EP3842830A1 - Device for the two-dimensional scanning beam deflection of a light beam - Google Patents
Device for the two-dimensional scanning beam deflection of a light beam Download PDFInfo
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- EP3842830A1 EP3842830A1 EP20214999.3A EP20214999A EP3842830A1 EP 3842830 A1 EP3842830 A1 EP 3842830A1 EP 20214999 A EP20214999 A EP 20214999A EP 3842830 A1 EP3842830 A1 EP 3842830A1
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- Prior art keywords
- optical component
- wavelength
- deflection
- prisms
- deflected
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/108—Scanning systems having one or more prisms as scanning elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/4808—Evaluating distance, position or velocity data
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
- G01S7/4812—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
- G02B26/0883—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements the refracting element being a prism
- G02B26/0891—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements the refracting element being a prism forming an optical wedge
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/106—Scanning systems having diffraction gratings as scanning elements, e.g. holographic scanners
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/04—Prisms
Definitions
- the invention relates to a device for two-dimensional scanning beam deflection of a light beam.
- the device can in particular be used for scanning beam deflection when determining distances between both moving and still objects and for determining the topography or shape of one or more spatially extended three-dimensional objects.
- a measurement principle also known as LIDAR, in which an optical signal whose frequency changes continuously over time is emitted to the object in question and is evaluated after the object has been reflected back.
- FIG 5a shows only a schematic representation of a basic structure known per se, in which a signal 51 emitted by a spectrally tunable light source 50 with a frequency changed over time (also referred to as "chirp") is split into two partial signals, this splitting via one not shown Beam splitter (e.g. a partially transparent mirror or a fiber optic splitter) takes place.
- Beam splitter e.g. a partially transparent mirror or a fiber optic splitter
- the two partial signals are coupled via a signal coupler 57 and superimposed on one another at a detector 58, the first partial signal reaching the signal coupler 57 and the detector 58 as a reference signal 53 without reflection at the object labeled "56".
- the second partial signal arriving at the signal coupler 57 or the detector 58 runs as a measurement signal 52 via an optical circulator 54 and a scanning device 55 to the object 56, is reflected back by this and thus arrives with a time delay and correspondingly changed compared to the reference signal 53 Frequency to signal coupler 57 and detector 58.
- the detector signal supplied by the detector 58 is evaluated relative to the measuring device or the light source 50 via an evaluation device (not shown), the detected signal at a specific point in time, in the diagram of FIG Figure 5b
- the difference frequency 59 shown between the measurement signal 52 and the reference signal 53 is characteristic of the distance of the object 56 from the measurement device or the light source 50.
- the time-dependent frequency profile of the signal 51 emitted by the light source 50 can also be designed in such a way that there are two sections in which the time derivative of the Light source 50 generated frequency is opposite to each other.
- FOV field of view
- the invention is initially based on the idea that, for the implementation of a two-dimensional scanning beam deflection (for the purpose of two-dimensional scanning of an object), an optical component (such as a grating or grating prism) that acts continuously or monotonically with regard to the wavelength-dependent beam deflection is combined with another component which during the scanning process causes a (in particular periodic) back and forth movement of the respective beam in another direction (typically perpendicular to the first beam deflection), in other words thus repeatedly traversing one and the same deflection angle range.
- an optical component such as a grating or grating prism
- the invention is based in particular on the concept of realizing a two-dimensional scanning beam deflection in that, in combination with at least one light source that is spectrally tunable in terms of its wavelength, at least two optical components are used which are arranged one after the other with respect to the direction of light propagation or through which the light passes one after the other one of these components causes a wavelength-dependent beam deflection and the other of these components has at least one prism pair of prisms arranged one behind the other in the beam path so as to be rotatable.
- the invention for the implementation of a two-dimensional scanning process - in combination with a wavelength-dependent, E.g. first beam deflection caused by a grating or grating prism - the use of a pair of prisms made of prisms rotatably arranged one after the other in the beam path has the advantage, among other things, that through said pair of prisms a periodic back and forth movement of the respective beam is already carried out by a continuous counter-rotating movement the prisms can be brought about with the result that the prisms experience no acceleration (i.e. no optical elements have to be moved back and forth) and at the same time an equally robust and compact structure is achieved.
- the compactness of the device according to the invention results from the fact that the lateral dimensions (ie the dimensions perpendicular to the optical beam path or to the direction of light propagation) ultimately do not have to be significantly larger than the corresponding beam dimensions.
- a wavelength-dependent beam-deflecting first optical component e.g. grating or grating prism
- grating or grating prism e.g. grating or grating prism
- the use of a wavelength-dependent beam-deflecting first optical component in combination with the above pair of prisms according to the invention has the advantage that several light beams of different wavelengths or different tuning ranges (over the Use of several light sources and / or a frequency comb) can be processed.
- the first optical component has at least one grating.
- This grating can be a grating operated in transmission or else a grating operated in reflection.
- the first optical component has at least one grating prism. Due to the design of the (wavelength-dependent) first optical component as a highly dispersive grating prism, the tuning range of the at least one light source required for the two-dimensional scanning process can be selected to be comparatively small (e.g. 1500 nm ⁇ 100 nm).
