EP3221686A1 - Capteur permettant d'analyser un gaz d'échappement d'un moteur à combustion interne, moteur à combustion interne et procédé et dispositif de fabrication dudit capteur - Google Patents

Capteur permettant d'analyser un gaz d'échappement d'un moteur à combustion interne, moteur à combustion interne et procédé et dispositif de fabrication dudit capteur

Info

Publication number
EP3221686A1
EP3221686A1 EP15781312.2A EP15781312A EP3221686A1 EP 3221686 A1 EP3221686 A1 EP 3221686A1 EP 15781312 A EP15781312 A EP 15781312A EP 3221686 A1 EP3221686 A1 EP 3221686A1
Authority
EP
European Patent Office
Prior art keywords
sensor
exhaust gas
electrode
measuring electrode
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15781312.2A
Other languages
German (de)
English (en)
Inventor
Denis Kunz
Markus Widenmeyer
Tino Fuchs
Robert Roelver
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP3221686A1 publication Critical patent/EP3221686A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
    • G01N27/4072—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure characterized by the diffusion barrier

Definitions

  • the present invention relates to a sensor for analyzing an exhaust gas of an internal combustion engine, to a
  • Internal combustion engine to a method for producing a sensor for analyzing an exhaust gas of an internal combustion engine, to a corresponding device and to a corresponding computer program.
  • a residual oxygen content in the exhaust gas of internal combustion engines can be measured and used to determine a
  • Combustion air ratio can be used.
  • the combustion air ratio can be adjusted so that the proportion of pollutants in the exhaust gas, such as nitrogen oxides, is as low as possible.
  • DE 10 2005 015 103 A1 describes a lambda probe with a ceramic sensor element.
  • the approach proposed here provides a sensor for analyzing an exhaust gas of an internal combustion engine, the sensor having the following
  • Characteristics comprising: a lid member having a plurality of pores in a filter region for filtering out particulate matter from the exhaust gas; a measuring electrode disposed on the lid member for determining a particle concentration in the exhaust gas; a heating element arranged on the lid element for heating the filter area and / or the measuring electrode; and a bottom member having at least one sensor element for determining a gas concentration in the exhaust gas, the cover member having the
  • Sensor element covers to prevent accumulation of the particles on the sensor element, and wherein the sensor element is coupled via the filter region fluidly with an external environment of the sensor.
  • An exhaust gas may be used in a combustion process in the
  • Heat engine such as an internal combustion engine or a
  • Turbomachine be understood. Under a cover element and a bottom element can each be understood a layer of a heat-resistant material, such as a semiconductor material.
  • the cover and the bottom element can be combined with one another, for example, in a layer composite.
  • a pore can be understood as meaning a through opening in the cover element.
  • Under a particle can be a solid
  • the measuring electrode may for example be formed from a wire, on which the particles can accumulate from the exhaust gas.
  • the particle concentration can for example, by measuring a change in resistance at the
  • Measuring electrode can be determined. Under a heating element, a heating element
  • Heating electrode be understood in the form of a wire or metal strip, which generates heat when an electrical voltage.
  • the heating element can be used for regeneration of the filter area and, additionally or alternatively, for regeneration of the measuring electrode.
  • the sensor element may, for example, be realized as a Nernst probe in order to determine the gas concentration, in particular an oxygen concentration, in the exhaust gas.
  • the approach presented here is based on the knowledge that a sensor for determining a gas concentration in an exhaust gas of a
  • the protective layer may be a gas-permeable, porous region for
  • the protective layer can be used both as a particle filter and as a particle sensor for determining a
  • the sensor element can be realized as a lambda probe.
  • the senor may be constructed monolithically to the functions lambda probe, soot particle protection of the lambda probe and
  • Soot particle sensor to link together. This makes the sensor very compact. In addition, thereby the production costs can be significantly reduced.
  • the lambda probe can be covered by a cover element in the form of a porous, heatable protective cap.
  • the protective cap can act as a filter cap to filter out soot particles from a respective sample gas.
  • Heater can serve to burn off accumulated soot particles to the
  • the soot particle sensor may be realized from interdigital contact structures and be designed to vary depending on a Resistance change to detect a soot load.
  • the soot particle sensor can be regenerated in the same way as the filter cap by means of the heater.
  • Ceramic lambda probes are generally used, which are produced, for example, in thick film technology using zirconia-based ceramics.
