EP2959503A4 - Systems for providing illumination in optical metrology - Google Patents
Systems for providing illumination in optical metrologyInfo
- Publication number
- EP2959503A4 EP2959503A4 EP14753960.5A EP14753960A EP2959503A4 EP 2959503 A4 EP2959503 A4 EP 2959503A4 EP 14753960 A EP14753960 A EP 14753960A EP 2959503 A4 EP2959503 A4 EP 2959503A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- systems
- optical metrology
- providing illumination
- illumination
- metrology
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005286 illumination Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 title 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
- F21V13/12—Combinations of only three kinds of elements
- F21V13/14—Combinations of only three kinds of elements the elements being filters or photoluminescent elements, reflectors and refractors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
- F21V13/02—Combinations of only two kinds of elements
- F21V13/08—Combinations of only two kinds of elements the elements being filters or photoluminescent elements and reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29332—Wavelength selective couplers, i.e. based on evanescent coupling between light guides, e.g. fused fibre couplers with transverse coupling between fibres having different propagation constant wavelength dependency
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
- G02B6/29362—Serial cascade of filters or filtering operations, e.g. for a large number of channels
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
- G02B6/29388—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM for lighting or use with non-coherent light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/29395—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device configurable, e.g. tunable or reconfigurable
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
- G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Optical Couplings Of Light Guides (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/774,025 US9512985B2 (en) | 2013-02-22 | 2013-02-22 | Systems for providing illumination in optical metrology |
PCT/US2014/017723 WO2014130829A1 (en) | 2013-02-22 | 2014-02-21 | Systems for providing illumination in optical metrology |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2959503A1 EP2959503A1 (en) | 2015-12-30 |
EP2959503A4 true EP2959503A4 (en) | 2016-10-26 |
EP2959503B1 EP2959503B1 (en) | 2018-05-30 |
Family
ID=51387926
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14753960.5A Active EP2959503B1 (en) | 2013-02-22 | 2014-02-21 | Systems for providing illumination in optical metrology |
Country Status (8)
Country | Link |
---|---|
US (2) | US9512985B2 (en) |
EP (1) | EP2959503B1 (en) |
JP (5) | JP6386479B2 (en) |
KR (1) | KR102251262B1 (en) |
CN (2) | CN105051880B (en) |
IL (2) | IL240676B (en) |
TW (1) | TWI637195B (en) |
WO (1) | WO2014130829A1 (en) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9535273B2 (en) * | 2011-07-21 | 2017-01-03 | Photon Dynamics, Inc. | Apparatus for viewing through optical thin film color filters and their overlaps |
AU2014255530A1 (en) * | 2013-04-17 | 2015-11-05 | Bae Systems Plc | Alignment of radiation beams |
WO2015138480A2 (en) * | 2014-03-10 | 2015-09-17 | Robe Lighting, Inc. | Collimated lighting effect for an automated luminaire |
US9341761B2 (en) * | 2014-03-18 | 2016-05-17 | Kla-Tencor Corporation | Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes |
JP6770958B2 (en) | 2014-11-25 | 2020-10-21 | ケーエルエー コーポレイション | Landscape analysis and utilization |
CN107615121B (en) | 2015-03-16 | 2021-04-16 | 加利福尼亚太平洋生物科学股份有限公司 | Integrated device and system for free space optical coupling |
US10887974B2 (en) | 2015-06-22 | 2021-01-05 | Kla Corporation | High efficiency laser-sustained plasma light source |
US10257918B2 (en) * | 2015-09-28 | 2019-04-09 | Kla-Tencor Corporation | System and method for laser-sustained plasma illumination |
US10244613B2 (en) * | 2015-10-04 | 2019-03-26 | Kla-Tencor Corporation | System and method for electrodeless plasma ignition in laser-sustained plasma light source |
