EP2992298B1 - Mems-ausgeglichener inerter winkelsensor und verfahren zum ausgleichen solch eines sensors - Google Patents

Mems-ausgeglichener inerter winkelsensor und verfahren zum ausgleichen solch eines sensors Download PDF

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Publication number
EP2992298B1
EP2992298B1 EP14723387.8A EP14723387A EP2992298B1 EP 2992298 B1 EP2992298 B1 EP 2992298B1 EP 14723387 A EP14723387 A EP 14723387A EP 2992298 B1 EP2992298 B1 EP 2992298B1
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mass bodies
substrate
mass
sensor
coupling
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French (fr)
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EP2992298A1 (de
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Alain Jeanroy
Philippe Onfroy
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Safran Electronics and Defense SAS
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Safran Electronics and Defense SAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Definitions

  • the present invention relates to a vibrating inertial angular sensor such as a gyrometer or a gyroscope and a method of balancing this sensor.
  • micro-electromechanical sensors also called MEMS for "microelectromechanical system”. These sensors are produced by collective etching on a plate of very thin material: they are small, light and relatively inexpensive, which allows their use in numerous fields of application, both in specialized technical products and in consumer products.
  • the resonator can be a deformable body, generally of revolution: ring, cylinder, hemisphere, disc.
  • the resonator can also consist of one or more non-deformable mass bodies (also commonly called masses or test masses) connected to a support by elastic elements.
  • the support is rigidly fixed in a frame as in the documents US-A-2011/0094302 and US-A-2004/0123661 .
  • Each sensor includes actuators arranged to set the deformable resonator or the body / elastic elements system in vibration at the resonant frequency of the system and detectors for deformations of the deformable resonator or movements of the body / elastic elements system are mounted between the support on the one hand deformable resonator or the mass body / elastic elements system on the other hand.
  • the most efficient vibrating angular MEMS type sensors thus have four mass bodies arranged in a square pattern.
  • the low mass of the resonator has the consequence that it makes it difficult to measure dynamic balancing faults because the forces generated by the unbalance are too low to be able to measure them.
  • Such a correction by removal of material would also have the drawback that it would not make it possible to compensate for the change in unbalance as a function of temperature and time.
  • the object of the invention is to provide a means for improving the precision of angular vibrating MEMS type angular sensors.
  • a vibrating angular angular sensor of MEMS type comprising a support of at least two mass bodies, mounted concentrically around one another and substantially of the same mass, which are mounted. movable relative to the support and which are associated with at least one electrostatic actuator and at least one electrostatic detector.
  • the sensor comprises first means for suspending the mass bodies relative to the support and means for coupling the mass bodies to each other and the support is connected by second suspension means to a fixed frame so that the mass bodies and the support are movable relative to the fixed frame parallel to a suspension plane, the suspension means being isotropic according to the suspension plane.
  • the mass bodies are doubly suspended relative to the fixed frame while being mechanically coupled together.
  • This double suspension mechanically isolates the mass bodies from deformations and vibrations generated by the frame and limits the exchange of energy between the mass bodies and the exterior of the frame. This improves the performance of the sensor.
  • the support serves as a mobile platform for the mass bodies, the coupling means and the suspension means associated therewith while forming a suspension stage.
  • the actuator and the detector are preferably each mounted between one of the mass bodies and the support so that the support also serves here as a mobile platform for the actuator and the detector.
  • the first suspension means comprise a frame to which the mass bodies are connected by third suspension means to produce a mass coupling of the mass bodies with one another, and the frame is itself connected by fourth means suspension.
  • the direct mechanical coupling between the mass bodies is not ensured by levers which, as we have seen, complicated the manufacture and balancing of the sensor.
  • the mechanical coupling between the mass bodies is ensured in this embodiment by the suspended frame, which simplifies the structure of the sensor and its balancing.
  • the coupling means comprise fifth suspension means connecting the mass bodies to one another to produce an elastic coupling of the mass bodies with one another.
  • At least one imbalance effect detector is mounted between the support and the fixed frame and at the at least one electrostatic spring is placed between the support and one of the mass bodies and is controlled to ensure dynamic balancing of the sensor as a function of a measurement signal from the unbalance effect detector.
  • Balancing can be achieved with this structure by measuring the frequency anisotropy (or deviation) between the two body mass / suspension systems and removing this anisotropy.
