EP3562587A2 - Procédé de production de structures de bn de haute cristallinité et de haute pureté à des températures modérées - Google Patents

Procédé de production de structures de bn de haute cristallinité et de haute pureté à des températures modérées

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Publication number
EP3562587A2
EP3562587A2 EP17910509.3A EP17910509A EP3562587A2 EP 3562587 A2 EP3562587 A2 EP 3562587A2 EP 17910509 A EP17910509 A EP 17910509A EP 3562587 A2 EP3562587 A2 EP 3562587A2
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EP
European Patent Office
Prior art keywords
substance
mixture
gas
substrate
nanostructures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP17910509.3A
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German (de)
English (en)
Inventor
Mustafa Baysal
Kaan BILGE
Melih Papila
Yuda Yürüm
Cinar ÖNCEL
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Sabanci Universitesi
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Sabanci Universitesi
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Publication date
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Publication of EP3562587A2 publication Critical patent/EP3562587A2/fr
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides
    • C23C16/342Boron nitride
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/02Boron or aluminium; Oxides or hydroxides thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/78Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with alkali- or alkaline earth metals
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00Catalysts, in general, characterised by their form or physical properties
    • B01J35/20Catalysts, in general, characterised by their form or physical properties characterised by their non-solid state
    • B01J35/23Catalysts, in general, characterised by their form or physical properties characterised by their non-solid state in a colloidal state
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00Catalysts, in general, characterised by their form or physical properties
    • B01J35/50Catalysts, in general, characterised by their form or physical properties characterised by their shape or configuration
    • B01J35/58Fabrics or filaments
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02Impregnation, coating or precipitation
    • B01J37/0238Impregnation, coating or precipitation via the gaseous phase-sublimation
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/064Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
    • C01B21/0641Preparation by direct nitridation of elemental boron
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/01Particle morphology depicted by an image
    • C01P2004/03Particle morphology depicted by an image obtained by SEM
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/01Particle morphology depicted by an image
    • C01P2004/04Particle morphology depicted by an image obtained by TEM, STEM, STM or AFM
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/10Particle morphology extending in one dimension, e.g. needle-like
    • C01P2004/13Nanotubes

Definitions

  • the present invention relates to a catalyst for use in production of elongate microstructures and/or nanostructures substantially comprising BN, and a method for obtainment of such microstructures and/or nanostructures at low temperature.
  • boron nitride nanotubes have gained greatest attention after carbon nanotubes.
  • boron nitride nanotubes are analogue to carbon nanotubes.
  • boron nitride nanotubes have a higher chemical stability and higher thermal stability (resistant to oxidation up to 1100°C).
  • Boron nitride (BN) is piezoelectric, neutron shielding, and incomparably more hydrophobic compared to carbon nanotubes.
  • boron nitride nanotubes with their partial ionic characteristics are electrically non-conducting materials having a broad bandwidth of 5-6 eV, unlike to metallic or semi-conductive carbon nanotubes. Due to these unique characteristics, boron nitride nanotubes (BNNT) find potential application in nanoelectronic applications (nano-insulator material, nanosensors), optical applications (Deep-blue and infrared lasers), magnetic applications (targeted drug delivery), biomedical applications (tissue scaffolds, biosensors), energy applications (hydrogen storage), ceramic-glass composites, and polymeric nanocomposite applications.
  • Known methods for production of micro-/ or nanostructures including BN include arc-discharge, laser ablation, atomic stacking, plasma-jet, displacement reaction, reactive ball milling, pressurized vapor condensation and chemical vapor deposition. Temperature values of these methods and disadvantages thereof are summarized in the Table 1.
  • Chemical Vapor Deposition is a highly important method which is mostly employed in the synthesis of carbon nanotubes. This method, however, has some disadvantages including difficult arrangement of system parameters specific to the catalyst and purification.
  • Chemical Vapor deposition can be divided into different variations thereof, which include Catalytic Chemical Vapor Deposition, Non-Catalytic Chemical Vapor Deposition, and Conventional Chemical Vapor Deposition.
