EP3495826B1 - Electronic device for measuring a physical parameter - Google Patents
Electronic device for measuring a physical parameter Download PDFInfo
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- EP3495826B1 EP3495826B1 EP17205858.8A EP17205858A EP3495826B1 EP 3495826 B1 EP3495826 B1 EP 3495826B1 EP 17205858 A EP17205858 A EP 17205858A EP 3495826 B1 EP3495826 B1 EP 3495826B1
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- electrical
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- 230000005284 excitation Effects 0.000 claims description 72
- PXFBZOLANLWPMH-UHFFFAOYSA-N 16-Epiaffinine Natural products C1C(C2=CC=CC=C2N2)=C2C(=O)CC2C(=CC)CN(C)C1C2CO PXFBZOLANLWPMH-UHFFFAOYSA-N 0.000 claims description 12
- 238000012886 linear function Methods 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 description 60
- 230000007704 transition Effects 0.000 description 15
- 238000005259 measurement Methods 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 235000021183 entrée Nutrition 0.000 description 2
- 240000008042 Zea mays Species 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/006—Details of instruments used for thermal compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0897—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by thermal pick-up
Definitions
- the present invention relates to the field of electronic devices for measuring a physical parameter, in particular an accelerometer of the capacitive type.
- the electrical excitation signals 16, 17 and 18 consist of transitions between a lower / low voltage Vss of the electrical supply and an upper / high voltage V DD of this electrical supply (V DD defining the supply voltage), these transitions being applied respectively to the inputs E1, E2 and E3. More precisely, signal 16 exhibits transitions from Vss to V DD while simultaneously signal 17 exhibits transitions from V DD to Vss.
- a capacitor Cos has been provided for compensating an offset, which is programmable. Its programming is generally carried out during the test of the electronic measuring device. If the offset is negative, i.e. C MENS has a negative value for a zero value of the physical parameter detected (for example zero acceleration for an accelerometer), then the electrical excitation signal 18 is selected with a downward transition. On the other hand, if the offset is positive, signal 18 is selected with an upward transition from V DD to Vss as provided for in figure 1 .
- the capacitor Cos simultaneously receives from the sensor 4 an electrical excitation signal 18 which consists of a transition between Vss and V DD .
- the reference capacitor C Ref arranged on the feedback loop has a variable voltage whose value is proportional to the sum of the voltages generated, on the one hand, by the sensor 4 and, on the other hand, by the compensation circuit.
- the capacitor C Ref has a voltage which is proportional to C MENS - Cos.
- the voltage of the reference capacitor C Ref defines the analog output voltage V out which is therefore proportional to C MEMS - Cos and also proportional to the physical parameter measured insofar as the sensor offset is fully corrected by the compensation circuit .
- the measuring circuit 8 supplies at output a digital measuring signal S dig by means of an analog-digital converter ADC, this digital signal being theoretically proportional to the physical parameter measured.
- the document US 2008/302182 A1 describes an accelerometer associated at the output with a temperature compensation circuit for the measurement signal supplied by the accelerometer.
- This compensation circuit is formed by a plurality of resistors whose respective values depend on the temperature. It is supplied by the supply voltage of the electronic device and it receives no excitation signal for its operation.
- This compensation circuit is therefore entirely passive, with, however, the possibility of first selecting a temperature dependence coefficient, appropriate to the accelerometer concerned, for the variable voltage signal that it supplies.
- the resistors are selected and arranged so as to allow the compensation circuit to supply, as soon as it is supplied by the supply voltage, a compensation voltage which varies linearly with the temperature, this compensation voltage being supplied to a circuit for amplifying the measurement signal generated by the accelerometer.
- the document US 2004/0237651 A1 describes a sensor of a variable physical value, in particular of an acceleration or of an angular speed, which comprises a differential electrical component formed of two capacitors and, in addition, a circuit for correcting an offset in the signal supplied by the component electric differential.
- the correction circuit is arranged on the output side of the sensor, downstream of an amplification circuit and of a circuit for filtering the measurement signal supplied by the differential electrical component.
- the document US 2010/0219848 A1 describes a sensor with a variable physical value associated with a compensation circuit to compensate for the offset caused by the aging of the sensor.
- the object of the invention is to increase the precision of the measuring device of the prior art described above by reducing its dependence on temperature while maintaining a relatively low manufacturing cost.
- the differential sensor described above may have a certain dependence on temperature, but it turns out that the element whose temperature dependence induces the greatest temperature drift in the measurement signal is the offset compensation capacitor Cos, especially if we stick to a common common technology to achieve this capability.
- the variation of the value of the capacitance Cos as a function of the temperature depends on the manufacturing technology of the measuring circuit and in particular on the compensation circuit which generally form together with the excitation circuit a single integrated circuit. . In the context of the invention, it is thus firstly sought to compensate for the temperature drift of the capacitor C OS , but the invention also makes it possible to take account of a possible temperature drift of the sensor, which is very advantageous.
- the electrical assembly further comprises the passive differential electrical component forming the sensor.
- the electrical component of the compensation circuit whose temperature drift is compensated is said first passive electrical component and the electrical excitation signal is therefore said second electrical excitation signal.
- the second electrical excitation signal has a value / amplitude which is an affine function of the absolute temperature.
- the electrical component of the compensation circuit whose temperature drift is compensated is a second passive electrical component which is incorporated in the compensation circuit.
