EP3640615B1 - Pyroelektrischer sensor mit verbesserter verkleidung des widerstands gegen abrieb - Google Patents

Pyroelektrischer sensor mit verbesserter verkleidung des widerstands gegen abrieb Download PDF

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Publication number
EP3640615B1
EP3640615B1 EP19203896.6A EP19203896A EP3640615B1 EP 3640615 B1 EP3640615 B1 EP 3640615B1 EP 19203896 A EP19203896 A EP 19203896A EP 3640615 B1 EP3640615 B1 EP 3640615B1
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EP
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Prior art keywords
sensor
abrasion
pillars
substrate
pixel
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EP19203896.6A
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English (en)
French (fr)
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EP3640615A1 (de
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Amélie REVAUX
Mohammed Benwadih
Jean-François Mainguet
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/048—Protective parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1306—Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1329—Protecting the fingerprint sensor against damage caused by the finger

Definitions

  • the invention relates to a thermal pattern sensor of the pyroelectric sensor type.
  • a thermal pattern sensor of the pyroelectric sensor type forms for example a papillary impression sensor, in particular a fingerprint sensor.
  • a pyroelectric sensor exploits the pyroelectric properties of a material, ie its ability to generate electrical charges in response to a variation in temperature.
  • Such a sensor comprises pyroelectric capacitors, each forming a transducer for translating a temporal variation in temperature into an electrical signal.
  • Each pyroelectric capacitor comprises a portion made of pyroelectric material, placed between a lower electrode and an upper electrode.
  • One of the electrodes is put at a constant potential, and forms a reference electrode.
  • the other electrode called the charge collection electrode, collects pyroelectric charges generated by the pyroelectric material in response to a temperature variation.
  • the charge collection electrode is connected to a readout circuit to measure the amount of charge collected.
  • the detection can simply exploit a temperature difference between this object and said contact surface.
  • the sensor then performs passive type detection.
  • the finger In the case of fingerprint detection, the finger is pressed against the contact surface of the sensor.
  • the skin is in direct physical contact with the sensor.
  • a heat transfer between the skin and the contact surface of the sensor takes place by conduction, which leads to a first temporal variation in temperature.
  • the skin At the level of the valleys of the impression, the skin is not in direct physical contact with the sensor. Heat transfer between the skin and the contact surface of the sensor takes place through the air.
  • the air has thermal insulation properties, which leads to a second, less significant temperature variation over time.
  • the temperature variation is significant at the level of the valleys of the print, where the heat is transferred to the finger only through the air, and lower at the level of the ridges of the impression, where the heat is transferred efficiently to the finger, by conduction.
  • a pyroelectric sensor advantageously comprises a protective coating against abrasion, to protect the lower layers or stages with regard to mechanical wear linked to repeated contact with the objects to be imaged. , in particular fingerprints in the case of a papillary fingerprint sensor.
  • the abrasion protection coating may consist of an abrasion resistant resin layer.
  • the resin layer In order to offer sufficient protection, the resin layer generally has a thickness greater than 20 ⁇ m.
  • a disadvantage of such a layer of resin is however that it slows down the heat exchanges between the pyroelectric capacitors and an object to be imaged, due to the high thickness of material to be passed through, and causes a loss of resolution due to the lateral conduction of heat to neighboring pixels. The reading of the pixels of the sensor is therefore slowed down, which can pose difficulties in particular for sensors of large dimensions, with many pixels.
  • a known solution consists in producing the protective coating against abrasion in DLC (diamond like carbon).
  • DLC diamond like carbon
  • This material has in fact a very high resistance to abrasion, so that it offers sufficient protection even in reduced thickness.
  • An object of the present invention is to provide a solution for protecting a pyroelectric sensor against mechanical wear related to repeated contact with the objects to be imaged, which offers a high speed of heat transmission and reduced lateral diffusion. , and whose implementation does not present any particular technological difficulty.
  • thermal pattern sensor as defined in claim 1, comprising several pixels arranged on a substrate, each pixel comprising at least one pyroelectric capacitance formed by at least one portion of pyroelectric material arranged between at least one lower electrode and at least one upper electrode, with the lower electrode disposed between the substrate and the portion of pyroelectric material, the sensor comprising an external coating called protection against abrasion, located on the side opposite the substrate.
  • the pillars form structures of height substantially equal to the thickness of the abrasion resistance layer, for example to within 20%, or even within 5%, with respective lower faces of each of the pillars preferably distributed in a same plane parallel to the plane of the substrate.
  • the pillars for example, each take the form of a cylinder, or a stack of cylinders, of height substantially equal to the thickness of the abrasion resistance layer.
  • the diameter of the pillars, in a plane parallel to the substrate, is advantageously less than a pixel pitch of the thermal pattern sensor, and preferably less than half of this pitch.
