EP3226205B1 - Procédé et appareil de traitement d'images - Google Patents

Procédé et appareil de traitement d'images Download PDF

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Publication number
EP3226205B1
EP3226205B1 EP17168681.9A EP17168681A EP3226205B1 EP 3226205 B1 EP3226205 B1 EP 3226205B1 EP 17168681 A EP17168681 A EP 17168681A EP 3226205 B1 EP3226205 B1 EP 3226205B1
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EP
European Patent Office
Prior art keywords
target element
image
image frames
correction
time axis
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EP17168681.9A
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German (de)
English (en)
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EP3226205A1 (fr
Inventor
Takuto Sakumura
Yasukazu Nakaye
Koichi Kajiyoshi
Satoshi Mikusu
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Rigaku Denki Co Ltd
Rigaku Corp
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Rigaku Denki Co Ltd
Rigaku Corp
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/70—Denoising; Smoothing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T15/00—3D [Three Dimensional] image rendering
    • G06T15/08—Volume rendering
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10016—Video; Image sequence
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10116—X-ray image
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20172—Image enhancement details
    • G06T2207/20182—Noise reduction or smoothing in the temporal domain; Spatio-temporal filtering

Definitions

  • the present invention relates to an image processing method and an image processing apparatus which perform correction processing on an abnormal value of X-ray image data.
  • an abnormal value in only one pixel is occasionally detected due to, for example, the failure of a pixel caused such as by the incidence of strong cosmic rays, the accumulation of noise or degradation in long exposure . Since the number of such pixels that appear is limited, the adverse effect on the actual measurement and analysis is limited.
  • a pixel with an abnormal value since the appearance of a pixel with such an abnormal value is likely to damage the reliability of an image, a pixel with an abnormal value has been conventionally corrected. For example, a method is known which performs a measurement two times under the same conditions, compares the obtained two images and thereby identifies an abnormal value.
  • a method which divides a necessary exposure time into a plurality of short times to perform capturing, collects image frames captured in the individually divided times, focuses on a certain pixel to arrange the data in the individual times in order of size of the data and removes a predetermined number of pixels from the largest or the smallest size. For example, in an imaging apparatus disclosed in patent document 1, when the brightness of image frames obtained in a division period is equal to or more than a predetermined brightness, the image frame per division period is displayed on a display device whereas when the brightness is lower, image frame is determined not to be displayed.
  • a method which performs exposure and capturing while shaking a detector, grasps a pixel indicating an abnormal value and thereby produces a correction mask.
  • a first data set and a second data set measured while displacing the position of a detector are overlaid on each other, and thus a pixel indicating an abnormal value is detected.
  • EP 0 926 626 A1 discloses a treatment process for images made up of triplets of temporal intensities obtained by previously smoothing three successive images.
  • the present invention is made in view of the foregoing conditions, and an object of the present invention is to provide an image processing method and an image processing apparatus which remove the effects of cosmic rays, noise and defective pixels without losing data in a specified time and which can correct image data in real time, efficiently and with high accuracy.
  • the object of the invention is achieved by the subject-matter of the independent claims. Advantageous embodiments are disclosed by the dependent claims.
  • the present invention it is possible to remove the effects of cosmic rays, noise and defective pixels without losing data in a specified time and to correct image data in real time, efficiently and with high accuracy.
  • Fig. 1 is a block diagram showing the configuration of an X-ray analysis apparatus 100 and an image processing apparatus 200.
  • Fig. 2 is a perspective view showing the configuration of the X-ray analysis apparatus 100.
  • the X-ray analysis apparatus 100 includes an X-ray source 110, a sample stage 120, a detector 130, an irradiation mechanism 140 and a drive mechanism 150.
  • the X-ray source 110 is formed with an X-ray tube, and radiates a characteristic X-ray of such as Cu or Mo.
  • the characteristic X-ray that is monochromatized is collimated by a collimator or the like so as to have a predetermined diameter, and is thereafter irradiated to a sample S.
  • the irradiated X-ray is scattered, as a diffracted X-ray by the sample S, at an angle of 2 ⁇ with respect to the center of the sample S, and is incident on the detection surface of the detector 130.
  • the sample stage 120 rotatably holds the sample S.
  • the sample S there is a powder crystal, the sample S may be a single crystal.
  • the sample stage 120 may be rotated by ⁇ as the detector 130 is rotated by 2 ⁇ , the sample stage 120 preferably generates uniform diffracted X-ray by rotation independently of the detector 130.
  • the detector 130 may be a photon counting-type pixel detector and a one-dimensional detector, it is preferably a two-dimensional detector.
