EP2906357B1 - Spray nozzle device and coating method - Google Patents

Spray nozzle device and coating method Download PDF

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Publication number
EP2906357B1
EP2906357B1 EP13807969.4A EP13807969A EP2906357B1 EP 2906357 B1 EP2906357 B1 EP 2906357B1 EP 13807969 A EP13807969 A EP 13807969A EP 2906357 B1 EP2906357 B1 EP 2906357B1
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EP
European Patent Office
Prior art keywords
spray
control
spray nozzle
coating
substrate
Prior art date
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Application number
EP13807969.4A
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German (de)
French (fr)
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EP2906357A1 (en
Inventor
Felix MASSA
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EV Group E Thallner GmbH
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EV Group E Thallner GmbH
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Publication of EP2906357A1 publication Critical patent/EP2906357A1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/26—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with means for mechanically breaking-up or deflecting the jet after discharge, e.g. with fixed deflectors; Breaking-up the discharged liquid or other fluent material by impinging jets
    • B05B1/262—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with means for mechanically breaking-up or deflecting the jet after discharge, e.g. with fixed deflectors; Breaking-up the discharged liquid or other fluent material by impinging jets with fixed deflectors
    • B05B1/267—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with means for mechanically breaking-up or deflecting the jet after discharge, e.g. with fixed deflectors; Breaking-up the discharged liquid or other fluent material by impinging jets with fixed deflectors the liquid or other fluent material being deflected in determined directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
    • B05B7/0807—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets
    • B05B7/0815—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets with at least one gas jet intersecting a jet constituted by a liquid or a mixture containing a liquid for controlling the shape of the latter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/12—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to conditions of ambient medium or target, e.g. humidity, temperature position or movement of the target relative to the spray apparatus
    • B05B12/122—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to conditions of ambient medium or target, e.g. humidity, temperature position or movement of the target relative to the spray apparatus responsive to presence or shape of target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
    • B05B12/18—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area using fluids, e.g. gas streams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/04—Discharge apparatus, e.g. electrostatic spray guns characterised by having rotary outlet or deflecting elements, i.e. spraying being also effected by centrifugal forces
    • B05B5/0426—Means for supplying shaping gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0406—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being air
    • B05D3/042—Directing or stopping the fluid to be coated with air

