EP2880723B1 - Pumpeinrichtung zum pumpen eines verstarkenden lasermediums - Google Patents

Pumpeinrichtung zum pumpen eines verstarkenden lasermediums Download PDF

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EP2880723B1
EP2880723B1 EP13756283.1A EP13756283A EP2880723B1 EP 2880723 B1 EP2880723 B1 EP 2880723B1 EP 13756283 A EP13756283 A EP 13756283A EP 2880723 B1 EP2880723 B1 EP 2880723B1
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laser
axis
optical component
plane
cylinder
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EP2880723A1 (de
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Daniel Kopf
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements
    • G02B27/0983—Reflective elements being curved
    • H—ELECTRICITY
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    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0407—Liquid cooling, e.g. by water
    • H—ELECTRICITY
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    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/0602—Crystal lasers or glass lasers
    • H01S3/0606—Crystal lasers or glass lasers with polygonal cross-section, e.g. slab, prism
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/0619—Coatings, e.g. AR, HR, passivation layer
    • H01S3/0621—Coatings on the end-faces, e.g. input/output surfaces of the laser light
    • H01S3/0623—Antireflective [AR]
    • H—ELECTRICITY
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    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1123—Q-switching
    • H01S3/117—Q-switching using intracavity acousto-optic devices
    • H—ELECTRICITY
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    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H01S3/163—Solid materials characterised by a crystal matrix
    • H01S3/164—Solid materials characterised by a crystal matrix garnet
    • H01S3/1643—YAG
    • H—ELECTRICITY
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    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H01S3/163—Solid materials characterised by a crystal matrix
    • H01S3/1671—Solid materials characterised by a crystal matrix vanadate, niobate, tantalate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H01S3/17—Solid materials amorphous, e.g. glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094049—Guiding of the pump light
    • H01S3/094057—Guiding of the pump light by tapered duct or homogenized light pipe, e.g. for concentrating pump light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1123—Q-switching
    • H01S3/115—Q-switching using intracavity electro-optic devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0071—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031—Edge-emitting structures
    • H01S5/4043—Edge-emitting structures with vertically stacked active layers
    • H01S5/405—Two-dimensional arrays

Definitions

  • the invention relates to a side-pumped solid-state laser with a pumping device for pumping a reinforcing laser medium, comprising a radiation source with a plurality of laser diodes emitting laser beams having parallel, in the direction of a z-axis beam axes and in the direction of a perpendicular to z Axially stationary x-axis diverge at least twice as much as in the direction of a right angle to the z-axis and perpendicular to the x-axis y-axis, and at least one optical component having at least one cylindrical surface with which at least a portion of the emitted from the laser diodes Laser beams interacts.
  • laser diodes are being used more frequently in recent times instead of conventional flash lamps.
  • a solid-state laser pumped in this way is for example in Errico Armandillo and Callum Norrie: "Diode-pumped high-efficiency high-brightness Q-switched ND: YAG slab laser", OPTICS LETTERS, Vol. 15, August 1, 1997, pages 1168 to 1170 described.
  • the individual emitters of such a bar each emit a laser beam, which in the direction of a so-called “fast-axis", which is referred to in this document as the x-axis, a significantly larger emission angle than in a direction perpendicular thereto direction of a so-called “slow-axis ", which is referred to in this document as the y-axis.
  • the divergence in the y direction is +/- 5 ° and the divergence in the x direction is +/- 33 °.
  • the beam axes of the laser beams of Laser diodes are parallel to each other and parallel to a z-axis perpendicular to the x- and y-axis.
  • laser diode stacks which are also referred to as laser diode stack
  • a plurality of such bars with their broad sides and / or narrow sides are arranged side by side.
  • a commercially available laser diode stack consists, for example, of 8 ingots arranged next to one another in the x-direction, each having 40 individual emitters spaced apart in the y direction, the emitted peak optical power being 2,400 W at a wavelength of 808 nm from an emitting surface of 10 mm ⁇ 11.9 mm , Other numbers of ingots and / or single emitters are also known.