  • the protective coating against abrasion comprises a layer called the abrasion resistance layer, and a plurality of pillars distributed in the abrasion resistance layer, the pillars having a thermal conductivity strictly greater than that of the abrasion resistance layer.
  • the pillars have a high thermal conductivity, and extend in a layer having a low thermal conductivity.
  • the protective coating against abrasion has a heterogeneous structure consisting of highly heat-conducting pillars surrounded by a poorly heat-conducting material.
  • a ratio between the thermal conductivity of the pillars and the thermal conductivity of the abrasion resistance layer is advantageously greater than or equal to 2, or even greater than or equal to 5. This ratio can even reach 10, 100 and even 1000.
  • the pillars are laterally surrounded by the material of the abrasion resistance layer. In particular, they are entirely surrounded by the material of said layer, in planes parallel to the plane of the substrate.
  • the abrasion resistance layer has a protective function against abrasion.
  • Abrasion designates here a mechanical wear, by friction.
  • Abrasion resistance refers to the ability to resist this mechanical wear.
  • heat travels quickly through the pillars, and slowly through the abrasion resistance layer. It is thus possible to combine, in the protective coating against abrasion, rapid heat transfers along an axis orthogonal to the plane of the substrate, and slow heat transfers in a plane parallel to the plane of the substrate.
  • the ratio of heat transfer rates is for example greater than or equal to 2, or even greater than or equal to 10 or even greater than or equal to 100.
  • the invention thus makes it possible to limit the lateral diffusion of heat within the abrasion protection coating, since the heat transfers take place mainly via the pillars and since the latter are embedded in the layer of resistance to abrasion. abrasion, low thermal conductivity. Heat transfer from one pixel of the pyroelectric sensor to another (diathermy) is thus avoided when passing through the abrasion protection coating. Such heat transfers prevent a thermal pattern on the contact surface of the pyroelectric sensor from being reproduced faithfully at the level of the portions made of pyroelectric material. They could come with a protective coating against abrasion consisting of a thick layer of a material that is a good thermal conductor.
  • the material of the pillars can have good properties of resistance to abrasion (for example when the pillars are made of titanium or of tungsten or of DLC).
  • An obvious solution would be to use a full layer of the pillar material, to achieve the abrasion protection. Such a solution would, however, lead to strong diathermy linked to the crossing of the abrasion resistance coating.
  • the invention makes it possible, by increasing the speed of thermal transfers through the protective coating against abrasion and by limiting lateral thermal transfers, to improve the contrast of an image of the thermal pattern applied to the contact surface of the sensor .
  • the invention makes it possible to reduce the electrical consumption of the thermal pattern sensor, by reducing the amount of heating provided by the heating elements in the case of an active-type detection sensor.
  • the increase in the vertical speed of the thermal transfers allows a lesser quantity of heat brought by the heating elements generates the same temperature variation at the level of the pyroelectric capacitors, for the same acquisition duration, in comparison with the prior art.
  • the increase in the vertical speed of the heat transfers also has the consequence of reducing a time necessary for heating the pyroelectric capacitors using the heating elements and then bringing them back to ambient temperature, in an active thermal type detection sensor. with passive pixel addressing (without selection transistors). It is thus possible to reduce the reading time of the pixels of the thermal pattern sensor, even dividing it by a factor of 10 in comparison with the prior art.
  • the abrasion resistance layer can have a high thickness without this affecting the speed of the heat transfers.
  • the latter may for example have a thickness greater than a few micrometers, for example greater than or equal to 3 ⁇ m or even greater than or equal to 10 ⁇ m. This thickness is advantageously greater than or equal to 5% of a pixel pitch of the thermal pattern sensor, or even greater than or equal to 10% and even greater than or equal to 100% of this pixel pitch.
  • the invention gives access to a wide range of materials for producing the latter. It is in particular possible to use materials which need to be deposited in a thick layer in order to be able to offer sufficient protection against abrasion. In particular, it is possible to use materials that are less expensive and/or easier to deposit.
  • the protective coating against abrasion has a thickness greater than or equal to 5% of a repetition pitch of the pixels of the thermal pattern sensor.
  • the protective coating against abrasion may have a thickness greater than or equal to 3 ⁇ m.
  • the thickness of the protective coating against abrasion is greater than or equal to the height of the pillars, with said thickness and said height each defined along an axis orthogonal to the plane of the substrate, and a difference between the thickness of the coating of protection against abrasion and the height of the pillars is less than or equal to 10%, or even less than or equal to 5% of the height of the pillars.
  • each pixel of the sensor comprises a portion of the protective coating against abrasion, said portion comprising a single pillar.
  • the pillars of the abrasion protection coating advantageously have a thermal conductivity at least ten times greater than that of the abrasion resistance layer.
