EP3658888A1 - Capteur de particules et son procédé de fabrication - Google Patents

Capteur de particules et son procédé de fabrication

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Publication number
EP3658888A1
EP3658888A1 EP18740560.0A EP18740560A EP3658888A1 EP 3658888 A1 EP3658888 A1 EP 3658888A1 EP 18740560 A EP18740560 A EP 18740560A EP 3658888 A1 EP3658888 A1 EP 3658888A1
Authority
EP
European Patent Office
Prior art keywords
electrode
sensor
particle
particle sensor
base body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP18740560.0A
Other languages
German (de)
English (en)
Inventor
Radoslav Rusanov
Oliver Krayl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP3658888A1 publication Critical patent/EP3658888A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke

Definitions

  • the invention relates to a particle sensor having a base body and a particle charging device for charging particles in a fluid flow flowing over a first surface of the base body, wherein the
  • High voltage electrode for generating a corona discharge has.
  • the invention further relates to a method for producing such a particle sensor.
  • WO 2013/125181 A1 discloses a particle sensor for use in
  • the known particle sensor has a complex layer structure with a multiplicity of individual layers of comparatively complex geometry.
  • the particle sensor comprises a main body and a particle charging device for charging particles in a over a first surface of the
  • the particle charging device arranged in the region of the first surface of the high-voltage electrode for Producing a corona discharge.
  • a counter electrode to the high voltage electrode is provided, wherein the counter electrode is configured and arranged to deflect charged particles of the fluid flow. Under a counter electrode is present one of the
  • High voltage electrode different electrode understood, which is acted upon by a respect to the high voltage electrode different electrical potential.
  • High voltage electrode to be placed on a reference potential or be firmly connected to a reference potential having circuit node.
  • the high voltage electrode may have a positive or negative electrical potential over the
  • the counter electrode advantageously fulfills a dual function.
  • the counterelectrode simultaneously forms a so-called trap electrode, which makes it possible to use the corona discharge charged particles of the
  • the invention provides that the
  • Counter electrode is formed and arranged with respect to the high voltage electrode, that it can also fulfill the function of the trap electrode.
  • the counterelectrode according to the invention can therefore also be referred to as a combined "trap and corona counterelectrode" and enables a particularly efficient production of the particle sensor as well as an overall cost-effective
  • the fluid stream may be an exhaust gas stream of an internal combustion engine of a motor vehicle.
  • the particles may be soot particles, such as those produced as part of combustion of fuel by an internal combustion engine.
  • the base body has a substrate element or is formed from a substrate element.
  • the main body is particularly preferred formed a substantially planar ceramic substrate.
  • the basic body can have a substantially cuboidal basic shape with a width and a length, wherein a height dimension is comparatively small with respect to the width and the length. More preferably, the first surface is an outer surface of the main body.
  • the corona discharge provided by the present invention in the particle sensor allows for charging of particles or particles in general, e.g. also of gases, from the fluid flow or exhaust gas flow in a space around the
  • the high voltage electrode has at least one needle-shaped electrode or tip. In an advantageous embodiment, it is provided that the
  • High voltage electrode at least partially, in particular directly, is arranged on the first surface of the base body, wherein the counter electrode at least partially, in particular directly, on the first surface of the
  • Basic body is arranged.
  • a particularly small-sized configuration results when the high-voltage electrode and the counter electrode, in particular completely, are arranged on the first surface of the base body.
  • a "direct" arrangement of the relevant electrode on the first surface of the base body which can be provided in some embodiments is understood here to mean that the relevant electrode has a substantially flat contact area with the first surface or covers the first surface in contact, for example in the form of a coating ,
  • the relevant electrode (s) on the first surface of the base body are conceivable, in which the relevant electrode is arranged for example in the region of the first surface, but not directly on it.
  • a voltage source for supply so electrical power supply, the
  • Particle charging device wherein a first terminal of the voltage source is electrically conductively connected to the high voltage electrode, and wherein the counter electrode is electrically conductive via a
  • Resistor element is connected to a second terminal of the voltage source.
