EP3456969A1 - Gas transportation device - Google Patents

Gas transportation device Download PDF

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Publication number
EP3456969A1
EP3456969A1 EP18190213.1A EP18190213A EP3456969A1 EP 3456969 A1 EP3456969 A1 EP 3456969A1 EP 18190213 A EP18190213 A EP 18190213A EP 3456969 A1 EP3456969 A1 EP 3456969A1
Authority
EP
European Patent Office
Prior art keywords
flow guiding
gas
guiding unit
unit set
holding component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP18190213.1A
Other languages
German (de)
English (en)
French (fr)
Inventor
Hao-Jan Mou
Chi-Feng Huang
Wei-Ming Lee
Ching-Sung Lin
Yung-Lung Han
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microjet Technology Co Ltd
Original Assignee
Microjet Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microjet Technology Co Ltd filed Critical Microjet Technology Co Ltd
Publication of EP3456969A1 publication Critical patent/EP3456969A1/en
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Definitions

  • the present disclosure relates to a gas transportation device, and more particularly to a miniature, thin and silent gas transportation device.
  • gas transportation device With the rapid advancement of science and technology, the application of gas transportation device tends to be more and more diversified.
  • the gas transportation device is utilized therein. It is obviously that the conventional gas transportation devices gradually tend to miniaturize the structure and maximize the flow rate thereof.
  • the gas transportation device is mainly constructed by stacking the conventional mechanism components. Moreover, the miniaturization and thinning of the entire device are achieved by minimizing or thinning each mechanism component.
  • miniaturizing the structure of the conventional mechanism components it is difficult to control the dimensional accuracy and the assembly accuracy. As a result, the product yield rate varies. Moreover, it even results in an unstable flow of gas transportation.
  • the conventional gas transportation device also has the problem of insufficient transportation amount. It is difficult to meet the needs of transporting a great amount of gas by a solo gas transportation device.
  • the conventional gas transportation devices usually have conducting pins protruding outwardly for the purpose of power connection. In that case, if a plurality of conventional gas transportation devices are arranged side by side to increase the amount of the transportation, it is difficult to control the assembly accuracy thereof.
  • the conducting pins are likely to cause obstacles for assembling, and the wires provided for the external connection is too complicated to be set up. Therefore, it is still difficult to increase the amount of the transportation by the methods described above, and the arrangement of the conventional gas transportation devices cannot be flexibly applied.
  • the gas transportation device also avoids the difficulty of controlling the dimensional accuracy and overcomes the problem of the insufficient flow rate.
  • the present disclosure provides a miniature gas transportation device to be flexibly applied to various apparatus or equipment.
  • the object of the present disclosure is to provide a gas transportation device.
  • the gas transportation device is miniaturized and integrally fabricated from one piece by a micro-electromechanical process.
  • it overcomes the problem that the conventional gas transportation device cannot have a small size, be miniaturized and avoid the difficulty of controlling the dimensional accuracy and the insufficient flow rate at the same time.
  • a gas transportation device including a first flow guiding unit set and a second flow guiding unit set, each of which is constructed by a plurality of flow guiding units.
  • Each flow guiding unit includes an inlet and an outlet. While the flow guiding unit is actuated, gas is inhaled through the inlet thereof and discharged out through the outlet thereof.
  • a gas-collection chamber is disposed between the first flow guiding unit set and the second flow guiding unit set. The gas is inhaled through the inlets of the plurality of flow guiding units of the first flow guiding unit set, and transported to the gas-collection chamber through the outlets of the plurality of flow guiding units of the first flow guiding unit set.
  • the gas in the gas-collection chamber is inhaled through the inlets of the plurality of flow guiding units of the second flow guiding unit set, and discharged out through the outlets of the plurality of flow guiding units of the second flow guiding unit set, so as to achieve an adjustment of the amount of the gas to be transported.
  • the present disclosure provides a gas transportation device 1 including at least one first flow guiding unit set 10a, at least one second flow guiding unit set 10b, the at least one inlet 170, at least one outlet 160 and at least one gas-collection chamber 10c.
