EP3250886B1 - Gyroscope loop filter - Google Patents

Gyroscope loop filter Download PDF

Info

Publication number
EP3250886B1
EP3250886B1 EP16701876.1A EP16701876A EP3250886B1 EP 3250886 B1 EP3250886 B1 EP 3250886B1 EP 16701876 A EP16701876 A EP 16701876A EP 3250886 B1 EP3250886 B1 EP 3250886B1
Authority
EP
European Patent Office
Prior art keywords
gyroscope
vibrating structure
time constant
bandwidth
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP16701876.1A
Other languages
German (de)
French (fr)
Other versions
EP3250886A1 (en
Inventor
Kevin Townsend
Andrew Clifford
Nicholas WILKINSON
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atlantic Inertial Systems Ltd
Original Assignee
Atlantic Inertial Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atlantic Inertial Systems Ltd filed Critical Atlantic Inertial Systems Ltd
Publication of EP3250886A1 publication Critical patent/EP3250886A1/en
Application granted granted Critical
Publication of EP3250886B1 publication Critical patent/EP3250886B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D1/00Measuring arrangements giving results other than momentary value of variable, of general application
    • G01D1/16Measuring arrangements giving results other than momentary value of variable, of general application giving a value which is a function of two or more values, e.g. product or ratio

Definitions

  • Modern high performance Coriolis gyroscope sensors typically contain vibrating structures, for example using microelectromechanical systems (“MEMS”), which are designed to operate with very high Q-factors, or magnification factors. This results in a sensor having a very low natural bandwidth.
  • MEMS microelectromechanical systems
  • the Q-factor of most MEMS sensors can be highly variable, for example due to manufacturing tolerances, and can also vary in use due to, for example, temperature variations. This may result in significant variations in the Q-factor, and the natural bandwidth of the sensor, in use.
  • the resonant frequency may also have independent tolerances and temperature variations, causing similar effects on the frequency response.
  • Fig. 1 shows the above-described effects using a conventional gyroscope.
  • the frequency response appears to conform to a simple second order system, but if the low frequency range is looked at in more detail it can be seen to deviate quite significantly.
  • Low frequency gain variations 10 can be seen, which may be acceptable for low performance systems. However, these may become problematic for high performance and/or highly dynamic systems.
  • US 2008/0126015 A1 discloses a system as set forth in the preamble of claim 12.
  • the invention provides a method of sensing a rotation rate using a vibrating structure gyroscope, as recited in claim 1.
  • the step of adapting or varying the time constant of the filter comprises tracking the natural bandwidth of the vibrating structure.
  • the time constant may adapt or vary when the value of the determined or estimated natural bandwidth of the vibrating structure changes. For example, if the natural bandwidth of the vibrating structure increases, then the time constant may be increased. Similarly, if the natural bandwidth of the vibrating structure decreases, then the time constant may be decreased.
  • the gyroscope may comprise a primary axis and a secondary axis, and the control loop may detect and/or control motion on the secondary axis of the gyroscope, or may be configured, arranged or adapted to detect and/or control motion on the secondary axis of the gyroscope.
  • the method may further comprise causing the vibrating element to vibrate along the primary axis, and/or measuring the response of the vibrating element in the secondary axis so as to give a measure of the rotation rate of the gyroscope.
  • the step of adapting or varying a time constant of the filter may comprise modifying an output or rate measurement bandwidth of the gyroscope, for example in response to a change in the time constant of the filter.
  • the filter or control loop may comprises a transfer function comprising the natural bandwidth of the vibrating structure.
  • the transfer function may be proportional to or otherwise correlated with the natural bandwidth of the vibrating structure.
  • Q' may be calculated using the characteristic of the vibrating structure and/or Q' may be a function of the characteristic of the vibrating structure.
  • the method may further comprise determining an initial time constant based on an initial value of the natural bandwidth, and the step of adapting or varying the time constant may comprise adapting or varying the initial time constant.
  • the method may further comprise measuring a rotation rate of the gyroscope.
  • the disclosure extends to a method of measuring a rotation rate using a vibrating structure gyroscope comprising the methods or method steps described above, and may include the step of providing or outputting a value for the rotation rate of the gyroscope using the control loop, filter or electronic control system.