  • the measurement of the anisotropy can be carried out indirectly by measuring the effect of the unbalance created by the frequency anisotropy.
  • the balancing correction is preferably carried out by controlling the electrostatic spring to add a negative electrostatic stiffness to the stiffness of the body / suspension system having the highest frequency so as to correct the intrinsic pulsation difference due to production faults and the temporal and thermal changes in the parameters of each of the mass body / suspension systems.
  • the adjustment based on a zero servo, does not require a precise voltage reference or stable gains in terms of the sensor processing electronics.
  • the invention also relates to a method for balancing this sensor.
  • the invention relates to an MEMS type vibrating inertial angular sensor intended to form a gyroscope or a gyrometer.
  • the simplified sensor illustrated in these figures comprises a frame 21 and at least two mass bodies 2 which are mounted movable relative to the frame 21 and which are associated with electrostatic actuators 3 and with electrostatic detectors 4.
  • the support which serves as a platform for the mass bodies and the associated suspension means, while forming a suspension stage, also performs the function of mass coupling framework for the mass bodies.
  • the actuator and the detector are each mounted between one of the mass bodies and this frame so that the coupling frame here also serves as a platform for the actuator and the detector in place of the support.
  • the mass bodies 2 are suspended via suspension means 5 in a frame 6 itself connected to the frame 21 by suspension means 7.
  • the suspension means 5 and 7 are isotropic in the XY plane defining the suspension plane of the mass bodies of the sensor and are made to present a significant stiffness along the axis normal to the plane of the sensor to suppress the degrees of freedom of the mass bodies 2 and of the frame 6 out of the plane.
  • Each mass body 2 and the frame 6 have three degrees of freedom in the plane, namely two translations (along the X and Y axes) and a rotation (around an axis normal to this X and Y plane).
  • an actuator 3 and a detector 4 are mounted between each of the mass bodies 2 and the frame 6.
  • the actuators 3 and the detectors 4 have a structure known in the form of comb electrodes whose teeth are interspersed with each other.
  • the combs of the actuators 3 and of the detectors 4 can have a variable gap or variable surface operating mode.
  • the mass bodies 2 have identical masses and have a generally square shape on the sides of which are arranged the actuators 3 and the detectors 4.
  • the suspension means 5 are arranged at the tops of each mass body 2.
  • the mass bodies 2.1, 2.2 are two in number and are arranged so that they can be mounted concentrically. More precisely, the frame 6 is square in shape and the mass bodies 2.1, 2.2, in the form of square contour frames are placed on either side of the frame 6.
  • the mass bodies 2.1, 2.2 have axes of symmetry having identical natural frequencies.
  • Two electrostatic springs 8 are mounted between the frame 6 and each of the mass bodies 2 so as to act respectively along the axes X and Y.
  • the electrostatic springs 8 have a structure known in the form of comb electrodes whose teeth are interposed with one another.
  • the combs of the electrostatic springs 8 have a variable gap operating mode.
  • Unbalance effect detectors here more particularly force sensors, are integrated into the suspension means 7 to provide a measurement signal representative of the forces transmitted to the frame 21 by the frame 6.
  • These sensors are known in themselves and can be piezoresistive or piezoelectric strain gauges.
  • the manufacturing of the sensor of the invention is carried out using conventional techniques for etching the plates of semiconductor material.
  • the semiconductor material used here is silicon.
  • the actuators 3 and the detectors 4 are connected, by electric conductors known in themselves, to a control unit 9, also known in itself, which is programmed to control the actuators 3 and process the signals of the detectors 4 so as to ensure the detection of angular magnitude around an axis normal to the plane of movement of the mass bodies 2.
  • the electrostatic spring 8 and the force sensors integrated into the suspension means 7 are also connected to the control unit 9 which is programmed to control the electrostatic springs 8 as a function of the signals from said demodulated force sensors as a function of the frequency of vibration of the mass bodies 2 to remove the unbalance at the vibration frequency so as to balance the sensor.
  • control unit 9 The operation of the control unit 9 is shown in the figure 3 in determining the variation in stiffness ⁇ kn for balancing the sensor according to a degree of freedom "n". There is symbolized an elliptical vibration of large dimension "a” and small dimension "b”. The major axis of the vibration forms an angle ⁇ in an XY coordinate system.
