EP3060963A1 - Method for monitoring industrial systems - Google Patents

Method for monitoring industrial systems

Info

Publication number
EP3060963A1
EP3060963A1 EP14796717.8A EP14796717A EP3060963A1 EP 3060963 A1 EP3060963 A1 EP 3060963A1 EP 14796717 A EP14796717 A EP 14796717A EP 3060963 A1 EP3060963 A1 EP 3060963A1
Authority
EP
European Patent Office
Prior art keywords
monitoring
industrial system
signals
industrial
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14796717.8A
Other languages
German (de)
French (fr)
Inventor
Waldemar BRUNNMEIER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Growth Financial AG
Original Assignee
Growth Financial AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE201310111819 external-priority patent/DE102013111819A1/en
Priority claimed from DE102014100001.3A external-priority patent/DE102014100001A1/en
Application filed by Growth Financial AG filed Critical Growth Financial AG
Publication of EP3060963A1 publication Critical patent/EP3060963A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/406—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by monitoring or safety
    • G05B19/4063—Monitoring general control system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/406—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by monitoring or safety
    • G05B19/4061—Avoiding collision or forbidden zones
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/406—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by monitoring or safety
    • G05B19/4065—Monitoring tool breakage, life or condition
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35529—Monitoring current machining, store information in database as a new working case
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37624—Detect collision, blocking by measuring change of velocity or torque
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50206—Tool monitoring integrated in nc control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/80—Management or planning

Definitions

  • the invention relates to a method for monitoring industrial systems, in particular machine tools, robots or the like, by means of sensors, which determine at least one state of the industrial system, convert into signals and pass corresponding signals to an evaluation.
  • Machine components that are to be monitored in any case are those that perform movements. These include mainly aggregates that operate on the appropriate processing axes, such as slides, spindles, but also their drive shafts, bearings, etc.
  • Object of the present invention is to improve the monitoring of industrial systems mentioned above and in particular to accelerate error detection.
  • an analysis program is retrieved and processed outside the actual work process of the industrial system, which receives and processes the signals in the evaluation electronics.
  • a machine condition analysis takes place.
  • the system may be configured such that once a week or once a day, the machine tool invokes a special maintenance program and various axis motions, in particular without actual machining, with different rotational speeds of the spindle.
  • the physical results, for example by vibration measurement, of this maintenance program are measured by the monitoring system and stored for analysis.
  • the sensor is preferably a triaxial sensor, but this is only an example if the diagnosis and analysis are primarily related to the axes of the industrial system. Its signals are passed on to an electronic evaluation unit, in which inventions special algorithms for state detection. Preferably, this evaluation has then also a communication interface with the machine, if necessary, so that the machine control can be influenced. In this way, not only mechanical problems with respect to spindle, guide rails, Rollenlauflauf conception, etc. are detected, but also drive problems, lubrication problems, etc. Above all, the vibration or vibration is monitored. The vibrations are analyzed and evaluated with different algorithms. The evaluation is based on typical vibration patterns, that is, on the basis of many years of experience from machine diagnostics.
  • a fingerprint of the machine is created. This means that all determined values of the machines form an overall picture. At regular intervals, this fingerprint of the machine is compared with the current states and analyzed and, if necessary, the fingerprint is also adjusted (learning process).
  • the inventive method is also coupled with a system for the continuous control of the industrial system during its use.
  • a system for the continuous control of the industrial system during its use.
  • collision monitoring is more likely to take place with the process monitoring, the analysis of this collision monitoring then with the condition monitoring.
  • both monitors but also take over parts of the other.
  • the new method can perform both collision monitoring and the out-off process tasks described above.
  • this means that the reaction to the detection of a possible collision is accelerated to one millisecond.
  • the invention also encompasses a corresponding device which essentially comprises a sensor, in particular an acceleration sensor, an evaluation unit and preferably an interface for the machine control.

