EP3899461A1 - Verfahren zur kalibrierung eines spektrometers - Google Patents
Verfahren zur kalibrierung eines spektrometersInfo
- Publication number
- EP3899461A1 EP3899461A1 EP19808762.9A EP19808762A EP3899461A1 EP 3899461 A1 EP3899461 A1 EP 3899461A1 EP 19808762 A EP19808762 A EP 19808762A EP 3899461 A1 EP3899461 A1 EP 3899461A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- light source
- emission spectrum
- spectrometer
- spectrum
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000000295 emission spectrum Methods 0.000 claims abstract description 47
- 238000001228 spectrum Methods 0.000 claims abstract description 13
- 238000005259 measurement Methods 0.000 claims abstract description 10
- 238000012545 processing Methods 0.000 claims description 7
- 238000012360 testing method Methods 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000004590 computer program Methods 0.000 claims description 5
- 229910052724 xenon Inorganic materials 0.000 claims description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 230000001419 dependent effect Effects 0.000 description 6
- 230000032683 aging Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000009102 absorption Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000004801 process automation Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J2003/2866—Markers; Calibrating of scan
Definitions
- the invention relates to a method for calibrating a spectrometer, a measuring system comprising a spectrometer, a computer program and a computer-readable medium.
- Spectrometers have a wavelength calibration ex works. This is defined, for example, by a third degree polynomial.
- the wavelength calibration assigns the individual pixels of a detector to a specific wavelength.
- each spectrometer must be calibrated after it has been manufactured.
- the spectrometer is connected to a defined calibration light source.
- a routine is started which maps the emission spectrum of the calibration light source to the pixels. Then, in the example, a 3rd degree polynomial is calculated, which adapts to the specified peaks.
- a spectrometer is usually built into a measuring system, which includes other components such as a data processing unit, a defined access to the measuring medium, etc.
- the calibration light source required for calibration is usually only designed as a laboratory light source. So either the spectrometer has to
- the invention has for its object to propose a simplification of the calibration of a spectrometer.
- the object is achieved by a method comprising the steps: sending light by means of a light source, the light source being a known and in the
- Has emission spectrum that is essentially unchangeable over time receiving the light as the reception spectrum, comparing the reception spectrum with the emission spectrum and determining a deviation, and taking the determined deviation into account in subsequent measurements with the spectrometer if the deviation is greater than a tolerance value.
- the light is sent from the light source in the direction of the medium to be measured, the measuring medium.
- the method further comprises the step: performing an adjustment when the determined deviation is greater than the tolerance value.
- the emission spectrum of the light source is independent of the temperature. The light source therefore emits the same emission spectrum at every temperature.
- the emission spectrum of the light source is from
- Temperature dependent In this case, a temperature measurement of the light source is first carried out and the emission spectrum is used at the corresponding temperature.
- One embodiment provides that the emission spectrum of the light source is temperature stable with respect to the process.
- the emission spectrum of the light source is temperature stable with respect to the process.
- the light source only has to be temperature stable with respect to the process. So if the temperature of the process, i.e. of the medium to be measured, it does not matter if the emission spectrum of the light source is fundamentally temperature-dependent, since only a constant temperature is relevant. In other words, the temperature of the light source is decisive and must be constant for this configuration. However, the temperature of the light source can change, for example, when the ambient temperature varies or when the probe is warmed up. Then the temperature of the
- Light source are determined and the possibly temperature-dependent emission spectrum of the light source be known.
- Reception spectrum is performed. In general, it must be possible to infer one or more wavelengths from the shape of the emission spectrum.
- the claimed method thus works with all light sources whose emission spectrum is not spectrally constant over the emission range.
- One embodiment provides that the comparison of the received spectrum with the emission spectrum is carried out using a single peak. This is particularly possible if all peaks shift in the same way, that is, for example, all have a positive offset.
- the emission spectrum comprises at least two, in particular at least three, peaks and comparing the
- Receiving spectrum is carried out with the emission spectrum based on the peaks.
- the peak (s) is designed as a dip (peak down), jump, discontinuous point, extreme point, floe point, low point or turning point in the emission spectrum.
- the course of the emission spectrum is used per se. In one embodiment, the course of the emission spectrum itself is determined in a certain way
- One embodiment provides that the light is sent through a defined test medium for the calibration of the spectrometer.
- test medium can be chosen freely. It is only important that the same is always used and the same
- test medium is air or nitrogen.
- Measuring medium acts. This is particularly the case if the measuring medium does not act as a filter for the light emitted by the light source, in particular not in the wavelength range of the peak or peaks.
- Deviation includes temperature compensation. If a light source with a known emission spectrum is used in the measuring system, which
- Temperature compensation can be used. The wavelength shift caused by the temperature is thus compensated.
