed in a wall of the third chamber 60 shared with the pump chamber 30.
  • the second chamber 50 and the third chamber 60 extend along the longitudinal axis A.
  • the second chamber 50 and the third chamber 60 share a common wall 1 10 which extends along the longitudinal axis A. Arranging the chambers next to each other, sharing space along the longitudinal axis A, helps to provide a compact arrangement.
  • the second chamber 50 and the third chamber 60 are co-located together, extending radially from different arc portions of the pump chamber 30.
  • the second chamber 50 extends from a first arc portion 120 of the pump chamber 30 and the third chamber 60 extends from a second arc portion 130 of the pump chamber 30.
  • the primary interstage port 90 is formed along the first arc portion 120 at a position along the longitudinal rotor axis A which enables fluid communication between the second chamber 50 and the upstream inlet of the first turbo molecular pump stage 20B.
  • the secondary interstage port 100 is formed along the second arc portion 130 at a position along the longitudinal axis A which enables fluid communication between the third chamber 60 and the upstream inlet of the second turbo molecular pump stage 20C.
  • each port extends along a portion of the wall shared by that chamber and the pump chamber. The longitudinal position of each port is positioned to couple with the appropriate part of the vacuum pump 20.
  • a sealing plate (not shown) is placed over an access aperture 140 provided in the wall of the first chamber 40 and the second chamber 50.
  • a sample (not shown) is introduced into the first chamber 40, either by placing the sample within the first chamber 40 or by introducing the sample in another way and then securing the sealing plate over the access aperture 140.
  • the vacuum pump 20 is activated.
  • the first chamber 40 is evacuated by the backing pump 20A via the first pumping port 70.
  • the second chamber 50 is evacuated by the first turbo molecular pump stage 20B and the backing pump 20A via the primary interstage port 90.
  • the third chamber 60 is evacuated by the second turbo molecular pump stage 20C, the first turbo molecular pump stage 20B and the backing pump 20A via the secondary interstage port 100.
  • the pressure within the third chamber 60 is lower than the pressure within the second chamber 50 and the pressure in the second chamber 50 is lower than the pressure in the first chamber 40.
  • apertures are provided (not shown) between the first chamber 40 and the second chamber 50, as well as between the second chamber 50 and the third chamber 60.
  • This allows the sample, once in a gaseous or ionised state, to flow from the first chamber 40 to the third chamber 60, via the second chamber 50, as illustrated by the arrows in Figure 1 A.
  • the vacuum chamber module 10 is used by, for example, a mass spectrometer, this enables equipment to be placed within the first chamber 40 to cause the sample to become gaseous or ionised if it is not already.
  • analyser equipment placed can be placed in the second chamber 50 (such as charged rods to generate an electromagnetic field) to control which particles pass through the second chamber 50 and into the third chamber 60.
  • the third chamber 60 can then be provided with detection equipment which detects the particles present within the third chamber 60.
  • a compact vacuum chamber module 10 is provided. It will be appreciated that where further vacuum pump stages are provided, further chambers can also be provided which extend circumferentially around the pump chamber 30, sharing common walls with each other and/or with the second chamber 50 or the third chamber 60, each having their own port for fluid communication with an appropriate stage of the vacuum pump.
  • FIGS 2A to 2C illustrates a vacuum chamber module 10' according to one embodiment. This embodiment is extruded rather than being cast. End plates (not shown) are fitted onto longitudinal ends of the chambers to enclose the chambers, but these have been omitted to improve clarity.
  • the vacuum pump 20 occupies a cylindrical pump chamber 30'.
  • a second chamber 50’ and a third chamber 60’ is provided.
  • the second chamber 60' has a primary interstage port 90', while the third chamber 60' has a secondary interstage port 100'.
  • further chambers may be provided, each of which extends at least partially
  • a first chamber may be provided adjacent the second chamber 50', which shares a common wall with the second chamber 50'.
  • the vacuum pump 20 would then be received further within the pump chamber 30’ with a port provided in the pump chamber 30’ to couple the first chamber with the inlet port 80.
  • at least a further three chambers may be provided extending from the arc portions 160A', 160B', 160C of the pump chamber 30’. In which case, the vacuum pump 20 would need a further three stages to enable each of the chambers to be evacuated to different pressures.
  • FIGS 3A and 3B illustrate schematically a vacuum chamber module 10" according to one embodiment.
  • This embodiment utilises more than one vacuum pump.
  • two vacuum pumps 21 “, 22” are provided, positioned at different locations (in this embodiment, at either ends) of the pump chamber 30”.
  • Five vacuum chambers 40”, 50”, 60”. 65”, 67” are provided which are positioned around the pump chamber 30”. It will be appreciated that the detailed implementation of the vacuum chamber module 10” can be arranged as described with reference to Figures 1 A to 1 F or Figures 2A to 2C above.
  • vacuum pump 21 is arranged to pump vacuum chambers 60”, 65”, 67” by providing suitably located ports in the shared wall between the vacuum chambers 60”, 65”, 67” and the pump chamber 30”.
  • Vacuum pump 22 is arranged to pump vacuum chambers 40”, 50” by providing suitably located ports in the shared wall between the vacuum chambers 40”, 50” and the pump chamber 30”.
  • vacuum pump 21 is arranged to pump vacuum chambers 60’”, 65’”, 67”’ by providing suitably located ports in the shared wall between the vacuum chambers 60”’, 65”’, 67”’ and the pump chamber 30”’.
  • Vacuum pump 22”’ is arranged to pump vacuum chambers 40”’, 50”’, 67”’ by providing suitably located ports in the shared wall between the vacuum chambers 40”’, 50”’, 67”’ and the pump chamber 30”’.
  • a second or further pump can also share the same pump chamber but be positioned at the opposite end and connected to different vacuum chambers as required. This allows one pump embedded in the vacuum pump chamber to pump on some of the vacuum chambers and a second pump fitted into the opposite end to pump other of the vacuum chambers. It is also possible that they could both pump together on one or more shared vacuum chambers to boost pumping speed and hence vacuum performance if needed.
  • vacuum chamber module 10 10; 10’; 10”; 10’” vacuum pump 20; 21”; 21”’; 22”’ 22”’ backing pump 20A
  • first turbo molecular pump stage 20B second turbo molecular pump stage 20C pump chamber 30; 30’; 30”; 30”’ first chamber 40; 40”; 40”’

