EP3555584A1 - Procédé de fabrication d'un élément de mesure pour capteur de pression et élément de mesure pour capteur de pression obtenu par ledit procédé - Google Patents

Procédé de fabrication d'un élément de mesure pour capteur de pression et élément de mesure pour capteur de pression obtenu par ledit procédé

Info

Publication number
EP3555584A1
EP3555584A1 EP17825405.8A EP17825405A EP3555584A1 EP 3555584 A1 EP3555584 A1 EP 3555584A1 EP 17825405 A EP17825405 A EP 17825405A EP 3555584 A1 EP3555584 A1 EP 3555584A1
Authority
EP
European Patent Office
Prior art keywords
membrane
pressure sensor
sleeve
pressure
measuring element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP17825405.8A
Other languages
German (de)
English (en)
Inventor
Ulrich Staiger
Daniel Stark
Achim Pahlke
Dieter Zeisel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TRAFAG AG
Original Assignee
TRAFAG AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TRAFAG AG filed Critical TRAFAG AG
Publication of EP3555584A1 publication Critical patent/EP3555584A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/60—Treatment of workpieces or articles after build-up
    • B22F10/68—Cleaning or washing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y70/00—Materials specially adapted for additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02B—INTERNAL-COMBUSTION PISTON ENGINES; COMBUSTION ENGINES IN GENERAL
    • F02B77/00—Component parts, details or accessories, not otherwise provided for
    • F02B77/08—Safety, indicating, or supervising devices
    • F02B77/085—Safety, indicating, or supervising devices with sensors measuring combustion processes, e.g. knocking, pressure, ionization, combustion flame
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0681—Protection against excessive heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M15/00—Testing of engines
    • G01M15/04—Testing internal-combustion engines
    • G01M15/08—Testing internal-combustion engines by monitoring pressure in cylinders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40—Radiation means
    • B22F12/46—Radiation means with translatory movement
    • B22F12/47—Radiation means with translatory movement parallel to the deposition plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2301/00—Metallic composition of the powder or its coating
    • B22F2301/35—Iron
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Definitions