  • the laser radiation emitted by such a laser diode stack thus diverges greatly, as a result of which the imaging with optical components with which the laser radiation interacts encounters limits with regard to aperture and imaging quality.
  • a microlens in the form of a cylindrical lens in front of the laser diodes of a respective billet.
  • the cylinder axes of the microlenses are aligned in the y-direction so that the strong divergence in the x-direction is reduced, e.g. below 1 °.
  • the subsequent optics for imaging the laser radiation into the amplifying laser medium is substantially simplified.
  • the use of such "fast-axis-collimation" microlenses leads to increased material and assembly costs (due to narrow tolerance requirements) and to performance losses of about 10%.
  • EP 0 717 476 A1 discloses an arrangement for focusing the radiation of a laser diode stack onto an optical fiber by means of an optical component having an entrance surface, an exit exit surface and a curved reflection surface.
  • the object of the invention is to provide a side-pumped solid-state laser with an advantageous pumping device of the type mentioned, which allows a compact design at a high efficiency. This is achieved according to the invention with the features of claim 1.
  • the cylindrical surface extends parallel to the x-axis and is curved in the y-z plane, ie in a plane perpendicular to the x-axis.
  • the cylindrical surface thus has an imaging, in particular collecting effect in the y-z plane (ie with respect to the "slow-axis") but not in the x-z plane (ie with respect to the "fast-axis").
  • the laser radiation emitted by a respective laser diode as a laser beam with a cone of radiation, within which 95% of the total power emitted by the laser diode laser radiation, the intersecting lines of the shell of the radiation cone with a plane parallel to the yz plane and through the The beam axis extending plane hereinafter referred to as referred to the yz plane edge rays of the laser beam.
  • the emission angle of these marginal rays corresponds to half the total opening angle of the radiation cone in the plane lying parallel to the y-z plane and passing through the beam axis. The same applies to the marginal rays of the laser beam related to the x-z plane.
  • the emission angle is thus the angle which a respective edge beam encloses with the beam axis, and thus defines the divergence of the laser beam emitted by the laser diode with respect to the y-z plane or with respect to the x-z plane.
  • the collecting effect of the cylinder surface in the yz plane means that at least the divergence of the. Due to the interaction with the cylindrical surface is reduced to the yz plane related marginal rays or these marginal rays after interacting with the cylindrical surface parallel to each other run (ie the opening angle of the cone of radiation is zero, ie the laser beam is collimated) or even run towards each other (ie the opening angle of the radiation cone is negative).
  • the two marginal rays related to the y-z plane subtend an angle of less than 10 ° with each other after cooperating with the cylindrical surface, i. the laser beams are at least largely collimated.
  • the pumping means on no reflective or refractive surface, which is curved only or in a plane perpendicular to the y-axis, ie in the xz plane and cooperate with the laser beams with the in the yz-plane curved cylindrical surface interact.
  • the laser beams emitted by at least a plurality of laser diodes interact with this cylindrical surface lying parallel to the x-axis and curved in the yz-plane, ie with the same cylindrical surface. That is, a common optical component with at least one such cylindrical surface is provided for the laser beams emitted by a plurality of laser diodes, preferably the majority of the laser diodes, particularly preferably all laser diodes, with which these laser beams interact.
  • the cylindrical surface is concave to the side from which the laser beams are incident, the laser beams entering the component through an entrance surface and being reflected inside the component on the cylinder surface.
  • the laser beams reflected by the cylindrical surface emerge from the component through an exit surface of the component.
  • the entrance surface and the exit surface are formed by different surfaces of the optical component, ie, the entry and the exit surface are spatially separated.
  • the cylindrical surface of the optical component is formed by a part of the entire circumference of a cylinder jacket, in particular a straight cylinder, ie it represents one over a certain polar angle range ⁇ 2 ⁇ It may be, for example, the lateral surface of a circular cylinder, parabolic cylinder or elliptical cylinder. Such cylindrical surfaces have a cylinder axis, which is thus parallel to the x-axis.