- the prisms of the prism pair are designed as achromatic prisms. In this way, a wavelength-independent functioning of the second optical component (whose beam deflection should be based on the prism rotation and not on the wavelength tuning) can be ensured.
- the second direction is perpendicular to the first direction.
- the second optical component is arranged after the first optical component in relation to the direction of light propagation.
- the angle of incidence of the light for the first component e.g. the grating prism
- the second optical component can alternatively be arranged after or also in front of the first optical component.
- the at least one spectrally tunable light source is designed to transmit a plurality of light beams in parallel, each with a wavelength varying over time.
- the device also has at least one polarizer.
- a polarizer can be used to set the polarization state of the at least one light beam emitted by the light source in such a way that the diffraction efficiency of a grating or grating prism forming the first component is maximized.
- the invention also relates to the use of a device with the features described above in a LIDAR system for the scanning of the distance determination of an object.
- the device according to the invention has at least one spectrally tunable (i.e. variable with regard to the wavelength of the emitted light) light source for emitting at least one light beam with a wavelength that varies over time.
- at least one spectrally tunable (i.e. variable with regard to the wavelength of the emitted light) light source for emitting at least one light beam with a wavelength that varies over time.
- several light beams of different wavelengths or different tuning ranges can also be provided for the purpose of temporal parallelization of the scanning process, which in turn can take place via the use of several light sources or alternatively also with the generation of a frequency comb.
- the embodiments described below have in common that - for two-dimensional scanning beam deflection at least one light beam with a wavelength varying over time generated by a spectrally tunable light source - at least two separate optical components (each causing beam deflections in different directions) are used become.
- One of these beam deflections takes place as a function of the wavelength (for example via a grating or grating prism), the other of these beam deflections being effected via a pair of prisms rotatably arranged one behind the other in the beam path.
- a periodic variation of the deflection angle in the relevant - different from the beam deflection of the first optical component - is achieved in particular via a continuous and counter-rotating movement of the prisms, which does not require any acceleration or back and forth movement of the prisms.
- Direction causes, ultimately a continuous rotational movement of the prisms converted into a periodic scanning movement of the respective measuring beam.
- Figures 1a-1d and Figures 2a-2d show schematic illustrations to explain a first embodiment.
- Light hits a (in Fig. 1-2 not shown) spectrally tunable light source first on the first component labeled "110" and in the exemplary embodiment designed as an (immovable) grating prism and then on the second component labeled "120" and formed by the above-mentioned pair of prisms.
- Figures 1a-1d each show the arrangement in plan view (ie in the xz plane in the drawn-in coordinate system) and for different angles of rotation of the counter-rotating prisms of component 120, the position according to FIG Fig. 1a a relative angle of rotation of 0 °, the position according to Figure 1b a relative rotation angle of 90 °, the position according to Figure 1c a relative rotation angle of 180 ° and the position according to Fig. 1d one to each other corresponds to a relative angle of rotation of 270 °.
- the counter-rotating prisms of component 120 in the embodiment shown are rounded prisms.
- Figures 2a-2d show analogous representations for the side view (ie in the yz plane in the drawn coordinate system), the position according to FIG Fig. 2a an angle of rotation of 0 °, the position according to Figure 2b an angle of rotation of 90 °, the position according to Figure 2c an angle of rotation of 180 ° and the position according to Fig. 2d corresponds to a rotation angle of 270 °.
- the two-dimensional beam deflection is in operation of the device from Fig. 1-2 achieved by tuning the wavelength of the light source (which leads to the in Figures 2a-2d schematically indicated beam deflection over the first component 110 or the grating prism in the yz plane), and on the other hand a continuous counter-rotating movement of the two prisms of the second component 120 takes place (which leads to the in Figures 1a-1d schematically indicated beam deflection leads in the xz plane).
- the selected order of the optical components 110, 120 is advantageous, on the one hand, as the angle of incidence of the light for the first component 110 or the grating prism remains unchanged regardless of the angle of rotation of the prisms and, on the other hand, the lateral dimensions of the grating prism due to the placement at the light entrance can be minimized in the overall arrangement of the first and second components.
- Figures 3a-3c show the arrangement in each case in plan view (ie in the xz plane in the drawing Coordinate system) and for different angles of rotation of the counter-rotating prisms of component 320, the position according to Fig. 3a an angle of rotation of 0 °, the position according to Figure 3b an angle of rotation of 90 ° and the position according to Figure 3c corresponds to an angle of rotation of 180 °.
- the prisms of the component 320 can (without the invention being restricted to this), for example, be made of boron crown glass (such as the glass material commercially available from Schott under the name BK7®).
- the wedge angle of the pair of prisms forming the component 320 is 10 ° in the exemplary embodiment, the resulting deflection angle varying between -17 ° and + 17 °.
- the first optical component 310 or the grating prism is made of silicon (Si), the grating period being 413.2 nm (corresponding to a line density of 2420 lines / mm).
- Figures 4a-4c show analogous representations for the side view (ie in the yz plane in the drawn coordinate system), the position according to FIG Figure 4a an angle of rotation of 0 °, the position according to Figure 4b an angle of rotation of 90 ° and the position according to Figure 4c corresponds to an angle of rotation of 180 °.
