EP3587615A1 - Method and device for forming layers or bodies in space - Google Patents

Abstract

The invention relates to a method for the production of layers or bodies at a location which has a lower natural ambient pressure compared to the conditions on earth, a powder aerosol being generated from a carrier gas and a powder, which under the influence of a pressure difference on a Substrate (A5) is directed and is deposited there in layers, the ambient pressure of the location prevailing at the location of the deposition. A device for carrying out the method according to the invention is also the subject of the patent application.

Description

Technical field

The invention relates to a method and a device for producing layers or bodies in space, in particular on the earth's moon, another non-earthly celestial body (planets, meteorites) or an artificial satellite (e.g. a space station in an orbit in space).

Technical background

A sintering temperature above 1000 ° C. is usually necessary for the production of ceramic layers or bodies. As a result, an integration or combination of ceramics with low-melting plastics, glasses or metals is hardly or not possible [1]. Another difficulty is represented by ceramics with a high covalent bond fraction. In this case, the ceramic may decompose prior to compression, which means that it is not possible or only with considerable effort to produce dense components or layers [2].

Under conditions in space (especially on the earth's moon, another non-terrestrial celestial body, e.g. planets, meteorites or an artificial satellite, e.g. a space station in an orbit in space), not only do additional environmental problems arise, but naturally such materials are also used that you will find on site. Methods are therefore required that are as compatible as possible with such materials, so that complex processes for pretreating or converting the materials found are unnecessary.

In addition, methods are to be aimed at that are optimized with regard to the mass of the equipment required for carrying them out and with regard to energy consumption.

The method of aerosol and vacuum-based layer deposition is only known for terrestrial applications [3]. The process has recently been referred to in German as "aerosol-based cold deposition" or "aerosol deposition method", or "ADM" for short. Here, layers that are dense at room temperature can be deposited directly from the starting powders onto a wide variety of substrate materials. These are characterized both by firm adherence to the substrate, high tightness and material properties that are similar to those of the starting powders used.

The basis of the method is that in a corresponding device (see Fig. 1 ) Particles 5 are accelerated and directed onto a substrate 6 to be coated. The high kinetic energy of the particles 5 presumably leads [1] to a local pressure and temperature increase as well as to a plastic deformation and to the breaking of the particles upon impact with the substrate 6. This in turn ensures appropriate adhesion between the particles as well as between the particles and the substrate. According to the current state of knowledge [1], the process of layer deposition begins with the formation of an anchoring layer on the substrate 6 and continues with the continuous build-up and densification of the layer. In English-language literature, the process of this layer formation is often referred to as "Room Temperature Impact Consolidation" (RTIC) [1].

State of the art with regard to the construction of a device for aerosol-based powder separation under normal conditions (terrestrial applications)

The main components of a device for aerosol-based cold deposition of powders according to the prior art are, as in Fig. 1 a vacuum chamber 1, an evacuation device 2, an aerosol generating device 3 and a nozzle apparatus 4. Publications regarding the system structure can be found, for example, in the US 7,553,376 B2 , The principle of a system for aerosol-based cold separation of powders is based on the fact that a vacuum is created within the vacuum chamber 1 via an evacuation device 2 [5]. The aerosol-generating device 3 mixes a gas, for example oxygen or nitrogen, with particles 5 and thus produces a powder aerosol [4]. As a result of the pressure drop occurring between the aerosol generating device 3 and the vacuum chamber 1, the particles are transported from the aerosol generating device 3 into the vacuum chamber 1 via a connecting line 4.1. The connecting line 4.1 opens into a nozzle 4.2, in which the particles 5 are further accelerated by changing the cross section. In the vacuum chamber 1, the particles 5 meet a moving substrate 6 and form a dense scratch-resistant film [1] there, even though no temperature treatment is necessary.

Disadvantages of the prior art

• High mass of the vacuum chamber 1 and the evacuation device 2
• High energy requirement through the evacuation device 2.

