EP3548745A1 - Method for operating a vacuum pump system - Google Patents
Method for operating a vacuum pump systemInfo
- Publication number
- EP3548745A1 EP3548745A1 EP17801030.2A EP17801030A EP3548745A1 EP 3548745 A1 EP3548745 A1 EP 3548745A1 EP 17801030 A EP17801030 A EP 17801030A EP 3548745 A1 EP3548745 A1 EP 3548745A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- vacuum
- speed
- valve
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 21
- 238000004146 energy storage Methods 0.000 claims description 9
- 238000011084 recovery Methods 0.000 claims description 6
- 238000005086 pumping Methods 0.000 claims description 5
- 230000001172 regenerating effect Effects 0.000 description 4
- 125000004122 cyclic group Chemical group 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 101100390736 Danio rerio fign gene Proteins 0.000 description 1
- 101100390738 Mus musculus Fign gene Proteins 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
- F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/20—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by changing the driving speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/02—Piston parameters
- F04B2201/021—Rotational speed of a piston rotating around its own axis
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/06—Valve parameters
- F04B2201/0601—Opening times
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/06—Valve parameters
- F04B2201/0604—Valve noise
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2203/00—Motor parameters
- F04B2203/02—Motor parameters of rotating electric motors
- F04B2203/0201—Current
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2203/00—Motor parameters
- F04B2203/02—Motor parameters of rotating electric motors
- F04B2203/0209—Rotational speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2203/00—Motor parameters
- F04B2203/02—Motor parameters of rotating electric motors
- F04B2203/0211—Noise
Definitions
- the invention relates to a method for operating a vacuum pump system, which is used in particular for evacuating a lock chamber.
- the lock chamber is in particular connected to a processing chamber.
- the vacuum pump system may be directly connected to the processing chamber, so that no additional lock chamber is provided.
- the processing chamber In a processing chamber, products such as coated or the like are processed under vacuum in particular.
- the processing chamber In order to be able to supply in particular the products of the processing chamber, the processing chamber is connected to a lock chamber.
- a vacuum pump system To evacuate the barn chamber, it is connected to a vacuum pump system.
- the vacuum pump system usually having a plurality of vacuum pumps has, in particular, a main pump or a booster and a backing pump. Roots or screw pumps are particularly suitable as the main vacuum pumps.
- the vacuum pump system has a vacuum pump device, which has in particular a plurality of vacuum pumps, and the lock chamber of a valve device.
- a control device is provided which serves in particular for controlling the at least one vacuum pump of the vacuum pump device. In such lock applications of vacuum pump systems, the shortest possible pump-down time is required.
- the object of the invention is to provide a method for operating a vacuum pumping system for evacuating a chamber, in particular a lock chamber, with which at low pump-down times a noise reduction can be achieved.
- the vacuum pump system operated according to the invention has a vacuum pump device having at least one vacuum pump.
- the vacuum pump device has at least two vacuum pumps connected in series, in particular in series. a main vacuum pump or a booster and a backing pump.
- Bosster in particular Roots pumps or screw pumps are preferred.
- the vacuum pump device is connected to a chamber, in particular a lock chamber, wherein a valve device is arranged between the vacuum pump device and the chamber.
- a control device is provided, which in particular serves to operate the at least one vacuum pump, wherein the speed of the electric motor driving the at least one vacuum pump is regulated by the control device in a particularly preferred embodiment.
- At least one operating parameter is initially determined by the control device.
- This at least one operating parameter is a cyclically occurring or cyclically changing operating parameter.
- a particularly suitable operating parameter is the motor current which the electric motor receives, with which the at least one vacuum pump is driven, with other operating parameters are suitable.
- the evaluation of the cyclically occurring operating parameter or the cyclically occurring changes in the course of the operating parameter is evaluated by means of the control device. This makes it possible to reduce the speed of at least one of the vacuum pumps of the vacuum pump device before or immediately upon opening of the valve device. Due to the reduced speed of at least one of the vacuum pumps of the vacuum pump device, in particular the main vacuum pump when opening the valve device, a significant noise reduction can be achieved.
- the speed of the main vacuum pump or the booster is reduced when opening, in addition, the speed of the backing pump can be reduced.
- the speed of the backing pump can be reduced.
- maximum speed of the pump is preferably a decrease by at least 50%, in particular at least 80%.
- the speed is reduced to 30 Hz, in particular less than 50 Hz.
- a operating parameter that changes significantly when opening the valve device is preferably selected.
- Particularly suitable for this purpose is the motor current of an electric motor driving at least one of the vacuum pump devices. Due to the pressure increase, the motor current increases greatly when the valve device is opened. It is possible in the current flow in a simple manner to determine the opening of the valve device.