US10371626B2 (en) * | 2016-08-17 | 2019-08-06 | Kla-Tencor Corporation | System and method for generating multi-channel tunable illumination from a broadband source |
CN110192090A (en) * | 2017-01-19 | 2019-08-30 | 安捷伦科技有限公司 | Spectrometer module, system and method for multiple beam optical analysis |
WO2018202269A1 (en) | 2017-05-04 | 2018-11-08 | Nkt Photonics A/S | A light source assembly |
US11187838B2 (en) * | 2017-07-31 | 2021-11-30 | Kla Corporation | Spectral filter for high-power fiber illumination sources |
US11125414B2 (en) | 2017-11-15 | 2021-09-21 | Lite-On Electronics (Guangzhou) Limited | Light distribution module |
CN109780506B (en) * | 2017-11-15 | 2022-01-25 | 光宝电子(广州)有限公司 | Light distribution module |
US10444083B2 (en) * | 2017-11-21 | 2019-10-15 | Watlow Electric Manufacturing Company | Multi-fiber optic sensing system |
US11067389B2 (en) * | 2018-03-13 | 2021-07-20 | Kla Corporation | Overlay metrology system and method |
EP3611569A1 (en) * | 2018-08-16 | 2020-02-19 | ASML Netherlands B.V. | Metrology apparatus and photonic crystal fiber |
JP2021192070A (en) * | 2018-09-04 | 2021-12-16 | ソニーグループ株式会社 | Optical communication connector, control method and optical communication apparatus |
RU188637U1 (en) * | 2018-12-06 | 2019-04-18 | Федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский государственный университет аэрокосмического приборостроения" | SELECTIVE MULTICHANNEL OPTICAL SPECTROMETER |
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US11156846B2 (en) | 2019-04-19 | 2021-10-26 | Kla Corporation | High-brightness illumination source for optical metrology |
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CN110346313A (en) * | 2019-07-31 | 2019-10-18 | 清华大学 | A kind of light modulation micro-nano structure, micro- integrated spectrometer and spectral modulation method |
US11933717B2 (en) * | 2019-09-27 | 2024-03-19 | Kla Corporation | Sensitive optical metrology in scanning and static modes |
US11762305B2 (en) | 2019-12-05 | 2023-09-19 | Asml Netherlands B.V. | Alignment method |
US11587781B2 (en) | 2021-05-24 | 2023-02-21 | Hamamatsu Photonics K.K. | Laser-driven light source with electrodeless ignition |
US11619097B2 (en) | 2021-05-24 | 2023-04-04 | Saudi Arabian Oil Company | System and method for laser downhole extended sensing |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0196948A1 (en) * | 1985-03-13 | 1986-10-08 | Commissariat A L'energie Atomique | Reversible demultiplexing device of a plurality of light signals in integrated optics |
US5109447A (en) * | 1991-03-04 | 1992-04-28 | The Boeing Company | High-powered, spectrally flat, very broadband optical source including optical coupler and method using same |
US6766084B1 (en) * | 2000-08-25 | 2004-07-20 | Stratos International, Inc. | Coarse wave division multiplexer |
US20110310388A1 (en) * | 2010-06-17 | 2011-12-22 | Kla-Tencor Corporation | Discrete polarization scatterometry |
Family Cites Families (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06137948A (en) * | 1992-10-28 | 1994-05-20 | Shimadzu Corp | Photometer |
JPH10170239A (en) * | 1996-10-08 | 1998-06-26 | Matsushita Electric Ind Co Ltd | Three-dimensional shape measuring device |
US6278519B1 (en) | 1998-01-29 | 2001-08-21 | Therma-Wave, Inc. | Apparatus for analyzing multi-layer thin film stacks on semiconductors |
JPH11231222A (en) * | 1998-01-27 | 1999-08-27 | Carl Zeiss Jena Gmbh | Microscope with scanning unit, and arrangement therefor and operation method therefor |
DE60034829T2 (en) * | 1999-01-22 | 2008-01-31 | Konica Minolta Opto, Inc., Hachioji | Optical scanning device for information recording and information reproduction |
US6147799A (en) * | 1999-10-08 | 2000-11-14 | Agilent Technologies Inc. | Physically compact variable optical delay element having wide adjustment range |
US6429943B1 (en) | 2000-03-29 | 2002-08-06 | Therma-Wave, Inc. | Critical dimension analysis with simultaneous multiple angle of incidence measurements |
JP2001311662A (en) | 2000-04-28 | 2001-11-09 | Horiba Ltd | Spectral device |