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Numerical Control (AREA)
  • Testing And Monitoring For Control Systems (AREA)

Abstract

The invention relates to a method for monitoring industrial systems, in particular machine tools, robots or similar, by means of sensors which determine at least one state of the industrial system, convert into signals and transfer corresponding signals to an electronic evaluation device. In addition to the actual operational process of the industrial system, an analysis programme should be requested and performed, said analysis programme capturing and processing the signals in the electronic evaluation device.

Description

Verfahren zum Überwachen von industriellen Systemen  Method for monitoring industrial systems
Die Erfindung betrifft ein Verfahren zum Überwachen von industriellen Systemen, insbesondere von Werkzeugmaschinen, Robotern od.dgl., mittels Sensoren, welche zumindest einen Zustand des industriellen Systems ermitteln, in Signale umwandeln und entsprechende Signale an eine Auswerteelektronik weitergeben. The invention relates to a method for monitoring industrial systems, in particular machine tools, robots or the like, by means of sensors, which determine at least one state of the industrial system, convert into signals and pass corresponding signals to an evaluation.
Stand der Technik State of the art
In vielen industriellen Bereichen gibt es Systeme, die überwacht werden müssen. Dazu gehören vor allem Werkzeugmaschinen, wie Drehmaschinen, Bearbeitungszentren, Schleifmaschinen, Spezialmaschinen aber auch Transferstrassen, Maschinenportale, Roboter und sonstige Handhabungssysteme, wie zum Beispiel Ladeportale. Dies ist nur eine kleine Auswahl der zu überwachenden Systeme. Die vorliegende Erfindung bezieht sich auf alle industriellen Systeme, die irgendwelche Tätigkeiten verrichten. In many industrial areas, there are systems that need to be monitored. These include above all machine tools, such as lathes, machining centers, grinding machines, special machines but also transfer lines, machine portals, robots and other handling systems, such as loading portals. This is just a small one Selection of the systems to be monitored. The present invention relates to all industrial systems performing any activities.
Bei diesen industriellen Systemen sind Überwachungsarbeiten zu leisten, damit die Funktion der Systeme gesichert bleibt. Die Überwachung muss sich dabei auf langfristige Veränderungen, beispielsweise auf Verschleiss, aber auch auf kurzfristige Änderungen, wie beispielsweise Kollisionen, Überlastungen, Unwucht od.dgl. beziehen. Maschinenkomponenten, die auf jeden Fall zu überwachen sind, sind solche, die Bewegungen ausführen. Dazu gehören vor allem Aggregate, die auf den entsprechenden Bearbeitungsachsen tätig sind, wie Schlitten, Spindeln, aber auch deren Antriebswellen, Lager usw. These industrial systems must be monitored so that the function of the systems remains secure. The monitoring must be based on long-term changes, such as wear, but also on short-term changes, such as collisions, overloads, imbalance or the like. Respectively. Machine components that are to be monitored in any case are those that perform movements. These include mainly aggregates that operate on the appropriate processing axes, such as slides, spindles, but also their drive shafts, bearings, etc.
So ist beispielsweise aus der US 6,138,056 ein System und ein Verfahren zur Wartung und Reparatur einer CNC-Maschine bekannt, bei dem zur Überwachung der Maschinenachse Laufwege- und Laufzeitdaten ermittelt werden, um die Wartungs- und Reparaturzeitpunkte der Maschine zu ermitteln. Thus, for example, from US Pat. No. 6,138,056 a system and a method for the maintenance and repair of a CNC machine is known, in which runtime and runtime data are determined for monitoring the machine axis in order to determine the maintenance and repair times of the machine.