  • Ceramic sensor element Dimensions of such a ceramic sensor element are usually in the range of 5 mm by 5 mm, with a thickness of about 1 mm to 2 mm.
  • the sensor surface is typically dimensioned so large, approximately in the square millimeter range that individual local soot deposits do not immediately lead to sensor failure. Furthermore, the sensor surface can be provided with a porous covering layer several micrometers thick, which prevents sensor poisoning by corrosive exhaust gas constituents.
  • the approach presented here makes it possible to realize a miniaturized gas sensor, for example a microelectrochemical (MECS) solid-state electrolyte which can be produced in micromechanical processes and processes.
  • MECS microelectrochemical
  • the size of the sensor element can be significantly reduced, for example, to about 1 mm by 2 mm by 1 mm (width times height times depth).
  • An active solid electrolyte layer may have a thickness of only 100 nm to 1 ⁇ .
  • such a reduced installation space offers the advantage of a quick operational readiness of, for example, less than 3 seconds and a low heating power of, for example, 100 mW.
  • Flue gas sensors make up a large proportion of the total production costs, such integration also brings a significant cost advantage.
  • the proposed approach the
  • Filter region to be arranged opposite the sensor element.
  • the coupling of the sensor element to a measuring gas contained in the exhaust gas can be improved.
  • the sensor can be constructed very compact in this way.
  • the measuring electrode and, additionally or alternatively, the heating element at least partially framing the filter area, in particular enclosing except for an access opening.
  • the measuring electrode or the heating element can be arranged as space-saving as possible on the cover element, d. h., a dead volume above the sensor element can be minimized.
  • the filter region or the measuring electrode can be heated efficiently in this way.
  • at least a majority of the measuring electrode can run between the heating element and the filter area.
  • the measuring electrode as
  • Interdigitalelektrode be executed.
  • An interdigital electrode can be understood to mean an electrode having a finger-like interlocking contact structure. As a result, the measuring electrode can be realized with a large surface area while still requiring little space.
  • Filter region has a lid recess.
  • the sensor element of the lid recess can be arranged opposite one another.
  • Deckelaus founded can be understood as a depression in the cover element.
  • the lid recess may be formed in that the lid member is performed in the filter area with a reduced wall thickness. In this way, the lid member can be formed cap-like with little manufacturing effort.
  • the Heat capacity and thus the heating dynamics and the required heating power to achieve and maintain a certain temperature can be minimized.
  • the sensor element may include a bottom recess in the bottom element and an electrolyte layer of a first electrode, a second electrode and an electrode disposed between the first electrode and the second electrode
  • the electrolyte layer may cover the bottom recess to a chamber for receiving a reference gas or
  • the reference gas or reference gas mixture can serve as a reference for determining the gas concentration in the exhaust gas.
  • the first electrode can be acted upon by the reference gas or reference gas mixture and the second electrode can be acted upon by the exhaust gas via the filter region.
  • the reference gas or gas mixture can either be a separate gas or gas mixture introduced into the chamber, such as ambient air, or else a reference that can be produced by means of the electrolyte layer, for example an oxygen reference for determining an oxygen concentration in the exhaust gas.
  • the sensor element can be realized in a cost-effective and space-saving manner as a Nernst probe or voltage jump probe.
  • the senor has at least one further heating element for heating the electrolyte layer.
  • the further heating element By means of the further heating element, a temperature-dependent ion diffusion through the electrolyte layer can be controlled.
  • the further heating element and the heating element may be connected to each other in series or in parallel. As a result, the manufacturing cost of the sensor can be reduced.
  • the lid member may be made of a semiconductor material. Additionally or alternatively, the bottom element may be made of the semiconductor material.
  • the semiconductor material may be about silicon.
  • the approach presented here creates an internal combustion engine with a sensor according to one of the embodiments described here.
  • the proposed approach provides a method for manufacturing a sensor for analyzing an exhaust gas of a
  • Sensor element for determining a gas concentration in the exhaust gas
  • a cover member having a plurality of pores for filtering out particulates from the exhaust gas in a filter region, a measuring electrode for determining a particle concentration in the exhaust gas and a heating element for heating the filter region and / or the Measuring electrode, wherein the
  • Measuring electrode and the heating element are arranged on the cover element, wherein the cover element covers the sensor element to a
