EP3784980A1 - Procédé et dispositif de contrôle de propriétés géométriques de composants optiques - Google Patents

Procédé et dispositif de contrôle de propriétés géométriques de composants optiques

Info

Publication number
EP3784980A1
EP3784980A1 EP19734666.1A EP19734666A EP3784980A1 EP 3784980 A1 EP3784980 A1 EP 3784980A1 EP 19734666 A EP19734666 A EP 19734666A EP 3784980 A1 EP3784980 A1 EP 3784980A1
Authority
EP
European Patent Office
Prior art keywords
optical
functional
functional surface
oct
determined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP19734666.1A
Other languages
German (de)
English (en)
Inventor
Reik Krappig
Max Riediger
Niels König
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP3784980A1 publication Critical patent/EP3784980A1/fr
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods

Definitions

  • the invention relates to a method and a device for testing geometric properties of optical components according to the preamble of claim 1 or according to the preamble of claim 11.
  • Optical systems are part of many devices and can contribute significantly to safety, health and safety
  • Comfort in daily life as well as in technical applications contribute.
  • Examples include the mobile phone camera, optical couplers for communication, endoscopes in medical technology and sensor systems in vehicles, e.g. Passenger cars.
  • the optical function of such systems can only be ensured if the properties of the individual components meet the specifications.
  • the optical properties of a component are essentially determined by the geometry and nature of the associated functional surfaces and by the refractive index also by the material used.
  • innovative optical components are characterized above all by improvements in the material properties or or and by novel geometries. Both options are off
  • edge steepness describes the inclination of the surface compared to a plane perpendicular to the optical axis.
  • Tactile measuring systems for shape testing are known from the prior art, but their application is subject to restrictions in the interaction between probe and surface to be tested.
  • the desired geometry information is detected by the relative movement of a stylus tip pulled over the component surface. In steep areas, it may happen that the probe touches the specimen surface not only with the decisive for the measurement front end but with its edge and thus the measurement is falsified. Although this error can often be detected directly in the measurement result, it limits the usability of tactile methods for shape testing to edge steepnesses of approx. ⁇ 25 °.
  • Stylus instruments integrated or is used in systems that deliver optical sensors or lenses highly accurate and thus can capture even very steep geometries.
  • Chromatic confocal point sensors use chromatic aberration, ie the dependence of the focal length on the wavelength of the radiation
  • the deviation of the specimen surface is examined to a reference wavefront, which was previously generated with a correspondingly highly accurate lens (for example, DE 10 2017 217 372 A1). If these lenses are spherical, they can be used to test all spherical objects as well as those aspheres that deviate only slightly from the spherical shape, depending on the diameter of the specimen. For strongly aspherical specimens or free-form surfaces, the individual reference wavefront must be determined by means of a computer-generated
  • Confocal microscopy (e.g., EP 0 646 768 A2) utilizes a specially designed beam path in which only the radiation which is at the exact focal point of the objective used is returned to the sensor. If the vertical position of the objective is precisely adjusted by means of piezo actuators, the flea information of the relevant specimen surface can be detected.
  • Confocal microscopy allows a combined shape and roughness measurement
  • Production process and may be e.g. on the parallelism of the
  • Autocollimation telescope in the case of spherical surfaces
  • additional sensors for detecting the impact for aspherical surfaces
  • the orientation can not be detected at all. It is always an iterative process in which the individual functional areas are recorded successively.
  • the detection of such errors can be done both by checking the geometry and by checking the function.
  • the deviation of the center of curvature in the geometry test for example, via an autocollimator
  • wavefront sensors are frequently used, which use a microlens array to image the local slopes of the wavefront and thus the light-shaping properties of the optical system on a CCD camera (eg DE 103 48 509 A1).
  • the thus reconstructed wavefront can serve to provide more detailed information about the system properties.
  • the measured wavefront can be decomposed into its orthogonal polynomials, the so-called Zernike coefficients. With a manageable number of such coefficients The measured wavefront can be simulated in a good approximation.
  • the coma term of the wavefront correlates directly with the
  • Optical Coherence Tomography is a well-known variant of white-light interferometry that employs short-coherent light.
  • the short coherence length of the light is required for high axial resolution.
  • TD-OCT Time Domain OCT
  • FD-OCT Frequency Domain OCT
  • SD-OCT Spectrum Domain Optical Coherence Tomography
  • SD-OCT Spept Source Optical Coherence
  • Tomography are used, in which the radiation source is tunable.
  • the detector then uses a balanced photodetector (balanced photodetector).
  • the signal received is a
  • OCT has hitherto been used essentially in the medical field, e.g. for measuring soft tissue volume or in the field of ophthalmic diagnosis and treatment.
  • OCT distinguishes between A-Scan, B-Scan, and C-Scan.
  • an A-scan is understood to mean a measurement in the depth, in which no scanning movements of the measuring beam in lateral
  • a C-scan is a sequence of several adjacent B-scans to produce a volume scan of the object under investigation or a portion of the object.
  • a device for calibrating or evaluating the performance of a refraction platform which has a model eye and at least one reference element.
  • the model eye is formed by a front cap and a hemisphere covered by the cap, which cap is nearly transparent to light used when using the device.
  • the cap can e.g. be realized by a film, a vapor-deposited layer, injection molding or a contact lens.
  • the hemisphere is spaced from the cylindrical body by the variable thickness of a slot.
  • the slot may be used to insert further elements, e.g. an iris model, serve.
  • the cap, hemisphere and body are each made of different materials with different refractive indices.
  • the outer surface of the cap and the interface between the cap and hemisphere reflect incident light which enables measurement of the material thickness of the cap, e.g. by OCT measurement.
  • the thickness can be measured during a shape changing process or before and after. It is not revealed by means of OCT in addition to the
  • Thickness measurement also to obtain information about the shape and orientation of the interfaces involved.
  • From DE 103 92 656 B4 is an interferometer system for determining a
  • Interferometer is moved with a three-axis structure over the workpiece, wherein the reflected upon impact of a focal point of the workpiece surface radiation is evaluated.
  • the direction of movement of the measuring head relative to the workpiece is in various
  • Embodiments of the use of a plurality of spaced focal points of radiation of different frequencies proposed.
  • the document refers to the time domain (time domain) method used as optical coherence tomography. It is only the information about a
  • the measurement method does not provide volume information about the measured object, which obviously is not
  • EP 1 744 119 A1 discloses a method for analyzing the shape, dimension or topography of an object, the FD-OCT being used, using a tunable radiation source (SS-OCT).
  • SS-OCT tunable radiation source
  • Embodiment illustrates the application of the tomography method for measuring surfaces in the interior of a depression. It is also disclosed that with this method it should be possible to examine several partially reflecting surfaces of a partially transparent object, without the relevant ones
  • Measuring system with a scanner unit known which is a SS-OCT system (Swept Source OCT), wherein the dimming time dA / dt of the light source to the desired maximum measurement depth and the frequency of the axial modulation of the scanner unit is adjusted. This is intended to compensate or at least minimize the influence of occurring axial modulations of the scanner device.