Aus der EP-A 0 321 108 ist ein Überwachungssystem zur prozessbegleitenden Überwachung von Werkzeugen, Werkstücken oder Bearbeitungsprozessen in spanabhebenden Werkzeugmaschinen bekannt. Hier werden Zustände, wie Werkzeugbruch, Werkzeugausbruch, Werkzeugverschleiss, Werkzeug-zuWerkstück Kontakt, Rattern oder Maschinenkollisionen erkannt und der Maschinenantrieb schnellstmöglich stillgesetzt, um Folgeschäden zu vermeiden. From EP-A 0 321 108 a monitoring system for process-accompanying monitoring of tools, workpieces or machining processes in cutting machine tools is known. Conditions such as tool breakage, tool breakage, tool wear, tool-to-tool contact, rattling or machine collisions are detected here and the machine drive is shut down as quickly as possible in order to avoid consequential damage.
Aus der EP-A 0 762 248 ist ein Verfahren bekannt, mit dem auf Basis von Messdaten von mindestens einem Vibrationssensor eine post- Prozessüberprüfung stattfindet, um fehlerhafte Zustände an Werkzeugmaschinenkomponenten nachträglich zu charakterisieren. Aufgabe From EP-A 0 762 248 a method is known with which based on measurement data of at least one vibration sensor, a post-process verification takes place to subsequently characterize faulty conditions on machine tool components. task
Aufgabe der vorliegenden Erfindung ist es, die Überwachung von oben genannten industriellen Systemen zu verbessern und insbesondere eine Fehlererkennung zu beschleunigen. Object of the present invention is to improve the monitoring of industrial systems mentioned above and in particular to accelerate error detection.
Lösung der Aufgabe Solution of the task
Zur Lösung der Aufgabe führt, dass ausserhalb des eigentlichen Arbeitsprozesses des industriellen Systems ein Analyseprogramm abgerufen und abgearbeitet wird, welches die Signale in der Auswerteelektronik empfängt und verarbeitet. In order to achieve the object, an analysis program is retrieved and processed outside the actual work process of the industrial system, which receives and processes the signals in the evaluation electronics.
Wesentliches Merkmal der vorliegenden Erfindung, dass ausserhalb eines Bearbeitungsprozesses in gewissen Zeitabständen eine Maschinenzustandsanalyse (condition monitoring) stattfindet. Zum Beispiel kann das System so konfiguriert sein, dass einmal pro Woche oder einmal pro Tag die Werkzeugmaschine ein spezielles Instandhaltungsprogramm aufruft und verschiedene Achsbewegungen, insbesondere ohne eigentliche Bearbeitung, mit unterschiedlichen Umdrehungszahlen der Spindel abfährt. Die physikalischen Ergebnisse, zum Beispiel durch Vibrationsmessung, dieses Instandhaltungsprogramms werden mit dem Überwachungssystem gemessen und für eine Analyse gespeichert. An essential feature of the present invention that outside of a processing process at certain intervals, a machine condition analysis (condition monitoring) takes place. For example, the system may be configured such that once a week or once a day, the machine tool invokes a special maintenance program and various axis motions, in particular without actual machining, with different rotational speeds of the spindle. The physical results, for example by vibration measurement, of this maintenance program are measured by the monitoring system and stored for analysis.
Bei dem Sensor handelt es sich bevorzugt um einen Dreiachssensor, dies ist aber nur ein Beispiel, wenn sich die Diagnose und Analyse vor allem auf die Achsen des industriellen Systems bezieht. Dessen Signale werden an eine elektronische Auswerteeinheit weitergegeben, in der sich spezielle Algorithmen für Zustandserkennung erfinden. Bevorzugt hat diese Auswerteeinheit dann auch noch eine Kommunikationsschnittstelle mit der Maschine, sofern dies erforderlich ist, so dass die Maschinensteuerung beeinflusst werden kann. Auf diese Weise werden nicht nur maschinentechnische Probleme bezüglich Spindel, Führungsschienen, Rollenumlaufschuhen usw. erfasst, sondern auch Antriebsprobleme, Schmierungsprobleme usw. Vor allem wird aber die Schwingung oder Vibration überwacht. Die Schwingungen werden mit verschiedenen Algorithmen analysiert und bewertet. Die Auswertung erfolgt nach typischen Schwingungsbildern, das heisst anhand von