Underlying task

The invention is based on the object of a method for producing layers or bodies in space (ie under different atmospheric and / or gravity and / or temperature conditions compared to the conditions on earth, in particular on the earth's moon, another non-earthly celestial body , e.g. planets, meteorites, or an artificial satellite (e.g. a space station in an orbit in space), which can be operated economically there.

This object is achieved with the method according to claim 1. Advantageous embodiments and a device for carrying out the method according to the invention are the subject of further claims.

Advantages of the invention

• Utilization of the ADM for non-terrestrial applications under changed atmospheric, gravity and temperature conditions.
• Lower mass, since vacuum chamber 1 and evacuation device 2 are omitted
• Lower energy consumption, since the evacuation device 2 is omitted
• Allows integration as a payload in an aircraft or spacecraft
• Enables the direct processing of found resources during a space mission (also known as "in-situ resource utilization") e.g. for the production of protective or functional layers in large thickness variations
• Utilization of existing infrastructures already in a spacecraft or a payload, such as receiving devices for powder, gas storage, gas pipes or nozzles.
• The invention enables moon dust (such as regolith) to be used in downstream processes.
• Invention converts moon dust and / or meteroite dust and / or asteroid dust and / or dust on other planets into defined coatings and 3-dimensional structures.
• Low-vibration / vibration-free operation.
• Gas recovery to increase efficiency or to reduce contamination of the atmosphere by foreign gases.
• The dryness typically present on the moon or in space leads to optimized generation of the powder aerosol. On earth, powder handling using a glove box with very low humidity is often necessary; Any work under normal humidity causes the powder to adsorb water, which worsens the separation result.
• Generation of the powder aerosol under conditions of low gravity is easier and more efficient than under normal conditions on earth.
• The most suitable gases have a high speed of sound. On the moon or in space (generally in a vacuum), hydrogen is a suitable carrier gas. There are no safety concerns regarding the use of hydrogen due to the lack of oxygen. This enables the use of hydrogen as carrier gas with the highest speed of sound without additional effort.
• The method according to the invention can be used in particular for the production of ceramic or metallic layers or bodies.

• Fig. 1 eine Prinzipskizze zur terrestrischen Durchführung eines Verfahrens zur aerosolbasierten Kaltabscheidung gemäß Stand der Technik, wie in der Beschreibungseinleitung erläutert;
• Fig. 2 eine erste Ausführung einer erfindungsgemäßen Vorrichtung zur Herstellung von Schichten oder Körpern im Weltall;
• Fig. 3 eine weitere Ausführung einer erfindungsgemäßen Vorrichtung, mit einer semipermeablen Substratabschirmung, die das Substrat vollständig umschließt;
• Fig. 4 eine weitere Ausführung einer erfindungsgemäßen Vorrichtung, mit einer impermeablen Substratabschirmung und Trägergasrückführung;
• Fig. 5 eine weitere Ausführung einer erfindungsgemäßen Vorrichtung, mit einer impermeablen Substratabschirmung, ausgebildet als Faltenbalg;
• Fig. 6 eine weitere Ausführung einer erfindungsgemäßen Vorrichtung mit vorteilhafter Aerosolerzeugung;
• Fig. 7 eine weitere Ausführung einer erfindungsgemäßen Vorrichtung, bei der das Substrat unmittelbar hinter dem Auslassquerschnitt der Aerosol-erzeugenden Vorrichtung angeordnet ist;
• Fig. 8 eine weitere Ausführung einer erfindungsgemäßen Vorrichtung, bei der die Aerosol-erzeugende Vorrichtung mit einer semipermeablen Trennwand zur verbesserten Gasverwirbelung versehen ist;
• Fig. 9 eine weitere Ausführung einer erfindungsgemäßen Vorrichtung, mit einem rotierenden Element, das den Transport des Pulvers aus dem Pulverreservoir in die Aerosol-erzeugende Einheit fördert;
• Fig. 10 eine weitere Ausführung einer erfindungsgemäßen Vorrichtung mit mehreren Pulverreservoiren;
• Fig. 11 eine weitere Ausführung einer erfindungsgemäßen Vorrichtung mit mehreren Düsen und mehreren Aerosol-erzeugenden Einheiten;
• Fig. 12 eine weitere Ausführung einer erfindungsgemäßen Vorrichtung mit einer vor dem Substrat angeordneten Beschichtungsmaske;
• Fig. 13 eine weitere Ausführung einer erfindungsgemäßen Vorrichtung mit einem Substratwechsler.