Definitions

  • the present invention relates to a plant, a spray nozzle and a method for homogeneous spray coating large-area substrates.
  • spin coating a substance to be applied is deposited on a substrate in liquid form. Thereafter, the substrate is rotated. The rotation creates a force on the liquid and distributes it over the entire surface of the substrate.
  • the spin coating is primarily used to coat flat surfaces with a photoresist or adhesive used in the semiconductor industry for bonding multiple substrates.
  • the advantage lies in the very precise, fast, efficient and cost-effective application of the material.
  • the disadvantage of the spin coating shows but with structured or very large substrates.
  • Structured substrates lead to a relatively inhomogeneous thickness of the layer to be applied, especially if the target layer thickness is smaller than the highest topographies on the substrate. It may happen that, due to the distributing from inside to outside material, only the center-oriented side walls of the topographies are coated with the material, whereas on the side facing away from the center, bubbles or voids in the material form.
  • Another disadvantage of the spin coating is mainly in the maximum size and the restriction with respect to the geometric shape of the substrates to be coated.
  • Standardized substrates predominantly wafers, in most cases silicon wafers, have a circular, ie radially symmetric, symmetry and a standardized diameter.
  • substrates with diameters of two to twelve inches were used in the past, substrates with diameters of up to eighteen inches in the semiconductor industry will probably be used in the future.
  • substrates so-called panels, have to be coated, which would be neither round nor fit into a spin coating system.
  • the panels are rectangular substrates whose length and / or width are often greater than two meters / are. Their thickness is in the millimeter to centimeter range. Similar problems arise for all types of substrates, mostly glass substrates used for windows, displays, windshields, etc.
  • the panels can, preferably even in one Assembly line process, fully coated with any material.
  • the decisive criterion for an optimal coating is above all the homogeneity of the layer thickness.
  • the panel must be coated with a material over the entire surface, which is not exactly small for the use of spray coating equipment.
  • the layer thickness of the deposited layer often has to be in the micro or even nanometer range.
  • the industry has already found different solutions for such cases.
  • several nozzles can be distributed along the entire width of a corresponding spray coating system, which always coat only a small strip of panels lying directly under them.
  • the US2010 / 0078496 shows a spray nozzle device in which a spray of a corresponding spray coating system is deflected.
  • WO 94/01222 discloses all features of the preamble of claim 1 and US 5645884 discloses all features of the preamble of claim 10.
  • the object of the present invention is to provide a spray nozzle device and a corresponding system and a method for operating a spray nozzle device, with which a more homogeneous coating is made possible.
  • the invention relates to a system and a method for optimally coating a large area, in particular panels, preferably solar panels, with a spray nozzle device according to the invention.
  • the intention is above all to produce a layer with an extremely homogeneous layer thickness over a surface of a substrate that is relatively large for coating systems, in particular with a length and / or width greater than half, preferably one to two meters.
  • the thickness of the substrates normal to the surface to be coated is especially in the millimeter to centimeter range.
  • the invention is based on the idea to use a plurality of aligned to a spray jet of the spray nozzle or alignable control nozzles, a spray or an aerosol, ie a mixture of liquid particles and / or solid particles in a gas as optimally as possible along a line, respectively strip-shaped surface, a rectangle, by means of a special whirling technique even over a circular surface, but generally along any surface, distribute or redirect targeted.
  • the substrate to be coated is moved by the control nozzles along a direction perpendicular to the spray direction or transverse to the spraying direction or transversely to the orientation of the spray nozzle in the direction R, ie pulled through under the spray mist.
  • a static, in particular non-rotatable, spray nozzle is used, at least in one direction transverse to the relative movement between the substrate to be coated and the spray nozzle, based on the system according to the invention.
  • the spray nozzle device has a control device with separately controlled control signals for controlling the control streams emerging from the control nozzles, in particular gaseous.
  • the control device can perform other tasks, in particular the control of the spray nozzle.
  • the control of the control nozzles and / or the spray nozzle is dependent on a speed of the relative movement of the substrate relative to the spray nozzle.
  • sensors are coupled to the control device, in particular level sensors for a reservoir with coating material and / or a reservoir with a gas filled for the admission of the control currents.
  • the spray and / or control nozzles are designed with voltages in the range 0-1000V, with preference 0-500V, more preferably 0-250V, most preferably 0-200V, most preferably 0-100V, most preferably 0-10V.
  • the gas pressure of the spray and / or control nozzles is between> 0-100 bar, preferably between> 0-50 bar, most preferably between> 0-25bar, most preferably between> 0-10 bar, most preferably between> 0-5 bar.
  • control signals in particular a phase shift, having a defined function
  • the phase shift occurs at least predominantly, more preferably completely, with destructive interference.
  • the sum of the control signals is constant, so that even a better and more uniform coating result can be achieved.
  • a "general, theoretically conceived function” is understood to be any function known to mathematics, which, however, makes sense and / or appears necessary due to physical and / or chemical and / or procedural and / or mathematical considerations to optimally perform the method according to the invention can. A superimposition of several functions is conceivable according to the invention.
  • the frequency of the control signals according to the invention is between> 0 and 500 Hz, with preference between> 0 and 400 Hz, more preferably between> 0 and 300 Hz, most preferably between> 0 and 200 Hz, most preferably between> 0 and 100 Hz, most preferably between> 0 and 50 Hz.
  • the coating agent used may be liquid and / or gaseous. Preferably, it is a liquid which are atomized by appropriate atomizers, preferably ultrasonic atomizer, in the spray nozzle.
  • the coating agent can be added to any additives in gaseous and / or liquid form.
  • the power of the ultrasonic atomizer according to the invention is between> 0 and 100 watts, with preference between> 0 and 50 watts, more preferably between> 0 and 25 watts, most preferably between> 0 and 10 watts, most preferably between> 0 and 5 Watt.
  • the coating agent is a paint.
  • the deposition rate of the coating agent according to the invention is between 1 and 1000 ⁇ l / s, with preference between 1 and 800 ⁇ l / s, more preferably between 1 and 600 ⁇ ml / s, most preferably between 1 and 500 ⁇ l / s.
  • the control of the control nozzles can be implemented by providing switchable mechanical and / or fluid-dynamic components for influencing the flow properties of the control currents by the control signals.
  • the spray nozzle according to the invention is improved by an embodiment according to the invention, in which the spray nozzle is static, in particular not rotatable, at least in a direction transverse to the relative movement between the substrate to be coated and the spray nozzle.
  • the spray nozzle device has fixing means with which the spray nozzle device can be fixed.
  • the spray nozzle in a direction transverse to the relative movement of the substrate relative to the spray nozzle on no degrees of freedom.
  • drive means or drive coupling means on the spray nozzle device can be dispensed with.
  • the spray nozzle is developed by including an ultrasonic atomizer and / or a Venturi nozzle.
  • control currents at an angle W of 30 ° to 170 °, in particular from 45 ° to 160 °, preferably from 90 ° to 120 ° to the spraying device S are aligned with the spray jet.
  • the angle of the alignment can be adjusted in the aforementioned limits, preferably controlled by the control device.
  • the opening angle ⁇ of the control and / or the opening angle ⁇ of the spray nozzle according to the invention is in particular less than 160 °, with preference less than 120 °, more preferably less than 80 °, most preferably less than 40 °, with very great preference less than 5 °.
  • the opening angles ⁇ and ⁇ may be different or the same from each other.
  • each opening angle of each control nozzle is individually and independently of the opening angles of all other control nozzles adjustable, in particular by the control device.
  • the distance H of the spray and / or control nozzles on the substrate to be coated according to the invention is between> 0 and 100cm, with preference between> 0 and 80cm, more preferably between> 0 and 60cm, most preferably between> 0 and 50cm, with greatest preference between> 0 and 40cm.
  • the layer thicknesses produced with the embodiment according to the invention are between 1 nm and 1 mm, with preference between 10 nm and 100 ⁇ m, more preferably between 50 nm and 50 ⁇ m, most preferably between 75 nm and 250 nm, most preferably around 110 nm.
  • the uniformity is between 1% and 30%, preferably between 1% and 25%, more preferably between 1% and 20%, most preferably between 1% and 15%, most preferably between 1 and 30% % and 10%, most preferably between 1% and 5%.
  • a system for coating a surface of a substrate with a, in particular single, above-described spray nozzle device comprising means for carrying out a relative movement between the substrate and the spray nozzle device transversely to the spray direction S.
  • the substrate is moved, while the spray nozzle device is at least in one direction transverse to the relative movement between the substrate to be coated and the spray nozzle, in particular completely, statically fixed in the system.
  • the system according to the invention is developed by the relative movement by translational movement of the substrate in the direction R takes place.
  • a plurality of sensors are located in front of and / or behind the spray nozzle device according to the invention.
  • the sensors are preferably arranged along a line normal to the direction of movement R of the substrate.
  • the task of the sensors consists in the measurement of physical and / or chemical properties of the surface and / or the layer which is present before and / or after the spray nozzle device according to the invention.
  • the sensors which scan the surface parts of the substrate before they are drawn under the spray nozzle device according to the invention are referred to as upstream sensors.
  • the sensors which scan the surface portions of the substrate after being coated by the spray nozzle device of the invention are referred to as downstream sensors.
  • the upstream sensors determine the condition of the surface of the surface parts before the coating.
  • the determined values can be stored digitally, preferably by means of a corresponding software of a control computer.
  • the detection of the determined physical quantities is carried out with preference with respect to a fixed relative to the substrate coordinate system.
  • the downstream sensors determine the state of the surface of the surface parts after the coating / coating.
  • the determined values can also be stored digitally.
  • the downstream sensors detect the layer produced by the spray nozzle device according to the invention and adjust the control signals of the spray nozzle device according to the invention until the desired homogeneity has been achieved. It uses optimization algorithms known to those skilled in the art. In the mentioned embodiment, therefore, it is a fully automatic, in-situ adaptation of the control signals of the spray nozzle device according to the invention.
  • the upstream and / or downstream sensors therefore form, at least during the calibration process, a control loop.
  • the sensors measure the condition of the layer.
  • the values determined therefrom adjust the control signals, which in turn influence the homogeneity of the layer.
  • the loop ends as soon as a user-specified threshold for homogeneity is reached.
  • the spray nozzle device is designed such that the spray jet detects the entire coating width of the surface of the substrate during a phase of the control signals.
  • a plurality of inventive spray nozzle device which are placed in series and / or in series, ie one behind the other and / or side by side.
  • a method for coating a surface of a substrate arranged opposite a spray nozzle device and transverse to the spray direction S by means of a spray jet containing a coating material in a spray direction S, the spray jet being deflected by at least two control currents directed transversely to the spray direction S onto the spray jet becomes.
  • control nozzles which are then arranged symmetrically with preference to the spray direction S.
  • control nozzles are placed in such a way and are controlled by functions according to the invention such that a spiral mist (English: vortex nebula) can be generated.
  • the inventive method is further developed by the control currents are controlled separately by control signals of a control device.
  • the substrate is moved during the coating of the surface, in particular translationally in the direction R, relative to the spray jet.
  • the spray jet is deflected alternately in different directions, in particular mirrored directions in the spray direction.
  • control nozzles By controlling the control nozzles according to the invention by means of corresponding control signals, a more homogeneous deposition of the material takes place on the surface of the substrate.
  • the spray nozzle device 15 consists of a spray nozzle 1, with a spray nozzle outlet 2 and at least two control nozzles 3 and 4, with corresponding control nozzle outlets 5 and 6.
  • the spray nozzle 1 is supplied with a coating material which is atomized.
  • the atomization is preferably carried out with an ultrasonic atomizer or by means of a Venturi nozzle within the spray nozzle 1.
  • the spray nozzle 1 generates at the spray nozzle outlet 2 a spray jet 14 directed in a spray direction S, in particular as a spray whose shape can be preset by a correspondingly designed spray nozzle outlet 2.
  • control nozzles 3, 4 each produce a gaseous control flow 12, 13 exiting at the control nozzle outlets 5 and 6.
  • the control flows 12, 13 are aligned or alignable with the spray jet 14.
  • the pressure, the sputtering rate, the average speed, the temperature, the electrical charge of the sputtered coating material and / or the gaseous control flows 12, 13 can be adjusted and changed by a control device 11, in particular software-controlled. It is also conceivable according to the invention to design the orientation of the control flows 12, 13 to be adjustable with respect to the spray jet 14, in particular by means for tilting and / or rotating the control nozzles 3, 4 relative to the spray nozzle 1.
  • a main idea according to the invention consists in the exact time control of the average speed and / or the pressure of the control flows 12, 13 which exit from the control nozzles 3, 4 via the control nozzle outlets 5, 6.
  • Control signals 9, 10 of a control device of the spray nozzle device 15 switch corresponding mechanical and / or fluid-dynamic components in the interior of the control nozzles 3, 4.
  • the mechanical and / or fluid-dynamic components not shown in detail may preferably be control valves, preferably proportional valves, switches Acting nebulizers and / or throttles. All have in common a temporally rapidly variable or controllable physical property which has a direct effect on the mean velocity and / or the pressure of the control flows 12, 13 and thus an effect on the control or deflection of the atomized coating gas 14.
  • Very complicated, empirically and / or theoretically determined or calculated functions less preferably sinusoidal signals and / or triangular signals, and possibly also (in particular combined with the aforementioned signals) square-wave signals are used according to the invention in order to control the control nozzles 5, 6, in particular by means in each case One of the control nozzles associated oscilloscopes 7, 8.
  • the two signals 9 and 10 to each other have a corresponding phase difference or phase shift, to ensure a time displacement of the control flows 12 and 13. It is preferred if the phase shift of the two control signals 9, 10 have a destructive interference. In this way, an extremely homogeneous coating is possible.
  • the FIG. 2 shows a timeline along which three different states of the spray nozzle device 15 according to the invention are shown.
  • a control flow 12 of the control nozzle 4 is used to deflect the spray jet 14 from the spray direction S to the left.
  • the time t1 shows the state in which the control signal 9 for controlling the control nozzle 4 has a maximum and the control signal 10 for controlling the control nozzle 3 has a minimum.
  • the states of the drive would correspond to a maximum value and a minimum value of the sine signal when coupling in a sine signal.
  • control signals 9, 10 are equal, in particular equal to 0, so that no or mutually canceling control flows 12, 13 act on the spray jet 14 at both control nozzles 5, 6.
  • the spray jet 14 can therefore move unhindered normal to the surface to be coated, ie in the spray direction S.
  • a continuous signal over the entire definition range is used in order to continuously change the flow properties, in particular mean velocity and / or volume flow, of the control flows 12 and 13. Accordingly, the in FIG. 2 3 points in time represent only sections of a, in the limit, infinite number of times at which the control signals 9 and 10 cause a continuous control of the control currents 12 and 13.
  • the spray jet 14 is alternately deflected to the left and to the right by the arrangement and orientation of the control flows 12, 13, which are opposite to the spray direction S, so that a homogenous distribution of the coating material on the surface of the substrate 17 results.
  • the embodiment according to the invention introduces softer control signals which produce a more homogeneous layer and are therefore superior to the prior art embodiments.
  • the control signals are therefore described from the mathematical point of view by continuous, preferably even continuously differentiable, even more preferably continuous, continuously differentiable functions.
  • the substrate 17 to be coated is moved under the spray jet 14 in a direction R, so that a coating of the substrate 17 along the entire substrate 17 can take place.
  • the invention makes a larger section A of the width B of the substrate 17 recorded, so that a comparatively large area can be homogeneously coated with a single spray device according to the invention, which is static with respect to the system.
  • the section A corresponds to the width B.
  • a distance H between the spray nozzle device 15 and a surface of the substrate 17 to be coated in the normal direction to the surface, that is to say in the direction of spray S, can be controlled in particular.
  • the distance H is in particular smaller than the section A.
  • FIG. 3 There are a plurality of sensors 18 in the direction of R before and / or behind the spray nozzle 15.
  • the sensors 18 are preferably aligned with each other normal to the direction of movement R of the substrate 17, in particular in spray direction at a uniform height, in particular between the spray 15 and the zu coating surface.
  • the task of the sensors 18 is to measure physical and / or chemical properties of the surface to be coated before and / or after the spray nozzle device 15 according to the invention.
  • the sensors 18 located upstream of the spray nozzle device 15 determine the state of the surface of the surface parts before the coating.
  • the sensors connected downstream of the spray nozzle device 15 determine the state of the surface or surface parts to be coated after the coating.

Description

Die vorliegende Erfindung betrifft eine Anlage, eine Sprühdüse und ein Verfahren zum homogenen Sprühbelacken großflächiger Substrate.The present invention relates to a plant, a spray nozzle and a method for homogeneous spray coating large-area substrates.

In der Halbleiterindustrie werden unterschiedliche Beschichtungsverfahren verwendet. Darunter sind vor allem die Schleuderbeschichtung und die Sprühbeschichtung hervorzuheben.In the semiconductor industry, different coating methods are used. Among them, especially the spin coating and the spray coating should be emphasized.

