EP2874947A1 - Method for producing hollow particles, hollow particle, antireflection coating, and optical element - Google Patents
Method for producing hollow particles, hollow particle, antireflection coating, and optical elementInfo
- Publication number
- EP2874947A1 EP2874947A1 EP13819227.3A EP13819227A EP2874947A1 EP 2874947 A1 EP2874947 A1 EP 2874947A1 EP 13819227 A EP13819227 A EP 13819227A EP 2874947 A1 EP2874947 A1 EP 2874947A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- particles
- core
- shell
- hollow
- particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000002245 particle Substances 0.000 title claims abstract description 229
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- 238000000576 coating method Methods 0.000 title claims description 54
- 239000011248 coating agent Substances 0.000 title claims description 45
- 230000003287 optical effect Effects 0.000 title claims description 15
- 239000011258 core-shell material Substances 0.000 claims abstract description 64
- 239000007771 core particle Substances 0.000 claims abstract description 55
- 239000007864 aqueous solution Substances 0.000 claims abstract description 43
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims abstract description 39
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims abstract description 39
- 239000007788 liquid Substances 0.000 claims abstract description 29
- 239000006185 dispersion Substances 0.000 claims abstract description 28
- 238000010438 heat treatment Methods 0.000 claims abstract description 8
- 239000011777 magnesium Substances 0.000 claims description 34
- 239000011737 fluorine Substances 0.000 claims description 30
- 229910052731 fluorine Inorganic materials 0.000 claims description 30
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 28
- 229910052749 magnesium Inorganic materials 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 229920002554 vinyl polymer Polymers 0.000 claims description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- -1 fluoride ions Chemical class 0.000 abstract description 6
- 159000000003 magnesium salts Chemical class 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 description 37
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 29
- 239000010410 layer Substances 0.000 description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 21
- 239000013078 crystal Substances 0.000 description 19
- 239000010408 film Substances 0.000 description 16
- 239000000243 solution Substances 0.000 description 16
- 239000000758 substrate Substances 0.000 description 14
- 239000004793 Polystyrene Substances 0.000 description 13
- 229920002223 polystyrene Polymers 0.000 description 13
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 11
- 239000010419 fine particle Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 239000000377 silicon dioxide Substances 0.000 description 9
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 8
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 8
- 238000003917 TEM image Methods 0.000 description 7
- 229910002651 NO3 Inorganic materials 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 6
- 239000011368 organic material Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 5
- 239000011800 void material Substances 0.000 description 5
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 125000000524 functional group Chemical group 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 239000000084 colloidal system Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000003618 dip coating Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 description 2
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005119 centrifugation Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- YIXJRHPUWRPCBB-UHFFFAOYSA-N magnesium nitrate Chemical compound [Mg+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O YIXJRHPUWRPCBB-UHFFFAOYSA-N 0.000 description 2
- GVALZJMUIHGIMD-UHFFFAOYSA-H magnesium phosphate Chemical compound [Mg+2].[Mg+2].[Mg+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O GVALZJMUIHGIMD-UHFFFAOYSA-H 0.000 description 2
- 239000004137 magnesium phosphate Substances 0.000 description 2
- 229960002261 magnesium phosphate Drugs 0.000 description 2
- 229910000157 magnesium phosphate Inorganic materials 0.000 description 2
- 235000010994 magnesium phosphates Nutrition 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000004811 fluoropolymer Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 150000004677 hydrates Chemical class 0.000 description 1
- 239000010954 inorganic particle Substances 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- 230000033001 locomotion Effects 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 235000014380 magnesium carbonate Nutrition 0.000 description 1
- 229910001629 magnesium chloride Inorganic materials 0.000 description 1
- 235000011147 magnesium chloride Nutrition 0.000 description 1
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 1
- 235000019341 magnesium sulphate Nutrition 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 239000011698 potassium fluoride Substances 0.000 description 1
- 235000003270 potassium fluoride Nutrition 0.000 description 1
- USHAGKDGDHPEEY-UHFFFAOYSA-L potassium persulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O USHAGKDGDHPEEY-UHFFFAOYSA-L 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001846 repelling effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000011775 sodium fluoride Substances 0.000 description 1
- 235000013024 sodium fluoride Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/006—Anti-reflective coatings
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F5/00—Compounds of magnesium
- C01F5/26—Magnesium halides
- C01F5/28—Fluorides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/01—Particle morphology depicted by an image
- C01P2004/04—Particle morphology depicted by an image obtained by TEM, STEM, STM or AFM
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/30—Particle morphology extending in three dimensions
- C01P2004/32—Spheres
- C01P2004/34—Spheres hollow
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K7/00—Use of ingredients characterised by shape
- C08K7/22—Expanded, porous or hollow particles
- C08K7/24—Expanded, porous or hollow particles inorganic
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
- G02B2207/107—Porous materials, e.g. for reducing the refractive index
Definitions
- the present invention relates to a method for producing hollow particles, hollow particle, an antireflection coating made using the hollow particles, and an optical element having the antireflection coating.
