EP3732493C0 - Magnetfeldsensor mit kompensation der platzierung von magnetfeldsensorelementen - Google Patents

Magnetfeldsensor mit kompensation der platzierung von magnetfeldsensorelementen

Info

Publication number
EP3732493C0
EP3732493C0 EP18836332.9A EP18836332A EP3732493C0 EP 3732493 C0 EP3732493 C0 EP 3732493C0 EP 18836332 A EP18836332 A EP 18836332A EP 3732493 C0 EP3732493 C0 EP 3732493C0
Authority
EP
European Patent Office
Prior art keywords
magnetic field
field sensor
compensation
placement
sensor elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP18836332.9A
Other languages
English (en)
French (fr)
Other versions
EP3732493B1 (de
EP3732493A1 (de
Inventor
Andrea Foletto
Rémy Lassalle-Balier
Yannick Vuillermet
Paul A David
Jeffrey Eagen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Allegro Microsystems LLC
Original Assignee
Allegro Microsystems LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Allegro Microsystems LLC filed Critical Allegro Microsystems LLC
Publication of EP3732493A1 publication Critical patent/EP3732493A1/de
Application granted granted Critical
Publication of EP3732493C0 publication Critical patent/EP3732493C0/de
Publication of EP3732493B1 publication Critical patent/EP3732493B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
    • G01D5/165—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance by relative movement of a point of contact or actuation and a resistive track
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/025—Compensating stray fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
EP18836332.9A 2018-01-30 2018-12-21 Magnetfeldsensor mit kompensation der platzierung von magnetfeldsensorelementen Active EP3732493B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/883,721 US10809094B2 (en) 2018-01-30 2018-01-30 Magnetic field sensor having compensation for magnetic field sensing element placement
PCT/US2018/067027 WO2019152113A1 (en) 2018-01-30 2018-12-21 Magnetic field sensor having compensation for magnetic field sensing element placement

Publications (3)

Publication Number Publication Date
EP3732493A1 EP3732493A1 (de) 2020-11-04
EP3732493C0 true EP3732493C0 (de) 2025-07-02
EP3732493B1 EP3732493B1 (de) 2025-07-02

Family

ID=65031780

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18836332.9A Active EP3732493B1 (de) 2018-01-30 2018-12-21 Magnetfeldsensor mit kompensation der platzierung von magnetfeldsensorelementen

Country Status (4)

Country Link
US (1) US10809094B2 (de)
EP (1) EP3732493B1 (de)
KR (1) KR102673252B1 (de)
WO (1) WO2019152113A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11255700B2 (en) 2018-08-06 2022-02-22 Allegro Microsystems, Llc Magnetic field sensor
US11169221B2 (en) 2020-02-26 2021-11-09 Allegro Microsystems, Llc Target alignment and stray field indicator
US11561112B2 (en) * 2020-03-13 2023-01-24 Allegro Microsystems, Llc Current sensor having stray field immunity
US11782103B2 (en) 2020-06-12 2023-10-10 Allegro Microsystems, Llc Dual double-pinned spin valve element having magnet bias with increased linear range
DE102020126871A1 (de) * 2020-10-13 2022-04-14 Infineon Technologies Ag Ein Sensorsystem, ein System und ein Verfahren zum Bestimmen einer Position oder eines Drehwinkels
US11630168B2 (en) 2021-02-03 2023-04-18 Allegro Microsystems, Llc Linear sensor with dual spin valve element having reference layers with magnetization directions different from an external magnetic field direction
US12270869B2 (en) 2022-01-21 2025-04-08 Allegro Microsystems, Llc Magnet structure for back-biased sensors
US12181538B2 (en) 2022-11-29 2024-12-31 Allegro Microsystems, Llc Magnetoresistance bridge circuits with stray field immunity
US12467990B2 (en) 2023-08-30 2025-11-11 Allegro Microsystems, Llc Magnetoresistance signal path compensation
US12546836B2 (en) 2024-03-15 2026-02-10 Allegro Microsystems, Llc TMR vortex layout for back bias sensors

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10221114A (ja) 1997-02-10 1998-08-21 Mitsubishi Electric Corp 検出装置
DE10158053A1 (de) 2001-11-27 2003-06-05 Philips Intellectual Property Sensoranordnung
US7112957B2 (en) * 2004-06-16 2006-09-26 Honeywell International Inc. GMR sensor with flux concentrators
US10338158B2 (en) 2007-05-30 2019-07-02 Infineon Technologies Ag Bias magnetic field sensor
DE102007025965A1 (de) * 2007-06-04 2008-12-11 Robert Bosch Gmbh Magnetfeldsensor
DE102007032867B4 (de) * 2007-07-13 2009-12-24 Infineon Technologies Ag Magnetoresistive Magnetfeldsensorstrukturen und Herstellungsverfahren
WO2011068146A1 (ja) * 2009-12-02 2011-06-09 アルプス電気株式会社 磁気センサ
US9810519B2 (en) 2013-07-19 2017-11-07 Allegro Microsystems, Llc Arrangements for magnetic field sensors that act as tooth detectors
CN103995240B (zh) * 2014-05-30 2017-11-10 江苏多维科技有限公司 一种磁电阻z轴梯度传感器芯片
US9719806B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a ferromagnetic target object
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US10545196B2 (en) * 2016-03-24 2020-01-28 Nxp Usa, Inc. Multiple axis magnetic sensor
US9880026B1 (en) 2016-07-14 2018-01-30 Allegro Microsystems, Llc Magnetic field sensor for detecting motion of an object
US9933448B1 (en) 2017-01-11 2018-04-03 Infineon Technologies Ag Stray-field robust, twist-insensitive magnetic speed sensors
US11022661B2 (en) * 2017-05-19 2021-06-01 Allegro Microsystems, Llc Magnetoresistance element with increased operational range
US20180364066A1 (en) * 2017-06-15 2018-12-20 Infineon Technologies Ag Linear position magnetic field sensor with differential sensing and a differential magnetic field sensing method

Also Published As

Publication number Publication date
WO2019152113A1 (en) 2019-08-08
KR20200115613A (ko) 2020-10-07
EP3732493B1 (de) 2025-07-02
US10809094B2 (en) 2020-10-20
EP3732493A1 (de) 2020-11-04
US20190234763A1 (en) 2019-08-01
KR102673252B1 (ko) 2024-06-07

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