- the electrical excitation signal which is applied to this second electrical component is a third electrical excitation signal, the amplitude of which is substantially a linear function of the absolute temperature, the second electrical excitation signal supplied to the first passive electrical component being a constant amplitude signal.
- the electronic measuring device has several advantages.
- the invention is advantageous in that it provides compensation of the analog type with easily achievable electrical elements, in particular the compensation circuit can be produced entirely in the same technology as the measurement circuit.
- a person skilled in the art would first of all think of correcting a temperature drift at the level of the measurement circuit manufacturing technology, in particular by using MiM technology to achieve the offset compensation capacity. But such a solution is expensive.
- Another solution which may come to the mind of those skilled in the art is a correction implemented in a logic circuit receiving the signal S dig , but such a solution poses, among other things, the problem of determining the temperature to which the device is subjected. analog measurement circuit.
- the solution according to the invention is less expensive and it does not require a temperature sensor supplying a temperature signal to a logic circuit.
- the compensation of the temperature drift is carried out through a variable voltage generated for this purpose by the excitation circuit which comprises for example a current source proportional to the absolute temperature, known to those skilled in the art, this source of current to generate a certain voltage also proportional to the absolute temperature which is applied either to the offset compensation component (first embodiment), or to an additional component dedicated to the compensation of the temperature drift of the offset compensation component (second embodiment) ).
- the two capacitors C1 and C2 have their common terminal BC which is connected to the feedback loop 14 and via the latter to a first input of the amplifier 12, this amplifier having a second input which receives a reference voltage V Gnd ( earth voltage).
- the amplifier maintains the reference voltage at the common terminal BC.
- the feedback loop 14 comprises a reference capacitor C Ref which determines the value of the electrical output voltage V out of the amplifier, this voltage V out defining the analog measurement signal generated by the measurement circuit 8 which receives a first electrical signal from the sensor 4 and a second electrical signal from the compensation 10.
- the analog measurement signal is then supplied to an ADC converter which converts it into a digital signal S dig .
- the programmable capacitor Cos1 has a terminal, defining the output terminal of the compensation circuit, which is connected to said first input of said amplifier 12 and thus also to the feedback loop 14. More precisely, the output terminal of the compensation circuit is directly linked to a node N1 of the feedback loop, while the common terminal BC of the sensor 4 is directly linked to a node N2 of this feedback loop, the nodes N1 and N2 preferably being directly linked to each other, as shown in the Figure 2 , and electrically forming a single node.
- the excitation circuit 26 is arranged so as to be able to supply the analog sensor 4 with two electrical signals 16 and 17 having a maximum amplitude (voltage transition provided between Vss and V DD and vice versa) and to a terminal d 'input E3 of the compensation capacitor Cos1 an electric excitation signal 28 having a voltage transition between the lower supply voltage Vss and a variable voltage V IN , the latter having an affine dependence on the absolute temperature.
- the electric excitation signal 28 has a value / an amplitude which is an affine function of the absolute temperature.
- the component of the voltage V IN which is variable as a function of the temperature has a determined proportionality factor, which is selected so as to compensate for a temperature drift of an electrical assembly of the measuring device 22 comprising at least the compensation capacitor Cos1.
- the temperature-compensated electrical assembly further comprises the differential sensor 4.
- the constant component of the signal V IN is provided so that the offset of the analog sensor 4 is compensated for at a certain temperature, for example 25 ° C.
- a compensation capacitor Cos1 of fixed value is provided and the constant component of the electrical excitation signal of this capacitor is adjusted, or a constant component of the electrical excitation signal of the capacitor Cos1 is provided with a fixed value, for example 90% of V DD , and the capacitor Cos1 is provided programmable.
- the variable component VPTAT of the voltage V IN is provided proportional to the absolute temperature.
- the affine function 30 on a temperature scale expressed in degrees Celsius [° C] is shown at Figure 3 for a typical case.
- the voltage VPTAT has a value of about 38 mV at 25 ° C and it varies, with a positive slope, of about 16 mV for a temperature variation of 125 ° C (-40 ° C to 85 ° C).
- the positive slope provided here serves to compensate for a negative coefficient of the compensation capacitor for the dependence of its electrical value on the temperature.
- the voltage VPTAT generates an increase in the constant component, which is why it is expected to be lower than the supply voltage V DD which is the highest voltage available.
- VPTAT the supply voltage V DD can be selected for the constant component of the voltage V IN since the variable component is negative and therefore decreases the constant component.
- the value of the capacitor Cos1 is not identical to that of the capacitor Cos provided for in the art prior to Figure 1 , because if the value of the capacitor Cos is provided to compensate for the offset of the sensor, for example at 25 ° C for a voltage transition between Vss and V DD , the voltage applied to the capacitor Cos1 during the voltage transition of the signal 28 is less than V DD .
- the capacitor Cos1 in this case has a value greater than that of the capacitor Cos to produce the same compensation at 25 ° C.
- the Figure 4 shows a part of the excitation circuit 26 arranged to generate the variable voltage V PTAT of the Figure 3 .
- a current source I PTAT providing a current varying proportionally with the absolute temperature is integrated into the excitation circuit.
- Such a current source is known to those skilled in the art. It is obtained only by a particular electronic design which has the consequence that the current source intrinsically provides a current whose value is proportional to the absolute temperature. It is therefore a natural characteristic of the electronic circuit which results from the properties of MOS and / or bipolar transistors.
- variable voltage VPTAT With a slope that can be selected precisely according to the temperature dependence of the compensation capacitor, several switchable resistors R 2 to R n + 1 are provided (controlled by switches S 1 to S n ) arranged in series with a first resistor R1.
