EP3333423A1 - Miniaturfluidsteuerungsvorrichtung - Google Patents

Miniaturfluidsteuerungsvorrichtung Download PDF

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Publication number
EP3333423A1
EP3333423A1 EP17200870.8A EP17200870A EP3333423A1 EP 3333423 A1 EP3333423 A1 EP 3333423A1 EP 17200870 A EP17200870 A EP 17200870A EP 3333423 A1 EP3333423 A1 EP 3333423A1
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EP
European Patent Office
Prior art keywords
plate
gas
control device
fluid control
range
Prior art date
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Granted
Application number
EP17200870.8A
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English (en)
French (fr)
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EP3333423B1 (de
Inventor
Hao-Jan Mou
Yung-Lung Han
Chi-Feng Huang
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Microjet Technology Co Ltd
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Microjet Technology Co Ltd
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Publication of EP3333423A1 publication Critical patent/EP3333423A1/de
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Publication of EP3333423B1 publication Critical patent/EP3333423B1/de
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Definitions

  • the present invention relates to a fluid control device, and more particularly to a fluid control device for use with a slim and silent miniature pneumatic device.
  • fluid transportation devices used in many sectors such as pharmaceutical industries, computer techniques, printing industries or energy industries are developed toward elaboration and miniaturization.
  • the fluid transportation devices are important components that are used in for example micro pumps, micro atomizers, printheads or industrial printers. Therefore, it is important to provide an improved structure of the fluid transportation device.
  • pneumatic devices or pneumatic machines use motors or pressure valves to transfer gases.
  • the pneumatic devices or the pneumatic machines are bulky in volume.
  • the conventional pneumatic device fails to meet the miniaturization requirement, and is not suitable to be installed in or cooperated with a portable equipment.
  • annoying noise is readily generated.
  • the present invention provides a miniature fluid control device for use with a portable or wearable equipment or machine.
  • a piezoelectric ceramic plate When a piezoelectric ceramic plate is operated at a high frequency, a pressure gradient is generated in the fluid channels of the miniature fluid control device to facilitate the gas to flow at a high speed.
  • the gas can be transmitted from the inlet side to the outlet side. Consequently, the miniature pneumatic device is small, slim, portable and silent.
  • a miniature fluid control device for use with a miniature pneumatic device.
  • the miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator.
  • the gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. After a gas is introduced into the at least one convergence channel through the at least one inlet, the gas is guided by the at least one convergence channel and converged to the convergence chamber.
  • the resonance plate has a central aperture corresponding to the convergence chamber of the gas inlet plate.
  • the piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate.
  • a length of the suspension plate is in a range between 2mm and 4.5mm.
  • a width of the suspension plate is in a range between 2mm and 4.5mm.
  • a thickness of the suspension plate is in a range between 0.1mm and 0.3mm.
  • the outer frame includes at least one bracket by which the suspension plate and the outer frame are connected with each other.
  • the piezoelectric ceramic plate is attached on a first surface of the suspension plate.
  • a length of a side of the piezoelectric ceramic plate is equal to or less than a length of a side of the suspension plate.
  • the length of the piezoelectric ceramic plate is in a range between 2mm and 4.5mm.
  • a width of the piezoelectric ceramic plate is in a range between 2mm and 4.5mm.
  • a thickness of the piezoelectric ceramic plate is in a range between 0.05mm and 0.3mm.
  • a length/width ratio of the piezoelectric ceramic plate is in a range between 0.44 and 2.25.
  • the gas inlet plate, the resonance plate and the piezoelectric actuator are stacked on each other sequentially.
  • a gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber.
  • the gas is fed into the miniature fluid control device through the at least one inlet of the gas inlet plate, converged to the central cavity through the at least one convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through a vacant space between the at least one bracket of the piezoelectric actuator, and exited from the miniature fluid control device.
  • a miniature fluid control device for use with a miniature pneumatic device.
  • the miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator.
  • the piezoelectric actuator includes a suspension plate.
  • a length of the suspension plate is in a range between 2mm and 4.5mm.
  • a width of the suspension plate is in a range between 2mm and 4.5mm.
  • a thickness of the suspension plate is in a range between 0.1mm and 0.3mm.
  • the gas inlet plate, the resonance plate and the piezoelectric actuator are stacked on each other sequentially.
  • a gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber.
  • the present invention provides a miniature pneumatic device.
  • the miniature pneumatic device may be used in many sectors such as pharmaceutical industries, energy industries, computer techniques or printing industries for transporting gases.
  • FIG. 1A is a schematic exploded view illustrating a miniature pneumatic device according to an embodiment of the present invention and taken along a first viewpoint.
  • FIG. 1B is a schematic assembled view illustrating the miniature pneumatic device of FIG. 1A .
  • FIG. 2A is a schematic exploded view illustrating the miniature pneumatic device according to the embodiment of the present invention and taken along a second viewpoint.
  • FIG. 2B is a schematic assembled view illustrating the miniature pneumatic device of FIG. 2A .
  • FIGS. 7A to 7E schematically illustrate a gas-collecting operation of the miniature pneumatic device of FIG. 1A .
  • the miniature pneumatic device 1 comprises a miniature fluid control device 1A and a miniature valve device 1B.
  • the miniature fluid control device 1A comprises a housing 1a, a piezoelectric actuator 13, a first insulation plate 141, a conducting plate 15 and a second insulation plate 142.
  • the housing 1a comprises a gas collecting plate 16 and a base 10.
  • the base 10 is composed of a gas inlet plate 11 and a resonance plate 12.
  • the piezoelectric actuator 13 is aligned with the resonance plate 12.
  • the gas inlet plate 11, the resonance plate 12, the piezoelectric actuator 13, the first insulation plate 141, the conducting plate 15, the second insulation plate 142 and the gas collecting plate 16 are stacked on each other sequentially to be assembled while an outward surface of the gas inlet plate 11 is towards an input side.