  • the one-dimensional detector is an X-ray detector that has the position resolution of an X-ray intensity on a straight line.
  • the one-dimensional detector can be formed by, for example, aligning, in a straight line, a plurality of minute X-ray receiving elements that can detect an X-ray .
  • the two-dimensional detector is an X-ray detector that has the position resolution of an X-ray intensity within a plane.
  • the two-dimensional detector is configured by, for example, aligning, within a plane, a plurality of minute X-ray receiving elements, can detect an X-ray for each pixel and can be formed with a semiconductor X-ray detector that can output a signal for each pixel. Examples of such a semiconductor X-ray receiving element include a CCD and a CMOS.
  • the irradiation mechanism 140 is formed with a power supply and a circuit, and controls the irradiation of the X-ray from the X-ray source 110.
  • the drive mechanism 150 controls the rotation of the sample stage 120 and the movement of the detector 130. When a diffracted X-ray is used, the detector 130 is moved in the direction of a diffraction angle.
  • the image processing apparatus 200 performs correction processing on an abnormal value of X-ray image data received from the X-ray analysis apparatus 100.
  • the image processing apparatus 200 is formed with, for example, a server mounting a CPU, and includes a control part 210, an image recording part 220, a target element determination part 230, a target element storage part 240 and a correction part 250.
  • the control part 210 controls the irradiation mechanism 140 and the drive mechanism 150, and coordinates the irradiation mechanism 140 and the drive mechanism 150 to allow uniform X-ray irradiation to the detector 130.
  • a predetermined X-ray is irradiated from the X-ray source 110 to the sample S, the detector 130 is moved on a circle at a constant speed and the sample stage 120 is rotated.
  • the image recording part 220 records image frames on intensity distribution obtained in the detector 130 without the image frames being processed.
  • the image recording part 220 successively stores series of captured image frames to allow correction processing in real time with the stored image data.
  • the target element determination part 230 determines whether or not there exists a target element with intensity significantly different from the intensity of peripheral elements. At that time, it is determined whether or not there exists a target element in the three-dimensional space formed with the time axis and the space axis, among the elements of an array of intensity taken out by a predetermined condition.
  • the predetermined condition is indicated by a region that is specified within the three-dimensional space formed with the time axis and the space axis. For example, when an array of intensity of element data corresponding to a predetermined number of sheets is taken out on the time axis and is to be determined, its region is the predetermined condition.
  • the predetermined number of sheets can be previously set by striking a balance between the accuracy of the correction and a time during which performance in real time can be maintained.
  • Target element information is information that identifies a target element on the image data, and is, for example, a table indicating the position of a target element.
  • the target element storage part 240 stores the target element information generated as a table or the like.
  • the correction part 250 reads out the target element information stored in the target element storage part 240, uses, on the image data read in, the target element information to correct the image data of the target element and outputs it.
  • the correction is performed by replacing the intensity of the target element with a replacement value calculated from the intensity of peripheral elements.
  • the image data corrected and output are transferred to a system (for example, a user PC) that can be operated by a user.
  • a system for example, a user PC
  • the image data on which the correction processing is performed by the server are transferred to the user PC, a correction processing system and an operation system by the user may be separated by software within a user terminal, and the image data corrected by the correction processing system may be transferred to the operation system.
  • Fig. 3 is a diagram showing the X-ray image data as the three-dimensional space.
  • the X-ray is received by three detectors 130, and thus two-dimensional image frames are obtained at given time intervals, and can be expressed as a series of image frames 300a to 300c within the three-dimensional space formed with a two-dimensional space and the time axis.
  • image frames 300a to 300c within the three-dimensional space formed with a two-dimensional space and the time axis.
  • the elements 310a to 310c are represented as columns 320 parallel to the time axis having a cross section in the form of an element.
  • the image frames obtained by the X-ray analysis apparatus 100 are sent to the image processing apparatus 200 and is recorded therein, and thus an aggregation of the image data is stored, with the result that it is possible to grasp an aggregation of the image data on the three-dimensional space shown in Fig. 3 .
  • the series of captured image frames is preferably a plurality of image frames whose exposure times are obtained by dividing an exposure time specified by a user into a plurality of exposure times. In this way, it is not necessary to perform measurement twice under the same conditions, and thus it is possible to correct the removal of the abnormal value by efficiently utilizing the image data.
  • the space correction and the time axis correction can be considered as follows.
