EP2996154A3 - Non-planar germanium quantum well devices - Google Patents
Non-planar germanium quantum well devices Download PDFInfo
- Publication number
- EP2996154A3 EP2996154A3 EP15172297.2A EP15172297A EP2996154A3 EP 2996154 A3 EP2996154 A3 EP 2996154A3 EP 15172297 A EP15172297 A EP 15172297A EP 2996154 A3 EP2996154 A3 EP 2996154A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- germanium
- quantum well
- fin structure
- barrier
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052732 germanium Inorganic materials 0.000 title abstract 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 title abstract 6
- 230000004888 barrier function Effects 0.000 abstract 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 abstract 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/775—Field effect transistors with one dimensional charge carrier gas channel, e.g. quantum wire FET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
- H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1054—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a variation of the composition, e.g. channel with strained layer for increasing the mobility
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/122—Single quantum well structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/15—Structures with periodic or quasi periodic potential variation, e.g. multiple quantum wells, superlattices
- H01L29/151—Compositional structures
- H01L29/152—Compositional structures with quantum effects only in vertical direction, i.e. layered structures with quantum effects solely resulting from vertical potential variation
- H01L29/155—Comprising only semiconductor materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/26—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys
- H01L29/267—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys in different semiconductor regions, e.g. heterojunctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66431—Unipolar field-effect transistors with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66439—Unipolar field-effect transistors with a one- or zero-dimensional channel, e.g. quantum wire FET, in-plane gate transistor [IPG], single electron transistor [SET], striped channel transistor, Coulomb blockade transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66977—Quantum effect devices, e.g. using quantum reflection, diffraction or interference effects, i.e. Bragg- or Aharonov-Bohm effects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7849—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being provided under the channel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
- H01L29/7851—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET with the body tied to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/161—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System including two or more of the elements provided for in group H01L29/16, e.g. alloys
- H01L29/165—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System including two or more of the elements provided for in group H01L29/16, e.g. alloys in different semiconductor regions, e.g. heterojunctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
Abstract
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/646,477 US8283653B2 (en) | 2009-12-23 | 2009-12-23 | Non-planar germanium quantum well devices |
PCT/US2010/057276 WO2011087570A1 (en) | 2009-12-23 | 2010-11-18 | Non-planar germanium quantum well devices |
EP10843413.5A EP2517256B1 (en) | 2009-12-23 | 2010-11-18 | Non-planar germanium quantum well devices and methods of manufacturing the same |
Related Parent Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10843413.5A Division EP2517256B1 (en) | 2009-12-23 | 2010-11-18 | Non-planar germanium quantum well devices and methods of manufacturing the same |
EP10843413.5A Division-Into EP2517256B1 (en) | 2009-12-23 | 2010-11-18 | Non-planar germanium quantum well devices and methods of manufacturing the same |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2996154A2 EP2996154A2 (en) | 2016-03-16 |
EP2996154A3 true EP2996154A3 (en) | 2016-04-20 |
EP2996154B1 EP2996154B1 (en) | 2021-04-21 |
Family
ID=44149785
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10843413.5A Active EP2517256B1 (en) | 2009-12-23 | 2010-11-18 | Non-planar germanium quantum well devices and methods of manufacturing the same |
EP15172297.2A Active EP2996154B1 (en) | 2009-12-23 | 2010-11-18 | Non-planar germanium quantum well devices |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10843413.5A Active EP2517256B1 (en) | 2009-12-23 | 2010-11-18 | Non-planar germanium quantum well devices and methods of manufacturing the same |
Country Status (7)
Country | Link |
---|---|
US (6) | US8283653B2 (en) |
EP (2) | EP2517256B1 (en) |
JP (3) | JP2013513250A (en) |
KR (1) | KR101378661B1 (en) |
CN (3) | CN102656699B (en) |
HK (1) | HK1175589A1 (en) |
WO (1) | WO2011087570A1 (en) |
Families Citing this family (147)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101853882B (en) | 2009-04-01 | 2016-03-23 | 台湾积体电路制造股份有限公司 | There is the high-mobility multiple-gate transistor of the switch current ratio of improvement |
US9768305B2 (en) | 2009-05-29 | 2017-09-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Gradient ternary or quaternary multiple-gate transistor |