- the variable current I PTAT thus passes through resistor R1 and the other resistors which are selected.
- the offset compensation capacitor of the sensor also has a function of compensating or correcting a temperature drift of this compensation capacitor in association with a specific excitation signal provided. variable depending on temperature.
- the measuring device 32 differs from the measuring device 22 described above by the arrangement of the compensation circuit 34 and the excitation circuit 36.
- the measuring device 32 differs from the measuring device 22 by the fact that the compensation of the offset of the sensor via the capacitor Cos2 and the compensation for the temperature drift of this capacitor Cos2 are separated. More precisely, the programmable capacitor Cos2 receives, as in the prior art shown in Figure 1 , a signal excitation formed by a transition between the voltages Vss and V DD , that is to say between the two fixed supply voltages.
- this programmable capacitor for a given analog sensor 4, is not identical to that of the prior art because an additional capacitor C comp is provided to compensate for the temperature drift of the programmable capacitor Cos2 .
- the value of the capacitor Cos is selected to compensate for the offset, for example at a temperature of 25 ° C, while the value of the capacitor Cos2 is in fact selected to compensate for an offset at a temperature. substantially corresponding to absolute zero (-273 ° C).
- an additional capacitor C comp is provided in the compensation circuit 34.
- This additional capacitor receives its own excitation signal 38 which consists of a transition from voltage between voltage Vss and a voltage VPTAT, this signal being generated by the excitation circuit simultaneously with the other electrical signals 16, 17 and 18.
- the additional capacitor C comp can be provided of the same value as that of the capacitor Cos2, but this is not necessary. What matters is the value of the electric charge generated during the application of the excitation signal 38, namely the result of the value of the capacitor C comp multiplied by the voltage VPTAT, this result having to compensate for the variation of the electric charge supplied by the capacitor Cos2 as a function of the temperature.
- the additional capacity C comp may or may not be programmed.
- the voltage V PTAT corresponds for example to the graph 30 of the Figure 3 , possibly with another coefficient of proportionality, and its generation can be performed as shown in Figure 4 , with a selection of the proportionality coefficient. It will be noted that if the temperature dependence of the capacitor Cos2 is positive so that the compensation for this dependence must be negative, then the measuring device 32 will be arranged so that the excitation signal 38 consists of a transition between V DD and V DD + VPTAT with VPTAT having a negative value. It will be understood that these considerations apply to the case of a transition from Vss to V DD in signal 18 applied to capacitor Cos2; otherwise it is the reverse that occurs.
- the electrical excitation signal supplied to the capacitor for compensating for a temperature drift is a signal whose amplitude is substantially a linear function of the absolute temperature, while the signal Electrical excitation supplied to the offset compensation capacity of the sensor is a constant amplitude signal.
- the invention can be applied by analogy to a measuring device of the resistive type with a sensor formed by a differential resistance, namely two resistors in parallel.
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Description
La présente invention concerne le domaine des dispositifs électroniques de mesure d'un paramètre physique, en particulier un accéléromètre du type capacitif.The present invention relates to the field of electronic devices for measuring a physical parameter, in particular an accelerometer of the capacitive type.
En référence à la
- un capteur analogique 4 comprenant un composant électrique différentiel passif formé de deux capacités C1 & C2 de sensiblement même valeur, la valeur électrique fournie en sortie du composant électrique, à la borne commune BC des deux capacités, variant en fonction du paramètre physique détecté, notamment une accélération,
- un circuit d'excitation 6 du capteur analogique fournissant au composant électrique différentiel passif deux signaux électriques d'excitation inverses 16 et 17 qui sont respectivement appliqués périodiquement aux deux capacités pour effectuer des mesures successives du paramètre physique,
- un circuit de
mesure 8 comprenant unamplificateur 12 qui, associé à une boucle derétroaction 14 formant ce circuit de mesure, génère en sortie une tension électrique Vout qui est une fonction déterminée, notamment souhaitée proportionnelle, de la valeur du composant électrique différentiel passif, et - un circuit de
compensation 10 d'un offset éventuel du capteur analogique 4, ce circuit de compensation étant formé d'une capacité de compensation Cos qui est excitée par le circuit d'excitation 6, ce dernier fournissant à la capacité de compensation Cos un signal électrique d'excitation 18.
- an
analog sensor 4 comprising a passive differential electric component formed of two capacitors C1 & C2 of substantially the same value, the electric value supplied at the output of the electric component, to the common terminal BC of the two capacitors, varying as a function of the physical parameter detected, in particular acceleration, - an
excitation circuit 6 of the analog sensor supplying the passive differential electrical component with two inverse 16 and 17 which are respectively applied periodically to the two capacitors in order to carry out successive measurements of the physical parameter,electrical excitation signals - a
measuring circuit 8 comprising anamplifier 12 which, associated with afeedback loop 14 forming this measuring circuit, generates at output an electrical voltage V out which is a determined function, in particular desired proportional, of the value of the passive differential electrical component , and - a
compensation circuit 10 for a possible offset of theanalog sensor 4, this compensation circuit being formed by a compensation capacitor Cos which is excited by theexcitation circuit 6, the latter supplying the compensation capacitor Cos with anelectrical excitation signal 18.
