EP3074738A1 - A system for measuring an optical spectral response and/or iv data of a photoelectric device under test - Google Patents

A system for measuring an optical spectral response and/or iv data of a photoelectric device under test

Info

Publication number
EP3074738A1
EP3074738A1 EP14810019.1A EP14810019A EP3074738A1 EP 3074738 A1 EP3074738 A1 EP 3074738A1 EP 14810019 A EP14810019 A EP 14810019A EP 3074738 A1 EP3074738 A1 EP 3074738A1
Authority
EP
European Patent Office
Prior art keywords
light
under test
filter
modulator
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP14810019.1A
Other languages
German (de)
French (fr)
Inventor
Mostafa ELSHINAWY
Stefaan Gustaaf Mariette HEIRMAN
Jimmy MELSKENS
Marinus FISCHER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technische Universiteit Delft
Original Assignee
Technische Universiteit Delft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universiteit Delft filed Critical Technische Universiteit Delft
Publication of EP3074738A1 publication Critical patent/EP3074738A1/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0213—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using attenuators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4532—Devices of compact or symmetric construction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/108—Beam splitting or combining systems for sampling a portion of a beam or combining a small beam in a larger one, e.g. wherein the area ratio or power ratio of the divided beams significantly differs from unity, without spectral selectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1273—Order selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1828—Generating the spectrum; Monochromators using diffraction elements, e.g. grating with order sorter or prefilter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction

Definitions

  • the invention relates to a system for measuring an optical spectral response or property of a device or object under test, comprising in optically coupled sequence:
  • a broadband light source for emitting a light beam of a predefined spectrum, a slit and/or light guide, a wavelength dispersive device, a spatial light modulator for receiving the emitted light beam and controlling an intensity and spectrum of light reflected by said modulator, focusing optics for the reflected light beam directed towards a calibration device and towards the device or object under test.
  • Such a system is known from US-B-8 , 436 , 630 and ap- plies a light distributing device having at least one input portion to receive the reflected light beam and a distributing structure to distribute the light beam in a known ratio to a first area and a second area where a photovoltaic device under test and the calibration device respectively are lo- cated.
  • the light distributing device is embodied as an integrating sphere.
  • the system further includes data acquisition electronics coupled to the device under test and to the calibration device for receiving simultaneously generated output signals therefrom, wherein the data acquisition electronics are coupled to a processor to correct for possible intensity variations in the spectrum of the light and for determining the optical spectral response of the device under test in relation to the calibration device.
  • the use of the integrating sphere has notable disad- vantages, viz. it results in a relatively low light intensity at the device under test which deteriorates its signal-to- noise ratio.
  • a further disadvantage is that it is not possible to measure the reflectance of the device under test.
  • Still another disadvantage is that there is an implicit inac- curacy in that the calibration device and the device under test will receive light with different intensities due to their different positions within the integrating sphere.
  • Still another disadvantage is that the integrating sphere prevents that measurements are carried out to measure the response of the device under test with different incident angles of the light beam.
  • a system for measuring an optical spectral response or property of a device or object under test is proposed.
  • the property may relate for instance to the device's optical transmittance, reflectance, layer thickness, optical absorption or its IV characteristics.
  • the system comprises in optically coupled sequence:
  • a broadband light source for emitting light of a predefined spectrum, a slit and/or light guide, a wavelength dispersive device, a spatial light modulator for receiving the emitted light and controlling an intensity and spectrum of light reflected by said modulator, focusing optics for the reflected light directed towards a calibration device and directed towards the device or object under test, wherein the spatial light modulator is embodied as a beamsplitter.
  • the spatial light modulator By embodying the spatial light modulator as a beamsplitter it is arranged that the light incident on the calibration device and incident on the device or object under test is received from and entirely determined by the spatial light modulator.
  • the beamsplitter is combined with a filter for suppression of second and higher order frequencies of the primary frequencies in the reflected light.
  • a filter for suppression of second and higher order frequencies of the primary frequencies in the reflected light.
  • the filter is a linear variable filter, such as an interference filter, a uniformly colored glass filter or a graduated colored filter, which makes fast measurements possible due to its controllability.
  • a linear variable filter such as an interference filter, a uniformly colored glass filter or a graduated colored filter
  • the wavelength dispersing ele- ment can be a grating, preferably corrected for flat field aberrations .
  • the spatial light modulator can be a magneto-optic modulator, or preferably a digital mirroring device.
  • the system of the invention is provided with a transmission detector in the transmission path behind the device or object under test.
  • the system with the transmission detector can then advantageously be used not only when the device under test is a photovoltaic device but also when the device or object is subject to measurements for determining its transmission, absorption and reflection and their derivatives.
  • the device under test 9 can be a photovoltaic device, which is the normal case, but it can also be an object of which the transmission, reflection and/or absorption needs to be measured. This will be discussed hereinafter after having discussed the system's normal use for measuring the spectral response of a photovoltaic device.
  • the system of the invention comprises in optically coupled sequence:
  • a broadband light source 1 for emitting light of a predefined spectrum, a slit and/or light guide 2, a wavelength dispersive device 3, a spatial light modulator 5 for receiving the emitted light and controlling an intensity and spectrum of light reflected by said modulator 5, focusing optics 6, 7, 8, 12, 13, 14 for the reflected light directed towards the device under test 9 and towards a reference detector 15, respectively.
  • the focusing optics 6, 7, 8, 12, 13, 14 can in- elude homogenizing optics 7, 13 and collimating optics 8, 14.
  • the spatial light modulator 5 acts as a beamsplitter that splits the reflected light with a known ratio into preferably approximately equal parts directed to said reference detector 15 and device under test
  • the light beam directed to the reference detector 15 has its own focusing optics 12, 13, 14, whereas the light beam directed to the device under test 9 has its own focusing optics 6, 7, 8.
  • the spatial light modulator 5 is combined with a filter 4 for suppression of second and higher order frequencies of the primary exciting frequencies in the reflected light.
  • the filter 4 is preferably a linear variable filter, such as an interference filter, a uniformly colored glass filter or a graduated colored filter .
  • the wavelength dispersing element 3 is a grating, preferably corrected for flat field aberrations, and the spatial light modulator 5 is preferably a digital mirroring device.
  • a reflection detector 11 it is possible to apply a reflection detector 11 to detect reflections by the device under test 9. It is also possible to apply in addition a transmission detector 10. The radiation detected by the reflection detector 11 and the transmission detector 10 should add up to the total amount of radiation received at the position of the device or object under test 9.
  • the device under test 9 is not a photovoltaic device but a device or object which is subject to measurements for determining its transmission, absorption and/or reflection.

