EP3060803A1 - Procede pour generer un ecoulement de fluide - Google Patents
Procede pour generer un ecoulement de fluideInfo
- Publication number
- EP3060803A1 EP3060803A1 EP14824891.7A EP14824891A EP3060803A1 EP 3060803 A1 EP3060803 A1 EP 3060803A1 EP 14824891 A EP14824891 A EP 14824891A EP 3060803 A1 EP3060803 A1 EP 3060803A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- membrane
- hole
- fluid
- movements
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 95
- 238000000034 method Methods 0.000 title claims abstract description 34
- 239000012528 membrane Substances 0.000 claims abstract description 177
- 230000033001 locomotion Effects 0.000 claims abstract description 75
- 230000008859 change Effects 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 11
- 230000005284 excitation Effects 0.000 claims description 7
- 238000005452 bending Methods 0.000 claims description 6
- 230000006835 compression Effects 0.000 claims description 5
- 238000007906 compression Methods 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 3
- 238000005086 pumping Methods 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 229920001971 elastomer Polymers 0.000 description 7
- 239000000806 elastomer Substances 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
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- 230000001276 controlling effect Effects 0.000 description 4
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- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000002457 bidirectional effect Effects 0.000 description 2
- 238000000708 deep reactive-ion etching Methods 0.000 description 2
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- 239000007788 liquid Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229920000260 silastic Polymers 0.000 description 2
- 229910005084 FexOy Inorganic materials 0.000 description 1
- -1 PolyDiMethylSiloxane Polymers 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1077—Flow resistance valves, e.g. without moving parts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F7/00—Pumps displacing fluids by using inertia thereof, e.g. by generating vibrations therein
Definitions
- the present invention relates to a method of generating a flow, and a device for generating a flow suitable for implementing the method.
- the field of the invention relates to the field of devices for controlling and / or generating fluid flow, and more particularly micropumps or micro-mixers.
- the invention will find a particular application as microTas for Lab-on-a-Chip applications.
- Such a device for the generation of flows is known from, for example, US Pat. No. 5,718,567, which describes a diaphragm micro-pump comprising a pumping chamber connected to an inlet channel and a discharge channel, a valve of admission at one end of the membrane, and an outlet valve at the other end of the membrane, a drive mechanism of the membrane, the membrane constituting a deformable wall of the pumping chamber.
- micro-pump requires the presence of said pump chamber and valves to obtain compression and expansion of the fluid, which implies a relatively bulky and generally complex device to integrate.
- the inlet valve When the pumping chamber is under pressure under the action of the diaphragm, the inlet valve is opened and the outlet valve is closed, causing the admission of the fluid from the inlet channel to the pumping chamber.
- the inlet valve When the pumping chamber is under pressure, under the action of the membrane, the inlet valve is closed and the outlet valve is open, causing the discharge of the fluid to the discharge channel.
- the flow generation involves two membrane penetrations, a first passage from the inlet channel to the pumping chamber through the inlet valve and a second passage from the pumping chamber to the discharge channel. through the outlet valve.
- micro-pump Another disadvantage of such a micro-pump is that it can generate flow in only one direction, the valves preventing the operation of the pump in the opposite direction.
- a perforated element such as a perforated membrane, arranged between an inlet and a fluid outlet for the pump, having one or more perforations (marked 14),
- At least one shutter system adjacent to said perforated element on one of its sides, having at least one shutter opposite at least one of the perforations and so as to close said perforation when not in use and,
- actuating means for moving said perforated element alternately in directions towards the outlet and the inlet of the pump.
- a micropump comprising a membrane extending over a fluid channel (10), the membrane comprising a fluid component (marked 4) having a passage through the membrane.
- the mechanics of the identified fluid component 4 are such that the resistance to flow through the passage in a deflection of the membrane in a first direction is greater than the flow resistance of the passage according to a deflection of the membrane in a second direction and such as to generate a net flow of fluid in said first direction when the membrane is actuated back and forth.
- the "fluid component” is the essential element that makes it possible to generate the flow in a given direction: such a pump has only one direction of operation, namely said first direction, and therefore can not to be bidirectional.
- the fluid component is a conical shaped through hole, such as a diffuser.