Les signaux électriques d'excitation 16, 17 et 18 consistent en des transitions entre une tension inférieure / basse Vss de l'alimentation électrique et une tension supérieure / haute VDD de cette alimentation électrique (VDD définissant la tension d'alimentation), ces transitions étant appliquées respectivement aux entrées E1, E2 et E3. Plus précisément, le signal 16 présente des transitions de Vss à VDD alors que simultanément le signal 17 présente des transitions de VDD à Vss. Ainsi, le signal électrique résultant à la borne commune BC des deux capacités C1 et C2 a une composante variable qui est proportionnelle à la différence des valeurs respectives de ces deux capacités, soit proportionnelle à - CMEMS avec CMEMS = C2-C1.The electrical excitation signals 16, 17 and 18 consist of transitions between a lower / low voltage Vss of the electrical supply and an upper / high voltage V DD of this electrical supply (V DD defining the supply voltage), these transitions being applied respectively to the inputs E1, E2 and E3. More precisely,
Il est connu que les capteurs du type MEMS, notamment les capteurs à capacité différentielle, présentent avec les technologies de fabrication classiques une assez large dispersion de leurs offsets respectifs. Ainsi, il a été prévu une capacité Cos de compensation d'un offset, laquelle est programmable. Sa programmation est effectuée généralement lors du test du dispositif électronique de mesure. Si l'offset est négatif, c'est-à-dire CMENS présente une valeur négative pour une valeur nulle du paramètre physique détecté (par exemple une accélération nulle pour un accéléromètre), alors le signal électrique d'excitation 18 est sélectionné avec une transition descendante. Par contre, si l'offset est positif, le signal 18 est sélectionné avec une transition montante de VDD vers Vss comme prévu à la
La capacité Cos reçoit simultanément au capteur 4 un signal électrique d'excitation 18 qui consiste en une transition entre Vss et VDD. Comme les nœuds N1 et N2 sur la boucle de rétroaction 14 sont maintenus à la tension de référence VGnd par l'amplificateur 12 et cette boucle de rétroaction, la capacité de référence CRef agencée sur la boucle de rétroaction présente une tension variable dont la valeur est proportionnelle à la somme des tensions générées, d'une part, par le capteur 4 et, d'autre part, par le circuit de compensation. Ainsi, la capacité CRef présente une tension qui est proportionnelle à CMENS - Cos. La tension de la capacité de référence CRef définit la tension analogique de sortie Vout qui est donc proportionnelle à CMEMS - Cos et également proportionnelle au paramètre physique mesuré dans la mesure où l'offset du capteur est entièrement corrigé par le circuit de compensation. Le circuit de mesure 8 fournit en sortie un signal de mesure digital Sdig au moyen d'un convertisseur analogique-digital ADC, ce signal digital étant théoriquement proportionnel au paramètre physique mesuré.The capacitor Cos simultaneously receives from the
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L'invention a pour objectif d'augmenter la précision du dispositif de mesure de l'art antérieur décrit précédemment en diminuant sa dépendance à la température tout en conservant un coût de fabrication relativement faible.The object of the invention is to increase the precision of the measuring device of the prior art described above by reducing its dependence on temperature while maintaining a relatively low manufacturing cost.
Le capteur différentiel décrit précédemment peut présenter une certaine dépendance à la température, mais il se trouve que l'élément dont la dépendance en température induit la plus grande dérive en température dans le signal de mesure est la capacité Cos de compensation de l'offset, surtout si on s'en tient à une technologie commune usuelle pour réaliser cette capacité. On notera que la variation de la valeur de la capacité Cos en fonction de la température dépend de la technologie de fabrication du circuit de mesure et en particulier du circuit de compensation qui forment généralement ensemble avec le circuit d'excitation un seul et même circuit intégré. Dans le cadre de l'invention, on cherche ainsi premièrement à compenser la dérive en température de la capacité COS, mais l'invention permet aussi de tenir compte d'une éventuelle dérive en température du capteur, ce qui est très avantageux.The differential sensor described above may have a certain dependence on temperature, but it turns out that the element whose temperature dependence induces the greatest temperature drift in the measurement signal is the offset compensation capacitor Cos, especially if we stick to a common common technology to achieve this capability. It will be noted that the variation of the value of the capacitance Cos as a function of the temperature depends on the manufacturing technology of the measuring circuit and in particular on the compensation circuit which generally form together with the excitation circuit a single integrated circuit. . In the context of the invention, it is thus firstly sought to compensate for the temperature drift of the capacitor C OS , but the invention also makes it possible to take account of a possible temperature drift of the sensor, which is very advantageous.
A cet effet, l'invention concerne un dispositif électronique de mesure d'un paramètre physique comprenant :
- un capteur analogique formé d'un composant électrique différentiel passif dont la valeur varie en fonction du paramètre physique,
- un circuit d'excitation du capteur analogique agencé pour fournir au composant électrique différentiel passif au moins un premier signal électrique d'excitation,
- un circuit de mesure comprenant un amplificateur qui, associé à une boucle de rétroaction formant ce circuit de mesure, est prévu pour générer en sortie une tension électrique qui est une certaine fonction de ladite valeur dudit composant électrique différentiel passif, et
- un circuit de compensation d'un offset dudit composant électrique différentiel passif, ce circuit de compensation étant formé d'un premier composant électrique passif, ledit circuit d'excitation étant agencé pour fournir à ce premier composant électrique passif un deuxième signal électrique d'excitation ;
- an analog sensor formed of a passive differential electrical component whose value varies according to the physical parameter,
- an analog sensor excitation circuit designed to supply the passive differential electrical component with at least a first electrical excitation signal,
- a measuring circuit comprising an amplifier which, associated with a feedback loop forming this measuring circuit, is provided to generate at output an electric voltage which is a certain function of said value of said passive differential electric component, and
- a circuit for compensating an offset of said passive differential electrical component, this compensation circuit being formed of a first passive electrical component, said excitation circuit being arranged to supply this first passive electrical component with a second electrical excitation signal ;
Dans une variante de réalisation avantageuse, l'ensemble électrique comprend en outre le composant électrique différentiel passif formant le capteur.In an advantageous variant embodiment, the electrical assembly further comprises the passive differential electrical component forming the sensor.