  • the approach presented here also provides a device which is designed to implement the steps of a variant of a method presented here
  • a device can be understood as meaning an electrical device which processes sensor signals and outputs control and / or data signals in dependence thereon.
  • the device may have an interface, which may be formed in hardware and / or software.
  • the interfaces can be part of a so-called system ASIC, for example, which contains a wide variety of functions of the device.
  • system ASIC system ASIC
  • Circuits are or at least partially consist of discrete components.
  • the interfaces may be software modules that are present, for example, on a microcontroller in addition to other software modules.
  • a computer program product or computer program with program code which can be stored on a machine-readable carrier or storage medium such as a semiconductor memory, a hard disk memory or an optical memory and for carrying out, implementing and / or controlling the steps of the method according to one of the above
  • Fig. 1 is a schematic cross-sectional view of a sensor according to an embodiment of the present invention
  • Fig. 2 is a schematic representation of a sensor according to a
  • Embodiment of the present invention in plan view
  • FIG. 4 is a schematic cross-sectional view of a bottom element of a sensor according to an embodiment of the present invention.
  • FIG. 5 shows a schematic representation of an internal combustion engine with a sensor according to an exemplary embodiment of the present invention
  • FIG. 6 is a flow chart of a method of manufacturing a sensor according to an embodiment of the present invention.
  • Fig. 7 is a block diagram of an apparatus for performing a
  • the sensor 100 for analyzing an exhaust gas of an internal combustion engine includes a lid member 102 and a bottom member 104, which are according to this
  • Embodiment realized as layers and combined with each other in a composite layer.
  • the cover element 102 has, in a filter region 106, only a plurality of pores 108, which are arranged, for example, in four columns and serve for filtering particles from the exhaust gas.
  • a measuring electrode 110 On the lid member 102 are also a measuring electrode 110, here a
  • the measuring electrode 110 is arranged between the heating element 112 and the filter region 106.
  • the heating element 112 is designed to heat the measuring electrode 110 and the filter region 106 for cleaning particles that accumulate on the measuring electrode 110 or on the pores 108.
  • the measuring electrode 110 is configured to determine a particle concentration in the exhaust gas.
  • the cover element 102 has on a side facing away from the heating element 112 and the measuring electrode 110 a lid recess 116, which in Fig. 1 by way of example in the region of the heating element 112, the measuring electrode
  • the lid member 102 is connected to the bottom member 104 such that the bottom member 104 is the
  • Cover recess 122 fluid-tight covering. About the pores 108 is the
  • Lid recess 122 is fluidly coupled to an external environment of the sensor 100.
  • the bottom element 104 comprises a sensor element 118, which is the
  • Cover recess 122 is disposed opposite and of the
  • the Cover element 102 is enclosed.
  • the sensor element 118 can via the Pores 108 are supplied with the exhaust gas to determine the concentration of a gas, such as oxygen, in the exhaust gas.
  • the bottom element 104 as a sensor wafer and the
  • Cover element 102 as a cap wafer made of a semiconductor material
  • an optional insulation layer 119 on the cover element 102 serves to electrically insulate the heating element 112 and the measuring electrode 110 from the cover element 102.
  • the particle concentration in the exhaust gas can now be determined by a change in resistance of the measuring electrode 110, which of the at
  • Measuring electrode 110 adhering particle quantity is determined.
  • the exhaust gas flows through the pores 108 in one of the
  • Deckelaus Principleung 116 and the bottom member 104 limited cavity of the sensor 100, in which the sensor element 118 is arranged. In this case, at least a major portion of the particles contained in the exhaust gas remains attached to the pores 108. Thus, the sensor element 118 is subjected to a particle-free or at least low-particle exhaust gas.
  • the sensor element 118 is designed as a Nernst probe.
  • the bottom element 104 a the bottom element 104 a
  • the electrolyte layer 122 is, for example, a layer composite comprising a first electrode 124, a second electrode 126 and an electrolyte 128 arranged between the electrodes 124, 126, in particular a solid electrolyte such as an yttrium-doped zirconium dioxide membrane (YSZ).
  • the electrodes 124, 126 are realized for example as platinum electrodes.
  • the bottom recess 120 in FIG. 1 is arranged opposite the filter area 106.
  • the bottom recess 120 forms, together with the electrolyte layer 122, a chamber 130 which, for example, with a reference gas or
  • Reference gas mixture is filled, hereinafter referred to as reference.
  • the first electrode 124 can be acted upon by the reference and the second electrode 126 can be acted upon by the exhaust gas via the pores 108. Due to a concentration or partial pressure difference between the chamber 130 and the in the