US8617976B2 (en) | 2009-06-01 | 2013-12-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Source/drain re-growth for manufacturing III-V based transistors |
US8283653B2 (en) | 2009-12-23 | 2012-10-09 | Intel Corporation | Non-planar germanium quantum well devices |
US8575653B2 (en) | 2010-09-24 | 2013-11-05 | Intel Corporation | Non-planar quantum well device having interfacial layer and method of forming same |
CN102468303B (en) * | 2010-11-10 | 2015-05-13 | 中国科学院微电子研究所 | Semiconductor memory cell, device and preparation method thereof |
JP2012182369A (en) * | 2011-03-02 | 2012-09-20 | Toshiba Corp | Semiconductor storage device |
CN102956498B (en) * | 2011-08-31 | 2015-09-09 | 中国科学院微电子研究所 | Semiconductor device and manufacture method thereof |
US8728881B2 (en) * | 2011-08-31 | 2014-05-20 | Institute of Microelectronics, Chinese Academy of Sciences | Semiconductor device and method for manufacturing the same |
CN103000664B (en) * | 2011-09-08 | 2015-12-16 | 中国科学院微电子研究所 | Semiconductor device and manufacture method thereof |
US8674449B2 (en) * | 2011-09-08 | 2014-03-18 | Institute of Microelectronics, Chinese Academy of Sciences | Semiconductor device and method for manufacturing the same |
US9397104B2 (en) | 2011-09-21 | 2016-07-19 | Institute of Microelectronics, Chinese Academy of Sciences | SRAM cell and method for manufacturing the same |
CN103022038B (en) * | 2011-09-21 | 2015-06-10 | 中国科学院微电子研究所 | Static random access memory (SRAM) unit and manufacturing method thereof |
CN103022100B (en) * | 2011-09-27 | 2015-09-02 | 中芯国际集成电路制造(上海)有限公司 | Structure of fin field effect pipe and forming method thereof |
US9099388B2 (en) * | 2011-10-21 | 2015-08-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | III-V multi-channel FinFETs |
KR101805634B1 (en) * | 2011-11-15 | 2017-12-08 | 삼성전자 주식회사 | Semiconductor device comprising III-V group barrier and method of manufacturing the same |
US9397166B2 (en) | 2011-12-20 | 2016-07-19 | Intel Corporation | Strained channel region transistors employing source and drain stressors and systems including the same |
US8928086B2 (en) | 2013-01-09 | 2015-01-06 | International Business Machines Corporation | Strained finFET with an electrically isolated channel |
US8994002B2 (en) * | 2012-03-16 | 2015-03-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFET having superlattice stressor |
US9735239B2 (en) * | 2012-04-11 | 2017-08-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device channel system and method |
CN103377898B (en) * | 2012-04-24 | 2015-12-16 | 中芯国际集成电路制造(上海)有限公司 | The formation method of semiconductor device, the formation method of fin field effect pipe |
US20130328135A1 (en) * | 2012-06-12 | 2013-12-12 | International Business Machines Corporation | Preventing fully silicided formation in high-k metal gate processing |
US9748338B2 (en) * | 2012-06-29 | 2017-08-29 | Intel Corporation | Preventing isolation leakage in III-V devices |
US8629420B1 (en) * | 2012-07-03 | 2014-01-14 | Intel Mobile Communications GmbH | Drain extended MOS device for bulk FinFET technology |
US8847281B2 (en) * | 2012-07-27 | 2014-09-30 | Intel Corporation | High mobility strained channels for fin-based transistors |
CN103594512B (en) * | 2012-08-16 | 2017-09-05 | 中国科学院微电子研究所 | Semiconductor devices and its manufacture method |
EP2701198A3 (en) * | 2012-08-24 | 2017-06-28 | Imec | Device with strained layer for quantum well confinement and method for manufacturing thereof |
CN103811341B (en) | 2012-11-09 | 2016-05-11 | 中国科学院微电子研究所 | Semiconductor devices and manufacture method thereof |
CN103811339B (en) | 2012-11-09 | 2016-12-21 | 中国科学院微电子研究所 | Semiconductor device and manufacture method thereof |
US8823102B2 (en) * | 2012-11-16 | 2014-09-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Device with a strained Fin |
CN103855015B (en) * | 2012-11-30 | 2020-03-06 | 中国科学院微电子研究所 | FinFET and manufacturing method thereof |
GB2544190B (en) * | 2012-12-17 | 2017-10-18 | Intel Corp | Semicoductor devices with germanium-rich active layers & doped transition layers |
US8748940B1 (en) | 2012-12-17 | 2014-06-10 | Intel Corporation | Semiconductor devices with germanium-rich active layers and doped transition layers |
CN103915336B (en) * | 2013-01-08 | 2016-05-25 | 中芯国际集成电路制造(上海)有限公司 | Three-dimensional quantum well transistor and forming method thereof |
US8901607B2 (en) | 2013-01-14 | 2014-12-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and fabricating the same |
US9136343B2 (en) | 2013-01-24 | 2015-09-15 | Intel Corporation | Deep gate-all-around semiconductor device having germanium or group III-V active layer |
US9362386B2 (en) * | 2013-02-27 | 2016-06-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | FETs and methods for forming the same |
US9087902B2 (en) * | 2013-02-27 | 2015-07-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFETs with strained well regions |
US9385234B2 (en) | 2013-02-27 | 2016-07-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFETs with strained well regions |
US9159824B2 (en) | 2013-02-27 | 2015-10-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFETs with strained well regions |
US9209066B2 (en) * | 2013-03-01 | 2015-12-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Isolation structure of semiconductor device |