  • the measuring system is used to determine distances and to depict eye structures
  • the present invention is based on the technical problem of providing a method and a device for testing optical elements, which represent an alternative to the prior art and in particular the
  • optical coherence tomography be used to test geometric properties of plastic or glass optical elements, whereby a volume scan (C-scan) of the optical element to be tested is recorded.
  • OCT optical coherence tomography
  • Sensitivity of the OCT a small part of the specimen of backscattered light is sufficient to obtain a usable measurement signal.
  • specimens with a high edge steepness can be measured in particular, which can be realized only with great effort with the above-described alternative methods according to the prior art.
  • the process is fast and can characterize several functional surfaces with only one measurement within a few seconds.
  • a high-precision alignment of the test object with respect to the measuring system is eliminated.
  • Another advantage of the method is the relatively low technical complexity for realizing an OCT system. The measurement takes place in backscatter, so that the integration can be done comparatively space-saving, which is especially for
  • the method and the device according to the invention can e.g. advantageous for optical testing in the field of optical or micro-optical
  • Components e.g. Aspheres or free-form lenses, are used, in particular for attachment optics, e.g. with LED lighting optics.
  • attachment optics e.g. with LED lighting optics.
  • the method according to the invention and the device according to the invention can be easily incorporated into existing production processes, for example by integration in injection molding machines.
  • the method according to the invention can be carried out such that the shape of at least two functional surfaces of at least one optical element is tested. With the detection of the shape of multiple functional surfaces in only one measurement, the orientation of the at least two functional surfaces relative to one another is automatically determined.
  • the functional surfaces When testing at least two functional surfaces they may belong to the same optical element, preferably an optical lens.
  • the functional surfaces to be tested can also belong to different optical elements.
  • Functional surfaces may be the image of the rear functional surface due to the
  • Functional area are distorted.
  • this may preferably be taken into account by means of a software-based algorithm.
  • a full surface fit may be made to each of the front and back functional surfaces, i. to the complete or substantially complete functional area, e.g. adapted by using a mathematical model such as the aspheric equation or using Zernike polynomials, an area. Subsequently, the determination of inclination values or normal vectors on a variable number of support points can be carried out in order to be able to correct the distortion of the rear functional surface in accordance with the above-mentioned ray-tracing method.
  • the measured data of the functional surfaces determined in the manner described may be e.g. directly compared with the data of an object model, e.g.
  • test parameters are determined.
  • such test parameters may e.g. the center thickness, radii of curvature, aspheric coefficients, wedge angle or decentering.
  • the method according to the invention can be carried out so that the OCT is carried out in the frequency domain, i. FD-OCT (Frequency Domain Optical Coherence Tomography) is used.
  • FD-OCT Frequency Domain Optical Coherence Tomography
  • the measurement can be performed faster compared to a TD-OCT.
  • FD-OCT e.g. the SS-OCT or the SD-OCT are used.
  • FIG. 2 a representation for clarification of a triangulation method for
  • FIG. 4 shows an illustration for explaining the correction of the determined course of a second functional area.
  • Fig. 1 shows a possible measuring device with an SD-OCT.
  • two functional surfaces 2 and 3 of an optical element, namely a lens 1 are to be determined by means of a C-scan with respect to their shape and orientation.
  • the radiation for generating a measuring beam 4 comes from a
  • broadband radiation source 5 for short coherent radiation e.g. one
  • Superluminescent diode and is distributed via optical fiber 6 and a fiber coupler 7 in the measuring device.
  • the radiation passes as a reference path radiation 8 a reference path 9 with a reference mirror 10 and as a measuring beam 4 an object path 11 with scanner mirrors 12 and a scanner lens 13.
  • the scanner mirror 12 By means of the scanner mirror 12, the measuring beam 4 for performing a scanning movement in two lateral directions be guided over the lens 1.
  • the backscattered from the functional surfaces 2 and 3 radiation of the measuring beam 4 is combined in the fiber coupler 7 with the reference path radiation 8, so that it comes in a spectrometer 14 for interference.
  • the radiation is spectrally decomposed at an optical grating 15 and directed to a line scan camera 16.
  • the measuring device described and the beam guidance are generally known from the prior art for SD-OCT method.
  • alternative OCT methods can also be used.
  • the measuring beam 4 of the SD-OCT structure is directed onto the lens 1 to be examined in such a way that the two functional surfaces of the lens 1, hereinafter referred to as first functional surface 2 and second functional surface 3, are arranged one behind the other in the direction of radiation
  • Function surface 1 is designated the one on which the measuring beam 4 impinges first.
  • a C-scan is performed.
  • the resulting tomographic image can be used to contrast enhancement and noise filtering in general for others
  • the axial position of the local maxima can be determined with subpixel accuracy, e.g. about a Gauss fit.
  • Intensity maxima can be determined for both functional surfaces 2 and 3 forms, which can be stored and further processed, for example, as a point cloud.
  • the point cloud of the second functional surface 3 must be corrected, since the radiation component scattered back by the second functional surface 3 is refracted at the first functional surface 2.
  • ray tracing is used. For this, first the
  • Measuring beam 4 can be determined. This can be done for example by triangulation or local surface adaptation.
  • triangulation which is shown in Fig. 2 is a schematic for a small number of impact points P 0 to P 8 in the first functional surface 2, the point cloud triangles are clamped between the identified points Pi to P 8.
  • Normal vectors D 0 to D 7 of the triangles arranged around the mean point of impingement P 0 are calculated, and then, by means of interpolation, the normal vector N 0 at the central one
  • Impact point P 0 to determine The interpolation can take place via a weighted averaging of the surrounding normal vectors D 0 to D 7 .
  • the interpolation can take place via a weighted averaging of the surrounding normal vectors D 0 to D 7 .
  • Various approaches in connection with the curvature estimation of triangulated point clouds known see, for example, Günter Grosche, Viktor Ziegler,
  • Impact points P n of the point cloud determines the normal vectors N n . This results in curvatures and thus a surface course for the first functional surface 2.
  • an adaptation of mathematical surfaces to the point cloud can be carried out in the local environment of the impact points in order subsequently to determine the normal vector at the point of impact from the adapted surface.
  • Fig. 4 illustrates how the n thus determined for each impact point P vector T n and the optical path length l n between the point of incidence P n of the measuring beam 4 on the first functional surface 2 and the apparent impact point Q n at the second Functional surface 3 using the following calculation, the actual, that is undistorted geometric position Q ' n of the point of impact of the measuring beam 4 on the second functional surface 3 can be determined.
  • Reflection law is therefore not made, since measuring principle, only the light rays contribute to the OCT signal, which penetrate in the same way in the scanner lens 13 of the OCT system on which they have leaked.
  • the points Q ' n can be directly compared with target data or it is adapted to the points Q' n a suitable model (eg Asphere equation or Zernike polynomials) from which then characteristic characteristics of the lens surface can be derived (For example, radius of curvature, aspheric coefficients, possibly form error).
  • suitable model eg Asphere equation or Zernike polynomials