  • the provision of the resistance element which according to preferred embodiments can be a substantially purely resistive resistance element, advantageously affords degrees of freedom with regard to an operation of the particle sensor. For example, by selecting the resistance value of the resistive element and the other operating parameters (e.g., electrical voltage delivered from the voltage source), the electrical potential of the counterelectrode may be affected. Since these embodiments assume the function of the trap electrode at the same time, the electrical potential of the trap electrode can thus also be influenced, in particular independently of operation of the corona discharge, which is advantageous for the functionality of the particle sensor.
  • Resistance element between about 10 megohms and about 2 gigaohms, preferably between about 200 megohms and about 600 megohms.
  • a first part of the counter electrode is arranged directly on the first surface of the base body, and at least a second part of the counter electrode protrudes from the first surface at least in regions.
  • Counter electrode arranged on the first surface of the base body, which allows a simple electrical contacting of the counter electrode, for example, arranged on the first surface of conductor tracks or conductor structures. Furthermore, it can be provided that a second region or part of the counterelectrode, which differs from the first region or part, from the first
  • Counter electrode with arranged on the first surface of the base body components (for example, conductor tracks).
  • At least one sensor electrode is provided for detecting information about an electric charge flow caused by particles from the fluid flow generated by means of the
  • the at least one sensor electrode was disposed on the first surface.
  • the at least one sensor electrode is disposed on the first surface.
  • Counter electrode and the optional sensor electrode arranged along a longitudinal axis of the base body on the first surface thereof,
  • the particle charging device for example by means of the corona discharge, particles or particles of the
  • Counter electrode addition for example, to the sensor electrode, where they can be detected, for example by means of charge influence on the sensor electrode in a conventional manner.
  • the so-called "escaping current” principle can be used to measure a charge current of the charged particles
  • Particle sensor containing system are isolated to the outside, and it is an electric current measured, which carry the charged particles in the form of their electrical charge from the otherwise electrically isolated and therefore closed system.
  • the considered electric current flows from a needle electrode of the high voltage electrode through the corona discharge into the counter electrode of the high voltage electrode, and the trapping electrode portion of the counter electrode traps the remaining ions.
  • Counter electrode is added again so that their electrical potential remains constant. It is called "escaping current" and is a measure of the concentration of charged particles.
  • At least one first protection electrode is provided which surrounds the at least one sensor electrode at least partially, but preferably completely and substantially annularly.
  • the sensor electrode is arranged completely on the first surface of the base body. In some embodiments, then the first
  • Protective electrode also be formed substantially flat and preferably surround the entire sensor electrode annular.
  • the first protection electrode which can also be referred to as a "guard electrode" serves to protect the first protection electrode
  • the provision of at least the one first guard electrode can result in a signal-to-noise
  • Ratio SNR, signal-to-noise ratio
  • a region of the counter electrode surrounds the high-voltage electrode at least partially, but preferably completely and substantially annularly. This allows leakage currents, e.g. minimized in the direction of an optional sensor electrode and the signal-to-noise ratio can be further improved.
  • the at least one other electrode (For example, the counter electrode or at least one trap electrode region of the counter electrode and / or the possibly existing first guard electrode) of the particle sensor at least partially, but preferably completely and substantially annular, surrounds.
  • a sensor device comprising a protective tube arrangement of two concentrically arranged tubes and at least one particle sensor according to the invention, wherein the at least one particle sensor is arranged in the inner tube of the two tubes, that its first surface in the
  • the particle sensor is advantageously protected from external influences (for example, also from direct flow through exhaust gas), and at the same time it is ensured that a uniform or laminar flow of the exhaust gas flow is applied to the particle sensor, whereby the sensor accuracy is increased.
  • an operation of the particle sensor without the supply of fresh gas or fresh air can be done thereby, whereby a corresponding pump, as required in conventional systems, can be omitted.
  • the method comprises: providing the base body, arranging the high-voltage electrode on the first surface of the base body, at least partially arranging the counter-electrode on the first surface, in particular so relative to the
  • High voltage electrode that it can deflect charged particles of the fluid stream.