- One embodiment provides that the determined ones are taken into account
- Deviation includes the aging of the measuring system.
- One embodiment provides that the consideration of the determined deviation includes mechanical stress.
- a measuring system comprising at least one light source, a spectrometer, the spectrometer in particular comprising at least one mirror, grating, a receiver, in particular a CCD sensor, and entry gap, and a data processing unit which is designed to perform the steps the procedure as described above.
- the measuring system comprises a temperature sensor.
- One embodiment provides that the light source as a xenon flash lamp
- Gas discharge lamp, incandescent lamp or fluorescent lamp is configured.
- the light source is designed as an LED.
- the light source is designed as a temperature-dependent light source.
- the temperature-dependent emission spectrum of the light source must be known and when comparing the reception spectrum with that
- the object is further achieved by a computer program comprising commands which cause the measuring system to carry out the method steps as described above as described above.
- the object is further achieved by a computer-readable medium on which the computer program is stored as described above.
- One embodiment provides that the emission spectrum of the light source is stored on the medium.
- the claimed measuring system in its entirety has reference number 10 and is shown in FIG. 1.
- the measuring system 10 comprises at least one light source 1, a spectrometer 3 and a data processing unit 4 which is designed to carry out the steps of the claimed method, for example to switch the light source 1 on and off or to carry out the data processing.
- the spectrometer 3 is only shown symbolically in FIG. 1 and comprises at least one mirror 5, grating 6 and a receiver 7.
- Mirror 5 and grating 6 can be designed as a single component.
- the receiver is designed as a CCD sensor.
- An entry slit 8 is located at the input of the spectrometer 3.
- the measuring medium 2 can be the medium actually to be measured. During the procedure for the calibration of the spectrometer 3, this can
- Measuring medium 2 can be replaced by a test medium such as air, nitrogen or, if necessary, vacuum.
- the light source 1 can also be configured as an LED. If the emission spectrum of the light source 1 is temperature-dependent, the measuring system 10 comprises a temperature sensor 9, which is arranged at, in or at least in the vicinity of the light source 1.
- the light source 1 comprises one or more windows which are at least partially transparent to the emitted light.
- the measuring medium 2 is separated from the optical and electronic components of the measuring system 10 via the windows.
- a light source 1 with a known emission spectrum and one or more characteristic emission peaks is used in the measuring system 10, this can be used for wavelength calibration. All you have to do is ensure that the measuring system 10 is in a medium (liquid, gas, solid, ...) whose absorption spectrum allows the characteristic emission peaks of the lamp to be determined. On the one hand, this means that there is no excessive absorption by the medium, so that there is still enough light to detect the emission peaks. On the other hand, no absorptions should occur which prevent the emission peaks of the light source 1 from being clearly identified. To calibrate the wavelength, it is not absolutely necessary for the measuring system 10 to be perfectly cleaned, since the intensity does not play a role in the calibration. For example, that
- Wavelength calibration can be used.
- Emission peaks can also use a dip (peak down), jump, discontinuous point, extreme point, high point, low point or turning point in the emission spectrum. Likewise, the course of the emission spectrum,
- Context should be understood as a medium in which a
- Characterization of the emission spectrum i.e. the assignment of at least one wavelength to a characteristic feature (extreme value, inflection point, peak, dip, jump, etc.) is possible. In the wavelength range this
- the medium must not absorb all light, i.e. sufficient (detectable) light must still arrive at the receiver 7 in this wavelength range. Furthermore, the medium must not make the characterization of the emission spectrum “unrecognizable”.
- the calibration can be carried out. In one embodiment, the calibration is carried out before each measurement. Calibration can also be done by non-specialist personnel be carried out as no other aids and special
- Calibration light sources are necessary.
- the measurement performance is improved especially when a spectrometer with a wavelength drift over temperature is used.
- a light source 1 with a known emission spectrum and having characteristic emission peaks is used in the measuring system 10, this can also be used for temperature compensation.
- the wavelength shift caused by the temperature is thus compensated. Since it is not the absolute intensity spectrum that is of interest for the temperature compensation of the wavelength, but rather only individual pixels in the CCD sensor 7 that meet a local maximum, this compensation can take place directly in the process.
- the emission spectrum of the light source 1 used at a specific temperature can be stored in the measuring system 10, for example in the data processing unit 4, and is compared with the emission spectrum just measured. For this purpose, characteristic emission peaks are determined, which are then used for comparison.
- the measured spectrometer is then changed using a routine so that it matches the original mapping of the emission spectrum on the CCD sensor at a defined temperature (e.g. room temperature). The error is reduced by temperature influences on the measurement.