  • the pillars of the abrasion protection coating may comprise a metal or graphene.
  • the abrasion resistance layer may include a benzo-cyclo-butene material.
  • the abrasion resistance layer is advantageously made of an electrically insulating material.
  • the pillars of the protective coating against abrasion each advantageously consist of several elementary pillars, superposed along an axis orthogonal to the plane of the substrate.
  • the invention also covers a method for producing the protective coating against abrasion of a sensor according to the invention, as defined in claim 12, in which a step for producing the pillars comprises the use of an ink based on metal and/or graphene particles.
  • the step of making the pillars can include one or more localized deposits of ink, using an inkjet printer.
  • the figures show the axes (Ox), (Oy) and/or (Oz) of an orthonormal frame.
  • the scales are not respected in the figures, in particular, the thicknesses of each of the layers and/or stages and/or coating.
  • the figures 1A and 1B schematically illustrate a first embodiment of a thermal pattern sensor 100 according to the invention.
  • the Figure 1A is a schematic top view, in a plane parallel to the plane (xOy).
  • the figure 1B is a sectional view in a plane AA' parallel to the plane (yOz).
  • each pixel comprises a pyroelectric capacitance, formed by a portion of pyroelectric material arranged between a lower electrode, on the side of the substrate, and an upper electrode, on the side opposite the substrate.
  • the lower electrodes form charge collection electrodes as described in the introduction
  • the at least one upper electrode forms a reference electrode as described in the introduction.
  • the substrate 110 is for example made of glass, silicon, a plastic such as poly(ethylene terephthalate) (PET), poly(ethylene naphthalate) (PEN), polyimide (Kapton film), etc. It is preferably a flexible substrate, for example a polyimide substrate 5 ⁇ m to 10 ⁇ m thick, or a plastic such as PET. It has an upper face and a lower face parallel to each other, and parallel to the plane (xOy). In the following, the plane of the substrate designates a plane parallel to these lower and upper faces.
  • PET poly(ethylene terephthalate)
  • PEN poly(ethylene naphthalate)
  • Kapton film polyimide
  • It is preferably a flexible substrate, for example a polyimide substrate 5 ⁇ m to 10 ⁇ m thick, or a plastic such as PET. It has an upper face and a lower face parallel to each other, and parallel to the plane (xOy). In the following, the plane of the substrate designates a plane parallel to these lower and upper faces
  • the stage of lower electrodes 120 here comprises a matrix of charge collection electrodes 121, arranged in rows and in columns along the axes (Ox) and (Oy).
  • the charge collection electrodes are made of a metal such as gold or silver, or any other electrically conductive material. They are distributed along the axes (Ox) and (Oy), according to a repetition pitch less than or equal to 150 ⁇ m.
  • the repetition pitch is for example approximately 80 ⁇ m, or 90 ⁇ m, or 50.8 ⁇ m.
  • the stage 130 comprising a pyroelectric material here consists of a full layer consisting of poly(vinylidene fluoride) (PVDF) or one of its derivatives (in particular the PVDF-TrFE copolymer, TrFE for Tri-fluoro-ethylene) .
  • layer 130 comprises aluminum nitride (AIN), barium titanate (BaTiO 3 ), Lead Titano-Zirconate (PZT), or any other pyroelectric material.
  • Layer 130 extends here, but in a non-limiting way, in one piece, and without opening, covering all of the charge collection electrodes 121 of stage 120.
  • the electromagnetic shielding stage 140 forms an electrically conductive stage, capable of being connected to a source of constant potential, for example to ground. It consists for example of a thin layer of an electrically and thermally conductive material, such as a mixture of poly(3,4-ethylenedioxythiophene) and sodium poly(styrene sulfonate), called PEDOT:PSS. Stage 140 of electromagnetic shielding forms a separate stage from stage 180 of protection against abrasion. Where appropriate, it may have a heterogeneous structure consisting of thermally conductive pads in an electrically conductive and thermally insulating layer.
  • stage 140 also forms a reference electrode, common to all the pixels of the pixel array. The pixels are therefore delimited laterally by the charge collection electrodes 121 alone.
  • the electrical insulation layer 160 is made of a dielectric material, for example polyimide. It preferably has a thickness of less than 5 ⁇ m, for example equal to 1 ⁇ m.
  • each pixel of the pixel matrix further comprises a heating element 171.
  • All the heating elements 171 are located in the heating stage 170.
  • the heating elements 171 are adapted to receive a heating current, to provide a heating by Joule effect, so as to carry out detection of the active type. They preferably consist of a metal, for example gold or silver.