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

L'invention concerne un module de chambre à vide et un appareil. Le module de chambre à vide comprend : une paroi de pompe définissant un renfoncement formé pour recevoir une pompe à vide à étages multiples ; une pluralité de chambres à vide, chaque chambre à vide étant conçue pour être pompée par un étage respectif de la pompe à vide à étages multiples, chaque chambre à vide étant définie au moins partiellement par une partie de la paroi de pompe, chaque chambre à vide ayant un orifice de pompage situé à une position circonférentielle différente sur la paroi de pompe pour une communication fluidique avec l'étage respectif de la pompe à vide à étages multiples. De cette manière, l'invention concerne un module qui partage des composants, la pompe à étages multiples étant au moins partiellement logée dans l'espace autrement occupé par les chambres à vide et les chambres à vide se trouvant autour de la paroi de pompe, ce qui permet un agencement plus simple et plus compact.
EP20721685.4A 2019-04-11 2020-04-09 Module de chambre à vide Pending EP3953586A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1905122.6A GB2584603B (en) 2019-04-11 2019-04-11 Vacuum chamber module
PCT/GB2020/050943 WO2020208375A1 (fr) 2019-04-11 2020-04-09 Module de chambre à vide

Publications (1)

Publication Number Publication Date
EP3953586A1 true EP3953586A1 (fr) 2022-02-16

Family

ID=66809956

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20721685.4A Pending EP3953586A1 (fr) 2019-04-11 2020-04-09 Module de chambre à vide

Country Status (6)

Country Link
US (1) US11976662B2 (fr)
EP (1) EP3953586A1 (fr)
JP (1) JP3240759U (fr)
CN (1) CN216950907U (fr)
GB (1) GB2584603B (fr)
WO (1) WO2020208375A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4108932A1 (fr) * 2022-09-29 2022-12-28 Pfeiffer Vacuum Technology AG Reciate et pompe à vide élevé

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
US7278831B2 (en) * 2003-12-31 2007-10-09 The Boc Group, Inc. Apparatus and method for control, pumping and abatement for vacuum process chambers
GB0411426D0 (en) * 2004-05-21 2004-06-23 Boc Group Plc Pumping arrangement
GB0424198D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Pumping arrangement
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
DE102007027354A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE102007044945A1 (de) * 2007-09-20 2009-04-09 Pfeiffer Vacuum Gmbh Vakuumpumpe
US9368335B1 (en) 2015-02-02 2016-06-14 Thermo Finnigan Llc Mass spectrometer
GB2538962B (en) 2015-06-01 2019-06-26 Edwards Ltd Vacuum pump
EP3327293B1 (fr) 2016-11-23 2019-11-06 Pfeiffer Vacuum Gmbh Pompe à vide avec une pluralté d'entrées

Also Published As

Publication number Publication date
US20220364569A1 (en) 2022-11-17
US11976662B2 (en) 2024-05-07
WO2020208375A1 (fr) 2020-10-15
GB2584603A (en) 2020-12-16
GB201905122D0 (en) 2019-05-29
GB2584603B (en) 2021-10-13
JP3240759U (ja) 2023-02-02
CN216950907U (zh) 2022-07-12

Similar Documents

Publication Publication Date Title
EP1302667B1 (fr) Pompes à vide
US6106223A (en) Multistage vacuum pump with interstage inlet
EP2553267B1 (fr) Système de pompes à vide
JP5053842B2 (ja) ポンピング装置
CA2771200C (fr) Systeme de spectrometre de masse
US8106354B2 (en) Mass spectrometer arrangement
US11976662B2 (en) Vacuum chamber module
US7537440B2 (en) Scroll compressor with multiple isolated inlet ports
JP2005307978A (ja) 多段式真空ポンプおよびその種のポンプを備えたポンプ設備
JP5069264B2 (ja) シャシ、ロータ及びケーシングを有する摩擦真空ポンプ並びにこの形式の摩擦真空ポンプを備えた装置
US20100187415A1 (en) Turbomolecular pump
GB2360066A (en) Vacuum pump
US11326604B2 (en) Multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: UNKNOWN

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20211013

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20231030