  • Catalytic Chemical Vapor Deposition has two sub-classes: namely Boron Oxide and Thermal Chemical Vapor Deposition method.
  • Each line of the Table 2 below shows various known alternatives within the boron oxide chemical vapor deposition sub-class.
  • Temperature range in production of micro-/ or nanostructures including BN (e.g. BNNT) by means of catalytic chemical vapor deposition is generally between 1100°C and 1400°C. MgO- and FeO-based catalyst materials are used in such methods.
  • EP 2 393 966 Al describes production of nanostructures and more particularly a method for production of boron nitride nanotube fibers. Yurum et al. (Ind. Eng. Chem. Res., 2012, DOI:10.1021/ie301605z) describes that reaction temperature and the type of catalyst have an effect on BNNT obtained using CVD.
  • the method used in said article is conventional CVD, and Fe2C>3, Fe 3+ -MCM-41, Fe 3+ -MCM-41/Fe2C>3 are used as catalysts.
  • a decrease occurs in boron nitride nanostructures in accordance with a temperature gradient from 600°C to 800°C.
  • the resulting boron nitride nanostructures do have rather poor crystallinity and poor purity. Furthermore, it is difficult to separate nanotubes from the catalysts.
  • Primary object of the present invention is to overcome the drawbacks encountered in the prior art.
  • Another object of the present invention is provision of a method enabling production of elongate microstructures and/or nanostructures including Boron nitride, with low temperature, high crystallinity and high purity.
  • a further object of the present invention is provision of a method enabling production of elongate microstructures and/or nanostructures including Boron nitride, with low cost and high yield.
  • a further object of the present invention is provision of an entity including a substrate which is provided with elongate microstructures and/or nanostructures including Boron nitride, even though said substrate is not as temperature resistant as those used in the prior art techniques.
  • the present invention relates to a method for preparation of a catalyst for use in production of elongate microstructures and/or nanostructures substantially comprising Boron nitride (BN), the method includes reacting a first substance selected from oxides or nitrates of Na, K or Li; with a second substance selected from Fe 2 0 3 , Al 2 0 3 , SiO, Fe(N0 3 )3, AI(N0 3 )3, and SiH 4 (N0 3 ) 4 ; such that if the first substance is an oxide, the second substance is selected from the list consisting of Fe 2 0 3 , Al 2 0 3 or SiO; and if the first substance is a nitrate, the second substance is selected from Fe(N0 3 ) 3 , AI(N0 3 ) 3 , and SiH 4 (N0 3 ) 4 ; wherein the molar amount of the second substance is at least twice of the molar amount of the first substance.
  • the present invention further proposes a first substance
  • Figure 1 is schematic view of an exemplary setup for conducting a version of the method according to the present invention, with reactive vapor-trapping chemical vapor deposition
  • Figure 2 shows a scanning electron microscopy (SEM) image of a field of elongate microstructures and/or nanostructures substantially comprising BN (here: boron nitride nanotube, BNNT) with 2000X magnification.
  • SEM scanning electron microscopy
  • Figure 3 shows a SEM image of such field with 10000X magnification.
  • Figure 4 shows a transmission electron microscopy (TEM) image emphasizing the wall structure of a single elongate microstructure and/or nanostructure substantially comprising BN (here: boron nitride nanotube, BNNT).
  • TEM transmission electron microscopy
  • Figure 5 shows a TEM image emphasizing the wall-gap-wall structure of a conventional BNNT.
  • Figure 6 is a list of steps in an exemplary version of the method according to the present invention, enabling elongate microstructure and/or nanostructure substantially comprising BN.
  • Figure 7 is a list of steps in an exemplary version of the method for obtaining a potassium ferrite catalyst according to the present invention.