  • the method may comprise displaying the value for the rotation rate, for example on a monitor.
  • an Inertial Measurement Unit comprising a vibrating structure gyroscope
  • the method comprises the methods of sensing a rotation rate using a vibrating structure gyroscope as described above.
  • the method may comprise providing or outputting a value for the rotation rate of the gyroscope using the control loop, filter or electronic control system.
  • the method may comprise displaying the value for the rotation rate, for example on a monitor.
  • the disclosure extends to systems arranged to carry out the methods described above, for example an electronic control system as part of, for example an Inertial Measurement Unit ("IMU"), which may itself form part of a platform guidance system, for example.
  • IMU Inertial Measurement Unit
  • the disclosure also provides an apparatus for sensing a rotation rate using a vibrating structure gyroscope, the apparatus comprising means adapted to carry out the methods described above.
  • All or part of the apparatus may form part of an Inertial Measurement Unit ("IMU") and may be, for example, a data processing means within the IMU.
  • IMU Inertial Measurement Unit
  • all or part of the apparatus is remote from, but is communicatively coupled with, the IMU and is, for example, a computer system (e.g. a server) comprising data processing means.
  • a computer system e.g. a server
  • the methods according to the present disclosure may be implemented at least partially using computer programs or software code portions.
  • a computer readable medium storing software code portions for performing the methods described above when run on a data processing means.
  • the computer readable medium may comprise a non-transitory medium, such as a CD or other optical disk, a diskette, or a hard disk, or may comprise a transitory medium such as an electronic or optical signal transmittable to a computer system, via a modem or other interface device, over either a tangible medium, including but not limited to optical or analogue communications lines, or intangibly using wireless techniques, including but not limited to microwave, infrared or other transmission techniques.
  • the invention also provides a system for sensing and/or measuring a rotation rate using a vibrating structure gyroscope, as recited in claim 12.
  • a vibrating structure gyroscope for use in an inertial measurement unit (“IMU") in accordance with the disclosure will now be described.
  • Vibrating structure gyroscopes typically use the principles of the Coriolis effect to output a rotation rate, or otherwise detect rotational motion.
  • a vibrating structure gyroscope may include a vibrating structure or sensor such as a vibrating element in the form of a mechanical resonator, such as a beam, tuning fork or ring resonator.
  • the vibrating structure may be excited into resonance by an electromagnetic drive means, and may be fabricated using a microelectromechanical systems (“MEMS”) process.
  • MEMS microelectromechanical systems
  • Other drive means may be employed, such as those including optical, thermal expansion, piezoelectric or electrostatic effects.
  • the vibrating element may be caused to vibrate along a primary axis, and the response of the vibrating element in a secondary axis (which is different to the primary axis) during rotation may be used to give a measure of the rotation rate.
  • One or more control loops may be used to activate the primary axis and adjust the amplitude and frequency of the drive signals in order to establish the primary axis motion at its resonant frequency.
  • the resonant frequency of the secondary axis may be designed and adjusted to match the resonant frequency of the primary axis to a high degree of accuracy in which case the two transfer functions (for each of the primary and secondary axes) can be considered identical.
  • TF s 2 ⁇ Qs ⁇ n 1 + 2 ⁇ Q ⁇ n s which is a simple first order low pass filter with a time constant defined by 2Q/ ⁇ n and therefore a bandwidth defined by ⁇ n /2Q.
  • ⁇ n 100,000
  • Q 30,000
  • the time constant may typically be 0.6 seconds and the bandwidth may be 1.66 rad/s, or more conveniently expressed as 0.26Hz.
  • the natural bandwidth of such a sensor may, then, be very low (0.26 Hz) and high performance, balanced systems may require an output bandwidth nearer 100 Hz. It has been found that some means of extending the bandwidth may be necessary, so that the output, or rate measurement bandwidth is larger than the natural bandwidth of the sensor.
  • the electronic control system of the gyroscope may comprise one or more separate control loops to preferably detect and control the motion on the secondary axis. These control loops may also be used to modify the output, or rate measurement bandwidth, so that it may be above the natural bandwidth of the sensor and in order to suit the system requirements (for example 100 Hz).