Abstract

A system for measuring an optical spectral response or property and/or IV data of a device or object under test (9), comprising in optically coupled sequence: a broadband light source (1) for emitting light of a prede- fined spectrum, a slit and/or light guide (2), a wavelength dispersive device (3), a spatial light modulator (5) for re- ceiving the emitted light and controlling an intensity and spectrum of light reflected by said modulator (5), focusing optics (6, 7, 8, 12, 13, 14) for the reflected light directed towards a reference detector (15) and towards the device or object under test (9), wherein the spatial light modulator (5) is embodied as a beamsplitter and is combined with a fil- ter (4) for suppression of second and higher order frequen- cies of the primary frequencies in the reflected light.

Description

A system for measuring an optical spectral response and/or IV data of a photoelectric device under test
The invention relates to a system for measuring an optical spectral response or property of a device or object under test, comprising in optically coupled sequence:
a broadband light source for emitting a light beam of a predefined spectrum, a slit and/or light guide, a wavelength dispersive device, a spatial light modulator for receiving the emitted light beam and controlling an intensity and spectrum of light reflected by said modulator, focusing optics for the reflected light beam directed towards a calibration device and towards the device or object under test.
Such a system is known from US-B-8 , 436 , 630 and ap- plies a light distributing device having at least one input portion to receive the reflected light beam and a distributing structure to distribute the light beam in a known ratio to a first area and a second area where a photovoltaic device under test and the calibration device respectively are lo- cated. The light distributing device is embodied as an integrating sphere. The system further includes data acquisition electronics coupled to the device under test and to the calibration device for receiving simultaneously generated output signals therefrom, wherein the data acquisition electronics are coupled to a processor to correct for possible intensity variations in the spectrum of the light and for determining the optical spectral response of the device under test in relation to the calibration device.
The use of the integrating sphere has notable disad- vantages, viz. it results in a relatively low light intensity at the device under test which deteriorates its signal-to- noise ratio. A further disadvantage is that it is not possible to measure the reflectance of the device under test.
Still another disadvantage is that there is an implicit inac- curacy in that the calibration device and the device under test will receive light with different intensities due to their different positions within the integrating sphere.
Still another disadvantage is that the integrating sphere prevents that measurements are carried out to measure the response of the device under test with different incident angles of the light beam.
It is an object of the invention to provide accurate measurements regarding the spectral response and/or IV data
(current - voltage) under different light conditions of a device or object under test. It is also an object of the invention to provide these measurements fast and reliably, and that possible variations due to the positioning of the device under test and due to variations in the incident angle of the reflected light beam can be measured.
According to the invention a system for measuring an optical spectral response or property of a device or object under test is proposed. The property may relate for instance to the device's optical transmittance, reflectance, layer thickness, optical absorption or its IV characteristics. The system comprises in optically coupled sequence:
a broadband light source for emitting light of a predefined spectrum, a slit and/or light guide, a wavelength dispersive device, a spatial light modulator for receiving the emitted light and controlling an intensity and spectrum of light reflected by said modulator, focusing optics for the reflected light directed towards a calibration device and directed towards the device or object under test, wherein the spatial light modulator is embodied as a beamsplitter.
By embodying the spatial light modulator as a beamsplitter it is arranged that the light incident on the calibration device and incident on the device or object under test is received from and entirely determined by the spatial light modulator.
