EP2927501A1 - Procédé et système pour la détermination et l'évaluation du sens d'encastrement d'un dispositif - Google Patents

Procédé et système pour la détermination et l'évaluation du sens d'encastrement d'un dispositif Download PDF

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Publication number
EP2927501A1
EP2927501A1 EP15151964.2A EP15151964A EP2927501A1 EP 2927501 A1 EP2927501 A1 EP 2927501A1 EP 15151964 A EP15151964 A EP 15151964A EP 2927501 A1 EP2927501 A1 EP 2927501A1
Authority
EP
European Patent Office
Prior art keywords
pump
orientation
detected
evaluation unit
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15151964.2A
Other languages
German (de)
English (en)
Other versions
EP2927501B1 (fr
Inventor
Herbert Stammler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2927501A1 publication Critical patent/EP2927501A1/fr
Application granted granted Critical
Publication of EP2927501B1 publication Critical patent/EP2927501B1/fr
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/80—Diagnostics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/85—Starting

Definitions

  • the present invention relates to a method and a system for determining and evaluating the installation orientation of a device, in particular a device, such as a pump or vacuum pump, or of the control, regulation and / or switching certain characteristics and / or functions of a device serving device.
  • Such a pump may in particular comprise a rotor shaft which is rotatable about a rotor axis and a delivery pump for conveying an operating means, in particular a lubricant, with which a rotary bearing serving for the rotatable support of the rotor shaft is supplied.
  • a pump of this type is usually used for pumping or evacuating a recipient.
  • the pump has a flange, via which it is connected to the recipient.
  • certain pumps that these can not be connected to the recipient in every position and put into operation.
  • the invention has for its object to provide a method and a system of the type mentioned, with which even with different installation orientations of the device always ensures optimum operation and ensures that the device is not taken in improper manner in operation.
  • the device may be a device or a device for a device.
  • the device may be, for example, a vacuum pump.
  • it may be a lubricant-laden turbomolecular pump, one-stage or multi-stage Roots piston, rotary piston, screw or side channel pump.
  • the device may be, for example, a lubricant pump of a vacuum pump.
  • the device may also be a vacuum device such as a pressure gauge, vacuum gauge, gas analyzer or leak detector.
  • the current installation orientation of the device is detected by at least one position detector associated with the device and is checked by means of a control and / or evaluation unit as to whether the device may be operated in the detected positional orientation. If necessary, but not necessarily, it can additionally be determined under which conditions the device can be operated.
  • a position detector is, in the context of the present disclosure, a device of basically arbitrary design and arrangement capable of detecting or determining at least one parameter whose value depends on the orientation of the associated device in space, i. which also changes when the orientation changes.
  • the position detector may be e.g. be a comparatively compact, for example in the form of a component present sensor, but also a not necessarily spatially concentrated or physical device such. an evaluation program that can evaluate, for example, already detected current values and then investigate whether the current measurements have orientation-dependent properties.
  • the position detector may be designed as an acceleration sensor or may be capable of detecting an increased quiescent current in an actively controlled magnetic bearing (magnetic bearing).
  • the control and / or evaluation unit preferably determines that the device was not operated in the detected positional orientation in the case may generate an error message.
  • Such an error message can in particular be generated acoustically and / or optically and / or by electronic data transmission, eg in the form of an error telegram.
  • control and / or evaluation unit it has also been determined in the event that it has been determined that the device may be operated in the detected positional orientation, besides determining the conditions under which the device can be operated whether the operation of the device in the recorded position orientation and under the relevant conditions corresponds to a normal and correspondingly uncritical operation or represents a particularly critical limit case.
  • the device can be put into operation in both cases. In the mentioned critical limiting case, however, e.g. be promptly ensured that optimal conditions or optimal location orientation of the device is brought about again.
  • the staff can also promptly provide for appropriate remedy.