Dans un premier mode de réalisation, le composant électrique du circuit de compensation dont la dérive en température est compensée est ledit premier composant électrique passif et le signal électrique d'excitation est donc ledit deuxième signal électrique d'excitation. Selon l'invention, le deuxième signal électrique d'excitation a une valeur / amplitude qui est une fonction affine de la température absolue.In a first embodiment, the electrical component of the compensation circuit whose temperature drift is compensated is said first passive electrical component and the electrical excitation signal is therefore said second electrical excitation signal. According to the invention, the second electrical excitation signal has a value / amplitude which is an affine function of the absolute temperature.
Dans un deuxième mode de réalisation, le composant électrique du circuit de compensation dont la dérive en température est compensée est un deuxième composant électrique passif qui est incorporé dans le circuit de compensation. Le signal électrique d'excitation qui est appliqué à ce deuxième composant électrique est un troisième signal électrique d'excitation dont l'amplitude est sensiblement une fonction linéaire de la température absolue, le deuxième signal électrique d'excitation fourni au premier composant électrique passif étant un signal d'amplitude constante.In a second embodiment, the electrical component of the compensation circuit whose temperature drift is compensated is a second passive electrical component which is incorporated in the compensation circuit. The electrical excitation signal which is applied to this second electrical component is a third electrical excitation signal, the amplitude of which is substantially a linear function of the absolute temperature, the second electrical excitation signal supplied to the first passive electrical component being a constant amplitude signal.
Le dispositif électronique de mesure selon l'invention présente plusieurs avantages. En particulier, l'invention est avantageuse en ce qu'elle propose une compensation du type analogique avec des éléments électriques aisément réalisables, en particulier le circuit de compensation peut être réalisé entièrement dans la même technologie que le circuit de mesure. En effet, l'homme du métier penserait en premier lieu à corriger une dérive en température au niveau de la technologie de fabrication du circuit de mesure, notamment en utilisant une technologie MiM pour réaliser la capacité de compensation d'offset. Mais une telle solution est coûteuse. Une autre solution qui peut venir à l'esprit de l'homme du métier est une correction implémentée dans un circuit logique recevant le signal Sdig, mais une telle solution pose entre autre le problème de la détermination de la température à laquelle est soumis le circuit analogique de mesure.The electronic measuring device according to the invention has several advantages. In particular, the invention is advantageous in that it provides compensation of the analog type with easily achievable electrical elements, in particular the compensation circuit can be produced entirely in the same technology as the measurement circuit. In fact, a person skilled in the art would first of all think of correcting a temperature drift at the level of the measurement circuit manufacturing technology, in particular by using MiM technology to achieve the offset compensation capacity. But such a solution is expensive. Another solution which may come to the mind of those skilled in the art is a correction implemented in a logic circuit receiving the signal S dig , but such a solution poses, among other things, the problem of determining the temperature to which the device is subjected. analog measurement circuit.
Par contre, la solution selon l'invention est moins onéreuse et elle ne demande pas de capteur de température fournissant un signal de température à un circuit logique. La compensation de la dérive en température est effectuée au travers d'une tension variable générée à cet effet par le circuit d'excitation qui comprend par exemple une source de courant proportionnelle à la température absolue, connue de l'homme du métier, cette source de courant permettant de générer une certaine tension également proportionnelle à la température absolue qui est appliquée soit au composant de compensation d'offset (premier mode de réalisation), soit à un composant additionnel dédié à la compensation de la dérive en température du composant de compensation d'offset (deuxième mode de réalisation).On the other hand, the solution according to the invention is less expensive and it does not require a temperature sensor supplying a temperature signal to a logic circuit. The compensation of the temperature drift is carried out through a variable voltage generated for this purpose by the excitation circuit which comprises for example a current source proportional to the absolute temperature, known to those skilled in the art, this source of current to generate a certain voltage also proportional to the absolute temperature which is applied either to the offset compensation component (first embodiment), or to an additional component dedicated to the compensation of the temperature drift of the offset compensation component (second embodiment) ).
L'invention sera décrite ci-après de manière plus détaillée à l'aide des dessins annexés, donnés à titre d'exemples nullement limitatifs, dans lesquels :
- La
figure 1 , déjà décrite, représente le schéma électronique d'un dispositif de mesure d'un paramètre physique du type à capacité différentielle de l'art antérieur, ce dispositif servant notamment d'accéléromètre. - La
figure 2 représente le schéma électronique d'un premier mode de réalisation selon l'invention, - La
figure 3 montre le graphe d'une tension VPTAT appliquée à une capacité du circuit de compensation pour corriger une dérive en température, - La
figure 4 montre un schéma électrique d'un circuit de génération de la tension VPTAT permettant de varier le coefficient de proportionnalité entre cette tension et la température, et - La
figure 5 représente le schéma électronique d'un deuxième mode de réalisation selon l'invention.