  • the numbers of the first flow guiding unit set 10a, the second flow guiding unit set 10b, the inlet 170, the outlet 160 and the gas-collection chamber 10c are exemplified by one for each respectively in the following embodiments but not limited thereto. It is noted that each of the first flow guiding unit set 10a, the second flow guiding unit set 10b, the inlet 170, the outlet 160 and the gas-collection chamber 10c can also be provided in plural numbers.
  • a gas transportation device 1 of the present disclosure includes a first flow guiding unit set 10a, a second flow guiding unit set 10b and a gas-collection chamber 10c.
  • the first flow guiding unit set 10a and the second flow guiding unit set 10b include a plurality of flow guiding units 10, respectively.
  • the gas-collection chamber 10c is disposed between the first flow guiding unit set 10a and the second flow guiding unit set 10b.
  • Each flow guiding unit 10 includes an inlet plate 17, a substrate 11, a resonance plate 13, an actuating plate 14, a piezoelectric component 15 and an outlet plate 16 sequentially stacked.
  • the inlet plate 17 has an inlet 170.
  • the resonance plate 13 of each flow guiding unit 10 has a central aperture 130 and a movable part 131.
  • a convergence chamber 12 is formed between the resonance plate 13 and the inlet plate 17.
  • the actuating plate 14 of each flow guiding unit 10 has a suspension part 141, an outer frame 142 and a plurality of vacant spaces 143.
  • the outlet plate 16 of each flow guiding unit 10 has an outlet 160. Its structure, characteristics and disposing methods will be further described in the following paragraph.
  • a plurality of inlets 170 of the inlet plate 17, a plurality of convergence chambers 12 of the substrate 11, a plurality of central apertures 130 and movable parts 131 of the resonance plate 13, a plurality of suspension parts 141 and vacant spaces 143 of the actuating plate 14, a plurality of piezoelectric components 15 and a plurality of outlets 160 of the outlet plate 16 collaboratively form a plurality of flow guiding units 10 of the first flow guiding unit set 10a and the second flow guiding unit set 10b.
  • each flow guiding unit 10 includes one convergence chamber 12, one central aperture 130, one movable part 131, one suspension part 141, at least one vacant space 143, one piezoelectric component 15 and one outlet 160, and the flow guiding units 10 share one inlet 170, but not limited thereto.
  • a gap g0 defined between the resonance plate 13 and the actuating plate 14 in each flow guiding unit 10 forms a first chamber 18 (as shown in FIG. 3A ).
  • a second chamber 19 is formed between the actuating plate 14 and the outlet plate 16 in each flow guiding unit 10 (as shown in FIG. 3A ).
  • each flow guiding unit 10 may also include one inlet 170, but not limited thereto.
  • each of the first flow guiding unit set 10a and the second flow guiding unit set 10b includes 40 flow guiding units 10, each of which may transport the gas independently, as shown in FIG. 1 .
  • Each outlet 160 of the second flow guiding unit set 10b is aligned with and corresponds to one flow guiding unit 10.
  • 40 flow guiding units 10 are arranged in two rows and each of the two rows has 20 flow guiding units 10. The two rows are correspondingly arranged side by side, but not limited thereto. The number and the arrangement thereof can be varied according to the practical requirements.
  • Each inlet plate 17 has the inlet 170, which is a through hole running through the inlet plate 17, so as to transport the gas therethrough.
  • the number of the inlet 170 of each inlet plate 17 is one. In some embodiments, the number of the inlet 170 of each inlet plate 17 can be more than one, but not limited thereto. The number and the arrangement thereof can be varied according to the practical requirements.
  • the inlet plate 17 further includes a filter device (not shown), but not limited thereto. The filter device can be disposed to seal the inlet 170 for filtering out the dust in the gas or the impurities in the gas. Consequently, it prevents the impurities and the dust, which may damage the inner components, from flowing into the gas transportation device 1.
  • the substrate 11 of the gas transportation device 1 further includes a driving circuit (not shown) electrically connected to the positive electrode and the negative electrode of the piezoelectric component 15, so as to provide a driving power, but not limited thereto.
  • the driving circuit can also be disposed at any position within the gas transportation device 1. The present disclosure is not limited thereto and the disposed position can be varied according to the practical requirements.