The invention is explained in more detail on the basis of concrete exemplary embodiments with reference to figures. Show it:

• Fig. 1 a schematic diagram for the terrestrial implementation of a method for aerosol-based cold deposition according to the prior art, as explained in the introduction;
• Fig. 2 a first embodiment of an apparatus according to the invention for the production of layers or bodies in space;
• Fig. 3 a further embodiment of a device according to the invention, with a semi-permeable substrate shield which completely surrounds the substrate;
• Fig. 4 a further embodiment of a device according to the invention, with an impermeable substrate shielding and carrier gas return;
• Fig. 5 a further embodiment of a device according to the invention, with an impermeable substrate shield, designed as a bellows;
• Fig. 6 a further embodiment of a device according to the invention with advantageous aerosol generation;
• Fig. 7 a further embodiment of a device according to the invention, in which the substrate is arranged directly behind the outlet cross section of the aerosol-generating device;
• Fig. 8 a further embodiment of a device according to the invention, in which the aerosol-producing device is provided with a semi-permeable partition for improved gas swirling;
• Fig. 9 a further embodiment of a device according to the invention, with a rotating element which promotes the transport of the powder from the powder reservoir into the aerosol-generating unit;
• Fig. 10 a further embodiment of a device according to the invention with several powder reservoirs;
• Fig. 11 a further embodiment of a device according to the invention with a plurality of nozzles and a plurality of aerosol-generating units;
• Fig. 12 a further embodiment of a device according to the invention with a coating mask arranged in front of the substrate;
• Fig. 13 a further embodiment of a device according to the invention with a substrate changer.

• Trägergasreservoir A1 für die Aufnahme des Trägergases für die Aerosolerzeugung;
• Gasdruck- und Gasflussregler A2 zur Steuerung des Gasdrucks und Gasflusses;
• Aerosol-erzeugende Einheit A3 zur Erzeugung des Aerosols aus dem Trägergas und einem Pulver;
• Düsenapparatur A4 zur Beschleunigung des erzeugen Aerosols;
• fest installierter oder verfahrbarer Substrathalter mit Substrat A5;
• Substratabschirmung A6, zur Abschirmung des Substrats von den übrigen Elementen der Vorrichtung im Sinne eines mechanischen Schutzes. Diese umschließt in dieser Ausführung das Substrat nicht vollständig, sondern nur teilweise, nämlich in Richtung auf die übrigen Elemente der erfindungsgemäßen Vorrichtung. Das Substrat A5 befindet sich somit frei in der die Vorrichtung umgebenden Atmosphäre;
• Pulverreservoir A7, in der das Pulver für die Aerosolerzeugung gespeichert wird;
• Thermische Steuereinheit A8;
• Kommando- und Datenverarbeitungssystem A9;
• Elektrischer Energiespeicher A10 zur Strom- und Spannungsversorgung der Vorrichtung;
• Rahmenstruktur mit thermischem Abschirm- und Isolationsmaterial A11.