- Antireflection coatings reduce the reflection of light occurring at the light-emitting and light-receiving surfaces of optical elements and ensure the desired optical characteristics of the devices, and such coatings are formed as a monolayer optical film having a certain refractive index and a thickness of several tens to several hundreds of nanometers or as a stack of two or more of such films having different refractive indices.
- methods used to produce antireflection coatings include vacuum film formation techniques such as vapor deposition or sputtering as well as wet film formation techniques such as dip coating or spin coating.
- the uppermost layer of an antireflection coating is made of a transparent and low-refractive-index material.
- examples of such materials include inorganic ones such as silica, magnesium fluoride, and calcium fluoride as well as organic ones such as silicones and amorphous fluoropolymers.
- Some more recent antireflection coatings use the refractive index of air, 1.0, to be more effective in reducing the reflectance of optical elements than older ones.
- Pores in a layer of silica or magnesium fluoride reduce the refractive index of the layer. For example, a 30% (volume) space in a magnesium fluoride thin film having a refractive index of 1.38 reduces the refractive index of the film to 1.27.
- An example of a method used to form such pores is to prepare silica or magnesium fluoride fine particles and process these particles into a film with a binder. The pores are formed between the fine particles, giving a low refractive index to the resulting film (refer to PTL 1 and PTL 2).
- hollow silica particles i.e., particles containing a void.
- Hollow particles of magnesium fluoride a material having a lower refractive index than silica, can also be used to make antireflection coatings. Because of the low refractive index, magnesium fluoride allows the resulting antireflection coatings to have a lower refractive index than ones made using hollow silica particles.
- hollow particles of magnesium fluoride contain a smaller void than hollow silica particles if the refractive indices are equal; hollow magnesium fluoride particles can have a thicker wall (shell) and thus can be stronger than silica-based ones (refer to PTL 3 and PTL 4).
- the hollow magnesium fluoride particles described in PTL 4 are produced by a method including preparing magnesium fluoride nanoparticles and then attaching the nanoparticles to core particles to form a layer of magnesium fluoride.
- This magnesium fluoride layer which is an assembly of particles, leads to the shell lacking sufficient strength, thereby causing the particles to be destroyed during subsequent operations such as hollowing out the particles or dispersing the particles in a medium to produce paint.
- the present invention provides a hollow particle and a method for producing hollow particles.
- the shell of the particle(s) is a continuous layer containing magnesium fluoride and thus is strong.
- the present invention also provides an antireflection coating and an optical element having an antireflection coating.
- the antireflection coating is made using hollow particles having a strong shell containing magnesium fluoride and thus combines excellent strength and a low refractive index.
- a method for producing hollow particles that solves the above problem includes obtaining core-shell particles having a core particle and a shell containing magnesium fluoride and removing at least a portion of the core particle from the core-shell particles.