US9412871B2 (en) * | 2013-03-08 | 2016-08-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFET with channel backside passivation layer device and method |
US9214555B2 (en) * | 2013-03-12 | 2015-12-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Barrier layer for FinFET channels |
US9385198B2 (en) | 2013-03-12 | 2016-07-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Heterostructures for semiconductor devices and methods of forming the same |
TWI644433B (en) * | 2013-03-13 | 2018-12-11 | 半導體能源研究所股份有限公司 | Semiconductor device |
KR102042476B1 (en) | 2013-03-14 | 2019-11-08 | 인텔 코포레이션 | Leakage reduction structures for nanowire transistors |
TWI620324B (en) * | 2013-04-12 | 2018-04-01 | 半導體能源研究所股份有限公司 | Semiconductor device |
CN103236402B (en) | 2013-04-27 | 2016-02-03 | 京东方科技集团股份有限公司 | Thin-film transistor and preparation method thereof, array base palte and display unit |
US9236444B2 (en) * | 2013-05-03 | 2016-01-12 | Samsung Electronics Co., Ltd. | Methods of fabricating quantum well field effect transistors having multiple delta doped layers |
CN104218082B (en) | 2013-06-04 | 2017-08-25 | 中芯国际集成电路制造(上海)有限公司 | High mobility fin FET and its manufacture method |
US9178043B2 (en) | 2013-06-21 | 2015-11-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Non-planar transistors with replacement fins and methods of forming the same |
CN104253044B (en) * | 2013-06-26 | 2017-03-29 | 中芯国际集成电路制造(上海)有限公司 | Transistor and forming method thereof |
GB2530195B (en) * | 2013-06-28 | 2018-12-12 | Intel Corp | Selective epitaxially grown III-V materials based devices |
CN104282562A (en) * | 2013-07-03 | 2015-01-14 | 中芯国际集成电路制造(上海)有限公司 | Fin field effect transistor and forming method thereof |
CN104347408B (en) * | 2013-07-31 | 2017-12-26 | 中芯国际集成电路制造(上海)有限公司 | Semiconductor device and its manufacture method |
CN104347407B (en) * | 2013-07-31 | 2017-10-31 | 中芯国际集成电路制造(上海)有限公司 | Semiconductor device and its manufacture method |
EP3748684B1 (en) * | 2013-09-27 | 2022-06-08 | INTEL Corporation | Semiconductor device having group iii-v material active region and graded gate dielectric |
US9178045B2 (en) * | 2013-09-27 | 2015-11-03 | Samsung Electronics Co., Ltd. | Integrated circuit devices including FinFETS and methods of forming the same |
WO2015047354A1 (en) * | 2013-09-27 | 2015-04-02 | Intel Corporation | Improved cladding layer epitaxy via template engineering for heterogeneous integration on silicon |
US9583590B2 (en) | 2013-09-27 | 2017-02-28 | Samsung Electronics Co., Ltd. | Integrated circuit devices including FinFETs and methods of forming the same |
US20160190319A1 (en) * | 2013-09-27 | 2016-06-30 | Intel Corporation | Non-Planar Semiconductor Devices having Multi-Layered Compliant Substrates |
US9425042B2 (en) | 2013-10-10 | 2016-08-23 | Taiwan Semiconductor Manufacturing Company Limited | Hybrid silicon germanium substrate for device fabrication |
US9437497B2 (en) * | 2013-10-18 | 2016-09-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of making a FinFET device |
DE102014220672A1 (en) | 2013-10-22 | 2015-05-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9425257B2 (en) | 2013-11-20 | 2016-08-23 | Taiwan Semiconductor Manufacturing Company Limited | Non-planar SiGe channel PFET |
US9716176B2 (en) * | 2013-11-26 | 2017-07-25 | Samsung Electronics Co., Ltd. | FinFET semiconductor devices including recessed source-drain regions on a bottom semiconductor layer and methods of fabricating the same |
KR101515071B1 (en) * | 2013-11-29 | 2015-04-24 | 가천대학교 산학협력단 | Silicon-compatible germanium-based transistor with high-hole-mobility |
US9373706B2 (en) | 2014-01-24 | 2016-06-21 | Samsung Electronics Co., Ltd. | Methods of forming semiconductor devices, including forming a semiconductor material on a fin, and related semiconductor devices |
US9236397B2 (en) * | 2014-02-04 | 2016-01-12 | Globalfoundries Inc. | FinFET device containing a composite spacer structure |
US9236483B2 (en) * | 2014-02-12 | 2016-01-12 | Qualcomm Incorporated | FinFET with backgate, without punchthrough, and with reduced fin height variation |
US9214513B2 (en) * | 2014-02-13 | 2015-12-15 | Taiwan Semiconductor Manufacturing Company Limited | Fin structure and method for forming the same |
US10553718B2 (en) * | 2014-03-14 | 2020-02-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor devices with core-shell structures |
SG11201606451QA (en) | 2014-03-28 | 2016-09-29 | Intel Corp | Selective epitaxially grown iii-v materials based devices |
US10468528B2 (en) | 2014-04-16 | 2019-11-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFET device with high-k metal gate stack |
KR102190477B1 (en) * | 2014-04-25 | 2020-12-14 | 삼성전자주식회사 | Semiconductor device and method for fabricating the same |
US9379218B2 (en) | 2014-04-25 | 2016-06-28 | International Business Machines Corporation | Fin formation in fin field effect transistors |
US9178067B1 (en) * | 2014-04-25 | 2015-11-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for FinFET device |
US9721955B2 (en) | 2014-04-25 | 2017-08-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for SRAM FinFET device having an oxide feature |
CN105185712B (en) * | 2014-05-02 | 2020-09-08 | 三星电子株式会社 | Integrated circuit devices including fin field effect transistors and methods of forming the same |