  • the thermal conductivity of the pillars 183 is at least ten times greater than that of the abrasion resistance layer 182, and even at least a hundred times, or even at least a thousand times greater. This ratio between the thermal conductivities is found in a ratio between the speeds of heat transfer, via the pillars respectively via the abrasion resistance layer.
  • the heat circulates rapidly through the coating 180 for protection against abrasion, along the axis (Oz) orthogonal to the plane of the substrate 110, preferentially passing through the pillars 183.
  • the heat circulates with difficulty from one pillar 183 to the other, passing through the abrasion resistance layer 182. Consequently, the heat circulates slowly in the coating 180 for protection against abrasion, in a plane (Oxy) parallel to the plane of the substrate 110.
  • the abrasion resistance layer 182 must be both a poor thermal conductor and a poor electrical conductor to avoid short-circuiting the heating elements 171. This offers great freedom in the choice of the material constituting the abrasion resistance layer. abrasion 182. In addition, the latter may be made of a material which needs to be thick enough to provide sufficient resistance to abrasion, without prejudice to the speed of heat transfer according to (Oz ).
  • the abrasion resistance layer 182 is made of a poor thermal conductor material, the heat remains confined in a pillar 183, and passes with difficulty from a pillar 183 to the neighboring pillar, and therefore from one pixel to the pixel. neighbor. This limits a lateral diffusion of heat in the protective coating against abrasion 180, which otherwise would be detrimental to the quality of the image acquired at the level of the pyroelectric capacitors.
  • the pillars 183 are made for example of a material having a thermal conductivity greater than or equal to 50 Wm -1 K -1 , and even greater than or equal to 100 Wm -1 K -1 , for example between 100 Wm -1 K - 1 and 500 Wm -1 K -1 .
  • the pillars 183 include, for example, a metal such as silver, gold, copper, aluminum, etc. They are for example produced using an ink based on a metal, in especially a silver-based ink. When the pillars are produced using an ink based on a metal, they consist of metal particles joined to one another, with a more or less high percentage of volume occupation by the metal. The pillars then have a lower thermal conductivity than that of pure metal. In its pure form, silver has a thermal conductivity of 429W.m -1 K -1 .
  • Pillars produced using a silver-based ink have a thermal conductivity of less than 429 W.m -1 K -1 and greater than or equal to 69 Wm -1 K -1 , or even greater than or equal to 100 Wm -1K -1 .
  • the pillars 183 can comprise graphene (two-dimensional material whose stack constitutes graphite, graphite being a crystallized form of carbon). They can be made entirely of graphene.
  • the abrasion resistance layer 182 is preferably made of a material having a thermal conductivity less than or equal to 10 Wm -1 K -1 , and even less than or equal to 1 Wm -1 K -1 , for example between 0.1 Wm -1 K -1 and 1 Wm -1 K -1 . It may consist of a resin, in particular a polymer resin comprising benzo-cyclo-butene (BCB) or an epoxy polymer resin.
  • BCB benzo-cyclo-butene
  • a ratio between the thickness of the abrasion resistance layer 182 and a repetition pitch of the pixels of the sensor is greater than or equal to 0.05 or even greater than or equal to 0.1 and even greater than or equal to 1.
  • the pillars 183 are regularly distributed, in rows and columns, so that each pixel of the pixel matrix comprises a single and unique pillar 183.
  • the geometric center of a pillar 183 and the geometric center of the pixel associated are aligned along an axis parallel to the axis (Oz).
  • each pillar 183 extends, along the axis (Oz), over the entire thickness of the abrasion resistance layer 182, and without exceeding above or below the latter.
  • Each pillar 183 therefore has a height h equal to the thickness of the abrasion resistance layer 182.
  • the diameter D is less than the pixel pitch of the matrix of pixels, so that two neighboring pillars 183 are physically isolated from each other, by a part of the abrasion resistance layer 182.
  • This diameter D is for example between 10 ⁇ m and 120 ⁇ m, preferably between 40 ⁇ m and 60 ⁇ m.
  • the diameter D is defined as being the greatest length measured on the pillar, along a rectilinear axis located in a plane parallel to the plane of the substrate.
  • the lower stage 18A has the same height h A as the pillars (dimension according to (Oz)).
  • the pillars 183' extend into the lower stage 18A, over its entire thickness, without protruding above or below the latter.
  • the upper floor 18B has a height h B less than or equal to 5% of the height h A of the pillars (dimension according to (Oz)).
  • a difference between the height of the pillars 183' and the total height h of the abrasion resistance layer 182' is less than or equal to 5% of the height h A of the pillars. In practice, this difference is generally less than or equal to 1 ⁇ m.
  • the upper floor carries out an encapsulation of the pillars 183'. Thanks to its thickness, or reduced height, the advantages mentioned above are retained.
  • the pillars have non-circular sections in planes parallel to the plane of the substrate, for example square or rectangular sections.