  • the implementation of the gyroscope leads to the determination of the commands C1 and C2 of the actuators 3 as a function of the movements ⁇ 1, ⁇ 2 detected by the sensors 4.
  • the control unit calculates the values ⁇ n.cos ⁇ and ⁇ n.sin ⁇ to arrive at the variation in stiffness ⁇ kn serving as a setpoint for controlling the electrostatic springs 8.
  • the senor can be compared to two mass / spring systems (m 1 , k 1 ) and (m 2 , k 2 ) connected to the outside world by another mass / spring system (m 0 , k 0 , namely the mass of the frame 6 and the stiffness of the suspension means 7).
  • the modeling makes it possible to calculate the frequencies of the eigen modes, the unbalance of the useful eigen mode and the force of reaction of this unbalance on the support.
  • unbalance 2 ⁇ m ⁇
  • the correction step is carried out by controlling the electrostatic springs 8 so as to reduce this effect: a control exploiting the demodulation with respect to the frequency of the vibration of the signals from the force sensors incorporated in the suspension means 7 corrects the stiffness of the springs electrostatic 8 placed between the mass bodies 2 and the frame 6 to remove the unbalance at the frequency of the vibration.
  • the correction is performed here more precisely by adding a negative electrostatic stiffness to the stiffness of the mass / spring system having the highest frequency to correct the intrinsic pulsation deviation due to production faults and to the temporal and thermal changes in the parameters of each of the mass / spring systems.
  • the arrangement of the sensor makes it possible to obtain two eigen modes along the axis X, namely masses m 1 and m 2 moving in phase and masses m 1 and m 2 moving in phase opposition, with a displacement low of the mass m 0 , which do not have the same frequencies.
  • the support is connected to a frame by suspension means.
  • the coefficient of coupling depends on the ratio (mass of mass bodies 2 / mass of the frame),
  • the coupling coefficient depends on the ratio (stiffness of the spring between the mass bodies / stiffness of the springs between the mass bodies and the support).
  • the coupling is minimal when the coefficient tends towards 1, that is to say when the mass of the frame is high or when the stiffness of the springs between the mass bodies is low and is all the more strong as the coupling coefficient is close to 0, that is to say when the mass of the frame is low or when the stiffness of the springs between the mass bodies is high.
  • the senor comprises a support 1 and at least two mass bodies 2 which are mounted movable relative to the support 1 and which are associated with electrostatic actuators 3 and with electrostatic detectors 4.
  • the bodies mass 2.1, 2.2 are two in number and are arranged so that they can be mounted concentrically.
  • the mass bodies 2.1, 2.2 therefore have respectively a square shape and a shape of frame of axes of symmetry combined having identical natural frequencies.
  • the sensor comprises first means for suspending the mass bodies 2.1, 2.2 from the support 1 and means for coupling the mass bodies 2.1, 2.2 to one another.
  • the masses of the mass bodies 2.1, 2.2 are identical and the means of suspension of the mass bodies 2.1, 2.2 have identical stiffnesses. This makes it possible to respect the hypotheses of the dynamic modeling equations presented above.
  • the mass bodies 2.1, 2.2 are placed on either side of a frame 6 of square shape.
  • the mass bodies 2.1, 2.2 are suspended via suspension means 5 from the frame 6 itself connected to the support 1 by suspension means 7.
  • the suspension means 5 and 7 are isotropic in the XY plane defining the plane of suspension of the mass bodies 2.1, 2.2 of the sensor and are made to have a significant stiffness along the axis normal to the plane of the sensor to suppress the degrees of freedom of the mass bodies 2.1, 2.2 and of the frame 6 outside the plane.
  • Each mass body 2.1, 2.2 and the frame 6 have three degrees of freedom in the plane, namely two translations (along the X and Y axes) and a rotation (around an axis normal to this X and Y plane).
  • the frame 6 thus connected to the mass bodies 2.1, 2.2 by the suspension means achieves a mass coupling of the mass bodies 2.1 and 2.2 between them.
  • the frame 6 is here relatively light compared to the mass bodies so that the coupling is strong (coupling coefficient for example between 0.2 and 0.4, preferably 0.3).
  • a strong coupling has the advantage of moving the mass bodies away from the frequency of the useful mode of vibration (the mass bodies vibrate in phase opposition in the suspension plane in any direction of orientation relative to the support 1) the frequency parasitic vibration mode (the mass bodies vibrate in phase) which then approaches the frequency of the suspension mode (overall mode of the support 1 and of the mass bodies 2).