US9263586B2 (en) * | 2014-06-06 | 2016-02-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Quantum well fin-like field effect transistor (QWFinFET) having a two-section combo QW structure |
US9224736B1 (en) | 2014-06-27 | 2015-12-29 | Taiwan Semicondcutor Manufacturing Company, Ltd. | Structure and method for SRAM FinFET device |
EP2978016B1 (en) | 2014-07-25 | 2018-06-13 | IMEC vzw | A method for providing an nMOS device and a pMOS device on a silicon substrate and silicon substrate comprising an nMOS device and a pMOS device |
CN105448917B (en) * | 2014-09-01 | 2019-03-29 | 中芯国际集成电路制造(上海)有限公司 | Semiconductor structure and forming method thereof |
US10559683B2 (en) | 2014-09-19 | 2020-02-11 | Intel Corporation | Apparatus and methods to create a buffer to reduce leakage in microelectronic transistors |
CN106575672B (en) | 2014-09-19 | 2020-11-10 | 英特尔公司 | Apparatus and method for creating an indium gallium arsenide active channel with an indium rich surface |
EP3195368A4 (en) * | 2014-09-19 | 2018-05-16 | Intel Corporation | Apparatus and methods to create a doped sub-structure to reduce leakage in microelectronic transistors |
US9299618B1 (en) | 2014-09-24 | 2016-03-29 | International Business Machines Corporation | Structure and method for advanced bulk fin isolation |
US9331073B2 (en) | 2014-09-26 | 2016-05-03 | International Business Machines Corporation | Epitaxially grown quantum well finFETs for enhanced pFET performance |
KR102255174B1 (en) | 2014-10-10 | 2021-05-24 | 삼성전자주식회사 | Semiconductor device having active region and method of forming the same |
US9240454B1 (en) * | 2014-10-22 | 2016-01-19 | Stmicroelectronics, Inc. | Integrated circuit including a liner silicide with low contact resistance |
US9741811B2 (en) | 2014-12-15 | 2017-08-22 | Samsung Electronics Co., Ltd. | Integrated circuit devices including source/drain extension regions and methods of forming the same |
US9929242B2 (en) | 2015-01-12 | 2018-03-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9502567B2 (en) | 2015-02-13 | 2016-11-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor fin structure with extending gate structure |
KR102257423B1 (en) * | 2015-01-23 | 2021-05-31 | 삼성전자주식회사 | Semiconductor substrate and semiconductor device including the same |
US9847333B2 (en) * | 2015-03-09 | 2017-12-19 | Globalfoundries Inc. | Reducing risk of punch-through in FinFET semiconductor structure |
US10833175B2 (en) * | 2015-06-04 | 2020-11-10 | International Business Machines Corporation | Formation of dislocation-free SiGe finFET using porous silicon |
KR102475832B1 (en) * | 2015-06-16 | 2022-12-09 | 인텔 코포레이션 | Transistor with subfin layer |
EP3317900B1 (en) * | 2015-06-27 | 2023-06-21 | INTEL Corporation | Ge nano wire transistor with gaas as the sacrificial layer |
EP3314636A4 (en) * | 2015-06-27 | 2019-02-27 | Intel Corporation | Offstate parasitic leakage reduction for tunneling field effect transistors |
US9953881B2 (en) | 2015-07-20 | 2018-04-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of forming a FinFET device |
EP3125273A1 (en) | 2015-07-31 | 2017-02-01 | IMEC vzw | Strained group iv channels |
US9954083B2 (en) * | 2015-08-20 | 2018-04-24 | International Business Machines Corporation | Semiconductor structures having increased channel strain using fin release in gate regions |
CN106486377B (en) * | 2015-09-01 | 2019-11-29 | 中芯国际集成电路制造(上海)有限公司 | Fin type semiconductor devices and its manufacturing method |
KR102323943B1 (en) | 2015-10-21 | 2021-11-08 | 삼성전자주식회사 | Method of manufacturing semiconductor device |
CN106611787A (en) * | 2015-10-26 | 2017-05-03 | 联华电子股份有限公司 | A semiconductor structure and a manufacturing method thereof |
CN106611780A (en) * | 2015-10-27 | 2017-05-03 | 上海新昇半导体科技有限公司 | Quantum well device and forming method thereof |
US9773871B2 (en) * | 2015-11-16 | 2017-09-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fin field effect transistor and method for fabricating the same |
US9941363B2 (en) | 2015-12-18 | 2018-04-10 | International Business Machines Corporation | III-V transistor device with self-aligned doped bottom barrier |
US20170179232A1 (en) * | 2015-12-18 | 2017-06-22 | International Business Machines Corporation | Iii-v transistor device with doped bottom barrier |
US9502420B1 (en) * | 2015-12-19 | 2016-11-22 | International Business Machines Corporation | Structure and method for highly strained germanium channel fins for high mobility pFINFETs |
WO2017111954A1 (en) * | 2015-12-22 | 2017-06-29 | Intel Corporation | FIN-BASED III-V/SI or GE CMOS SAGE INTEGRATION |
WO2017213641A1 (en) * | 2016-06-08 | 2017-12-14 | Intel Corporation | Interconnects for quantum dot devices |
WO2017213639A1 (en) * | 2016-06-08 | 2017-12-14 | Intel Corporation | Quantum dot devices |
US10734482B2 (en) | 2016-06-08 | 2020-08-04 | Intel Corporation | Quantum dot devices |
WO2017213638A1 (en) * | 2016-06-08 | 2017-12-14 | Intel Corporation | Quantum dot devices with doped regions |
US10756202B2 (en) | 2016-06-08 | 2020-08-25 | Intel Corporation | Quantum dot device packages |
WO2017213637A1 (en) * | 2016-06-08 | 2017-12-14 | Intel Corporation | Quantum dot devices with patterned gates |
US11387399B2 (en) | 2016-06-09 | 2022-07-12 | Intel Corporation | Quantum dot devices with back gates |