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un procédé et un dispositif de contrôle de propriétés géométriques d'éléments optiques en plastique ou en verre par interférométrie, selon lesquels la tomographie en cohérence optique est mise en œuvre et une analyse de volume de l'élément optique à contrôler est effectuée. Selon un mode de réalisation préféré, pour la détermination de la forme d'une deuxième surface fonctionnelle (3) agencée derrière une première surface fonctionnelle (2) dans la direction d'incidence du rayon de mesure (4), la diffraction du rayonnement sur la première surface fonctionnelle (2) est prise en compte, les vecteurs normaux (Nn) ou les courbures locales de la première surface fonctionnelle (2) étant déterminés en des points d'incidence (Pn) du rayon de mesure (4) sur la première surface fonctionnelle (2).
EP19734666.1A 2018-04-23 2019-04-16 Procédé et dispositif de contrôle de propriétés géométriques de composants optiques Pending EP3784980A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018109649.6A DE102018109649A1 (de) 2018-04-23 2018-04-23 Verfahren sowie Vorrichtung zur Prüfung geometrischer Eigenschaften optischer Komponenten
PCT/DE2019/100350 WO2019206371A1 (fr) 2018-04-23 2019-04-16 Procédé et dispositif de contrôle de propriétés géométriques de composants optiques