Bei der Schleuderbeschichtung wird eine aufzutragende Substanz auf einem Substrat in flüssiger Form abgeschieden. Danach wird das Substrat in Rotation versetzt. Die Rotation erzeugt eine Kraftwirkung auf die Flüssigkeit und verteilt diese über die gesamte Oberfläche des Substrats. Durch eine gezielte Wahl der Beschichtungsparameter, vorwiegend Rotationsgeschwindigkeit und Rotationsbeschleunigung des Trägersubstrats, können Schichtdicken von einigen Nanometern bis zu einigen Mikrometern, in Extremfällen sogar einigen Millimetern erzeugt werden. Die Schleuderbeschichtung wird vorwiegend zur Beschichtung ebener Flächen mit einem Photolack oder Kleber, der in der Halbleiterindustrie zum Verkleben mehrerer Substrate Verwendung finden, eingesetzt. Der Vorteil liegt in der sehr präzisen, schnellen, effizienten und kostengünstigen Auftragung des Materials. Der Nachteil der Schleuderbeschichtung zeigt sich allerdings bei strukturierten oder sehr großen Substraten. Strukturierte Substrate führen zu einer relativ inhomogenen Dicke der aufzutragenden Schicht, vor allem dann, wenn die Zielschichtdicke kleiner ist als die höchsten Topographien auf dem Substrat. Dabei kann es vorkommen, dass, auf Grund des sich von Innen- nach Außen verteilenden Materials, nur die zum Zentrum orientierten Seitenwände der Topographien mit dem Material beschichtet werden, wohingegen sich auf den, dem Zentrum abgewandten Seiten, Blasen oder Fehlstellen im Material bilden. Ein weiterer Nachteil der Schleuderbeschichtung besteht vor allem in der maximalen Größe und der Einschränkung bezüglich der geometrischen Form der zu beschichtenden Substrate. Genormte Substrate, vorwiegend Wafer, in den meisten Fällen Siliziumwafer, besitzen eine kreisrunde, also radialsymmetrische Symmetrie, und einen standardisierten Durchmesser. Wurden in der Vergangenheit Substrate mit Durchmessern von zwei bis zwölf Zoll verwendet, werden in Zukunft wohl Substrate mit Durchmessern von bis zu achtzehn Zoll in der Halbleiterindustrie Verwendung finden. Allerdings gibt es sehr viele Industriezweige, die darauf angewiesen sind, rechteckige Substrate zu beschichten, die um ein vielfaches größer sind als die genannten, radialsymmetrischen Substrate. Beispielsweise müssen für Anwendungen in der Solarindustrie Substrate, sogenannte Panels, beschichtet werden, die weder rund sind geschweige denn in eine Beschichtungsanlage zur Schleuderbeschichtung passen würden. Bei den Panels handelt es sich um rechteckige Substrate, deren Länge und/oder Breite nicht selten größer als zwei Meter ist/sind. Deren Dicke liegt im Millimeter bis Zentimeterbereich. Ähnliche Probleme ergeben sich für alle Arten von Substraten, meistens Glassubstrate, die für Fenster, Displays, Windschutzscheiben etc. Verwendung finden.In spin coating, a substance to be applied is deposited on a substrate in liquid form. Thereafter, the substrate is rotated. The rotation creates a force on the liquid and distributes it over the entire surface of the substrate. By a specific choice of the coating parameters, predominantly rotational speed and rotational acceleration of the carrier substrate, layer thicknesses of a few nanometers to a few micrometers, in extreme cases even a few millimeters can be generated. The spin coating is primarily used to coat flat surfaces with a photoresist or adhesive used in the semiconductor industry for bonding multiple substrates. The advantage lies in the very precise, fast, efficient and cost-effective application of the material. The disadvantage of the spin coating shows but with structured or very large substrates. Structured substrates lead to a relatively inhomogeneous thickness of the layer to be applied, especially if the target layer thickness is smaller than the highest topographies on the substrate. It may happen that, due to the distributing from inside to outside material, only the center-oriented side walls of the topographies are coated with the material, whereas on the side facing away from the center, bubbles or voids in the material form. Another disadvantage of the spin coating is mainly in the maximum size and the restriction with respect to the geometric shape of the substrates to be coated. Standardized substrates, predominantly wafers, in most cases silicon wafers, have a circular, ie radially symmetric, symmetry and a standardized diameter. Whereas substrates with diameters of two to twelve inches were used in the past, substrates with diameters of up to eighteen inches in the semiconductor industry will probably be used in the future. However, there are very many industries that rely on coating rectangular substrates that are many times larger than the aforementioned radially symmetric substrates. For example, for applications in the solar industry, substrates, so-called panels, have to be coated, which would be neither round nor fit into a spin coating system. The panels are rectangular substrates whose length and / or width are often greater than two meters / are. Their thickness is in the millimeter to centimeter range. Similar problems arise for all types of substrates, mostly glass substrates used for windows, displays, windshields, etc.

Eine Möglichkeit für die Beschichtung solcher Panels bietet die Sprühbeschichtung. Mit einer entsprechend ausgelegten Anlage zur Sprühbeschichtung können die Panels, mit Vorzug sogar in einem Fließbandprozess, vollflächig mit einem beliebigen Material beschichtet werden. Das entscheidende Kriterium für eine optimale Beschichtung ist dabei vor allem die Homogenität der Schichtdicke. Das Panel muss über die gesamte, für die Verwendung von Sprühbeschichtungsanlagen nicht gerade kleine, Fläche mit einem Material beschichtet werden. Die Schichtdicke der abgeschiedenen Schicht muss dabei nicht selten im Mikro- oder sogar Nanometerbereich liegen. Die Industrie hat für entsprechende Fälle bereits unterschiedliche Lösungen gefunden. So können mehrere Düsen entlang der gesamten Breite einer entsprechenden Sprühbeschichtungsanlage verteilt sein, die jeweils immer nur einen kleinen, direkt unter ihnen liegenden Streifen der Panels beschichten. Dabei tritt das Problem auf, dass die fein zerstäubten Partikel sich an den "Nahtstellen", an denen sich die Beschichtungsbereiche der Düsen überschneiden, agglomerieren und dementsprechend nicht mehr von einer homogenen Schichtdicke der Schicht gesprochen werden kann. Eine weitere, bereits umgesetzte Möglichkeit besteht darin, nur eine oder mehrere Düse zu verwenden, die sich aber entlang der gesamten Breite der Beschichtungsanlage über das zu beschichtende Panel, entlang einer Schiene, hin und her bewegt. Diese Variante erzeugt definitiv eine Schicht mit homogenerer Schichtdicke als im ersten genannten Fall ist aber verhältnismäßig langsam und nicht geeignet für hohen Durchsatz. Die Lagereinheiten, die Schiene, sowie der Schlitten, auf dem die Düse befestigt wird, sind entsprechend beweglich und damit anfällig für Abnutzung und hohe Ausfallswahrscheinlichkeiten. Durch die Bewegung der Düse entstehen entsprechende Vibrationen und/oder Turbulenzen, welche die Homogenität der Schicht massiv beeinflussen.One possibility for coating such panels is the spray coating. With a suitably designed system for spray coating, the panels can, preferably even in one Assembly line process, fully coated with any material. The decisive criterion for an optimal coating is above all the homogeneity of the layer thickness. The panel must be coated with a material over the entire surface, which is not exactly small for the use of spray coating equipment. The layer thickness of the deposited layer often has to be in the micro or even nanometer range. The industry has already found different solutions for such cases. Thus, several nozzles can be distributed along the entire width of a corresponding spray coating system, which always coat only a small strip of panels lying directly under them. In this case, the problem arises that the finely atomized particles agglomerate at the "seams" where the coating areas of the nozzles overlap and, accordingly, it is no longer possible to speak of a homogeneous layer thickness of the layer. Another possibility, which has already been implemented, is to use only one or more nozzles, which, however, move along the entire width of the coating system over the panel to be coated, along a rail, back and forth. This variant definitely produces a layer with a more homogeneous layer thickness than in the first mentioned case but is relatively slow and not suitable for high throughput. The bearing units, the rail, as well as the carriage on which the nozzle is mounted, are correspondingly mobile and thus prone to wear and high failure probabilities. The movement of the nozzle produces corresponding vibrations and / or turbulences which massively influence the homogeneity of the layer.

Die US2010/0078496 zeigt eine Sprühdüseneinrichtung, in der ein Sprühnebel einer entsprechenden Sprühbeschichtungsanlage umgelenkt wird.The US2010 / 0078496 shows a spray nozzle device in which a spray of a corresponding spray coating system is deflected.

WO 94/01222 offenbart alle Merkmale des Oberbegriffs von Anspruch 1 und US 5645884 offenbart alle Merkmale des Oberbegriffs von Anspruch 10. WO 94/01222 discloses all features of the preamble of claim 1 and US 5645884 discloses all features of the preamble of claim 10.

Aufgabe der vorliegenden Erfindung ist es, eine Sprühdüseneinrichtung sowie eine korrespondierende Anlage und ein Verfahren zum Betreiben einer Sprühdüseneinrichtung anzugeben, mit welchen eine homogenere Beschichtung ermöglicht wird.The object of the present invention is to provide a spray nozzle device and a corresponding system and a method for operating a spray nozzle device, with which a more homogeneous coating is made possible.

Diese Aufgabe wird mit den Merkmalen der Patentansprüche gelöst. Vorteilhafte Weiterbildungen der Erfindung sind in den Unteransprüchen angegeben. In den Rahmen der Erfindung fallen auch sämtliche Kombinationen aus zumindest zwei von in der Beschreibung, den Ansprüchen und/oder den Figuren angegebenen Merkmalen. In den angegebenen Wertebereichen sollen auch innerhalb der genannten Grenzen liegende Werte als Grenzwerte offenbart und in beliebiger Kombination beanspruchbar sein.This object is achieved with the features of the claims. Advantageous developments of the invention are specified in the subclaims. All combinations of at least two features specified in the description, the claims and / or the figures also fall within the scope of the invention. Within the specified value ranges, values lying within the stated limits should also be disclosed as limit values and be claimable in any combination.

Die Erfindung betrifft eine Anlage und ein Verfahren um eine große Fläche, insbesondere Panels, vorzugsweise Solarpanels, mit einer erfindungsgemäßen Sprühdüseneinrichtung optimal zu beschichten. Beabsichtigt ist vor allem die Erzeugung einer Schicht mit extrem homogener Schichtdicke über eine für Beschichtungsanlagen relativ große Fläche eines Substrats, insbesondere mit einer Länge und/oder Breite größer als halben, vorzugsweise ein bis zwei Meter. Die Dicke der Substrate normal zur zu beschichtenden Fläche liegt insbesondere im Millimeter bis Zentimeterbereich.The invention relates to a system and a method for optimally coating a large area, in particular panels, preferably solar panels, with a spray nozzle device according to the invention. The intention is above all to produce a layer with an extremely homogeneous layer thickness over a surface of a substrate that is relatively large for coating systems, in particular with a length and / or width greater than half, preferably one to two meters. The thickness of the substrates normal to the surface to be coated is especially in the millimeter to centimeter range.

Der Erfindung liegt dabei die Idee zu Grunde, mehrere auf einen Sprühstrahl der Sprühdüse ausgerichtete oder ausrichtbare Steuerungsdüsen zu verwenden, die einen Sprühnebel bzw. ein Aerosol, also ein Gemisch aus Flüssigkeitsteilchen und/oder Festteilchen in einem Gas, möglichst optimal entlang einer Linie, beziehungsweise streifenförmigen Fläche, einem Rechteck, mittels einer speziellen Wirbeltechnik sogar über eine kreisförmige Fläche, aber allgemein entlang einer beliebigen Fläche, verteilen beziehungsweise gezielt umlenken. Das zu beschichtende Substrat wird während der Ansteuerung des Sprühnebels durch die Steuerungsdüsen entlang einer zur Sprührichtung Normalen beziehungsweise quer zur Sprührichtung oder quer zur Ausrichtung der Sprühdüse translatorisch in Richtung R bewegt, also unter dem Sprühnebel durchgezogen.The invention is based on the idea to use a plurality of aligned to a spray jet of the spray nozzle or alignable control nozzles, a spray or an aerosol, ie a mixture of liquid particles and / or solid particles in a gas as optimally as possible along a line, respectively strip-shaped surface, a rectangle, by means of a special whirling technique even over a circular surface, but generally along any surface, distribute or redirect targeted. During the control of the spray, the substrate to be coated is moved by the control nozzles along a direction perpendicular to the spray direction or transverse to the spraying direction or transversely to the orientation of the spray nozzle in the direction R, ie pulled through under the spray mist.