- the core-shell particles can be obtained by mixing an aqueous dispersion containing the core particles, an aqueous solution containing magnesium, and an aqueous solution containing fluorine at a temperature of 10 degrees Celsius to 30 degrees Celsius, both inclusive, to form a mixture and then heating the mixture at a temperature of 50 degrees Celsius to 80 degrees Celsius, both inclusive.
- a hollow particle that solves the above problem has a continuous shell containing magnesium fluoride.
- Another aspect of the invention is an antireflection coating made using the aforementioned hollow particles.
- Yet another aspect of the invention is an optical element having the aforementioned antireflection coating.
- Fig. 1 is a schematic diagram illustrating an embodiment of the invention.
- Fig. 2 is a schematic diagram illustrating a method for producing hollow particles according to an embodiment of the invention.
- Fig. 3 is a transmission electron microscopic (TEM) image of the core-shell particles produced in Example 1.
- Fig. 4 is a TEM image of the hollow particles produced in Example 6.
- Fig. 5 is a TEM image of the core-shell particles produced in Comparative Example 1.
- Fig. 6 is a TEM image taken in Comparative Example 1 after the particles were hollowed out.
- TEM transmission electron microscopic
- a hollow particle according to an aspect of the invention has a continuous shell containing magnesium fluoride and an at least partially removed hollow core.
- FIG. 1 is a schematic diagram illustrating an embodiment of a hollow particle according to this aspect of the invention.
- a hollow particle 1 according to this embodiment has a hollow core 2 and a shell 3.
- the hollow core 2 has been removed at least in part, and the shell 3 is a continuous layer containing magnesium fluoride.
- Hollow particles according to this embodiment of the invention which have a continuous shell containing magnesium fluoride, can be produced without damage despite treatment for hollowing out the core and are strong enough to be dispersed in a medium without being broken.
- the shell provided in this embodiment of the invention contains fluorine, leading to a low refractive index of the particle.
- the refractive index of the particle is as low as 1.2 to 1.3 because of the void existing in the particle.
- hollow particles according to this embodiment of the invention can be used in low-refractive-index layers for antireflection coatings to ensure low reflectance of the coatings.
- the shell of a hollow particle according to this embodiment of the invention is a continuous layer containing magnesium fluoride.
- continuous layer refers to a layer formed by crystal nuclei undergoing the aggregation and growth process and solid-state relaxation on the surface of a core particle. The continuous nature of the layer ensured by solid-state relaxation makes the layer a shell stronger than ones produced by attaching particles that have completed solid-state relaxation.
- the average particle diameter of hollow particles according to this embodiment of the invention can be in the range of 30 nm to 200 nm, both inclusive. It is difficult to produce core particles for hollow particles having an average particle diameter smaller than 30 nm in a consistent manner. An average particle diameter exceeding 200 nm causes the hollow particles to scatter light in antireflection coatings because of their large size.
- the thickness of the shell of hollow particles according to this embodiment of the invention can be in the range of 10% to 35%, both inclusive, of the average particle diameter of the hollow particles.
- a thickness of the shell smaller than 10% of the average particle diameter of the hollow particles renders the particles lacking sufficient strength.
- the thickness of the shell exceeds 35% of the average particle diameter of the hollow particles, the void is too small to have significant effects on the refractive index.
- a method for producing hollow particles according to another embodiment of the invention includes obtaining core-shell particles having a core particle and a continuous shell containing magnesium fluoride and removing at least a portion of the core particle from the core-shell particles to form the hollow particles.
- the core-shell particles can be obtained by adding an aqueous solution containing magnesium and an aqueous solution containing fluorine to an aqueous dispersion containing the core particles at a temperature of 10 degrees Celsius to 30 degrees Celsius, both inclusive, and then heating the combined liquid at a temperature of 50 degrees Celsius to 80 degrees Celsius, both inclusive.
- Fig. 2 is a schematic diagram illustrating a method for producing hollow particles according to this embodiment of the invention.