  • the piezoelectric actuator 13 comprises a suspension plate 130, an outer frame 131, at least one bracket 132 and a piezoelectric ceramic plate 133.
  • the miniature valve device 1B comprises a valve film 17 and a gas outlet plate 18.
  • the gas collecting plate 16 comprises a bottom plate and a sidewall 168 protruding from the edges of the bottom plate.
  • the gas collecting plate 16 has a length and a width both in the range between 4mm and 10mm. Meanwhile, the length/width ratio of the gas collecting plate 16 is preferably in the range between 0.4 and 2.5.
  • the bottom plate and the sidewall 168 collaboratively define an accommodation space 16a where the piezoelectric actuator 13 is disposed within.
  • the structure of the miniature pneumatic device 1 in assembled state, taken from the front side, is shown in FIG. 1B and FIGS. 7A to 7E .
  • the valve film 17 and the gas outlet plate 18 of the miniature valve device 1B are stacked on each other and positioned on the bottom side of the gas collecting plate 16 of the miniature fluid control device 1A.
  • the gas outlet plate 18 has a pressure-releasing perforation 181 and an outlet structure 19.
  • the outlet structure 19 is adapted to be in communication with an inner space inside a target equipment (not shown), and the pressure-releasing perforation 181 is adapted to discharge the gas inside the miniature valve device 1B. As so, the gas pressure of the inner space of the target equipment can be released.
  • the miniature pneumatic device 1 in assembled state allows a gas to be fed into the miniature fluid control device 1A through at least one inlet 110 of the gas inlet plate 11 from the input side.
  • the piezoelectric actuator 13 is operable to be activated, and in response of the actions of the piezoelectric actuator 13, the gas is transferred downwardly through plural pressure chambers to the miniature valve device 1B.
  • the gas is transferred in one direction, being discharged from the outlet structure 19 and flows into the inner space of the target equipment (not shown). As a result, the pressure of the gas in the inner space of the target equipment is accumulated.
  • the gas inlet plate 11 of the miniature fluid control device 1A comprises a first surface 11b, a second surface 11a and the at least one inlet 110.
  • the gas inlet plate 11 has four inlets 110.
  • the inlets 110 run through the first surface 11b and the second surface 11a of the gas inlet plate 11, and the second surface 11a is towards exterior of the miniature pneumatic device 1 where is defined as the input side.
  • the gas is introduced into the miniature fluid control device 1A through the inlets 110.
  • at least one convergence channel 112 is formed on the first surface 11b of the gas inlet plate 11, and is in communication with the at least one inlet 110 of the gas inlet plate 11.
  • the number of the convergence channel 112 is identical to the number of the inlet 110.
  • the gas inlet plate 11 has four convergence channels 112. It is noted that the number of the at least one convergence channel 112 and the number of the at least one inlet 110 may be varied according to the practical requirements.
  • a central cavity 111 is formed on the central of the first surface 11b of the gas inlet plate 11 and located at the intersection of the four convergence channels 112 that forming a convergence chamber for temporarily storing the gas.
  • the central cavity 111 is in communication with all of the convergence channels 112, such that the gas entered by the inlets 110 would be introduced into the at least one convergence channel 112 and is guided to the central cavity 111.
  • the at least one inlet 110, the at least one convergence channel 112 and the central cavity 111 of the gas inlet plate 11 are integrally formed.
  • the gas inlet plate 11 is made of stainless steel.
  • the thickness of the gas inlet plate 11 is in the range between 0.3mm and 0.5mm, and preferably 0.4mm.
  • the depth of the convergence chamber defined by the central cavity 111 is equal to the depth of the at least one convergence channel 112, both of which are preferably in the range between 0.15mm and 0.25mm.
  • the resonance plate 12 is made of a flexible material, which is preferably but not exclusively copper.
  • the resonance plate 12 further has a central aperture 120 corresponding to the central cavity 111 of the gas inlet plate 11 that providing the gas for flowing through.
  • the thickness of the resonance plate 12 is in the range between 0.02mm and 0.07mm, and preferably 0.04mm.
  • FIG. 3A is a schematic perspective view illustrating the piezoelectric actuator of the miniature pneumatic device of FIG. 1A and taken along the front side.
  • FIG. 3B is a schematic perspective view illustrating the piezoelectric actuator of the miniature pneumatic device of FIG. 1A and taken along the rear side.
  • FIG. 3C is a schematic cross-sectional view illustrating the piezoelectric actuator of the miniature pneumatic device of FIG. 1A .
  • the piezoelectric actuator 13 comprises the suspension plate 130, the outer frame 131, the at least one bracket 132, and the piezoelectric ceramic plate 133.
  • the piezoelectric ceramic plate 133 is attached on a first surface 130b of the suspension plate 130.
  • the piezoelectric ceramic plate 133 In response to an applied voltage, the piezoelectric ceramic plate 133 would be subjected to a curvy vibration.
  • the suspension plate 130 comprises a middle portion 130d and a periphery portion 130e.
  • the suspension plate 130 is also subjected to the curvy vibration and vibrates from the middle portion 130d to the periphery portion 130e.
  • the at least one bracket 132 is connected between the suspension plate 130 and the outer frame 131, while the two ends of the bracket 132 are connected with the outer frame 131 and the suspension plate 130 respectively that the bracket 131 can elastically support the suspension plate 130.
  • At least one vacant space 135 is formed between the bracket 132, the suspension plate 130 and the outer frame 131 for allowing the gas to go through.
  • the type of the suspension plate 130 and the outer frame 131, and the type and the number of the at least one bracket 132 may be varied according to the practical requirements.
  • a conducting pin 134 is protruding outwardly from the outer frame 131 so as to be electrically connected with an external circuit (not shown).