  • the present invention proposes a method for preparation of a catalyst for use in production of elongate microstructures and/or nanostructures substantially comprising Boron nitride (abbreviated as BN), the method includes reacting a first substance selected from oxides or nitrates of Na, K or Li, with a second substance selected from Fe 2 0 3 , Al 2 0 3 , SiO, Fe(N0 3 )3, AI(N0 3 )3, and SiH 4 (N0 3 )4; such that
  • the second substance is selected from the list consisting of Fe20 3 , A 0 3 or SiO;
  • the second substance is selected from Fe(N0 3 ) 3 , AI(N0 3 ) 3 , and SiH 4 (N0 3 ) 4 , wherein the molar amount of the second substance is at least twice of the molar amount of the first substance.
  • the first substance can include K2O or Na20 or L12O, and the second substance includes Fe 2 0 3 .
  • the first substance can include KN0 3 or NaN0 3 or LiN0 3 and the second substance includes Fe(N0 3 ) 3 .
  • the first substance comprises an oxide of K
  • a reaction between the K2O and Fe20 3 to form KFeC>2 occurs with equi molar convertions of both K 2 0 and Fe 2 0 3 into KFeC> 2 according to the reaction stoichiometry below:
  • the first substance includes K 2 0 or Na20 and the second substance includes Fe2C>3; or alternatively, the first substance includes KNO3 or NaNC>3 and the second substance includes Fe(NC>3)3.
  • a respective reaction product includes potassium ferrite KFeC>2 or sodium ferrite NaFeC>2)
  • the present invention further proposes use of the reaction product as a catalyst in production of elongate microstructures and/or nanostructures substantially comprising BN.
  • the present invention further proposes a method for production of elongate microstructures and/or nanostructures substantially comprising BN, including the following steps: a) preparation of a first mixture (catalytic mixture) according to any one of the claims 1 or 2, b) mixing the first mixture with a Boron source to obtain a second mixture, c) arranging a substrate in vicinity of said second mixture, d) arranging a gas comprising a substance including nitrogen atoms (thereby acting as a nitrogen-source), in contact with both of the substrate and the second mixture, and e) heating the second mixture to a temperature corresponding to that at which the vapor pressure of an alkali metal in the first substance in its elementary form is at least 0.5 bar.
  • Said vapor pressure can be e.g. within the range between 0.5 bar and 1.2 bar, preferably within the range between 0.9 bar and 1.1 bar.
  • Such vapor pressure substantially corresponds to rapidly evaporating or boiling of an alkali metal desorbed from the reaction product of the first mixture, and enable conversion into a reaction product from the constituents of the first mixture due to the temperature and the presence of the nitrogen-source. Therefore the above-described temperature enables the reaction mechanism for formation of elongate microstructures and/or nanostructures substantially comprising BN.
  • the Boron source can comprise elementary Boron.
  • Elementary Boron gets oxidized rather easily at lower temperatures when compared to other Boron sources, e.g. Boron oxides or Boron minerals.
  • the first substance can preferably include an oxide of Na, K or Li, and the steps (a) and (b) described above can be performed in a substantially dry atmosphere; in the case where the first substance includes an oxide of Na or K.
  • Such alkali metal oxides are less stable in presence of water, and this provision enables a high yield in the desired reaction mechanism, without disturbances due to humidity.
  • the molar amount of B atoms in the boron source can be substantially equal to the molar amount of 0 atoms in the second mixture.
  • the gas can substantially comprise dry ammonia (NH3).
  • NH3 decomposes easily thus it is considered a high efficiency reactant in this method.
  • the step (b) includes: preparation of the second mixture and providing the second mixture on or in a holder for supporting the second mixture against gravity, into a cabinet comprising a gas inlet and a gas outlet, arranged to allow a gas stream in a gas flow direction from an upstream direction towards a downstream direction;
  • the step (c) includes placing a substrate into the cabinet; e.g. at a position for allowing gas diffusion communication between the holder and the substrate;
  • the step (d) includes arranging a gas which comprises a substance including nitrogen atoms thereby acts as a nitrogen-source, in contact with both of the substrate and the second mixture.