  • a control loop of the electronic control system of the gyroscope is shown in Fig. 2 , and may include one or more of a summing junction 12, a sensor or sensor head 14, loop filter 16, and integrator 20.
  • the control loop may be for detecting and/or controlling motion on the secondary axis of the gyroscope.
  • the actual angular rate may refer to the real motion that the gyroscope is trying to measure. This may also be termed input angular rate.
  • the measured angular rate may refer to the estimate made by the gyroscope of the input angular rate, and may be referred to as the output angular rate.
  • the loop filter 16 may be a phase lead filter.
  • the time constant of the loop filter 16 is adapted or varied so as to match and track the natural bandwidth of the vibrating structure 14. This may advantageously provide a flat low frequency gain response and a constant, or temperature independent output bandwidth of the signal output from the control loop. In this manner, the disclosure preferably compensates for Q-factor and frequency variations, and minimises noise.
  • the time constant of the loop filter 16 may initially be determined based on the natural bandwidth of the vibrating structure 14 calculated from knowledge of its resonant frequency and/or nominal Q-factor. The adaptation of the time constant may then be achieved by tracking the resonant frequency and/or the Q-factor of the vibrating structure in use.
  • the transfer function of a loop filter in the control loop may be determined by constants that are derived from the gyroscope and inertial measurement unit (“IMU") design in order to achieve a given bandwidth and gain peaking.
  • IMU inertial measurement unit
  • the present disclosure may improve on such arrangements by providing a transfer function for the loop filter of the closed loop that preferably adapts or varies with a determined or estimated characteristic of the vibrating structure in use, so as to adapt or vary the time constant of the loop filter in use.
  • Q' may be a function based on one or more of the measured frequency, temperature and design parameters of the vibrating structure.
  • Q' takes the form of Q(T) in the relationship given above in equation [3].
  • the time constant of the loop filter 16 is adapted or varied so as to match and track the natural bandwidth of the vibrating structure, so as to provide a constant output bandwidth for the control loop. This may have the benefit that the overall frequency response can then be optimised, for example made as large as possible, without compromising the noise and dynamic range of the system. This may minimise the effect of minor mismatches in the bandwidth of the vibrating structure and the frequency of the loop filter.
  • Fig. 3a shows the effects of dynamically adjusting the time constant of the loop filter to match and track the natural bandwidth of the vibrating structure in accordance with the disclosure.
  • Fig. 3b shows that there are no frequency variations across the low frequency range of interest. This can be compared to a conventional response, shown in Fig. 1 , in which the time constant of the loop filter does not match and track the natural bandwidth of the vibrating structure.
  • Fig. 3c shows the effects of dynamically adjusting the time constant of the loop filter to match and track the natural bandwidth of the vibrating structure in accordance with the disclosure, but with added gain compensation to provide a consistent second order response.
  • the bandwidth and gain peaking may be adjusted using the parameters of the control loop.
  • the present disclosure may address the frequency response of the control loop using the recognition that the frequency response of the vibrating structure of the gyroscope (which has a dominant effect) may be related to the Q-factor of the vibrating structure, and the further recognition that the Q-factor may vary strongly with temperature.
  • the temperature of the vibrating structure may be measured with a suitable temperature sensor, or it may be estimated based on the frequency of the vibrating structure, which may enable a good estimate of the Q-factor of the vibrating structure in use.
  • This estimate of the Q-factor may be used to calculate a time constant for a filter in the control loop so as to preferably compensate for the variation of the Q-factor of the vibrating structure over time.
  • This improved time constant can then be used to improve or optimise the frequency response of the control loop or gyroscope.
  • the Q-factor of the vibrating structure is correlated with resonant frequency and bandwidth and these could be referred to in place of Q-factor in the above discussion as well.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Filters That Use Time-Delay Elements (AREA)