  • the laser diode emitted laser beams between the laser diodes and the at least one parallel to the x-axis and in the xz plane curved cylindrical surface having optical component no other optical component with which the laser beams interact, ie the laser beams emitted by the laser diodes pass directly into the optical component from the laser diodes after passing through an air gap.
  • the radiation source preferably comprises two or more laser diodes arranged at different locations relative to the x-axis, the laser beams of which interact with the cylindrical surface of the optical component, and more preferably also two or more laser diodes, whose laser beams are arranged at different locations relative to the y-axis interact with the cylindrical surface of the optical component.
  • the laser beams of all the laser diodes of the radiation source interact with the cylindrical surface of the optical component.
  • all the laser diodes of the radiation source lie in a common plane perpendicular to the z-axis (ie in an x-y plane).
  • the radiation source is a laser diode stack having a plurality of bars each having a plurality of laser diodes, wherein the laser diodes of a respective Barrens are arranged spaced in the y-direction, that lie on a common, parallel to the y-axis lines.
  • the radiation source is a laser diode stack having a plurality of bars each having a plurality of laser diodes, wherein the laser diodes of a respective Barrens are arranged spaced in the y-direction, that lie on a common, parallel to the y-axis lines.
  • all ingots are juxtaposed relative to the direction of the x-axis, that is to say a vertical laser diode stack whose laser diodes are arranged in a plurality of y-directional rows (preferably three or more) and arranged in a plurality of columns extending in the x-direction (preferably ten or more).
  • reflective boundary surfaces are provided according to the invention which limits the total extent of the laser radiation emitted by the radiation source in the direction of the x-axis on both sides.
  • the boundary surfaces are preferably at right angles to the x-axis.
  • the invention provides that the optical component, which has the at least one cylindrical surface lying parallel to the x-axis and curved in the y-z plane, also has the reflective boundary surfaces. These are thus formed by side surfaces of the optical component, which are preferably perpendicular to the entrance and exit surfaces of the optical component. Conveniently, the reflection takes place at the reflective boundary surfaces by total reflection.
  • a laser according to the invention is in particular pulsed. Training as a continuous wave laser is also possible.
  • FIG Fig. 1 A possible embodiment for a laser according to the invention is shown schematically in FIG Fig. 1 shown. It is a solid-state laser whose amplifying (active) laser medium consists of a crystalline or glassy (amorphous) solid.
  • the reinforcing laser medium 1 may be Nd: YAG, Nd: glass, Nd: vanadate or Yb: YAG.
  • the amplifying laser medium is arranged in a resonator, the components of which are explained in more detail below.
  • the two input and output surfaces 2, 3 for the emitted laser medium 1, the resonator laser radiation passing through are advantageously arranged at Brewster angle, but this is not absolutely necessary.
  • the reinforcing laser medium 1 is side-pumped, as is known.
  • the laser radiation 5 pumping the amplifying laser medium 1 thus does not fall through the entrance and exit surfaces 2, 3 into the laser medium, but rather through a side surface 6. This is at an angle to the entry and exit surfaces 2, 3.
  • the laser medium 1 could instead of plate-shaped, for example, also be rod-shaped.
  • the resonator comprises an end mirror 7 and an output mirror 8 in order to decouple the laser beam 4 emitted by the laser.
  • the resonator shown is folded once, for which purpose a reversing prism 9 is arranged in the beam path. The folding could also be omitted or the resonator could be folded several times. Other folding mirrors could be provided.
  • a Pockels cell 11 and a quarter-wave plate 12 are arranged in the beam path of the resonator in the illustrated embodiment.
  • the laser radiation emitted by the laser is thus pulsed.
  • other than electro-optical Q-switches, in particular acousto-optic Q-switches could be provided.
  • One of the mirrors arranged in the beam path in particular the outcoupling mirror 8 or the end mirror 7 could, as is known, be formed as a gradient mirror, the reflectivity of which changes over the mirror surface and is greater here in a central region than in an edge region.