  • a further preferred embodiment of the inventive method is characterized in that the determination of the conditions under which the device is operable, the determination of a dependent of the detected positional orientation power limitation for the device, the determination of a dependent of the detected positional biasing current for at least one Magnetic bearing of the device, and / or the determination of a dependent of the detected position orientation cooling of at least a portion of the device comprises.
  • a pump may pump different amounts of gas at different mounting orientations until it begins to regulate the speed or power in the range of warning thresholds or error limits.
  • the security can be increased that the operator operates the vacuum or turbomolecular pump in the right direction and / or the lubricant pump is mounted correctly after a service again. It is advantageous if the position detector is arranged in the lubricant pump. The position detector is then rotated correctly to the installation position so that it is also possible to change the prescribed pump orientation in the field without having to change the parameterization or setting.
  • the current installation orientation of the device is detected by at least one switching device associated with the device, in particular liquid-level switch, or at least one acceleration sensor, in particular a micro-electro-mechanical acceleration sensor.
  • the system according to the invention for determining and evaluating the installation orientation of a device comprises at least one position detector associated with the device Detecting the current installation orientation of the device as well as a responsive to the output signals of the position detector control and / or evaluation, which is designed to automatically check whether the device in the detected Orientation may be operated and, where appropriate, automatically determine under what conditions the device is operable.
  • control and / or evaluation unit is preferably designed to generate an error message in the event that it has been determined that the device may not be operated in the detected positional orientation.
  • control and / or evaluation unit is further designed, in the event that it has been determined that the device may be operated in the detected positional orientation, except for determining the conditions under which the device is also to determine whether the operation of the device in the recorded position orientation and under the relevant conditions corresponds to a normal and correspondingly uncritical operation or represents a particular critical borderline case.
  • control and / or evaluation unit is further designed to generate a particularly qualified warning message in the event that it has been determined that the operation of the device in the detected position orientation and under the relevant conditions is a particularly critical limit.
  • the determination by the control and / or evaluation unit of the conditions under which the device is operable preferably comprises the determination of a power limit for the device dependent on the detected positional orientation, the determination of a quiescent current dependent on the detected positional orientation for at least one, in particular actively controlled magnetic bearing of the device, and / or the determination of a dependent of the detected position orientation cooling at least a portion of the device.
  • a switching sensor in particular a single or multi-axis liquid storage switch, or an acceleration sensor, in particular a single or multi-axis micro-electro-mechanical acceleration sensor is provided.
  • the device may, for example, comprise a pump, which may in particular be a vacuum pump.
  • the device may in particular comprise a turbomolecular pump.
  • the device may comprise, in addition to the pump, in particular an auxiliary device connected thereto, such as a lubricant pump, wherein advantageously at least one position detector of the pump and / or at least one position detector of the auxiliary device is associated.
  • an auxiliary device connected thereto, such as a lubricant pump, wherein advantageously at least one position detector of the pump and / or at least one position detector of the auxiliary device is associated.
  • At least one position detector is provided in control electronics associated with the device, at least one position detector in a particularly sealed assembly and / or at least one position detector on a board or the like.
  • At least one position detector freely mounted within the device at least one position detector in a molded assembly such as a motor stator, at least one position detector freely mounted outside the housing of the device and / or at least one position detector freely mounted within a device attached auxiliary device such as in particular be provided a vacuum pump associated with a lubricant pump.
  • the system comprises an input interface connected to the control and / or evaluation unit, via which at least one reference value relating to the location of the device can be entered.
  • the relevant reference value can be input manually, for example via a data bus access or by means of an operating device.
  • a value serving as a reference for the control electronics can still be dependent on the accuracy of the information given by the operating personnel.
  • advantages of the installation position evaluation can already be exploited, for example by raising performance limits or by triggering general operation release.
  • the conditions may be brought about or initiated, under which the device may be operated.