Description

    BACKGROUND
  • Modern high performance Coriolis gyroscope sensors typically contain vibrating structures, for example using microelectromechanical systems ("MEMS"), which are designed to operate with very high Q-factors, or magnification factors. This results in a sensor having a very low natural bandwidth.
  • The Q-factor of most MEMS sensors can be highly variable, for example due to manufacturing tolerances, and can also vary in use due to, for example, temperature variations. This may result in significant variations in the Q-factor, and the natural bandwidth of the sensor, in use. In addition the resonant frequency may also have independent tolerances and temperature variations, causing similar effects on the frequency response.
  • Most high performance systems require some sort of frequency response shaping. A number of techniques can be used to shape the frequency response of a MEMS sensor. For example, pole-zero cancellation can be used but this may result in inconsistent responses at low frequencies.
  • Fig. 1 shows the above-described effects using a conventional gyroscope. When considered over the full bandwidth of interest the frequency response appears to conform to a simple second order system, but if the low frequency range is looked at in more detail it can be seen to deviate quite significantly. Low frequency gain variations 10 can be seen, which may be acceptable for low performance systems. However, these may become problematic for high performance and/or highly dynamic systems.
  • It is desired to provide an improved method of sensing a rotation rate using a vibrating structure gyroscope.
  • US 2008/0126015 A1 discloses a system as set forth in the preamble of claim 12.
  • US 5,561,400 discloses an oscillator unit.
  • SUMMARY
  • From a first aspect, the invention provides a method of sensing a rotation rate using a vibrating structure gyroscope, as recited in claim 1. The step of adapting or varying the time constant of the filter comprises tracking the natural bandwidth of the vibrating structure. In other words, the time constant may adapt or vary when the value of the determined or estimated natural bandwidth of the vibrating structure changes. For example, if the natural bandwidth of the vibrating structure increases, then the time constant may be increased. Similarly, if the natural bandwidth of the vibrating structure decreases, then the time constant may be decreased.
  • The gyroscope may comprise a primary axis and a secondary axis, and the control loop may detect and/or control motion on the secondary axis of the gyroscope, or may be configured, arranged or adapted to detect and/or control motion on the secondary axis of the gyroscope.
  • The method may further comprise causing the vibrating element to vibrate along the primary axis, and/or measuring the response of the vibrating element in the secondary axis so as to give a measure of the rotation rate of the gyroscope.
  • The step of adapting or varying a time constant of the filter may comprise modifying an output or rate measurement bandwidth of the gyroscope, for example in response to a change in the time constant of the filter.
  • The filter or control loop may comprises a transfer function comprising the natural bandwidth of the vibrating structure. The transfer function may be proportional to or otherwise correlated with the natural bandwidth of the vibrating structure.
  • The transfer function may be of the form: TF s = AQ s ω n + C B ,
    Figure imgb0001
    where A, B and C are constants, ωn is the resonant frequency of the vibrating structure, s represents frequency and Q' is an estimated Q-factor or estimated magnification factor of the vibrating structure. Q' may be calculated using the characteristic of the vibrating structure and/or Q' may be a function of the characteristic of the vibrating structure.
  • The method may further comprise determining an initial time constant based on an initial value of the natural bandwidth, and the step of adapting or varying the time constant may comprise adapting or varying the initial time constant.
  • The method may further comprise measuring a rotation rate of the gyroscope.
  • It will be appreciated that the adaptation or variation of the time constant of the filter as described above provides an improved measurement of the rotation rate. Thus, the disclosure extends to a method of measuring a rotation rate using a vibrating structure gyroscope comprising the methods or method steps described above, and may include the step of providing or outputting a value for the rotation rate of the gyroscope using the control loop, filter or electronic control system. The method may comprise displaying the value for the rotation rate, for example on a monitor.
  • According to the disclosure, there is provided a method of operating an Inertial Measurement Unit ("IMU") comprising a vibrating structure gyroscope, wherein the method comprises the methods of sensing a rotation rate using a vibrating structure gyroscope as described above. The method may comprise providing or outputting a value for the rotation rate of the gyroscope using the control loop, filter or electronic control system. The method may comprise displaying the value for the rotation rate, for example on a monitor.
  • The disclosure extends to systems arranged to carry out the methods described above, for example an electronic control system as part of, for example an Inertial Measurement Unit ("IMU"), which may itself form part of a platform guidance system, for example.
  • The disclosure also provides an apparatus for sensing a rotation rate using a vibrating structure gyroscope, the apparatus comprising means adapted to carry out the methods described above.