- This conical portion is oriented so as to have a preferential direction of flow (i.e. the direction of least resistance to flow) through the membrane, along said first direction.
- the fluid component comprises holes marked 4a in the membrane, as well as a membrane valve marked 4b, able to close or open the holes by imposing a net flow, according to the first meaning.
- it is not the geometry of the hole that creates the preferred direction of flow, but the addition of an additional component (the membrane valve, labeled 4b).
- US 2006/232167 A1 relates to a piezoelectric diaphragm having a membrane comprising an opening, marked 25.
- This opening is provided with a “flap valve” valve arranged to close or open the opening in response to the movements of the diaphragm.
- This valve can be an accessory inserted into the opening.
- the accessory may be a "bail valve” or a precision orifice accessory.
- each accessory is a rigid element having a non-deformable orifice.
- micro-pump devices of the prior art of WO 02/097270 A1, DE 10 2008 004147 or US2006 / 232167 each use a diaphragm actuated by reciprocating movement and making it possible to generate a flow, according to a flow rate net, at least in a first sense through the membrane.
- a regulating device is always necessary and associated with the membrane to impose a direction of circulation to the fluid, namely: the shutter system of the hole in the document WO 02/097270
- EP 2 306 019 A1 (a micro-fan, which comprises (see claim 1):
- the fan chamber being formed between the actuator, identified 50 and the first wall marked 30,
- the first wall 30 being disposed between the second wall 10 and the fan chamber, the second wall 10 being at a distance from the first wall 30,
- a second opening 11 (fan outlet) through the second wall 10; a central space 21 formed between the first and the second wall, in communication with the first opening 31 and the second opening 11; and a feed passage 22 whose outer end is in communication with the outside of the fan, and an inner end connected to the central space 21,
- a bottleneck 23 having a passage which is smaller than the feed passage 22.
- Such a device according to this prior art is suitable only for a compressible fluid and is not suitable for generating a flow from an incompressible fluid, such as for example water.
- the vibrations of the actuator marked 50 cause the vibration of the first identified wall 30 and in turn causes a pressure fluctuation in the chamber of the central space marked 21. Because of the bottleneck 23, this fluctuation is essentially dissipated through the second opening marked 11.
- the flow of fluid in the central space being large, the internal pressure in the central space identified 21 is less than the pressure of the marked supply passage 22, which generates a pressure gradient creating a flow of fluid from the supply passage 22 to the central space 21.
- the invention particularly aims to overcome the various disadvantages of these known techniques.
- an object of the invention is to provide a device for easier integration and making the devices more compact, and according to the will of the inventor, not requiring a pumping chamber and valves for its operation or in general, any other flow control device, and in particular those taught cited prior art.
- Another object of the invention is, at least in a particular embodiment, to provide a device of simple design and at the same time reducing manufacturing costs.
- Another object of the invention is, at least in a particular embodiment, to provide a device for obtaining better performance.
- Another object of the invention is at least one embodiment of providing a method for generating a fluid flow.
- a method for generating a fluid flow implemented in a device comprising a membrane provided with at least a hole as well as means for generating reciprocating movements, in which a flow is generated through the membrane by actuating said membrane, at least at the level of said at least one hole, according to a mode of deformation of said at least one at least one hole causing openings and closures of said at least one hole and disturbing the fluid to generate said flow through the membrane, in a given direction (ie suction or discharge).
- the method implemented makes it possible to generate a flow by a single fluid passage through the membrane, advantageously without the need for a pumping chamber to compress or relax the fluid, or a valve and as encountered in the state of the art. known from US 5,718,567.
- the controlled deformation of the membrane, at least at said at least one hole allows the implementation of a mode of deformation of said at least one hole that generates a fluid flow.
- this hole is not associated with any attached flow regulating device such as a valve (or “valve” or other element closing the hole to impose a direction of flow), nor does it has a clean geometry or an accessory imposing a preferred direction of fluid flow through the membrane.
- a first advantage of the method according to the invention is that it requires, for its implementation, a device of extremely simple structure, comprising only for essential elements, on the one hand, the membrane provided with said at least one hole (deformable), and secondly, generating means of movement back and forth associated with this membrane.