  • Fig. 1 shows a schematic representation of an exemplary embodiment of an inventive system 2 for determining and evaluating the installation orientation of a device 4 suitable for carrying out the method according to the invention, which is a device such as a pump or vacuum pump, or at it is a device used to control, regulate and / or switch certain properties and / or functions of a device.
  • a device 4 suitable for carrying out the method according to the invention, which is a device such as a pump or vacuum pump, or at it is a device used to control, regulate and / or switch certain properties and / or functions of a device.
  • the system 2 comprises at least one position detector 6 associated with the device 4 for detecting the current installation orientation of the device 4 as well as a control and / or evaluation unit 10 responsive to the output signals 8 of the position detector 6.
  • control and / or evaluation unit 10 is designed to automatically check whether the device 4 may be operated in the detected position orientation, and optionally automatically determine under which conditions the device 4 is operable.
  • control and / or evaluation unit 10 may be designed to generate an error message in the event that it has been determined that the device 4 may not be operated in the detected positional orientation.
  • the error message can in particular be generated acoustically and / or optically and / or by means of electronic data transmission (for example in the form of an error telegram) and can be reproduced via a playback unit 18 which is connected downstream, for example, to the control and / or evaluation unit 10.
  • the control and / or evaluation unit 10 can also determine whether the permitted operation of the device 4 in the detected position orientation and under the relevant conditions corresponds to a normal or uncritical operation or represents a limiting case.
  • control and / or evaluation unit 10 can generate a particularly qualified warning message.
  • Such a warning message can in particular also be generated acoustically and / or optically and / or by electronic data transmission (for example in the form of an error telegram) and reproduced, for example, via a playback unit 18 connected downstream of the control and / or evaluation unit 10.
  • a playback unit 18 connected downstream of the control and / or evaluation unit 10.
  • one and the same display unit 18 can be used for the error message and the warning message.
  • separate playback units for the two messages are conceivable.
  • the determination made by the control and / or evaluation unit 10 of the conditions under which the device 4 is operable, in particular the determination of a power limit for the device 4, the determination of a quiescent current for an actively controlled magnetic bearing of the device 4 and / or the Determining a cooling of at least a portion of the device 4 include.
  • an acceleration sensor can be provided.
  • the device 4 may be, for example, a vacuum pump 20 and an auxiliary device 22 connected thereto, such as, in particular, a lubricant pump (cf. Fig. 3 to 6 ).
  • a position detector 6 of the vacuum pump 20 and a position detector 6 of the lubricant pump 22 may be assigned to monitor the positional orientation of the vacuum pump 20 and the positional orientation of the lubricant pump 22.
  • system 2 may include an input interface connected to the control and / or evaluation unit 10, via which a reference value relating to the positional orientation of the device 4 can be entered.
  • Fig. 2 shows a sectional view of a vacuum pump 20, namely a turbomolecular pump, as part of a device 4, in which the inventive system or the inventive method is applicable.
  • Fig. 3 is a lateral external view of this vacuum pump is shown, wherein also the rotary bearing is supplied via a laterally arranged next to the rotor shaft feed pump 110 with resources, which forms a further part of the device 4, in which the inventive system or the inventive method is applicable.
  • FIG. 4 is a partial sectional view of the vacuum pump according to Fig. 3 shown.
  • a sectional view of an exemplary embodiment of the vacuum pump according to Fig. 4 associated feed pump 110 is in the Fig. 5 played.
  • Fig. 6 shows a sectional view of a mouth region of two flow channels, which in a common flow of the vacuum pump according to Fig. 3 lead.
  • the vacuum pump shown comprises a pump inlet 70 surrounded by an inlet flange 68 as well as a plurality of pumping stages for conveying the gas present at the pump inlet 70 to a pump inlet 70 Fig. 2 not shown pump outlet.
  • the vacuum pump comprises a stator with a static housing 72 and a rotor arranged in the housing 72 with a rotor shaft 12 rotatably mounted about a rotation axis 14.