  • All or part of the apparatus may form part of an Inertial Measurement Unit ("IMU") and may be, for example, a data processing means within the IMU. In some embodiments, all or part of the apparatus is remote from, but is communicatively coupled with, the IMU and is, for example, a computer system (e.g. a server) comprising data processing means.
  • The methods according to the present disclosure may be implemented at least partially using computer programs or software code portions.
  • Thus, according to an aspect of the disclosure there is provided a computer program comprising code for performing the methods described above when run on data processing means.
  • According to another aspect of the disclosure there is provided a computer readable medium storing software code portions for performing the methods described above when run on a data processing means.
  • The computer readable medium may comprise a non-transitory medium, such as a CD or other optical disk, a diskette, or a hard disk, or may comprise a transitory medium such as an electronic or optical signal transmittable to a computer system, via a modem or other interface device, over either a tangible medium, including but not limited to optical or analogue communications lines, or intangibly using wireless techniques, including but not limited to microwave, infrared or other transmission techniques.
  • The invention also provides a system for sensing and/or measuring a rotation rate using a vibrating structure gyroscope, as recited in claim 12.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • Various embodiments will now be described, by way of example only, and with reference to the accompanying drawings in which:
    • Fig. 1 shows a typical frequency response using a conventional Coriolis gyroscope loop filter;
    • Fig. 2 shows an embodiment of a loop filter according to the disclosure; and
    • Figs. 3a-3c show frequency responses using the loop filter of Fig. 3 in a gyroscope according to the disclosure.
    DETAILED DESCRIPTION
  • A vibrating structure gyroscope for use in an inertial measurement unit ("IMU") in accordance with the disclosure will now be described.
  • Vibrating structure gyroscopes typically use the principles of the Coriolis effect to output a rotation rate, or otherwise detect rotational motion. A vibrating structure gyroscope may include a vibrating structure or sensor such as a vibrating element in the form of a mechanical resonator, such as a beam, tuning fork or ring resonator. The vibrating structure may be excited into resonance by an electromagnetic drive means, and may be fabricated using a microelectromechanical systems ("MEMS") process. Other drive means may be employed, such as those including optical, thermal expansion, piezoelectric or electrostatic effects.
  • The vibrating element may be caused to vibrate along a primary axis, and the response of the vibrating element in a secondary axis (which is different to the primary axis) during rotation may be used to give a measure of the rotation rate.
  • One or more control loops may be used to activate the primary axis and adjust the amplitude and frequency of the drive signals in order to establish the primary axis motion at its resonant frequency.
  • The primary axis response and the secondary axis response of the vibrating structure, such as a mechanical resonator in a spring-mass system, when considered around their resonant frequencies can each be described by the classical 2nd order transfer function as follows: TF s = ω n 2 s 2 + ω n s Q + ω n 2
    Figure imgb0002
    where s is the complex frequency used in Laplace transform notation, ωn is the natural frequency of the mechanical resonator and Q is the magnification factor.
  • The resonant frequency of the secondary axis may be designed and adjusted to match the resonant frequency of the primary axis to a high degree of accuracy in which case the two transfer functions (for each of the primary and secondary axes) can be considered identical.
  • As the system is operated at its natural resonant frequency (ωn) the response can be transformed to a baseband equivalent response by using the substitution s=j(ωn+ω) where ωn is the natural resonant frequency and ω is now the baseband (modulation) frequency of interest.
  • The baseband equivalent transfer function of the resonator can thus be rewritten as: TF s = 2 Qs ω n 1 + 2 Q ω n s
    Figure imgb0003
    which is a simple first order low pass filter with a time constant defined by 2Q/ωn and therefore a bandwidth defined by ωn/2Q.
  • In an example ωn = 100,000, Q = 30,000 and the time constant may typically be 0.6 seconds and the bandwidth may be 1.66 rad/s, or more conveniently expressed as 0.26Hz.
  • The natural bandwidth of such a sensor may, then, be very low (0.26 Hz) and high performance, balanced systems may require an output bandwidth nearer 100 Hz. It has been found that some means of extending the bandwidth may be necessary, so that the output, or rate measurement bandwidth is larger than the natural bandwidth of the sensor.
  • In this regard, the electronic control system of the gyroscope may comprise one or more separate control loops to preferably detect and control the motion on the secondary axis. These control loops may also be used to modify the output, or rate measurement bandwidth, so that it may be above the natural bandwidth of the sensor and in order to suit the system requirements (for example 100 Hz).
  • A control loop of the electronic control system of the gyroscope is shown in Fig. 2, and may include one or more of a summing junction 12, a sensor or sensor head 14, loop filter 16, and integrator 20. The control loop may be for detecting and/or controlling motion on the secondary axis of the gyroscope. The actual angular rate may refer to the real motion that the gyroscope is trying to measure. This may also be termed input angular rate. The measured angular rate may refer to the estimate made by the gyroscope of the input angular rate, and may be referred to as the output angular rate.