  • the strong coupling makes it possible to have a strong overvoltage limiting the dissipations of energy of the useful mode.
  • an actuator 3 and a detector 4 are mounted between each of the mass bodies 2 and the support 1.
  • the actuators 3 and the detectors 4 have a structure known in the form of comb electrodes whose teeth are interposed with one another. Combs are thus fixed to the mass bodies 2 and combs are fixed to the support 1.
  • the combs of the actuators 3 and of the detectors 4 can have a mode of operation with variable air gap or with variable surface.
  • the actuators 3 and the detectors 4 are arranged on the sides of the mass bodies 2.1, 2.2 and the suspension means 5 are arranged at the tops of each mass body 2.1, 2.2.
  • electrostatic springs 8 are mounted between the support 1 and each of the mass bodies 2.1, 2.2 so as to act respectively along the axes X and Y.
  • the electrostatic springs 8 have a structure known in the form of comb electrodes whose teeth are interspersed with each other. Combs are thus fixed to the mass bodies 2 and combs are fixed to the support 1.
  • the combs of the electrostatic springs 8 have a variable gap operating mode.
  • the support 1 in the form of a platform bordered by a rim, is connected by second suspension means 20 to a fixed frame 21.
  • the suspension means 20 are designed like the suspension means 5 and 7 and are mounted on the tops of the support 1.
  • the suspension means 20 are isotropic in the XY plane defining the suspension plane of the mass bodies 2.1, 2.2 of the sensor and are made to have a significant stiffness along the axis normal to the sensor plane to remove the degrees of freedom of support 1 outside the plane.
  • the support 1 has three degrees of freedom in the plane, namely two translations (along the axes X and Y) and a rotation (around an axis normal to this X and Y plane).
  • actuators 23 and unbalance effect detectors 24 are mounted between the frame 21 and the support 1.
  • the actuators 23 and the detectors 24 have a known structure in the form of comb electrodes whose teeth are interspersed with each other. Combs are thus fixed to the frame 21 and combs are fixed to the support 1.
  • the combs of the actuators 23 and of the detectors 24 can have a variable gap or variable surface operating mode.
  • the actuators 23 and the detectors 24 are arranged on the sides of the frame 21 and of the support 1.
  • imbalance effect detectors here more particularly force sensors, are integrated into the suspension means 20 to provide a measurement signal representative of the forces transmitted to the frame 21 by the support 1.
  • sensors are known in themselves -same and can be piezoresistive or piezoelectric stress gauges.
  • the manufacturing of the sensor of the invention is carried out using conventional techniques for etching the plates of semiconductor material (DRIE type etching on silicon wafer of SOI type for example).
  • the semiconductor material used here is silicon.
  • the actuators 3 and the detectors 4 are connected, by electric conductors known in themselves, to the control unit, also known in itself, which is programmed to control the actuators 3 and process the signals of the detectors 4 so as to ensure the detection of angular magnitude around an axis normal to the plane of movement of the mass bodies 2.1, 2.2.
  • the electrostatic springs 8 and the unbalance effect detectors 24 providing a measurement signal representative of the forces transmitted to the frame 21 by the support 1 are also connected to the control unit which is programmed to control the electrostatic springs 8 as a function of the signals from said demodulated detectors 24 as a function of the vibration frequency of the mass bodies 2.1, 2.2 to remove the unbalance at the vibration frequency so as to ensure a balance of the sensor.
  • the control of the electrostatic springs 8 thus makes it possible to adjust the elementary stiffnesses of each of the mass bodies 2, namely: the stiffnesses participating in the same eigen mode to cancel the unbalance of this eigen mode and the average stiffness of each of the two eigen modes for cancel the quadrature or anisofrequency fault encountered conventionally. This control is carried out with a view to obtaining four elementary vibration frequencies (one elementary frequency per axis for each mass body 2) which are equal to each other.
  • the actuators 23 and the detectors 24 are connected to the control unit which is programmed to control the actuators 23 as a function of the signals from said detectors 24 to achieve active damping, known in itself, of the suspension 20 of the support 1.
  • the frame 6 therefore only performs a coupling function while the support 1 also provides an electrode holder function for the mass bodies 2.1 and 2.2.