  • the suspension plate 130 has a bulge 130c that makes the suspension plate 130 a stepped structure.
  • the bulge 130c is formed on a second surface 130a of the suspension plate 130, wherein the second surface 130a is opposing to the first surface 130b.
  • the bulge 130c may be a circular convex structure, the thickness of which is in the range between 0.02mm and 0.08mm, and preferably 0.03mm.
  • the diameter of the bulge 130c is 0.55 times as large as a length of a shortest side of the suspension plate 130. As shown in FIGS.
  • a top surface of the bulge 130c of the suspension plate 130 is coplanar with a second surface 131a of the outer frame 131, while the second surface 130a of the suspension plate 130 is coplanar with a second surface 132a of the bracket 132.
  • a first surface 130b of the suspension plate 130, a first surface 131b of the outer frame 131 and a first surface 132b of the bracket 132 are coplanar with each other.
  • the piezoelectric ceramic plate 133 is attached on the first surface 130b of the suspension plate 130.
  • the suspension plate 130 may be a square plate structure with two flat surfaces but the type of the suspension plate 130 may be varied according to the practical requirements.
  • the suspension plate 130, the at least bracket 132 and the outer frame 131 are integrally formed and produced by using a metal plate (e.g., a stainless steel plate).
  • the thickness of the suspension plate 130 is in the range between 0.1mm and 0.3mm, and preferably 0.2mm.
  • the length of the suspension plate 130 is in the range between 2mm and 4.5mm, and preferably in the range between 2.5mm and 3.5mm.
  • the width of the suspension plate 130 is in the range between 2mm and 4.5mm, and preferably in the range between 2.5mm and 3.5mm.
  • the thickness of the outer frame 131 is in the range between 0.1mm and 0.4mm, and preferably 0.3mm.
  • the piezoelectric ceramic plate 133 has the same shape with the suspension plate 130 but in smaller size, which means the longest side of the piezoelectric ceramic plate 133 is always equal to or shorter than the longest side of the suspension plate 130.
  • the piezoelectric ceramic plate 133 also has a square shape.
  • the thickness of the piezoelectric ceramic plate 133 is in the range between 0.05mm and 0.3mm, and preferably 0.10mm.
  • a length of a side of the piezoelectric ceramic plate 133 is equal to or less than a length of a side of the suspension plate 130.
  • the length of the side of the piezoelectric ceramic plate 133 is in the range between 2mm and 4.5mm, and preferably in the range between 2.5mm and 3.5mm.
  • the suspension plate 130 and the piezoelectric ceramic plate 133 may have a rectangular shape, and the width and the length of the rectangular shape is in the range between 2mm and 4.5mm, preferably in the range between 2.5mm and 3.5mm.
  • the length/width ratio of the piezoelectric ceramic plate 133 is in the range between 0.44 and 2.25.
  • the suspension plate 130 of the piezoelectric actuator 13 used in the miniature pneumatic device 1 of the present invention is a square suspension plate.
  • the square suspension plate can make the miniature pneumatic device 1 more power-saving.
  • the consumed power of the capacitive load at the resonance frequency is positively related to the resonance frequency. Since the resonance frequency of the square suspension plate is obviously lower than that of the circular square suspension plate, the consumed power of the square suspension plate is lower. Since the square suspension plate is more power-saving than the circular suspension plate, the piezoelectric actuator 13 with the square suspension plate is suitably used in the portable/wearable devices.
  • FIGS. 4A , 4B and 4C schematically illustrate various exemplary piezoelectric actuator used in the miniature pneumatic device of the present invention.
  • the suspension plate 130, the outer frame 131 and the at least one bracket 132 of the piezoelectric actuator 13 have various types.
  • FIG. 4A schematically illustrates the types (a) ⁇ (l) of the piezoelectric actuator.
  • the outer frame a1 and the suspension plate a0 are square, the outer frame a1 and the suspension plate a0 are connected with each other through eight brackets a2, each two of which are disposed by one side of the square suspension plate a0.
  • brackets a3 are formed between the brackets a2, the suspension plate a0 and the outer frame a1 for allowing the gas to go through.
  • the outer frame i1 and the suspension plate i0 are also square, but the outer frame i1 and the suspension plate i0 are connected with each other through merely two brackets i2.
  • the outer frame i1 and the suspension plate i0 in each of the types (b) ⁇ (h) are also square.
  • the suspension plate is circular, and the outer frame has a square with arc-shaped corners.
  • the suspension plate j0 is circular, and the outer frame has a square with arc-shaped corners.
  • FIG. 4B schematically illustrates the types (m) ⁇ (r) of the piezoelectric actuator.
  • the suspension plate 130 and the outer frame 131 are square.
  • the outer frame m1 and the suspension plate m0 are square, the outer frame m1 and the suspension plate m0 are connected with each other through four brackets m2, each of which is disposed by one side of the suspension plate m0. Meanwhile, a vacant space m3 is formed between the brackets m2, the suspension plate m0 and the outer frame m1.
  • the bracket m2 has two ends m2' and m2" respectively connected with the outer frame m1 and the suspension plate m0. The two ends m2' and m2" are opposed to each other and arranged along the same horizontal line.
  • the outer frame n1 and the suspension plate n0 are also connected with each other through four brackets n2, and a vacant space n3 is formed between the brackets n2, the suspension plate n0 and the outer frame n1. Nonetheless, the two ends n2' and n2" of the bracket n2, which are respectively connected with the outer frame n1 and the suspension plate n0, are not arranged along the same horizontal line. Instead, the two ends n2' and n2" are inclined at 0 ⁇ 45 degrees with respect to the horizontal line.
  • the outer frame o1 and the suspension plate o0 are square, the outer frame o1 and the suspension plate o0 are connected with each other through four brackets o2 in circular profiles, and a vacant space o3 is formed between each two of the brackets o2, the suspension plate o0 and the outer frame o1.