- the chosen implementation of the first optical component 110 or 310 as a (highly dispersive) grating prism is particularly advantageous insofar as the tuning range of the at least one light source required for the two-dimensional scanning process is comparative can be low.
- this takes account of the fact that the usable wavelength range in the vicinity of a typical working wavelength of 1500 nm is comparatively small with regard to the transmission properties to be guaranteed, meaning that a significant variation in the deflection angle is desirable even with a slight change in wavelength.
- the dispersion of the first optical component 310 or the grating prism results in a change in the deflection angle of about 0.30 ° for a wavelength change of 1 nm at a wavelength of 1530 nm, and a change for a wavelength change of 1 nm at a wavelength of 1580 nm of the deflection angle by approx. 0.24 ° and for a wavelength change of 1 nm at a wavelength of 1625 nm a change in the deflection angle of approx. 0.21 °.
- a “highly dispersive grating prism” is understood to mean a grating prism in which the change in the deflection angle when the wavelength is detuned by 1 nm is at least 0.1 °, in particular at least 0.2 °, further in particular at least 0.3 °.
- a Arrangement of several gratings on the side of the first (ie the "wavelength-dependent working") optical component can be used.
- the two-dimensional scanning beam deflection according to the invention can be used in an exemplary advantageous application in a LIDAR system on the basis of FIG Figures 5a-5b described conventional structure (with a corresponding configuration of the scanning device 55 with the arrangement according to the invention of first optical component and second optical component) can be used.
Abstract
Die Erfindung betrifft eine Vorrichtung zur zweidimensional scannenden Strahlablenkung eines Lichtstrahls, mit wenigstens einer spektral durchstimmbaren Lichtquelle zum Aussenden eines Lichtstrahls mit zeitlich variierender Wellenlänge, einer ersten optischen Komponente (110, 310) zur Erzeugung einer ersten Strahlablenkung, über welche aus dem Lichtstrahl hervorgegangene Teilstrahlen wellenlängenabhängig jeweils in einer ersten Richtung ablenkbar sind, und einer zweiten optischen Komponente (120, 320) zur Erzeugung einer zweiten Strahlablenkung, über welche die von der ersten optischen Komponente (110, 310) abgelenkten Teilstrahlen vor oder nach dieser Ablenkung jeweils in einer von der ersten Richtung verschiedenen zweiten Richtung abgelenkt werden, wobei die zweite optische Komponente (120, 320) wenigstens ein Prismen-Paar aus im Strahlengang hintereinander drehbar angeordneten Prismen aufweist.The invention relates to a device for two-dimensionally scanning beam deflection of a light beam, with at least one spectrally tunable light source for emitting a light beam with a time-varying wavelength, a first optical component (110, 310) for generating a first beam deflection via which partial beams emerging from the light beam are wavelength-dependent are each deflectable in a first direction, and a second optical component (120, 320) for generating a second beam deflection via which the partial beams deflected by the first optical component (110, 310) before or after this deflection in one of the first Direction different second direction are deflected, wherein the second optical component (120, 320) has at least one prism pair of prisms arranged one behind the other so as to be rotatable in the beam path.
Description
Die Erfindung betrifft eine Vorrichtung zur zweidimensional scannenden Strahlablenkung eines Lichtstrahls. Die Vorrichtung kann insbesondere zur scannenden Strahlablenkung bei der Ermittlung von Abständen sowohl bewegter als auch unbewegter Objekte und zur Ermittlung der Topographie bzw. Form eines oder mehrerer räumlich ausgedehnter dreidimensionaler Objekte verwendet werden.The invention relates to a device for two-dimensional scanning beam deflection of a light beam. The device can in particular be used for scanning beam deflection when determining distances between both moving and still objects and for determining the topography or shape of one or more spatially extended three-dimensional objects.
Zur optischen Abstandsmessung von Objekten ist u.a. ein auch als LIDAR bezeichnetes Messprinzip bekannt, bei welchem ein kontinuierlich in seiner Frequenz zeitlich verändertes optisches Signal zu dem betreffenden Objekt hin ausgestrahlt und nach an dem Objekt erfolgter Rückreflexion ausgewertet wird.For optical distance measurement of objects, a measurement principle, also known as LIDAR, is known, in which an optical signal whose frequency changes continuously over time is emitted to the object in question and is evaluated after the object has been reflected back.
Über eine (nicht dargestellte) Auswerteeinrichtung wird das vom Detektor 58 gelieferte Detektorsignal relativ zur Messvorrichtung bzw. der Lichtquelle 50 ausgewertet, wobei die zu einem bestimmten Zeitpunkt erfasste, im Diagramm von
In der Praxis besteht ein Bedarf, auch bei in größeren Abständen befindlichen (ggf. auch bewegten) Objekten, bei welchen es sich z.B. um Fahrzeuge im Straßenverkehr handeln kann, eine möglichst genaue und zuverlässige Abstandsmessung zu realisieren. Dabei ist im Hinblick auf eine möglichst hohe Zuverlässigkeit und Lebensdauer der Vorrichtung zur Abstandsermittlung weiter wünschenswert, beim Abscannen des jeweiligen Objekts den Einsatz von Scan- bzw. Ablenkspiegeln zu vermeiden oder zu minimieren.In practice, there is also a need for objects that are located at greater distances (possibly also moving) which can be vehicles in road traffic, for example, to achieve the most accurate and reliable distance measurement possible. With regard to the highest possible reliability and service life of the device for determining the distance, it is further desirable to avoid or minimize the use of scanning or deflecting mirrors when scanning the respective object.