  • the support 1 comprises a platform 1.1 and studs 1.2 projecting from the platform 1.1 between the mass bodies 2.1, 2.2.
  • the mass bodies 2.1, 2.2 are connected to the studs 1.2 by the suspension means 5.
  • Suspension means 22 connecting the mass bodies 2.1, 2.2 to each other constitute elastic coupling means of the mass bodies 2.1, 2.2 between them.
  • the suspension means 22 preferably have a stiffness greater than the stiffness of the suspension means 5 so that the coupling is strong (coupling coefficient for example between 0.2 and 0.4, preferably 0.3).
  • a strong coupling has the advantage of moving the mass bodies away from the frequency of the useful mode of vibration (the mass bodies vibrate in phase opposition in any orientation relative to the support 1) the frequency of the parasitic mode of vibration (the mass bodies vibrate in phase) which then approaches the frequency of the suspension mode (overall mode of the support 1 and of the mass bodies 2).
  • the strong coupling makes it possible to have a strong overvoltage limiting the dissipations of energy of the useful mode.
  • the support 1 is connected by suspension means 20 to the fixed frame 21.
  • Actuators 23 are mounted between the frame 21 and the support 1.
  • Unbalance effect detectors 24 are mounted between the frame 21 and the support 1 to provide a measurement signal representative of the forces transmitted to the frame 21 by the support 1.
  • the actuators 3, 23, the detectors 4, 24 and the electrostatic springs 8 are connected, by electrical conductors known in themselves, to the control unit as in the first embodiment.
  • the unbalance effect measured can be a force applied by the support 1 to the frame 21, an acceleration of the support 1 relative to the frame 21, a speed of the support 1 relative to the frame 21, a displacement of the support 1 relative to the frame 21 or other.
  • the sensor may have a shape different from that described.
  • the mass bodies and the frame may have, in the plane of the sensor, polygonal or at least partially curved shapes, which can be described by four 90 ° rotations of a pattern representing a quarter of the geometry.
  • At least one electrostatic actuator 33 and at least one electrostatic detector 34 can be placed between the frame 6 and the support 1 to achieve active damping, known in itself, of the suspension 7 of the frame 6.
  • the invention also relates to a sensor whose mass bodies would be suspended on a support and would have a strong coupling by mass or spring and which would be devoid of the active balancing means described in relation to the embodiment shown in the figures.
  • a sensor whose mass bodies would be suspended on a support and would have a strong coupling by mass or spring and which would be devoid of the active balancing means described in relation to the embodiment shown in the figures.

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  • Engineering & Computer Science (AREA)
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Claims (15)

  1. Vibrierender MEMS-Trägheitswinkelsensor, umfassend einen Träger (1) für mindestens zwei konzentrisch umeinander montierte Massekörper (2), die in Bezug auf den Träger beweglich gelagert und mit mindestens einem elektrostatischen Aktor (3) und mit mindestens einem elektrostatischen Detektor (4) verbunden sind, wobei der Sensor erste Aufhängungsmittel (5) zur Aufhängung der Massekörper in Bezug auf den Träger und Kopplungsmittel zur Kopplung der Massekörper miteinander umfasst und der Träger über zweite Aufhängungsmittel (7) derart mit einem ortsfesten Gestell (21) verbunden ist, dass die Massekörper und der Träger in Bezug auf das ortsfeste Gestell parallel zu einer Aufhängungsebene beweglich sind, dadurch gekennzeichnet, dass die mindestens zwei Massekörper (2) im Wesentlichen die gleiche Masse haben und dass die Aufhängungsmittel (5, 7) in der Aufhängungsebene isotrop sind.
  2. Sensor nach Anspruch 1, bei dem die Kopplungsmittel so ausgebildet sind, dass sie eine relativ starke Kopplung gewährleisten, d.h. mit einem Kopplungskoeffizienten zwischen 0,2 und 0,4.
  3. Sensor nach Anspruch 1, bei dem die ersten Aufhängungsmittel einen Rahmen (6) umfassen, mit dem die Massekörper über dritte Aufhängungsmittel verbunden sind, um eine Massekopplung der Massekörper miteinander zu erzeugen, und der selbst über vierte Aufhängungsmittel mit dem Träger verbunden ist.
  4. Sensor nach Anspruch 1, bei dem die Kopplungsmittel fünfte Aufhängungsmittel umfassen, die die Massekörper miteinander verbinden, um eine elastische Kopplung der Massekörper miteinander zu erzeugen.