  • Particularly preferred may in some embodiments
  • Siebdruckbacter in particular platinum screen printing, be used to the particle charging device or components thereof and the trap electrode area and optionally an optional sensor electrode or equivalent
  • FIG. 1 shows a schematic side view of a first embodiment of the particle sensor according to the invention
  • FIG. 2 schematically shows a side view of a second embodiment of the particle sensor according to the invention
  • Figures 3 and 4 show schematically the arrangement of a particle sensor in one
  • FIG. 5 schematically shows a plan view of a particle sensor according to a third embodiment
  • FIG. 6 schematically shows a plan view of a particle sensor according to a fourth embodiment
  • FIG. 7A schematically shows a plan view of a particle sensor according to a fifth embodiment
  • FIG. 7B schematically shows a front view in cross section of the particle sensor from FIG. 7A according to line B-B
  • FIG. 8 schematically shows a plan view of a particle sensor according to a further embodiment
  • FIG. 9 schematically shows a simplified flowchart of a
  • FIG. 1 schematically shows a side view of a first embodiment of the particle sensor 100 according to the invention.
  • the particle sensor 100 has a preferably planar base body 110, which is provided, for example, by a substrate made of an electrically non-conductive material, such as a
  • Ceramic material can be formed.
  • the base body 1 10 a the base body 1 10 a
  • Thickness d1 which is preferably smaller, in particular substantially smaller (e.g., at least about 80% smaller than a length L extending along the x-axis and smaller than a width extending perpendicular to the plane in FIG.
  • a particle charging device 120 is arranged in the region of a first surface 11a of the main body 110, which is an outer surface of the main body 110 in FIG. 1.
  • the particle charging device 120 is particularly preferably arranged directly on the first surface 110a.
  • the particle charging device 120 is provided for charging particles (not shown) which may be located in a fluid flow A1 flowing over the first surface 110a of the base body 110.
  • the particles not shown
  • Particle charger 120 Particle charger 120, a high voltage electrode 122, the
  • High voltage electrode 122 may be connected, for example, to a high voltage source not shown in Figure 1. Furthermore, the
  • Particle charging device 120 via a counter electrode 124 the present fully or completely on the first surface 1 10a of the main body
  • FIG. 1 10 is arranged, resulting in a simple contact by means of on the first surface 1 10a providable interconnects (not shown in Figure 1) and overall a small-sized configuration results.
  • the dashed ellipse in FIG. 1 indicates a region of increased ion concentration.
  • the counter-electrode 124 in addition to a first region 124a, which acts primarily as an electrical counterelectrode to the high-voltage electrode 122, a second region 124b, which realizes the function of a trap electrode according to the invention and therefore also as a trap electrode region referred to as.
  • the trap electrode region 124b of the counter electrode 124 is provided for deflecting charged particles of the fluid flow A1, which have been generated, for example, by means of the particle charging device 120 farther upstream with respect to the fluid flow A1.
  • particles charged by the trap electrode region 124b are particularly advantageously,
  • ions in particular, are deflected out of the fluid flow A1 so that they do not reach the downstream sensor array 140.
  • the counterelectrode 124 may be exposed to an electrical potential different from that of the sensor electrode 140
  • High voltage potential differs, with which the high voltage electrode 122 can be acted upon.
  • the main body 110 extends with its length L between the coordinates x0, x6 of the x-axis horizontal in FIG.
  • the high voltage electrode 122 is arranged approximately in the region of the coordinate x1> x0, and the counter electrode approximately between the
  • the optional sensor electrode extends approximately between them
  • Information about an electric charge flow provided by charged particles from the fluid flow A1 is provided.
  • these may be particles which are conveyed by means of the particle charging device
  • the sensor electrode 140 makes it possible to determine a charge by means of a measurement of the charge influence which is caused by charged particles flowing past the sensor electrode 140
  • Concentration of the charged particles in the fluid flow A1 is an exhaust gas flow of an internal combustion engine (not shown).
  • the particles may be around
  • Soot particles act as they arise in the context of combustion of fuel by an internal combustion engine.
  • the so-called "escaping current" principle can be used to measure a charge current of the charged particles
  • the complete system containing the particle sensor 100 can be insulated to the outside, and an electric current is generated
  • the electric current under consideration flows from the high voltage electrode 122 through the corona discharge 123 into the
  • Area 124b captures the remaining ions.