Fig. 2 shows a first embodiment of the device according to the invention. In particular, it comprises the following components:

• Carrier gas reservoir A1 for receiving the carrier gas for aerosol generation;
• Gas pressure and gas flow regulator A2 for controlling the gas pressure and gas flow;
• Aerosol generating unit A3 for generating the aerosol from the carrier gas and a powder;
• Nozzle apparatus A4 to accelerate the aerosol generated;
• permanently installed or movable substrate holder with substrate A5;
• Substrate shield A6, for shielding the substrate from the other elements of the device in the sense of mechanical protection. In this embodiment, this does not completely surround the substrate, but only partially, namely in the direction of the other elements of the device according to the invention. The substrate A5 is thus freely in the atmosphere surrounding the device;
• Powder reservoir A7, in which the powder for aerosol production is stored;
• Thermal control unit A8;
• Command and data processing system A9;
• Electrical energy storage device A10 for supplying current and voltage to the device;
• Frame structure with thermal shielding and insulation material A11.

The carrier gas reservoir A1 is preferably a closed container and stores any gas or gas mixture in the pressure range from 0.5 to 300 bar. Hydrogen, helium, nitrogen or oxygen is preferably used as such a carrier gas for the aerosol to be generated. The carrier gas reservoir A1 advantageously contains at least one pressure sensor and at least one controllable outlet valve (actuator). The high pressure gas line A1.1 connects the gas outlet valve to the gas pressure and gas flow regulator A2. The latter A2 has at least one gas inlet and one gas outlet. Optionally, the gas pressure and gas flow regulator A2 have a plurality of gas outlets which are connected to different subunits of the coating device according to the invention. A specific exemplary embodiment of this is shown in FIG Fig. 6 and 7 explained.

Gas pressure and gas flow controller A2 advantageously includes a pressure sensor or a flow sensor and a finely adjustable outlet valve (actuator) for each gas outlet, which has a specific gas pressure or gas flow in the range 0.001 to 100 bar or 0.01 to 1000 NI / min (standard liters per minute ) generated. The gas pressure and gas flow regulator A2 is connected to the aerosol generating unit A3 via at least one gas low pressure line A2.1. The aerosol generating device A3 mixes the carrier gas with powder from the powder reservoir A7 and thus generates a powder aerosol.

The powder reservoir A7 advantageously comprises a gas-tight lock A7.3 for loading with powder from outside the device and a powder level sensor. The powder feed line A7.1 leads powder from the powder reservoir A7 to the aerosol generating unit A3. The low-pressure aerosol line A3.1 directs the generated aerosol from the aerosol-generating unit A3 into the nozzle A4. In the nozzle A4, the aerosol is accelerated by changing the cross section and directed onto the substrate A5. There it forms a scratch-resistant functional layer. The device according to the invention optionally comprises a plurality of individual nozzles (see Fig. 11 ) with controllable change in cross-section. Optionally, the nozzle shape can be made convergent, divergent or convergent-divergent.

The substrate A5 is directly connected to the surroundings of the device according to the invention, in which there is a reduced pressure, typically vacuum (vacuum here is to be understood as a pressure p <0.1 bar). The position of the substrate A5 can be regulated in three dimensions using an XYZ traversing mechanism. The substrate shield A6 separates the sample area from the other elements of the device according to the invention. The nozzle is directly connected to the substrate shield A6. Alternatively, the substrate shield A6 can also comprise a feedthrough or opening through which the nozzle A4 is inserted.

The thermal control unit A8 comprises an electronic regulating and control unit and an electronic data memory. The thermal control unit A8 is connected to a temperature sensor and heating element network A8.1, which in each case comprises at least one temperature sensor and one heating element including electrical supply lines per subunit A1 - A5. The electronic data memory stores temperature values and control parameters, which are saved and read out via a direct data connection to the command and data processing system A9. The command and data processing system A9 contains an electronic regulation and control unit as well as an electronic data memory, in which control and regulation parameters are stored and read out via an external data interface A9.2. The signals of all sensors of subunits A1, A2, A3, A4, A5, A7, A8, A10 are transmitted to A9 via data network A9.1 and all control parameters from A9 to actuators of subunits A1, A2, A3, A4, A5, A7, A8, A10 transmitted. The electrical energy store A10 supplies the assemblies A1, A2, A3, A4, A5, A6, A7, A8, A9, A10 with an electrical direct voltage via the electrical supply network A10.1. The electrical energy storage device A10 is charged through the external interface A10.2. The frame structure A11 forms a torsionally rigid installation space in which all assemblies A1 - A10 as well as thermal shielding and insulation material are integrated and fastened.