  • the resonance plate 13 of the gas transportation device 1 has a suspension structure.
  • the resonance plate 13 has the central apertures 130 and the movable parts 131.
  • Each flow guiding unit 10 has one central aperture 130 and one movable part 131 corresponding to the central aperture 130.
  • the central aperture 130 of the flow guiding unit 10 is located at the center of the movable part 131 and is a through hole, which penetrates through the resonance plate 13 and is in communication between the convergence chamber 12 and the first chamber 18, so as to flow and transport the gas therethrough.
  • the movable part 131 is part of the resonance plate 13 and may be a flexible structure. In response to the vibration of the actuating plate 14, the movable part 131 is driven to undergo a bending vibration that vibrates up and down so as to transport the gas. The actions thereof will be further described in the following.
  • the actuating plate 14 of the gas transportation device 1 is made of a metallic membrane or a polysilicon membrane, but not limited thereto.
  • the actuating plate 14 has a hollow and suspension structure.
  • the actuating plate 14 further has the suspension part 141 and the outer frame 142.
  • Each flow guiding unit 10 has one suspension part 141.
  • the suspension part 141 is connected to the outer frame 142 by a plurality of connection parts (not shown), so that the suspension part 141 is suspended and elastically supported by the outer frame 142.
  • the vacant spaces 143 are defined between the suspension part 141 and the outer frame 142, so as to flow the gas.
  • the suspension part 141 has a stepped structure. Namely, the suspension part 141 has a bulge (not shown).
  • the bulge can be for example but not limited to a circular convex structure, and formed on the bottom surface of the suspension part 141.
  • the depth of the first chamber 18 is maintained at a specific interval value. In this way, it is possible to avoid the problem that while the movable part 131 of the resonance plate 13 vibrates, the movable part 131 may collide the actuating plate 14 to generate the noise due to the depth of the first chamber 18 being too small.
  • the disposition of the bulge avoids the problem of insufficient gas transportation pressure due to the depth of the first chamber 18 being too large.
  • the present disclosure is not limited thereto.
  • each flow guiding unit 10 of the gas transportation device 1 has one piezoelectric component 15.
  • the piezoelectric component 15 is attached on a top surface of the suspension part 141 of the actuating plate 14.
  • the piezoelectric component 15 further has a positive electrode and a negative electrode (not shown) for electrical connection.
  • the piezoelectric component 15 generates a deformation in response to a voltage applied thereto, so as to drive the actuating plate 14 to vibrate along a vertical direction V in a reciprocating manner.
  • the vibration of the actuating plate 14 drives the resonance plate 13 to vibrate in resonance. In this way, a pressure gradient occurs in first chamber 18 between the resonance plate 13 and the actuating plate 14 so as to transport the gas.
  • the outlet plate 16 of the gas transportation device 1 includes the outlets 160.
  • Each flow guiding unit 10 has one outlet 160.
  • the outlet 160 is in air communication between the second chamber 19 and the outside of the outlet plate 16, and the gas flows from the second chamber 19 to an environment outside the outlet plate 16 through the outlet 160 so as to achieve gas transportation.
  • FIG. 3B to 3D are cross-sectional views illustrating processing actions of one flow guiding unit of the gas transportation device of FIG. 3A .
  • the flow guide unit 10 of the gas transportation device 1 shown in FIG. 3A is in a disable state (i.e., an initial state).
  • the gap g0 is formed between the resonance plate 13 and the actuating plate 14 so that the depth between the resonance plate 13 and the suspension part 141 of the actuating plate 14 can be maintained.
  • the gas can be transferred more rapidly, and the contact interference between the suspension part 141 and the resonance plate 13 can be reduced by maintaining a proper distance therebetween.
  • the generated noise can be largely reduced, but the present disclosure is not limited thereto.
  • the suspension part 141 of the actuating plate 14 vibrates upwardly to enlarge the volume of the first chamber 18 and reduce the pressure.
  • the gas is inhaled via the inlet 170 of the inlet plate 17 in accordance with the external pressure and converged into the convergence chamber 12 of the substrate 11.
  • the gas flows upwardly into the first chamber 18 via the central aperture 130 of the resonance plate 13 corresponding to the convergence chamber 12. Then, as shown in FIGS.