- said mode of deformation of said hole may comprise membrane bending movements and / or torsion and / or compression and / or tensioning movements of the membrane or a combination of these movements;
- the membrane is adapted, during its movements back and forth, to circulate a fluid through said at least one hole and able to prohibit the circulation of the fluid when at rest;
- said membrane generates leaks at rest, through said at least one hole, leaks that can be stopped when the membrane is actuated said at least one hole allowing a fluid flow through the membrane, in a first direction, from one side to the other of the membrane, and in a second opposite direction, the direction of circulation of the fluid is changed through of the membrane by controlling the excitation of the means generating back-and-forth movements allowing operation at the discharge (or at the suction) in a given direction of circulation, then after excitement change on the means generators of reciprocating movements, at the suction (or discharge) in a direction of opposite traffic;
- the flow direction of the fluid is changed by modifying the mode of deformation of the membrane
- said means for generating reciprocating movements comprise an electromagnetic actuator, a piezoelectric actuator or an electrostatic actuator,
- said means for generating reciprocating movement are distinct from the membrane and cooperate with said membrane to actuate and deform the membrane at least at the level of said at least one hole.
- the generating means of reciprocating movements comprise said membrane which is an actuator, said membrane comprising at least partly an electro-active polymer.
- said at least one hole is of submillimetric or millimetric dimension
- the pattern of said at least one hole is selected from a pattern in H, U, sinusoid, especially W, I, in vertical lines or in parallel lines.
- the invention also relates to a device for generating a flow of fluid, suitable for implementing the method, and comprising:
- a second part comprising a membrane, connected to said first portion on its periphery and covering recess;
- At least one hole at the mobile part of the membrane adapted, during the movements of the membrane to circulate a fluid through the membrane, and possibly able to prohibit the circulation of the fluid when the mobile part is at rest,
- the device comprises a third portion made of rigid material, bonded to one of the faces of the membrane, said third portion being disposed at the level of the recess and of dimensions smaller than those of the recess so as to form an inter space between said first part and said third part and in such a way as to form a mobile part comprising the mobile part of the membrane and said third part, said means for generating reciprocating movements cooperating with the third rigid part, said part at least one hole being located at said interespace,
- said at least one hole is of submillimetric or millimetric dimension
- the hole selectively comprises a H-shaped pattern, U, I, sinusoid (in W), or said at least one hole comprises several parallel holes close together;
- said at least one hole allows a flow of fluid through the membrane, in a first direction, from one side to the other of the membrane, and in a second opposite direction;
- the device comprises means for controlling said means for generating reciprocating motions in such a way as to make it possible to change the direction of circulation of the fluid through the membrane;
- said reciprocating generating means comprise an electromagnetic actuator such as a magnet / coil pair, a piezoelectric actuator, an electrostatic actuator, a magnetostrictive actuator, a ferroelectric actuator, a thermal actuator, or a memory actuator. form.
- Figure 1 is a sectional view of the device for the flow generation according to the invention.
- FIGS. 2a to 2c are top views of the device according to various embodiments of the invention.
- FIGS 3a to 3d are schematic views of different embodiments of the holes according to the invention.
- FIG. 4 illustrates the various steps of the method of manufacturing a device according to the invention
- Figure 5 is a schematic sectional view of a packaging of the device according to the invention.
- FIG. 6 is a schematic view of a test bench of a device according to the invention.
- FIGS. 7a, 7b, 7c are detailed pictures of a possible hole shape in the membrane, namely a curved slot,
- FIGs 8a, 8b, 8c are detail photos of another possible shape in "H".
- the general principle of the invention is therefore based on the implementation of a method for generating a fluid flow implemented in a device comprising a membrane 2 provided with at least one hole 20 and means 4 generators of movements back and forth.
- a flow is generated through the membrane by actuating said membrane, at least at the level of said at least one hole, according to a mode of deformation of said at least one hole causing openings and closures of said at least one hole and disrupting the fluid to generate said flow.
- the method used makes it possible to generate a flow by a single fluid passage through the membrane, and not two as in US 5718567.
- the method according to the invention does not require a pumping chamber or valves to compress or relax the fluid and as known in the state of the art known from US 5,718,567.