  • the pixels are distributed according to a square mesh with a pitch equal to 80 ⁇ m.
  • curves 11A and 11B illustrate, as a function of time, a quantity of charges generated (electric capacitance) at the level of a pixel of the sensor according to the prior art, when the pixel is surmounted by water (material thermally equivalent to the skin, and therefore to a ridge of a papillary imprint), respectively by air (equivalent to a valley of a papillary imprint).
  • Curves 12A and 12B illustrate, as a function of time, a quantity of charges generated at the level of a pixel of the sensor according to the invention, when the pixel is surmounted by water, respectively by air.
  • the heating element associated with the pixel is activated for 1 ms.
  • the difference between the curves associated respectively with air and water is much greater in the case of the sensor according to the invention.
  • the invention therefore makes it possible to improve the contrast of an image acquired using the thermal pattern sensor.
  • the difference between the two curves associated respectively with air and water takes on non-negligible values from the start of the measurement (barely 100 ⁇ s), whereas in the prior art it is necessary to wait approximately 1 millisecond before obtaining satisfactory contrast.
  • the invention therefore makes it possible to reduce (here by a factor of 10) a reading speed of the pixels of the thermal pattern sensor.
  • the figure 2B illustrates the difference, as a function of time, between the number of pyroelectric charges generated in a pixel surmounted by water or by air, respectively in a thermal pattern sensor according to the prior art (curve 21) and in a thermal pattern sensor according to the invention (curve 22).
  • the effect on the contrast makes it possible to reduce an electrical power supplied to the heating elements, without this affecting the contrast in comparison with the prior art.
  • the figures 3A and 3B schematically illustrate a second embodiment of a thermal pattern sensor 200 according to the invention.
  • the Figure 3A is a schematic top view, in a plane parallel to the plane (xOy).
  • the Figure 3B is a sectional view in a plane BB' parallel to the plane (xOz).
  • each pixel comprises a heating element, and these heating elements are used to achieve passive addressing of the pixels of the sensor.
  • the heating elements of a same row of pixels are electrically connected to one another to form a heating strip 271.
  • Each heating strip 271 is configured to be able to be activated independently of the other heating strips.
  • the heating elements of the pixels of the same row of pixels are capable of heating the portions of pyroelectric material of the pixels of said row, independently of the heating elements of the pixels of the other rows.
  • the heating strips 271 each have a first end, adapted to be connected to a non-zero electrical potential, and a second end, preferably connected to ground.
  • the second ends of all the heating strips are connected together via a conductive portion 273.
  • Each charge collection macro-electrode 221 is formed by an electrically conductive strip, in contact with the portions of pyroelectric material of the pixels of said column of pixels, and separate from the electrically conductive strips forming the charge collection macro-electrodes of the other columns of pixels.
  • Each charge collection macro-electrode 221 makes it possible to measure the sum of the pyroelectric charges, generated in the same column of pixels. If only one of the heating strips 271 is activated at each instant, in each column of pixels there is only one pixel which generates pyroelectric charges. The pyroelectric charges collected by the charge collection macro-electrode 221 then relate to this single pixel. A passive addressing of the pixels of the sensor is thus achieved.
  • the charge collection electrodes of the same column of pixels are distributed, along the axis (Ox), according to a repetition pitch less than or equal to 150 ⁇ m, for example 90 ⁇ m, or 80 ⁇ m, or 50, 8 ⁇ m.
  • the heating strips 271 of the heating stage 270 are distributed here along the axis (Oy), preferably according to a repetition pitch identical to the repetition pitch of the charge collection macro-electrodes 221.
  • Each pixel of the pixel matrix is delimited laterally by the intersection between a charge collection macro-electrode 221, and a heating strip 271.
  • each pixel is delimited laterally, in planes parallel to the plane of the substrate 220 , by the intersection between the orthogonal projection of a charge collection macro-electrode 221 in such a plane, and the orthogonal projection of a heating strip 271 in this same plane.
  • Each pixel receives a single pillar 283 of the stage 280 of protection against abrasion.
  • This pillar therefore extends, in the floor 280 of protection against abrasion, inside a delimited region, in planes parallel to the plane of the substrate 220, by the intersection between the orthogonal projection of a charge collection macro-electrode 221 in such a plane, and the orthogonal projection of a heating strip 271 in this same plane.
  • the heating stage extends between the stage comprising a pyroelectric material and the protective coating against abrasion, with, where appropriate, intermediate layers between the heating stage and the stage comprising a pyroelectric material, respectively between the heating stage and the protective coating against abrasion.
  • the invention applies to any type of thermal sensor comprising pyroelectric capacitors, with or without heating elements, with separate heating elements or grouped together in heating bands.