Dabei besteht je nach Anwendung der Bedarf nach Realisierung eines möglichst großen Sichtfeldes (FOV = Field of View"), welches ortsaufgelöst von dem jeweiligen Messstrahl "abzurastern" ist. So erfordert beispielsweise der Einsatz im Straßenverkehr eine zweidimensionale Ortsauflösung (senkrecht zur Messstrahlrichtung) von N * M Messpunkten bzw. Pixeln, wobei N und M jeweils vorzugsweise größer als 100 sein sollten.Depending on the application, there is a need to realize the largest possible field of view (FOV), which is spatially resolved by the respective measuring beam. For example, use in road traffic requires a two-dimensional spatial resolution (perpendicular to the direction of the measuring beam) of N * M measuring points or pixels, where N and M should preferably be greater than 100.
Die Realisierung eines zweidimensionalen Scanvorgangs mit hinreichend hoher Geschwindigkeit und hoher Auflösung etwa beim Abscannen von Objekten wie Fahrzeugen stellt jedoch in der Praxis eine anspruchsvolle Herausforderung dar. Hierbei erweist es sich beispielsweise beim Einsatz MEMSbasierter Scanspiegel als problematisch, große Spiegeldurchmesser mit einer hinreichend hohen Scangeschwindigkeit zu kombinieren, wobei die erzielbaren Ablenkwinkel auch aufgrund der verwendeten Festkörpergelenke begrenzt sind. Weitere Ansätze auf Basis mechanischer Scanspiegel oder auf Basis einer Kombination von Rotations- und Dispersionsscannern besitzen u.a. den Nachteil eines vergleichsweise komplexen Aufbaus und eines erheblichen Bauraumerfordernisses.Realizing a two-dimensional scanning process with sufficiently high speed and high resolution, for example when scanning objects such as vehicles, is a demanding challenge in practice. When using MEMS-based scanning mirrors, for example, it is problematic to combine large mirror diameters with a sufficiently high scanning speed , the achievable deflection angles are also limited due to the solid joints used. Other approaches based on mechanical scanning mirrors or based on a combination of rotation and dispersion scanners have, among other things, the disadvantage of a comparatively complex structure and considerable space requirements.
Zum Stand der Technik wird lediglich beispielhaft auf
Vor dem obigen Hintergrund ist es eine Aufgabe der vorliegenden Erfindung, eine Vorrichtung zur zweidimensional scannenden Strahlablenkung eines Lichtstrahls bereitzustellen, welche einen hinreichend schnellen zweidimensionalen Scanvorgang unter Vermeidung der vorstehend beschriebenen Probleme ermöglicht.Against the above background, it is an object of the present invention to provide a device for two-dimensionally scanning beam deflection of a light beam which enables a sufficiently fast two-dimensional scanning process while avoiding the problems described above.
Diese Aufgabe wird durch die Merkmale des unabhängigen Patentanspruchs 1 gelöst.This object is achieved by the features of independent claim 1.
Eine erfindungsgemäße Vorrichtung zur zweidimensional scannenden Strahlablenkung eines Lichtstrahls weist auf:
- wenigstens eine spektral durchstimmbare Lichtquelle zum Aussenden eines Lichtstrahls mit zeitlich variierender Wellenlänge;
- eine erste optische Komponente zur Erzeugung einer ersten Strahlablenkung, über welche aus dem Lichtstrahl hervorgegangene Teilstrahlen wellenlängenabhängig jeweils in einer ersten Richtung ablenkbar sind; und
- eine zweite optische Komponente zur Erzeugung einer zweiten Strahlablenkung, über welche die von der ersten optischen Komponente abgelenkten Teilstrahlen vor oder nach dieser Ablenkung jeweils in einer von der ersten Richtung verschiedenen zweiten Richtung abgelenkt werden;
- wobei die zweite optische Komponente wenigstens ein Prismen-Paar aus im Strahlengang hintereinander drehbar angeordneten Prismen aufweist.
- at least one spectrally tunable light source for emitting a light beam with a wavelength that varies over time;
- a first optical component for generating a first beam deflection by means of which partial beams emerging from the light beam can be deflected in a first direction depending on the wavelength; and
- a second optical component for generating a second beam deflection, via which the partial beams deflected by the first optical component are deflected in a second direction different from the first direction before or after this deflection;
- wherein the second optical component has at least one prism pair of prisms rotatably arranged one behind the other in the beam path.