  • the invention relates to a method for producing a
  • Pressure sensor as known in particular from WO 2010/149501 A1. Moreover, the invention relates to a pressure sensor measuring element obtainable by such a method and to a pressure sensor measuring element provided therewith
  • WO 2010/149501 A1 describes a pressure sensor measuring element and a pressure sensor provided therewith for pressure detection in a combustion chamber of an internal combustion engine during its operation. For this has the
  • Pressure sensor measuring a separation membrane, a plunger for transmitting deflections of the separation membrane on a force measuring element and the plunger receiving sleeve, wherein the separation membrane and the plunger is integrally formed as a membrane-plunger unit.
  • a pressure measurement in the combustion chamber of the internal combustion engine takes place while shielding the force measuring sensor from the conditions prevailing in the combustion chamber.
  • the sleeve and the separation membrane ram unit are each made separately by turning or by other machining processes of a monolithic stainless steel, then interlocked and connected by means of welded joints.
  • edge regions of a first membrane facing the combustion chamber and a second membrane arranged facing away from the combustion chamber are connected by welding to corresponding edges of the sleeve.
  • the invention provides a method according to claim 1.
  • a pressure sensor measuring element which can be produced thereby and a pressure sensor provided therewith are specified in the dependent claims.
  • the invention provides a method for producing a pressure sensor element for a pressure sensor, which has at least one membrane and a sleeve supporting the membrane, wherein the
  • a metal powder layer method is that in which metal powder is layered and selectively deformed with a laser or electron beam
  • Solidification is carried out such that the pressure sensor measuring element of a
  • the generative manufacturing method at least one channel or a decoupling structure for decoupling the membrane or the sleeve of internal structures of the pressure sensor and / or passing through the pressure sensor measuring channel for at least one connection or signal line and / or by the pressure sensor measuring element leading signal or connection line and / or at least one
  • Stiffening structure for influencing a bending characteristic and / or a resonance frequency and / or at least part of an electronic
  • Component such as in particular an electrical resistance and / or at least one transverse structure and / or at least one heat shield is made.
  • the at least one sensor element is selected from a temperature sensor element for measuring a temperature, a
  • Temperature difference measuring element for detecting a temperature difference between the membrane and a region of the sleeve facing away from the membrane, a membrane structure monitoring element for monitoring the
  • Membrane structure and a resistance element for detecting an electrical resistance of at least a portion of the membrane.
  • the method is characterized
  • At least one powder outlet opening for removing powder material from a cavity of the fabricated by the additive manufacturing process structure is introduced and the powder is removed through the at least one powder outlet opening and the at least one powder outlet opening is closed.
  • the powder material is retained in a cavity of the structure fabricated by the additive manufacturing process.
  • the invention provides a
  • Pressure sensor measuring element comprising:
  • the pressure sensor measuring element is produced in particular by a method according to one of the previously explained embodiments or can be produced therewith.
  • the at least one sensor element is selected from a temperature sensor element for measuring a temperature, a
  • Temperature difference measuring element for detecting a temperature difference between the membrane and a region of the sleeve facing away from the membrane, a membrane structure monitoring element for monitoring the
  • Membrane structure and a resistance element for detecting an electrical resistance of at least a portion of the membrane.
  • the at least one sensor element is selected from a temperature sensor element for measuring a temperature, a
  • Temperature difference measuring element for detecting a temperature difference between the membrane and a region of the sleeve facing away from the membrane, a membrane structure monitoring element for monitoring the
  • Membrane structure and a resistance element for detecting an electrical resistance of at least a portion of the membrane.
  • the pressure sensor measuring element is designed for a pressure sensor for pressure detection in a combustion chamber of an internal combustion engine during operation, wherein the membrane is a separation membrane, wherein a plunger for transmitting deflections of the separation membrane to a
  • the sleeve receives the plunger and a the combustion chamber to be turned first end through the separation membrane is closed and formed at the opposite second end for holding the force-measuring element, wherein the plunger, the diaphragm and the sleeve are integrally formed.
  • the pressure sensor measuring element has at least one stiffening structure for stiffening against deformation or for influencing
  • the pressure sensor measuring element has at least one rib or a projection or a ring.
  • the pressure sensor measuring element has transverse structures in the form of one or more heat shields.
  • the pressure sensor measuring element has at least one channel for
  • the pressure sensor measuring element has at least one cavity between an inner and an outer structure.
  • the pressure sensor measuring element has at least one sensor element for monitoring the function or the structure of the membrane.
  • the pressure sensor gauge is made of steel, stainless steel or NiCrNbMo alloy (e.g., Inconel 718).
  • the invention provides a pressure sensor comprising a pressure sensor measuring element according to one of the preceding
  • the pressure sensor is a combination sensor for detecting both pressure and temperature.
  • the invention provides a pressure sensor measuring element for a pressure sensor for pressure detection in a combustion chamber of a
  • the membrane is a separation membrane
  • a plunger for transmitting deflections of the separation membrane is provided on a force measuring element
  • the sleeve receives the plunger and a one of the combustion chamber to be turned first end is closed by the separation membrane and at the opposite second end for holding the force-measuring element is formed, wherein the plunger, the diaphragm and the sleeve are integrally formed.
  • Sealing points is the goal in the construction of internal combustion engines or other systems to be monitored.
  • Fig. 1 is a schematic representation of a manufacturing apparatus for
  • Fig. 2 is a schematic diagram of a preferred application of the disclosed herein
  • FIG. 3 is a perspective view of a pressure sensor element according to a first embodiment
  • FIG 5 is another sectional view of the pressure sensor element according to the first embodiment
  • FIG. 6 shows a further sectional view of the pressure sensor element with an inserted sensor element according to the first embodiment
  • Fig. 7 is a plan view of the pressure sensor element shown in Fig. 5;
  • Fig. 8 is a further sectional view of the pressure sensor element with
  • FIG. 9 is a perspective view of the pressure sensor hub according to the first embodiment
  • FIG. 10 is a sectional view of the pressure sensor element according to a second embodiment
  • FIG. 11 is a perspective sectional view of the pressure sensor element according to the second embodiment.
  • FIG. 12 shows a perspective sectional view of a pressure sensor element with structural elements on the inner wall of the sleeve.
  • Fig. 13 is a further perspective sectional view of a
  • a control system 56 e.g. as a software file existing model of a