Preferably the beamsplitter is combined with a filter for suppression of second and higher order frequencies of the primary frequencies in the reflected light. By filtering out second or higher order wavelength radiation in the light beam incident on and/or reflected by the spatial light modulator that corresponds to the exciting primary wavelengths, it is possible to provide a measurement of the spectral response of the device or object under test that is accurate for all the wavelengths that are under investigation, without disturbing contributions from second or higher order reflections. It is possible to apply a filter separate from the spatial light modulator but preferably the filter is integrated with said spatial light modulator.
Preferably the filter is a linear variable filter, such as an interference filter, a uniformly colored glass filter or a graduated colored filter, which makes fast measurements possible due to its controllability.
It is remarked that the wavelength dispersing ele- ment can be a grating, preferably corrected for flat field aberrations .
Further it is remarked that the spatial light modulator can be a magneto-optic modulator, or preferably a digital mirroring device.
Preferably the system of the invention is provided with a transmission detector in the transmission path behind the device or object under test. The system with the transmission detector can then advantageously be used not only when the device under test is a photovoltaic device but also when the device or object is subject to measurements for determining its transmission, absorption and reflection and their derivatives.
The invention will hereinafter be further elucidated with reference to the drawing schematically showing in a sin- gle figure the system of the invention.
In the figure the system for measuring an optical spectral response of a device or object under test 9 is shown. The device under test 9 can be a photovoltaic device, which is the normal case, but it can also be an object of which the transmission, reflection and/or absorption needs to be measured. This will be discussed hereinafter after having discussed the system's normal use for measuring the spectral response of a photovoltaic device.
The system of the invention comprises in optically coupled sequence:
a broadband light source 1 for emitting light of a predefined spectrum, a slit and/or light guide 2, a wavelength dispersive device 3, a spatial light modulator 5 for receiving the emitted light and controlling an intensity and spectrum of light reflected by said modulator 5, focusing optics 6, 7, 8, 12, 13, 14 for the reflected light directed towards the device under test 9 and towards a reference detector 15, respectively. The focusing optics 6, 7, 8, 12, 13, 14 can in- elude homogenizing optics 7, 13 and collimating optics 8, 14. To provide the light beams towards the reference detector 15 and towards the device under test 9 the spatial light modulator 5 acts as a beamsplitter that splits the reflected light with a known ratio into preferably approximately equal parts directed to said reference detector 15 and device under test
9 respectively. The light beam directed to the reference detector 15 has its own focusing optics 12, 13, 14, whereas the light beam directed to the device under test 9 has its own focusing optics 6, 7, 8.
In accordance with the invention the spatial light modulator 5 is combined with a filter 4 for suppression of second and higher order frequencies of the primary exciting frequencies in the reflected light. The filter 4 is preferably a linear variable filter, such as an interference filter, a uniformly colored glass filter or a graduated colored filter .
In the shown embodiment the wavelength dispersing element 3 is a grating, preferably corrected for flat field aberrations, and the spatial light modulator 5 is preferably a digital mirroring device.
It is possible to apply a reflection detector 11 to detect reflections by the device under test 9. It is also possible to apply in addition a transmission detector 10. The radiation detected by the reflection detector 11 and the transmission detector 10 should add up to the total amount of radiation received at the position of the device or object under test 9. The embodiment with the transmission detector
10 can also be used when the device under test 9 is not a photovoltaic device but a device or object which is subject to measurements for determining its transmission, absorption and/or reflection.
Although the invention has been discussed in the foregoing with reference to an exemplary embodiment of the apparatus of the invention, the invention is not restricted to this particular embodiment which can be varied in many ways without departing from the gist of the invention and the scope of the appended claims. The discussed exemplary embodiment shall therefore not be used to construe the appended claims strictly in accordance therewith. On the contrary the embodiment is merely intended to explain the wording of the appended claims without intent to limit the claims to this exemplary embodiment. The scope of protection of the invention shall therefore be construed in accordance with the ap- pended claims only, wherein a possible ambiguity in the wording of the claims shall be resolved using this exemplary embodiment .