  • Deckelaus Principleung 116 introduced exhaust gas, it comes from a certain temperature of the electrolyte layer 122 to an ion diffusion through the electric layer 122. Here, ions migrate from the high concentration to the low
  • a voltage applied between the electrodes 124, 126 can now be measured to determine the concentration of the gas in the exhaust gas.
  • the chamber 130 acts as a pumping cell to the reference
  • the senor 100 is used for measuring a lambda value and a soot particle load in the exhaust gas of internal combustion engines.
  • the sensor 100 comprises a
  • microelectrochemical sensor element 118 with a heatable
  • Cap wafer as a lid member 102, also called protective cap or filter cap, and an interdigitated contact structure as a measuring electrode 110, English interdigitated electrodes or short ID called E.
  • Such a protective cap 102 protects the microelectrochemical sensor element 118 on the one hand from soot deposits by thermophoresis and active filtering of larger particles. In the filter area 106 deposited particles are burned during operation by active heating to above 800 ° C, thus preventing the blockage of the filter area 106. The additional protection against
  • thermophoresis Particle deposition by thermophoresis is also ensured by active heating as long as the filter cap temperature is above the immediate ambient temperature.
  • a heating process for burning the microelectrochemical cap 102 and the IDE contacts is triggered by a heating element acting as a heater 112 structure.
  • the number of firing processes initiated is proportional to the soot load and can be used to control and diagnose an exhaust aftertreatment system.
  • FIG. 2 shows a schematic representation of a reference to FIG. 1
  • the described sensor 100 according to an embodiment of the present invention in plan view.
  • the sensor 100 has the heatable by means of the heating element 112, porous
  • Cap wafer 102 and realized as an interdigitated contact structure
  • a further heating element serves as a sensor membrane heater for heating the electrolyte layer.
  • Heating element and the heating element 112 here a platinum cap heater are connected via Schutampe 200 with each other, here via silicon vias, through-silicon vias (TSV).
  • TSV through-silicon vias
  • the IDE contacts of the measuring electrode 110 are connected via corresponding Meß verses 201 with the bottom element 104, also called M ECS sensor plane.
  • the bottom element 104 in FIG. 2 has a significantly larger one
  • the filter region 106 has, for example, twelve gas-permeable pores 108, which are arranged in four columns and three rows. According to this
  • the measuring electrode 110 extends at three each other
  • the interdigitated contact structure of the measuring electrode 110 is schematically indicated by three wires running side by side.
  • the heating element 112 forms one except for one
  • Access opening 202 almost completely closed frame around the
  • Measuring electrode 110 and the filter portion 106th FIG. 2 also shows a possible contact assignment of connection contacts of the floor element 104.
  • a back contact 204 for contacting a ground terminal of the sensor element
  • a first heater contact 206 for contacting a common supply voltage terminal of the two heating elements
  • a front side contact 208 for contacting a signal output of the sensor element
  • a second heater contact 210 for
  • a first IDE contact 212 for contacting a first IDE contact 212 for contacting a first IDE contact 212
  • FIGS. 3a to 3d show cross-sectional representations of a cover element 102 of a sensor according to an exemplary embodiment of the present invention
  • the cover element 102 is, for example, a reference to FIGS. 1 and 2
  • FIGS. 3a to 3d show a possible process flow for producing a porous, heatable cover element 102 in the form of a protective cap with a measuring electrode 110 with interdigital
  • microelectrochemical sensor is a microelectrochemical sensor.
  • a silicon wafer is first provided.
  • the insulation layer 119, a platinum heater as heating element 112, and the measuring electrode 110 with an interdigital contact structure, also called IDE structure, are applied to the silicon wafer of the cover element 102.
  • the cover element 102 in the filter region 106 is thinned like a cap to obtain the cover recess 116.
  • pores 108 are formed to filter the particles, as shown in FIG. 3c.
  • the cap wafer 102 produced in this way can now be connected to a sensor wafer as a bottom element via wafer bonding in order to obtain the sensor described with reference to FIGS. 1 and 2.
  • a sensor surface of the sensor element, d. H. an active electrode area is, for example, between ten and several hundred microns in size. Therefore, it is important to avoid any deposition of gas-blocking solids on the
  • the heating element 112 and the measuring electrode 110 should be exhaust and
  • the senor with an electrical insulation layer 119 for electrical insulation of
  • the insulating layer 119 is formed by, for example, thermal oxidation or PECVD deposition (plasma-enhanced chemical vapor deposition;
  • ALD atomic layer deposition