Benefits:

Since the coating takes place under ambient conditions (i.e. reduced pressure, in particular vacuum conditions), there is no effort for the evacuation of the substrate. The substrate can, as in Fig. 2 shown, placed freely in the area.
The structure shown also enables integration as a payload in an aircraft or spacecraft. The lock A7.3 in the powder container A7 enables loading in a non-terrestrial environment. This enables the direct processing of found resources during a space mission, for example for the production of protective or functional layers, and an improved layer formation. In addition, this enables the processing of extremely dry powders such as moon dust and / or meteroite dust and / or dust on other planets that absorb moisture during terrestrial processing. This results in a better layer formation during the extraterrestrial processing of these powders.

The Fig. 3 shows a further embodiment of the coating device according to the invention. Opposite the one in the Fig. 2 shown embodiment, it comprises a substrate shield A6 which completely surrounds the substrate. The substrate shield A6 is semi-permeable in sections (dash-dotted line). In this context, semi-permeable means that the substrate shielding is permeable to the carrier gas, but impermeable to the powder. This could be achieved, for example, by microperforation. Where the substrate shield delimits the inside of the device from the inside of the substrate shield (solid line), the substrate shield is impermeable to prevent gas from entering the device. The substrate shield A6 can be designed as a flexible and / or stretchable and / or foldable and / or rigid membrane or film which is connected to and connected to the nozzle apparatus.

Benefits:

No release of powder particles into the surroundings of the coating device according to the invention. Collection and reuse of excess powder is made possible.

At the in Fig. 4 shown embodiment, the substrate shield A6, which completely surrounds the substrate, is impermeable. Both carrier gas and powder particles cannot penetrate through the substrate shield and are held within the substrate shield. The substrate shield A6 is designed as a rigid partition and can be coupled to a pump A14 in order to transport the carrier gas back to the carrier gas reservoir A1 via lines A6.2 and A14.1 for gas recovery. A semipermeable filter device A6.1 can advantageously be present (impenetrable for powder), so that no powder can penetrate into the pump A14.

Although the impermeable substrate shield does not allow an exchange with the environment, the same pressure level prevails inside and outside the substrate shield, namely the local ambient pressure (typically vacuum). The impermeable So substrate shielding does not have to be designed as a pressure-resistant container.

Another variation of the substrate shield is in the Fig. 5 shown. Here, the substrate shield is designed as a flexible bellows, which interacts with a lifting mechanism for contraction of the substrate shield. This enables the carrier gas to be returned to the carrier gas reservoir via an adjustable line A6.2. A separate filter device can also be used here (see A6.1 in Fig. 4 ) be integrated to retain the powder within the substrate shield during gas recovery.

An opening mechanism can optionally be integrated in the substrate shield in order to be able to remove the excess powder after gas recovery.

Benefits:

No release of carrier gas and powder particles in the vicinity of the coating device, for example to prevent contamination of the atmosphere with foreign gas. Reuse of the carrier gas for aerosol generation is made possible.

Fig. 6 shows a further embodiment of a device according to the invention with advantageous aerosol generation. In this embodiment, the aerosol generating unit A3 comprises an aerosol generating nozzle A3.3, which has a gas inlet with a reduced cross-section to the interior of the nozzle, a powder inlet with a reduced cross-section to the interior of the nozzle and an aerosol outlet with an enlarged cross-section to the nozzle outlet.
The powder reservoir A7 is connected to the powder inlet of the aerosol generating nozzle A3.3. The gas low pressure line A2.1 is connected to the gas inlet of the aerosol generating nozzle A3.3.