  • The components of the loop introduce various phase lags, which together with the phase lag produced by natural bandwidth of the sensor may require the inclusion of a phase lead to provide a stable loop. Therefore the loop filter 16 may be a phase lead filter.
  • In accordance with the disclosure, the time constant of the loop filter 16 is adapted or varied so as to match and track the natural bandwidth of the vibrating structure 14. This may advantageously provide a flat low frequency gain response and a constant, or temperature independent output bandwidth of the signal output from the control loop. In this manner, the disclosure preferably compensates for Q-factor and frequency variations, and minimises noise.
  • The time constant of the loop filter 16 may initially be determined based on the natural bandwidth of the vibrating structure 14 calculated from knowledge of its resonant frequency and/or nominal Q-factor. The adaptation of the time constant may then be achieved by tracking the resonant frequency and/or the Q-factor of the vibrating structure in use.
  • Both the resonant frequency and the Q-factor of the vibrating structure may vary significantly with its temperature. That is, there may exist a strong correlation between the resonant frequency and Q-factor of the vibrating structure with its temperature. This correlation is defined by a very simple relationship as follows: Q T = Q 0 1 + QTC × T T 0
    Figure imgb0004
    where Q(T) is the Q at any temperature T, QTC is the temperature coefficient of Q (generally a constant value of typically 0.006) , T0 is the reference temperature and Q0 is the nominal Q at this reference temperature.
  • Conventionally the transfer function of a loop filter in the control loop may be determined by constants that are derived from the gyroscope and inertial measurement unit ("IMU") design in order to achieve a given bandwidth and gain peaking.
  • The present disclosure may improve on such arrangements by providing a transfer function for the loop filter of the closed loop that preferably adapts or varies with a determined or estimated characteristic of the vibrating structure in use, so as to adapt or vary the time constant of the loop filter in use. In one example, the transfer function TF(S) of the loop filter of the present disclosure may be represented as: TF s = 2 Q s ω n + 1 Bs + 1
    Figure imgb0005
    where B is a constant, which may be derived from the gyroscope and inertial measurement unit ("IMU") design, ωn is the resonant frequency of the vibrating structure, and Q' is an estimated Q-factor or estimated magnification factor of the vibrating structure. Q' may be a function based on one or more of the measured frequency, temperature and design parameters of the vibrating structure. In one example, Q' takes the form of Q(T) in the relationship given above in equation [3].
  • The time constant of the loop filter 16 is adapted or varied so as to match and track the natural bandwidth of the vibrating structure, so as to provide a constant output bandwidth for the control loop. This may have the benefit that the overall frequency response can then be optimised, for example made as large as possible, without compromising the noise and dynamic range of the system. This may minimise the effect of minor mismatches in the bandwidth of the vibrating structure and the frequency of the loop filter.
  • Fig. 3a shows the effects of dynamically adjusting the time constant of the loop filter to match and track the natural bandwidth of the vibrating structure in accordance with the disclosure.
  • Fig. 3b shows that there are no frequency variations across the low frequency range of interest. This can be compared to a conventional response, shown in Fig. 1, in which the time constant of the loop filter does not match and track the natural bandwidth of the vibrating structure.
  • Fig. 3c shows the effects of dynamically adjusting the time constant of the loop filter to match and track the natural bandwidth of the vibrating structure in accordance with the disclosure, but with added gain compensation to provide a consistent second order response. The bandwidth and gain peaking may be adjusted using the parameters of the control loop.
  • The present disclosure may address the frequency response of the control loop using the recognition that the frequency response of the vibrating structure of the gyroscope (which has a dominant effect) may be related to the Q-factor of the vibrating structure, and the further recognition that the Q-factor may vary strongly with temperature.
  • The temperature of the vibrating structure may be measured with a suitable temperature sensor, or it may be estimated based on the frequency of the vibrating structure, which may enable a good estimate of the Q-factor of the vibrating structure in use.
  • This estimate of the Q-factor may be used to calculate a time constant for a filter in the control loop so as to preferably compensate for the variation of the Q-factor of the vibrating structure over time. This improved time constant can then be used to improve or optimise the frequency response of the control loop or gyroscope.
  • The Q-factor of the vibrating structure is correlated with resonant frequency and bandwidth and these could be referred to in place of Q-factor in the above discussion as well.
  • Although certain embodiments have been described, it will be understood by those skilled in the art that various changes in form and detail may be made without departing from the scope of the disclosure as set forth in the accompanying claims.