Erfindungsgemäß wird eine zumindest in einer Richtung quer zur Relativbewegung zwischen dem zu beschichteten Substrat und der Sprühdüse bezogen auf die erfindungsgemäße Anlage statische, insbesondere nicht rotierbare, Sprühdüse verwendet. Dadurch wird die Konstruktion der Anlage billiger, die Anlage ist leichter zu warten und auch die Wartungsintervalle werden größer.According to the invention, a static, in particular non-rotatable, spray nozzle is used, at least in one direction transverse to the relative movement between the substrate to be coated and the spray nozzle, based on the system according to the invention. This makes the design of the plant cheaper, the plant is easier to maintain and also the maintenance intervals are getting bigger.

Gemäß der Erfindung ist vorgesehen, dass die Sprühdüseneinrichtung eine Steuerungseinrichtung mit, separat gesteuerten Steuersignalen für die Steuerung der aus den Steuerdüsen austretenden, insbesondere gasförmigen, Steuerungsströme aufweist. Erfindungsgemäß kann die Steuerungseinrichtung weitere Aufgaben, insbesondere die Steuerung der Sprühdüse, übernehmen. Weiterhin ist es erfindungsgemäß denkbar, dass die Steuerung der Steuerdüsen und/oder der Sprühdüse abhängig von einer Geschwindigkeit der Relativbewegung des Substrats gegenüber der Sprühdüse erfolgt. Weiterhin ist es erfindungsgemäß denkbar, dass Sensoren mit der Steuerungseinrichtung gekoppelt sind, insbesondere Füllstandssensoren für ein Reservoir mit Beschichtungsmaterial und/oder ein Reservoir mit einem für die Beaufschlagung der Steuerungsströme gefüllten Gas. Somit können die für die Beschichtung wesentlichen Bauteile und Ströme, insbesondere in Abhängigkeit zueinander, gesteuert werden, wodurch eine homogenere Beschichtung des Substrats ermöglicht wird. Die Sprüh- und oder Steuerdüsen werden mit Spannungen im Bereich 0-1000V, mit Vorzug 0-500V, mit größerem Vorzug 0-250V, mit größtem Vorzug 0-200V, mit allergrößtem Vorzug 0-100V, am bevorzugtesten mit 0-10V betrieben.According to the invention, it is provided that the spray nozzle device has a control device with separately controlled control signals for controlling the control streams emerging from the control nozzles, in particular gaseous. According to the invention, the control device can perform other tasks, in particular the control of the spray nozzle. Furthermore, it is conceivable according to the invention that the control of the control nozzles and / or the spray nozzle is dependent on a speed of the relative movement of the substrate relative to the spray nozzle. Furthermore, it is conceivable according to the invention that sensors are coupled to the control device, in particular level sensors for a reservoir with coating material and / or a reservoir with a gas filled for the admission of the control currents. Thus, the components and currents essential for the coating, in particular in dependence on one another, can be controlled, as a result of which a more homogeneous coating of the substrate is made possible. The spray and / or control nozzles are designed with voltages in the range 0-1000V, with preference 0-500V, more preferably 0-250V, most preferably 0-200V, most preferably 0-100V, most preferably 0-10V.

Der Gasstrom der Sprüh- und/oder Steuerdüse liegt zwischen 0-1000 l/min, mit Vorzug zwischen 0-500 l/min, mit größerem Vorzug zwischen 0-250 l/min, mit größtem Vorzug zwischen 0-200 l/min. Als Steuergas für die Steuerdüsen können generell alle Arten von Gasen und/oder Gasgemischen verwendet werden. Mit Vorzug handelt es sich allerdings um eines der folgenden Gase und/oder Gasgemische...

  • Stickstoff
  • Saubere, trockene Luft (engl.: clean dry air, CDA)
  • Kohlendioxid
  • Argon
  • Helium
  • Sauerstoff
  • Ein Inertgas
  • Ein Gasgemisch aus Inertgasen
The gas flow of the spray and / or control nozzle is between 0-1000 l / min, preferably between 0-500 l / min, more preferably between 0-250 l / min, most preferably between 0-200 l / min. As a control gas for the control nozzles, all types of gases and / or gas mixtures can generally be used. However, it is preferably one of the following gases and / or gas mixtures ...
  • nitrogen
  • Clean, dry air (CDA)
  • carbon dioxide
  • argon
  • helium
  • oxygen
  • An inert gas
  • A gas mixture of inert gases

Der Gasdruck der Sprüh- und/oder Steuerdüsen liegt zwischen >0-100 bar, mit Vorzug zwischen >0-50 bar, mit größtem Vorzug zwischen >0-25bar, mit größtem Vorzug zwischen >0-10 bar, mit allergrößtem Vorzug zwischen >0-5 bar.The gas pressure of the spray and / or control nozzles is between> 0-100 bar, preferably between> 0-50 bar, most preferably between> 0-25bar, most preferably between> 0-10 bar, most preferably between> 0-5 bar.

Soweit die Steuersignale als, insbesondere eine Phasenverschiebung, aufweisende Funktion definiert ausgebildet sind, erfolgt ein definierter, vorzugsweise weicherer Übergang zwischen der Beaufschlagung des Sprühstrahls mit dem jeweiligen Steuerungsstrom. Besonders vorteilhaft ist es, wenn die Phasenverschiebung zumindest überwiegend, noch bevorzugter vollständig, mit destruktiver Interferenz erfolgt. Somit ist die Summe der Steuersignale konstant, so dass noch ein besseres und gleichmäßigeres Beschichtungsergebnis erzielbar ist.As far as the control signals as defined, in particular a phase shift, having a defined function, there is a defined, preferably softer transition between the application of the spray with the respective control current. It is particularly advantageous if the phase shift occurs at least predominantly, more preferably completely, with destructive interference. Thus, the sum of the control signals is constant, so that even a better and more uniform coating result can be achieved.

Die Form/Funktion der Steuersignale ist vorzugsweise eine der folgenden, insbesondere mathematischen, Funktionen:

  • empirisch ermittelte und gespeicherte Funktion,
  • theoretisch definierte Funktion,
  • Sinusfunktion
  • Sägezahnfunktion
  • Rechteckfunktion
  • Diracsche Deltafunktion ("unendlich" schmales Rechtecksignal)
  • Exponentialfunktion
  • Polynomialfunktion
  • Logarithmusfunktion
Unter der, in der Liste an erster Stelle und daher bevorzugtesten "empirsch ermittelten und gespeicherten" Funktion, versteht man ein Steuersignal, welches erfindungsgemäß durch empirische Messungen der Schichtdicke oder Schichtdickenverteilung der Beschichtung optimiert hat und das nicht durch theoretische Überlegungen erstellt werden kann. Denkbar wäre beispielsweise, dass eine Anzahl an Substraten unter gewissen Anfangs- und Randbedingungen beschichtet wird. Eine nachfolgende Auswertung der Schicht erlaubt Rückschlüsse darauf, ob die verwendeten Steuersignale das gewünschte Ergebnis geliefert haben. Wenn dem nicht so ist, werden die Anfangs- und/oder Randbedingungen, also die Steuersignale entsprechend geändert und der Beschichtungsprozess wird wiederholt. Stellt man eine Verschlechterung fest, wird der Optimierungsprozess der Steuersignale entsprechend weitergeführt werden, bis das gewünschte optimierte Ergebnis vorliegt. Das gewünschte Steuersignal wird im allgemeinen nicht durch eine triviale mathematische Funktion, sondern durch eine beliebige, vorteilhafterweise bijektive Funktion, beschrieben werden und kann digital gespeichert werden.The form / function of the control signals is preferably one of the following, in particular mathematical, functions:
  • empirically determined and stored function,
  • theoretically defined function,
  • sine function
  • sawtooth
  • rectangle Tool
  • Dirac delta function ("infinite" narrow square wave signal)
  • exponential
  • polynomial function
  • logarithm
Under the list, in the first place and therefore most preferred "empirically determined and stored" function, one understands a control signal, which according to the invention has optimized by empirical measurements of the layer thickness or layer thickness distribution of the coating and can not be created by theoretical considerations. It would be conceivable, for example, that a number of substrates are coated under certain initial and boundary conditions. A subsequent evaluation of the layer allows conclusions to be drawn as to whether the control signals used have delivered the desired result. If this is not the case, the initial and / or boundary conditions, ie the control signals are changed accordingly and the coating process is repeated. If a deterioration is detected, the optimization process of the control signals will be continued accordingly until the desired optimized result is obtained. The desired control signal will generally not be described by a trivial mathematical function but by any advantageously bijective function, and may be stored digitally.

Unter einer "allgemeinen, theoretisch erdachten Funktion" versteht man jede der Mathematik bekannt Funktion, welche allerdings durch physikalische- und/oder chemische- und/oder verfahrenstechnische- und/oder mathematische Überlegungen sinnvoll und/oder notwendig erscheint, das erfindungsgemäße Verfahren optimal durchführen zu können. Auch eine Überlagerung mehrerer Funktionen ist erfindungsgemäß denkbar.A "general, theoretically conceived function" is understood to be any function known to mathematics, which, however, makes sense and / or appears necessary due to physical and / or chemical and / or procedural and / or mathematical considerations to optimally perform the method according to the invention can. A superimposition of several functions is conceivable according to the invention.