Der Erfindung geht zunächst von der Überlegung aus, dass für die Realisierung einer zweidimensionalen scannenden Strahlablenkung (zwecks zweidimensionaler Abrasterung eines Objekts) eine kontinuierlich bzw. monoton hinsichtlich der wellenlängenabhängigen Strahlablenkung wirkende optische Komponente (wie z.B. ein Gitter oder Gitterprisma) mit einer weiteren Komponente kombiniert werden kann, welche während des Scanvorgangs in einer anderen (typischerweise zur ersten Strahlablenkung senkrechten) Richtung eine (insbesondere periodische) Hin- und Herbewegung des jeweiligen Strahls bewirkt, mit anderen Worten also ein- und denselben Ablenkwinkel-Bereich wiederholt durchläuft. Im Ergebnis kann so ein zweidimensionaler Scanvorgang mit hoher Geschwindigkeit erzielt werden.The invention is initially based on the idea that, for the implementation of a two-dimensional scanning beam deflection (for the purpose of two-dimensional scanning of an object), an optical component (such as a grating or grating prism) that acts continuously or monotonically with regard to the wavelength-dependent beam deflection is combined with another component which during the scanning process causes a (in particular periodic) back and forth movement of the respective beam in another direction (typically perpendicular to the first beam deflection), in other words thus repeatedly traversing one and the same deflection angle range. As a result, two-dimensional scanning can be achieved at high speed.
Der Erfindung liegt dabei insbesondere das Konzept zugrunde, eine zweidimensional scannende Strahlablenkung dadurch zu realisieren, dass in Kombination mit wenigstens einer in ihrer Wellenlänge spektral durchstimmbaren Lichtquelle wenigstens zwei bezogen auf die Lichtausbreitungsrichtung nacheinander angeordnete bzw. vom Licht nacheinander durchlaufene optische Komponenten eingesetzt werden, wobei die eine dieser Komponenten eine wellenlängenabhängige Strahlablenkung bewirkt und wobei die andere dieser Komponenten wenigstens ein Prismen-Paar aus im Strahlengang hintereinander drehbar angeordneten Prismen aufweist.The invention is based in particular on the concept of realizing a two-dimensional scanning beam deflection in that, in combination with at least one light source that is spectrally tunable in terms of its wavelength, at least two optical components are used which are arranged one after the other with respect to the direction of light propagation or through which the light passes one after the other one of these components causes a wavelength-dependent beam deflection and the other of these components has at least one prism pair of prisms arranged one behind the other in the beam path so as to be rotatable.
Der zur Realisierung eines zweidimensionalen Scanvorgangs erfindungsgemäß - in Kombination mit einer wellenlängenabhängigen, z.B. durch ein Gitter oder Gitterprisma bewirkten ersten Strahlablenkung - erfolgende Einsatz eines Prismen-Paars aus im Strahlengang nacheinander drehbar angeordneten Prismen hat dabei u.a. den Vorteil, dass durch besagtes Prismen-Paar eine periodische Hin- und Herbewegung des jeweiligen Strahls bereits durch eine kontinuierliche gegenläufige Drehbewegung der Prismen herbeigeführt werden kann mit der Folge, dass die Prismen keine Beschleunigung erfahren (also keine optischen Elemente hin- und her bewegt werden müssen) und zugleich ein gleichermaßen robuster wie kompakter Aufbau verwirklicht wird. Dabei resultiert die Kompaktheit der erfindungsgemäßen Vorrichtung aus dem Umstand, dass die lateralen Abmessungen (d.h. die Abmessungen senkrecht zum optischen Strahlengang bzw. zur Lichtausbreitungsrichtung) letztlich nicht signifikant größer als die entsprechenden Strahlabmessungen sein müssen.The invention for the implementation of a two-dimensional scanning process - in combination with a wavelength-dependent, E.g. first beam deflection caused by a grating or grating prism - the use of a pair of prisms made of prisms rotatably arranged one after the other in the beam path has the advantage, among other things, that through said pair of prisms a periodic back and forth movement of the respective beam is already carried out by a continuous counter-rotating movement the prisms can be brought about with the result that the prisms experience no acceleration (i.e. no optical elements have to be moved back and forth) and at the same time an equally robust and compact structure is achieved. The compactness of the device according to the invention results from the fact that the lateral dimensions (ie the dimensions perpendicular to the optical beam path or to the direction of light propagation) ultimately do not have to be significantly larger than the corresponding beam dimensions.
Des Weiteren hat der erfindungsgemäß in Kombination mit dem o.g. Prismen-Paar erfolgende Einsatz einer wellenlängenabhängig strahlablenkenden ersten optischen Komponente (z.B. Gitter oder Gitterprisma) den Vorteil, dass im Sinne einer zeitlichen Parallelisierung des Scanvorgangs auch mehrere Lichtstrahlen unterschiedlicher Wellenlänge bzw. unterschiedlichen Durchstimmbereichs (über den Einsatz mehrerer Lichtquellen und/oder eines Frequenzkamms) verarbeitet werden können.Furthermore, the use of a wavelength-dependent beam-deflecting first optical component (e.g. grating or grating prism) in combination with the above pair of prisms according to the invention has the advantage that several light beams of different wavelengths or different tuning ranges (over the Use of several light sources and / or a frequency comb) can be processed.
Gemäß einer Ausführungsform weist die erste optische Komponente wenigstens ein Gitter auf. Bei diesem Gitter kann es sich um ein in Transmission betriebenes oder auch um ein in Reflexion betriebenes Gitter handeln.According to one embodiment, the first optical component has at least one grating. This grating can be a grating operated in transmission or else a grating operated in reflection.