  • the gas can be substantially stagnant inside the cabinet, or can be streamed from the gas inlet towards the gas outlet as a gas stream.
  • the gas can be streamed from the gas inlet towards the gas outlet as a stream flowing from an upstream direction towards a downstream direction.
  • the holder can be formed substantially from a ceramic material, preferably including BN which facilitates nucleation of the micro-/nanostructures comprising BN.
  • the holder and the substrate can be placed in a receptacle having an opening, said receptacle being placed into the cabinet such that the opening is directed to the downstream direction.
  • This facilitates nucleation without disturbance under gas stream.
  • the holder can be substantially in the form of a vessel for holding liquids. Such functional form of the holder is useful in supporting any extensive amounts of molten alkali metal.
  • any air inside the receptacle can be replaced with a further gas which is inert at the temperature defined in the step (e).
  • a further gas which is inert at the temperature defined in the step (e).
  • the further gas can be e.g. N2 or Argon.
  • the replacement of air can be also performed by applying reduced pressure into the receptacle, then supplying the gas into the receptacle and heating the receptacle; said reduced pressure preferably corresponds to an absolute pressure of 10 Torr or less.
  • the vapor pressure of Na has a value of 0.5 bar at 799.95°C, 0.9 bar at 857.55°C, 1 bar at 868.54°C, and 1.1 bar at 878.66°C.
  • a substrate which is resistant against thermal decomposition only up to a temperature range between 857.55°C and 878.66°C can be used without damage, to form nanostructures or microstructures substantially including BN.
  • the vapor pressure of K has a value of 0.5 bar at 672.5°C, 0.9 bar at 726.75°C, 1 bar at 737.13°C, and 1.1 bar at 746.70°C.
  • a substrate which is resistant against thermal decomposition only up to a temperature range between 672.5°C and 746.70°C can be used without damage, to form nanostructures or microstructures substantially including BN.
  • the vapor pressure of Li has a value of 0.5 bar at 1223.2°C, 0.9 bar at 1298°C, 1 bar at 1312.2°C, and 1.1 bar at 1325,30°C.
  • a substrate which is resistant against thermal decomposition only up to a temperature range between 1223.2°C and 1325.30°C can be used without damage, to form nanostructures or microstructures substantially including BN.
  • the present invention further proposes an entity comprising a substrate provided with elongate microstructures and/or nanostructures which substantially comprise BN, provided that the substrate is resistant to thermal decomposition only at temperatures up to around 1000°C.
  • the method according to the present invention provides formation of such microstructures and/or nanostructures at lower temperatures, without compromising the extent of crystallinity and purity of said structures.
  • the alkali metal in the first mixture is Na
  • provision of the substrate with elongate microstructures and/or nanostructures is enabled even at temperatures starting from around 800°C.
  • the substrate with elongate microstructures and/or nanostructures is enabled even at temperatures starting from around 670°C, more particularly starting from around 725°C, even more particularly starting from around 750°C.
  • step (e) In processing a substrate which is resistant against thermal decomposition at temperatures higher than those specified above, higher temperatures can be employed in the step (e). Even though the method according to the present invention enables formation of elongate microstructures and/or nanostructures substantially comprising BN and provision thereof on a substrate; it is evident that the reaction rates are higher at higher temperatures. Accordingly, with higher reaction temperatures, better results are available: high values of reaction yield and greater extent in growth of microstructures and/or nanostructures are available in a shorter time. For instance, heating the second mixture to a temperature corresponding to that at which the vapor pressure of an alkali metal in the first substance in its elementary form can also have even significantly higher values than 0.5 bar.
  • the vapor-trapping chemical vapor deposition assembly (1) used for obtaining boron nitride nanotube (BNNT) structures according to the invention can comprise a furnace (10) for adjusting temperature of a reaction medium.
  • the furnace (10) can be positioned along a horizontal axis (x) which is substantially perpendicular to the gravity vector (g).
  • the temperature of the furnace (10) can be increased to a temperature value between 700°C and 1000°C after a second tube (101) is placed in the furnace.