Publications (1)

Publication Number Publication Date
EP3784980A1 true EP3784980A1 (fr) 2021-03-03

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Application Number Title Priority Date Filing Date
EP19734666.1A Pending EP3784980A1 (fr) 2018-04-23 2019-04-16 Procédé et dispositif de contrôle de propriétés géométriques de composants optiques

Country Status (3)

Country Link
EP (1) EP3784980A1 (fr)
DE (1) DE102018109649A1 (fr)
WO (1) WO2019206371A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3896386A1 (fr) * 2020-04-16 2021-10-20 Taylor Hobson Limited Dispositif de mesure interférométrique
WO2022023979A1 (fr) * 2020-07-30 2022-02-03 Alcon Inc. Procédé de détermination de paramètres géométriques d'une lentille de contact souple

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Publication number Priority date Publication date Assignee Title
KR950009292A (ko) 1993-09-29 1995-04-21 유모토 다이죠 공초점형 광학현미경 및 이 현미경을 사용한 측정장치
DE10260256B9 (de) 2002-12-20 2007-03-01 Carl Zeiss Interferometersystem und Meß-/Bearbeitungswerkzeug
DE10348509A1 (de) 2003-10-18 2005-05-19 Carl Zeiss Jena Gmbh Wellenfrontsensor
DE102005013903A1 (de) * 2004-04-05 2005-12-08 Carl Zeiss Smt Ag Verfahren zum Vermessen und Herstellen eines optischen Elements und optischer Apparat
EP1744119A1 (fr) 2005-07-15 2007-01-17 Proximion Fiber Systems AB Tomographie par cohérence optique avec une source à balayage
DE102006052047A1 (de) 2006-11-04 2008-05-08 Trioptics Gmbh Verfahren und Vorrichtung zur Bestimmung der Lage einer Symmetrieachse einer asphärischen Linsenfläche
DE102009006306A1 (de) 2009-01-27 2010-07-29 Bausch & Lomb Inc. Kalibriervorrichtung, Verfahren zum Kalibrieren oder Bewerten der Leistung eines optischen Meßsystems oder Behandlungslasersystems und Verfahren zur Herstellung einer Kalibriervorrichtung
EP2427723B1 (fr) * 2009-05-04 2018-12-19 Duke University Procédés et produits-programmes informatiques pour correction quantitative d'image tridimensionnelle et calcul de paramètres cliniques pour la tomographie à cohérence optique
DE102010032138A1 (de) 2010-07-24 2012-01-26 Carl Zeiss Meditec Ag OCT-basiertes, ophthalmologisches Messsytem
US9019485B2 (en) * 2013-03-11 2015-04-28 Lumetrics, Inc. Apparatus and method for evaluation of optical elements
DE102016106535B4 (de) * 2016-04-08 2019-03-07 Carl Zeiss Ag Vorrichtung und Verfahren zum Vermessen einer Flächentopografie
CN109416297B (zh) * 2016-07-20 2020-12-29 爱尔康公司 用于使用光学相干断层扫描来检查眼科镜片的方法
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EP3532818B1 (fr) * 2016-10-31 2020-07-15 Alcon Inc. Procédé et système d'inspection de lentilles de contact
DE102017217372A1 (de) 2017-09-29 2017-11-23 Carl Zeiss Smt Gmbh Verfahren und Vorrichtung zur Charakterisierung der Oberflächenform eines optischen Elements

Also Published As

Publication number Publication date
WO2019206371A1 (fr) 2019-10-31
DE102018109649A1 (de) 2019-10-24

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