- the significant increase is in particular in the increase of electricity by more than five times, in particular more than ten times.
- the significant change in the operating parameter ie. For example, the significant increase in motor current within a very short period of time, in particular less than 1 to 3 seconds.
- determining the course of the motor current of an electric motor driving at least one of the vacuum pumps is preferred.
- the following operating parameters or the corresponding time profile of these operating parameters can also be determined and used to control the rotational speed of at least one of the vacuum pumps of the vacuum pump device:
- the inlet pressure of the vacuum pump device and / or one of the vacuum pump devices can be measured with the aid of a pressure sensor. From the time course of the pressure can also be closed in a simple manner to the time, also the valve device is opened.
- a temporal temperature profile can be determined with the aid of a temperature sensor.
- a temperature sensor particularly suitable here is the temperature-sensing outlet of one of the two pumps (gas temperature). Also From the temperature profile, in turn, the time of opening the valve device can be determined.
- pumps are used as the main or as a backing pump, which have a pressure relief valve between the inlet side and the outlet side, a travel of this valve, i. the time change of the valve position can be used to determine the timing of the opening of the arranged between the lock chamber and the vacuum pump system valve means.
- the determination of a cycle duration takes place on the basis of at least one operating parameter.
- the cycle time is the time span between two substantially identical changes in an operating parameter.
- the cycle time is the time between two significant increases in current that occur each time the valve devices are opened.
- the lock chamber is opened and closed cyclically.
- the introduction of new products to be processed or coated on the barn chamber in the processing chamber is carried out at regular intervals.
- This advantage of a cyclic processing and thus a cyclically occurring change of an operating parameter is used according to the invention to operate the at least one vacuum pump, in particular the main vacuum pump when opening the valve device at low speed and to reduce the noise. After opening the valve device, the speed of the pump can be increased again, so that with reduced noise continue short Abpumpzyklen, ie. quickly reducing the pressure in the lock chamber to the desired value can be achieved.
- a determination of the cycle duration can also be made by evaluating a plurality of operating parameters and determined, for example, by forming mean values and / or corresponding weightings with the aid of the control device.
- the speed of the at least one vacuum pump is reduced at least in time, at the latest at the end of the cycle duration, so that the pump speed when opening the valve device is reduced.
- the speed of the at least one vacuum pump is reduced at least in time, at the latest at the end of the cycle duration, so that the pump speed when opening the valve device is reduced.
- Abpumpzyklus may optionally be done earlier reducing the speed.
- the determination of a load duration also takes place on the basis of the at least one operating parameter.
- the load duration is in this case that period in which the lock chamber is evacuated to the defined vacuum after opening the valve device. This can be done, for example, when using the motor current as an operating parameter that a reduction of the motor current is determined or established to a predetermined limit.
- the speed of the at least one vacuum pump can already be reduced, even if the cycle time has not yet ended.
- This has the particular advantage that the period between the end of the load duration and the end of the cycle time can be used to reduce the speed of the vacuum pump in the most energy-efficient manner possible. In this respect, for example, no or a slight deceleration is required.
- the electrical braking energy that is generated when reducing the rotational speeds, stored in an energy storage or fed back into the supply network instead of the usually provided braking resistor which heats up strongly during braking, an energy storage or regenerative unit is used.
- the stored energy can z. B. be used to operate or accelerate the pump again.
- the provision of an energy storage or Regenerating unit for storing or returning braking energy is an independent invention. This is independent of the above-described cyclic operation of the pump.
- the provision of energy storage or recovery units may also be useful in other processes, but is particularly advantageous in combination with the invention described above.
- This independent invention thus relates to a vacuum pump with the conventional components such as a particular arranged in a pump housing rotor.
- a plurality of rotors or, in addition, a stator may be arranged in the housing.
- the pump has a drive device, in particular in the form of an electric motor.
- an energy storage or regenerative unit is then additionally provided. Through this, the electrical energy generated during braking is stored or fed back into the supply network and can be used to drive the pump or for other components.
- the energy storage or regenerative unit is therefore connected in particular to the electric motor via a frequency converter.
- the electric motor acts as a generator when braking the pump.
- FIG. 1 is a schematic representation of a vacuum pumping system and a lock chamber
- Fig. 3 is a diagram of a motor current and an engine speed over time according to the inventive method
- Figures 4 and 5 are schematic representations of a vacuum pump with an energy recovery unit.
- a processing is carried out, for example, coating a product.
- 10 vacuum is generated in the processing chamber.
- a lock chamber 12 is connected to the processing chamber 10.
- the lock chamber 12 has a lock inlet 14 for feeding a product or the like into the lock chamber 12 and a lock outlet 16 for transferring the product or the like from the lock chamber 12 into the processing chamber 10.
