EP3362799A4 - Linked micromechanical positioning apparatus for real-time testing and measurement - Google Patents

Linked micromechanical positioning apparatus for real-time testing and measurement Download PDF

Info

Publication number
EP3362799A4
EP3362799A4 EP15906190.2A EP15906190A EP3362799A4 EP 3362799 A4 EP3362799 A4 EP 3362799A4 EP 15906190 A EP15906190 A EP 15906190A EP 3362799 A4 EP3362799 A4 EP 3362799A4
Authority
EP
European Patent Office
Prior art keywords
linked
real
measurement
positioning apparatus
time testing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15906190.2A
Other languages
German (de)
French (fr)
Other versions
EP3362799B1 (en
EP3362799A1 (en
Inventor
Mikko VÄHÄSÖYRINKI
Markku Vimpari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensapex Oy
Original Assignee
Sensapex Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensapex Oy filed Critical Sensapex Oy
Publication of EP3362799A1 publication Critical patent/EP3362799A1/en
Publication of EP3362799A4 publication Critical patent/EP3362799A4/en
Application granted granted Critical
Publication of EP3362799B1 publication Critical patent/EP3362799B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/02—Hand grip control means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48728—Investigating individual cells, e.g. by patch clamp, voltage clamp
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/32—Micromanipulators structurally combined with microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/44—SICM [Scanning Ion-Conductance Microscopy] or apparatus therefor, e.g. SICM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Hematology (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Biophysics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Micromachines (AREA)
EP15906190.2A 2015-10-13 2015-10-13 Linked micromechanical positioning apparatus for real-time testing and measurement Active EP3362799B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/FI2015/050689 WO2017064354A1 (en) 2015-10-13 2015-10-13 Linked micromechanical positioning apparatus for real-time testing and measurement

Publications (3)

Publication Number Publication Date
EP3362799A1 EP3362799A1 (en) 2018-08-22
EP3362799A4 true EP3362799A4 (en) 2019-05-22
EP3362799B1 EP3362799B1 (en) 2023-09-13

Family

ID=58517855

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15906190.2A Active EP3362799B1 (en) 2015-10-13 2015-10-13 Linked micromechanical positioning apparatus for real-time testing and measurement

Country Status (4)

Country Link
US (1) US10427292B2 (en)
EP (1) EP3362799B1 (en)
JP (1) JP2018538512A (en)
WO (1) WO2017064354A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109029530A (en) * 2018-07-02 2018-12-18 浙江知瑞科技有限公司 A kind of multidimensional sensor device
CN113281660A (en) * 2021-05-21 2021-08-20 张家港清研检测技术有限公司 Method for detecting unqualified battery cell in retired power battery pack
EP4134744A1 (en) * 2021-08-09 2023-02-15 ASML Netherlands B.V. A sensor positioning method, a positioning system, a lithographic apparatus, a metrology apparatus, and a device manufacturing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002139414A (en) * 2000-10-31 2002-05-17 Sharp Corp Multi-probe type scan probe microscope apparatus and sample surface evaluation method using the same
US20050269035A1 (en) * 2004-06-07 2005-12-08 Eigo Kawakami Fine pattern forming apparatus and fine pattern inspecting apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5298975A (en) 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool
US5677709A (en) 1994-02-15 1997-10-14 Shimadzu Corporation Micromanipulator system with multi-direction control joy stick and precision control means
US7013717B1 (en) * 2001-12-06 2006-03-21 Veeco Instruments Inc. Manual control with force-feedback for probe microscopy-based force spectroscopy
JP2009202331A (en) 2007-07-27 2009-09-10 Nsk Ltd Manipulator, drive method of manipulator, manipulator system, and operating method of minute target object
WO2012018136A1 (en) * 2010-08-06 2012-02-09 日本精工株式会社 Manipulator system and method for manipulating microscopic object to be manipulated
JP5453664B1 (en) * 2013-07-16 2014-03-26 Ｗａｆｅｒ Ｉｎｔｅｇｒａｔｉｏｎ株式会社 Scanning probe microscope prober using self-detecting cantilever

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002139414A (en) * 2000-10-31 2002-05-17 Sharp Corp Multi-probe type scan probe microscope apparatus and sample surface evaluation method using the same
US20050269035A1 (en) * 2004-06-07 2005-12-08 Eigo Kawakami Fine pattern forming apparatus and fine pattern inspecting apparatus

Also Published As

Publication number Publication date
EP3362799B1 (en) 2023-09-13
EP3362799A1 (en) 2018-08-22
JP2018538512A (en) 2018-12-27
WO2017064354A1 (en) 2017-04-20
US20180272523A1 (en) 2018-09-27
US10427292B2 (en) 2019-10-01

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