  • the spatial smoothness of image data measured in a certain time is a condition for the determination as to whether or not there exists a target element, and in general, the spatial smoothness is arbitrary. Hence, a failure determination is performed by comparison with a calculation value estimated by assumptions as indicated in (1) to (3) below.
  • the temporal smoothness of a plurality of series of captured image frames measured in a certain position is a criteria for the determination.
  • a target sample needs to be stable in terms of time, but in many cases, this assumption holds true whereas when the assumption does not hold true, in most cases, it is found before the measurement whether or not the assumption holds true, and thus it is possible to cope with it.
  • a time delay integral image is acquired, since a plurality of images is acquired while scanning is performed with the detector, the same count is measured over a plurality of pixels, and thus this is a significantly effective method. Furthermore, a time resolution is greater by about 2 to 4 digits than a general measurement time, and thus it is possible to easily use data on 100 or more elements for the determination of a target element.
  • the image processing apparatus 200 configured as described above will be described. First, one or a plurality of image frames is read from the X-ray analysis apparatus 100. Then, it is determined whether or not there exists a target element with intensity significantly different from the intensity of spatially peripheral elements in the read image data, and when there is the target element, the target element is identified as an element of interest (the first processing step) . Whether or not the intensity is significantly different can be determined by, for example, whether the difference from the average value of the intensity of spatially peripheral elements exceeds a threshold value.
  • the correction is performed by replacing the target element with a replacement value calculated from the temporally intensity of peripheral elements (the second processing step).
  • the determination of whether or not there exists a target element based on the element of interest along the time axis refers to comparison between the previous or subsequent times in the columns on the time axis including the element of interest as shown in Fig. 3 .
  • any one of the corrections on the space axis and the time axis may be performed first, in the present example, a case where the correction on the space axis is first performed will be described.
  • the abnormal value on the space is corrected, and not only such a correction but also a correction for an abnormal value on the time axis is performed based on the correction, with the result that it is possible to effectively remove the abnormal value.
  • the correction in such an order can be effective when a sample which changes rapidly with time is measured.
  • the element is identified by the capturing time of and the pixel position in the image data. Thus, it is possible to efficiently correct the target element for each pixel.
  • the element is not necessarily a pixel, and may be a region where pixels are aggregated.
  • Fig. 4 is a flowchart showing an example of the image processing method.
  • the image processing apparatus 200 reads N (N > 0) image frames from the X-ray analysis apparatus 100 (step S1). Then, one of image frames is selected from the read N image frames (step S2), and whether or not there exists a target element is determined (step S3) .
  • N N > 0
  • one of image frames is selected from the read N image frames (step S2), and whether or not there exists a target element is determined (step S3) .
  • step S4 When as a result of the determination, a target element is found, the target element is recorded (step S4) .
  • the element is identified by position information and time information on the space.
  • the process proceeds to step S5.
  • step S5 whether or not all the image frames are selected is determined. When all the image frames have not been selected yet, the process returns to step S2 where an image frame which has not been selected is selected. When all the image frames are selected, the process proceeds to step S6.
  • step S6 the table of target elements is updated. In this way, the recording of the target element is reflected on the table, and thus it is possible to correct the abnormal intensity of the target element by using the table.
  • one element is selected as the element of interest (step S7).
  • the selected elements of interest are aligned again in descending order of intensity on the time axis, and it is determined whether or not there exists a target element with intensity which exceeds a predetermined threshold value for the average value of the intensity of the previous or subsequent elements (step S8).
  • step S10 When as a result of the determination, there is no target element on the time axis, the process proceeds to step S10.
  • the correction is performed (step S9).
  • the correction may be either the space correction or the time axis correction.
  • the pieces of intensity of the elements of interest obtained as described above are added (step S10). Whether the addition for all the elements is completed is determined, and when the addition is not completed, the process returns to step S7. When the addition is completed, the process is finished without being processed.
  • the correction includes the space correction and the time axis correction.