  • the current generated by the charged particles must be added to the counter electrode 124 again so that its electrical potential remains constant. It is called “escaping current” and is a measure of the concentration of charged particles.
  • an electrically conductive element (not shown), for example a metal sheet, may optionally be provided as the counterelectrode for the trap electrode region 124b, which, for example, is arranged above the first surface 110a of the base body 100 according to FIG is.
  • an electrically conductive element for example a metal sheet, may optionally be provided as the counterelectrode for the trap electrode region 124b, which, for example, is arranged above the first surface 110a of the base body 100 according to FIG is.
  • the counterelectrode for the trap electrode region 124b may optionally be provided as the counterelectrode for the trap electrode region 124b, which, for example, is arranged above the first surface 110a of the base body 100 according to FIG is.
  • FIG. 2 schematically shows a side view of a second embodiment 100a of the particle sensor according to the invention.
  • the particle sensor 100a has a voltage source 130 for supplying, ie electrical energy supply, the particle charging device 120, wherein a first terminal 132a of the
  • Voltage source 130 electrically conductive with the high voltage electrode 122nd is connected, and wherein the counter electrode 124 is electrically conductive via a resistive element 134 with a second terminal 132 b of
  • Voltage source 130 is connected.
  • the voltage source 130 may be configured to generate a first voltage U1 ("high voltage" for generating the corona discharge 123), which in some embodiments may be in the range of a few kilovolts (kV), for example.
  • it can be a substantially purely resistive resistance element, resulting in advantageous degrees of freedom with respect to an operation of the particle sensor 100a.
  • the resistance value of the resistive element 134 and the other operating parameters such as the voltage provided to the voltage source 130, the electrical potential of the
  • Counterelectrode 124 can be influenced. Since, according to the embodiments, this simultaneously assumes the function of a trap electrode, compare the trap electrode region 124b (FIG. 1), the electrical potential of the trap electrode or of the trap electrode region 124b can thus also be influenced. in particular independent of operation of the corona discharge 123, which is advantageous for the functionality of the particle sensor 100a.
  • Resistor element 134 between about 10 megohms and about 2 gigaohms, preferably between about 200 megohms and about 600 megohms.
  • an electrical voltage U2 which is dependent inter alia on a corona current in the region of the corona discharge 123 which flows, for example, from the high-voltage electrode 122 to the trap electrode region 124b, drops at the terminals 134a, 134b of the resistance element 134 ,
  • the second port 132b is the
  • a required voltage between the high voltage electrode 122 and the trap electrode region 124b may be determined by a suitable choice of the geometry of the particle sensor
  • Components and the desired corona current can be determined, so for example by the operating point of the corona discharge (typically
  • the voltage source 130 in addition to the actual corona voltage, also supplies the voltage U2 of the trap electrode region, which may amount to a few 100 V, for example.
  • an optional sheet B which can be used as a counter electrode for the trap electrode region 124b (FIG. 1). As can be seen from FIG. 2, it is arranged, for example, over the first surface 110a of the main body 100.
  • a protective tube surrounding the particle sensor 100 assumes the function of the sheet B.
  • the sheet B may be connected to an electrical reference potential, such as ground potential.
  • FIG. 3 schematically shows the arrangement of the particle sensor 100 according to FIG. 1 in a target system Z, which in the present case is an exhaust tract of an internal combustion engine, for example of a motor vehicle.
  • a target system Z which in the present case is an exhaust tract of an internal combustion engine, for example of a motor vehicle.
  • Exhaust gas flow is referred to herein by the reference numeral A2. Also shown is a protective tube arrangement of two mutually concentrically arranged tubes R1, R2, wherein the particle sensor 100 is arranged in the inner tube R1, that its first surface 1 10a is substantially parallel to a longitudinal axis LA of the inner tube R1. Due to the different lengths and the arrangement of the tubes R1, R2 relative to each other is due to the Venturi effect a suction in which the
  • Exhaust gas flow A2 causes a fluid flow P1 or A1 out of the inner tube R1 out in Figure 2 in a vertical upward direction.