Claims (12)

  1. A method of sensing a rotation rate using a vibrating structure gyroscope, said gyroscope comprising an electronic control system comprising one or more control loops, wherein at least one of said control loops comprises a filter (16) having a variable time constant, said method comprising the steps of:
    determining or estimating a natural bandwidth of the vibrating structure (14) of said gyroscope; and characterised by
    adapting or varying said time constant of said filter (16) so as to match and track the determined or estimated natural bandwidth of said vibrating structure (14), so as to provide a constant output bandwidth for the control loop.
  2. A method as claimed in claim 1, wherein said step of adapting or varying said time constant of said filter (16) comprises tracking said natural bandwidth of the vibrating structure (14).
  3. A method as claimed in claim 1 or 2, wherein said gyroscope comprises a primary axis and a secondary axis, and said control loop detects and/or controls motion on said secondary axis of said gyroscope.
  4. A method as claimed in claim 3, further comprising causing said vibrating element to vibrate along said primary axis, and measuring the response of the vibrating element in said secondary axis so as to give a measure of the rotation rate of the gyroscope.
  5. A method as claimed in any preceding claim, wherein said adapting or varying a time constant of said filter (16) modifies an output or rate measurement bandwidth of said gyroscope.
  6. A method as claimed in any preceding claim, wherein said filter (16) or control loop comprises a transfer function comprising said natural bandwidth of said vibrating structure (14).
  7. A method as claimed in claim 6, wherein said transfer function is proportional to or otherwise correlated with said natural bandwidth of said vibrating structure (14).
  8. A method as claimed in claim 6 or 7, wherein said transfer function is of the form: TF s = AQ s ω n + C B ,
    Figure imgb0006
    where A, B and C are constants, ωn is the resonant frequency of the vibrating structure (14), s represents frequency and Q' is an estimated Q-factor or estimated magnification factor of the vibrating structure (14).
  9. A method as claimed in claim 8, wherein Q' is calculated using said natural bandwidth of the vibrating structure (14).
  10. A method as claimed in any preceding claim, further comprising determining an initial time constant based on an initial value of said natural bandwidth, and wherein said adapting or varying said time constant comprises adapting or varying said initial time constant.
  11. A method as claimed in any preceding claim, further comprising measuring a rotation rate of said gyroscope.
  12. A system for sensing a rotation rate using a vibrating structure gyroscope, said gyroscope comprising an electronic control system comprising one or more control loops, wherein at least one of said control loops comprises a filter (16) having a variable time constant, wherein said electronic control system is arranged and adapted to determine or estimate a natural bandwidth of the vibrating structure (14) of said gyroscope; characterised in that
    the electronic control system is also arranged and adapted to adapt or vary said time constant of said filter (16) so as to match and track the determined or estimated natural bandwidth of said vibrating structure (14) so as to provide a constant output bandwidth for the control loop.
EP16701876.1A 2015-01-26 2016-01-26 Gyroscope loop filter Active EP3250886B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1501207.3A GB2534562B (en) 2015-01-26 2015-01-26 Gyroscope loop filter
PCT/GB2016/050157 WO2016120601A1 (en) 2015-01-26 2016-01-26 Gyroscope loop filter

Publications (2)

Publication Number Publication Date
EP3250886A1 EP3250886A1 (en) 2017-12-06
EP3250886B1 true EP3250886B1 (en) 2019-09-18

Family

ID=52673891

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16701876.1A Active EP3250886B1 (en) 2015-01-26 2016-01-26 Gyroscope loop filter

Country Status (6)

Country Link
US (1) US10753745B2 (en)
EP (1) EP3250886B1 (en)
JP (1) JP6632037B2 (en)
KR (1) KR102527109B1 (en)
GB (1) GB2534562B (en)
WO (1) WO2016120601A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106844978B (en) * 2017-01-23 2020-05-01 中国机械工业集团有限公司 Complex system vibration design method based on consistency of calculated and actually measured error spectrums
JP7377199B2 (en) 2017-10-30 2023-11-09 ナノガ・ソシエテ・アノニム Digital writing instrument device
CN112697122A (en) * 2020-12-10 2021-04-23 北京自动化控制设备研究所 Noise reduction method and system based on digital band-stop filtering and quartz tuning fork gyroscope