- the vacuum pump system has a vacuum pump device 18.
- the vacuum pump device 18 has a main vacuum pump 20 and a backing pump 22 arranged downstream of the main vacuum pump 20 in the flow direction.
- the main vacuum pump 20 is in particular a Roots or screw pump.
- the main vacuum pump 20 is connected via a pipe 24 to the lock chamber 12, wherein in the pipe 24, a valve device 26 is arranged.
- the outlet of the main vacuum pump 20 is connected via a pipe 28 to the inlet of the backing pump.
- the vacuum pump system has a control device 30.
- the control device 30 is in the illustrated embodiment via electrical lines 32, 34 with the main vacuum pump 20 and the backing pump 22 connected.
- a control of an electric motor, which drives the corresponding pump, and on the other hand operating parameters, which are measured in or on the corresponding pump, can be transmitted to the control device 30 via the lines 32, 34.
- the measured operating parameter is in particular the motor current. Further, as shown by an arrow 36, further data are transmitted to the controller and the controller can of course take on other control tasks.
- the control device 30 can also be used to open or close the valve 26.
- FIG. 2 shows a cyclical course of a motor current and the rotational speed of the vacuum pump according to the prior art
- FIG. 3 shows the corresponding graphs according to the invention.
- the curve of the motor current I shown by a thicker line shows in conventional applications at a time ti, at which the valve is opened, a large current increase from I min to I max .
- the same current increase takes place after a cycle time t z at a further time ti again.
- the controller 30 can thus the cycle time t z determined from the chart or from the current variation due to the occurring in cyclic intervals current increase at time points ti. This determination is independent of the knowledge when actually the valve 26 is opened. This is of interest insofar as often no signal is generated or output that tells the controller that an opening of the valve takes place or when it occurs.
- the control according to the invention is insofar self-learning, as it also With changing processes, the new cycle time can be determined automatically.
- the load duration ie the period in which the evacuation of the lock chamber 12 takes place.
- the engine speed is at a time t 3 of its maximum speed on which it is during the evacuation of the lock chamber 12, on - li ⁇ before significantly lower speed lowered.
- the time t 3 is here later than a time t 2 , so that at time t 3, the evacuation of the lock chamber is already done or the load duration t L is completed.
- a defined braking takes place up to a time t 4 .
- the current rises briefly and at time t 4 drops back to the minimum value.
- the speed of the motor is thus significantly lower than the maximum speed from time t 4 .
- the engine thus does not have the maximum speed, as in the prior art, but a significantly reduced speed. In this respect, only a relatively small further decrease in the speed after opening the valve (time ti) as shown in FIG. 3 can be seen.
- the during braking between t 3 and t 4 released kinetic energy can be supplied via a feedback unit back to the supply network.
- the energy efficiency of a vacuum pump can be increased, resulting in cost savings for the operator.
- FIGS. 4 and 5 show examples of an energy recovery unit. These are used in a particularly preferred embodiment in pumps that are used according to the method described above. However, it is also possible to use such energy recovery units in vacuum pumps used in other processes.
- FIG. 4 schematically shows a vacuum pump 40, which may, for example, be the vacuum pump 20 or 22 (FIG. 1).
- the vacuum pump 40 has an electric motor 42 through which a pump rotor 44 is driven.
- the driving or controlling the electric motor 42 takes place in the illustrated embodiment via a frequency converter 46.
- the frequency converter 46 is connected to the supply network 48.
- the electric motor 42 is used as a generator because of the considerable kinetic energy.
- the resulting electrical energy is passed through the frequency converter in an energy recovery unit 50 and can then be fed back to the supply network 48 via the lines shown.
- connection of the frequency converter 56 to the supply network 48 is also provided via the energy storage unit 50.