  • the further arrows P2, P3, P4 indicate the continuation of this caused by the Venturi effect fluid flow through a gap between the two tubes R1, R2 through to the environment of the protective tube assembly towards.
  • Overall, by the arrangement shown in Figure 3 is a comparatively uniform Overflow of the particle sensor 100 and its along the fluid flow P1 aligned first surface 1 causes 10a, which allows efficient detection of particles in the fluid flow A1, P1.
  • the particulate sensor 100 is protected from direct contact with the main exhaust stream A2.
  • a sensor device 1000 for determining a particle concentration in the exhaust gas A2 is advantageously indicated by the elements 100, R1, R2.
  • the reference symbol R2 indicates an optional electrical connection of the outer tube R2 and / or the inner tube R1 to a reference potential, such as the ground potential, so that the respective tube or both tubes advantageously at the same time as their fluidic guiding function as electrical counter electrode, for example for the trap 1, can be used and, for example, assumes the function of the sheet B described above with reference to FIG. 2.
  • the block arrow P5 symbolizes in FIG. 3 an optional supply of fresh gas, in particular fresh air supply, which may be desirable in some embodiments, but is not provided in particularly preferred embodiments.
  • FIG. 4 schematically shows an exhaust pipe R and parts of the sensor device 1000 according to FIG. 2 in the exhaust pipe R.
  • FIG. 3 again shows the particle sensor 100 according to the invention inside the protective pipe arrangement R1, FIG.
  • the particle sensor 100 is aligned in the protective tube assembly so that its first surface extends along the x-axis, whereas the flow direction of the exhaust gas A2 in the exhaust tube R is aligned parallel to the y-axis.
  • FIG. 5 schematically shows a plan view of a particle sensor 100b according to a third embodiment.
  • the main body 1 10 is formed as a substantially planar ceramic substrate element, and on its first Surface 1 10a are the high voltage electrode 122, a counter electrode 124 and a sensor electrode 140 applied, for example by means of
  • the high-voltage electrode 122 has its right end section in FIG.
  • the counterelectrode 124 in turn has a first region 124a, which essentially acts as an electrical counter electrode to the
  • High voltage electrode 122 acts as well as a trap electrode region 124b.
  • the counterelectrode 124 is as schematically shown in FIG. 2 and already described above via a resistance element 134 with the
  • connection region 1240 which
  • a conductor track in the manner of a conductor track can be formed and extend over a comparatively large longitudinal portion of the base body 1 10 in Figure 5 in the horizontal direction to a simple electrical
  • the soot particles located in the exhaust gas electrically.
  • the excess ions are then removed by the electric field between a protective tube wall acted upon, for example, by the ground potential GND (see FIG. 3 or sheet B from FIG. 2) and the trap electrode region 124b of the counter electrode 124.
  • the charged soot particles then generate a charge on the sensor electrode 140, which is amplified and read out.
  • a preamplifier 141 may be provided, whose input 141 a is electrically connected to the sensor electrode 140. This can be done, for example, via a connecting strip 1440, which in turn is essentially designed as a conductor track, and, for example, an electrical connection
  • Connection point 1441 be realized.
  • An output signal of the preamplifier 141 For example, it may be supplied to an optional signal processing device 142, which may comprise, for example, a digital signal processor (DSP).
  • DSP digital signal processor
  • An electrical connection of the high-voltage electrode 122 can likewise take place via a connection area 1220, which is formed substantially in the manner of a conductor track, and the connection point 1221, which is electrically conductively connected to the first terminal 132a of the voltage source 130.
  • Components in a left in Figure 5 area of the particle sensor 100b done. As can be seen from FIG. 5, an electrical contacting of the particle sensor 100b or of the electrical components which is located on the particle sensor 100b or the electrical components
  • Basic body 1 10 are arranged, by means of only three supply terminals 1221,
  • Basic body 1 10 is removed.
  • a structuring of the electrode tip for example by a
  • FIG. 6 schematically shows a plan view of a particle sensor 100c according to a fourth embodiment.