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4019391A (en) * 1975-07-25 1977-04-26 The Singer Company Vibratory gyroscope
US5491725A (en) 1993-09-07 1996-02-13 Rockwell International Corporation Tracking filter and quadrature-phase reference generator
JP3479853B2 (en) 1994-10-05 2003-12-15 アイシン精機株式会社 Vibrator drive
US6253612B1 (en) * 1998-06-05 2001-07-03 Integrated Micro Instruments, Inc. Generation of mechanical oscillation applicable to vibratory rate gyroscopes
DE19939998A1 (en) * 1999-08-24 2001-03-01 Bosch Gmbh Robert Device for generating bias voltage for a vibrating yaw rate sensor
US7464590B1 (en) * 2004-03-12 2008-12-16 Thomson Licensing Digitally programmable bandwidth for vibratory rate gyroscope
JP2006329637A (en) * 2005-05-23 2006-12-07 Matsushita Electric Works Ltd Angular velocity detector
DE102006055589B4 (en) 2006-11-24 2012-07-19 Infineon Technologies Ag Measuring device and measured value sensor with coupled processing and excitation frequency
GB201005875D0 (en) * 2010-04-08 2010-05-26 Silicon Sensing Systems Ltd Sensors
CN104246432B (en) * 2012-04-12 2016-08-17 松下知识产权经营株式会社 Motion sensor and its electronic equipment of use
FI125238B (en) * 2012-06-29 2015-07-31 Murata Manufacturing Co Improved oscillating gyroscope
FI124794B (en) * 2012-06-29 2015-01-30 Murata Manufacturing Co Improved resonator
ITTO20130013A1 (en) * 2013-01-09 2014-07-10 St Microelectronics Srl MICROELETTROMECHANICAL GYROSCOPE WITH COMPENSATION OF SQUARE SIGNAL COMPONENTS AND METHOD OF CONTROL OF A MICROELECTRANOMIC GYROSCOPE
US9429426B2 (en) * 2014-01-22 2016-08-30 Northrop Grumman Systems Corporation Adaptive inertial measurement system and method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
KR102527109B1 (en) 2023-05-02
GB201501207D0 (en) 2015-03-11
EP3250886A1 (en) 2017-12-06
JP2018506048A (en) 2018-03-01
US10753745B2 (en) 2020-08-25
KR20170104497A (en) 2017-09-15
GB2534562A (en) 2016-08-03
GB2534562B (en) 2017-11-29
WO2016120601A1 (en) 2016-08-04
JP6632037B2 (en) 2020-01-15
US20180017388A1 (en) 2018-01-18

Similar Documents

Publication Publication Date Title
Park et al. Adaptive control for the conventional mode of operation of MEMS gyroscopes
Leland Adaptive control of a MEMS gyroscope using Lyapunov methods
EP3250886B1 (en) Gyroscope loop filter
US9709400B2 (en) System, apparatus, and method for resonator and coriolis axis control in vibratory gyroscopes
EP2889577B1 (en) Signal processing device, detection device, sensor, electronic apparatus and moving object
WO2018141198A1 (en) Method and device for detecting flight altitude of unmanned aerial vehicle, and unmanned aerial vehicle
EP2778609B1 (en) Method for calibrating the scale factor of an axisymmetric vibratory gyroscope
US20200104743A1 (en) Machine learning device, control device, and machine learning method
US11226599B2 (en) Machine learning system, control device, and machine learning method for optimizing filter coefficients
KR102165991B1 (en) Motor control unit
RU2565516C2 (en) Control module and device for return to initial state of oscillator excited by harmonic oscillation, as well as sensor of instantaneous angular speed
JP6417659B2 (en) Signal processing device, detection device, sensor, electronic device, and moving object
RU2619815C1 (en) Method and system for compensating drift of solid wave gyro
JP6516042B2 (en) Signal processing device, detection device, sensor, electronic device and moving body
CN110471293A (en) A kind of Z axis gyroscope sliding-mode control for estimating time-varying angular speed
JP5295630B2 (en) Flying object guidance device and guidance signal calculation method for flying object guidance device
EP3517892B1 (en) Multiple sensor integration
JP2018531373A6 (en) Method for generating a composite period output signal
JP2018531373A (en) Method for generating a composite period output signal
US20180283912A1 (en) Signal processing device, detection device, physical quantity measurement device, electronic apparatus, and vehicle
Král et al. Nonlinear estimator design for MEMS gyroscope with time-varying angular rate
JP6273814B2 (en) Signal processing device, detection device, sensor, electronic device, and moving object
JP3182185B2 (en) Motion angle detector
CN117526803A (en) Disturbance suppression system based on frequency self-adaptive observation
JP2002318603A (en) Method for identifying critical gain of control system and device for the same

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20170816

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20190401

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602016020782

Country of ref document: DE

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1181861

Country of ref document: AT

Kind code of ref document: T

Effective date: 20191015

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20190918

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20191218

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20191218

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20191219

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

REG Reference to a national code

Ref country code: AT

Ref legal event code: MK05

Ref document number: 1181861

Country of ref document: AT

Kind code of ref document: T

Effective date: 20190918

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200120

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200224

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602016020782

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG2D Information on lapse in contracting state deleted

Ref country code: IS

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20200119

26N No opposition filed

Effective date: 20200619

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20200126

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20200131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20200126

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20200126

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20200131

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20200131

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20200131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20200126

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190918

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230630

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20231219

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20231219

Year of fee payment: 9