Gemäß einer Ausführungsform weist die erste optische Komponente wenigstens ein Gitterprisma auf. Aufgrund der Ausgestaltung der (wellenlängenabhängig arbeitenden) ersten optischen Komponente als hochgradig dispersives Gitterprisma kann der für den zweidimensionalen Scanvorgang benötigte Durchstimmbereich der wenigstens einen Lichtquelle vergleichsweise gering (z.B. 1500nm±100nm) gewählt werden.According to one embodiment, the first optical component has at least one grating prism. Due to the design of the (wavelength-dependent) first optical component as a highly dispersive grating prism, the tuning range of the at least one light source required for the two-dimensional scanning process can be selected to be comparatively small (e.g. 1500 nm ± 100 nm).
Gemäß einer Ausführungsform sind die Prismen des Prismen-Paars als achromatische Prismen ausgestaltet. Hierdurch kann eine wellenlängenunabhängige Funktionsweise der zweiten optischen Komponente (deren Strahlablenkung auf der Prismendrehung und nicht auf der Wellenlängendurchstimmung basieren soll) gewährleistet werden.According to one embodiment, the prisms of the prism pair are designed as achromatic prisms. In this way, a wavelength-independent functioning of the second optical component (whose beam deflection should be based on the prism rotation and not on the wavelength tuning) can be ensured.
Gemäß einer Ausführungsform ist die zweite Richtung senkrecht zur ersten Richtung.According to one embodiment, the second direction is perpendicular to the first direction.
Gemäß einer Ausführungsform ist die zweite optische Komponente bezogen auf die Lichtausbreitungsrichtung nach der ersten optische Komponente angeordnet. Dies ist insofern vorteilhaft, als die für die erste Komponente (z.B. das Gitterprisma) vorliegenden Einfallswinkel des Lichts unabhängig vom Verdrehwinkel der Prismen unverändert bleiben und ferner die lateralen Abmessungen der ersten Komponente des Gitterprismas aufgrund der Platzierung am Lichteintritt in der Gesamtanordnung aus erster und zweiter Komponente minimiert werden können. Es ist jedoch darauf hinzuweisen, dass grundsätzlich die zweite optische Komponente bezogen auf den optischen Strahlengang alternativ nach oder auch vor der ersten optischen Komponente angeordnet sein kann.According to one embodiment, the second optical component is arranged after the first optical component in relation to the direction of light propagation. This is advantageous in that the angle of incidence of the light for the first component (e.g. the grating prism) remains unchanged regardless of the angle of rotation of the prisms and also the lateral dimensions of the first component of the grating prism due to the placement at the light entrance in the overall arrangement of the first and second components can be minimized. It should be pointed out, however, that in principle the second optical component, with respect to the optical beam path, can alternatively be arranged after or also in front of the first optical component.
Gemäß einer Ausführungsform ist die wenigstens eine spektral durchstimmbare Lichtquelle zum parallelen Aussenden einer Mehrzahl von Lichtstrahlen mit jeweils zeitlich variierender Wellenlänge ausgelegt.According to one embodiment, the at least one spectrally tunable light source is designed to transmit a plurality of light beams in parallel, each with a wavelength varying over time.
Gemäß einer Ausführungsform weist die Vorrichtung ferner wenigstens einen Polarisator auf. Über einen solchen Polarisator kann der Polarisationszustand des wenigstens einen von der Lichtquelle ausgesandten Lichtstrahls derart eingestellt werden, dass die Beugungseffizienz eines die erste Komponente bildenden Gitters bzw. Gitterprismas maximiert wird.According to one embodiment, the device also has at least one polarizer. Such a polarizer can be used to set the polarization state of the at least one light beam emitted by the light source in such a way that the diffraction efficiency of a grating or grating prism forming the first component is maximized.
Die Erfindung betrifft weiter auch die Verwendung einer Vorrichtung mit den vorstehend beschriebenen Merkmalen in einem LIDAR-System zur scannenden Abstandsermittlung eines Objekts.The invention also relates to the use of a device with the features described above in a LIDAR system for the scanning of the distance determination of an object.
Die Erfindung betrifft weiter ein LIDAR-System zur scannenden Abstandsermittlung eines Objekts, mit
- wenigstens einer spektral durchstimmbaren Lichtquelle zum Aussenden eines Lichtstrahls mit zeitlich variierender Wellenlänge;
- einer Auswerteeinrichtung zur Ermittlung eines Abstandes des Objekts auf Basis von aus dem Lichtstrahl jeweils hervorgegangenen, an dem Objekt reflektierten Messsignalen und nicht an dem Objekt reflektierten Referenzsignalen; und
- einer Scan-Einrichtung, welche eine wellenlängenabhängige Winkelverteilung der zu dem Objekt gelenkten Messsignale bewirkt;
- wobei diese Scan-Einrichtung eine erste optische Komponente zur Erzeugung einer ersten Strahlablenkung, über welche aus dem Lichtstrahl hervorgegangene Teilstrahlen wellenlängenabhängig jeweils in einer ersten Richtung ablenkbar sind, und eine zweite optische Komponente zur Erzeugung einer zweiten Strahlablenkung, über welche die von der ersten optischen Komponente abgelenkten Teilstrahlen vor oder nach dieser Ablenkung wellenlängenabhängig jeweils in einer von der ersten Richtung verschiedenen zweiten Richtung abgelenkt werden, aufweist, wobei die zweite optische Komponente wenigstens ein Prismen-Paar aus im Strahlengang hintereinander drehbar angeordneten Prismen aufweist.