- The
figure 1 , already described, represents the electronic diagram of a device for measuring a physical parameter of the differential capacitance type of the prior art, this device serving in particular as an accelerometer. - The
figure 2 represents the electronic diagram of a first embodiment according to the invention, - The
figure 3 shows the graph of a voltage VPTAT applied to a capacitor of the compensation circuit to correct a temperature drift, - The
figure 4 shows an electrical diagram of a circuit for generating voltage V PTAT making it possible to vary the coefficient of proportionality between this voltage and the temperature, and - The
figure 5 represents the electronic diagram of a second embodiment according to the invention.
A l'aide des
Comme le dispositif de mesure de l'art antérieur décrit précédemment, le dispositif de mesure 22 comprend :
- un capteur analogique 4 formé d'une capacité différentielle, c'est-à-dire d'une paire de capacités C1, C2 qui sont agencées en parallèle et prévues avec des valeurs identiques, ces deux capacités étant excitées par des signaux inversés 16, 17, appliqués respectivement aux deux entrées E1 et E2, de manière à fournir à la borne de sortie commune BC un signal électrique correspondant à une différence entre les deux signaux électriques respectifs générés par les deux capacités et dont la valeur varie en fonction du paramètre physique considéré,
un circuit d'excitation 26 du capteur analogique fournissant aux deux entrées E1 et E2 de la capacité différentielle C2 - C1 les deux signaux électriques d'excitation 16, 17,- un circuit de mesure 8 comprenant un amplificateur 12 qui, associé à une boucle de rétroaction 14 formant ce circuit de mesure, génère en sortie une tension électrique Vout qui est une fonction déterminée de la valeur du signal électrique fourni par le capteur analogique 4, et
un circuit 10 de compensation d'un offset du capteur analogique, ce circuit de compensation étant formé d'une capacité de compensation Cos1 qui est excitée parle circuit d'excitation 26.
- an
analog sensor 4 formed of a differential capacitor, that is to say of a pair of capacitors C1, C2 which are arranged in parallel and provided with identical values, these two capacitors being excited by 16, 17, applied respectively to the two inputs E1 and E2, so as to supply to the common output terminal BC an electric signal corresponding to a difference between the two respective electric signals generated by the two capacitors and whose value varies according to the physical parameter considered,inverted signals - an
excitation circuit 26 of the analog sensor supplying to the two inputs E1 and E2 of the differential capacitor C2 - C1 the two electrical excitation signals 16, 17, - a measuring
circuit 8 comprising anamplifier 12 which, associated with afeedback loop 14 forming this measuring circuit, generates at output an electrical voltage V out which is a determined function of the value of the electrical signal supplied by theanalog sensor 4, and - a
circuit 10 for compensating an offset of the analog sensor, this compensation circuit being formed by a compensation capacitor Cos1 which is excited by theexcitation circuit 26.
Les deux capacités C1 et C2 ont leur borne commune BC qui est reliée à la boucle de rétroaction 14 et via celle-ci à une première entrée de l'amplificateur 12, cet amplificateur ayant une deuxième entrée qui reçoit une tension de référence VGnd (tension de terre). L'amplificateur maintient la tension de référence à la borne commune BC. Comme exposé précédemment, la boucle de rétroaction 14 comprend une capacité de référence CRef qui détermine la valeur de la tension électrique de sortie Vout de l'amplificateur, cette tension Vout définissant le signal analogique de mesure engendré par le circuit de mesure 8 qui reçoit un premier signal électrique du capteur 4 et un deuxième signal électrique du circuit de compensation 10. Le signal analogique de mesure est ensuite fourni à un convertisseur ADC qui le convertit en un signal digital Sdig. La capacité programmable Cos1 a une borne, définissant la borne de sortie du circuit de compensation, qui est reliée à ladite première entrée dudit amplificateur 12 et ainsi également à la boucle de rétroaction 14. Plus précisément, la borne de sortie du circuit de compensation est directement reliée à un nœud N1 de la boucle de rétroaction, alors que la borne commune BC du capteur 4 est directement reliée à un nœud N2 de cette boucle de rétroaction, les nœuds N1 et N2 étant de préférence directement reliés entre eux, comme représenté à la
Selon l'invention, le circuit d'excitation 26 est agencé de manière à pouvoir fournir au capteur analogique 4 deux signaux électriques 16 et 17 présentant une amplitude maximale (transition de tension prévue entre Vss et VDD et inversement) et à une borne d'entrée E3 de la capacité de compensation Cos1 un signal électrique d'excitation 28 présentant une transition en tension entre la tension d'alimentation inférieure Vss et une tension variable VIN, cette dernière ayant une dépendance affine à la température absolue. En d'autres termes, le signal électrique d'excitation 28 a une valeur / une amplitude qui est une fonction affine de la température absolue.According to the invention, the
La composante de la tension VIN qui est variable en fonction de la température a un facteur de proportionnalité déterminé, lequel est sélectionné de manière à compenser une dérive en température d'un ensemble électrique du dispositif de mesure 22 comprenant au moins la capacité de compensation Cos1. Dans une variante avantageuse, l'ensemble électrique compensé en température comprend en outre le capteur différentiel 4.The component of the voltage V IN which is variable as a function of the temperature has a determined proportionality factor, which is selected so as to compensate for a temperature drift of an electrical assembly of the measuring
La composante constante du signal VIN est prévue de manière que l'offset du capteur analogique 4 soit compensé à une certaine température, par exemple 25°C. Il y a deux variantes possibles pour compenser précisément l'offset. Soit on prévoit une capacité de compensation Cos1 de valeur fixe et on ajuste la composante constante du signal électrique d'excitation de cette capacité, soit on prévoit une composante constante du signal électrique d'excitation de la capacité Cos1 avec une valeur fixe, par exemple 90% de VDD, et la capacité Cos1 est prévue programmable.The constant component of the signal V IN is provided so that the offset of the
La composante variable VPTAT de la tension VIN est prévue proportionnelle à la température absolue. La fonction affine 30 sur une échelle de température exprimée en degré Celsius [°C] est représentée à la
La
De manière générale, dans le premier mode de réalisation, la capacité de compensation de l'offset du capteur présente également une fonction de compensation ou correction d'une dérive en température de cette capacité de compensation en association avec un signal d'excitation spécifique prévu variable en fonction de la température.In general, in the first embodiment, the offset compensation capacitor of the sensor also has a function of compensating or correcting a temperature drift of this compensation capacitor in association with a specific excitation signal provided. variable depending on temperature.