  • the vacuum pump is embodied as a turbomolecular pump and comprises a plurality of turbomolecular pump stages which are pump-connected in series with a plurality of turbomolecular rotor disks 16 connected to the rotor shaft 12 and a plurality of turbomolecular stator disks 26 arranged in the axial direction between the rotor disks 16 and fixed in the housing 72 held at a desired axial distance from each other are.
  • the rotor disks 16 and stator disks 26 provide in the scoop region 50 an axial pumping action directed in the direction of the arrow 58.
  • the vacuum pump also comprises three radially arranged pumping stages in series with one another, connected in series with each other.
  • the rotor-side part of the Holweck pump stages comprises a rotor hub 74 connected to the rotor shaft 12 and two cylinder shell-shaped Holweck rotor sleeves 76, 78 fastened to the rotor hub 74 and oriented coaxially with the axis of rotation 14 and nested in the radial direction.
  • two cylindrical jacket-shaped Holweck stator sleeves 80, 82 are provided, which are also oriented coaxially to the rotation axis 14 and are nested in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are each formed by the radial lateral surfaces opposite each other, forming a narrow radial Holweck gap, of a Holweck rotor sleeve 76, 78 and a Holweck stator sleeve 80, 82.
  • one of the pump-active surfaces is in each case formed smoothly-in the present case that of the Holweck rotor sleeve 76 or 78 -and the opposite pump-active surface of the Holweck stator sleeve 80, 82 has a structuring with helically around the rotation axis 14 in the axial direction extending grooves, in which is driven by the rotation of the rotor, the gas and thereby pumped.
  • the vacuum pump includes a drive motor 104 for rotationally driving the rotor whose rotor is formed by the rotor shaft 12.
  • a control unit 106 controls the motor 104.
  • the rotatable mounting of the rotor shaft 12 is effected by a designed as a rolling bearing pivot bearing 84 in the region of the pump outlet and a permanent magnet bearing 86 in the region of the pump inlet 70.
  • the permanent magnet bearing 86 comprises a rotor-side bearing half 88 and a stator bearing half 90, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings 92, 94, wherein the magnetic rings 92, 94 opposite to form a radial bearing gap 96.
  • an emergency or catch bearing 98 is provided, which is designed as an unlubricated roller bearing and runs empty in normal operation of the vacuum pump without touching and only with an excessive radial deflection of the rotor relative to the stator engages to a radial stop form for the rotor, which prevents a collision of the rotor-side structures with the stator-side structures.
  • the pivot bearing 84 is supplied with a resource such as a lubricant. It can, how Fig. 2 shows, in the region of the pivot bearing 84 on the rotor shaft 12, a conical spray nut 100 may be provided with an increasing to the pivot bearing 84 outside diameter, with at least one scraper of a plurality of with a resource such as a lubricant, impregnated absorbent discs 102 comprising resource storage is in sliding contact.
  • the resource is transferred by capillary action of the resource storage on the scraper to the rotating spray nut 100 and due to the centrifugal force along the spray nut 100 in the direction of increasing outer diameter of the spray nut 100 to the pivot bearing 84 out promoted, where there is, for example, a lubricating Function fulfilled.
  • FIG. 3 shown illustration is - as in Fig. 2 -
  • the inlet flange 68 of the pump directed upward and the axis of rotation 14 of in Fig. 3 not shown rotor shaft 12 is disposed at an angle of 0 degrees to the vertical. In this position, the pump is upright. Will the pump be against it turned upside down, so the inlet flange 68 down. The axis of rotation 14 is then at an angle to the vertical of 180 degrees.
  • the construction of the pump Fig. 3 corresponds to the construction of the pump of Fig. 2 , However, the pump is the Fig. 3 the rotary bearing 84 is supplied with operating means via a delivery pump 110 arranged laterally next to the rotor shaft 12, as with reference to FIGS Fig. 4 is carried out closer.