  • the bracket o2 includes a connecting part and two ends o2' and o2". The end o2' of the bracket o2 is connected with the outer frame o1. The end o2" of the bracket o2 is connected with the suspension plate o0. The two ends o2' and o2" are opposed to each other and arranged along the same horizontal line.
  • the outer frame p1 and the suspension plate p0 are square, the outer frame p1 and the suspension plate p0 are connected with each other through four brackets p2, and a vacant space p3 is formed between each two of the brackets p2, the suspension plate p0 and the outer frame p1.
  • the bracket p2 includes a first connecting part p20, an intermediate part p21 and a second connecting part p22.
  • the intermediate part p21 is formed in the vacant space p3 and in parallel with the outer frame p1 and the suspension plate p0.
  • the first connecting part p20 is arranged between the intermediate part p21 and the suspension plate p0.
  • the second connecting part p22 is arranged between the intermediate part p21 and the outer frame p1.
  • the first connecting part p20 and the second connecting part p22 are opposed to each other and arranged along the same horizontal line.
  • the intermediate part p21 is a bar perpendicular to both the first connecting part p20 and the second connecting part p22, which makes the bracket p2 in the shape of a cross.
  • the whole structure of the bracket p2 is strengthened, which is beneficial for vibration of the suspension plate p0 in a fixed direction.
  • the bracket p2 can be made of a material with a lesser rigidity, and therefore increases vibration frequency of the suspension plate p0. As a result, the gas pressure output efficiency could be improved.
  • the outer frame q1, the suspension plate q0, the bracket q2 and the vacant space q3 are similar to those of the type (m) and the type (o).
  • Each side of the suspension plate q0 is connected with the corresponding side of the outer frame q1 through two connecting parts q2.
  • the two ends q2' and q2" of each connecting part q2 are opposed to each other and arranged along the same horizontal line.
  • the outer frame r1, the suspension plate r0, the bracket r2 and the vacant space r3 are similar to those of the above embodiments.
  • the bracket r2 is a V-shaped connecting part.
  • bracket r2 is connected with the outer frame r1 and the suspension plate r0 at an inclined angle 0 ⁇ 45 degrees.
  • An end r2" of the bracket r2 is connected with the suspension plate r0, and two ends r2' of the bracket r2 are connected with the outer frame r1. That is, the ends b2' and b2" are not arranged along the same horizontal line.
  • FIG. 4C schematically illustrates the types (s) ⁇ (x) of the piezoelectric actuator.
  • the structures of the types (s) ⁇ (x) are similar to those of the types (m) ⁇ (r), respectively.
  • the suspension plate 130 of the piezoelectric actuator 13 has a bulge 130c.
  • the bulges 130c in the types (s) ⁇ (x) are indicated as s4, t4, u4, v4, w4 and x4, respectively.
  • the suspension plate 130 is square for achieving power-saving efficacy, and both the stepped structure with bulge and the flat structure with two flat surfaces are in the scope of the present invention. Meanwhile, the number of the brackets 132 between the outer frame 131 and the suspension plate 130 may be varied according to the practical requirements.
  • the suspension plate 130, the outer frame 131 and the at least one bracket 132 may be integrally formed with each other, and produced by but not limited to a conventional machining process, a photolithography and etching process, a laser machining process, an electroforming process, an electric discharge machining process and so on.
  • the miniature fluid control device 1A further comprises the first insulation plate 141, the conducting plate 15 and the second insulation plate 142.
  • the first insulation plate 141, the conducting plate 15 and the second insulation plate 142 are stacked on each other sequentially and located under the piezoelectric actuator 13.
  • the profiles of the first insulation plate 141, the conducting plate 15 and the second insulation plate 142 substantially match the profile of the outer frame 131 of the piezoelectric actuator 13.
  • the first insulation plate 141 and the second insulation plate 142 are made of an insulating material (e.g. a plastic material) for providing insulating efficacy.
  • the conducting plate 15 is made of an electrically conductive material (e.g. a metallic material) for providing electrically conducting efficacy.
  • the conducting plate 15 has a conducting pin 151 so as to be electrically connected with an external circuit (not shown).
  • FIGS. 5A to 5E schematically illustrate the actions of the miniature fluid control device of the miniature pneumatic device of FIG. 1A .
  • the gas inlet plate 11, the resonance plate 12, the piezoelectric actuator 13, the first insulation plate 141, the conducting plate 15 and the second insulation plate 142 of the miniature fluid control device 1A are stacked on each other sequentially.
  • the gap g0 ensures the proper distance between the resonance plate 12 and the bulge 130c of the suspension plate 130, so that the contact interference is reduced and the generated noise is largely reduced.
  • a convergence chamber is defined by the resonance plate 12 and the central cavity 111 of the gas inlet plate 11 collaboratively for converging the gas.
  • a first chamber 121 is formed between the resonance plate 12 and the piezoelectric actuator 13, and is in communication with the convergence chamber through the central aperture 120 of the resonance plate 12. Meanwhile, the peripheral regions of the first chamber 121 are in communication with the underlying miniature valve device 1B through the vacant spaces 135 of the piezoelectric actuator 13.
  • the piezoelectric actuator 13 is actuated in response to an applied voltage. Consequently, the piezoelectric actuator 13 vibrates along a vertical direction in a reciprocating manner, while the brackets 132 are served as the fulcrums.
  • the resonance plate 12 except for the part of it fixed on the gas inlet plate 11 is hereinafter referred as a movable part 12a, while the rest is referred as a fixed part 12b. Since the resonance plate 12 is light and thin, the movable part 12a vibrates along with the piezoelectric actuator 13 because of the resonance of the piezoelectric actuator 13. In other words, the movable part 12a is reciprocated and subjected to a curvy deformation.
  • FIG. 5D illustrates consecutive action following the action in FIG. 5C .