  • the beam profile of the laser beam can be influenced, for example in order to achieve a more rapid edge drop of the intensity, and / or the beam quality of the laser beam can be improved.
  • the pumping of the amplifying laser medium takes place by means of a radiation source 13, which comprises a plurality of laser diodes.
  • the optics 14 of the pumping device in order to supply the laser radiation emitted by the radiation source advantageously to the amplifying laser medium 1 is shown in FIG Fig. 1 only indicated schematically.
  • the radiation source 13 is preferably in the form of a laser diode stack and an example of this is in the Fig. 2 to 5 shown.
  • the laser diode stack comprises a plurality of bars 15, each having a plurality of laser diodes 16 which are spaced apart in the direction of a y-axis. For example, 15 to 60 laser diodes per bar
  • a plurality of such bars 15 are arranged next to one another, the laser diodes 16 being spaced from one another in the y-direction (each lying on a straight line parallel to the y-axis).
  • five to fifteen bars 15 may be present.
  • Two or more bars 15 could also be arranged next to one another in the y-direction, so that two or more rows of juxtaposed bars 15 extending in the x-direction would be present.
  • the radiation cone of the laser beam 17 emitted by it is shown.
  • the beam axis a is parallel to the z axis perpendicular to the x and y axes.
  • the beam axes a of all laser diodes 16 of the radiation source 13 are parallel to one another, the laser diodes 16 each having the same radiation characteristic.
  • a respective radiation cone of a laser diode is defined in this document in that it limits the range within which 95% of the total power of the laser radiation emitted by the laser diode is emitted.
  • the lines that limit the radiation cone in a section of the radiation cone with a parallel to the x-z plane and extending through the beam axis a plane are designated in this document, which limit the radiation cone in a section of the radiation cone with a parallel to the y-z plane and extending through the beam axis a plane.
  • the boundary rays 31 for a respective laser diode delimit the region in a plane parallel to the x-axis and the z-axis passing through the beam axis a, within which 95% of the total power of the laser diode emitted laser radiation is emitted.
  • the marginal rays 32 define such a region in a plane parallel to the y-axis and the z-axis and passing through the beam axis a.
  • the radiation angle 18 related to the x-z plane is the angle between the respective edge beam 31 and the beam axis a.
  • the radiation angle 19 related to the y-z plane is the angle between the respective edge beam 32 and the beam axis a.
  • the laser beams 17 emitted by the laser diodes 16 have in the direction of the x-axis at least twice as large, preferably at least three times as large, divergence as in the direction of the y-axis.
  • the beam angle 18 related to the xz plane is at least twice as large, preferably at least three times as large as the beam angle 19 related to the yz plane.
  • the beam angle can be 18 +/- 33 ° and the beam angle 19 + / -5 °.
  • a cooling body 21 for cooling the laser diode stack is shown, which may be water-cooled, for example (the connections are not shown).
  • the electronics for operating the laser diode stack is in Fig. 6 for the sake of clarity not shown.
  • the pump device further comprises an optical component 22, which has a cylindrical surface 23. This is formed in this embodiment of a provided with a reflective coating outer surface of the optical component 22.
  • the emitted from the laser diode 16 of the radiation source 13 laser beams 17 pass through an entrance surface 24 of the optical Component 22 in this (at least for the most part). After the laser beams 17 have been reflected on the cylindrical surface 23, the laser beams 17 emerge from the exit face 25 of the component 22 (at least for the most part).
  • the entrance surface 24 and the exit surface 25 are conveniently provided with antireflection coatings.
  • the exiting through the exit surface 25 laser beams reach the laser medium 1 (at least for the most part).
  • the entrance surface 24 and the exit surface 25 are formed by different surfaces of the component 22, so do not overlap.
  • the reinforcing laser medium 1 rests directly against the exit surface 25 of the optical component 22. It could also, for example, to ensure the total reflection in a zig-zag laser, a small gap therebetween be provided or an intervening transparent material having a lower refractive index than the material of the reinforcing laser medium 1. At least the distance of the laser medium 1 from the exit face 25 measured in the direction of the surface normal to the side face 6 is advantageously smaller than the extent of the laser medium 1 measured in this direction.