  • Pressure sensing sensor element physically without the need for special tools and forming equipment by selective solidification of powder material 21, in particular metal powder 22, which is located in a layer 32 in a powder bed 24 generates.
  • Fig. 1 shows a manufacturing apparatus 10 for carrying out the additive manufacturing process for producing the pressure sensor element.
  • Manufacturing apparatus 10 has a process space 12, a
  • Material supply device 14 for the layered provision of material to be processed, for example from a powder reservoir 18, a
  • Beam generating device 36 for generating a processing radiation 42 and the control system 56 on.
  • the powder bed 24 which has a movable powder bed bottom 26, which is moved down after processing a layer 32 by the corresponding processed layer thickness of the respective last passage.
  • Powder bed 26 preferably at an upper position 28th
  • the material supply device 14 has a powder application device 20, which is designed in particular such that, after the processing of a layer 32, a new layer 32 to be processed from the powder supply 18 is applied to the powder bed 24 again.
  • Powder applicator 20 may be, for example, a Schichtverteilschieber 30 or a filling device 16. During the irradiation process by the beam generating device 36, the layer distribution slide 30 is in the waiting position in the area of the material supply device 14 which is not located in the machining radiation area.
  • the Schichtverteilschieber 30 is only one example of the powder applicator 20, it can also more
  • Powder applicators are used, such. Powder nozzles for selective powder application, etc.
  • the powder bed 24 is formed in layers that the workpiece to be generated 34th
  • the beam generating device 36 has a beam generating unit 38 and at least one beam influencing device 46.
  • the beam generating unit 38 generates a processing radiation 42 sufficient for the processing, for example, the processing radiation 42 may be a laser or electron beam.
  • the processing radiation 42 may be a laser or electron beam.
  • the processing radiation 42 may be a laser or electron beam.
  • Beam generating device 36 an optical fiber 40 for directing a
  • the beam influencing device 46 is in particular for steering
  • the beam influencing device 46 has, for example, a lens 44, and the beam influencing device 46 leads, for example
  • the beam generating device 38 can in a plane by means of a beam generating unit-moving device 62 are moved by the control system 56 and beam generating unit-Verfahrschulen 64 perform.
  • the process space 12 is separated from the environment by a protection device 50.
  • the protective device can be designed for example by a transparent to laser radiation protection plate 52 made of glass or other materials.
  • the control system 56 in particular allows the beam generating device 36 to be moved in such a way that certain areas of the material layer 32 to be processed are irradiated in order to form the material at the required areas, for example in the radiation impingement 54 (eg fuse or sinter the powder) and to form the workpiece 34 , After processing all areas relevant to the layer to be processed, the powder bed bottom 26 is moved downwards and the powder application device 20 applies a new material layer for renewed selective irradiation via the previously processed layer 32. For example, this can be done by the
  • the control system 56 can be a data processing system 58, for example a CAD system or similar system, which is connected to the units to be controlled
  • Manufacturing device 10 is connected via a control line 60.
  • a steel material, a stainless steel material and / or a NiCrNbMo alloy (e.g., Inconel 718) is suitable as the powder material 22, the latter materials having particular advantages in corrosion resistance. Sensors made of such material are used, for example
  • Exemplary embodiments of generative manufacturing methods suitable for the production of the pressure sensor armature can be Selective Laser Sintering, Laminated Object Manufacturing, Fused Deposition Modeling, Solid Ground Curing, and SD Print-Like Procedures.
  • FIG. 2 shows a preferred application of the pressure sensor element 66.
  • the pressure sensor measuring element 66 has a first end 70 and a second end 72.
  • the pressure sensor measuring element 66 is brought into direct connection with the first end 70 with a measuring space 74.
  • the measuring space 74 may, for example, a combustion chamber 76 of a
  • the pressure sensor measuring element 66 is designed in particular for monitoring the combustion chamber of an internal combustion engine, such as a
  • Marine engine powered, for example, by heavy fuel oil or diesel
  • High-temperature applications such as the monitoring of turbines, for example, the pressure measurement within a hot steam turbine and injection molding machines.
  • Combustion chamber pressure can be measured online during operation of the internal combustion engine. Based on the pressure signal controls and
  • Regulations for the operation of the machine such as internal combustion engine can be performed, and it can be the operation and the function of the machine such as in particular internal combustion engine monitored.
  • Pressure sensing element 66 which will be explained in more detail later in the description, it is also possible, pressure and temperature differences
  • a temperature difference 82 between the first end 70 and the second end 72 of the pressure measuring element 66 is detected.
  • a temperature difference measuring element can be used for this purpose. As a result, a sensor can be obtained, the one
  • Pressure sensor 66 described which can be produced with the manufacturing apparatus 10 previously described with reference to FIG.
  • the pressure measuring element 66 has a
  • Pressure measuring cell 68 and a force measuring element 88 are manufactured in one piece in the additive manufacturing process.
  • the pressure measuring cell 68 has a membrane plunger unit 1 14 and a sleeve 94.
  • the membrane plunger unit 1 14 has a first membrane or
  • Measuring diaphragm which faces the measuring space 74, in the form of a
  • Separation membrane 92 which is connected by means of a plunger 108 with a second, the measuring space 74 facing away from membrane 1 12 such that
  • Movements of the separation membrane 92 are transferred to the second membrane 1 12.
  • the membrane 92, 1 12, the plunger 108 form the membrane ram unit 1 14, which is housed within the sleeve 94.
  • the sleeve 94 is not reworked in one embodiment.
  • the force measuring element 88 is in particular as a bending beam 90 with
  • the sleeve 94 is, as shown in Fig. 3 can be seen, formed substantially cylindrical. At the first end 70, the sleeve 94 has at its outer periphery a radially extending flange 86, which terminates flush in the region of the separating membrane 92.
  • the separation membrane 92 can be influenced in its membrane properties by structuring or changes to the geometry.
  • the flange 86 is not reworked in one embodiment.
  • the pressure measuring cell 68 will be described in more detail below with reference to FIGS. 4 and 5.
  • the pressure measuring cell 68 has only one component or part, namely the one-piece unit of the sleeve 94, the separation membrane 92, the plunger 108 and the membrane 1 12 at the second end 72.
  • the sleeve 94 and the plunger 108 have in the inner region between a Outside wall 1 10 of the plunger 108 and an inner wall 106 of the sleeve 94 has a smooth surface.
  • the pressure measuring cell 68 is manufactured by the generative manufacturing method. At the second end 72 of the pressure measuring cell 68 of the bending beam 90 is attached to the second membrane 1 12.
  • Pressure measuring cell 68 after the loose material powder 22 has been removed, are closed, for example, by a closure ring 98.
  • the at least one powder outlet opening 96 should be sufficient
  • the closure ring 98 is applied to close the powder outlet opening 96 and, as shown in Fig. 4, welded at two annular welds 100 with the sleeve 94 and the membrane 1 12 at the second end 72 of the pressure measuring cell 68.