  5. Sensor nach Anspruch 1, bei dem ein Rahmen (6) zwischen den Massekörpern montiert und mit den Massekörpern über dritte Aufhängungsmittel verbunden ist, um eine Massekopplung der Massekörper miteinander zu erzeugen, wobei der Rahmen selbst über vierte Aufhängungsmittel mit dem Träger verbunden ist; wobei der Rahmen, die dritten Aufhängungsmittel und die vierten Aufhängungsmittel die ersten Aufhängungsmittel bilden; wobei der Rahmen und die dritten Aufhängungsmittel die Kopplungsmittel bilden.
  6. Sensor nach Anspruch 5, bei dem sich das Gestell (21) um den Träger (1) herum erstreckt und die zweiten Aufhängungsmittel einen Umfang des Trägers mit dem Gestell verbinden.
  7. Sensor nach Anspruch 1, bei dem der Träger eine Plattform und von der Plattform zwischen den Massekörpern vorstehende Kontaktstücke umfasst, wobei die Massekörper mit den Kontaktstücken über die ersten Aufhängungsmittel verbunden sind und die Kopplungsmittel Aufhängungsmittel umfassen, die die Massekörper miteinander verbinden.
  8. Sensor nach Anspruch 7, bei dem sich das Gestell (21) um den Träger (1) herum erstreckt und die zweiten Aufhängungsmittel einen Umfang des Trägers (1) mit dem Gestell (21) verbinden.
  9. Sensor nach einem der vorhergehenden Ansprüche, bei dem mindestens ein Unwucht-Effekt-Detektor (24) zwischen dem Träger und dem ortsfesten Gestell montiert ist und mindestens eine elektrostatische Feder (8) zwischen dem Träger und einem der Massekörper platziert ist und geregelt wird, um ein dynamisches Gleichgeweicht des Sensors in Abhängigkeit von einem Messsignal des Unwucht-Effekt-Detektors zu gewährleisten.
  10. Sensor nach einem der vorhergehenden Ansprüche, bei dem der elektrostatische Aktor (3) und der elektrostatische Detektor (4) jeweils zwischen einem der Massekörper und dem Träger montiert sind.
  11. Verfahren zum Auswuchten eines Sensors nach Anspruch 9, umfassend die Schritte des Messens und Korrigierens einer Frequenz-Anisotropie zwischen den Massekörpern (2) aufgrund von Herstellungsfehlern, wobei der Schritt des Messens dadurch erfolgt, dass ein Effekt gemessen wird, der von einer Unwucht des Sensors erzeugt wird, die aus der Frequenz-Anisotropie resultiert, und der Korrekturschritt dadurch erfolgt, dass die Steuerung der elektrostatischen Feder (8) geregelt wird, um diesen Effekt zu reduzieren.
  12. Verfahren nach Anspruch 11, bei dem der Effekt der gemessenen Unwucht eine Kraft ist, die von dem Träger (1) auf das Gestell aufgebracht wird.
  13. Verfahren nach Anspruch 11, bei dem der Effekt der gemessenen Unwucht eine Beschleunigung des Trägers (1) in Bezug auf das Gestell ist.
  14. Verfahren nach Anspruch 11, bei dem der Effekt der gemessenen Unwucht eine Geschwindigkeit des Trägers (1) in Bezug auf das Gestell ist.
  15. Verfahren nach Anspruch 11, bei dem der Effekt der gemessenen Unwucht eine Verschiebung des Trägers (1) in Bezug auf das Gestell ist.