- Core-shell particles 4 having a core particle 5 and a continuous shell 3 containing magnesium fluoride are first obtained. At least a portion of the core particle 5 of the core-shell particles 4 is then removed to form a hollow core 2 (hollowing out). As a result, hollow particles 1 are obtained.
- the production of continuous-shell hollow particles begins with the formation of crystal nuclei containing at least fluorine and magnesium.
- the crystal nuclei adhere to core particles and cover them, and then magnesium and fluorine react with each other at the crystal nuclei to form a continuous layer around the core particles.
- the core particles may be made of any organic or inorganic material that allows at least a portion of the core particles to be removed later.
- inorganic materials include SiO 2 , which is soluble in alkalis, and calcium carbonate, which is soluble in acids.
- organic materials examples include vinyl polymers that are small in size and have a relatively narrow size distribution, such as polymers of styrene, acrylic esters, or vinyl esters. Polystyrene can make the resulting particles small and highly uniform in particle diameter.
- the average particle diameter of the core particles can be in the range of 10 nm to 500 nm, both inclusive, preferably 10 nm to 160 nm, both inclusive.
- the core particles used in this embodiment of the invention which are fine particles, are required to have a negative zeta potential.
- Crystal nuclei containing fluorine and magnesium have a positive zeta potential, with which the crystal nuclei can adhere to the core fine particles and cover them.
- the potential of fine particles depends on the material of the particles. However, it is possible to change the potential of the fine particles by modifying the surface of the particles with a functional group.
- Polymer particles can be surface-modified with a functional group by preparing them using agents appropriate for the intended zeta potential, e.g., an appropriate polymerization initiator.
- the zeta potential of inorganic particles can also be controlled; this is achieved by introducing a functional group to the surface of the particles through chemical reaction.
- Examples of functional groups having a negative zeta potential include a sulfonate ion, a carboxylate ion, and a peroxodisulfate ion.
- the aqueous solution containing magnesium can be an aqueous solution of a magnesium salt.
- solutes for this aqueous solution include magnesium nitrate, magnesium chloride, magnesium sulfate, magnesium carbonate, magnesium phosphate, and hydrates of these salts.
- the aqueous solution containing fluorine can be an aqueous solution containing fluoride ions.
- solutes for this aqueous solution include sodium fluoride, potassium fluoride, hydrofluoric acid, and ammonium fluoride.
- the aqueous dispersion containing the core particles, the aqueous solution containing magnesium, and the aqueous solution containing fluorine are combined.
- the aqueous solution containing magnesium is added to the aqueous dispersion containing the core particles, and the aqueous solution containing fluorine is added to the resulting mixture.
- the three liquids can be combined in any order; it is possible to add the aqueous dispersion containing the core particles to the aqueous solution containing magnesium and then add the aqueous solution containing fluorine to the resulting mixture. It is also possible to combine the three liquids at once and then mix.
- the liquids can be at a temperature of 10 degrees Celsius to 30 degrees Celsius at the time when they are combined.
- Crystal nuclei can form only when the reaction between magnesium and fluorine is sufficiently slow.
- the crystal nuclei start to form as soon as the aqueous solution containing magnesium fluoride and the aqueous solution containing fluorine come into contact.
- a typical scheme is to adjust the temperature of an aqueous solution of a magnesium salt and an aqueous solution containing fluoride ions within the range of 10 degrees Celsius to 30 degrees Celsius, both inclusive, and then add one solution to the other and allow the solutions to react with each other.
- a reaction temperature lower than 10 degrees Celsius causes the reaction and, therefore, the formation of the crystal nuclei to be too slow for practical production.
- Reaction at a temperature exceeding 30 degrees Celsius causes the crystal nuclei to grow into colloidal particles of magnesium fluoride before adhering to the core particles and covering them. These colloidal particles adhere to the core particles and cover them, and the shell will be insufficiently strong.
- the duration of the reaction can be in the range of 1 minute to 30 minutes, both inclusive.