Bei allen Steuersignalen, insbesondere aber bei der empirisch ermittelten und gespeicherten" Funktion und der "allgemeinen, theoretisch erdachten Funktion" ist es das Ziel möglichst viele Störeinflüssen die zu einer ungleichmäßigen Beschichtung führen durch die Signalform auszugleichen. Mögliche Ursachen für eine ungleichmäßige Beschichtung können u.a. sein:

  • Fertigungstoleranzen unterschiedlicher Bauelemente der Sprüheinrichtung
  • Substrateigenschaften
  • Eigenschaften der Sprühdüse
  • Physikalische Effekte (die Ablenkung des Sprühstrahls in nicht linear zum Signalfunktion)
  • Eigenschaften des Sprühmaterials (z.B. Tröpfchengröße, Viskosität, etc...)
For all control signals, but especially for the empirically determined and stored "function and the" general, theoretically conceived function ", the goal is to compensate for as many disturbing influences as possible resulting in an uneven coating by the signal shape :
  • Manufacturing tolerances of different components of the spray
  • substrate properties
  • Properties of the spray nozzle
  • Physical effects (the deflection of the spray jet in non-linear to the signal function)
  • Properties of the spray material (eg droplet size, viscosity, etc ...)

Die Frequenz der erfindungsgemäßen Steuerungssignale liegt zwischen >0 und 500 Hz, mit Vorzug zwischen >0 und 400 Hz, mit größerem Vorzug zwischen >0 und 300 Hz, mit größtem Vorzug zwischen >0 und 200 Hz, mit allergrößtem Vorzug zwischen >0 und 100 Hz, am bevorzugtesten zwischen >0 und 50 Hz.The frequency of the control signals according to the invention is between> 0 and 500 Hz, with preference between> 0 and 400 Hz, more preferably between> 0 and 300 Hz, most preferably between> 0 and 200 Hz, most preferably between> 0 and 100 Hz, most preferably between> 0 and 50 Hz.

Das verwendete Belackungsmittel kann flüssig und/oder gasförmig sein. Bevorzugt handelt es sich um eine Flüssigkeit, die durch entsprechende Zerstäuber, mit Vorzug Ultraschallzerstäuber, in der Sprühdüse zerstäubt werden. Dem Belackungsmittel können beliebige Additive in gasförmiger und/oder flüssiger Form hinzugegeben werden.The coating agent used may be liquid and / or gaseous. Preferably, it is a liquid which are atomized by appropriate atomizers, preferably ultrasonic atomizer, in the spray nozzle. The coating agent can be added to any additives in gaseous and / or liquid form.

Die Leistung des Ultraschallzerstäubers liegt erfindungsgemäß zwischen >0 und 100 Watt, mit Vorzug zwischen >0 und 50 Watt, mit größerem Vorzug zwischen >0 und 25 Watt, mit größtem Vorzug zwischen >0 und 10 Watt, mit allergrößtem Vorzug zwischen >0 und 5 Watt.The power of the ultrasonic atomizer according to the invention is between> 0 and 100 watts, with preference between> 0 and 50 watts, more preferably between> 0 and 25 watts, most preferably between> 0 and 10 watts, most preferably between> 0 and 5 Watt.

Mit Vorzug handelt es sich bei dem Belackungsmittel um einen Lack. Die Abscheiderate des Belackungsmittels liegt erfindungsgemäß zwischen 1 und 1000 µl/s, mit Vorzug zwischen 1 und 800 µl/s, mit größerem Vorzug zwischen 1 und 600 µml/s, mit größtem Vorzug zwischen 1 und 500 µl/s. Auf besonders vorteilhafte Art und Weise ist die Ansteuerung der Steuerdüsen umsetzbar, indem durch die Steuersignale schaltbare mechanische und/oder fluiddynamische Bauteile zur Beeinflussung der Strömungseigenschaften der Steuerungsströme vorgesehen sind.It is preferred that the coating agent is a paint. The deposition rate of the coating agent according to the invention is between 1 and 1000 μl / s, with preference between 1 and 800 μl / s, more preferably between 1 and 600 μml / s, most preferably between 1 and 500 μl / s. In a particularly advantageous manner, the control of the control nozzles can be implemented by providing switchable mechanical and / or fluid-dynamic components for influencing the flow properties of the control currents by the control signals.

Die erfindungsgemäße Sprühdüse wird durch eine erfindungsgemäße Ausführungsform verbessert, bei der die Sprühdüse zumindest in einer Richtung quer zur Relativbewegung zwischen dem zu beschichtenden Substrat und der Sprühdüse bezogen auf die erfindungsgemäße Anlage statisch, insbesondere nicht rotierbar, ausgebildet ist. Insbesondere weist die Sprühdüseneinrichtung Fixiermittel auf, mit welchen die Sprühdüseneinrichtung fixierbar ist. Insbesondere während der Beschichtung weist die Sprühdüse in einer Richtung quer zur Relativbewegung des Substrats gegenüber der Sprühdüse keine Freiheitsgrade auf. Somit kann erfindungsgemäß auf Antriebsmittel oder Antriebskopplungsmittel an der Sprühdüseneinrichtung verzichtet werden.The spray nozzle according to the invention is improved by an embodiment according to the invention, in which the spray nozzle is static, in particular not rotatable, at least in a direction transverse to the relative movement between the substrate to be coated and the spray nozzle. In particular, the spray nozzle device has fixing means with which the spray nozzle device can be fixed. In particular, during the coating, the spray nozzle in a direction transverse to the relative movement of the substrate relative to the spray nozzle on no degrees of freedom. Thus, according to the invention, drive means or drive coupling means on the spray nozzle device can be dispensed with.

Die Sprühdüse wird weitergebildet, indem diese einen Ultraschallzerstäuber und/oder eine Venturidüse umfasst.The spray nozzle is developed by including an ultrasonic atomizer and / or a Venturi nozzle.

Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung ist vorgesehen, dass die Steuerungsströme in einem Winkel W von 30° bis 170°, insbesondere von 45° bis 160°, vorzugsweise von 90° bis 120° zur Sprüheinrichtung S auf den Sprühstrahl ausgerichtet sind. Bevorzugt lässt sich der Winkel der Ausrichtung in den vorgenannten Grenzen einstellen, vorzugsweise gesteuert über die Steuerungseinrichtung.According to a further advantageous embodiment of the invention, it is provided that the control currents at an angle W of 30 ° to 170 °, in particular from 45 ° to 160 °, preferably from 90 ° to 120 ° to the spraying device S are aligned with the spray jet. Preferably, the angle of the alignment can be adjusted in the aforementioned limits, preferably controlled by the control device.

Der Öffnungswinkel α der Steuer- und/oder der Öffnungswinkel β der Sprühdüse ist erfindungsgemäß insbesondere kleiner als 160°, mit Vorzug kleiner als 120°, mit größerem Vorzug kleiner als 80°, mit größtem Vorzug kleiner als 40°, mit allergrößtem Vorzug kleiner als 5°. Die Öffnungswinkel α und β können voneinander unterschiedlich oder gleich sein. Gemäß einer vorteilhaften Ausführungsform ist jeder Öffnungswinkel einer jeden Steuerdüse einzeln und unabhängig von den Öffnungswinkeln aller anderen Steuerdüsen einstellbar, insbesondere durch die Steuerungseinrichtung.The opening angle α of the control and / or the opening angle β of the spray nozzle according to the invention is in particular less than 160 °, with preference less than 120 °, more preferably less than 80 °, most preferably less than 40 °, with very great preference less than 5 °. The opening angles α and β may be different or the same from each other. According to an advantageous embodiment, each opening angle of each control nozzle is individually and independently of the opening angles of all other control nozzles adjustable, in particular by the control device.

Der Abstand H der Sprüh- und/oder Steuerungsdüsen über dem zu beschichtenden Substrat liegt erfindungsgemäß zwischen >0 und 100cm, mit Vorzug zwischen >0 und 80cm, mit größerem Vorzug zwischen >0 und 60cm, mit größtem Vorzug zwischen >0 und 50cm, mit allergrößtem Vorzug zwischen >0 und 40cm.The distance H of the spray and / or control nozzles on the substrate to be coated according to the invention is between> 0 and 100cm, with preference between> 0 and 80cm, more preferably between> 0 and 60cm, most preferably between> 0 and 50cm, with greatest preference between> 0 and 40cm.

Die mit der erfindungsgemäßen Ausführungsform erzeugten Schichtdicken liegen zwischen 1 nm und 1 mm, mit Vorzug zwischen 10 nm und 100 µm, mit größerem Vorzug zwischen 50 nm und 50 µm, mit größtem Vorzug zwischen 75 nm und 250 nm, mit allergrößtem Vorzug um die 110 nm.The layer thicknesses produced with the embodiment according to the invention are between 1 nm and 1 mm, with preference between 10 nm and 100 μm, more preferably between 50 nm and 50 μm, most preferably between 75 nm and 250 nm, most preferably around 110 nm.

Die Gleichmäßigkeit (engl.: uniformity) liegt zwischen 1 % und 30%, mit Vorzug zwischen 1% und 25%, mit größerem Vorzug zwischen 1% und 20%, mit größtem Vorzug zwischen 1 % und 15%, mit allergrößtem Vorzug zwischen 1 % und 10%, am bevorzugtesten zwischen 1 % und 5%.The uniformity is between 1% and 30%, preferably between 1% and 25%, more preferably between 1% and 20%, most preferably between 1% and 15%, most preferably between 1 and 30% % and 10%, most preferably between 1% and 5%.

Als eigenständige Erfindung wird auch eine Anlage zur Beschichtung einer Oberfläche eines Substrats mit einer, insbesondere einzigen, vorbeschriebenen Sprühdüseneinrichtung offenbart, wobei die Anlage Mittel zur Ausführung einer Relativbewegung zwischen dem Substrat und der Sprühdüseneinrichtung quer zur Sprührichtung S aufweist. Bevorzugt wird das Substrat bewegt, während die Sprühdüseneinrichtung zumindest in einer Richtung quer zur Relativbewegung zwischen dem zu beschichtenden Substrat und der Sprühdüse, insbesondere vollständig, statisch in der Anlage fixiert ist.As an independent invention, a system for coating a surface of a substrate with a, in particular single, above-described spray nozzle device is disclosed, wherein the system comprises means for carrying out a relative movement between the substrate and the spray nozzle device transversely to the spray direction S. Preferably, the substrate is moved, while the spray nozzle device is at least in one direction transverse to the relative movement between the substrate to be coated and the spray nozzle, in particular completely, statically fixed in the system.

Die erfindungsgemäße Anlage wird weitergebildet, indem die Relativbewegung durch translatorische Bewegung des Substrats in Richtung R erfolgt.The system according to the invention is developed by the relative movement by translational movement of the substrate in the direction R takes place.