  • the main body 1 10 is formed as a substantially planar ceramic substrate element, and on its first surface 1 10a are in turn the high voltage electrode 122, a
  • Counter electrode 124 and a sensor electrode 140 applied, for example by means of screen printing, in particular platinum screen printing.
  • a region 1240 'of the counter-electrode 124 surrounds the
  • High voltage electrode 122 annular, whereby leakage currents, in particular to the sensor electrode 140 are minimized, whereby the signal to noise ratio can be increased in the measurement.
  • High-voltage electrode 122 is according to further embodiments also in at least one of the above with reference to Figure 1, FIG
  • Protective electrode 145 is provided which surrounds the sensor electrode 140 at least partially, but preferably completely and substantially annularly.
  • This first protection electrode 145 may also be referred to as a "guard ring electrode” and also serves to improve the SNR of the
  • Particle sensors 100c it is also possible to provide a second protection electrode 145 ', which in FIG.
  • the counter electrode 124 at least partially, but preferably completely and substantially annular, surrounds.
  • Fig. 7A schematically shows a plan view of a particle sensor 10Od according to a fifth embodiment
  • Fig. 7B shows a cross section along line B-B of Fig. 7A.
  • the elements 1 10,122,124,140 substantially correspond to those described above with reference to FIG.
  • Embodiment In contrast to the configuration according to FIG. 6, however, provision is made in the configuration according to FIG. 7A for a first part 1242a of the counterelectrode 124, in particular directly, to be arranged on the first surface 110a, at least a second part 1242b of the counterelectrode 124 at least in regions protrudes from the first surface 1 10a.
  • a tip of the high voltage electrode 122 to be in the
  • the needle electrode 122 “may be arranged substantially perpendicular to the first surface 110a or integrated into it.
  • a corona discharge 123, cf. FIG. 7B can be ignited against the region 1242b of the counterelectrode.
  • the counterelectrode 124 compare FIG. 7A, can be connected to the ground potential via a resistance element 134 (FIG. 2), so that the trap electrode region of FIG
  • Counter-electrode 124 for example with a particle sensor 100th
  • Carrier substrate exist.
  • the carrier substrate may comprise, for example, zirconium or aluminum oxide and serves as a carrier for the various
  • Components of the particle sensor which are preferably all arranged together on the first surface 1 10a, resulting in a particularly efficient and cost-effective production.
  • the conductive patterns 122, 124, 140, 1220, 1240, 1440 may be efficiently deposited on the first surface 11a by known manufacturing technologies, for example, using screen printing techniques.
  • High voltage electrode 122 or a portion of the high voltage electrode 122 and the needle electrode 122 may be formed, for example, of platinum or tungsten or a material containing at least one of these metals and, for example by means of a screen-printed platinum paste by sintering on the substrate or the base body 1 10a mechanically fixed and at the same time electrically conductive with this or arranged thereon
  • FIG. 8 schematically shows a plan view of a particle sensor according to a further embodiment 100e, in particular on one of its first surface 110a (FIG. 1) opposite second surface 110b, which is, for example, a "bottom" of the particle sensor 100e.
  • an electric heater 160 is provided, which preferably meander-shaped heating conductors 162 and
  • the production of the structures 162, 164 can, in turn, advantageously be effected by means of screen printing, in particular by means of platinum screen printing.
  • the electric heater 160 may be used, for example, to increase the temperature of the particulate sensor 100e, in particular particulate deposits, in particular
  • the heater 160 may also be configured to increase a temperature of the particle sensor at least temporarily over a predetermined target temperature, in particular in a range between about 650 ° C to about 700 ° C, to selectively burn off deposits, especially soot deposits.
  • FIG. 9 shows schematically a simplified flowchart of a
  • Embodiment of the method according to the invention comprises: providing 200 of the main body 110 (FIG. 1), arranging 202 (FIG. 9) the high voltage electrode 122 on the first surface 110a of the main body
  • the particle sensor 100, 100a, 100b, 100c, 100d, 100e according to the invention preferably has a planar ceramic substrate, which forms the base body 110, and on the surface 110a of which are various components of the particle sensor, such as electrodes and
  • the particle sensor according to the invention can be arranged particularly simply in a protective tube or protective tube arrangement R1, R2, cf. FIG. 3, and thus exposed to a uniform fluid flow A1, P1, which enables a precise measurement of the concentration of particles, in particular of soot particles.