  • the optical component 22 having the cylindrical surface 23 is the only optical component of the pumping device with which the laser radiation emitted by the radiation source 13 interacts.
  • at least only one optical component is present, which has an imaging, in particular collecting, effect.
  • this consists of a transparent material.
  • the transmission of the material of the optical component 22 at the wavelength of the laser beams 17 is more than 99%, preferably more than 99.5%, over a distance of 10mm (pure material transmission, no surface reflections considered). In practical embodiments, the value may be over 99.8%.
  • the total absorption of the laser radiation of the radiation source 13 that passes through the optical component 22 may favorably be less than 3%, particularly preferably less than 1%.
  • the distance traveled by the laser radiation 5 can be shorter than 20 cm, preferably shorter than 10 cm.
  • the optical component made of glass, eg SF6 or SF11 exist. Other transparent materials can also be used, for example YAG.
  • the refractive index n of the material of the optical component 22 is greater than 1.6 in the exemplary embodiment at the wavelength of the laser radiation emitted by the radiation source 13.
  • a material with a lower index of refraction than 1.6 could also be used, e.g. a silicate glass.
  • the optical component 22 is formed of several, in particular by bonding interconnected, consisting of transparent material parts. Even a one-piece training is conceivable and possible.
  • the optical component 22 is attached to a carrier 26.
  • a heat sink 27 is shown which is, for example, water-cooled (the connections are not shown) and serves to cool the reinforcing laser medium 1.
  • FIGS. 7 and 8 the axial beams 28 of the beam shown, so along the beam axes a of the laser diode 16 emitted beams, in Fig. 7 in the xz plane (a projection into the xz plane would be identical here) and in Fig. 8 in the yz plane (a projection into the yz plane would be identical here).
  • the FIGS. 7 and 8 also represent the course of the the optical axes of the laser beams 17 emitted by the laser diodes 16 in the xz plane or in a projection in the xz plane and in the yz plane or in a projection in the yz plane.
  • the radiation source designed as a laser diode stack 13, the optical component 22 and the amplifying laser medium 1 are shown schematically.
  • the 0-point of the x and y axes are placed in the center of the radiation source 13.
  • the 0-point of the z-axis is located on the surface of the radiation source 13, from which the laser radiation is emitted.
  • the axial rays 28 run in the xz plane or in a projection onto the xz plane parallel to the z-axis from the radiation source 13 to reinforcing laser medium 1.
  • the axial rays 28 converge (at least approximately) on a cutting line parallel to the x-axis and at right angles to the y-z-plane, which represents the focal line of the cylindrical surface 23.
  • the laser medium 1 is here arranged such that the (approximately) cut line of the axial rays 28 lies in the region of the side surface 30 facing away from the optical component 22.
  • This side surface 30 is favorably mirrored here, so that it reflects back the laser beams 17 impinging on it.
  • the cutting line could also be located in a middle region of the reinforcing laser medium 1 or in the region of the side surface 6. Since a bearing of the side surface 6 at the exit surface 25 of the optical component 22 is preferred, the geometry of the optical component could be adapted accordingly.
  • the cylindrical surface 23 is formed by a peripheral part of a shell of a right circular cylinder, which is curved around the cylinder axis 29. It could, for example, also be a parabolic or elliptical cylinder curved around the cylinder axis 29.
  • FIGS. 9 and 10 show to the FIGS. 7 and 8 analog representations, but here the projection of the marginal rays 31, 32 in the xz plane and in the yz plane for the laser beams 17 emitted from three of the laser diode 17 is shown.
  • These are two edge-side laser diodes 16 (of which one has the largest values of the x and y coordinates and of which the other has the smallest values of the x and y coordinates of all the laser diodes) and one with respect to the x and y-extension of the radiation source 13 located in a central region laser diode 16th
  • Fig. 9 shows the projection in the xz plane
  • Fig. 10 shows the projection in the yz plane.