En référence à la
Comme indiqué ci-avant, pour compenser la dérive en température de la capacité programmable Cos2, il est prévu une capacité additionnelle Ccomp dans le circuit de compensation 34. Cette capacité additionnelle reçoit un propre signal d'excitation 38 qui consiste en une transition de tension entre la tension Vss et une tension VPTAT, ce signal étant généré par le circuit d'excitation simultanément aux autres signaux électriques 16, 17 et 18. La capacité additionnelle Ccomp peut être prévue de même valeur que celle de la capacité Cos2, mais ceci n'est pas nécessaire. Ce qui importe, c'est la valeur de la charge électrique générée lors de l'application du signal d'excitation 38, à savoir le résultat de la valeur de la capacité Ccomp multipliée par la tension VPTAT, ce résultat devant compenser la variation de la charge électrique fournie par la capacité Cos2 en fonction de la température. La capacité additionnelle Ccomp peut être prévue programmable ou non. La tension VPTAT correspond par exemple au graphe 30 de la
De manière générale, dans le deuxième mode de réalisation, le signal électrique d'excitation fourni à la capacité de compensation d'une dérive en température est un signal dont l'amplitude est sensiblement une fonction linéaire de la température absolue, alors que le signal électrique d'excitation fourni à la capacité de compensation d'un offset du capteur est un signal d'amplitude constante.In general, in the second embodiment, the electrical excitation signal supplied to the capacitor for compensating for a temperature drift is a signal whose amplitude is substantially a linear function of the absolute temperature, while the signal Electrical excitation supplied to the offset compensation capacity of the sensor is a constant amplitude signal.
Divers avantages de l'invention sont :
- Une compensation / correction de la dépendance en température du dispositif de mesure, le capteur analogique compris ou non.
- Les éléments prévus pour la compensation en température sont tous intégré dans le circuit électronique de mesure associé au capteur analogique.
- La compensation en température est prévue ajustable.
- Quasi aucun impact négatif sur la consommation électrique du dispositif de mesure.
- Quasi aucun bruit généré dans le signal par la compensation en température.
- Les divers éléments prévus pour la compensation en température ne nécessitent pas l'utilisation de technologies spéciales et onéreuses.
- L'augmentation de surface du circuit intégré formant le dispositif de mesure est marginale.
- Dans une variante évoluée, non seulement la dépendance en température de la capacité de compensation d'un offset du capteur peut être corrigée, mais également celle d'un ensemble comprenant le capteur et cette capacité de compensation.
- Compensation / correction of the temperature dependence of the measuring device, including the analog sensor or not.
- The elements provided for the temperature compensation are all integrated into the electronic measurement circuit associated with the analog sensor.
- The temperature compensation is provided adjustable.
- Almost no negative impact on the power consumption of the measuring device.
- Almost no noise generated in the signal by the temperature compensation.
- The various elements provided for temperature compensation do not require the use of special and expensive technologies.
- The increase in surface area of the integrated circuit forming the measuring device is marginal.
- In an advanced variant, not only the temperature dependence of the compensation capacity of an offset of the sensor can be corrected, but also that of an assembly comprising the sensor and this compensation capacity.
Finalement, on notera que l'invention peut s'appliquer par analogie à un dispositif de mesure du type résistif avec un capteur formé d'une résistance différentielle, à savoir de deux résistances en parallèle.Finally, it will be noted that the invention can be applied by analogy to a measuring device of the resistive type with a sensor formed by a differential resistance, namely two resistors in parallel.
Claims (10)
- Electronic device (22; 32) for measuring a physical parameter comprising:- an analogue sensor (4) formed from a passive differential electrical component (C1, C2), the value of which varies as a function of the physical parameter,- an excitation circuit (26; 36) of the analogue sensor arranged in order to provide, to the passive differential electrical component, at least one first electrical excitation signal (16, 17),- a measuring circuit (8) comprising an amplifier (12) which, connected to a feedback loop (14) forming this measuring circuit, is provided in order to generate, at output, an electrical voltage (Vout) which is a certain function of said value of said passive differential electrical component, and- a circuit (10) for compensating for an offset of said passive differential electrical component, this compensation circuit (10) comprising a first passive electrical component (Cos1; Cos2), said excitation circuit (26 ; 36) being arranged in order to provide, to this first passive electrical component, a second electrical excitation signal (28; 18) ;characterised in that said excitation circuit is arranged in order to be able to provide to an electrical component (Cos1; Ccomp) of the compensation circuit (10) an electrical excitation signal having an affine dependence or a linear dependence on the absolute temperature with a determined proportionality factor, the proportionality factor being selected in order to compensate for a drift in temperature of an electrical assembly of the measuring device comprising at least the first passive electrical component of the compensation circuit.