- the reaction temperature after the three liquids are combined can be in the range of 50 degrees Celsius to 80 degrees Celsius, both inclusive, preferably 60 degrees Celsius to 75 degrees Celsius, both inclusive.
- the crystal nuclei covering the core particles can grow only when the reaction proceeds sufficiently fast.
- a reaction temperature lower than 50 degrees Celsius at this stage causes the crystal nuclei to tend to increase in number rather than growing in size. In this case there will be many crystal nuclei not adhering to the surface of the core particles, and these free crystal nuclei will form a large amount of magnesium fluoride colloid.
- a reaction temperature exceeding 80 degrees Celsius at this stage also causes the crystal nuclei to form too fast and a large amount of magnesium fluoride colloid to be formed.
- the duration of the reaction at this stage can be in the range of 1 minute to 2 hours, both inclusive.
- the concentration of the aqueous solution containing magnesium can be in the range of 0.05 mol/L to 0.2 mol/L, both inclusive.
- the concentration of the aqueous solution containing fluoride can be in the range of 0.1 mol/L to 0.4 mol/L, both inclusive. Too low a concentration of the magnesium source or the fluorine source causes the crystal nuclei to form and adhere to the surface of the core particles too slowly. Too high a concentration of the magnesium source or the fluorine source causes too many crystal nuclei to form. In this case there will be many crystal nuclei not adhering to the surface of the core particles, and these free crystal nuclei will form a large amount of magnesium fluoride colloid.
- the core particle of the core-shell fine particles can be removed by several ways. If the core particle is made of an inorganic material, the core particle can be removed by using an agent that dissolves the material such as an appropriate acid or alkali. If the core particle is made of an organic material, the core particle can be removed by dissolution in a solvent or firing to turn the core particle into a gas, for example. When the core is made of an organic material and removed by firing the core-shell particles to turn the core into a gas, the heating temperature can be in the range of 200 degrees Celsius to 350 degrees Celsius, both inclusive.
- Heating at a temperature lower than 200 degrees Celsius is insufficient to remove the core particle because the carbon-carbon bonds in the organic material cannot be broken at such a low temperature. Heating at a temperature of 350 degrees Celsius or less allows the organic material forming the core particle to stay between the fine particles of magnesium fluoride and reinforce the shell.
- the core does not always contain only one void; for example, it is also possible that two or more particles collectively form the core.
- Another embodiment of the invention is an antireflection coating made using the aforementioned hollow particles.
- Dispersions of hollow particles or core-shell particles obtained in accordance with the aforementioned production method can be used to prepare coating liquids for antireflection coatings. If hollow particles are used, slurry obtained by dispersing the hollow particles in a medium can be used as a coating liquid or as a raw material for coating liquids.
- the aqueous dispersion of the core-shell particles can be directly used as a coating liquid. It is also possible to isolate the core-shell particles by processes such as solvent displacement, centrifugation, or filtration, disperse the isolated particles in an organic solvent, and use the resulting dispersion as a coating liquid or as a raw material for coating liquids.
- the use of a coating liquid containing the core-shell particles allows a coating of hollow particles to be formed directly on a substrate. This is achieved by applying the coating liquid containing the core-shell particles to the substrate and then firing the applied liquid to hollow out the core-shell particles by removing the core particle. In this way, an antireflection coating formed using hollow particles obtained by the aforementioned method is produced.
- the coating liquid may contain a composition that serves as a binder for fixing the hollow particles to the substrate.
- This binder composition can be a material having a low refractive index and sufficiently high scratch resistance such as pencil hardness when hardened, and examples include sol-gel compositions of silica, crosslinking acrylic resins, and fluorinated acrylic resins. It is also possible to first apply a dispersion of the hollow particles to the substrate and then apply such a binder composition while allowing the binder composition to penetrate between the hollow particles to fix them to the substrate.