US6856724B2 (en) * | 2001-09-25 | 2005-02-15 | Siemens Aktiengesellschaft | Compensation system for adaptive equalization of an optical signal |
JP2003329581A (en) | 2002-05-15 | 2003-11-19 | Tama Tlo Kk | Optical fiber type multiple wavelength spectrometric apparatus and multiple wavelength spectrometric method using optical fiber |
JP3643821B2 (en) | 2002-08-28 | 2005-04-27 | 三菱重工業株式会社 | Carbon barrier film barrier property evaluation system |
US20040109225A1 (en) | 2002-12-06 | 2004-06-10 | Np Photonics, Inc. | Multi-mode pumped ase source using phosphate and tellurite glasses |
US6965431B2 (en) * | 2003-02-28 | 2005-11-15 | Ut-Battelle, Llc | Integrated tunable optical sensor (ITOS) system |
JP2005070090A (en) * | 2003-08-22 | 2005-03-17 | Toshiba Corp | Mutiwavelength light source device |
US7181119B2 (en) * | 2003-09-05 | 2007-02-20 | Sumitomo Electric Industries, Ltd. | Optically amplifying waveguide, optical amplifier module, and optical communication system |
JP4608219B2 (en) * | 2004-01-19 | 2011-01-12 | オリンパス株式会社 | Laser scanning microscope |
JP4869562B2 (en) * | 2004-03-26 | 2012-02-08 | オリンパス株式会社 | Scanning confocal microscope |
US7790533B2 (en) | 2004-06-18 | 2010-09-07 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method, laser irradiation apparatus, and method for manufacturing semiconductor device |
US7277175B2 (en) | 2004-09-21 | 2007-10-02 | Agilent Technologies, Inc. | Systems and methods for wavelength selective measurement of properties of small volume liquid samples |
US7375812B2 (en) * | 2005-02-22 | 2008-05-20 | Axsun Technologies, Inc. | Method and system for reducing parasitic spectral noise in tunable semiconductor source spectroscopy system |
WO2006110535A2 (en) * | 2005-04-07 | 2006-10-19 | Nanometrics Incorporated | Apparatus and methods for scatterometry of optical devices |
DE102005054184B4 (en) * | 2005-11-14 | 2020-10-29 | Carl Zeiss Microscopy Gmbh | Multispectral lighting device and measuring method |
JP4727517B2 (en) * | 2006-01-11 | 2011-07-20 | 富士フイルム株式会社 | Light source device and optical tomographic imaging device |
US7567351B2 (en) | 2006-02-02 | 2009-07-28 | Kla-Tencor Corporation | High resolution monitoring of CD variations |
US7989786B2 (en) | 2006-03-31 | 2011-08-02 | Energetiq Technology, Inc. | Laser-driven light source |
US7435982B2 (en) | 2006-03-31 | 2008-10-14 | Energetiq Technology, Inc. | Laser-driven light source |
JP2009094186A (en) * | 2007-10-05 | 2009-04-30 | Seiko Epson Corp | Light source device, illumination device, monitor device, and image display device |
JP4453737B2 (en) * | 2007-10-10 | 2010-04-21 | 住友電気工業株式会社 | Broadband light source device and analyzer |
NL1036188A1 (en) | 2007-12-05 | 2009-06-08 | Asml Netherlands Bv | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method. |
NL1036734A1 (en) | 2008-04-09 | 2009-10-12 | Asml Netherlands Bv | A method of assessing a model, an inspection apparatus and a lithographic apparatus. |
JP2009253129A (en) | 2008-04-09 | 2009-10-29 | Fujifilm Corp | Light source, and optical tomography imaging apparatus |
JP2009258207A (en) * | 2008-04-14 | 2009-11-05 | Panasonic Corp | Display device |
WO2009133734A1 (en) * | 2008-05-02 | 2009-11-05 | オリンパス株式会社 | Optical inspection device, electromagnetic wave detection method, electromagnetic wave detection device, organism observation method, microscope, endoscope, and optical tomographic image generation device |
US7926951B2 (en) * | 2008-07-11 | 2011-04-19 | Eastman Kodak Company | Laser illuminated micro-mirror projector |
KR100962522B1 (en) * | 2008-07-24 | 2010-06-14 | 한국표준과학연구원 | 3-Color Multiplex CARS Spectrometer |
JP5539367B2 (en) * | 2008-10-03 | 2014-07-02 | ナノドロップ テクノロジーズ リミテッド ライアビリティ カンパニー | Dual sample mode spectrophotometer |
JP2010125270A (en) * | 2008-12-01 | 2010-06-10 | Hoya Corp | Endoscope apparatus |
US8275226B2 (en) * | 2008-12-09 | 2012-09-25 | Spectral Applied Research Ltd. | Multi-mode fiber optically coupling a radiation source module to a multi-focal confocal microscope |
WO2010093903A2 (en) | 2009-02-13 | 2010-08-19 | Kla-Tencor Corporation | Optical pumping to sustain hot plasma |