  • Fig. 5 is a diagram showing a correction using the peripheral elements (pixels) in space. As shown in Fig. 5 , when an X-ray image is detected in times obtained by dividing a specified exposure time into four times, image frame in each of the four divided times can be obtained. When in such image frames, there is a pixel whose value is significantly different from the intensity of spatially peripheral elements, it is possible to replace the abnormal intensity of the pixel with intensity obtained by referencing the intensity of the spatially peripheral pixels. Finally, the image frames over the entire exposure time including the image frames undergoing such a space correction are added together, and thus it is possible to obtain desired image data.
  • Fig. 6 is a diagram showing elements referenced at the time of correction. As shown in Fig. 6 , there is a correction method of replacing the intensity of a pixel of interest in the center with intensity calculated based on a first close pixel and a second close pixel.
  • Fig. 7 is a diagram showing a correction using the peripheral elements on the time axis.
  • image frame in each of the four divided times can be obtained.
  • desired image data by adding the image frames over the entire exposure time including the image data undergoing such a time axis correction.
  • the space correction is performed, and thereafter the time axis correction is performed, the order may be reversed such that the time axis correction is performed and thereafter the space correction is performed.
  • the space correction since main target elements are previously corrected by the time axis correction, in the space correction, only a simple filter such as isolated point removal is applied sufficiently.
  • the space correction is performed after summation of data that has undergone the time axis correction, and thus it is possible to reduce effects caused by statistical variations in data.
  • Fig. 8 is a flowchart showing an example of an image processing method of performing the space correction after the time axis correction.
  • the image processing apparatus 200 reads M (M > 0) image frames from the X-ray analysis apparatus 100 (step T1). Then, one image frames is selected from the read M image frames (step T2), and one element is selected as the element of interest (step T3). Then, it is determined on the selected element of interest whether or not there exists a target element for the intensity of the previous or subsequent elements on the time axis (step T4).
  • step T6 When there is a target element on the time axis, the correction is performed (step T5). Then, the pieces of intensity of the obtained elements of interest are added (step T6). It is determined whether the addition for all the elements is completed (step T7), and when the addition is not completed, the process returns to step T3. When the addition is determined to be completed, the process proceeds to step T8.
  • step T8 it is determined whether or not all the image frames are selected (step T8), and when all the image frames are not selected, the process returns to step T2, and the image frames that have not been selected are selected. When all the image frames are selected, the process proceeds to step T9.
  • one image frames is selected (step T9), and it is determined whether there is a target element on space for the data of the peripheral elements (step T10). In that case, it is possible to make the determination by, for example, whether or not the difference between the average value of the intensity of spatially peripheral elements and the intensity of the element of interest exceeds a threshold value.
  • step T11 when a target element is found, the correction is performed (step T11). When no target element is found, the process proceeds to step T12. Then, whether or not all the image frames is selected is determined (step T8). When it is not completed, the process returns to step T9. When it is completed, the process is finished without being processed.
  • the image frames obtained by the detector 130 being fixed is used
  • image frames obtained while the detector is being moved may be used.
  • the series of captured image frames is a plurality of image frames obtained by the detector at different positions. In this way, even when noise in a specific position of the detector 130 is produced, since on the obtained three-dimensional data, the position of the noise is moved on the space fixed with elapse of time, it is possible to identify it as a target element to perform the correction processing.
  • Fig. 9 is a diagram showing the X-ray image data as the three-dimensional space when capturing is performed while the detector is being moved.
  • three pieces of two-dimensional image frames which are moved in a given direction are obtained at given time intervals, and can be expressed as a series of image frames 400a to 400c within the three-dimensional space formed with the two-dimensional space and the time axis.
  • image frames 400a to 400c within the three-dimensional space formed with the two-dimensional space and the time axis.
  • the intensity is detected by a different pixel on the detector 130.
  • the image frames obtained while the detector 130 is being moved is sent to the image processing apparatus 200 and is recorded therein, and thus an aggregation of different image frames in the individual positions is stored.
  • Such an aggregation of the image data can be grasped as an aggregation of the image data on the three-dimensional space as shown in Fig. 9 .
  • Figs. 10A and 10B are diagrams showing image data when no correction was performed and image data when a correction was performed, respectively. It is found that in the image data when no correction was performed, pixels where abnormal values were indicated appeared as point-like noises whereas in the image data when a correction was performed, almost no point-like noises were produced.