  • the movable part 12a has returned its original position when the piezoelectric actuator 13 has ascended at a vibration displacement d to an upward position. Consequently, the volume of the first chamber 121 is consecutively shrunken that generating the pressure gradient which makes the gas in the first chamber 121 continuously pushed toward peripheral regions and results in an exterior gas continuously fed into the inlets 110 of the gas inlet plate 11 and transferred to the central cavity 111.
  • the resonance plate 12 moves upwardly, which is caused by the resonance of the upward motion of the piezoelectric actuator 13.
  • the volume of the first chamber 121 expends, which results in suction applied to the gas in the central cavity 111.
  • the gas in the central cavity 111 is transferred to the first chamber 121 through the central aperture 120 of the resonance plate 12, then transferred downwardly through the vacant spaces 135 of the piezoelectric actuator 13, exiting from the miniature fluid control device 1A.
  • the gap g0 between the resonance plate 12 and the piezoelectric actuator 13 providing space for vibration of the resonance plate 12. That is, the thickness of the gap g0 affects the amplitude of vibration of the resonance plate 12.
  • Table 1 The relationships between the difference x and the maximum output pressure are listed in Table 1 below. The data shown in Table 1 are obtained when the operating voltage is in the range between ⁇ 10V and ⁇ 20V. A pressure gradient is generated in the fluid channels of the miniature fluid control device 1A to facilitate the gas to flow at a high speed. Moreover, since there is an impedance difference between the feeding direction and the exiting direction, the gas can be transmitted from the input side to the inner space of the target equipment.
  • the vibration frequency of the resonance plate 12 along the vertical direction in the reciprocating manner is identical to the vibration frequency of the piezoelectric actuator 13. That is, the resonance plate 12 and the piezoelectric actuator 13 are synchronously vibrated along the upward direction or the downward direction. It is noted that numerous modifications and alterations of the actions of the miniature fluid control device 1A may be made while retaining the teachings of the invention.
  • FIG. 6A schematically illustrate a gas-collecting operation of the gas collecting plate and the miniature valve device of the miniature pneumatic device of FIG. 1A .
  • FIG. 6B schematically illustrate a gas-releasing operation of the gas collecting plate and the miniature valve device of the miniature pneumatic device of FIG. 1A .
  • the valve film 17 and the gas outlet plate 18 of the miniature valve device 1B are stacked on each other sequentially.
  • the miniature valve device 1B cooperates with the gas collecting plate 16 of the miniature fluid control device 1A.
  • the gas collecting plate 16 comprises a first surface 160 and a second surface 161 (also referred as a fiducial surface).
  • the first surface 160 of the gas collecting plate 16 is concaved to define a gas-collecting chamber 162 which accommodates the piezoelectric actuator 13.
  • the gas that is transferred downwardly by the miniature fluid control device 1A is temporarily accumulated in the gas-collecting chamber 162.
  • the gas collecting plate 16 has a first perforation 163 and a second perforation 164. A first end of the first perforation 163 and a first end of the second perforation 164 are in communication with the gas-collecting chamber 162.
  • a second end of the first perforation 163 and a second end of the second perforation 164 are respectively in communication with a first pressure-releasing chamber 165 and a first outlet chamber 166, which are formed on the second surface 161 of the gas collecting plate 16.
  • the gas collecting plate 16 has a raised structure 167 corresponding to the first outlet chamber 166.
  • the raised structure 167 includes but is not limited to a cylindrical post.
  • the raised structure 167 is located at a level higher than the second surface 161 of the gas collecting plate 16.
  • a thickness of the raised structure 167 is in a range between 0.1mm and 0.55mm, and preferably 0.2mm.
  • the gas outlet plate 18 comprises a pressure-releasing perforation 181, an outlet perforation 182, a first surface 180 (also referred as a fiducial surface) and a second surface 187.
  • the pressure-releasing perforation 181 and the outlet perforation 182 run through the first surface 180 and the second surface 187.
  • the first surface 180 of the gas outlet plate 18 is concaved to define a second pressure-releasing chamber 183 and a second outlet chamber 184.
  • the pressure-releasing perforation 181 is located at a center of the second pressure-releasing chamber 183.
  • the gas outlet plate 18 further comprises a communication channel 185 between the second pressure-releasing chamber 183 and the second outlet chamber 184 for allowing the gas to go through.
  • a first end of the outlet perforation 182 is in communication with the second outlet chamber 184.
  • a second end of the outlet perforation 182 is in communication with an outlet structure 19 to gain access to the inner space of the target equipment.
  • the outlet structure 19 is in connected with the target equipment (not shown).
  • the equipment is for example but not limited to a gas-pressure driving equipment.
  • the valve film 17 comprises a valve opening 170 and plural positioning openings 171 (see FIG. 1A ).
  • the thickness of the valve film 17 is in the range between 0.1mm and 0.3mm, and preferably 0.2mm.
  • the pressure-releasing perforation 181 of the gas outlet plate 18 is aligned with the first perforation 163 of the gas collecting plate 16
  • the second pressure-releasing chamber 183 of the gas outlet plate 18 is aligned with the first pressure-releasing chamber 165 of the gas collecting plate 16
  • the second outlet chamber 184 of the gas outlet plate 18 is aligned with the first outlet chamber 166 of the gas collecting plate 16.
  • the valve film 17 is arranged between the gas collecting plate 16 and the gas outlet plate 18 for blocking the communication between the first pressure-releasing chamber 165 and the second pressure-releasing chamber 183.
  • the valve opening 170 of the valve film 17 is arranged between the second perforation 164 and the outlet perforation 182.
  • valve opening 170 of the valve film 17 is aligned with the raised structure 167 corresponding to the first outlet chamber 166 of the gas collecting plate 16. Due to such arrangement of the single valve opening 170, the gas can be transferred through the miniature valve device 1B in one direction in response to the pressure difference.