  • Cap wafer 102 thinned in the range of a heated and gas-permeable surface.
  • the pores 108 are etched to remove the
  • Cap wafer 102 to make gas permeable and a certain
  • the pores 108 are produced, for example, by reactive ion deep etching (English: deep reactive ion etching, DRI E for short) or wet-chemical KOH etching of previously, for example lithographically, defined pores. Alternatively, the pores 108 may be created by laser drilling.
  • cap wafer 102 After completion of the cap wafer 102, it is connected to the sensor wafer via a suitable bonding process. For long-term and
  • Temperature-stable wafer-wafer connections are suitable, for example, for anodic silicon-silicon bonding.
  • the cap wafer heating electrode 112 can be connected to a metal layer plane on the sensor wafer via silicon via contacts as an alternative to conventional wire bonding.
  • a maximum cap size may vary from the requirements of sensor dynamics and in terms of sensor dynamics
  • Cap wafer heater and sensor heater on the chip side connected. This allows the number of sensor contacts through the heated Cap wafer filter and thus the number of costly cable connections are kept small to the outside.
  • connection of sensor and cap heaters can be carried out in series or in parallel connection.
  • Measuring electrode 110 can also be connected to the MECS sensor plane 104 via silicon through contacts. A distance within the interdigital structure of the measuring electrode 110 should be as low as possible in order to ensure a high sensitivity at low supply voltage.
  • the surface of the protective cap 102 is divided into a porous filter region 106 and a flat surface unstructured region.
  • the filter area 106 is arranged, for example, directly above the sensor element.
  • the measuring electrode 110 is arranged on the unstructured area.
  • the measuring electrode 110 may be arranged in ring or frame shape around the filter region 106.
  • 4 shows a schematic cross-sectional view of a floor element
  • the bottom element 104 which forms the basic structure of a sensor element described above as the carrier substrate, corresponds in the
  • Floor element 104 rests to cover the bottom recess 120, but is integrated into the bottom member 104 such that the first electrode 124, the chamber 130 completely lined to a bottom surface.
  • the cavern 130 has a direction in the direction of the electrolyte layer 122
  • the chamber 130 is realized as a pumping cell in order to pump oxygen through the electrolyte layer 122 by means of the electrolyte 128 realized as a solid electrolyte membrane.
  • oxygen can enter the Chamber 130 in or out of the chamber 130 are pumped out.
  • a pumping direction is shown by way of example with an arrow.
  • FIG. 5 shows a schematic representation of an internal combustion engine 500 with a previously described sensor 100 in accordance with FIG.
  • the sensor 100 is used to determine a concentration of a gas as well as particles in an exhaust gas of the internal combustion engine 500.
  • the sensor 100 is
  • the senor 100 is designed to be corresponding
  • the controller 502 may be configured to enter using the measurement signals 501
  • Internal combustion engine 500 is minimized.
  • the method 600 comprises a step 602 in which a composite is formed from a base element, a cover element, a measuring electrode and a heating element.
  • the bottom element has a sensor element for determining a gas concentration in an exhaust gas of an internal combustion engine.
  • the cover element has in a filter region a plurality of pores, which serve to filter out particles from the exhaust gas.
  • Cover element connected to the bottom element such that the
  • Sensor element is covered by the cover element. In this way, an attachment of the particles to the sensor element is prevented.
  • the sensor element is fluidically coupled to an external environment of the sensor via the pores in the filter region. Further, in step 602, the measuring electrode and the
  • the heating element is designed to heat either the filter region or the measuring electrode or both the filter region and the measuring electrode for regeneration.
  • the cover element, the measuring electrode, the heating element or the bottom element can be provided. Accordingly, in step 602, the composite may be formed from either the bottom element, the
  • Floor element, the cover element and the measuring electrode are formed by applying the heating element or from the bottom element, the cover element and the heating element by applying the measuring electrode.
  • FIG. 7 shows a block diagram of an apparatus 700 for carrying out a manufacturing method according to an embodiment of the present invention.
  • the device 700 for producing a sensor for analyzing an exhaust gas of an internal combustion engine is designed, for example, to carry out a method according to FIG. 6.
  • the device 700 comprises a unit 702, which is designed to produce a unit 702 based on FIG. 6
  • an exemplary embodiment comprises an "and / or" link between a first feature and a second feature, then this is to be read so that the embodiment according to one embodiment, both the first feature and the second feature and according to another embodiment either only first feature or only the second feature.

