EP3894087C0 - Dispositif de nettoyage - Google Patents

Dispositif de nettoyage

Info

Publication number
EP3894087C0
EP3894087C0 EP19746465.4A EP19746465A EP3894087C0 EP 3894087 C0 EP3894087 C0 EP 3894087C0 EP 19746465 A EP19746465 A EP 19746465A EP 3894087 C0 EP3894087 C0 EP 3894087C0
Authority
EP
European Patent Office
Prior art keywords
cleaning device
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19746465.4A
Other languages
German (de)
English (en)
Other versions
EP3894087A1 (fr
EP3894087B1 (fr
Inventor
Alexander Genze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ecoclean GmbH
Original Assignee
Ecoclean GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecoclean GmbH filed Critical Ecoclean GmbH
Publication of EP3894087A1 publication Critical patent/EP3894087A1/fr
Application granted granted Critical
Publication of EP3894087B1 publication Critical patent/EP3894087B1/fr
Publication of EP3894087C0 publication Critical patent/EP3894087C0/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B6/00—Cleaning by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
EP19746465.4A 2018-07-26 2019-07-26 Dispositif de nettoyage Active EP3894087B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018118067.5A DE102018118067A1 (de) 2018-07-26 2018-07-26 Reinigungsvorrichtung
PCT/EP2019/070272 WO2020021109A1 (fr) 2018-07-26 2019-07-26 Dispositif de nettoyage

Publications (3)

Publication Number Publication Date
EP3894087A1 EP3894087A1 (fr) 2021-10-20
EP3894087B1 EP3894087B1 (fr) 2023-09-06
EP3894087C0 true EP3894087C0 (fr) 2023-09-06

Family

ID=67482943

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19746465.4A Active EP3894087B1 (fr) 2018-07-26 2019-07-26 Dispositif de nettoyage

Country Status (5)

Country Link
US (1) US20210146408A1 (fr)
EP (1) EP3894087B1 (fr)
CN (1) CN112384303A (fr)
DE (1) DE102018118067A1 (fr)
WO (1) WO2020021109A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018219696A1 (de) * 2018-11-16 2020-05-20 Ejot Gmbh & Co. Kg Berührungsfreie Reinigungsvorrichtung mit Wirbelstrom
DE102019112044A1 (de) * 2019-05-08 2020-11-12 Ecoclean Gmbh Reinigungsvorrichtung
TWI804819B (zh) * 2021-02-23 2023-06-11 台灣積體電路製造股份有限公司 移除微粒的方法
DE202021001343U1 (de) * 2021-04-13 2022-07-14 Volkmann Gesellschaft mit beschränkter Haftung Werkstück-Reinigungsvorrichtung
CN113399345A (zh) * 2021-05-26 2021-09-17 南昌展火科技有限公司 一种球状工件自动清洗装置
CN113426739A (zh) * 2021-05-26 2021-09-24 南昌展火科技有限公司 一种圆柱工件自动清洗装置
DE102021116666A1 (de) * 2021-06-28 2022-12-29 Dyemansion Gmbh Heizen beim entpacken oder entpulvern von bauteilen eines additiven fertigungsprozesses
DE102021207220A1 (de) 2021-07-08 2023-01-12 Dürr Systems Ag Behandlungsanlage und Verfahren zum Behandeln von Werkstücken
DE102021121552A1 (de) 2021-08-19 2023-02-23 Dürr Systems Ag Reinigungsgerät für eine Elektrodenanordnung eines Zerstäubers, zugehöriges Betriebsverfahren und entsprechende Elektrodenanordnung
CN114308835B (zh) * 2022-01-05 2022-12-16 张卫英 一种妇产科用仪器清洗装置
CN114932086B (zh) * 2022-05-30 2023-06-16 沭阳县成基实业有限公司 一种通过风力筛选木片的重力分选机
CN114887999B (zh) * 2022-06-02 2023-05-26 潍坊学院 一种清洁装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2996042A (en) * 1955-02-11 1961-08-15 Ransburg Electro Coating Corp Electrostatic spray coating system
US4132567A (en) * 1977-10-13 1979-01-02 Fsi Corporation Apparatus for and method of cleaning and removing static charges from substrates
US4677704A (en) * 1986-04-22 1987-07-07 Huggins Richard A Cleaning system for static charged semiconductor wafer surface
US5409418A (en) * 1992-09-28 1995-04-25 Hughes Aircraft Company Electrostatic discharge control during jet spray
KR950002714A (ko) * 1993-07-22 1995-02-16 모리시타 요이찌 카오스응용기기
DE10136937C1 (de) * 2001-07-28 2003-02-13 Fraunhofer Ges Forschung Elektrokapillare Reinigungsunterstützung in Geschirrspülmaschinen
AU2003901819A0 (en) * 2003-04-16 2003-05-01 Earl Fenton Goddard A parts washer
DE202005000364U1 (de) * 2005-01-12 2005-03-17 Rippert Besitzgmbh & Co Kg Reinigungsstation für eine Anlage zur Oberflächenbehandlung von Werkstücken
TW200703482A (en) * 2005-03-31 2007-01-16 Toshiba Kk Method and apparatus for cleaning electronic device
US7784477B2 (en) * 2006-02-14 2010-08-31 Raytheon Company Automated non-contact cleaning
DE202006013351U1 (de) * 2006-08-30 2006-10-19 Ipsen International Gmbh Vorrichtung zur Reinigung von metallischen Werkstücken
JP4934079B2 (ja) * 2008-02-28 2012-05-16 信越半導体株式会社 超音波洗浄装置及び超音波洗浄方法
ATE525008T1 (de) * 2009-07-28 2011-10-15 Electrolux Home Prod Corp Sprüharmanordnung für geschirrspüler
DE102010028883A1 (de) * 2010-05-11 2011-11-17 Dürr Ecoclean GmbH Prozessbehälter
PL2389852T3 (pl) * 2010-05-25 2015-03-31 Electrolux Home Products Corp Nv Układ ramienia myjącego do zmywarki
DE102010052698A1 (de) * 2010-11-26 2012-05-31 Dürr Systems GmbH Reinigungsgerät und Reinigungsbürste für einen Zerstäuber und entsprechendes Reinigungsverfahren
DE102012200612A1 (de) * 2011-09-20 2013-03-21 Dürr Ecoclean GmbH Reinigungsanlage für Werkstücke mit automatischer Prozessparameter-Einstellung
DE102012006000B4 (de) * 2012-03-24 2024-06-20 Werner Meissner Industrielle Reinigungseinrichtung
SI2931958T1 (sl) * 2012-12-11 2020-04-30 Plasmatreat Gmbh Čistilna naprava in postopek za čiščenje predmetov z vodo
US10155252B2 (en) * 2015-04-30 2018-12-18 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor apparatus and washing method
TWI770115B (zh) * 2017-02-06 2022-07-11 新加坡商平面半導體公司 加工汙水之去除

Also Published As

Publication number Publication date
CN112384303A (zh) 2021-02-19
US20210146408A1 (en) 2021-05-20
WO2020021109A1 (fr) 2020-01-30
EP3894087A1 (fr) 2021-10-20
EP3894087B1 (fr) 2023-09-06
DE102018118067A1 (de) 2020-01-30

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