Claims

1. A system for measuring an optical spectral response or property and/or IV data of a device or object under test (9), comprising in optically coupled sequence:
a broadband light source (1) for emitting light of a prede- fined spectrum, a slit and/or light guide (2), a wavelength dispersive device (3), a spatial light modulator (5) for receiving the emitted light and controlling an intensity and spectrum of light reflected by said modulator (5), focusing optics (6, 7, 8, 12, 13, 14) for the reflected light directed towards a reference detector (15) and towards the device or object under test (9), characterized in that the spatial light modulator (5) is embodied as a beamsplitter.
2. System according to claim 1, characterized in that the beamsplitter is combined with a filter (4) for sup- pression of second and higher order frequencies of the primary frequencies in the reflected light.
3. System according to claim 1 or 2, characterized in that the filter (4) is a linear variable filter, such as an interference filter, a uniformly colored glass filter or a graduated colored filter.
4. System according to any one of claims 1 - 3, characterized in that the filter (4) is integrated with the spatial light modulator (5) .
5. System according to any one of claims 1 - 4, characterized in that the wavelength dispersing element (3) is a grating, preferably corrected for flat field aberrations .
6. System according to any one of claims 1-5, characterized in that the spatial light modulator (5) is a digi- tal mirroring device.
7. System according to any one of the previous claims, characterized in that it is provided with a reflection detector (11) in the light path reflected by the device or object under test (9) .
8. System according to any one of the previous claims, characterized in that it is provided with a transmis- sion detector (10) in the transmission path behind the device or object under test (9) .
EP14810019.1A 2013-11-29 2014-11-28 A system for measuring an optical spectral response and/or iv data of a photoelectric device under test Ceased EP3074738A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL2011868A NL2011868C2 (en) 2013-11-29 2013-11-29 A system for measuring an optical spectral response and/or iv data of a photoelectric device under test.
PCT/NL2014/050807 WO2015080579A1 (en) 2013-11-29 2014-11-28 A system for measuring an optical spectral response and/or iv data of a photoelectric device under test

Publications (1)

Publication Number Publication Date
EP3074738A1 true EP3074738A1 (en) 2016-10-05

Family

ID=50114491

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14810019.1A Ceased EP3074738A1 (en) 2013-11-29 2014-11-28 A system for measuring an optical spectral response and/or iv data of a photoelectric device under test

Country Status (3)

Country Link
EP (1) EP3074738A1 (en)
NL (1) NL2011868C2 (en)
WO (1) WO2015080579A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040125361A1 (en) * 2002-09-06 2004-07-01 Riza Nabeel Agha Digital optical beam profiler
US20110084717A1 (en) * 2009-10-14 2011-04-14 Gooch And Housego Plc Corrected optical spectral responses for photoelectric devices

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Publication number Priority date Publication date Assignee Title
US5420681A (en) * 1993-08-03 1995-05-30 Ball Corporation Modular multiple spectral imager and spectral imager
US5570180A (en) * 1993-08-27 1996-10-29 Minolta Co., Ltd. Spectrometer provided with an optical shutter
US6783705B1 (en) * 1997-04-11 2004-08-31 Waters Investments Limited Calibration medium for wavelength calibration of U.V. absorbance detectors and methods for calibration
US7936528B2 (en) * 2008-12-31 2011-05-03 Teledyne Scientific & Imaging, Llc Graded order-sorting filter for hyperspectral imagers and methods of making the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040125361A1 (en) * 2002-09-06 2004-07-01 Riza Nabeel Agha Digital optical beam profiler
US20110084717A1 (en) * 2009-10-14 2011-04-14 Gooch And Housego Plc Corrected optical spectral responses for photoelectric devices

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2015080579A1 *

Also Published As

Publication number Publication date
WO2015080579A1 (en) 2015-06-04
NL2011868C2 (en) 2015-06-01

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