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018133152.5A DE102018133152A1 (de) | 2018-12-20 | 2018-12-20 | Verfahren zur Kalibrierung eines Spektrometers |
PCT/EP2019/082024 WO2020126277A1 (de) | 2018-12-20 | 2019-11-21 | Verfahren zur kalibrierung eines spektrometers |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3899461A1 true EP3899461A1 (de) | 2021-10-27 |
Family
ID=68654483
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19808762.9A Pending EP3899461A1 (de) | 2018-12-20 | 2019-11-21 | Verfahren zur kalibrierung eines spektrometers |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220057264A1 (de) |
EP (1) | EP3899461A1 (de) |
CN (1) | CN113167651A (de) |
DE (1) | DE102018133152A1 (de) |
WO (1) | WO2020126277A1 (de) |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2084923A1 (en) * | 1991-12-20 | 1993-06-21 | Ronald E. Stafford | Slm spectrometer |
DE59712476D1 (de) * | 1997-05-13 | 2005-12-15 | Gretag Macbeth Ag Regensdorf | Remissionsmessvorrichtung |
US6249343B1 (en) * | 1999-10-29 | 2001-06-19 | Agilent Technologies, Inc. | Wavelength reference standard using multiple gases |
US7813895B2 (en) * | 2007-07-27 | 2010-10-12 | Applied Materials, Inc. | Methods for plasma matching between different chambers and plasma stability monitoring and control |
US20090219524A1 (en) * | 2008-02-29 | 2009-09-03 | Honeywell International Inc. | Method and apparatus for controlled raman spectrometer |
US8101906B2 (en) * | 2008-10-08 | 2012-01-24 | Applied Materials, Inc. | Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers |
DE102009028295A1 (de) * | 2009-07-31 | 2011-02-17 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | Verfahren zur Bestimmung eines Parameters, insbesondere des chemischen Sauerstoffbedarfs (CSB) oder des organischen Gesamtkohlenstoffgehalts (TOC), einer Flüssigkeitsprobe |
US8358417B2 (en) * | 2010-10-21 | 2013-01-22 | Spectrasensors, Inc. | Spectrometer with validation cell |
US20130003064A1 (en) * | 2011-01-03 | 2013-01-03 | National Institute Of Standards And Technology | Dynamic Spectral Radiance Calibration Source |
US10247605B2 (en) * | 2012-01-16 | 2019-04-02 | Filmetrics, Inc. | Automatic real-time wavelength calibration of fiber-optic-based spectrometers |
JP5948916B2 (ja) * | 2012-02-02 | 2016-07-06 | セイコーエプソン株式会社 | 分光計測方法、および分光計測器 |
CN202676288U (zh) * | 2012-03-28 | 2013-01-16 | 科纳技术(苏州)有限公司 | 光谱仪多波长校准系统 |
DE102014013848B4 (de) * | 2014-09-24 | 2016-08-04 | Insion Gmbh | Mikrospektrometer, Mikrospektrometersystem und Kalibrationsverfahren |
DE102014117595A1 (de) * | 2014-12-01 | 2016-06-02 | Instrument Systems Optische Messtechnik Gmbh | Verfahren zur Kalibrierung eines Spektralradiometers |
US9719852B2 (en) * | 2015-05-13 | 2017-08-01 | Datacolor Holding Ag | System and method for compensating light source drift at different wavelengths with a single reference channel in a light measuring device |
US10393583B2 (en) * | 2016-08-09 | 2019-08-27 | Northrop Grumman Systems Corporation | Calibration target for hyperspectral image sensor |
CN106769939A (zh) * | 2016-12-30 | 2017-05-31 | 无锡中科光电技术有限公司 | 一种多轴差分吸收光谱仪的实时校准系统及测量校准方法 |
-
2018
- 2018-12-20 DE DE102018133152.5A patent/DE102018133152A1/de active Pending
-
2019
- 2019-11-21 US US17/416,904 patent/US20220057264A1/en active Pending
- 2019-11-21 WO PCT/EP2019/082024 patent/WO2020126277A1/de unknown
- 2019-11-21 CN CN201980078643.9A patent/CN113167651A/zh active Pending
- 2019-11-21 EP EP19808762.9A patent/EP3899461A1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
US20220057264A1 (en) | 2022-02-24 |
CN113167651A (zh) | 2021-07-23 |
WO2020126277A1 (de) | 2020-06-25 |
DE102018133152A1 (de) | 2020-06-25 |
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Inventor name: OSER, JULIAN Inventor name: WEBER, FRANK Inventor name: KRAETSCHMER, THILO Inventor name: BOLLE, JOACHIM |
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