- at least one spectrally tunable light source for emitting a light beam with a wavelength that varies over time;
- an evaluation device for determining a distance of the object on the basis of measurement signals which have respectively emerged from the light beam and which are reflected on the object and reference signals which are not reflected on the object; and
- a scanning device which effects a wavelength-dependent angular distribution of the measurement signals directed to the object;
- this scanning device having a first optical component for generating a first beam deflection, via which partial beams emerging from the light beam can be deflected in a first direction depending on the wavelength, and a second optical component for generating a second beam deflection via which the beam deflection from the first optical component deflected partial beams before or after this deflection are each deflected in a wavelength-dependent manner in a second direction different from the first direction, the second optical component having at least one prism pair of prisms rotatably arranged one behind the other in the beam path.
Weitere Ausgestaltungen der Erfindung sind der Beschreibung sowie den Unteransprüchen zu entnehmen.Further refinements of the invention can be found in the description and in the subclaims.
Die Erfindung wird nachstehend anhand von in den beigefügten Abbildungen dargestellten Ausführungsbeispielen näher erläutert.The invention is explained in more detail below with reference to the exemplary embodiments shown in the accompanying figures.
Es zeigen:
- Figuren 1-4
- schematische Darstellungen zur Erläuterung unterschiedlicher Ausführungsformen der Erfindung; und
- Figuren 5a-5b
- schematische Darstellungen zur Erläuterung von Aufbau und Wirkungsweise einer Vorrichtung zur Abstandsermittlung.
- Figures 1-4
- schematic representations to explain different embodiments of the invention; and
- Figures 5a-5b
- schematic representations to explain the structure and mode of operation of a device for determining distance.
Im Weiteren werden anhand unterschiedlicher Ausführungsformen der prinzipiell mögliche Aufbau sowie die Funktionsweise einer erfindungsgemäßen Vorrichtung zur zweidimensional scannenden Strahlablenkung unter Bezugnahme auf die schematischen Abbildungen von
Die erfindungsgemäße Vorrichtung weist wenigstens eine spektral durchstimmbare (d.h. hinsichtlich der Wellenlänge des ausgesandten Lichts variierbare) Lichtquelle zum Aussenden wenigstens eines Lichtstrahls mit zeitlich variierender Wellenlänge auf. In weiteren Ausführungsformen können auch zwecks zeitlicher Parallelisierung des Scanvorgangs mehrere Lichtstrahlen unterschiedlicher Wellenlänge bzw. unterschiedlichen Durchstimmbereichs bereitgestellt werden, was wiederum über den Einsatz mehrerer Lichtquellen oder alternativ auch unter Erzeugung eines Frequenzkamms erfolgen kann.The device according to the invention has at least one spectrally tunable (i.e. variable with regard to the wavelength of the emitted light) light source for emitting at least one light beam with a wavelength that varies over time. In further embodiments, several light beams of different wavelengths or different tuning ranges can also be provided for the purpose of temporal parallelization of the scanning process, which in turn can take place via the use of several light sources or alternatively also with the generation of a frequency comb.
Den im Weiteren beschriebenen Ausführungsformen ist gemeinsam, dass - zur zweidimensional scannenden Strahlablenkung wenigstens eines von jeweils einer spektral durchstimmbaren Lichtquelle erzeugten Lichtstrahls mit zeitlich variierender Wellenlänge - wenigstens zwei separate (und jeweils Strahlablenkungen in voneinander verschiedener Richtung bewirkende) optische Komponenten eingesetzt werden. Dabei erfolgt die eine dieser Strahlablenkungen wellenlängenabhängig (z.B. über ein Gitter oder Gitter-Prisma), wobei die andere dieser Strahlablenkungen über ein Prismen-Paar aus im Strahlengang hintereinander drehbar angeordneten Prismen bewirkt wird. Dabei wird in dem zuletzt genannten Prismen-Paar insbesondere über eine kontinuierliche und gegenläufige Drehbewegung der Prismen, welche keine Beschleunigung bzw. Hin- und Herbewegung der Prismen erfordert, eine periodische Variation des Ablenkwinkels in der betreffenden - von der Strahlablenkung der ersten optischen Komponente verschiedenen - Richtung bewirkt, letztlich also eine kontinuierliche Drehbewegung der Prismen in eine periodische Scanbewegung des jeweiligen Messstrahls umgewandelt.The embodiments described below have in common that - for two-dimensional scanning beam deflection at least one light beam with a wavelength varying over time generated by a spectrally tunable light source - at least two separate optical components (each causing beam deflections in different directions) are used become. One of these beam deflections takes place as a function of the wavelength (for example via a grating or grating prism), the other of these beam deflections being effected via a pair of prisms rotatably arranged one behind the other in the beam path. In the last-mentioned pair of prisms, a periodic variation of the deflection angle in the relevant - different from the beam deflection of the first optical component - is achieved in particular via a continuous and counter-rotating movement of the prisms, which does not require any acceleration or back and forth movement of the prisms. Direction causes, ultimately a continuous rotational movement of the prisms converted into a periodic scanning movement of the respective measuring beam.