In einer besonderen, einen eigenständigen Erfindungsaspekt betreffenden Ausführungsform befinden sich mehrere Sensoren vor und/oder hinter der erfindungsgemäßen Sprühdüseneinrichtung. Die Sensoren sind mit Vorzug entlang einer Line, normal zur Bewegungsrichtung R des Substrats, angeordnet. Die Aufgabe der Sensoren besteht in der Messung physikalischer und/oder chemischer Eigenschaften der Oberfläche und/oder der Schicht die vor- und/oder nach der erfindungsgemäßen Sprühdüseneinrichtung vorhanden ist.In a particular embodiment relating to an independent aspect of the invention, a plurality of sensors are located in front of and / or behind the spray nozzle device according to the invention. The sensors are preferably arranged along a line normal to the direction of movement R of the substrate. The task of the sensors consists in the measurement of physical and / or chemical properties of the surface and / or the layer which is present before and / or after the spray nozzle device according to the invention.

Die Sensoren, welche die Flächenteile des Substrats abtasten bevor diese unter die erfindungsgemäße Sprühdüseneinrichtung gezogen werden, werden als vorgeschaltete Sensoren bezeichnet. Die Sensoren, welche die Flächenteile des Substrats abtasten, nachdem diese von der erfindungsgemäßen Sprühdüseneinrichtung beschichtet wurden, werden als nachgeschaltete Sensoren bezeichnet.The sensors which scan the surface parts of the substrate before they are drawn under the spray nozzle device according to the invention are referred to as upstream sensors. The sensors which scan the surface portions of the substrate after being coated by the spray nozzle device of the invention are referred to as downstream sensors.

Die vorgeschalteten Sensoren ermitteln den Zustand der Oberfläche der Flächenteile vor der Belackung. Die ermittelten Werte können digital gespeichert werden, mit Vorzug mittels einer entsprechenden Software eines Steuercomputers. Die Erfassung der ermittelten physikalischen Größen erfolgt dabei mit Vorzug in Bezug auf ein gegenüber dem Substrat fixes Koordinatensystem.The upstream sensors determine the condition of the surface of the surface parts before the coating. The determined values can be stored digitally, preferably by means of a corresponding software of a control computer. The detection of the determined physical quantities is carried out with preference with respect to a fixed relative to the substrate coordinate system.

Die nachgeschaltenen Sensoren ermitteln den Zustand der Oberfläche der Flächenteile nach der Belackung/Beschichtung. Die ermittelten Werte können dabei ebenfalls digital gespeichert werden.The downstream sensors determine the state of the surface of the surface parts after the coating / coating. The determined values can also be stored digitally.

In einer noch bevorzugteren Ausführungsform ermitteln die nachgeschaltenen Sensoren die Schicht, welche durch die erfindungsgemäße Sprühdüseneinrichtung hergestellt wurde, und passen die Steuersignale der erfindungsgemäße Sprühdüseneinrichtung solange an, bis die gewünschte Homogenität erreicht wurde. Dabei werden Optimierungsalgorithmen verwendet, die dem Fachmann auf dem Gebiet bekannt sind. Bei der erwähnten Ausführungsform handelt es sich also um eine vollautomatische, in-situ Anpassung der Steuersignale der erfindungsgemäßen Sprühdüseneinrichtung.In a more preferred embodiment, the downstream sensors detect the layer produced by the spray nozzle device according to the invention and adjust the control signals of the spray nozzle device according to the invention until the desired homogeneity has been achieved. It uses optimization algorithms known to those skilled in the art. In the mentioned embodiment, therefore, it is a fully automatic, in-situ adaptation of the control signals of the spray nozzle device according to the invention.

Die vorgeschalteten und/oder nachgeschalteten Sensoren bilden daher, zumindest während des Kalibrierungsvorgangs, einen Regelkreis. Die Sensoren messen den Zustand der Schicht. Die daraus ermittelten Werte justieren die Steuersignale, welche wiederrum die Homogenität der Schicht beeinflussen. Der Regelkreis endet, sobald eine vom Benutzer vorgegebene Schwelle für die Homogenität erreicht ist.The upstream and / or downstream sensors therefore form, at least during the calibration process, a control loop. The sensors measure the condition of the layer. The values determined therefrom adjust the control signals, which in turn influence the homogeneity of the layer. The loop ends as soon as a user-specified threshold for homogeneity is reached.

Dem Fachmann auf dem Gebiet ist klar, dass das hier offenbarte Verfahren der Kalibrierung für die Einstellung einer homogenen Schicht sich auch für die Einstellung einer beliebigen, vom Benutzer vorgegebenen Schichtstruktur verwenden lässt.It will be apparent to those skilled in the art that the method of calibration for homogeneous layer adjustment disclosed herein also applies to Use the setting of any user-specified layer structure.

Bevorzugt ist die Sprühdüseneinrichtung so ausgebildet, dass der Sprühstrahl während einer Phase der Steuersignale die gesamte Beschichtungsbreite der Oberfläche des Substrats erfasst. Denkbar ist allerdings auch die Verwendung mehrerer erfindungsgemäßer Sprühdüseneinrichtung, die in Reihe und/oder in Serie, also hintereinander- und/oder nebeneinander, platziert werden.Preferably, the spray nozzle device is designed such that the spray jet detects the entire coating width of the surface of the substrate during a phase of the control signals. However, it is also conceivable to use a plurality of inventive spray nozzle device, which are placed in series and / or in series, ie one behind the other and / or side by side.

Als eigenständige Erfindung wird außerdem ein Verfahren zur Beschichtung einer gegenüber einer Sprühdüseneinrichtung und quer zur Sprührichtung S angeordneten Oberfläche eines Substrats mittels eines ein Beschichtungsmaterial enthaltenden Sprühstrahls in einer Sprührichtung S offenbart, wobei der Sprühstrahl durch mindestens zwei quer zur Sprührichtung S auf den Sprühstrahl ausgerichtete Steuerungsströme umgelenkt wird.As an independent invention, a method is also disclosed for coating a surface of a substrate arranged opposite a spray nozzle device and transverse to the spray direction S by means of a spray jet containing a coating material in a spray direction S, the spray jet being deflected by at least two control currents directed transversely to the spray direction S onto the spray jet becomes.

Erfindungsgemäß können daher auch mehr als zwei Steuerdüsen verwendet werden, die dann mit Vorzug symmetrisch um die Sprührichtung S angeordnet sind.According to the invention, therefore, more than two control nozzles can be used, which are then arranged symmetrically with preference to the spray direction S.

In einer besonderen Ausführungsform ist es sogar denkbar, nur eine Steuerdüse zu verwenden, welche den Sprühstrahl aus seiner "Ruheposition" durch ein entsprechendes, erfindungsgemäßes Steuersignal nur in eine Richtung ablenkt. Wird das Steuersignal dann wieder zurückgenommen, geht der Sprühstrahl wieder in seine "Ruheposition" über.In a particular embodiment, it is even conceivable to use only one control nozzle, which deflects the spray jet from its "rest position" by a corresponding, inventive control signal only in one direction. If the control signal is then withdrawn, the spray jet returns to its "rest position".

In einer weiteren, besonderen Ausführungsform sind die Steuerdüsen so platziert, und werden durch erfindungsgemäße Funktionen so angesteuert, dass ein Spiralnebel (engl.: Vortexnebel) erzeugt werden kann.
Das erfindungsgemäße Verfahren wird weitergebildet, indem die Steuerungsströme durch Steuersignale einer Steuerungseinrichtung separat gesteuert werden.In a further, particular embodiment, the control nozzles are placed in such a way and are controlled by functions according to the invention such that a spiral mist (English: vortex nebula) can be generated.
The inventive method is further developed by the control currents are controlled separately by control signals of a control device.

In Weiterbildung des erfindungsgemäßen Verfahrens wird das Substrat während der Beschichtung der Oberfläche, insbesondere translatorisch in Richtung R, relativ zu dem Sprühstrahl bewegt.In a further development of the method according to the invention, the substrate is moved during the coating of the surface, in particular translationally in the direction R, relative to the spray jet.

Besonders vorteilhaft ist es gemäß einer Ausführungsform des erfindungsgemäßen Verfahrens, wenn der Sprühstrahl alternierend in unterschiedliche, insbesondere an der Sprührichtung gespiegelte, Richtungen umgelenkt wird.According to one embodiment of the method according to the invention, it is particularly advantageous if the spray jet is deflected alternately in different directions, in particular mirrored directions in the spray direction.

Soweit Merkmale zur Sprühdüseneinrichtung offenbart werden, sollen diese auch als für die Vorrichtung offenbart gelten und soweit verfahrensmäßige Merkmale der Sprühdüseneinrichtung oder der Vorrichtung offenbart werden, sollen diese auch als Merkmale für das erfindungsgemäße Verfahren offenbart gelten und jeweils umgekehrt.As far as features are disclosed to Sprühdüseneinrichtung, they should also apply as disclosed for the device and as far as procedural features of the spray nozzle device or the device are disclosed, these should also apply as features disclosed for the inventive method and in each case vice versa.

Durch eine Ansteuerung der erfindungsgemäßen Steuerungsdüsen durch entsprechende Steuersignale, erfolgt eine homogenere Abscheidung des Materials an der Oberfläche des Substrats.By controlling the control nozzles according to the invention by means of corresponding control signals, a more homogeneous deposition of the material takes place on the surface of the substrate.

Weitere Vorteile, Merkmale und Einzelheiten der Erfindung ergeben sich aus der nachfolgenden Beschreibung bevorzugter Ausführungsbeispiele sowie anhand der Zeichnungen; diese zeigen jeweils in schematischer Ansicht:

  • Figur 1 eine schematische Darstellung einer erfindungsgemäßen Ausführungsform einer Sprühdüseneinrichtung und
  • Figur 2 eine schematische Darstellung des Betriebs der Sprühdüseneinrichtung,
  • Figur 3 eine schematische Darstellung einer erfindungsgemäßen Anlage von oben. und
  • Figur 4 eine schematische Darstellung einer erfindungsgemäßen Anlage in einer Seitenansicht.
Further advantages, features and details of the invention will become apparent from the following description of preferred embodiments and from the drawings; These show each in schematic view:
  • FIG. 1 a schematic representation of an embodiment of a spray nozzle device according to the invention and
  • FIG. 2 a schematic representation of the operation of the spray nozzle device,
  • FIG. 3 a schematic representation of a system according to the invention from above. and
  • FIG. 4 a schematic representation of a system according to the invention in a side view.