  • the movable part 131 of the resonance plate 13 is driven to vibrate upwardly in resonance with the vibration of the suspension part 141 of the actuating plate 14, and the suspension part 141 of the actuating plate 14 also vibrates downwardly at the same time. Consequently, the movable part 131 of the resonance plate 13 is attached to the suspension part 141 of the actuating plate 14 and thus a flowing space in the middle of the first chamber 18 between them is closed simultaneously.
  • the first chamber 18 is compressed to reduce the volume thereof and increase the pressure therein, and the second chamber 19 is increased in volume and decreased in pressure. Under this circumstance, the pressure gradient occurs to push the gas in the first chamber 18 moving toward two lateral sides and flowing into the second chamber 19 through the vacant spaces 143 of the actuating plate 14.
  • the suspension part 141 of the actuating plate 14 vibrates downwardly and drives the movable part 131 of the resonance plate 13 to vibrate downwardly, so as to further compress the first chamber 18 continuously. Most of the gas is transferred into the second chamber 19 and temporarily stored.
  • the suspension part 141 of the actuating plate 14 vibrates upwardly to compress the volume of and increase the pressure in the second chamber 19.
  • the gas stored in the second chamber 19 is discharged out of the outlet plate 16 through the outlet 160 so as to accomplish gas transportation.
  • the volume of the first chamber 18 is increased and the pressure thereof is reduced again. Therefore, the gas is once again inhaled via the inlet 170 of the inlet plate 17 in accordance with the external pressure, converged into the convergence chamber 12 of the substrate 11 and transported upwardly into the first chamber 18 via the central aperture 130 of the resonance plate 13 corresponding to the convergence chamber 12.
  • the suspension part 141 of the actuating plate 14 and the movable part 131 of the resonance plate 13 continuously vibrate upwardly and downwardly in a reciprocating manner, and the gas can be continuously introduced into the inlet 170 and transported toward the outlet 160, so as to accomplish the gas transportation.
  • the vertical reciprocating vibration frequency of the resonance plate 13 may be the same as the vibration frequency of the actuating plate 14. Namely, both of the resonance plate 13 and the actuating plate 14 may move in the same direction at the same time.
  • the processing actions can be adjustable according to the practical requirements, but not limited to that of the embodiments.
  • the flow guiding units 10 are connected in series to form the first flow guiding unit set 10a and the second flow guiding unit set 10b, respectively.
  • the second flow guiding unit set 10b is vertically stacked on the first flow guiding unit set 10a.
  • the first flow guiding unit set 10a and the second flow guiding unit set 10b are in communication with each other through the gas-collection chamber 10c. While the flow guiding units 10 of the first flow guiding unit set 10a are actuated, the gas is inhaled through the inlets 170 of the first flow guiding unit set 10a and transported to the gas-collection chamber 10c through the outlets 160 of the first flow guiding unit set 10a, so as to accumulate the gas.
  • the gas transportation device 1 can adjust the amount of the gas to be transported.
  • the numbers and the arrangements of the first flow guiding unit set 10a and the second flow guiding unit set 10b are identical, but not limited thereto. In other embodiments, the numbers and the arrangements of the first flow guiding unit set 10a and the second flow guiding unit set 10b can be different.
  • the first flow guiding unit set 10a and the second flow guiding unit set 10b of the gas transportation device 1 are applicable to various arrangements in design and can be connected to various driving circuits. Accordingly, the flexibility for application of the gas transportation device 1 is extremely high and thus the gas transportation device 1 is applicable to various electronic components.
  • the first flow guiding unit set 10a and the second flow guiding unit set 10b can be enabled to simultaneously transport the gas, so as to meet the requirement of transporting the gas at a great amount.
  • each flow guiding unit 10 can also be controlled to actuate or stop independently. For example, one part of the flow guiding units 10 are actuated and the other part of the flow guiding units 10 are stopped. Alternatively, it is also possible that one part of the flow guiding units 10 and the other part of the flow guiding units 10 are operated alternately, but not limited thereto. Thus, it facilitates to meet various gas transportation requirements easily and achieve a significant reduction in power consumption.