  • the refractive index n of the material of the component 22 is greater than air, the angles of the marginal rays 31, 32 to the z-axis when the respective laser beam 17 enters the optical component 22 are reduced correspondingly to the ratio of the refractive indices.
  • boundary surfaces 33, 34 there is a total reflection of the incident on them partial beams. The reflection is for the corresponding marginal rays 31 in FIG Fig. 10 shown.
  • partial beams are reflected at the boundary surfaces 33, 34.
  • the geometry of the arrangement could also be selected such that partial beams of laser beams 17 of the laser diodes 16 are already reflected on the boundary surfaces 33, 34 before impinging on the cylindrical surface 23.
  • the laser radiation is guided by internal reflection at the boundary surfaces 33, 34. If the extent of the laser medium 1 in the x-axis is sufficiently large, the reflection at the boundary surfaces 33, 34 could also be dispensed with optical component 22 is then also made correspondingly long in the x-direction).
  • the radius of curvature of the cylindrical surface 23 is for example in the range of 30mm to 100mm, in the embodiment at 57.8mm.
  • the distance from the radiation source 13 for example, in the range between 13mm and 45mm, in the embodiment at 25mm.
  • the tilt angle of the cylindrical surface with respect to the orientation in which the cylindrical surface intersects the z-axis is, for example, in the range of 10 ° to 25 °, in the exemplary embodiment at 15 °.
  • the distance between the radiation source 13 and the cylindrical surface 23 should be such that the individual laser beams after their reflection on the cylindrical surface are at least largely collimated such that the marginal rays 32 include angles of at least less than 10 ° with each other.
  • the Fig. 11 to 14 are representations analogous to the Fig. 7 to 10 for a modification which does not fall under the invention.
  • an optical component 22 ' which has the cylindrical surface 23 a cylindrical mirror is provided here.
  • the cylindrical surface 23 may for example be formed by a peripheral part of the shell of a right circular cylinder, which is curved about the cylinder axis 29, which is perpendicular to the yz plane, that is parallel to the x-axis.
  • the beam path is similar to the embodiment described above. However, it lacks the effect of reducing divergence angles upon entering a material having a refractive index greater than that of air.
  • the cylindrical surface 23 In order to obtain a predetermined width of the laser radiation in the projection onto the yz plane at the location of the amplifying laser medium, the cylindrical surface 23 must be curved more strongly than in the first exemplary embodiment. Overall, a less pronounced overall minimum constriction of the laser radiation results in the region in which the amplifying laser medium 1 is arranged. The, in particular spherical, aberrations regarding the Overlap of the individual beams are thus greater than in the first embodiment.
  • the radius of curvature of the cylinder axis 23 may be, for example, in the range of 15mm to 30mm.
  • the distance from the radiation source 13, measured along the z-axis, is preferably approximately in the region of half the radius of curvature (+/- 10%).
  • a reflection at boundary surfaces, which limit the laser radiation with respect to the x-direction by reflection, is not shown in this embodiment.
  • a limitation could be present by providing mirrors which have such reflective boundary surfaces 33, 34.
  • the boundary surfaces would in this case again be arranged in a plane and at right angles to the x-axis.
  • FIGS. 15 and 16 show representations analogous to the FIGS. 9 and 10 or 13 and 14 for a further modification which does not fall under the invention.
  • the optical member 22 "having the cylindrical surface 23 is a cylindrical lens, for example, the cylindrical surface may be formed by a peripheral portion of the shell of a right circular cylinder curved about the cylinder axis 29 perpendicular to the y-z plane.
  • the amplifying laser medium 1 is arranged here in such a way that the side surface 6, through which the laser radiation emitted by the radiation source 13 enters, lies at the location of the cylinder axis 37 relative to the z-axis.
  • the laser medium 1 could also be arranged such that the cylinder axis 37 lies within the laser medium 1 or in the region of the rear side surface 30.
  • the rear side surface 30 could again be formed mirrored.