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  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)

Abstract

L'invention concerne un capteur (100) permettant d'analyser un gaz d'échappement d'un moteur à combustion interne (500). Le capteur (100) comprend un élément couvercle (102) qui présente dans une partie filtre (106) une pluralité de pores (108) permettant d'enlever par filtration les particules présentes dans le gaz d'échappement, une électrode de mesure (110) agencée sur l'élément couvercle (102) et servant à déterminer la concentration des particules dans le gaz d'échappement, un élément chauffant (112) agencé sur l'élément couvercle (102) et servant à chauffer la partie filtre (106) et/ou l'électrode de mesure (110), ainsi qu'un élément fond (104) qui présente au moins un élément de détection (118) servant à déterminer la concentration de gaz dans le gaz d'échappement. L'élément de détection (118) est recouvert par l'élément couvercle (112) pour empêcher une accumulation des particules au niveau de l'élément de détection (118) L'élément de détection (118) se trouve ainsi en communication fluidique avec l'environnement extérieur du capteur (100) par l'intermédiaire de la partie filtre (106).
EP15781312.2A 2014-11-21 2015-10-02 Capteur permettant d'analyser un gaz d'échappement d'un moteur à combustion interne, moteur à combustion interne et procédé et dispositif de fabrication dudit capteur Withdrawn EP3221686A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014223780.7A DE102014223780A1 (de) 2014-11-21 2014-11-21 Sensor zum Analysieren eines Abgases einer Verbrennungskraftmaschine, Verbrennungskraftmaschine sowie Verfahren und Vorrichtung zum Herstellen eines solchen Sensors
PCT/EP2015/072800 WO2016078817A1 (fr) 2014-11-21 2015-10-02 Capteur permettant d'analyser un gaz d'échappement d'un moteur à combustion interne, moteur à combustion interne et procédé et dispositif de fabrication dudit capteur

Publications (1)

Publication Number Publication Date
EP3221686A1 true EP3221686A1 (fr) 2017-09-27

Family

ID=54329506

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15781312.2A Withdrawn EP3221686A1 (fr) 2014-11-21 2015-10-02 Capteur permettant d'analyser un gaz d'échappement d'un moteur à combustion interne, moteur à combustion interne et procédé et dispositif de fabrication dudit capteur

Country Status (3)

Country Link
EP (1) EP3221686A1 (fr)
DE (1) DE102014223780A1 (fr)
WO (1) WO2016078817A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015217305A1 (de) * 2015-09-10 2017-03-16 Robert Bosch Gmbh Mikromechanisches Festkörperelektrolyt-Sensorelement und Verfahren zu seiner Herstellung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005015103A1 (de) 2004-09-30 2006-04-06 Robert Bosch Gmbh Partikelsensor und Verfahren zum Betrieb desselben
DE102011013542A1 (de) * 2011-03-10 2012-09-13 Continental Automotive Gmbh Sensorvorrichtung und Verfahren zum Erfassen einer Gaskonzentration und einer Partikelkonzentration eines Abgasstromes
DE102011016490A1 (de) * 2011-04-08 2012-10-11 Continental Automotive Gmbh Sensorvorrichtung zum Erfassen einer Gaskonzentration und einer Partikelkonzentration eines Abgases

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
None *
See also references of WO2016078817A1 *

Also Published As

Publication number Publication date
WO2016078817A1 (fr) 2016-05-26
DE102014223780A1 (de) 2016-05-25

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