Die Darstellungen von
Die zweidimensionale Strahlablenkung wird im Betrieb der Vorrichtung von
Wesentlich für das Funktionsprinzip ist hierbei, dass hinsichtlich der gemäß
Umgekehrt erscheint für die gemäß
Die in der Ausführungsform von
Die Erfindung ist jedoch nicht auf die vorstehend beschriebene Reihenfolge beschränkt. Hierzu zeigen
Die Darstellungen von
Die Prismen der Komponente 320 können (ohne dass die Erfindung hierauf beschränkt wäre) z.B. aus Bor-Kronglas (wie z.B. dem unter der Bezeichnung BK7® kommerziell erhältlichen Glasmaterial der Firma Schott) gefertigt sein. Der Keilwinkel des die Komponente 320 bildenden Prismenpaars beträgt im Ausführungsbeispiel 10°, wobei der resultierende Ablenkwinkel zwischen -17° und +17° variiert. Des Weiteren ist im Ausführungsbeispiel (jedoch ohne dass die Erfindung hierauf beschränkt wäre) die erste optische Komponente 310 bzw. das Gitterprisma aus Silizium (Si) gefertigt, wobei die Gitterperiode 413.2 nm (entsprechend einer Liniendichte von 2420 Linien/mm) beträgt.The prisms of the
Die in den vorstehend beschriebenen Ausführungsformen von
Zum anderen kann bei entsprechender Minimierung des Durchstimmbereichs der Lichtquelle infolge Verwendung eines hochgradig dispersiven Gitterprismas der gegebenenfalls unerwünschte Effekt einer Wellenlängenabhängigkeit der Strahlablenkung auf Seiten der zweiten Komponente 120 bzw. 320 bzw. des Prismen-Paars, die prinzipiell zu einem trapezförmigen Bildfeld führen würde, gering gehalten werden. Dabei wird hier unter einem "hochgradig dispersiven Gitterprisma" ein Gitterprisma verstanden, bei welchem die Änderung des Ablenkwinkels bei Verstimmung der Wellenlänge um 1nm wenigstens 0.1°, insbesondere wenigstens 0.2°, weiter insbesondere wenigstens 0.3°, beträgt.On the other hand, with a corresponding minimization of the tuning range of the light source due to the use of a highly dispersive grating prism, the possibly undesirable effect of a wavelength dependency of the beam deflection on the side of the
In weiteren Ausführungsformen kann anstelle eines einzigen Gitters zur Erhöhung der Winkelablenkung bzw. Vergrößerung des realisierbaren Winkelbereichs der Winkelablenkung eine Anordnung von mehreren Gittern auf Seiten der ersten (d.h. der "wellenlängenabhängig arbeitenden") optischen Komponente verwendet werden.In further embodiments, instead of a single grid for increasing the angular deflection or enlarging the realizable angular range of the angular deflection, a Arrangement of several gratings on the side of the first (ie the "wavelength-dependent working") optical component can be used.
Die erfindungsgemäße zweidimensional scannende Strahlablenkung kann in einer beispielhaften vorteilhaften Anwendung in einem LIDAR-System ausgehend von dem anhand von
Die Erfindung ist jedoch nicht auf diese Anwendung beschränkt, sondern ganz allgemein in Anwendungen vorteilhaft realisierbar, in welchen eine schnelle zweidimensionale Strahlablenkung gewünscht ist.However, the invention is not restricted to this application, but rather can be advantageously implemented quite generally in applications in which rapid two-dimensional beam deflection is desired.
Wenn die Erfindung auch anhand spezieller Ausführungsformen beschrieben wurde, erschließen sich für den Fachmann zahlreiche Variationen und alternative Ausführungsformen, z.B. durch Kombination und/oder Austausch von Merkmalen einzelner Ausführungsformen. Dementsprechend versteht es sich für den Fachmann, dass derartige Variationen und alternative Ausführungsformen von der vorliegenden Erfindung mit umfasst sind und die Reichweite der Erfindung nur im Sinne der beigefügten Patentansprüche und deren Äquivalente beschränkt ist.Even if the invention has been described on the basis of specific embodiments, numerous variations and alternative embodiments will be apparent to the person skilled in the art, for example by combining and / or exchanging features of individual embodiments. Accordingly, it is understood by a person skilled in the art that such variations and alternative embodiments are also included in the present invention and that the scope of the invention is limited only within the meaning of the attached patent claims and their equivalents.
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US20110285981A1 (en) | 2010-05-18 | 2011-11-24 | Irvine Sensors Corporation | Sensor Element and System Comprising Wide Field-of-View 3-D Imaging LIDAR |
US20180341003A1 (en) | 2017-05-24 | 2018-11-29 | Honeywell International Inc. | Risley prism based star tracker and celestial navigation systems |
DE102018203316A1 (en) * | 2018-03-06 | 2019-09-12 | Carl Zeiss Smt Gmbh | Device for scanning distance determination of an object |
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