In den Figuren sind Vorteile und Merkmale der Erfindung mit diese jeweils identifizierenden Bezugszeichen gemäß Ausführungsformen der Erfindung gekennzeichnet, wobei Bauteile beziehungsweise Merkmale mit gleicher oder gleichwirkender Funktion mit identischen Bezugszeichen gekennzeichnet sind.In the figures, advantages and features of the invention with these respective identifying reference numerals according to embodiments of the invention are characterized, wherein components or features with the same or equivalent function are denoted by identical reference numerals.

Die Sprühdüseneinrichtung 15 besteht aus einer Sprühdüse 1, mit einem Sprühdüsenausgang 2 und mindestens zwei Steuerdüsen 3 und 4, mit entsprechenden Steuerdüsenausgängen 5 und 6.The spray nozzle device 15 consists of a spray nozzle 1, with a spray nozzle outlet 2 and at least two control nozzles 3 and 4, with corresponding control nozzle outlets 5 and 6.

Die Sprühdüse 1 wird mit einem Beschichtungsmaterial versorgt welches zerstäubt wird. Die Zerstäubung erfolgt dabei vorzugsweise mit einem Ultraschallzerstäuber oder mittels einer Venturidüse innerhalb der Sprühdüse 1. Die Sprühdüse 1 erzeugt am Sprühdüsenausgang 2 einen in einer Sprührichtung S gerichteten Sprühstrahl 14, insbesondere als Sprühnebel, dessen Form durch einen entsprechend konstruierten Sprühdüsenausgang 2 voreingestellt werden kann.The spray nozzle 1 is supplied with a coating material which is atomized. The atomization is preferably carried out with an ultrasonic atomizer or by means of a Venturi nozzle within the spray nozzle 1. The spray nozzle 1 generates at the spray nozzle outlet 2 a spray jet 14 directed in a spray direction S, in particular as a spray whose shape can be preset by a correspondingly designed spray nozzle outlet 2.

Die Steuerdüsen 3, 4 erzeugen je eine an den Steuerdüsenausgängen 5 und 6 austretende gasförmige Steuerungsströmung 12, 13. Die Steuerungsströmungen 12, 13 sind auf den Sprühstrahl 14 ausgerichtet oder ausrichtbar.The control nozzles 3, 4 each produce a gaseous control flow 12, 13 exiting at the control nozzle outlets 5 and 6. The control flows 12, 13 are aligned or alignable with the spray jet 14.

Der Druck, die Zerstäubungsrate, die mittlere Geschwindigkeit, die Temperatur, die elektrische Aufladung des zerstäubten Beschichtungsmaterials und/oder der gasförmigen Steuerungsströmungen 12, 13 können durch eine Steuerungseinrichtung 11, insbesondere softwaregesteuert, eingestellt und verändert werden. Auch ist es erfindungsgemäß denkbar, die Ausrichtung der Steuerungsströmungen 12, 13 zu dem Sprühstrahl 14 einstellbar auszugestalten, insbesondere durch Mittel zum Kippen und/oder rotieren der Steuerdüsen 3, 4 relativ zu der Sprühdüse 1.The pressure, the sputtering rate, the average speed, the temperature, the electrical charge of the sputtered coating material and / or the gaseous control flows 12, 13 can be adjusted and changed by a control device 11, in particular software-controlled. It is also conceivable according to the invention to design the orientation of the control flows 12, 13 to be adjustable with respect to the spray jet 14, in particular by means for tilting and / or rotating the control nozzles 3, 4 relative to the spray nozzle 1.

Ein erfindungsgemäßer Hauptgedanke besteht in der exakten zeitlichen Kontrolle der mittleren Geschwindigkeit und/oder des Drucks der Steuerungsströmungen 12, 13, die aus den Steuerdüsen 3,4 über die Steuerdüsenausgänge 5,6 austreten. Steuersignale 9, 10 einer Steuerungseinrichtung der Sprühdüseneinrichtung 15 schalten dabei entsprechende mechanische und/oder fluiddynamische Bauteile im Inneren der Steuerdüsen 3, 4. Bei den mechanischen und/oder fluiddynamischen, nicht näher gezeigten Bauteilen kann es sich vorzugsweise um Regelventile, mit Vorzug Proportionalventile, Schalter, Zerstäuber und/oder Drosseln handeln. Allen gemeinsam ist eine zeitlich rasch variierbare beziehungsweise steuerbare physikalische Eigenschaft, welche eine direkte Auswirkung auf die mittlere Geschwindigkeit und/oder den Druck der Steuerströmungen 12, 13 und damit eine Auswirkung auf die Ansteuerung beziehungsweise Umlenkung des zerstäubten Beschichtungsgases 14 hat.A main idea according to the invention consists in the exact time control of the average speed and / or the pressure of the control flows 12, 13 which exit from the control nozzles 3, 4 via the control nozzle outlets 5, 6. Control signals 9, 10 of a control device of the spray nozzle device 15 switch corresponding mechanical and / or fluid-dynamic components in the interior of the control nozzles 3, 4. The mechanical and / or fluid-dynamic components not shown in detail may preferably be control valves, preferably proportional valves, switches Acting nebulizers and / or throttles. All have in common a temporally rapidly variable or controllable physical property which has a direct effect on the mean velocity and / or the pressure of the control flows 12, 13 and thus an effect on the control or deflection of the atomized coating gas 14.

Erfindungsgemäß werden vor allem sehr komplizierte, empirisch und/oder theoretisch ermittelte bzw. berechnete Funktionen, weniger bevorzugt Sinussignale und/oder Dreieckssignale, gegebenenfalls auch (insbesondere kombiniert mit den vorgenannten Signalen) Rechtecksignale verwendet, um die Steuerdüsen 5,6 anzusteuern, insbesondere mittels jeweils einer der Steuerdüsen zugeordneten Oszilloskopen 7, 8. Mit Vorzug besitzen die beiden Signale 9 und 10 zueinander eine entsprechende Phasendifferenz beziehungsweise Phasenverschiebung, um eine zeitliche Versetzung der Steuerströmungen 12 und 13 zu gewährleisten. Dabei ist es bevorzugt, wenn die Phasenverschiebung der beiden Steuersignale 9, 10 eine destruktive Interferenz aufweisen. Auf diese Weise ist eine äußerst homogene Beschichtung möglich.Very complicated, empirically and / or theoretically determined or calculated functions, less preferably sinusoidal signals and / or triangular signals, and possibly also (in particular combined with the aforementioned signals) square-wave signals are used according to the invention in order to control the control nozzles 5, 6, in particular by means in each case One of the control nozzles associated oscilloscopes 7, 8. With preference, the two signals 9 and 10 to each other have a corresponding phase difference or phase shift, to ensure a time displacement of the control flows 12 and 13. It is preferred if the phase shift of the two control signals 9, 10 have a destructive interference. In this way, an extremely homogeneous coating is possible.

Die Figur 2 zeigt eine Zeitleiste, entlang welcher drei unterschiedliche Zustände der erfindungsgemäßen Sprühdüseneinrichtung 15 dargestellt sind. Zu einem ersten Zeitpunkt t1 wird ein Steuerungsstrom 12 der Steuerdüse 4 verwendet, um den Sprühstrahl 14 von der Sprührichtung S nach links abzulenken. Der Zeitpunkt t1 zeigt dabei den Zustand, bei dem das Steuersignal 9 zur Ansteuerung der Steuerdüse 4 ein Maximum und das Steuersignal 10 zur Ansteuerung der Steuerdüse 3 ein Minimum aufweist. Die Zustände der Ansteuerung würden bei der Einkoppelung eines Sinussignals beispielsweiße einem Maximalwert und einen Minimalwert des Sinussignals entsprechend.The FIG. 2 shows a timeline along which three different states of the spray nozzle device 15 according to the invention are shown. At a first time t1, a control flow 12 of the control nozzle 4 is used to deflect the spray jet 14 from the spray direction S to the left. The time t1 shows the state in which the control signal 9 for controlling the control nozzle 4 has a maximum and the control signal 10 for controlling the control nozzle 3 has a minimum. For example, the states of the drive would correspond to a maximum value and a minimum value of the sine signal when coupling in a sine signal.

Zu einem zweiten Zeitpunkt t2 sind die Steuersignale 9, 10 gleich, insbesondere gleich 0, so dass an beiden Steuerungsdüsen 5, 6 keine oder sich gegenseitig aufhebende Steuerungsströmungen 12, 13 auf den Sprühstrahl 14 einwirken. Der Sprühstrahl 14 kann sich daher ungehindert normal auf die zu beschichtende Oberfläche, also in Sprührichtung S, bewegen.At a second time t2, the control signals 9, 10 are equal, in particular equal to 0, so that no or mutually canceling control flows 12, 13 act on the spray jet 14 at both control nozzles 5, 6. The spray jet 14 can therefore move unhindered normal to the surface to be coated, ie in the spray direction S.

In einem dritten Zeitpunkt t3 tritt die zum Zeitpunkt t1 umgekehrte Situation ein, in welcher die Steuerdüse 3 die Ablenkung des Sprühstrahls 14 nach rechts bewirkt.At a third time t3, the situation reversed at time t1 occurs, in which the control nozzle 3 causes the deflection of the spray jet 14 to the right.

Erfindungsgemäß wird ein auf dem gesamten Definitionsbereich kontinuierliches Signal verwendet, um die Strömungseigenschaften, insbesondere mittlere Geschwindigkeit und/oder Volumenstrom, der Steuerungsströme 12 und 13 kontinuierlich zu ändern. Dementsprechend stellen die in Figur 2 dargestellten drei Zeitpunkte nur Ausschnitte aus einer, im Grenzfall unendlichen, Anzahl von Zeitpunkten dar, zu welchen die Steuerungssignale 9 und 10 eine kontinuierliche Steuerung der Steuerungsströme 12 und 13 bewirken.According to the invention, a continuous signal over the entire definition range is used in order to continuously change the flow properties, in particular mean velocity and / or volume flow, of the control flows 12 and 13. Accordingly, the in FIG. 2 3 points in time represent only sections of a, in the limit, infinite number of times at which the control signals 9 and 10 cause a continuous control of the control currents 12 and 13.

Mit anderen Worten: Der Sprühstrahl 14 wird durch die bezogen auf die Sprührichtung S als Spiegelachse gegenüberliegende Anordnung und Ausrichtung der Steuerungsströme 12, 13 alternierend nach links und rechts abgelenkt, so dass sich eine homogene Verteilung des Beschichtungsmaterials auf der Oberfläche des Substrats 17 ergibt.In other words, the spray jet 14 is alternately deflected to the left and to the right by the arrangement and orientation of the control flows 12, 13, which are opposite to the spray direction S, so that a homogenous distribution of the coating material on the surface of the substrate 17 results.