  • the gas outlet plate 18 has the convex structure 181a beside a first end of the pressure-releasing perforation 181.
  • the convex structure 181a is a cylindrical post.
  • the thickness of the convex structure 181a is in the range between 0.1mm and 0.55mm, and preferably 0.2mm.
  • the top surface of the convex structure 181a is located at a level higher than the first surface 180 of the gas outlet plate 18. Consequently, the pressure-releasing perforation 181 can be quickly contacted with and closed by the valve film 17.
  • the convex structure 181a can provide a pre-force against the valve film 17 to achieve a good sealing effect.
  • the gas outlet plate 18 further comprises a position-limiting structure 188.
  • the thickness of the position-limiting structure 188 is 0.2mm.
  • the position-limiting structure 188 is disposed within the second pressure-releasing chamber 183.
  • the position-limiting structure 188 is a ring-shaped structure. While the gas-collecting operation of the miniature valve device 1B is performed, the position-limiting structure 188 can assist in supporting the valve film 17 and avoid collapse of the valve film 17. Consequently, the valve film 17 can be opened or closed more quickly.
  • the gas-collecting operation of the miniature valve device 1B will be illustrated with reference to FIG. 6A .
  • the gas from the miniature fluid control device 1A is being transferred downwardly to the miniature valve device 1B, or the ambient air pressure is higher than the gas pressure of the inner space of the target equipment which is in communication with the outlet structure 19, the gas will be transferred from the miniature fluid control device 1A to the gas-collecting chamber 162 of the gas collecting plate 16. Then, the gas is transferred downwardly to the first pressure-releasing chamber 165 and the first outlet chamber 166 through the first perforation 163 and the second perforation 164.
  • the flexible valve film 17 is subjected to a downward curvy deformation.
  • the volume of the first pressure-releasing chamber 165 is expanded, and the valve film 17 is in close contact with the first end of the pressure-releasing perforation 181 corresponding to the first perforation 163.
  • the pressure-releasing perforation 181 of the gas outlet plate 18 is closed, and thus the gas within the second pressure-releasing chamber 183 is not leaked out from the pressure-releasing perforation 181.
  • the gas outlet plate 18 has the convex structure 181a beside of the first end of the pressure-releasing perforation 181. Due to the arrangement of the convex structure 181a, the pressure-releasing perforation 181 can be quickly closed by the valve film 17. Moreover, the convex structure 181a can provide a pre-force to achieve a good sealing effect.
  • the position-limiting structure 188 is arranged around the pressure-releasing perforation 181 to assist in supporting the valve film 17 and avoid collapse of the valve film 17.
  • the gas is transferred downwardly to the first outlet chamber 166 through the second perforation 164.
  • the valve film 17 corresponding to the first outlet chamber 166 is also subjected to the downward curvy deformation. Consequently, the valve opening 170 of the valve membrane 17 is correspondingly opened to the downward side.
  • the gas is transferred from the first outlet chamber 166 to the second outlet chamber 184 through the valve opening 170.
  • the gas is transferred to the outlet structure 19 through the outlet perforation 182 and then transferred to the inner space of the target equipment which is in communication with the outlet structure 19. Consequently, the purpose of collecting the gas pressure is achieved.
  • the gas-releasing operation of the miniature valve device 1B will be illustrated with reference to FIG. 6B .
  • the user may adjust the amount of the gas to be fed into the miniature fluid control device 1A, so that the gas is no longer transferred to the gas-collecting chamber 162.
  • the gas-releasing operation may be performed. Under this circumstance, the gas is transferred from the outlet structure 19 to the second outlet chamber 184 through the outlet perforation 182.
  • the volume of the second outlet chamber 184 is expanded, and the flexible valve film 17 corresponding to the second outlet chamber 184 is subjected to the upward curvy deformation.
  • the valve film 17 is in close contact with the gas collecting plate 16. Consequently, the valve opening 170 of the valve film 17 is closed by the gas collecting plate 16.
  • the gas collecting plate 16 has the raised structure 167 corresponding to the first outlet chamber 166. Due to the arrangement of the raised structure 167, the flexible valve film 17 can be bent upwardly more quickly. Moreover, the raised structure 167 can provide a pre-force to achieve a good sealing effect of the valve opening 170.
  • valve opening 170 of the valve film 17 is contacted with and closed by the raised structure 167, the gas in the second outlet chamber 184 will not be reversely returned to the first outlet chamber 166. Consequently, the efficacy of avoiding gas leakage is enhanced. Moreover, since the gas in the second outlet chamber 184 is transferred to the second pressure-releasing chamber 183 through the communication channel 185, the volume of the second pressure-releasing chamber 183 is expanded. Consequently, the valve film 17 corresponding to the second pressure-releasing chamber 183 is also subjected to the upward curvy deformation. Since the valve film 17 is no longer in contact with the first end of the pressure-releasing perforation 181, the pressure-releasing perforation 181 is opened.
  • the gas in the second pressure-releasing chamber 183 is outputted through the pressure-releasing perforation 181. Consequently, the pressure of the gas is released.
  • the flexible valve film 17 due to the convex structure 181a beside the pressure-releasing perforation 181 or the position-limiting structure 188 within the second pressure-releasing chamber 183, the flexible valve film 17 can be subjected to the upward curvy deformation more quickly. Consequently, the pressure-releasing perforation 181 can be quickly opened. After the gas-releasing operation in one direction is performed, the gas within the inner space of the target equipment is partially or completely exited to the surrounding. Under this circumstance, the gas pressure of the target equipment is reduced.
  • FIGS. 7A to 7E schematically illustrate the gas-collecting actions of the miniature pneumatic device of FIG. 2A .
  • the miniature pneumatic device 1 comprises the miniature fluid control device 1A and the miniature valve device 1B.