- the energy storage unit 50 thus serves simultaneously as a feed unit.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Control Of Fluid Pressure (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016223782.9A DE102016223782A1 (en) | 2016-11-30 | 2016-11-30 | Method for operating a vacuum pump system |
PCT/EP2017/078852 WO2018099710A1 (en) | 2016-11-30 | 2017-11-10 | Method for operating a vacuum pump system |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3548745A1 true EP3548745A1 (en) | 2019-10-09 |
EP3548745B1 EP3548745B1 (en) | 2021-03-17 |
Family
ID=60409284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP17801030.2A Active EP3548745B1 (en) | 2016-11-30 | 2017-11-10 | Method for operating a vacuum pump system |
Country Status (8)
Country | Link |
---|---|
US (1) | US11719231B2 (en) |
EP (1) | EP3548745B1 (en) |
JP (1) | JP7445427B2 (en) |
KR (1) | KR20190088482A (en) |
CN (1) | CN110036200A (en) |
DE (1) | DE102016223782A1 (en) |
MY (1) | MY196928A (en) |
WO (1) | WO2018099710A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE1028135B1 (en) * | 2020-03-10 | 2021-10-11 | Atlas Copco Airpower Nv | Method and apparatus for controlling the pump speed, computer program and a computer readable medium on which the computer program is stored thereto applied and a pump |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6022195A (en) * | 1988-09-13 | 2000-02-08 | Helix Technology Corporation | Electronically controlled vacuum pump with control module |
US5094885A (en) | 1990-10-12 | 1992-03-10 | Genus, Inc. | Differential pressure cvd chuck |
IT1286223B1 (en) * | 1996-09-18 | 1998-07-08 | Awax Progettazione | APPARATUS FOR PACKAGING PRODUCTS IN MODIFIED AND CONTROLLED ATMOSPHERE, WITH EXTENSIBLE AND WATERPROOF GAS FILM |
JP2000110735A (en) * | 1998-10-01 | 2000-04-18 | Internatl Business Mach Corp <Ibm> | Pump protection system, pump protection method, and pump system |
JP2002180990A (en) * | 2000-12-11 | 2002-06-26 | Ebara Corp | Vacuum pump controlling device |
JP2003155981A (en) * | 2001-11-21 | 2003-05-30 | Toyota Industries Corp | Operation control method for vacuum pump and operation controller thereof |
DE10255792C5 (en) | 2002-11-28 | 2008-12-18 | Vacuubrand Gmbh + Co Kg | Method for controlling a vacuum pump and vacuum pump system |
JP2004197644A (en) * | 2002-12-18 | 2004-07-15 | Toyota Industries Corp | Controller for vacuum pump |
DE102007060174A1 (en) * | 2007-12-13 | 2009-06-25 | Oerlikon Leybold Vacuum Gmbh | Vacuum pump and method for operating a vacuum pump |
US8484961B2 (en) * | 2009-04-10 | 2013-07-16 | Ford Global Technologies, Llc | Vacuum accumulator system and method for regenerative braking system |
KR100953626B1 (en) * | 2009-06-18 | 2010-04-20 | 캄텍주식회사 | Vacuum pump for vehicle |
US9080576B2 (en) * | 2011-02-13 | 2015-07-14 | Applied Materials, Inc. | Method and apparatus for controlling a processing system |
GB2492065A (en) * | 2011-06-16 | 2012-12-26 | Edwards Ltd | Noise reduction of a vacuum pumping system |
EP2644841A1 (en) * | 2012-03-29 | 2013-10-02 | Alstom Technology Ltd | Method of operating a turbine engine after flame off |
WO2014009387A1 (en) * | 2012-07-09 | 2014-01-16 | Saint-Gobain Glass France | System and method for processing substrates |
KR102330871B1 (en) | 2013-03-21 | 2021-11-24 | 반도 카가쿠 가부시키가이샤 | Friction transmission belt |
DE102013223556A1 (en) * | 2013-11-19 | 2015-05-21 | Oerlikon Leybold Vacuum Gmbh | Vacuum pump system and method for operating a vacuum pump system |
EP3015328B1 (en) * | 2014-10-30 | 2017-09-20 | KNORR-BREMSE Systeme für Nutzfahrzeuge GmbH | Compressed air system for a motor vehicle |
CN104728219A (en) * | 2015-03-17 | 2015-06-24 | 长安大学 | Hydraulic pump testbed system with energy recovery function and energy recovery method |
-
2016
- 2016-11-30 DE DE102016223782.9A patent/DE102016223782A1/en not_active Withdrawn
-
2017
- 2017-11-10 KR KR1020197015636A patent/KR20190088482A/en not_active Application Discontinuation
- 2017-11-10 MY MYPI2019003136A patent/MY196928A/en unknown
- 2017-11-10 US US16/463,602 patent/US11719231B2/en active Active
- 2017-11-10 WO PCT/EP2017/078852 patent/WO2018099710A1/en unknown
- 2017-11-10 JP JP2019528620A patent/JP7445427B2/en active Active
- 2017-11-10 EP EP17801030.2A patent/EP3548745B1/en active Active
- 2017-11-10 CN CN201780071741.0A patent/CN110036200A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
KR20190088482A (en) | 2019-07-26 |
CN110036200A (en) | 2019-07-19 |
JP2020501068A (en) | 2020-01-16 |
EP3548745B1 (en) | 2021-03-17 |
US11719231B2 (en) | 2023-08-08 |
DE102016223782A1 (en) | 2018-05-30 |
MY196928A (en) | 2023-05-11 |
US20210381499A1 (en) | 2021-12-09 |
JP7445427B2 (en) | 2024-03-07 |
WO2018099710A1 (en) | 2018-06-07 |
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