  • the invention is not limited to detection of the active type, and also covers sensors suitable for detection of the passive type, without a heating element for heating the portions made of pyroelectric material.
  • the invention is also not limited to an arrangement of the pixels such that the lower electrode forms the charge collection electrode.
  • the collection of the pyroelectric charges could be done by the upper electrode.
  • the invention applies more particularly to sensors in which a distance between the contact surface and the plane of the upper faces of the lower electrodes of the pyroelectric capacitors is greater than or equal to 25% of the pixel pitch of the sensor, or even 50% of this pixel pitch (thick abrasion protection coating).
  • this distance remains less than or equal to said pixel pitch.
  • each pixel of the pixel matrix can comprise a plurality of pillars.
  • the sensor may include at least one reading circuit, for measuring a quantity of charges collected by a charge collection electrode, and, where appropriate, at least one heating control circuit, for sending electrical signals making it possible to heating the sensor pixels via the heating elements. It may also comprise an electronic processing circuit capable of constructing an image of a thermal pattern, from measurements made at each of the sensor pixels.
  • the thermal pattern that can be imaged by the sensor can be a papillary fingerprint, or any other pattern associated with an object having a heat capacity and a specific heat.
  • the abrasion resistance layer may be made of an electrically insulating material.
  • the abrasion protection coating then forms, as a whole, an electrically insulating coating since the electrically conductive pillars are insulated from each other by the electrically insulating material of the abrasion resistance layer. This avoids short-circuiting heating elements located directly below.
  • the protective coating against abrasion can be electrically conductive, and if necessary also ensure a protective function with regard to electrostatic discharges.
  • its electrical conductivity is sufficiently low compared to that of the heating elements not to disturb their operation, but sufficient to discharge an electrostatic discharge.
  • the pillars 483 of the protective coating against abrasion are formed by localized deposition of a metallic ink, for example using an inkjet printer.
  • An abrasion-resistant and thermally insulating material is then deposited, which is inserted between the pillars and forms the abrasion-resistant layer.
  • the abrasion resistance layer can first be deposited so that it extends without an opening above the substrate, then it can be transformed at the locations of the pillars.
  • the transformation designates here a local etching, or a local insolation which locally modifies the physical properties of the material, in particular its thermal conduction. If necessary, the method then comprises a step of producing the pillars in the engraved openings.
  • etch the abrasion resistance layer at the desired locations one can simply use a mask having openings at the desired locations of the pillars.
  • the figure 5 illustrates a variant, taking advantage of the arrangement illustrated in figures 3A to 3C , wherein the charge collecting electrodes of a same pixel column are integrally formed together in a same macro electrode, the heating elements of a same pixel row are integrally formed together in the same heating strip, and the pillars are located at the intersection between the orthogonal projection of a heating strip and the orthogonal projection of a charge collection macro-electrode.
  • a layer 585 of photosensitive material is deposited on a stack 501 comprising the substrate 510, the pyroelectric capacitors and the heating elements.
  • the layer 585 of photosensitive material is isolated from behind, that is to say from the side of the substrate 510.
  • the various elements making up the stack 501 are substantially transparent to the wavelength of the light beam d insulation 586, except the charge collection macro-electrodes and the heating strips, made of metal.
  • the power of the insolation light beam 586 is adapted so that said beam passes through the stack 501, except at the locations where a charge collection macro-electrode and a heating strip are superposed along the axis (Oz).
  • the layer 585 of photosensitive material is etched everywhere, except at these locations.
  • the material of the abrasion resistance layer is then deposited in the etched openings of the layer 585 of photosensitive material. Then we engrave the remaining portions of said layer 585 of photosensitive material, and they are filled with the material of the pillars.
  • the filling is done by screen printing, with an ink based on a metal such as silver which is deposited on the abrasion resistance layer, and scraped to bring it into the engraved openings.
  • the abrasion resistance layer advantageously consists of a material on which the ink does not adhere, so that the ink only fixes in the engraved openings.
  • the abrasion resistance layer may comprise or consist of benzo-cyclo-butene, advantageously annealed at a temperature greater than or equal to 150°C. Annealing under vacuum can be implemented to help the penetration of the ink into the engraved openings, for example at a pressure less than or equal to 10 mbar.
  • a metal can be grown from the bottom of the etched openings, from the metal of the heating strips flush with the bottom of said etched openings.
  • This variant uses a bath comprising metal particles mixed with a catalyst.
  • an upper region of the etched openings can be reserved for a thin layer of encapsulation covering and protecting the pillars situated below.
  • the abrasion resistance layer can be produced by several successive depositions of elementary layers which are superimposed on each other along the axis (Oz).
  • the figure 6 illustrates a third embodiment, using a stamp 687 whose dimples and bumps are matched to the desired positions of the pillars.