The aerosol generating unit A3 has a second gas supply A3.2 which is connected to the aerosol outlet of the aerosol generating nozzle A3.3. The pressure difference between the gas inlet and the aerosol outlet of the aerosol generating nozzle A3.3 and between the inlet and outlet of the nozzle A4 can thus be regulated.

Furthermore, the powder reservoir A7 has a separate gas supply A7.2, which is used to regulate the powder entry into the aerosol generating nozzle A3.3.

Benefits:

• durch die Querschnittsreduzierung im Inneren der Aerosolerzeugungsdüse A3.3 eine erhöhte Gasgeschwindigkeit und Aerosolverwirbelung erzeugt wird;
• die Druckdifferenz und Gasgeschwindigkeit zwischen Gaseinlass und Aerosolauslass der Aerosolerzeugungsdüse A3.3 durch die Gaszuleitung A3.2 geregelt und optimiert wird;
• die Druckdifferenz zwischen Ein- und Auslass der Düse A4 durch die Gaszuleitung A3.2 geregelt und optimiert wird;
• eine optimale Dosierung des Pulvereintrags vom Pulverreservoir A7 in den Gasstrom innerhalb der Aerosolerzeugungsdüse A3.3 durch die separate Gaszuführung A7.2 eingestellt wird.

Improved aerosol generation by the fact that

• by reducing the cross section inside the aerosol generating nozzle A3.3, an increased gas velocity and aerosol swirl is generated;
• the pressure difference and gas velocity between the gas inlet and aerosol outlet of the aerosol generating nozzle A3.3 is regulated and optimized by the gas supply line A3.2;
• the pressure difference between the inlet and outlet of the nozzle A4 is regulated and optimized by the gas supply line A3.2;
• an optimal metering of the powder entry from the powder reservoir A7 into the gas flow within the aerosol generating nozzle A3.3 is set by the separate gas supply A7.2.

Fig. 7 shows a further embodiment of a device according to the invention, in which the substrate is arranged directly behind the outlet cross section of the aerosol-generating device. Compared to the device after Fig. 6 the aerosol line A3.1 and the nozzle 4 and the second gas supply A3.2 are omitted here.

Advantage:

The aerosol generating unit can be used directly to accelerate the aerosol and thus for spraying, without the need for an additional nozzle. Due to the smaller number of components, a more compact design with lower mass can be achieved with this version.

As an alternative to that in the Fig. 7 Structure of the aerosol generating unit shown is in Fig. 8 a further embodiment of an aerosol generating unit is shown. The interior of the aerosol-producing unit A3 is provided with a semi-permeable partition A3.4 for improved gas swirling. This is located in the carrier gas stream, preferably transversely to its direction of flow. The Partition A3.4 is impermeable to particles and can be porous. A frit can advantageously be used.

Advantage:

Improved aerosol generation in that the semi-permeable partition A3.4 inside the aerosol-generating unit A3 generates an increased gas and thus aerosol swirl

Fig. 9 shows a further embodiment of a device according to the invention, with a rotating element A3.5, for example a brush, which promotes the transport of the powder from the powder reservoir A7 into the aerosol-generating unit A3. The rotating element A3.5 is advantageously arranged in the area of the outlet of the powder reservoir A7 in the transition to the aerosol-generating unit. The powder can advantageously be present in compact form in the powder reservoir A7 and can be moved towards the rotating element by means of a feed device.

Advantage:

Improved aerosol generation in that the movement of the rotating element and the shear flow over it generate an increased gas and aerosol swirl.

Fig. 10 shows a further embodiment of a device according to the invention with a plurality of powder reservoirs A7 connected in parallel, each feeding the same aerosol-generating unit A3 (via the collecting line A7.1). Valves A7.4 on the individual powder reservoirs A7 can each be switched on or off individually.