  • the welding process may be, for example
  • the pressure measuring cell 68 in the region of the second end 72 has an axially extending shoulder 102 with a smaller diameter than the sleeve.
  • a channel 120 is provided which extends from the first end to the second end of the pressure measuring cell 68 and in the
  • At least one further sensor element 122 can be inserted.
  • Sensor element 122 may, for example, a resistance sensor or a
  • the sectional view partially structural elements 136 are shown.
  • the structural elements 136 are arranged on the inner wall of the sleeve 106 radially on the entire circumference and extend axially. Size, number and
  • the design of the structural elements 136 are illustrated by way of example in all figures and can vary depending on the necessity of influencing the respective parameter.
  • the structural elements 136 serve to influence different parameters such as, for example, the rigidity, temperature conduction and the resonance frequency and can be mounted, for example, in the form of ribs 138 on the respective component.
  • FIG. 5 shows a different sectional plane from that shown in FIG. 4, from which it can be seen that the channel 120 extends to the first end 70 of the pressure measuring cell 68 and at least one opening 132 for carrying out a further sensor, i.
  • the temperature sensor is suitable.
  • the opening 132 is reworked in one embodiment, for example drilled to a diameter of 0.2 mm.
  • FIG. 6 shows the same sectional plane as FIG. 5.
  • the additional sensor element 122 is now inserted into the channel 120 of the plunger 108 of the pressure measuring cell 68 in FIG.
  • the at least one opening 132 can be seen, in which at least one sensor tip 130 of the additional sensor element 122 is positioned.
  • the sensor tip 130 is flush with the separation membrane 92.
  • the production of the tightness can be done by connecting the sensor tip 130 and separation membrane 92, for example by welding.
  • the sensor tip 130 is thus positioned near the measuring space 74, which may represent, for example, the combustion chamber temperature TB 78 of the combustion chamber 76.
  • the sensor element 122 also the review of
  • separation membrane 92 serve. Furthermore, elements can be attached to the membrane for monitoring the membrane structure or the function of the separation membrane 92. An example is the attachment of a resistor to the inside of the separation membrane 92. This allows cracks in the
  • Fig. 7 shows a plan view of the pressure measuring cell 68. In the center are the
  • Openings for insertion 132 of the additional sensor element 122 and an associated signal line 124 or connecting line 126 can be seen.
  • the conduits 124, 126 may be routed out of the pressure sensing cell 68 at the second end 72 through conduit passages 128 to processing electronics (not shown).
  • Powder exit port 96 has been removed.
  • the powder outlet opening 96 is arranged in the region of the second end 72.
  • a second embodiment is shown in FIG. In contrast to the first embodiment described so far no powder outlet openings 96 are present in these embodiments, and the material powder 22 remains in the pressure measuring cell 68. In this way, in particular the
  • Temperature passage can be influenced.
  • Fig. 1 1 shows a section in the region of the flange 86.
  • the pressure measuring cell 68 may have further transverse structures.
  • the flange 86 has a heat shield 134 inside the pressure measuring cell.
  • the channel 120 is arranged in the center of the pressure measuring cell 68.
  • FIGS. 12 and 13 Further embodiments of the structural elements 136 of sleeve 94 and plunger 108 can be seen in FIGS. 12 and 13. For better representation is the
  • Pressure measuring cell 68 cut in the region between the first end 70 and the second end 72, wherein the structural elements 136 in FIGS. 12 and 13
  • stiffening ribs 138 are exemplified as stiffening ribs 138.
  • Other possibilities include the provision of channels in the wall or the
  • Resonance frequency which would be in the first drawing without stiffening ribs at about 7 kilohertz, in the range of 20 kilohertz or above.
  • the plunger in FIG. 13 has further ribs 138.
  • the interior of the pressure measuring cell 68 should be tight to prevent penetration of the combustion gas into the pressure measuring cell when the separation membrane 92 fails to prevent. Therefore, in a preferred embodiment, the at least one powder outlet opening 96 is closed with a powder outlet opening closure ring 98.
  • the powder discharge port lock ring 98 becomes
  • the stainless steel grades with the material numbers 1 .4542 and 1 .4548 are suitable for use in one
  • An important aspect of the invention relates to the combination of at least two sensors. This creates a combination sensor, which pressure and
  • pressure and temperature at the separation membrane 92 can be measured. It is also possible to output pressure and temperature difference. For this purpose, a temperature difference between the membrane side and the back is detected. As a result, a sensor can be obtained, the one
  • Pressure sensor A particular difficulty of this type of pressure sensors is the production of special runs of channels, in particular a central bore. Such a central bore is manufacturing technology with cutting Process more difficult to produce. For this is the generative pressure sensor.
  • channels for lines especially one
  • Thermocouple or the like produce.
  • Another possibility is to produce, for example, in the wall channels or axial decoupling geometries. So the outer shell, the more
  • stiffening ribs These are shown in the already explained figures as an example. With such stiffening ribs in particular resonance frequencies can be influenced. Thus, a resonance frequency, which in the first drawing without stiffening ribs would be about 7 kilohertz, can be in the range of 20
  • elements can be attached to the separation membrane 92 for monitoring the membrane structure or the function of the separation membrane 92.
  • An example is the attachment of a resistor to the inside of the separation membrane 92. This allows cracks in the separation membrane 92 to be monitored. If a crack occurs on the separating membrane 92, the electrical resistance changes.
  • the manufacturing process is then such that, if the corresponding layer were to be built, a different powder material would be applied to provide the material for the resistor.
  • Another example would be the arrangement of cross structures, such as the heat shield 134.
  • the membrane is arranged for example in a combustion chamber of an engine; here it is, the temperature of the electronics
  • the powder discharge holes 96 should have a sufficiently large diameter so that the powder can be completely removed. These can then be closed by a closing element - for example, the powder outlet opening-locking ring 98.
  • Another alternative embodiment involves leaving the powder material 21 in the sensor.
  • the separation membrane 92 At the separation membrane 92, other post-processing steps can be performed.
  • the membrane thickness of the separation membrane 92 should be maintained.
  • structuring of the separation membrane 92 may also be performed.
  • An example is that from the outside towards the middle a slight angle is set back can be introduced to the force element in the membrane to the
  • Pressure sensor is expressly referred to WO2010 / 149501 A1, which is incorporated herein by reference. Further details of advantageous embodiments of the invention result from a combination of measures, steps, features and technologies described herein with the disclosure of WO 2010/149501 A1.
  • the invention provides a method for producing a pressure sensor element for a pressure sensor, which has at least one membrane and a sleeve supporting the membrane, wherein the
  • Manufacturing process is produced. This makes it easy to set up, for example, a combination sensor for detecting pressure and another parameter.
  • structures for stiffening or resonance frequency influencing or for influencing heat conduction can be introduced.