- this hole is associated with any reported flow regulating device such as valve (or “valve” or other element closing the hole to impose a direction of flow), nor does it has a clean geometry or an accessory imposing a preferred direction of fluid flow through the membrane.
- the inventors have found that it is possible to change the direction of flow of the fluid (from the "suction” direction to the “discharge” direction or vice versa) by changing the excitation on the generating means of movement of the fluid. back and forth, or the mode of deformation of the hole, in particular in that said at least one hole in the membrane does not have a preferred direction of flow, and is devoid of flow control device.
- a first advantage of the method according to the invention is that it requires, for its implementation, a device of extremely simple structure, comprising only for essential elements, on the one hand, the membrane provided with said at least one hole (deformable), and secondly, generating means of movement back and forth associated with this membrane.
- the hole can present different possible forms, it is not configured to impose a preferential direction of flow through the membrane.
- the back and forth movements are periodic movements, such as for example oscillation movements. It is still possible to generate a fluid flow thanks to pseudoperiodic movements or aperiodic movements.
- it generates reciprocating movements of the membrane 2 which create bending movements of the membrane 2.
- one generates movements of the membrane which create torsional movements of the membrane, or else tension movements and / or compression movements of the membrane.
- the generated movements can still be a combination of all or part of these different movements.
- the mode of deformation (bending and / or torsion and / or compression and / or tension) makes it possible, in combination with the openings and closures of the said at least one hole, to generate the flow of fluid through the membrane 4.
- Said at least one hole 20 allows a fluid flow through the membrane, in a first direction, from one side to the other of the membrane, and in a second opposite direction.
- this hole is not associated with any flow control device such as valve, valves, or other shutter system, nor has a proper geometry creating a lower flow resistance in a given direction, and thus a preferential sense flow through the membrane.
- the direction of circulation of the fluid can be changed by modifying the mode of deformation of said membrane 2.
- the direction of circulation of the fluid by varying the oscillation frequency of the membrane 2. It is still possible to change the direction of circulation by applying a voltage offset, signed positively or negatively.
- the generating means 4 for reciprocating movements comprise electro-active or magneto-active means, such as for example an electrostatic actuator, an electromagnetic actuator, or even a piezoelectric actuator.
- the means 4 generating reciprocating movements are excited by a variable current signal.
- an offset is applied to the voltage positively or negatively, so as to generate the flow.
- the hole or holes are submillimetric or millimetric.
- Said hole 20 may be a slot.
- the width of the slot may be between 1 micron and 500 microns.
- the length of said slot may be between 1 micron and 2000 microns.
- the dimensions of the hole are those of the holes when the membrane is not stressed.
- the pattern of said at least one hole 20 may be chosen from a pattern in H ( Figure 3a), in U ( Figure 3b), in sinusoid (i.e. W) ( Figure 3c).
- the H and U shapes provide maximum opening, while the sinusoidal opening provides maximum length.
- the hole can still be simply circular.
- said at least one hole comprises several holes forming close parallel lines (FIG. 3 d). Two adjacent lines are brought closer to one dimension smaller than the length of the holes. Such patterns make it possible to obtain a more rigid opening 20 and thus to limit leaks when the device is stopped.
- the means for generating reciprocating movements are distinct from the membrane and cooperate with said membrane to actuate and deform the membrane at least at said hole.
- the membrane may be active, comprising an ionic polymer excited by electrodes.
- the membrane may be active, comprising a flexible material loaded with magnetic nanomaterials (for example Fe, FexOy, permanent magnet, ...) or dielectrics (for example LInB03, SiO2, ..), or metallic (for example Carbon nanotube, graphene, ..).
- magnetic nanomaterials for example Fe, FexOy, permanent magnet, ...) or dielectrics (for example LInB03, SiO2, ..), or metallic (for example Carbon nanotube, graphene, ..).
- metallic for example Carbon nanotube, graphene, ..