WO2017213651A1 (en) * | 2016-06-09 | 2017-12-14 | Intel Corporation | Quantum dot devices with top gates |
WO2017213646A1 (en) * | 2016-06-09 | 2017-12-14 | Intel Corporation | Quantum dot devices with modulation doped stacks |
US11158714B2 (en) | 2016-06-09 | 2021-10-26 | Intel Corporation | Quantum dot devices with trenched substrates |
WO2017213660A1 (en) * | 2016-06-10 | 2017-12-14 | Intel Corporation | Gate patterning for quantum dot devices |
WO2017213661A1 (en) * | 2016-06-10 | 2017-12-14 | Intel Corporation | Quantum dot devices with magnet lines |
WO2017213659A1 (en) * | 2016-06-10 | 2017-12-14 | Intel Corporation | Quantum dot devices with gate interface materials |
US10978582B2 (en) | 2016-06-10 | 2021-04-13 | Intel Corporation | Gate patterning for quantum dot devices |
WO2018004571A1 (en) * | 2016-06-29 | 2018-01-04 | Intel Corporation | Wide bandgap group iv subfin to reduce leakage |
WO2018044268A1 (en) * | 2016-08-30 | 2018-03-08 | Intel Corporation | Quantum dot devices |
CN109791945B (en) | 2016-09-24 | 2022-11-08 | 英特尔公司 | Quantum dot array device with shared gate |
US10615160B2 (en) | 2016-09-25 | 2020-04-07 | Intel Corporation | Quantum dot array devices |
WO2018057023A1 (en) * | 2016-09-25 | 2018-03-29 | Intel Corporation | Quantum dot qubits with iii-v compounds |
US11288586B2 (en) * | 2016-09-27 | 2022-03-29 | Intel Corporation | Independent double-gate quantum dot qubits |
WO2018063270A1 (en) * | 2016-09-30 | 2018-04-05 | Intel Corporation | Quantum dot devices with single electron transistor detectors |
US10062782B2 (en) | 2016-11-29 | 2018-08-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of manufacturing a semiconductor device with multilayered channel structure |
DE112016007542T5 (en) | 2016-12-23 | 2019-09-12 | Intel Corporation | Advanced lithography and self-organizing devices |
US9947767B1 (en) * | 2017-01-26 | 2018-04-17 | International Business Machines Corporation | Self-limited inner spacer formation for gate-all-around field effect transistors |
US11482457B2 (en) * | 2017-09-22 | 2022-10-25 | Intel Corporation | Substrate defect blocking layers for strained channel semiconductor devices |
WO2019125348A1 (en) * | 2017-12-18 | 2019-06-27 | Intel Corporation | Quantum dot devices with vertical quantum dot arrays |
WO2019135770A1 (en) * | 2018-01-08 | 2019-07-11 | Intel Corporation | Quantum dot devices with ordered crystalline materials |
US11616126B2 (en) | 2018-09-27 | 2023-03-28 | Intel Corporation | Quantum dot devices with passive barrier elements in a quantum well stack between metal gates |
US11450765B2 (en) | 2018-09-27 | 2022-09-20 | Intel Corporation | Quantum dot devices with diodes for electrostatic discharge protection |
US20200251582A1 (en) * | 2019-02-04 | 2020-08-06 | Qualcomm Incorporated | High electron mobility transistor (hemt) fin field-effect transistor (finfet) |
US11373870B2 (en) * | 2019-06-27 | 2022-06-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for manufacturing semiconductor device including performing thermal treatment on germanium layer |
CN110364595B (en) * | 2019-07-22 | 2022-04-22 | 宁波安芯美半导体有限公司 | Light emitting diode epitaxial structure and preparation method thereof |
US11417764B2 (en) * | 2020-01-29 | 2022-08-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Interface profile control in epitaxial structures for semiconductor devices |
US11133388B1 (en) * | 2020-07-23 | 2021-09-28 | Wisconsin Alumni Research Foundation | Silicon-germanium heterostructures with quantum wells having oscillatory germanium concentration profiles for increased valley splitting |
US11569353B2 (en) | 2021-02-02 | 2023-01-31 | Micron Technology, Inc. | Apparatuses including passing word lines comprising a band offset material, and related methods and systems |
WO2023141993A1 (en) * | 2022-01-28 | 2023-08-03 | 中国科学院半导体研究所 | Enhancement method for hole linear rashba spin-orbit coupling effect |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080237573A1 (en) * | 2007-03-29 | 2008-10-02 | Been-Yih Jin | Mechanism for forming a remote delta doping layer of a quantum well structure |
Family Cites Families (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH031469A (en) | 1989-05-29 | 1991-01-08 | Mitsubishi Electric Corp | Connecting method for superconductive wire and compound superconductive wire |
JP3135939B2 (en) | 1991-06-20 | 2001-02-19 | 富士通株式会社 | HEMT type semiconductor device |
JPH07142686A (en) * | 1993-06-25 | 1995-06-02 | Motorola Inc | Formation method for ohmic contact of complementary semiconductor device |
US5444016A (en) | 1993-06-25 | 1995-08-22 | Abrokwah; Jonathan K. | Method of making ohmic contacts to a complementary III-V semiconductor device |
JP3262747B2 (en) * | 1996-09-17 | 2002-03-04 | 松下電器産業株式会社 | Semiconductor device and manufacturing method thereof |
JPH1092952A (en) * | 1996-09-18 | 1998-04-10 | Toshiba Corp | Semiconductor storage device |
US6723621B1 (en) * | 1997-06-30 | 2004-04-20 | International Business Machines Corporation | Abrupt delta-like doping in Si and SiGe films by UHV-CVD |
JP2000031469A (en) * | 1998-07-14 | 2000-01-28 | Hitachi Ltd | Semiconductor device and production method thereof |
DE60038793D1 (en) * | 1999-03-12 | 2008-06-19 | Ibm | FOR FIELD EFFECTS |