  • Said furnace (10) can comprise a first tube (100) in which the reaction takes place and the first tube (100) can be positioned substantially along the horizontal axis (x).
  • a second tube (101) can be positioned inside the first tube (100) and one end of the second tube (101) can include an opening, through which a gas (102) can be supplied for being employed in the reaction mechanism.
  • the first tube (100) can be opened at both ends.
  • the carrier gas can be ammonia (NH3). Ammonia serves as a nitrogen source in the formation of boron nitride.
  • the carrier gas (102) can be introduced into the first tube (100) from a gas inlet (A) and released at a gas outlet (B). In other words, a flow direction of the carrier gas (102) can be defined from the gas inlet (A) towards the gas outlet (B).
  • the use of such second tube (101) corresponds to a variation of the method including chemical vapor deposition (CVD).
  • the second tube (101) has a smaller diameter than the first tube (100), and it may be easily positioned in the first tube (100).
  • the second tube (101) may be formed from e.g. quartz or alumina resistant to high temperatures.
  • the first tube (100) may also be made of quartz or alumina.
  • the second tube (101) can comprise a carrier member (1010) in which boron source and catalyst are positioned, and a cover (1011) for closing the carrier member (1010).
  • the cover (1011) may be formed from silicon wafer or another substrate material.
  • the carrier member (1010) can be formed from alumina or boron nitride (BN) or another ceramic material. In another embodiment, the carrier member (1010) may comprise mullite.
  • the carrier member (1010) can be loaded with a second mixture (1015) including process precursors, boron source and catalyst (e.g. potassium ferrite).
  • the carrier member (1010) can be positioned in the vicinity of a closed end of the second tube (101), which can be positioned in a central zone of the furnace (10).
  • the closed end of the second tube (101) can be positioned at upstream direction relative to the gas stream (102). As a result, a reactive steam formed can be utilized with high efficiency until a steam pressure allowing nucleation is achieved.
  • a catalyst is formed inside the second mixture; and under the above described conditions the catalyst can be potassium ferrite (KFeC>2).
  • a version of such catalyst preparation method (600) can include the following steps:
  • the molar ratio of K and Fe can be 50%.
  • a dry powder mixture obtained at the end of 602, can be calcinated at 700°C.
  • the molar ratio of K and Fe can be also within the range between 1% and 20%.
  • the potassium ferrite catalyst ensures that boron nitride nanotubes (BNNT) are obtained with high crystallinity, in pure form and at low temperatures. Said catalyst disintegrates into K and K 2 0 with temperature.
  • a further stage of an exemplary version of the method according to the present invention includes synthesis (500) of boron nitride nanotubes (BNNT) which can be performed using a vapor-trapping chemical vapor deposition assembly (1).
  • Said stage can include the following steps:
  • reaction product including boron nitride nanotubes (BNNT) with impurities and the transferring impurities to said liquid as a result of sonification, and thereby obtaining purified boron nitride nanotubes (BNNT).
  • BNNT boron nitride nanotubes
  • said catalyst can be potassium ferrite (KFeC>2).
  • the boron source can be elementary boron in the form of powder.
  • Elementary boron evaporates under rather moderate temperatures when compared to its compounds as boron source. Thereby the reaction is facilitated and the efficiency is increased for the method according to the present invention.
  • molar ratio of boron to oxygen second mixture can be within a range between 1:1 and 4:1, and preferably around 1:1 to ensure stoichiometric ratios for B2O2 steam as an intermediate phase.
  • molar ratio of potassium to iron in the first mixture to form KFeC>2 catalyst can be within the range between 1:1 and 1.2:1.
  • the respective ingredients are also partly converted into potassium ferrate (K 2 Fe0 4 ) as a further catalyst.
  • molar ratio of boron to KFeC>2 catalyst can be e.g. around 2:1 higher. This ratio corresponds to a molar ratio of boron to oxygen of 1:1 or higher at reaction conditions.