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  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Graphics (AREA)
  • Measurement Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
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  • Facsimile Image Signal Circuits (AREA)
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Claims (5)

  1. Procédé de traitement d'images consistant à réaliser un traitement de correction sur une valeur anormale de données d'image radiographique, le procédé comprenant les étapes de :
    lecture (T1) d'une série de trames d'image qui ont été envoyées sous la forme d'images de diffraction de rayons X; chaque trame d'image étant détectée à des intervalles de temps respectifs par un appareil d'analyse de rayons X (100) ;
    réalisation (T4) d'un premier traitement consistant à déterminer s'il existe ou non un élément cible sur l'axe temporel, l'élément cible sur l'axe temporel étant un pixel ou une région de pixels, ayant une intensité sensiblement différente des intensités d'éléments à des temps antérieurs ou postérieurs dans un regroupement des trames d'image lues, sur la base de chaque élément, le long d'un axe temporel, dans laquelle chaque élément est un pixel ou une région de pixels, et
    remplacement (T5) de l'élément cible sur l'axe temporel par une valeur de remplacement calculée d'après les intensités dans les trames périphériques temporelles ;
    réalisation (T10) d'un second traitement consistant à déterminer s'il existe ou non un élément cible dans l'espace ayant une intensité sensiblement différente des intensités d'éléments périphériques dans l'espace dans chaque trame d'image lue, et
    remplacement (T11) de l'élément cible dans l'espace par une valeur de remplacement calculée d'après les intensités d'éléments périphériques dans l'espace ;
    dans lequel le second traitement est réalisé après le premier traitement.
  2. Procédé de traitement d'images selon l'une quelconque de la revendication 1,
    dans lequel la série de trames d'image envoyées est une pluralité de trames d'image dont les temps d'exposition sont obtenus en divisant un temps d'exposition spécifié par un utilisateur en une pluralité de temps d'exposition.
  3. Procédé de traitement d'images selon l'une quelconque des revendications 1 à 2,
    dans lequel la série de trames d'image envoyées est une pluralité de trames d'image obtenues par un détecteur en différentes positions.
  4. Procédé de traitement d'images selon l'une quelconque des revendications 1 à 3,
    dans lequel l'élément est identifié par un temps de capture et une position de pixel dans les trames d'image.
  5. Appareil de traitement d'images qui réalise un traitement de correction sur une valeur anormale de données d'image radiographique, l'appareil comprenant :
    un moyen de lecture d'une série de trames d'image qui ont été envoyées sous la forme d'images de diffraction de rayons X, chaque trame d'image étant détectée à des intervalles de temps respectifs par un appareil d'analyse de rayons X (100),
    un moyen de détermination, en réalisant un premier traitement, s'il existe ou non un élément cible sur l'axe temporel, l'élément cible sur l'axe temporel étant un pixel ou une région de pixels, ayant une intensité sensiblement différente des intensités d'éléments à des temps antérieurs ou postérieurs dans un regroupement des trames d'image lues, sur la base de chaque élément, le long d'un axe temporel, dans lequel chaque élément est un pixel ou une région de pixels, et
    un moyen de remplacement de l'élément cible sur l'axe temporel par une valeur de remplacement calculée d'après les intensités dans les trames périphériques temporelles ;
    dans lequel le moyen de détermination est configuré pour déterminer, en réalisant un second traitement, s'il existe ou non un élément cible dans l'espace ayant une intensité sensiblement différente des intensités d'éléments périphériques dans l'espace dans les trames d'image lues,
    un moyen de remplacement de l'élément cible dans l'espace par une valeur de remplacement calculée d'après les intensités d'éléments périphériques dans l'espace ;
    dans lequel le second traitement est réalisé après le premier traitement.
EP17168681.9A 2014-01-30 2015-01-27 Procédé et appareil de traitement d'images Active EP3226205B1 (fr)

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JP2014016100A JP6135526B2 (ja) 2014-01-30 2014-01-30 画像処理方法および画像処理装置
EP15152655.5A EP2902964B1 (fr) 2014-01-30 2015-01-27 Appareil et procédé de traitement d'images

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US10217190B2 (en) 2016-12-27 2019-02-26 Kla-Tencor Corporation System and method for reconstructing high-resolution point spread functions from low-resolution inspection images
CN116156342B (zh) * 2023-04-04 2023-06-27 合肥埃科光电科技股份有限公司 多线阵图像传感器拼接方法、线阵采像系统及装置

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EP2902964B1 (fr) 2018-04-18
EP2902964A2 (fr) 2015-08-05
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EP2902964A3 (fr) 2015-09-09
EP3226205A1 (fr) 2017-10-04
US9558582B2 (en) 2017-01-31
US20150213623A1 (en) 2015-07-30

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