jahrelangen Erfahrungswerten aus der Maschinendiagnose. The sensor is preferably a triaxial sensor, but this is only an example if the diagnosis and analysis are primarily related to the axes of the industrial system. Its signals are passed on to an electronic evaluation unit, in which inventions special algorithms for state detection. Preferably, this evaluation has then also a communication interface with the machine, if necessary, so that the machine control can be influenced. In this way, not only mechanical problems with respect to spindle, guide rails, Rollenlauflaufschuhe, etc. are detected, but also drive problems, lubrication problems, etc. Above all, the vibration or vibration is monitored. The vibrations are analyzed and evaluated with different algorithms. The evaluation is based on typical vibration patterns, that is, on the basis of many years of experience from machine diagnostics.
Insbesondere zu Anfang der erfindungsgemässen Diagnose wird ein Fingerabdruck der Maschine erstellt. Das heisst, sämtliche ermittelte Werte der Maschinen bilden ein Gesamtbild. In regelmässigen Abständen wird dieser Fingerabdruck der Maschine mit den aktuellen Zuständen verglichen und analysiert und gegebenenfalls der Fingerabdruck auch angepasst (Lernprozess). In particular, at the beginning of the diagnosis according to the invention, a fingerprint of the machine is created. This means that all determined values of the machines form an overall picture. At regular intervals, this fingerprint of the machine is compared with the current states and analyzed and, if necessary, the fingerprint is also adjusted (learning process).
Im bevorzugten Ausführungsbeispiel ist das erfindungsgemässe Verfahren auch mit einem System zur laufenden Kontrolle des industriellen Systems während seines Einsatzes gekoppelt. Das heisst, auf der einen Seite findet eine reguläre Werkzeugüberwachung, ein process monitoring, bestehend aus Hardware-Elektronik, spezifischer Software, Sensorik und eventuell Visualisierungs-PC, statt, auf der anderen Seite mit dem neuen System das condition monitoring. In the preferred embodiment, the inventive method is also coupled with a system for the continuous control of the industrial system during its use. This means that on the one hand there is a regular tool monitoring, a process monitoring, consisting of hardware electronics, specific software, sensors and possibly visualization PC, on the other hand with the new system, the condition monitoring.
Beispielsweise findet eine Kollisionsüberwachung eher mit dem process monitoring statt, die Analyse dieser Kollisionsüberwachung dann mit dem condition monitoring. Bevorzugt übernehmen beide Überwachungen aber auch Teile des anderen. So kann beispielsweise das neue Verfahren sowohl eine Kollisionsüberwachung übernehmen, als auch die oben beschriebenen Out-Off- Prozessaufgaben. Insbesondere für die Kollisionsüberwachung bedeutet dies, dass die Reaktion auf die Erkennung einer möglichen Kollision auf eine Millisekunde beschleunigt wird. Ähnliches gilt auch auf Erkennung und Reaktion auf Vibrationsüberlast. Von der Erfindung wird auch eine entsprechende Vorrichtung umfasst, die im Wesentlichen aus einem Sensor, insbesondere aus einem Beschleunigungssensor, einer Auswerteeinheit und bevorzugt einer Schnittstelle zur Maschinensteuerung besteht. For example, collision monitoring is more likely to take place with the process monitoring, the analysis of this collision monitoring then with the condition monitoring. Preferably, both monitors but also take over parts of the other. For example, the new method can perform both collision monitoring and the out-off process tasks described above. In particular for collision monitoring, this means that the reaction to the detection of a possible collision is accelerated to one millisecond. The same applies to detection and reaction to vibration overload. The invention also encompasses a corresponding device which essentially comprises a sensor, in particular an acceleration sensor, an evaluation unit and preferably an interface for the machine control.