  • a full layer 688 of a metallic ink is deposited above a stack 601 comprising the substrate 610, the pyroelectric capacitors and the elements of heating.
  • the pad 687 having hollows 687A is then pressed at the desired locations of the pillars, so as to retain the ink only at the locations of these hollows 687A.
  • an anisotropic adhesive comprising metal balls, for example silver, of suitable dimensions.
  • a layer of this adhesive is deposited on a stack as described with reference to the figure 6 , then a pressure force is exerted on said layer of adhesive so as to crush the metal balls.
  • Each metal ball thus forms a pillar according to the invention.
  • the pressure force is exerted at the same time as heating which allows the glue to polymerize receiving the metal balls, which then forms the thermally insulating layer of the protective coating against abrasion.
  • a thin layer of polyimide is interposed between the layer of anisotropic adhesive and a surface for applying the pressure force, to prevent the adhesive from adhering to said application surface.
  • the metal pillars can be produced using techniques derived from that of so-called “flip chip” welding. Such welding is usually dedicated to the electrical connection between electrically conductive tracks superposed along the axis (Oz), and uses a metal ball inserted between these two tracks, along the axis (Oz). For example, an electrical insulator is deposited on a stack as described with reference to the figure 6 , then openings are engraved at the locations provided for the pillars, and these openings are filled with copper. Finally, the pillars are formed on the copper deposits by techniques of tin-lead deposition on copper.

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Claims (15)

  1. Sensor (100; 100'; 200; 200') für Thermomuster, die mehrere Pixel umfassen, die auf einem Substrat (110; 110'; 210; 210'; 410; 510; 610) angeordnet sind, wobei jedes Pixel wenigstens eine pyroelektrische Fähigkeit umfasst, die ausgebildet ist durch wenigstens einen Abschnitt aus pyroelektrischem Material, der bereitgestellt ist zwischen wenigstens einer unteren Elektrode und wenigstens einer oberen Elektrode angeordnet ist, wobei die untere Elektrode zwischen dem Substrat und dem Abschnitt aus pyroelektrischem Material angeordnet ist, wobei der Sensor eine äußere Verkleidung umfasst, bezeichnet als Abriebschutzverkleidung (180; 180'; 280; 280'), die an der Seite gegenüber dem Substrat situiert ist, dadurch gekennzeichnet, dass die Abriebschutzverkleidung (180; 180'; 280; 280') eine Schicht umfasst, bezeichnet als abriebsfeste Schicht, und eine Vielzahl von Spalten (183; 183'; 283; 483), die in der abriebsfesten Schicht (182; 182') verteilt sind, wobei die Spalten eine thermische Leitfähigkeit aufweisen, die strikt höher ist als diejenige der abriebsfesten Schicht.
  2. Sensor (100; 100'; 200; 200') nach Anspruch 1, dadurch gekennzeichnet, dass die Abriebschutzverkleidung (180; 180'; 280; 280') eine Stärke (h) aufweist, die größer als oder gleich 5 % eines Wiederholungsabstands der Pixel des Sensors (100; 100'; 200; 200') für Thermomuster ist.
  3. Sensor (100; 100'; 200; 200') nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Abriebschutzverkleidung (180; 180'; 280; 280') eine Stärke (h) aufweist, die größer als oder gleich 3 µm ist.
  4. Sensor (100') nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die Stärke der Abriebschutzverkleidung (180') größer als die oder gleich der Höhe (hA) der Spalten (183') ist, wobei die Stärke und die Höhe jeweils gemäß einer Achse definiert sind, die orthogonal zur Ebene des Substrats (110') verläuft, und dadurch, dass eine Differenz zwischen der Stärke (h) der Verkleidung zum Abriebschutz und der Höhe (hA ) der Spalten geringer als oder gleich 5 % der Höhe (hA ) der Spalten ist.
  5. Sensor (100; 100'; 200; 200') nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass jedes Pixel des Sensors einen Abschnitt der Abriebschutzverkleidung (180; 180'; 280; 280') umfasst, wobei der Abschnitt eine einzelne Spalte (183; 183'; 283; 483) umfasst.
  6. Sensor (100; 100'; 200; 200') nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass die Spalten (183; 183'; 283; 483) der Abriebschutzverkleidung eine thermische Leitfähigkeit aufweisen, die mindestens zehn Mal größer ist als diejenige der abriebsfesten Schicht (182; 182').
  7. Sensor (100; 100' 200; 200') nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass die Spalten (183; 183'; 283; 483) der Abriebschutzverkleidung ein Metall oder Graphen umfassen.
  8. Sensor (100; 100'; 200; 200') nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass die abriebsfeste Schicht (182; 182') ein Material auf Basis von Benzo-Cyclo-Buten umfasst.