EP14723387.8A 2013-04-29 2014-04-29 Mems-ausgeglichener inerter winkelsensor und verfahren zum ausgleichen solch eines sensors Active EP2992298B1 (de)

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FR1353926A FR3005160B1 (fr) 2013-04-29 2013-04-29 Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur
PCT/EP2014/058687 WO2014177542A1 (fr) 2013-04-29 2014-04-29 Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur

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EP2992298B1 true EP2992298B1 (de) 2020-03-18

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US (1) US9689678B2 (de)
EP (1) EP2992298B1 (de)
FR (1) FR3005160B1 (de)
IL (1) IL242330B (de)
WO (1) WO2014177542A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015042700A1 (en) 2013-09-24 2015-04-02 Motion Engine Inc. Mems components and method of wafer-level manufacturing thereof
EP3019442A4 (de) 2013-07-08 2017-01-25 Motion Engine Inc. Mems-vorrichtung und verfahren zur herstellung
EP3028007A4 (de) 2013-08-02 2017-07-12 Motion Engine Inc. Mems-bewegungssensor und verfahren zur herstellung
JP6590812B2 (ja) 2014-01-09 2019-10-16 モーション・エンジン・インコーポレーテッド 集積ｍｅｍｓシステム
WO2015154173A1 (en) 2014-04-10 2015-10-15 Motion Engine Inc. Mems pressure sensor
WO2015184531A1 (en) 2014-06-02 2015-12-10 Motion Engine Inc. Multi-mass mems motion sensor
FR3022996B1 (fr) 2014-06-27 2017-12-01 Thales Sa Capteur inertiel angulaire mems fonctionnant en mode diapason
CA3004760A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
WO2016112463A1 (en) 2015-01-15 2016-07-21 Motion Engine Inc. 3d mems device with hermetic cavity
US20160370403A1 (en) * 2015-06-22 2016-12-22 Adel Merdassi Capacitive accelerometer devices and wafer level vacuum encapsulation methods
FR3046223B1 (fr) * 2015-12-23 2018-02-16 Safran Systeme de suspension d'une masse mobile comprenant des moyens de liaison de la masse mobile a linearite optimisee
US10696541B2 (en) 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
FR3065800B1 (fr) * 2017-04-27 2019-08-02 Safran Resonateur configure pour etre integre a un capteur angulaire inertiel
FR3069062B1 (fr) * 2017-07-11 2019-08-09 Safran Capteur inertiel numerique a masses concentriques
CN107192384B (zh) * 2017-07-24 2022-04-05 深迪半导体(绍兴)有限公司 一种mems三轴陀螺仪
US20210292279A1 (en) * 2018-07-19 2021-09-23 Jiangsu Hengrui Medicine Co., Ltd. Method for preparing coagulation factor xia inhibitor and intermediate thereof
FR3102240B1 (fr) * 2019-10-18 2021-10-01 Safran Electronics & Defense Capteur à compensation mécanique de l’anisotropie de fréquence

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6845669B2 (en) * 2001-05-02 2005-01-25 The Regents Of The University Of California Non-resonant four degrees-of-freedom micromachined gyroscope
US6629460B2 (en) * 2001-08-10 2003-10-07 The Boeing Company Isolated resonator gyroscope
KR100436367B1 (ko) * 2001-12-14 2004-06-19 삼성전자주식회사 수직 진동 질량체를 갖는 멤스 자이로스코프
WO2004046646A2 (en) * 2002-11-15 2004-06-03 The Regents Of The University Of California Dynamically amplified dual mass mems gyroscope
JP2005326620A (ja) * 2004-05-14 2005-11-24 Fujitsu Ltd マイクロミラー素子
US7421898B2 (en) * 2004-08-16 2008-09-09 The Regents Of The University Of California Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object
US8549915B2 (en) * 2009-10-23 2013-10-08 The Regents Of The University Of California Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation
FR2953012B1 (fr) * 2009-11-24 2011-11-18 Thales Sa Gyrometre a structure vibrante a au moins un diapason
FR2969278B1 (fr) * 2010-12-20 2013-07-05 Onera (Off Nat Aerospatiale) Structure planaire pour gyrometre tri-axe
JP6098780B2 (ja) * 2012-04-19 2017-03-22 セイコーエプソン株式会社 ジャイロセンサーおよび電子機器
FI124624B (en) * 2012-06-29 2014-11-14 Murata Manufacturing Co Improved vibration gyroscope
FR3000194B1 (fr) * 2012-12-24 2015-03-13 Commissariat Energie Atomique Gyroscope a calibration simplifiee et procede de calibration simplifie d'un gyroscope
FR3022996B1 (fr) * 2014-06-27 2017-12-01 Thales Sa Capteur inertiel angulaire mems fonctionnant en mode diapason

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

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US20160146606A1 (en) 2016-05-26
FR3005160B1 (fr) 2016-02-12
WO2014177542A1 (fr) 2014-11-06
IL242330B (en) 2018-08-30
EP2992298A1 (de) 2016-03-09
FR3005160A1 (fr) 2014-10-31
US9689678B2 (en) 2017-06-27

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