- Electronic measuring device according to claim 1, characterised in that said electrical assembly comprises furthermore said passive differential electrical component (C1, C2).
- Electronic measuring device according to claim 1 or 2, characterised in that said electrical component, arranged so as to receive said electrical excitation signal having an affine dependence or a linear dependence on the absolute temperature, is said first passive electrical component (Cos1) and said electrical excitation signal, having an affine dependence or a linear dependence on the absolute temperature, is said second electrical excitation signal; and in that the second electrical excitation signal (28) has an amplitude which is an affine function of the absolute temperature.
- Electronic measuring device according to claim 1 or 2, characterised in that said electrical component, arranged so as to receive said electrical excitation signal having an affine dependence or a linear dependence on the absolute temperature, is a second passive electrical component (Ccomp); and in that said electrical excitation signal, having an affine dependence or a linear dependence on the absolute temperature, is a third electrical excitation signal (38), the amplitude of which is substantially a linear function of the absolute temperature, the second electrical excitation signal (18), which is intended for the first passive electrical component (Cos2), being a constant amplitude signal.
- Electronic measuring device according to claim 3, characterised in that said passive differential electrical component is formed from a first capacitance (C1) and from a second capacitance (C2) which are arranged in parallel, the first electrical excitation signal (16) being intended for the first capacitance, whilst a third electrical signal (17), inverted relative to the first electrical signal and able to be generated by the excitation circuit, is supplied to the second capacitance.
- Electronic measuring device according to the preceding claim, characterised in that the first and second capacitances (C1, C2) have a common terminal (BC) which is connected to the feedback loop (14) and to a first input of the amplifier (12), this amplifier having a second input which receives a reference voltage, in particular an earth voltage (VGnd), which is applied to said common terminal by the amplifier and the feedback loop; and in that the feedback loop comprises a reference capacitance (CRef) which determines the value of said electrical output voltage (Vout) of the amplifier, this value being substantially proportional to the value of said physical parameter.
- Electronic measuring device according to the preceding claim, characterised in that the first passive electrical component is a programmable capacitance (Cos1) for compensating for the offset and for a drift in temperature of said electrical assembly, this programmable capacitance having a terminal which is connected to the first input of said amplifier.
- Electronic measuring device according to claim 4, characterised in that said passive differential electrical component is formed from a first capacitance (C1) and from a second capacitance (C2) which are arranged in parallel, the first electrical excitation signal (16) being intended for the first capacitance, whilst a fourth electrical signal (17), inverted relative to the first electrical signal and able to be generated by the excitation circuit, is intended for the second capacitance.
- Electronic measuring device according to the preceding claim, characterised in that the first and second capacitances have a common terminal (BC) which is connected to the feedback loop (14) and to a first input of the amplifier (12), this amplifier having a second input which receives a reference voltage, in particular an earth voltage (VGnd), which is applied to said common terminal by the amplifier and the feedback loop; and in that the feedback loop comprises a reference capacitance (CRef) which determines the value of said electrical output voltage (Vout) of the amplifier, this value being substantially proportional to the value of said physical parameter.
- Electronic measuring device according to the preceding claim, characterised in that the first passive electrical component is a programmable capacitance (Cos2) for compensating for the offset with a terminal which is connected to the first input of said amplifier; and in that the second passive electrical component (Ccomp) is a capacitance for compensating for a drift in temperature of said electrical assembly.
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EP17205858.8A EP3495826B1 (en) | 2017-12-07 | 2017-12-07 | Electronic device for measuring a physical parameter |
JP2018227042A JP2019101043A (en) | 2017-12-07 | 2018-12-04 | Electronic device for measuring physical parameter |
US16/210,005 US10976340B2 (en) | 2017-12-07 | 2018-12-05 | Electronic device for measuring a physical parameter |
KR1020180156350A KR102117168B1 (en) | 2017-12-07 | 2018-12-06 | Electronic device for measuring a physical parameter |
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JP4473516B2 (en) * | 2003-03-25 | 2010-06-02 | 株式会社デンソー | Mechanical quantity sensor |
US7287429B2 (en) * | 2004-03-25 | 2007-10-30 | Denso Corporation | Capacitive acceleration sensor system |
FR2894412B1 (en) * | 2005-12-02 | 2008-02-29 | Thales Sa | DEVICE FOR DIGITAL ACQUISITION OF AN AMPLITUDE MODULATION SIGNAL |
US7368923B2 (en) * | 2005-12-22 | 2008-05-06 | Honeywell International Inc. | Time interval trimmed differential capacitance sensor |
JP2008304262A (en) | 2007-06-06 | 2008-12-18 | Freescale Semiconductor Inc | Temperature compensation circuit, trimming circuit and acceleration detecting apparatus |
US7520170B2 (en) * | 2007-07-10 | 2009-04-21 | Freescale Semiconductor, Inc. | Output correction circuit for three-axis accelerometer |
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US9423308B2 (en) * | 2012-01-12 | 2016-08-23 | Universiteit Twente | Six-axis force-torque sensor |
US10006930B2 (en) * | 2014-06-03 | 2018-06-26 | Northrop Grumman Systems Corporation | Performance optimization of a differential capacitance based motion sensor |
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