Claims

Patentansprüche claims
1 . Verfahren zum Überwachen von industriellen Systemen, insbesondere von Werkzeugmaschinen, Robotern od.dgl., mittels Sensoren, welche zumindest einen Zustand des industriellen Systems ermitteln, in Signale umwandeln und entsprechende Signale an eine Auswerteelektronik weitergeben, dadurch gekennzeichnet, dass ausserhalb des eigentlichen Arbeitsprozesses des industriellen Systems ein Analyseprogramm abgerufen und abgearbeitet wird, welches die Signale in der Auswerteelektronik empfängt und verarbeitet. 1 . Method for monitoring industrial systems, in particular of machine tools, robots or the like, by means of sensors, which determine at least one state of the industrial system, convert into signals and pass corresponding signals to a transmitter, characterized in that outside the actual working process of the industrial System is retrieved and processed an analysis program that receives and processes the signals in the transmitter.
2. Verfahren nach Anspruch 1 , dadurch gekennzeichnet, dass anhand der Ergebnissen einer Analyse durch das Analyseprogramm das industrielle System gesteuert wird. 2. The method according to claim 1, characterized in that based on the results of an analysis by the analysis program, the industrial system is controlled.
3. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass Achsen bzw. Achsbewegungen des industriellen Systems überwacht werden. 3. The method according to claim 1 or 2, characterized in that axes or axis movements of the industrial system are monitored.
4. Verfahren nach wenigstens einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass zur Überwachung zumindest ein Beschleunigungssensor verwendet wird. 4. The method according to at least one of the preceding claims, characterized in that for monitoring at least one acceleration sensor is used.
5. Verfahren nach wenigstens einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass eine Vibrationsüberwachung des industriellen Systems durchgeführt wird. 5. The method according to at least one of the preceding claims, characterized in that a vibration monitoring of the industrial system is performed.
6. Verfahren nach wenigstens einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass eine Kollisionsüberwachung des industriellen Systems durchgeführt wird. 6. The method according to at least one of the preceding claims, characterized in that a collision monitoring of the industrial system is performed.
7. Verfahren nach wenigstens einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Signale durch Algorithmen analysiert und bewertet werden. 7. The method according to at least one of the preceding claims, characterized in that the signals are analyzed and evaluated by algorithms.
8. Verfahren nach wenigstens einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass zumindest einmal, bevorzugt aber in zeitlichen Abständen ein Fingerabdruck (Sollwerte) des industriellen Systems erstellt und jeweils mit den aktuellen Signalen verglichen wird. 8. The method according to at least one of the preceding claims, characterized in that at least once, but preferably at intervals, a fingerprint (setpoints) of the industrial system is created and compared in each case with the current signals.
9. Verfahren nach wenigstens einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das industrielle System zudem über eine Prozessüberwachung verfügt. 9. The method according to at least one of the preceding claims, characterized in that the industrial system also has a process monitoring.
EP14796717.8A 2013-10-25 2014-10-16 Method for monitoring industrial systems Withdrawn EP3060963A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE201310111819 DE102013111819A1 (en) 2013-10-25 2013-10-25 Method for monitoring industrial systems
DE102014100001.3A DE102014100001A1 (en) 2014-01-02 2014-01-02 Method for monitoring industrial systems
PCT/EP2014/072171 WO2015059017A1 (en) 2013-10-25 2014-10-16 Method for monitoring industrial systems

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EP3060963A1 true EP3060963A1 (en) 2016-08-31

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US (1) US20160259321A1 (en)
EP (1) EP3060963A1 (en)
JP (1) JP2016535336A (en)
KR (1) KR20160087812A (en)
CN (1) CN105829980A (en)
CA (1) CA2928582A1 (en)
RU (1) RU2016117942A (en)
WO (1) WO2015059017A1 (en)

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JP7082517B2 (en) * 2018-04-19 2022-06-08 株式会社ディスコ Processing equipment

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WO2015059017A1 (en) 2015-04-30
JP2016535336A (en) 2016-11-10
CA2928582A1 (en) 2015-04-30
RU2016117942A3 (en) 2018-08-17
US20160259321A1 (en) 2016-09-08
CN105829980A (en) 2016-08-03
KR20160087812A (en) 2016-07-22
RU2016117942A (en) 2017-11-30

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