  9. Sensor (100; 100'; 200; 200') nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass die abriebsfeste Schicht (182; 182') aus elektrisch isolierendem Material besteht.
  10. Sensor (200; 200') nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass die Pixel des Sensors in Zeilen und in Spalten angeordnet sind, dadurch, dass jedes Pixel weiter ein Heizelement umfasst, das in der Lage ist, den Abschnitt aus pyroelektrischem Material des Pixels durch Joule-Effekt zu erhitzen, und dadurch, dass:
    - die Heizelemente einer gleichen Pixelreihe zusammen einstückig zu einem einzigen Heizstreifen (271) geformt sind;
    - in jedem Pixel eine von der oberen Elektrode und der unteren Elektrode eine Ladungssammelelektrode bildet, und die Ladungssammelelektroden einer einzelnen Pixelspalte zusammen einstückig zu einer Makro-Ladungssammelelektrode (221) ausgebildet sind; und
    - jede Spalte (283) der Abriebschutzverkleidung sich durch einen Schnittbereich zwischen einer orthogonalen Projektion eines Heizbandes (271) und einer orthogonalen Projektion einer Makro-Ladungssammelelektrode (221) erstreckt, in einer Ebene parallel zur Ebene des Substrats.
  11. Sensor nach einem der Ansprüche 1 bis 10, dadurch gekennzeichnet, dass die Spalten (483) der Abriebschutzverkleidung jeweils aus mehreren elementaren Zeilen (483A, 183B, 483C) konstituiert sind, die gemäß einer Achse orthogonal zur Ebene des Substrats übereinandergelegt sind.
  12. Verfahren zur Herstellung der Abriebschutzverkleidung (180; 180'; 280; 280') eines Sensors (100; 100'; 200; 200') nach einem der Ansprüche 1 bis 11, dadurch gekennzeichnet, dass ein Schritt der Herstellung der Spalten (183; 183'; 283; 483) die Verwendung einer Tinte auf der Basis von Partikeln von Metall und/oder von Graphen umfasst.
  13. Verfahren nach Anspruch 12, dadurch gekennzeichnet, dass der Schritt der Herstellung der Säulen (483) eine oder mehrere lokalisierte Tintenablagerungen mithilfe eines Tintenstrahldruckers umfasst.
  14. Verfahren nach Anspruch 12, dadurch gekennzeichnet, dass die Herstellung der Abriebschutzverkleidung (180; 180'; 280; 280') die folgenden Schritte umfasst:
    - Herstellung der abriebsfesten Schicht (182; 182'), ausgestattet mit durchgehenden Öffnungen, verteilt gemäß einer Ebene parallel zur Ebene des Substrats; und
    - Füllen der durchgehenden Öffnungen mit derTinte auf Basis von Partikeln von Metall und/oder von Graphen.
  15. Verfahren nach Anspruch 14 zum Herstellen eines Sensors (200; 200') nach Anspruch 10, dadurch gekennzeichnet, dass es die folgenden Schritte umfasst:
    - Ablagern einer photosensiblen Schicht (585) auf einer Stapelung (501), die das Substrat, die pyroelektrischen Fähigkeiten und die Heizelemente umfasst;
    - Beleuchtung der photosensiblen Schicht (585) ab der Seite des Substrats (510) mithilfe eines Gravurlichtstrahls (586), dessen Kraft dafür ausgelegt ist, die Stapelung zu durchdringen, außer dort, wo ein Heizband (271) und eine Makro-Ladungssammelelektrode (221) übereinandergelegt sind; und
    - Füllen der gravierten Öffnungen in der photosensiblen Schicht mit dem Material der abriebsfesten Schicht.
EP19203896.6A 2018-10-19 2019-10-17 Pyroelektrischer sensor mit verbesserter verkleidung des widerstands gegen abrieb Active EP3640615B1 (de)

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FR1859680A FR3087533B1 (fr) 2018-10-19 2018-10-19 Capteur pyroelectrique avec revetement ameliore de resistance contre l'abrasion.

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FR2959657B1 (fr) 2010-05-06 2012-06-22 Commissariat Energie Atomique Transducteur de variation temporelle de température, puce électronique incorporant ce transducteur et procédé de fabrication de cette puce
FR3044408B1 (fr) * 2015-11-30 2019-06-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Capteur de motif thermique a capacite pyroelectrique horizontale
FR3054711A1 (fr) * 2016-07-29 2018-02-02 Commissariat A L'energie Atomique Et Aux Energies Alternatives Capteur de motif thermique actif adapte pour des grands pixels
FR3054698B1 (fr) * 2016-07-29 2018-09-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Capteur de motif thermique actif comprenant une matrice passive de pixels

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US20200124482A1 (en) 2020-04-23
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EP3640615A1 (de) 2020-04-22

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