- Such a device intended for implementing the method according to the invention may comprise:
- a fixed first part 1 made of a rigid material such as silicon for example, having a recess 10 passing through its entire height;
- a second part comprising a membrane 2, in particular of flexible elastomer, of the PolyDiMethylSiloxane (PDMS) or Silastic S type for example, bonded to the first part 1, in particular in a fluid-tight manner, on its periphery and covering the recess;
- PDMS PolyDiMethylSiloxane
- Silastic S type for example, bonded to the first part 1, in particular in a fluid-tight manner, on its periphery and covering the recess;
- any flexible elastomer known to those skilled in the art may be suitable for producing the membrane 2;
- At least one hole 20 of the membrane at the level of the mobile part of the membrane adapted, during the movements of the back and forth of the membrane to circulate a fluid through the membrane 2, and, preferably, adapted to prohibit the flow of fluid when the movable portion 31 is at rest.
- Such a device allows the generation of a flow through the membrane by deforming the membrane 2 so as to actuate said at least one hole 20 in a deformation mode, to cause openings of said at least one hole 20 during the movements .
- the device comprises a third portion 3 of rigid material, such as silicon for example, bonded to one of the faces of the movable portion of the membrane 2, said third portion 3 being disposed in the center of the obviously 10.
- the third portion is of smaller size than the recess 10 so as to form an inter-space 30 between said first portion and said third portion 3, and so as to form a movable portion comprising the movable portion of the diaphragm 2 and the third part 3 in a particular configuration in the center of the recess 10.
- the means 4 generating movement are able to cooperate with said third part 3 so as to actuate the movable part and the hole or holes 20 of the membrane 2 at inter-space.
- the operating mode of the device can be dual, that is to say that the membrane 2 is suitable, during the movements of back and forth of the movable portion 31, to circulate a fluid in both directions, the device for both a suction that a discharge of the fluid.
- a modification of the device is not necessary here to change the direction of circulation of the fluid.
- said at least one hole 20 must allow a flow of fluid through the membrane, in a first direction, from one side to the other of the membrane, and in a second opposite direction.
- the device is able to circulate a fluid through the membrane 2 during the movements of the mobile part, and preferably able to prohibit the circulation of the fluid when the mobile part is at rest.
- said at least one hole 20 can extend halfway between the edge of the first part 1 and the edge of the third part 3.
- said at least one hole 20 is disposed at the corners of said third portion 3.
- the position of the hole or holes 20 can be modified as needed.
- the structure of the device is defined by the length and the width of the fixed part 1, which may, by way of nonlimiting example, vary between 2 mm and 20 mm, as well as the length and the width of the flexible membrane 2 , which can vary between 2 mm and 20 mm also.
- the structure of the device is also defined by the length and the width of the third part 3, which can vary between 500 ⁇ and 10,000 ⁇ , and by the length and the width of the recess 10, which can vary between 500 ⁇ and 10,000 ⁇ .
- the thickness of the fixed part 1 varies between 100 ⁇ and 10,000 ⁇ , that of the flexible elastomeric membrane 10, varies between 10 ⁇ and 200 ⁇ , and that of the third part 3, varies between 0 and 10,000 ⁇ .
- the width of said at least one hole 20 is between 1 ⁇ and 500 ⁇ and the length of said at least one hole is between 1 ⁇ and 2000 ⁇ .
- the choice of the width of the recess 10, the third part 3, as well as the thickness of the membrane 2 results from a compromise between the flexibility of the desired membrane 2 and its robustness during actuation. .
- a membrane 2 little wide and thick will be more resistant but will not allow to obtain a displacement 2.
- a thin and wide membrane 2 will be flexible but not very resistant to tensile and torsional forces applied to the membrane 2.
- the length and width of said hole 20 are determining factors for the performance of the device, in particular for the flow rate and the pressures generated. For example, a hole 20 of large size, for example 500 ⁇ wide and 2000 ⁇ in length, will achieve high flow rates.
- the third part 3 is advantageously arranged at the recess 10 of the fixed part 1, and is disposed between the openings 20 of the membrane 2, thus forming the mobile part 31.
- Such an arrangement makes it possible, during reciprocating movements, to deform the membrane 2, in particular at the level of the hole or holes 20, so as to circulate a fluid through the membrane 2.
- the recess 10 of said first part 1 may be circular, said third part 3 adopting for example a circular shape so as to form a circular interspace 30.
- the rectangular inter-space wedges are rounded in order to limit the stresses involved by angular wedges during the oscillation of the membrane 2. In fact, while maintaining a right angle, the membrane 2 is exposed. at risk of tearing at said corners.