  • the focal length of the cylindrical lens may for example be in the range of 50mm to 200mm, the distance between the cylindrical lens and the Radiation source 13 is in the range of the focal length (+/- 10%). The distance between the cylindrical lens and the laser medium 1 is also in the range of the focal length (+/- 10%).
  • the two marginal rays 32 of the laser beam 17 of a respective laser diode 16 After passing through the optical component 22 ", the two marginal rays 32 of the laser beam 17 of a respective laser diode 16 preferably converge or parallel to each other, at least the divergence of the two marginal rays 32 from the optical component 22" is reduced.
  • the optical component 22 "thus has a collecting effect with respect to the original divergence in the y-z plane.
  • plane mirrors 35, 36 are provided whose mirror surfaces form boundary surfaces 33, 34 for the laser radiation, wherein the boundary surfaces 33, 34 are at right angles to the x-axis. The extension of the laser radiation of the laser radiation emitted by the radiation source 13 in the x-direction is thereby limited again.
  • the boundary surfaces 33, 34 could in turn be omitted.
  • the individual laser beams 17 of the laser diodes 16 overlap well in the region of the laser medium 1.
  • the area illuminated by the laser radiation is relatively large, and the amplifying laser medium 1 must be correspondingly large.
  • the focal length of the cylindrical lens is more than five times the relative to the direction of the y-axis distance between the two in the y-direction the greatest distance from each other having laser diodes of the radiation source.
  • the cylindrical surface of the component 22 "could also be arranged on the side facing the laser medium 1.
  • a cylindrical lens with double-sided cylindrical surfaces could also be used.
  • the pumping device described here makes it possible in particular to provide compact, side-pumped solid-state lasers.
  • a laser with at least 100 mJ of pulse energy and pulses shorter than 20 ns can be realized.
  • a pulsed laser with greater than 3 mJ pulse energy and less than 10 ns pulse length can be provided, having dimensions of less than 10 cm x 5 cm or even less (again laser head, without electronics).
  • a compact pulse laser can be provided which has a high efficiency of more than 10% or even more than 15% with respect to the energy of the generated pulse in relation to the energy of the (optical) pumping pulse. Due to the efficiency, a compact pulse laser may be provided if necessary, which does not require water cooling.
  • a 100 Hz / 100 mJ laser may be provided which is suitable for battery operation in practice.
  • the use of a cylinder surface having a cylindrical lens with a long focal length, as shown for example in the third embodiment of the invention, for pumping a laser with a high energy, in particular 1 J or more, is advantageous.
  • a device according to the invention also has the advantage that the position and angle tolerances of the radiation source, in particular in the form of a laser diode stack, are relatively uncritical in comparison to the prior art.
  • the radiation source, in particular in the form of a laser diode stack can be provided as a user-replaceable module.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Lasers (AREA)
EP13756283.1A 2012-08-03 2013-07-26 Pumpeinrichtung zum pumpen eines verstarkenden lasermediums Active EP2880723B1 (de)

Applications Claiming Priority (2)

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ATA858/2012A AT513254B1 (de) 2012-08-03 2012-08-03 Pumpeinrichtung zum Pumpen eines verstärkenden Lasermediums
PCT/AT2013/000126 WO2014019003A1 (de) 2012-08-03 2013-07-26 Pumpeinrichtung zum pumpen eines verstarkenden lasermediums

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CN (1) CN104521076B (zh)
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AT521943A1 (de) 2018-12-14 2020-06-15 Dr Daniel Kopf Gütegeschalteter Festkörperlaser
AT522108B1 (de) * 2019-01-31 2022-09-15 Montfort Laser Gmbh Passiv gütegeschalteter Festkörperlaser

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US20150244141A1 (en) 2015-08-27
CN104521076B (zh) 2017-12-01
EP2880723A1 (de) 2015-06-10
US9306365B2 (en) 2016-04-05
AT513254B1 (de) 2014-03-15
WO2014019003A1 (de) 2014-02-06
CN104521076A (zh) 2015-04-15

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