  • the gas inlet plate 11, the resonance plate 12, the piezoelectric actuator 13, the first insulation plate 141, the conducting plate 15, the second insulation plate 142 and the gas collecting plate 16 of the miniature fluid control device 1A are stacked on each other sequentially.
  • the first chamber 121 is formed between the resonance plate 12 and the piezoelectric actuator 13.
  • the valve film 17 and the gas outlet plate 18 of the miniature valve device 1B are stacked on each other and disposed under the gas collecting plate 16 of the miniature fluid control device 1A.
  • the gas-collecting chamber 162 is arranged between the gas collecting plate 16 and the piezoelectric actuator 13.
  • the first pressure-releasing chamber 165 and the first outlet chamber 166 are formed in the second surface 161 of the gas collecting plate 16.
  • the second pressure-releasing chamber 183 and the second outlet chamber 184 are concavely formed in the first surface 180 of the gas outlet plate 18.
  • the operating voltage of the miniature pneumatic device 1 is in the range between ⁇ 10V and ⁇ 16V.
  • the actuation of the piezoelectric actuator 13 and the vibration of the plate 12 and the valve film 17, the gas can be transferred downwardly.
  • the piezoelectric actuator 13 of the miniature fluid control device 1A is vibrated downwardly in response to the applied voltage. Consequently, the gas is fed into the miniature fluid control device 1A through the at least one inlet 110 of the gas inlet plate 11 from the input side. The gas is sequentially converged to the central cavity 111 through the at least one convergence channel 112 of the gas inlet plate 11, transferred through the central aperture 120 of the resonance plate 12, and introduced downwardly into the first chamber 121.
  • the resonance plate 12 As the piezoelectric actuator 13 is actuated, the resonance of the resonance plate 12 occurs. Consequently, the resonance plate 12 is also vibrated along the vertical direction in the reciprocating manner. As shown in FIG. 7C , the resonance plate 12 is vibrated downwardly and contacted with the bulge 130c of the suspension plate 130 of the piezoelectric actuator 13. Due to the deformation of the resonance plate 12, the volume of the chamber corresponding to the central cavity 111 of the gas inlet plate 11 is expanded but the volume of the first chamber 121 is shrunken. Under this circumstance, the gas is pushed toward peripheral regions of the first chamber 121. Consequently, the gas is transferred downwardly through the vacant spaces 135 of the piezoelectric actuator 13.
  • the gas is transferred to the gas-collecting chamber 162 between the miniature fluid control device 1A and the miniature valve device 1B. After that, the gas is transferred downwardly to the first pressure-releasing chamber 165 and the first outlet chamber 166 through the first perforation 163 and the second perforation 164, which are in communication with the gas-collecting chamber 162. Consequently, when the resonance plate 12 is vibrated along the vertical direction in the reciprocating manner, the gap g0 between the resonance plate 12 and the piezoelectric actuator 13 is helpful to increase the amplitude of the resonance plate 12. That is, due to the gap g0 between the resonance plate 12 and the piezoelectric actuator 13, the amplitude of the resonance plate 12 is increased when the resonance occurs.
  • the resonance plate 12 of the miniature fluid control device 1A is returned to its original position, and the piezoelectric actuator 13 is vibrated upwardly in response to the applied voltage.
  • a series of tests about the maximum output pressure of the miniature pneumatic device 1 corresponding to different values of x are performed.
  • the volume of the first chamber 121 is also shrunken, and the gas is continuously pushed toward peripheral regions of the first chamber 121. Moreover, the gas is continuously transferred to the gas-collecting chamber 162, the first pressure-releasing chamber 165 and the first outlet chamber 166 through the vacant spaces 135 of the piezoelectric actuator 13. Consequently, the pressure in the first pressure-releasing chamber 165 and the first outlet chamber 166 will be gradually increased.
  • the flexible valve film 17 is subjected to the downward curvy deformation. Consequently, the valve film 17 corresponding to the second pressure-releasing chamber 183 is moved downwardly and contacted with the convex structure 181a corresponding to the first end of the pressure-releasing perforation 181.
  • the pressure-releasing perforation 181 of the gas outlet plate 18 is closed.
  • the valve opening 170 of the valve film 17 corresponding to the outlet perforation 182 is opened downwardly.
  • the gas within the second outlet chamber 184 is transferred downwardly to the outlet structure 19 through the outlet perforation 182 and then transferred to the inner space of the target equipment which is in communication with the outlet structure 19. Consequently, the inner space of the target equipment is pressurized, and the purpose of collecting the gas pressure is achieved.
  • the resonance plate 12 of the miniature fluid control device 1A is vibrated upwardly.
  • the gas in the central cavity 111 of the gas inlet plate 11 is transferred to the first chamber 121 through the central aperture 120 of the resonance plate 12, and then the gas is transferred downwardly to the gas collecting plate 16 through the vacant space 135 of the piezoelectric actuator 13.
  • the gas is continuously transferred to the gas-collecting chamber 162, the second perforation 164, the first outlet chamber 166, the second outlet chamber 184 and the outlet perforation 182 and then transferred to the target equipment which is in communication with the outlet structure 19.
  • Such pressure-collecting operation may be but not limited to be triggered by the pressure difference between the ambient pressure of the input side and the gas pressure of the inner space of the target equipment.
  • FIG. 8 schematically illustrate the gas-releasing actions or the pressure-reducing actions of the miniature pneumatic device of FIG. 1A .
  • the gas-releasing operation (or a pressure-reducing operation) may be performed.
  • the user may adjust the amount of the gas to be fed into the miniature fluid control device 1A, so that the gas is no longer transferred to the gas-collecting chamber 162.
  • the gas is transferred from the outlet structure 19 to the second outlet chamber 184 through the outlet perforation 182. Consequently, the volume of the second outlet chamber 184 is expanded, and the flexible valve film 17 corresponding to the second outlet chamber 184 is bent upwardly.