- the antireflection coating can also be obtained by first forming a layer of the core-shell particles, then forming a layer of the binder, and finally hardening the layers by firing or other processes so that the removal of the core particle also occurs.
- the dispersion of hollow particles or core-shell particles may further contain solid particles.
- the substrate to which the coating liquid is applied can be made of glass, a resin, or any other suitable material.
- the substrate can be in any shape; for example, flat, curved, concave, convex, and film-like substrates can be used.
- the coating liquid can be applied to the substrate by any suitable method. All methods commonly used with liquid coating agents can be used, including dip coating, spin coating, spray coating, and roll coating.
- the applied coating liquid is then fire-dried, using an oven, a hot plate, an electric furnace, or the like.
- the temperature and duration of fire-drying are so adjusted that the organic solvent contained in the hollow particles is evaporated without damage to the substrate.
- the fire-drying temperature can be 350 degrees Celsius or less.
- the coating liquid can be applied once. It is also possible to repeat several cycles of application and drying.
- layers having a high or intermediate refractive index between the substrate and the layer of the coating liquid.
- additional layers e.g., layers having a high or intermediate refractive index
- materials for such high- or intermediate-refractive-index layers include zirconium oxide, titanium oxide, tantalum oxide, niobium oxide, hafnium oxide, alumina, silica, and magnesium fluoride.
- the layer of the coating liquid may be further coated with a functional layer for purposes such as repelling water and oil.
- a functional layer can be formed using a paint containing fluorine or a silicone paint, for example.
- Such layers having a selected refractive index or functionality can be formed by processes such as vacuum deposition, sputtering, CVD, dip coating, spin coating, or spray coating.
- Forming such an antireflection coating on a transparent material such as a plastic or glass material significantly reduces the reflectance of the surface of the material.
- optical element having the aforementioned antireflection coating.
- Optical elements according to this embodiment of the invention offering reduced reflection of light at the light-emitting and light-receiving surfaces thereof, can be used in imaging devices such as still and video cameras as well as in projectors such as liquid-crystal projectors and optical scanners for electrophotographic equipment.
- One (1) milliliter of the polystyrene particle aqueous solution was added to 80 mL of 0.05 mol/L aqueous solution of Mg(NO 3 ) 2 .6H 2 O, and the mixture was cooled to 30 degrees Celsius and stirred.
- To the stirred solution 40 mL of 0.1 mol/L aqueous solution of ammonium fluoride was added. The resulting mixture was heated at 80 degrees Celsius for 1 hour.
- TEM transmission electron microscope
- EDS energy-dispersive X-ray spectroscopy system
- the obtained core-shell particles were fired at 350 degrees Celsius for 1 hour.
- the fired particles were observed under a TEM and characterized for elemental composition using an EDS in the same way as the unfired core-shell particles, confirming that hollow particles had been formed.
- the hollow particles had an average particle diameter of 450 nm and a shell thickness of 75 nm.
- the shell contained fluorine, magnesium, and carbon.
- a polystyrene particle aqueous dispersion was obtained as in Example 1 except that the amount of styrene was 5 g.
- the average particle diameter of core particles in this example was 150 nm.
- a dried film of the obtained solution was observed under a TEM and characterized for elemental composition using an EDS, confirming that core-shell particles had been formed and the shell contained fluorine and magnesium.
- the average particle diameter of the core-shell particles was 210 nm, and the shell was a continuous layer as in Example 1.
- the shell was also analyzed for elemental composition in the same way as the core-shell particles and found to contain fluorine and magnesium.
- the obtained core-shell particles were fired at 300 degrees Celsius for 1 hour.
- the fired particles were observed under a TEM in the same way as the unfired core-shell particles, confirming that hollow particles had been formed.
- the hollow particles had an average particle diameter of 210 nm and a shell thickness of 30 nm.
- the shell was characterized for elemental composition in the same way as the core-shell particles and found to contain fluorine, magnesium, and carbon.
- a dried film of the obtained solution was observed under a TEM and characterized for elemental composition using an EDS, confirming that core-shell particles had been formed and the shell contained fluorine and magnesium.