- the excitation signal of the membrane 2 is varied via control means acting on the means 4 generating reciprocating movements, so as to change the flow direction of the fluid.
- the flow direction of the fluid is changed by varying the excitation frequency of the membrane.
- a suction / displacement change has been measured, as a non-limiting example around 225-275 Hz.
- the main mode of vibration observed is a so-called torsion mode, a so-called bending mode being noted at the other frequencies.
- the position of the hole or holes 20 influences the performance of the device. Indeed, when the holes 20 are arranged at corner level, the mode of torsion is predominant around 225-275 Hz, the device then operating in discharge. Conversely, outside this frequency range, the device operates in suction.
- the inventor has found that in the case of holes 20 disposed midway between the edge of the first part 1 and the edge of the third part 3, the suction performance is better. Indeed, the bending mode allows greater clearance and better opening of the holes 20 disposed midway between the edge of the first part 1 and the edge of the third part 3.
- the inventor has also noted two peaks of resonances located around 100 Hz and 175/200 Hz, the resonant peaks causing a greater deflection of the membrane 2 and therefore an increase in flow. According to one embodiment, it is possible to excite the membrane 2 at its resonant frequency or frequencies.
- the oscillation generating means 4 comprise electromagnetic means which are excited by an AC signal and on which an offset is applied to the voltage in such a way as to change the mode. operating the device, that is to say change the direction of flow of the fluid.
- an offset of 125 mV on a voltage of 500 mV peak to peak will shift the origin of zeros in voltage at 125 mV.
- the signal delivered to the electromagnetic means before amplification will oscillate between -125 mV and 375 mV.
- Such an offset has the effect of changing the origin of the vibration of the membrane 2, the movable part 31 more precisely.
- the means for generating reciprocating motions 4 comprise electromagnetic means such as a magnet pair 40 associated with a coil 41.
- the magnet 40 can be integral with the third part. and the coil is secured to a separate support, for example in rigid connection with the first part 1.
- Other means known to those skilled in the art can also be envisaged, such as piezoelectric or electrostatic means.
- the device is placed in a packaging 7 in the form of a housing receiving the device, so as to make it waterproof.
- the packaging 7 comprises respectively a housing for the device as well as for the magnet, orifices 70 able to receive a nut screw system or any other type of mechanical holding to hold the packaging 7 to a support, as well as an inlet 71 and an outlet 72 for the passage of the fluid to be circulated.
- the coil 41 is provided inside the path of the fluid between the inlet 71 and the outlet 72 of the device. Alternatively, it is understood that the coil 41 may be located outside so that it is not exposed to the fluid, which may be important for certain applications.
- the invention also relates to a method for manufacturing a device, according to the invention, for the generation of fluid flow comprising the following steps:
- a resin layer 104 is deposited by coating on the front face of a silicon wafer 100;
- photolithography and anisotropic DRIE etching are carried out to define one or more protruding patterns on the silicon wafer, of corresponding dimensions of said at least one hole 20, for creating said at least one hole 20;
- a spin coating of the elastomer 101 of the membrane 2 is carried out according to the desired thickness
- a layer of SiO 2 is applied between the front face of the silicon wafer and the elastomer layer to improve the adhesion between the two parts.
- the material used for the membrane may be an elastomer such as for example SILASTIC® or HV 1540 / 20P® from Dow Corning.
- FIG. 6 A bench made to test the device according to the invention is illustrated schematically in FIG. 6.
- This bench forms two containers R1, R2, separated by a partition on which is fixed the device according to the invention, through an opening of partition.
- the seal between the device and the partition is provided by an O-ring 50.
- the movement generating means are electromagnetic and comprise a magnet pair 40 and coil 41.
- the membrane 2 separates the respective volumes of the two containers R1, R2. According to the tests carried out, the volumes of the two containers R1, R2 are filled with a liquid (i.e. water), and so that the device and its membrane 2 are totally immersed.
- a liquid i.e. water
- the reciprocating motion generator is controlled to deform the hole of the membrane according to a mode of deformation of the hole, for example by exciting the magnet / coil torque at a given frequency (with or without voltage offset) .