Durch die erfindungsgemäße Ausführungsform werden weichere Steuersignale eingeführt, welche eine homogenere Schicht erzeugen und damit den Ausführungsformen des Stands der Technik überlegen sind. Die Steuersignale werden daher vom mathematischen Standpunkt aus durch stetige, mit Vorzug sogar stetig differenzierbare, mit noch größerem Vorzug kontinuierliche, stetig differenzierbare Funktionen beschrieben.The embodiment according to the invention introduces softer control signals which produce a more homogeneous layer and are therefore superior to the prior art embodiments. The control signals are therefore described from the mathematical point of view by continuous, preferably even continuously differentiable, even more preferably continuous, continuously differentiable functions.

Das zu beschichtende Substrat 17 wird während der erfindungsgemäßen Ansteuerung der Steuerungsdüsen 3 und 4 unter dem Sprühstrahl 14 in einer Richtung R hindurchgefahren, sodass eine Beschichtung des Substrats 17 entlang des ganzen Substrats 17 erfolgen kann. Durch die Erfindung wird darüber hinaus ein größerer Abschnitt A der Breite B des Substrats 17 erfasst, so dass mit einer einzigen erfindungsgemäßen Sprüheinrichtung, die bezogen auf die Anlage statisch ist, eine vergleichsweise große Fläche homogen beschichtet werden kann. Insbesondere entspricht der Abschnitt A der Breite B.
Ein Abstand H zwischen der Sprühdüseneinrichtung 15 und einer zu beschichtenden Fläche des Substrats 17 in Normalrichtung zur Fläche, also in Sprührichtung S, ist insbesondere steuerbar. Der Abstand H ist insbesondere kleiner als der Abschnitt A.During the activation of the control nozzles 3 and 4 according to the invention, the substrate 17 to be coated is moved under the spray jet 14 in a direction R, so that a coating of the substrate 17 along the entire substrate 17 can take place. In addition, the invention makes a larger section A of the width B of the substrate 17 recorded, so that a comparatively large area can be homogeneously coated with a single spray device according to the invention, which is static with respect to the system. In particular, the section A corresponds to the width B.
A distance H between the spray nozzle device 15 and a surface of the substrate 17 to be coated in the normal direction to the surface, that is to say in the direction of spray S, can be controlled in particular. The distance H is in particular smaller than the section A.

Gemäß Figur 3 befinden sich mehrere Sensoren 18 in Richtung R vor und/oder hinter der Sprühdüseneinrichtung 15. Die Sensoren 18 sind mit Vorzug fluchtend zueinander normal zur Bewegungsrichtung R des Substrats 17 angeordnet, insbesondere in Sprührichtung auf einer einheitlichen Höhe, insbesondere zwischen der Sprüheinrichtung 15 und der zu beschichtenden Fläche.According to FIG. 3 There are a plurality of sensors 18 in the direction of R before and / or behind the spray nozzle 15. The sensors 18 are preferably aligned with each other normal to the direction of movement R of the substrate 17, in particular in spray direction at a uniform height, in particular between the spray 15 and the zu coating surface.

Die Aufgabe der Sensoren 18 besteht in der Messung physikalischer und/oder chemischer Eigenschaften der zu beschichtenden Fläche vor und/oder nach der erfindungsgemäßen Sprühdüseneinrichtung 15.The task of the sensors 18 is to measure physical and / or chemical properties of the surface to be coated before and / or after the spray nozzle device 15 according to the invention.

Die der Sprühdüseneinrichtung 15 vorgeschalteten Sensoren 18 ermitteln den Zustand der Oberfläche der Flächenteile vor der Beschichtung.The sensors 18 located upstream of the spray nozzle device 15 determine the state of the surface of the surface parts before the coating.

Die der Sprühdüseneinrichtung 15 nachgeschalteten Sensoren ermitteln den Zustand der zu beschichtenden Fläche oder Flächenteile nach der Beschichtung.The sensors connected downstream of the spray nozzle device 15 determine the state of the surface or surface parts to be coated after the coating.

Sprühdüseneinrichtung und Verfahren zum BeschichtenSpray nozzle device and method for coating BezugszeichenlisteLIST OF REFERENCE NUMBERS

11
Sprühdüsespray nozzle
22
SprühdüsenausgangSprühdüsenausgang
33
Steuerdüsesteering
44
Steuerdüsesteering
55
SteuerdüsenausgangControl nozzle exit
66
SteuerdüsenausgangControl nozzle exit
77
Oszilloskoposcilloscope
88th
Oszilloskoposcilloscope
99
Steuersignalcontrol signal
1010
Steuersignalcontrol signal
1111
Steuerungseinrichtungcontrol device
1212
Steuerungsströmungcontrol flow
1313
Steuerungsströmungcontrol flow
1414
Sprühstrahlspray
1515
Sprühdüseneinrichtungspray nozzle
1717
Substratsubstratum
1818
Sensorensensors
HH
Abstand zwischen Sprühdüse und Substrat.Distance between spray nozzle and substrate.
RR
Bewegungsrichtungmovement direction
αα
Öffnungswinkelopening angle
ββ
Öffnungswinkelopening angle
AA
Abschnittsection
BB
Breitewidth

Claims (12)

  1. A spray nozzle apparatus for spraying a spray jet (14) which contains a coating material in one spray direction S for coating of a surface which is located in the spray direction S opposite the spray nozzle apparatus (16) transversely to the spray direction S with the following:
    - a spray nozzle (1) for spraying the spray jet (14) from a spray nozzle outlet (2) of the spray nozzle (1),
    - at least two control nozzles (3, 4) each with a control nozzle outlet (5, 6) which is aligned or can be aligned to the spray jet (14) transversely to the spray direction S for acting on the spray jet (14) and deflecting it by means of a control flow (12, 13) emerging from the control nozzle outlet (5, 6),
    characterized in that there is one control apparatus (11) with separately controlled control signals (9, 10) for control of the control flows (12, 13), wherein the frequency of the control signals (9, 10) is between >0 and 500 Hz.
  2. The spray nozzle apparatus as claimed in Claim 1, wherein the, especially software-supported, control apparatus (11) is made to control the gaseous control flows (12) emerging from the control nozzles (3, 4).
  3. The spray nozzle apparatus as claimed in one of the preceding claims, wherein the control signals (9, 10) are made as functions, in particular an empirically determined or theoretically defined function, which have especially one phase shift, preferably at least predominantly, still more preferably completely with destructive interference.
  4. The spray nozzle apparatus as claimed in one of the preceding claims, wherein the control nozzles (3, 4) have mechanical and/or fluid dynamic components which can be switched by the control signals to influence the flow properties of the control flows (12, 13).
  5. The spray nozzle apparatus as claimed in one of the preceding claims, wherein the spray nozzle (1) is made static, especially unable to rotate, at least in one direction transversely to the relative motion between the substrate which is to be coated and the spray nozzle (1) relative to the system as claimed in the invention.
  6. The spray nozzle apparatus as claimed in one of the preceding claims, wherein the spray nozzle (1) comprises an ultrasonic atomizer and/or a Venturi nozzle.
  7. The spray nozzle apparatus as claimed in one of the preceding claims, wherein the control flows (12, 13) are aligned at an angle W from 30° to 150°, in particular from 45° to 135°, preferably from 60° to 120°, to the spray direction S to the spray jet (14).
  8. A system for coating of a surface of a substrate with an, especially single, spray nozzle apparatus (16) as claimed in one of the preceding claims, which has means for executing relative motion between the substrate and the spray nozzle apparatus (16) transversely to the spray direction S.
  9. The system as claimed in Claim 8, wherein the relative motion takes place by translational movement of the substrate.
  10. A method for spray coating of a substrate surface which is located opposite a spray nozzle apparatus (16) and transversely to the spray direction S by means of a spray jet (14) which contains a coating material, which is a lacquer, in one spray direction S, the spray jet (14) being deflected by at least two control flows (12, 13) aligned to the spray jet (14) transversely to the spray direction S, whereby the control of the control flows (12, 13) takes place separately each with a control signal (9,10) controlled by a control apparatus, characterized in that the spray nozzle apparatus is a static spray nozzle apparatus.
  11. The method as claimed in Claim 10, the substrate being moved relative to the spray jet (14) during the coating of the surface, especially in translation,
  12. The method as claimed in Claim 10 or 11, wherein the spray jet is deflected in alternation in different directions which are reflected back especially on the spray direction S.
EP13807969.4A 2012-12-27 2013-12-11 Spray nozzle device and coating method Active EP2906357B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012113124.4A DE102012113124A1 (en) 2012-12-27 2012-12-27 Spray nozzle device and method for coating
PCT/EP2013/076269 WO2014102063A1 (en) 2012-12-27 2013-12-11 Spray nozzle device and coating method

Publications (2)

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EP2906357A1 EP2906357A1 (en) 2015-08-19
EP2906357B1 true EP2906357B1 (en) 2016-08-03

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US (1) US9878334B2 (en)
EP (1) EP2906357B1 (en)
JP (1) JP6548580B2 (en)
KR (1) KR102225076B1 (en)
CN (1) CN104884176B (en)
DE (1) DE102012113124A1 (en)
WO (1) WO2014102063A1 (en)

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US10562065B1 (en) * 2015-11-03 2020-02-18 Newtech Llc Systems and methods for application of polysilazane and fluoroacrylate coating compositions
US11590523B2 (en) * 2020-02-04 2023-02-28 Prince Mohammad Bin Fahd University Smart fountain with proximity sensors and a dry closed loop system layout
DE102020204132A1 (en) 2020-03-30 2021-09-30 Robert Bosch Gesellschaft mit beschränkter Haftung Media output device and method of operating a media output device
CN111957484B (en) * 2020-07-14 2022-04-05 山东垚鑫时代装饰工程有限公司 Decorative body processingequipment with unsmooth decoration pattern stereoplasm skin surface

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KR102225076B1 (en) 2021-03-09
CN104884176B (en) 2018-05-04
WO2014102063A1 (en) 2014-07-03
JP6548580B2 (en) 2019-07-24
DE102012113124A1 (en) 2014-07-03
EP2906357A1 (en) 2015-08-19
US20150314308A1 (en) 2015-11-05
KR20150099728A (en) 2015-09-01
CN104884176A (en) 2015-09-02
JP2016507365A (en) 2016-03-10
US9878334B2 (en) 2018-01-30

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