  • FIG. 4 is a schematic perspective view illustrating the outer appearance of a gas transportation device according to a second embodiment of the present disclosure.
  • the first flow guiding unit set (not shown) and the second flow guiding unit set 20b of the gas transportation device 2 are vertically stacked with each other.
  • the configuration of the gas transportation device 2 is similar to that of the forgoing first embodiment, and may not be described in detail herein.
  • the number of the flow guiding units 20 of the first flow guiding unit set 20a and the number of the flow guiding units 20 of the second flow guiding unit set 20b are both 80.
  • Each outlet 260 of the outlet plate 26 is aligned with and corresponds to one flow guiding unit 20.
  • the gas transportation device 2 includes 160 flow guiding units 20, each of which may transport the gas independently.
  • the structure of each flow guiding unit 20 is similar to that of the foregoing first embodiment and may not be described in detail herein.
  • 80 flow guiding units 20 of the first guiding unit set 20a (not shown) and those of the second guiding unit set 20b are arranged in four rows, respectively, and each of the four rows has 20 flow guiding units 20.
  • the four rows are correspondingly arranged side by side, but not limited thereto.
  • the number and the arrangement of the 80 flow guiding units 20 can be varied according to the practical requirements. By enabling the 80 flow guiding units 20 to transport the gas simultaneously, a greater amount of the gas can be transported when compared with the previous embodiment. Moreover, each flow guiding unit 20 can also be controlled to transport the gas independently, and thus the amount of the gas to be transported can be adjusted in a wider range. It is more flexible and applicable to all types of apparatuses required a large flow of gas, but not limited thereto. Please refer to FIG. 4 again, the number of the flow guiding units 20 of the first flow guiding unit set 20a and the number of the flow guiding units 20 of the second flow guiding unit set 20b are both 80. Each of flow guiding units 20 of the first guiding unit set 20a can be connected in series in lines or in rows and so does each of flow guiding units 20 of the second guiding unit set 20b. Each line or each row has 20 flow guiding units 20.
  • FIG. 5 is a schematic perspective view illustrating the outer appearance of a gas transportation device according to a third embodiment of the present disclosure.
  • the gas transportation device 3 includes a circular structure and a first flow guiding unit set 30a (not shown) and a second flow guiding unit set 30b vertically stacked with each other.
  • a gas-collection chamber (not shown) is disposed between the first flow guiding unit set 30a (not shown) and the second flow guiding unit set 30b.
  • the configuration of the gas transportation device 3 is similar to that of the forgoing embodiments, and may not be described in detail herein.
  • the number of the flow guiding units 30 of the first flow guiding unit set 30a (not shown) and the number of the flow guiding units 30 of the second flow guiding unit set 30b are both 40.
  • Each outlet 360 of the outlet plate 36 is aligned with and corresponds to one flow guiding unit 30.
  • the first flow guiding unit set 30a and the second flow guiding unit set 30b of the gas transportation device 3 includes 40 flow guiding units 30, respectively, and each of the 40 flow guiding units 30 can be controlled independently to transport the gas.
  • the structure of each flow guiding unit 30 is similar to that of the foregoing first embodiment and may not be described in detail herein.
  • the 40 flow guiding units 30 of the first flow guiding unit set (not shown) and the 40 flow guiding units 30 of the second flow guiding unit set 30b are arranged in an annular manner, so as to be applied in various round or circular gas transportation channels.
  • the arrangement of the flow guiding units 30, it facilitates to meet various shapes of the desired devices and be more flexible and applicable to various gas transportation devices.
  • FIG. 6 is a schematic perspective view illustrating the outer appearance of a gas transportation device according to a fourth embodiment of the present disclosure.
  • the gas transportation device 4 includes a first flow guiding unit set 40a (not shown) and a second flow guiding unit set 40b vertically stacked with each other.
  • a gas-collection chamber (not shown) is disposed between the first flow guiding unit set 40a (not shown) and the second flow guiding unit set 40b.
  • the flow guiding units 40 of the first flow guiding unit set (not shown) and the flow guiding units 40 of the second flow guiding unit set 40b are arranged in a honeycomb pattern, respectively, but not limited thereto.
  • the gas transportation device 1 further includes at least one valve 5.