US7145167B1 (en) * | 2000-03-11 | 2006-12-05 | International Business Machines Corporation | High speed Ge channel heterostructures for field effect devices |
US6500510B1 (en) * | 1999-11-04 | 2002-12-31 | Molecular Storage Technologies, Inc. | Molecular level optical information storage devices |
GB2368422B (en) | 2000-05-10 | 2003-03-26 | Sony Corp | Electronic settlement system, settlement management device, store device, client, data storage device, computer program, and storage medium |
US6800910B2 (en) | 2002-09-30 | 2004-10-05 | Advanced Micro Devices, Inc. | FinFET device incorporating strained silicon in the channel region |
US6991972B2 (en) | 2002-10-22 | 2006-01-31 | Amberwave Systems Corporation | Gate material for semiconductor device fabrication |
US7045401B2 (en) | 2003-06-23 | 2006-05-16 | Sharp Laboratories Of America, Inc. | Strained silicon finFET device |
KR100487566B1 (en) * | 2003-07-23 | 2005-05-03 | 삼성전자주식회사 | Fin field effect transistors and methods of formiing the same |
US20050095763A1 (en) | 2003-10-29 | 2005-05-05 | Samavedam Srikanth B. | Method of forming an NMOS transistor and structure thereof |
US7244958B2 (en) * | 2004-06-24 | 2007-07-17 | International Business Machines Corporation | Integration of strained Ge into advanced CMOS technology |
DE102005045078B4 (en) * | 2004-09-25 | 2009-01-22 | Samsung Electronics Co., Ltd., Suwon | Field effect transistor with a strained channel layer on sidewalls of a structure on a semiconductor substrate |
KR100674914B1 (en) | 2004-09-25 | 2007-01-26 | 삼성전자주식회사 | MOS transistor having strained channel layer and methods of manufacturing thereof |
TWI277210B (en) * | 2004-10-26 | 2007-03-21 | Nanya Technology Corp | FinFET transistor process |
US20060148182A1 (en) | 2005-01-03 | 2006-07-06 | Suman Datta | Quantum well transistor using high dielectric constant dielectric layer |
JP4367357B2 (en) * | 2005-02-28 | 2009-11-18 | セイコーエプソン株式会社 | Manufacturing method of semiconductor device |
US7544963B2 (en) | 2005-04-29 | 2009-06-09 | Cree, Inc. | Binary group III-nitride based high electron mobility transistors |
US7205601B2 (en) | 2005-06-09 | 2007-04-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFET split gate EEPROM structure and method of its fabrication |
US7569443B2 (en) | 2005-06-21 | 2009-08-04 | Intel Corporation | Complementary metal oxide semiconductor integrated circuit using raised source drain and replacement metal gate |
US20080050883A1 (en) | 2006-08-25 | 2008-02-28 | Atmel Corporation | Hetrojunction bipolar transistor (hbt) with periodic multilayer base |
JP4676285B2 (en) | 2005-08-30 | 2011-04-27 | セイコーインスツル株式会社 | Surface-mount type piezoelectric vibrator and manufacturing method thereof, oscillator, electronic device, and radio-controlled timepiece |
JP5167816B2 (en) * | 2005-10-21 | 2013-03-21 | 富士通株式会社 | Fin-type semiconductor device and manufacturing method thereof |
JP2007258485A (en) * | 2006-03-23 | 2007-10-04 | Toshiba Corp | Semiconductor device and its manufacturing method |
US7494862B2 (en) | 2006-09-29 | 2009-02-24 | Intel Corporation | Methods for uniform doping of non-planar transistor structures |
US7429747B2 (en) | 2006-11-16 | 2008-09-30 | Intel Corporation | Sb-based CMOS devices |
US20080142786A1 (en) | 2006-12-13 | 2008-06-19 | Suman Datta | Insulated gate for group iii-v devices |
US8017463B2 (en) | 2006-12-29 | 2011-09-13 | Intel Corporation | Expitaxial fabrication of fins for FinFET devices |
US7601980B2 (en) | 2006-12-29 | 2009-10-13 | Intel Corporation | Dopant confinement in the delta doped layer using a dopant segregation barrier in quantum well structures |
US9006707B2 (en) | 2007-02-28 | 2015-04-14 | Intel Corporation | Forming arsenide-based complementary logic on a single substrate |
US7928426B2 (en) * | 2007-03-27 | 2011-04-19 | Intel Corporation | Forming a non-planar transistor having a quantum well channel |
US7435987B1 (en) | 2007-03-27 | 2008-10-14 | Intel Corporation | Forming a type I heterostructure in a group IV semiconductor |
US7569869B2 (en) | 2007-03-29 | 2009-08-04 | Intel Corporation | Transistor having tensile strained channel and system including same |
US20090001415A1 (en) * | 2007-06-30 | 2009-01-01 | Nick Lindert | Multi-gate transistor with strained body |
US7791063B2 (en) | 2007-08-30 | 2010-09-07 | Intel Corporation | High hole mobility p-channel Ge transistor structure on Si substrate |
US7767560B2 (en) * | 2007-09-29 | 2010-08-03 | Intel Corporation | Three dimensional strained quantum wells and three dimensional strained surface channels by Ge confinement method |
US8278687B2 (en) | 2008-03-28 | 2012-10-02 | Intel Corporation | Semiconductor heterostructures to reduce short channel effects |
US8129749B2 (en) | 2008-03-28 | 2012-03-06 | Intel Corporation | Double quantum well structures for transistors |
JP5159413B2 (en) * | 2008-04-24 | 2013-03-06 | 株式会社東芝 | Semiconductor device and manufacturing method thereof |
JP5403212B2 (en) | 2008-10-06 | 2014-01-29 | 株式会社Ihi | White LED manufacturing apparatus and method |
US20100148153A1 (en) | 2008-12-16 | 2010-06-17 | Hudait Mantu K | Group III-V devices with delta-doped layer under channel region |
US7759142B1 (en) | 2008-12-31 | 2010-07-20 | Intel Corporation | Quantum well MOSFET channels having uni-axial strain caused by metal source/drains, and conformal regrowth source/drains |