JP2012519276A (en) * | 2009-03-01 | 2012-08-23 | タウ・サイエンス・コーポレーション | High-speed quantum efficiency measurement system using solid-state light source |
US20100243916A1 (en) | 2009-03-30 | 2010-09-30 | Lockheed Martin Corporation | Modular optical diagnostic platform for chemical and biological target diagnosis and detection |
US8462823B2 (en) | 2009-08-06 | 2013-06-11 | Emcore Corporation | Small packaged tunable laser with beam splitter |
US8441639B2 (en) * | 2009-09-03 | 2013-05-14 | Kla-Tencor Corp. | Metrology systems and methods |
JP2011153982A (en) * | 2010-01-28 | 2011-08-11 | Sanyo Electric Co Ltd | Beam irradiation system and semiconductor laser system |
JP5643983B2 (en) | 2010-03-25 | 2014-12-24 | 大塚電子株式会社 | Optical measuring device, optical measuring system, and fiber coupler |
KR20110121306A (en) * | 2010-04-30 | 2011-11-07 | 김현진 | Lighting system using a led and optical fiber |
US8384045B2 (en) * | 2010-07-01 | 2013-02-26 | Sony Corporation | Minute particle analyzing device and method |
JP2012057151A (en) | 2010-08-09 | 2012-03-22 | Toyota Central R&D Labs Inc | Resin composition and electrically insulating part obtained from the same |
JP5675219B2 (en) * | 2010-08-27 | 2015-02-25 | キヤノン株式会社 | Optical pulse generator, terahertz spectrometer and tomography device |
CN101949849B (en) * | 2010-09-08 | 2011-09-21 | 华中科技大学 | Light-activated positioning microscopic imaging system based on optical fiber evanescent field illuminator |
KR101279236B1 (en) * | 2011-06-01 | 2013-07-05 | 주식회사 쓰리레이저테크놀로지 | Multi-wavelength visible Laser |
NL2008936A (en) * | 2011-07-28 | 2013-01-29 | Asml Netherlands Bv | Illumination source for use in inspection methods and/or lithography inspection and lithographic apparatus and inspection method. |
US9400246B2 (en) | 2011-10-11 | 2016-07-26 | Kla-Tencor Corporation | Optical metrology tool equipped with modulated illumination sources |
CN102538866B (en) * | 2011-12-23 | 2013-05-15 | 北京交通大学 | Surface three-dimensional measurement system with tunable beat-wave linear scanning |
-
2013
- 2013-02-22 US US13/774,025 patent/US9512985B2/en active Active
-
2014
- 2014-02-21 WO PCT/US2014/017723 patent/WO2014130829A1/en active Application Filing
- 2014-02-21 CN CN201480017857.2A patent/CN105051880B/en active Active
- 2014-02-21 CN CN201910763022.6A patent/CN110632703B/en active Active
- 2014-02-21 EP EP14753960.5A patent/EP2959503B1/en active Active
- 2014-02-21 KR KR1020157026208A patent/KR102251262B1/en active IP Right Grant
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0196948A1 (en) * | 1985-03-13 | 1986-10-08 | Commissariat A L'energie Atomique | Reversible demultiplexing device of a plurality of light signals in integrated optics |
US5109447A (en) * | 1991-03-04 | 1992-04-28 | The Boeing Company | High-powered, spectrally flat, very broadband optical source including optical coupler and method using same |
US6766084B1 (en) * | 2000-08-25 | 2004-07-20 | Stratos International, Inc. | Coarse wave division multiplexer |
US20110310388A1 (en) * | 2010-06-17 | 2011-12-22 | Kla-Tencor Corporation | Discrete polarization scatterometry |
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CN105051880B (en) | 2019-09-13 |
TWI637195B (en) | 2018-10-01 |
JP6628841B2 (en) | 2020-01-15 |
US9512985B2 (en) | 2016-12-06 |
JP6866460B2 (en) | 2021-04-28 |
IL240676B (en) | 2019-06-30 |
TW201441663A (en) | 2014-11-01 |
JP2020056795A (en) | 2020-04-09 |
CN105051880A (en) | 2015-11-11 |
KR20150124971A (en) | 2015-11-06 |
EP2959503A1 (en) | 2015-12-30 |
JP2019002937A (en) | 2019-01-10 |
JP7482981B2 (en) | 2024-05-14 |
EP2959503B1 (en) | 2018-05-30 |
JP7201731B2 (en) | 2023-01-10 |
US20170146399A1 (en) | 2017-05-25 |
KR102251262B1 (en) | 2021-05-13 |
JP6386479B2 (en) | 2018-09-05 |
IL266620A (en) | 2019-07-31 |
US10203247B2 (en) | 2019-02-12 |
CN110632703A (en) | 2019-12-31 |
CN110632703B (en) | 2020-10-27 |
JP2016515196A (en) | 2016-05-26 |
JP2021101198A (en) | 2021-07-08 |
US20140240951A1 (en) | 2014-08-28 |
JP2023058479A (en) | 2023-04-25 |
WO2014130829A1 (en) | 2014-08-28 |
IL240676A0 (en) | 2015-10-29 |
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