- the net flow rates obtained during the tests were between 10 and 10,000 ⁇ / ⁇ with water. However higher flows can be envisaged, reasonably at least up to 900mL / min optimizing the size and the number of openings in particular.
- this perforated membrane / support assembly can be simply removed from the body of the device, and discarded. In a new use it is replaced by a new non-used set: this component of the disposable device does not need to be cleaned and / or sterilized before proceeding to a new use of the device.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Infusion, Injection, And Reservoir Apparatuses (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1360387A FR3012443B1 (fr) | 2013-10-24 | 2013-10-24 | Procede pour generer un ecoulement de fluide |
PCT/FR2014/052712 WO2015059426A1 (fr) | 2013-10-24 | 2014-10-24 | Procede pour generer un ecoulement de fluide |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3060803A1 true EP3060803A1 (fr) | 2016-08-31 |
EP3060803B1 EP3060803B1 (fr) | 2020-08-26 |
Family
ID=50289772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP14824891.7A Active EP3060803B1 (fr) | 2013-10-24 | 2014-10-24 | Procede pour generer un ecoulement de fluide |
Country Status (8)
Country | Link |
---|---|
US (1) | US10519945B2 (fr) |
EP (1) | EP3060803B1 (fr) |
JP (1) | JP2016534284A (fr) |
CA (1) | CA2927425C (fr) |
DK (1) | DK3060803T3 (fr) |
ES (1) | ES2818932T3 (fr) |
FR (1) | FR3012443B1 (fr) |
WO (1) | WO2015059426A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2606743B (en) * | 2021-05-19 | 2023-12-27 | Lee Ventus Ltd | Microfluidic pump control |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5938117A (en) * | 1991-04-24 | 1999-08-17 | Aerogen, Inc. | Methods and apparatus for dispensing liquids as an atomized spray |
DE4332720C2 (de) | 1993-09-25 | 1997-02-13 | Karlsruhe Forschzent | Mikromembranpumpe |
GB0112784D0 (en) * | 2001-05-25 | 2001-07-18 | The Technology Partnership Plc | Pump |
WO2006113341A2 (fr) * | 2005-04-13 | 2006-10-26 | Par Technologies, Llc. | Membrane piezo-electrique a orifice(s) |
CN101542122B (zh) * | 2006-12-09 | 2011-05-04 | 株式会社村田制作所 | 压电微型鼓风机 |
WO2008111397A1 (fr) * | 2007-03-12 | 2008-09-18 | Murata Manufacturing Co., Ltd. | Dispositif de transport de liquide |
DE102008004147A1 (de) * | 2008-01-14 | 2009-07-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikropumpe und Verfahren zum Pumpen eines Fluids |
JP5287854B2 (ja) * | 2008-05-30 | 2013-09-11 | 株式会社村田製作所 | 圧電マイクロブロア |
-
2013
- 2013-10-24 FR FR1360387A patent/FR3012443B1/fr not_active Expired - Fee Related
-
2014
- 2014-10-24 ES ES14824891T patent/ES2818932T3/es active Active
- 2014-10-24 EP EP14824891.7A patent/EP3060803B1/fr active Active
- 2014-10-24 US US15/031,397 patent/US10519945B2/en active Active
- 2014-10-24 DK DK14824891.7T patent/DK3060803T3/da active
- 2014-10-24 CA CA2927425A patent/CA2927425C/fr active Active
- 2014-10-24 JP JP2016549645A patent/JP2016534284A/ja active Pending
- 2014-10-24 WO PCT/FR2014/052712 patent/WO2015059426A1/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
FR3012443A1 (fr) | 2015-05-01 |
JP2016534284A (ja) | 2016-11-04 |
DK3060803T3 (da) | 2020-09-28 |
US10519945B2 (en) | 2019-12-31 |
ES2818932T3 (es) | 2021-04-14 |
CA2927425A1 (fr) | 2015-04-30 |
FR3012443B1 (fr) | 2021-04-30 |
CA2927425C (fr) | 2023-06-27 |
WO2015059426A1 (fr) | 2015-04-30 |
US20160258430A1 (en) | 2016-09-08 |
EP3060803B1 (fr) | 2020-08-26 |
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