US8115235B2 (en) | 2009-02-20 | 2012-02-14 | Intel Corporation | Modulation-doped halo in quantum well field-effect transistors, apparatus made therewith, and methods of using same |
JP5299773B2 (en) | 2009-03-18 | 2013-09-25 | トヨタ自動車東日本株式会社 | Crystalline resin injection molding simulation method |
CN101853882B (en) * | 2009-04-01 | 2016-03-23 | 台湾积体电路制造股份有限公司 | There is the high-mobility multiple-gate transistor of the switch current ratio of improvement |
US8283653B2 (en) | 2009-12-23 | 2012-10-09 | Intel Corporation | Non-planar germanium quantum well devices |
-
2009
- 2009-12-23 US US12/646,477 patent/US8283653B2/en active Active
-
2010
- 2010-11-18 CN CN201080059031.4A patent/CN102656699B/en active Active
- 2010-11-18 CN CN201610209964.6A patent/CN105870168A/en active Pending
- 2010-11-18 CN CN201510197870.7A patent/CN104900693B/en active Active
- 2010-11-18 EP EP10843413.5A patent/EP2517256B1/en active Active
- 2010-11-18 EP EP15172297.2A patent/EP2996154B1/en active Active
- 2010-11-18 KR KR1020127016128A patent/KR101378661B1/en active IP Right Grant
- 2010-11-18 WO PCT/US2010/057276 patent/WO2011087570A1/en active Application Filing
- 2010-11-18 JP JP2012543132A patent/JP2013513250A/en active Pending
-
2012
- 2012-10-09 US US13/647,952 patent/US8575596B2/en active Active
-
2013
- 2013-02-27 HK HK13102488.0A patent/HK1175589A1/en unknown
- 2013-11-01 US US14/069,880 patent/US9263557B2/en not_active Expired - Fee Related
- 2013-12-27 US US14/141,648 patent/US9153671B2/en active Active
-
2015
- 2015-10-21 JP JP2015207296A patent/JP6301301B2/en active Active
-
2016
- 2016-02-15 US US15/043,935 patent/US9799759B2/en active Active
-
2017
- 2017-10-23 US US15/790,907 patent/US10236369B2/en active Active
- 2017-11-29 JP JP2017229213A patent/JP6549208B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080237573A1 (en) * | 2007-03-29 | 2008-10-02 | Been-Yih Jin | Mechanism for forming a remote delta doping layer of a quantum well structure |
Non-Patent Citations (1)
Title |
---|
JIANG Y ET AL: "Omega-Gate p-MOSFET With Nanowirelike SiGe/Si Core/Shell Channel", IEEE ELECTRON DEVICE LETTERS, IEEE SERVICE CENTER, NEW YORK, NY, US, vol. 30, no. 4, April 2009 (2009-04-01), pages 392 - 394, XP011251099, ISSN: 0741-3106 * |
Also Published As
Publication number | Publication date |
---|---|
US9263557B2 (en) | 2016-02-16 |
CN102656699B (en) | 2016-05-04 |
CN105870168A (en) | 2016-08-17 |
KR20120085929A (en) | 2012-08-01 |
US20130032783A1 (en) | 2013-02-07 |
US9153671B2 (en) | 2015-10-06 |
US8283653B2 (en) | 2012-10-09 |
KR101378661B1 (en) | 2014-03-26 |
US9799759B2 (en) | 2017-10-24 |
EP2517256A1 (en) | 2012-10-31 |
CN104900693B (en) | 2018-06-08 |
HK1175589A1 (en) | 2013-07-05 |
JP2018041979A (en) | 2018-03-15 |
US10236369B2 (en) | 2019-03-19 |
EP2996154B1 (en) | 2021-04-21 |
WO2011087570A1 (en) | 2011-07-21 |
US20160172472A1 (en) | 2016-06-16 |
JP2016028447A (en) | 2016-02-25 |
US20180047839A1 (en) | 2018-02-15 |
JP6301301B2 (en) | 2018-03-28 |
EP2996154A2 (en) | 2016-03-16 |
US20140103397A1 (en) | 2014-04-17 |
EP2517256A4 (en) | 2015-03-11 |
US20110147711A1 (en) | 2011-06-23 |
EP2517256B1 (en) | 2019-05-29 |
US20140054548A1 (en) | 2014-02-27 |
JP6549208B2 (en) | 2019-07-24 |
CN104900693A (en) | 2015-09-09 |
US8575596B2 (en) | 2013-11-05 |
CN102656699A (en) | 2012-09-05 |
JP2013513250A (en) | 2013-04-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2996154A3 (en) | Non-planar germanium quantum well devices | |
EP3151267A3 (en) | Semiconductor device having tipless epitaxial source/drain regions | |
TW200607094A (en) | Semiconductor device and method of manufacturing thereof | |
TW200629548A (en) | Nonplanar device with thinned lower body portion and method of fabrication | |
WO2011087605A3 (en) | Wrap-around contacts for finfet and tri-gate devices | |
WO2008105077A1 (en) | Compound semiconductor device and process for producing the same | |
WO2007053339A3 (en) | Method for forming a semiconductor structure and structure thereof | |
EP2325871A3 (en) | Semiconductor device and method of manufacturing the same | |
SG166065A1 (en) | Semiconductor device and manufacturing method thereof | |
JP2012015500A5 (en) | ||
EP2043156A3 (en) | Condensed memory cell structure using a FinFET | |
WO2007130729A3 (en) | Method of forming a semiconductor device and structure thereof | |
WO2013028685A3 (en) | Semiconductor device structures including vertical transistor devices, arrays of vertical transistor devices, and methods of fabrication | |
WO2007081528A3 (en) | Environmentally robust passivation structures for high-voltage silicon carbide semiconductor devices | |
WO2011031431A3 (en) | Semiconductor devices with field plates | |
JP2010135780A5 (en) | Semiconductor device | |
JP2010147477A5 (en) | ||
WO2008007331A3 (en) | Semiconductor devices and methods of manufacture thereof | |
JP2009532875A5 (en) | ||
WO2012054144A3 (en) | Semiconductor structure and methods of manufacture | |
JP2011151379A5 (en) | Transistor | |
EP2040301A3 (en) | Semiconductor device and method of manufacturing the same | |
JP2008166744A5 (en) | ||
EP2755237A3 (en) | Trench MOS gate semiconductor device and method of fabricating the same | |