  • the feed pump 110 is designed to convey the operating medium into at least one feed 112, via which the operating medium is fed to the rotary bearing 84.
  • a first return 114 and a second return 116 are provided for returning the equipment from the pivot bearing 84 to the feed pump.
  • the first return 114 has laterally below the pivot bearing 84 a gap 118 which opens at its radially outer end into a first return passage 120, which is guided radially outwardly and downwardly to a first reservoir 122.
  • the supplied via the flow 112 resources enters the funnel-shaped memory 124 below the spray nut 100, as above with reference to Fig. 2 described that promotes equipment toward the rolling bearing 84, where it fulfills, for example, a lubricating function. From the roller bearing 84, the operating fluid drips off and, due to the effect of gravity, passes into the first reservoir 122 via the gap 118 and the first return passage 120.
  • Fig. 4 In the presentation of Fig. 4 is the pump as in the representations of Fig. 2 and 3 upright.
  • the in Fig. 4 not shown flange 68 is thus located at the top of the pump and the axis of rotation 14 of the rotor shaft 12th has an angle to the vertical of 0 °.
  • Such an orientation of the pump is also referred to below as a spatial position of 0 °.
  • the feed pump 110 has a first inlet 126, via which the operating medium can pass from the first reservoir 122 into a first working space 128 of the feed pump.
  • the first inlet 126 is formed in a partition wall 130, which separates the first reservoir 122 from the first working space 128.
  • the first inlet 126 is located in the spatial position of 0 ° at the substantially lowest point in the partition wall 130, so that the resource can reach the first working space 128 even at a low level in the first reservoir 122.
  • the feed pump 110 will be described with reference to FIGS Fig. 5 described in more detail.
  • the feed pump 110 is designed in the manner of a rotary vane pump and has a rotatable in a housing 132 about a rotational axis 134 rotor, which is hereinafter referred to as a conveyor rotor 136.
  • a conveyor rotor 136 In the conveyor rotor 136 radially movable slide 138 are arranged on centrifugal and spring force.
  • Inside the housing 132 is the first working space 128, which is spatially limited by the housing 132, the conveyor rotor 136 and the respective moving in the direction of rotation 140 of the conveyor rotor slide 138.
  • the conveying rotor 136 rotates in the conveying direction 140, the operating medium which has reached the first working space 128 via the first inlet 126 is conveyed by the conveying rotor via a first outlet 142 lying at 90 ° into a first feed channel 144 which opens into the feed 112 ( see. Fig. 6 ).
  • the second return 116 In the upright orientation of the feed pump, the second return 116 is inoperative. If the pump is turned upside down, so that the flange 68 (see. Fig. 3 ) is down and the rotation axis 14 forms an angle of 180 ° with the vertical, then the first return 114 is inoperative and the Operating fluid passes via the second return line 116 back to the feed pump 110, as will be described below.
  • the second return 116 has a second return passage 146, which, based on the spatial position of the pump of 0 ° corresponding to Fig. 4 away from a radially adjacent and above the pivot bearing 84 lying collecting region 148 for the resource away radially outwards and up to a second reservoir 150 is guided, which in turn is separated via the partition 130 of a further, second working chamber 152 of the feed pump 110.
  • a second inlet 154 is provided, via which the operating medium can pass from the second reservoir 150 into the second working space 152.
  • the second inlet 154 is located in an upside-down pump, ie in a spatial position of the pump of 180 °, in the lower part of the pump. The operating medium can therefore reach the second working chamber 152 even at a low level in the second reservoir 150.
  • the operating medium which has reached the second working space 152 is conveyed by the respective slide 138 when the conveying rotor 136 rotates in the direction of rotation 140 to a second outlet 156 arranged at 270 °.
  • the second outlet 156 opens into a second flow channel 158, which in turn opens like the first flow channel 144 in the flow 112.