  • the carrier member (1010) can be partly covered with a cover (1011). Said cover (1011) can be a silicon wafer. With the partially covered carrier member (1010), a delay can be arranged in discharge of the nitrogen source (gas, 102, e.g. ammonia). The gas (cf. step 507) interacts with the second mixture which includes boron and catalyst.
  • boron nitride nanotubes can be formed/grown on outer surfaces (walls and/or base) of the carrier member (1010).
  • the impurities can substantially include metallic material which further can be ferromagnetic.
  • the impurities can be separated from fluid by means of magnets or using an acidic fluid for dissolving metallic material.
  • the method can be considered substantially on the basis of vapor-liquid-solid (VLS) mechanism.
  • VLS vapor-liquid-solid
  • the alkali metal e.g. potassium
  • the alkali metal e.g. potassium
  • K and K2O desorption occurs from the second mixture including KFeC>2 catalyst due to high steam pressures. This phenomenon is useful in formation of elongate micro-/nanostructures including BN by catalytic chemical vapor deposition.
  • boron nitride nanotubes Several characteristics of boron nitride nanotubes (BNNT) including their wall morphology, crystalline form, height, width and elemental composition are respectively characterized by TEM, SEM, EELS and RAMAN spectroscopy techniques.
  • Figure 2 and Figure 3 show scanning electron microscopy (SEM) images of boron nitride nanotubes (BNNT) on a carrier member (1010).
  • the mean diameter of the resulting boron nitride nanotubes (BNNT) is 30-100 nanometers and the lengths thereof are mostly above lOijm.
  • TEM transmission electron microscopy
  • Micro-/or nanostructures including BN (here: BNNT) with smooth nanotube wall structure and high crystallinity can be obtained in low temperatures with the method according to the present invention.
  • Raman spectroscopy result of boron nitride nanotubes (BNNT) obtained according to this exemplary method according to the present invention is given in Fig.9.
  • the method according to the present invention decreases cost and energy consumption in production of elongate microstructures and/or nanostructures including BN.
  • the elongate microstructures and/or nanostructures including BN obtainable with the method according to the present invention are applicable to a wide scale of entities including:
  • - biomedical applications e.g. nanoscale skin scaffolds, bone tissue regeneration, medicament administration
  • - radiation shielding applications especially neutron and UV shielding applications
  • piezo-electric applications especially light-weight and nontoxic piezoelectric systems, airless human vehicle sensors, energy collectors
  • a First Tube suitable for defining a gas flow direction from an upstream direction towards a downstream direction can be considered as a cabinet
  • Second Tube (as a receptacle)
  • BNNT elongate microstructure or nanostructure including Boron nitride, e.g. Boron nitride nanotube 500.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
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  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
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Abstract

La présente invention concerne un procédé de préparation d'un catalyseur destiné à être utilisé dans la production de microstructures et/ou de nanostructures allongées comprenant essentiellement du nitrure de bore (BN), ce procédé consistant à faire réagir une première substance choisie parmi des oxydes ou des nitrates de Na, K ou Li avec une seconde substance choisie parmi Fe2O3, Al2O3, SiO, Fe(NO3)3, Al(NO3)3 et SiH4(NO3)4 de telle manière que si la première substance est un oxyde, la seconde substance est choisie dans la liste constituée par Fe2O3, Al2O3 ou SiO, et si la première substance est un nitrate, la seconde substance est choisie parmi Fe(NO3)3, Al(NO3)3 et SiH4(NO3)4, la quantité molaire de la seconde substance étant égale à au moins deux fois la quantité molaire de la première substance. La présente invention concerne en outre un procédé de production de microstructures et/ou de nanostructures allongées comprenant essentiellement du BN, ainsi qu'une entité qui peut être obtenue par ce procédé.
EP17910509.3A 2016-12-30 2017-12-19 Procédé de production de structures de bn de haute cristallinité et de haute pureté à des températures modérées Withdrawn EP3562587A2 (fr)

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