Benefits:

Generation of any layer sequences on the substrate by filling the powder reservoirs A7 with different powder materials and depositing a single layer of the layer sequence from one powder material each.
Generation of mixed layers by mixing different powder materials in the aerosol generating device A3.
Fig. 11 shows a further embodiment of a device according to the invention with a plurality of nozzles A4 and a plurality of aerosol-generating units A3.
Any number of nozzles A4 can be positioned in front of the substrate A5.
Each nozzle apparatus A4 is fed by a separate aerosol generating unit A3. Each of these aerosol-generating units is advantageously connected to a separate powder reservoir.
In a further embodiment (not shown), a plurality of nozzles can also be fed by only one aerosol-generating unit. In a further advantageous embodiment, the nozzles are positioned so close to one another that their outlet cross sections practically form a common outlet cross section.

Benefits:

Generation of any layer sequences on the substrate from different powder materials by alternating operation of a single nozzle without cross-contamination between different powders during the aerosol generation. Generating layers of any width from one or different aerosols by interconnecting any number of nozzle units is made possible.

Fig. 12 shows a further embodiment of a device according to the invention with a coating mask A12 positioned in front of the substrate A5. The mask A12 can also be designed to be movable.

Advantage:

Deposition of 3-dimensional structures on the substrate.

Fig. 13 shows a further embodiment of a device according to the invention with a substrate changer A5.1. Several substrates A5 are arranged on the substrate changer. The substrate changer 5.1 is, for example, rotatable (turret version). In the example shown, it has a cross section in the form of a regular pentagon, so that five substrates can be applied, which can be coated alternately over time.

In a particularly advantageous embodiment, the substrate changer is designed in such a way that it or the individual substrates can be decoupled and transferred to a transport device, e.g. for subsequent on-site analytical investigations or return to Earth.

Alternatively, several substrates can be positioned on a table that can be moved in XYZ. In a further alternative embodiment, a substrate ring can also be used.
In a further embodiment, a substrate belt, on which a plurality of substrates are arranged, is used, which is guided over a roller device.

Advantage:

Several substrates can be coated in immediate succession (without additional conversions) and / or removal and / or subsequent examinations are made possible without the coating of the other substrates being delayed.

literature

1. [1] J. Akedo: Room temperature impact consolidation (RTIC) of fine ceramic powder by aerosol deposition method and applications to microdevices, J. Therm. Spray Tech., 17, 181-198 (2008), doi: 10.1007 / s11666-008-9163-7
2. [2] H. Salmang, H. Scholze: Ceramics, 7th ed, Springer-Verlag, Berlin Heidelberg (2007), p. 857-859, 906, ISBN 3-540-63273-5
3. [3] J. Akedo, M. Lebedev: Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb (Zr52 / Ti48) O3) Thick Films Deposited by Aerosol Deposition Method, Jpn. J. Appl. Phys., 38, 5397-5401 (1999), doi: 10.1143 / JJAP.38.5397
4. [4] K. Sahner, M. Kaspar, R. Moos: Assessment of the novel aerosol deposition method for room temperature preparation of metal oxide gas sensor films, Sens. Actuators. B: Chemical, 139, 394-399 (2009), doi: 10.1016 / j.snb.2009.03.011
5. [5] M. Schubert, J. Exner, R. Moos: Influence of carrier gas composition on the stress of Al2O3 coatings prepared by the aerosol deposition method, Materials, 7, 5633-5642 (2014), doi: 10.3390 / ma7085633

Claims (22)