  • a backflow prevention device 160 is arranged, which is designed to prevent that on the first flow channel 144 in the common flow 112 flowing fluid into the second flow channel 158 and, conversely, via the second supply channel 158 supplied operating medium in the first flow channel 144 passes.
  • the backflow prevention device 160 thus effectively ensures that no short circuit between the two flow channels 144, 158 occurs.
  • the backflow prevention device 160 is functionally configured in the manner of a pneumatic or-valve.
  • the backflow prevention device 160 forms in the mouth region of the two flow channels 144 and 158 an enlarged space region 162, in which a ball 164 is arranged, which can close one of the two flow channels 144, 158 in dependence on the flow of operating medium.
  • the ball 164 is pressed by an incoming from the first flow channel 144 resource flow against the mouth of the second flow channel 158 and thereby closes it.
  • the backflow prevention device 160 may be in the form of a non-return element or a shut-off element, such as a shut-off valve.
  • the backflow prevention device 160 may also be designed as a manually, gravitational, pressure or electrically driven element, which, depending on the vacuum pumping position, closes the first or second flow channel 144, 158 with a slide or flap (not shown).
  • Fig. 3 to 6 described pump at a position of the pump of 0 °, so in an upright pump as in Fig. 3 , the resources pass through the first return 114 to the feed pump 110.
  • the pump is upside down, that is to say when the pump is in a spatial position, in which the rotation axis 14 encloses an angle to the vertical of 180 °, the operating medium reaches the delivery pump 110 via the second return 116 from the rotary bearing 84.
  • the current installation orientation of the pump 20 and / or the installation orientation the auxiliary device 22 and the feed pump 110 are monitored accordingly.
  • at least one or more position detectors 6 can be assigned to the pump 20 or the auxiliary device 22 in the manner described above.
  • the delivery pump can also be provided, for example, with only one of the two returns 114, 116. Thus, it may be determined via the system 2 according to the invention, if necessary, whether the delivery pump 110 occupies a position such that the operating medium can reach the delivery pump 110 via the respective return.
  • Lubricant pumps are still often mounted rotated by 180 ° depending on the application, although appropriate delivery channels on the turbomolecular pump for both types of installation are available. However, the unused conveyor channels are often closed by seals.
  • a rotary vane pump with a lubricant sump for example, can be ensured by the inventive monitoring of the mounting orientation be recognized that an unfavorable orientation or misalignment and corresponding to a malfunction of the lubricant supply.
  • the determination of the conditions under which the vacuum pump 4 can be operated may include, inter alia, in particular the determination of a quiescent current dependent on the detected positional orientation for at least one in particular actively controlled magnetic bearing of the device 4.
  • Fig. 7 shows a purely exemplary sketched arrangement of various magnetic bearings (magnetic bearings) 170, 172 174 a pump 20 with drive motor 170, which is in particular a turbomolecular pump.
  • Fig. 8 shows Fig. 8 the bearing assembly according to Fig. 7 with horizontally oriented pump 20th
  • the so-called radial center of gravity magnetic bearing 172 carries in one in the Fig. 8 illustrated horizontal orientation of the pump 20 a majority of the rotor mass.
  • the entire rotor mass carried by the axial magnetic bearing 170 which accordingly has a significantly increased quiescent current.
  • a cooling depending on the respective area of the pump is possible in different ways.
  • heating of the magnetic bearing 172 forming a gravity bearing is often much more difficult to cool than would be possible in the area of the magnetic thrust bearing 170 or in the area of other radial bearings.
  • the pump 20 can therefore, within given temperature limits, pump at different orientations different amounts of gas until the speed or power is reduced when reaching warning thresholds or error limits.
  • the determination, carried out by the control and / or evaluation unit 10 of the system 2 according to the invention, of the conditions under which the device 4 can be operated can also determine a cooling of at least one region of the device 4 dependent on the detected positional orientation include.
  • Fig. 9 shows a schematic representation of an exemplary embodiment of a convection-cooled device 4, in which the system according to the invention is applicable.