  • valve film 17 is in close contact with the raised structure 167 corresponding to the first outlet chamber 166. Since the valve opening 170 of the valve film 17 is closed by the raised structure 167, the gas in the second outlet chamber 184 will not be reversely returned to the first outlet chamber 166. Moreover, the gas in the second outlet chamber 184 is transferred to the second pressure-releasing chamber 183 through the communication channel 185, and then the gas in the second pressure-releasing chamber 183 is transferred to the pressure-releasing perforation 181. Under this circumstance, the gas-releasing operation is performed. After the gas-releasing operation of the miniature valve device 1B in one direction is performed, the gas within the inner space of the target equipment is partially or completely exited to the surrounding. Under this circumstance, the inner pressure of the equipment is reduced.
  • the suspension plate 130 used in the present invention is a square suspension plate. As the length of the suspension plate 130 is reduced, the area of the suspension plate 130 is correspondingly reduced. Since the size of the suspension plate 130 is reduced, the rigidity of the suspension plate 130 is increased. Moreover, since the volume of the internal gas channel is reduced, the efficacy of pushing or compressing the gas is increased and the output pressure value is increased. Moreover, since the deformation of the suspension plate 130 in the horizontal direction is reduced while the suspension plate 130 is operating the vertical vibration, the piezoelectric actuator 13 is not readily inclined in the same vertical direction during operation. Moreover, since the collision interference between the suspension plate 13 and the resonance plate 12 or other components can be reduced, the noise is reduced and the defect rate is reduced.
  • the size of the piezoelectric actuator 13 can be correspondingly reduced. Under this circumstance, the output pressure is increased, the noise is reduced, and the product yield is enhanced. On the contrary, as the size of the suspension plate 130 is increased, the output pressure value becomes low, and the defect rate of the miniature pneumatic device is increased.
  • the suspension plate 130 and the piezoelectric ceramic plate 133 are the core components of the miniature pneumatic device 1. As the areas of the two components are reduced, the area and the weight of the miniature pneumatic device 1 are correspondingly reduced. Consequently, the miniature pneumatic device 1 can be easily installed in a portable/wearable device. Since the volume is reduced, the applications of the miniature pneumatic device 1 are expanded.
  • the total thickness of the miniature pneumatic device 1 is in the range between 1.5mm and 4mm. Since the miniature pneumatic device is slim and portable, the miniature pneumatic device is suitably applied to medical equipment or any other appropriate equipment.
  • the present invention provides the miniature pneumatic device.
  • the miniature pneumatic device comprises the miniature fluid control device and the miniature valve device. After the gas is fed into the miniature fluid control device through the inlet, the piezoelectric actuator is actuated. Consequently, a pressure gradient is generated in the fluid channels of the miniature fluid control device and the gas-collecting chamber to facilitate the gas to flow to the miniature valve device at a high speed. Moreover, due to the one-way valve film of the miniature valve device, the gas is transferred in one direction. Consequently, the pressure of the gas is accumulated to any equipment that is connected with the outlet structure, which is referred as the target equipment above.
  • the user may adjust the amount of the gas to be fed into the miniature fluid control device, so that the gas is no longer transferred to the gas-collecting chamber.
  • the gas is transferred from the outlet structure to the second outlet chamber of the miniature valve device, then transferred to the second pressure-releasing chamber through the communication channel, and finally exited from the pressure-releasing perforation.
  • the miniature pneumatic device of the present invention the gas can be quickly transferred while achieving silent efficacy.
  • the miniature pneumatic device of the present invention has small volume and small thickness. Consequently, the miniature pneumatic device is portable and suitable to be applied to medical equipment or any other appropriate equipment. In other words, the miniature pneumatic device of the present invention has significant advantages that creating industrial values.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP17200870.8A 2016-11-10 2017-11-09 Miniaturfluidsteuerungsvorrichtung Active EP3333423B1 (de)

Applications Claiming Priority (1)

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TW105136555A TWI690657B (zh) 2016-11-10 2016-11-10 微型流體控制裝置

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EP3333423B1 EP3333423B1 (de) 2022-05-11

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Cited By (1)

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CN109915347A (zh) * 2019-03-03 2019-06-21 浙江师范大学 一种塔式微型压电气体压缩机

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Publication number Priority date Publication date Assignee Title
TWI707821B (zh) 2019-11-18 2020-10-21 研能科技股份有限公司 微型流體致動器
CN112814878B (zh) * 2019-11-18 2023-02-21 研能科技股份有限公司 微型流体致动器

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CN205383064U (zh) * 2016-01-29 2016-07-13 研能科技股份有限公司 微型气压动力装置
EP3203079A1 (de) * 2016-01-29 2017-08-09 Microjet Technology Co., Ltd Piezoelektrischer aktuator

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JP3933058B2 (ja) * 2002-02-25 2007-06-20 日立化成工業株式会社 マイクロ流体システム用支持ユニット及びその製造方法
JP2015083952A (ja) * 2013-10-25 2015-04-30 キヤノン株式会社 マイクロ流体デバイスおよび液体中の気泡の分離方法
TWM528306U (zh) * 2016-01-29 2016-09-11 Microjet Technology Co Ltd 微型閥門裝置

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CN205383064U (zh) * 2016-01-29 2016-07-13 研能科技股份有限公司 微型气压动力装置
EP3203079A1 (de) * 2016-01-29 2017-08-09 Microjet Technology Co., Ltd Piezoelektrischer aktuator

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109915347A (zh) * 2019-03-03 2019-06-21 浙江师范大学 一种塔式微型压电气体压缩机
CN109915347B (zh) * 2019-03-03 2024-03-15 浙江师范大学 一种塔式微型压电气体压缩机

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EP3333423B1 (de) 2022-05-11
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