Process for the production of layers or bodies at a location which has a lower natural ambient pressure than the conditions on earth, characterized in that a powder aerosol is produced from a carrier gas and a powder, which under the influence of a pressure difference on a substrate (A5) is directed and deposited there in layers, the ambient pressure of the location prevailing at the location of the deposition. A method according to claim 2, characterized in that the powder aerosol is additionally accelerated by means of a nozzle (A4) before being deposited. Method according to one of the preceding claims, characterized in that the method is carried out on the earth's moon, another non-earthly celestial body or an artificial satellite. A method according to claim 3, characterized in that the powder is a powder found on the earth's moon or another non-earthly celestial body, or is generated from a material found there. Method according to one of the preceding claims, characterized in that hydrogen, helium, nitrogen or oxygen is used as the carrier gas. Device for carrying out the method according to one of the preceding claims, characterized by : - a carrier gas reservoir (A1), - a powder reservoir (A7), an aerosol generating unit (A3) which generates a powder aerosol from the carrier gas of the carrier gas reservoir (A1) and powder from the powder reservoir (A7), - At least one substrate (A5) on which the powder aerosol generated in the aerosol generating unit (A3) is deposited. Device according to claim 6, characterized in that a nozzle (A4) is provided for the additional acceleration of the aerosol. Apparatus according to claim 6 or 7, characterized in that a substrate shield (A6) is present which shields the substrate (A5) from the other elements of the device. Apparatus according to claim 8, characterized in that the substrate shield (A6) is connected to the nozzle (A4). Apparatus according to claim 8 or 9, characterized in that the substrate shield (A6) only partially surrounds the substrate (A5). Device according to one of claims 8 or 9, characterized in that the substrate shield (A6) completely surrounds the substrate (A5). Apparatus according to claim 11, characterized in that the substrate shield (A6) has semi-permeable properties in that it is permeable to the carrier gas, but impermeable to the powder. Device according to claim 11, characterized in that the substrate shield (A6) has impermeable properties in that it is impermeable to the carrier gas and impermeable to the powder. Device according to one of claims 11 to 13, characterized in that the substrate shield (A6) is flexible or stretchable or foldable or rigid. Device according to claim 13, characterized in that the substrate shield (A6) is flexible or stretchable or foldable and is equipped with a mechanism (A13) for contraction of the substrate shield (A6) in order to transport the carrier gas back into the carrier gas reservoir (A1) enable. Apparatus according to claim 13, characterized in that the substrate shield (A6) is rigid and is equipped with a pump (A12) in order to enable the carrier gas to be transported back into the carrier gas reservoir (A1). Apparatus according to claim 16, characterized in that in the interior of the substrate shield (A6) there is a semipermeable filter device (A6.1) which is permeable to the carrier gas and impermeable to the powder in order to prevent the carrier gas from being transported back into the carrier reservoir (A6). prevent powder from entering the pump (A12). Device according to one of the preceding claims 6 to 17, characterized in that the aerosol-generating device (A3) contains an aerosol generating nozzle (A3.3) which has a gas inlet with a cross-section reduction in the flow direction of the carrier gas, a powder inlet with a cross-section reduction in the flow direction of the powder and comprises an aerosol outlet with cross-sectional widening in the flow direction of the aerosol. Apparatus according to claim 18, characterized in that a separate gas supply (A7.2) is provided on the powder reservoir (A7) to regulate the powder entry into the aerosol generating nozzle (A3.3). Device according to one of the preceding claims 6 to 19, characterized in that in the aerosol generating unit (A3) in the flow path of the carrier gas there is a semipermeable partition wall (A3.4) which is permeable to the carrier gas and impermeable to the Is powder and produces increased gas turbulence. Device according to one of the preceding claims 6 to 20, characterized in that a rotating element (A3.5) is present which promotes the transport of the powder from the powder reservoir (A7) into the aerosol-generating unit (A3), the powder is present in compact form in the powder reservoir (A7) and is transported into the effective area of the rotating element (A3.5) by means of a feed device. Device according to one of the preceding claims 6 to 21, characterized in that a plurality of substrates (A5) are positioned on a substrate changing device (A5.1).

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