EP2590233A3 (en) | Photovoltaic device and method of manufacturing the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AC | Divisional application: reference to earlier application |
Ref document number: 2517256 Country of ref document: EP Kind code of ref document: P |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 29/778 20060101ALI20160317BHEP Ipc: H01L 29/78 20060101ALI20160317BHEP Ipc: H01L 29/165 20060101ALN20160317BHEP Ipc: H01L 29/267 20060101ALN20160317BHEP Ipc: H01L 29/51 20060101ALN20160317BHEP Ipc: H01L 21/336 20060101ALI20160317BHEP Ipc: H01L 29/775 20060101AFI20160317BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
|
17P | Request for examination filed |
Effective date: 20161019 |
|
RBV | Designated contracting states (corrected) |
Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: EXAMINATION IS IN PROGRESS |
|
17Q | First examination report despatched |
Effective date: 20170526 |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: GRANT OF PATENT IS INTENDED |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 29/51 20060101ALN20201007BHEP Ipc: H01L 29/78 20060101ALI20201007BHEP Ipc: H01L 29/10 20060101ALI20201007BHEP Ipc: H01L 29/778 20060101ALI20201007BHEP Ipc: H01L 29/775 20060101AFI20201007BHEP Ipc: H01L 21/336 20060101ALI20201007BHEP Ipc: H01L 29/165 20060101ALI20201007BHEP Ipc: B82Y 10/00 20110101ALI20201007BHEP Ipc: H01L 29/267 20060101ALI20201007BHEP |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: B82Y 10/00 20110101ALI20201012BHEP Ipc: H01L 29/165 20060101ALI20201012BHEP Ipc: H01L 29/775 20060101AFI20201012BHEP Ipc: H01L 29/778 20060101ALI20201012BHEP Ipc: H01L 29/267 20060101ALI20201012BHEP Ipc: H01L 29/51 20060101ALN20201012BHEP Ipc: H01L 29/10 20060101ALI20201012BHEP Ipc: H01L 29/78 20060101ALI20201012BHEP Ipc: H01L 21/336 20060101ALI20201012BHEP |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 29/78 20060101ALI20201022BHEP Ipc: H01L 29/51 20060101ALN20201022BHEP Ipc: H01L 29/778 20060101ALI20201022BHEP Ipc: B82Y 10/00 20110101ALI20201022BHEP Ipc: H01L 29/165 20060101ALI20201022BHEP Ipc: H01L 21/336 20060101ALI20201022BHEP Ipc: H01L 29/10 20060101ALI20201022BHEP Ipc: H01L 29/775 20060101AFI20201022BHEP Ipc: H01L 29/267 20060101ALI20201022BHEP |
|
INTG | Intention to grant announced |
Effective date: 20201109 |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE PATENT HAS BEEN GRANTED |
|
AC | Divisional application: reference to earlier application |
Ref document number: 2517256 Country of ref document: EP Kind code of ref document: P |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R096 Ref document number: 602010066858 Country of ref document: DE Ref country code: IE Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: REF Ref document number: 1385553 Country of ref document: AT Kind code of ref document: T Effective date: 20210515 |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: FP |
|
REG | Reference to a national code |
Ref country code: LT Ref legal event code: MG9D |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: MK05 Ref document number: 1385553 Country of ref document: AT Kind code of ref document: T Effective date: 20210421 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210721 Ref country code: AT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: LT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: HR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LV Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210722 Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210821 Ref country code: RS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: SE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: PL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: NO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210721 Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210823 Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R097 Ref document number: 602010066858 Country of ref document: DE |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: SM Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: CZ Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed |
Effective date: 20220124 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210821 Ref country code: AL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: MC Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20211118 Ref country code: IT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20211130 |
|
REG | Reference to a national code |
Ref country code: BE Ref legal event code: MM Effective date: 20211130 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20211130 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20211130 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20211118 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO Effective date: 20101118 Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20210421 |
|
P01 | Opt-out of the competence of the unified patent court (upc) registered |
Effective date: 20230518 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 20230925 Year of fee payment: 14 Ref country code: GB Payment date: 20230914 Year of fee payment: 14 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20230911 Year of fee payment: 14 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20230919 Year of fee payment: 14 |