  • the valve 5 is disposed within the inlet 170 or the outlet 160 of the gas transportation device 1 or disposed in the inlet 170 and the outlet 160 at the same time.
  • a first aspect of the valve 5 includes a holding component 51, a sealing component 52 and a valve plate 53.
  • the valve plate 53 is disposed within an accommodation space 55 formed between the holding component 51 and the sealing component 52.
  • the holding component 51 includes at least two orifices 511.
  • the valve plate 53 includes at least two orifices 531 corresponding to the at least two orifices 511 of the holding component 51, respectively. More specifically, the at least two orifices 511 of the holding component 51 and the at least two orifices 531 of the valve plate 53 are aligned with each other, respectively.
  • the sealing component 52 includes at least one orifice 521. The at least one orifice 521 of the sealing component 52 is misaligned with the at least two orifices 511 of the holding component 51.
  • the valve 5 can be disposed within the inlet 170 of the inlet plate 17. While the gas transportation device 1 is enabled, the gas is inhaled into the gas transportation device 1 through the inlet 170 of the inlet plate 17. At this time, a suction force is generated inside the gas transportation device 1 and the valve plate 53 is in a state as shown in FIG. 7B . A gas flow created by the suction force flows along the direction of the arrow and pushes the valve plate 53 upwardly. Consequently, the valve plate 53 is in close contact with the holding component 51 and the orifices 521 of the sealing component 52 is opened at the same time. The gas is inhaled through the orifices 521 of the sealing component 52.
  • the orifices 531 of the valve plate 53 are aligned with the orifices 511 of the holding component 51, respectively, the orifices 531 and the orifices 511 are in communication with each other, and the gas is further transported upwardly and inhaled into the gas transportation device 1. While the actuating plate 14 of the gas transportation device 1 vibrates downwardly, the first chamber 18 is compressed to reduce the volume thereof, so that the gas is transported upwardly into the second chamber 19 through the vacant spaces 143. Meanwhile, the valve plate 53 of the valve 5 is pushed by the gas and the orifices 521 of the sealing component 52 returns back to the action as shown in FIG. 7A .
  • the actions described above make the gas flow in one direction, that is, the gas flows into the convergence chamber 12 and is accumulated in the convergence chamber 12 without flowing back. In this way, at the time when the actuating plate 14 of the gas transportation device 1 vibrates upwardly again, more gas is available for transportation and discharged out through the outlet 160, so as to increase the amount of the gas to be transported.
  • the holding component 51, the sealing component 52 and the valve plate 53 of the valve 5 are made of any suitable graphene material and formed a miniature valve.
  • the valve plate 53 is made of a charged material.
  • the holding component 51 is made of a bipolar conductive material.
  • the holding component 51 is electrically connected to a control circuit (not shown).
  • the control circuit is used to change electrical polarity (positive polarity or negative polarity) of the holding component 51.
  • the valve plate 53 is made of a negatively charged material, while the valve 5 is required to be opened, the holding component 51 is in positive polarity in response to the control of the control circuit.
  • valve plate 53 and the holding component 51 are charged with opposite polarity, the valve plate 53 moves toward the holding component 51 so that the valve 5 is in an open state (as shown in FIG. 7B ).
  • the holding component 51 is in negative polarity in response to the control of the control circuit. Since the valve plate 53 and the holding component 51 are charged with the same polarity, the valve plate 53 moves toward the sealing component 52 so that the valve 5 is in a closed state (as shown in FIG. 7A ).
  • the valve plate 53 is made of a magnetic material.
  • the holding component 51 is made of an electromagnet material.
  • the holding component 51 is electrically connected to a control circuit (not shown).
  • the control circuit is used to change magnetic polarity (positive polarity or negative polarity) of the holding component 51.
  • the valve plate 53 is made of a magnetic material and has negative polarity, while the valve 5 is required to be opened, the holding component 51 is in positive polarity in response to the control of the control circuit. Since the valve plate 53 and the holding component 51 are maintained in opposite polarity, the valve plate 53 moves toward the holding component 51 so that the valve 5 is in the open state (as shown in FIG. 7B ).