  • a protective tube or protective tube arrangement R1, R2, cf. FIG. 3 and thus exposed to a uniform fluid flow A1, P1, which enables a precise measurement of the concentration of particles, in particular of soot particles.
  • Sensor electrode 140 or even a plurality of sensor electrodes (not shown) possible, and variants are also possible without sensor electrode, in which preferably the "escaping currenf measuring principle is used to determine a concentration of charged particles.
  • Design of the particle sensor further allows cost-effective production and storage and a small-sized configuration for a corresponding target system Z (Fig. 3).
  • the particle sensor according to the invention can be particularly preferred as
  • Soot particle sensor are used in the automotive field, in particular as OBD (on board diagnosis) - sensor for monitoring a particulate filter in motor vehicles such as passenger cars (cars), commercial vehicles (commercial vehicles).
  • the particle sensor according to the invention can also be used in general for measuring the concentration of particles in a fluid flow, in particular for measuring a concentration of dust particles or Particulate matter, and can therefore be used advantageously especially in environmental metrology.
  • the particle sensor can be used for monitoring particle filters in internal combustion engines, both in self-igniting internal combustion engines as well as in spark-ignition internal combustion engines. Furthermore, the
  • Particle sensor according to the invention, the determination of particle concentrations in environmental metrology and other areas, in particular for the determination of indoor air quality, emissions from incinerators (private, industrial), etc ..
  • the measuring principle used according to the invention is based on a charging of particles, in particular soot particles, by means of a corona discharge in the fluid flow A1 (FIG. 1) and a subsequent measurement of the charge of the particles or of the soot particles or the measurement of a corresponding current resulting therefrom ,
  • the measurement can, for example, by means of
  • the measuring principle used according to the invention has a very high sensitivity, as a result of which even the smallest concentrations of particles can be measured. Furthermore, the measuring principle used according to the invention advantageously allows comparatively high update rates ("update").
  • Rates ie comparatively many measurements per second. This advantageously allows a correlation of the measurement signal obtained in this case, for example, with other operating variables, such as operating variables of a

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Abstract

L'invention concerne un capteur de particules (100 ; 100a ; 100b ; 100c ; 100d ; 100a) comportant un corps de base (110), un dispositif de charge de particules (120) destiné à charger des particules dans un flux de fluide (A1) s'écoulant sur une première surface (110a) du corps de base (110). Le dispositif de charge de particules (120) comporte une électrode haute tension (122) destinée à générer une décharge corona (123) et une contre-électrode (124). La contre-électrode (124) est conçue et agencée pour dévier les particules chargées de l'écoulement de fluide (A1).
EP18740560.0A 2017-07-25 2018-07-11 Capteur de particules et son procédé de fabrication Withdrawn EP3658888A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017212789.9A DE102017212789A1 (de) 2017-07-25 2017-07-25 Partikelsensor und Herstellungsverfahren hierfür
PCT/EP2018/068764 WO2019020373A1 (fr) 2017-07-25 2018-07-11 Capteur de particules et son procédé de fabrication

Publications (1)

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KR (1) KR20200028957A (fr)
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DE10242301A1 (de) * 2002-09-12 2004-03-18 Robert Bosch Gmbh Vorrichtung und Verfahren zur Messung der Konzentration von in einem strömenden Gas vorhandenen Partikeln
DE102005029834A1 (de) * 2005-06-27 2007-01-04 Robert Bosch Gmbh Vorrichtung und Verfahren zur Abgasmessung mit geladenen Teilchen
JP5774516B2 (ja) 2012-02-21 2015-09-09 日本特殊陶業株式会社 微粒子センサ
WO2013175548A1 (fr) * 2012-05-21 2013-11-28 株式会社島津製作所 Dispositif de mesure de comptage de particules

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DE102017212789A1 (de) 2019-01-31
KR20200028957A (ko) 2020-03-17
WO2019020373A1 (fr) 2019-01-31

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