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention vise à fabriquer à moindre coût un élément de mesure pour capteur de pression, et concerne selon un aspect un procédé de fabrication d'un élément de mesure pour capteur de pression destiné à un capteur de pression présentant au moins une membrane et un manchon servant d'appui à la membrane, l'élément de mesure pour capteur de pression étant fabriqué couche après couche par un procédé de fabrication additive. Il est ainsi possible de réaliser simplement par exemple un capteur combinant la détection d'une pression et celle d'un autre paramètre. Il est en outre possible d'incorporer des structures de raidissement ou d'action sur la fréquence de résonance ou d'action sur la conduction thermique.
EP17825405.8A 2016-12-14 2017-12-07 Procédé de fabrication d'un élément de mesure pour capteur de pression et élément de mesure pour capteur de pression obtenu par ledit procédé Withdrawn EP3555584A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016124410.4A DE102016124410A1 (de) 2016-12-14 2016-12-14 Verfahren zum Herstellen eines Drucksensormesselements sowie damit erhältliches Drucksensormesselement
PCT/EP2017/081912 WO2018108710A1 (fr) 2016-12-14 2017-12-07 Procédé de fabrication d'un élément de mesure pour capteur de pression et élément de mesure pour capteur de pression obtenu par ledit procédé

Publications (1)