  • valve plate 53 is made of a magnetic material and has negative polarity
  • the holding component 51 is in negative polarity in response to the control of the control circuit. Since the valve plate 53 and the holding component 51 are maintained in the same polarity, the valve plate 53 moves toward the sealing component 52 so that the valve 5 is in a closed state (as shown in FIG. 7A ).
  • FIGS. 8A and 8B are cross-section views illustrating the actions of the valve in accordance with a fourth aspect and a fifth aspect of the present disclosure.
  • the valve 5 includes a holding component 51, a sealing component 52 and a flexible membrane 54.
  • the holding component 51 includes at least two orifices 511.
  • An accommodation space 55 is maintained between the holding component 51 and the sealing component 52.
  • the flexible membrane 54 is made of a flexible material, attached on a surface of the holding component 51 and disposed within the accommodation space 55.
  • the flexible membrane 54 includes at least two orifices 541 corresponding to the at least two orifices 511 of the holding component 51, respectively.
  • the at least two orifices 511 of the holding component 51 and the at least two orifices 541 of the flexible membrane 54 are aligned with each other, respectively.
  • the sealing component 52 includes at least one orifice 521 disposed thereon.
  • the orifice 521 of the sealing component 52 is misaligned with the at least two orifices 511 of the holding component 51.
  • the holding component 51 is made of a thermal expansion material and electrically connected to a control circuit (not shown).
  • the control circuit is used to heat the holding component 51 and keep the temperature of the holding component 51 under control. While the valve 5 is required to be opened, the holding component 51 is free of thermal expansion in response to the control of the control circuit and the accommodation space 55 between the holding component 51 and the sealing component 52 is maintained so that the valve 5 is in the open state (as shown in FIG. 8A ). Alternatively, while the valve 5 is required to be closed, the holding component 51 is heated to expand itself in response to the control of the control circuit, thereby moving toward and pressing against the sealing component 52. Consequently, the flexible membrane 54 is in close contact with the at least one orifice 521 of sealing component 52 so that the valve 5 is in the closed state (as shown in FIG. 8B ).
  • the holding component 51 is made of a piezoelectric material and controlled by a control circuit (not shown) for deforming thereof.
  • a control circuit not shown for deforming thereof.
  • the holding component 51 is free of deformation and the accommodation space 55 between the holding component 51 and the sealing component 52 is maintained so that the valve 5 is in the open state (as shown in FIG. 8A ).
  • the holding component 51 is deformed, thereby moving toward and pressing against the sealing component 51. Consequently, the flexible membrane 54 is in close contact with the at least one orifice 521 of the sealing component 52 so that the valve 5 is in the closed state (as shown in FIG. 8B ).
  • each of spacing blocks of the holding component 51 which is aligned with one orifice 521 of the sealing component 52, may be independently controlled by the control circuit. Therefore, the transportation actions of the adjustable valve 5 may be provided, by which the amount of gas for transportation can be appropriately adjusted under control.
  • the present disclosure provides a gas transportation device including a plurality of flow guiding units.
  • a pressure gradient is generated to allow the gas to flow rapidly.
  • the plural flow guiding units form the first flow guiding unit set and the second flow guiding unit set.
  • the plural flow guiding units of the first flow guiding unit set and the second flow guiding unit set are disposed in a specific arrangement to adjust the flow amount of the gas to be transported.
  • a pressure gradient is generated in the designed flow channels and the compressed chambers, so as to facilitate the gas to flow at a high speed.
  • the gas is transported from the inlet side to the outlet side to accomplish the gas transportation.
  • the number, the arrangement and the driving modes of the flow guiding units can be varied flexibly according to the practical requirements of various gas transportation apparatuses and the amount of the gas to be transported. It facilitates to achieve the high transportation volume, the high performance and the high flexibility.
EP18190213.1A 2017-09-15 2018-08-22 Gas transportation device Withdrawn EP3456969A1 (en)

Applications Claiming Priority (1)

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TW106131785A TWI652408B (zh) 2017-09-15 2017-09-15 氣體輸送裝置

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EP3456969A1 true EP3456969A1 (en) 2019-03-20

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CN114100005A (zh) * 2020-08-31 2022-03-01 研能科技股份有限公司 过滤净化装置

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