  • the convection-cooled device 4 is oriented so that their cooling ribs 176 extend in the vertical direction.
  • the convection-cooled device 4 in the illustration according to Fig. 10 oriented so that their cooling fins 176 extend in the horizontal direction.
  • Such convection-cooled devices 4 must be freely circulated in the right direction to reach their full capacity.
  • cooling fins 176 in the horizontal direction extending cooling fins 176 (see. Fig. 10 ) lead to a lower heat transfer to the environment and thus to an earlier overheating of the device 4.
  • a common type of installation of vacuum pumps is also the flanging on the lid or doors of large vacuum process chambers. It is typically the goal to remove all relevant attachments together for easier maintenance and cleaning and store them so that all components are easily accessible. Often also loading and unloading openings are designed in such a way that pumps are mounted there. In certain cases, such a lid or door can be removed and stored for maintenance in another location or regularly folded back and forth during a plant cycle. Both cases result in the vacuum pump being in a positional orientation for this period, which does not permit operation or only with restrictions.
  • turbomolecular pumps with a lubricant supply are predominantly designed in such a way that they do not lose the lubricant filling at standstill, even outside the intended operating position, or the lubricant filling does not run into specific areas.
  • the knowledge of the current orientation offset the control and / or evaluation unit 10 of the system 2 (cf. Fig. 1 ), which may be integrated into the control electronics of the pump or may be provided separately therefrom, capable of rejecting starting requests, if necessary with an error message, so that the integrity of the pump and in particular its lubricant supply remains assured.
  • control and / or evaluation unit 10 of the system 2 according to the invention may be provided in the control electronics of the relevant device 4 or else separately therefrom.
  • the relevant conditions under which the device 4 is optionally operable at least partially by the control and / or evaluation unit 10 of the system 2 according to the invention itself induced or at least initiated.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
EP15151964.2A 2014-04-03 2015-01-21 Procédé et système pour la détermination et l'évaluation du sens d'encastrement d'un dispositif Active EP2927501B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014104747.8A DE102014104747A1 (de) 2014-04-03 2014-04-03 Verfahren und System zur Ermittlung und Bewertung der Einbauorientierung einer Einrichtung

Publications (2)

Publication Number Publication Date
EP2927501A1 true EP2927501A1 (fr) 2015-10-07
EP2927501B1 EP2927501B1 (fr) 2018-03-14

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CN108981866A (zh) * 2018-07-13 2018-12-11 北京东方计量测试研究所 一种基于航空发动机涡轮生产喷涂设备的气体流量校准系统及方法

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DE19520683A1 (de) * 1995-06-07 1996-12-12 Teves Gmbh Alfred Anordnung zur Erfassung einer Bewegung
WO2012089438A1 (fr) * 2010-12-30 2012-07-05 Endress+Hauser Gmbh+Co. Kg Procédé et dispositif pour aligner un appareil de mesure
CN201908851U (zh) * 2010-12-31 2011-07-27 清华大学 一种磁悬浮分子泵系统
WO2014026779A1 (fr) * 2012-08-17 2014-02-20 Hirschmann Automation And Control Gmbh Unité de commande électronique et procédé pour faire fonctionner une unité de commande électronique
WO2014068277A1 (fr) * 2012-10-30 2014-05-08 Edwards Limited Pompe à vide

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WO2018162290A1 (fr) * 2017-03-10 2018-09-13 KSB SE & Co. KGaA Procédé pour faire fonctionner une pompe de circulation à vitesse variable et pompe de circulation pour mettre en œuvre ce procédé
CN110382874A (zh) * 2017-03-10 2019-10-25 Ksb股份有限公司 用于运行转速可变的循环泵的方法以及用于实施该方法的循环泵
CN108981866A (zh) * 2018-07-13 2018-12-11 北京东方计量测试研究所 一种基于航空发动机涡轮生产喷涂设备的气体流量校准系统及方法

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