Publication Number Publication Date
EP3555584A1 true EP3555584A1 (fr) 2019-10-23

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EP17825405.8A Withdrawn EP3555584A1 (fr) 2016-12-14 2017-12-07 Procédé de fabrication d'un élément de mesure pour capteur de pression et élément de mesure pour capteur de pression obtenu par ledit procédé

Country Status (5)

Country Link
US (1) US11137320B2 (fr)
EP (1) EP3555584A1 (fr)
CN (1) CN110476046B (fr)
DE (1) DE102016124410A1 (fr)
WO (1) WO2018108710A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016225652A1 (de) * 2016-12-20 2018-06-21 Piezocryst Advanced Sensorics Gmbh Verfahren zur Herstellung eines Sensorgehäuses für einen Kraft- oder Drucksensor sowie Sensorgehäuse, Kraft- oder Drucksensor und Verwendung einer additiven Fertigungsvorrichtung
EP3671161A1 (fr) * 2018-12-21 2020-06-24 Exentis Knowledge GmbH Corps moulé ainsi que procédé de fabrication d'un corps moulé
EP3671160A1 (fr) * 2018-12-21 2020-06-24 Exentis Knowledge GmbH Corps moulé ainsi que procédé de fabrication d'un corps moulé
DE102020117587A1 (de) 2020-07-03 2022-01-05 IMES Intelligent Measuring Systems GmbH Druckaufnehmer

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DE102016225652A1 (de) * 2016-12-20 2018-06-21 Piezocryst Advanced Sensorics Gmbh Verfahren zur Herstellung eines Sensorgehäuses für einen Kraft- oder Drucksensor sowie Sensorgehäuse, Kraft- oder Drucksensor und Verwendung einer additiven Fertigungsvorrichtung

Also Published As

Publication number Publication date
US11137320B2 (en) 2021-10-05
DE102016124410A1 (de) 2018-06-14
US20190360894A1 (en) 2019-11-28
CN110476046A (zh) 2019-11-19
WO2018108710A1 (fr) 2018-06-21
CN110476046B (zh) 2021-07-02

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