- the average particle diameter of the core-shell particles was 30 nm.
- the shell of the obtained particles was a layer of heteroaggregated magnesium fluoride fine particles.
- the obtained core-shell particles were fired at 350 degrees Celsius for 1 hour.
- the fired particles were observed under a TEM in the same way as the unfired core-shell particles, confirming that hollow particles had been formed.
- the hollow particles had an average particle diameter of 30 nm and a shell thickness of 7.5 nm.
- the shell was characterized for elemental composition in the same way as the core-shell particles and found to contain fluorine, magnesium, and carbon.
- a polystyrene particle aqueous dispersion was obtained as in Example 1 except that the amount of styrene was 2 g.
- the average particle diameter of core particles in this example was 100 nm.
- a dried film of the obtained solution was observed under a TEM and characterized for elemental composition using an EDS, confirming that core-shell particles had been formed and the shell contained fluorine and magnesium.
- the average particle diameter of the core-shell particles was 330 nm, and the shell was a continuous layer formed as a result of solid-state relaxation.
- the obtained core-shell particles were fired at 350 degrees Celsius for 1 hour.
- the fired particles were observed under a TEM in the same way as the unfired core-shell particles, confirming that hollow particles had been formed.
- the hollow particles had an average particle diameter of 330 nm and a shell thickness of 115 nm.
- the shell was characterized for elemental composition in the same way as the core-shell particles and found to contain fluorine, magnesium, and carbon.
- Example 4 Sixty (60) milliliters of the polystyrene particle aqueous dispersion prepared in Example 4 was added to 80 mL of 0.1 mol/L aqueous solution of Mg(NO 3 ) 2 .6H 2 O, and the mixture was heated to 80 degrees Celsius and stirred. To the stirred solution 40 mL of 0.2 mol/L aqueous solution of ammonium fluoride was added. The resulting mixture was heated at 80 degrees Celsius for 1 hour.
- a dried film of the obtained solution was observed under a TEM and characterized for elemental composition using an EDS, confirming that core-shell particles had been formed and the shell contained fluorine and magnesium.
- the average particle diameter of the core-shell particles was 120 nm.
- Fig. 5 is a TEM image.
- the shell of the obtained particles was a layer of magnesium fluoride fine particles adhering to the core particle.
- the obtained core-shell particles were fired at 350 degrees Celsius for 1 hour.
- the fired particles were observed under a TEM in the same way as the unfired core-shell particle; however, no hollow particles were observed, with there being only a magnesium fluoride fine powder.
- Fig. 6 is a TEM image.
- a polystyrene particle aqueous dispersion was obtained as in Example 1 except that the amount of styrene was 1 g.
- the average particle diameter of core particles in this example was 50 nm.
- the obtained core-shell particles were fired at 350 degrees Celsius for 1 hour.
- the fired particles were observed under a TEM, confirming that hollow particles had been formed.
- the hollow particles had an average particle diameter of 75 nm and a shell thickness of 12.5 nm.
- the shell was characterized for elemental composition and found to contain fluorine, magnesium, and carbon.
- a polystyrene particle aqueous dispersion was obtained as in Example 1 except that the amount of styrene was 1 g.
- the average particle diameter of core particles in this example was 50 nm.
- a dried film of the obtained solution was observed under a TEM and characterized for elemental composition using an EDS, confirming that core-shell particles had been formed and the shell contained fluorine and magnesium.
- the average particle diameter of the core-shell particles was 75 nm.
- Fig. 4 is a TEM image.
- the shell of the obtained particles was a continuous layer formed as a result of solid-state relaxation with a thickness of 12.5 nm.
- the obtained core-shell particles were fired at 350 degrees Celsius for 1 hour.
- the fired particles were observed under a TEM in the same way as the unfired core-shell particles, confirming that hollow particles had been formed.
- the hollow particles had an average particle diameter of 75 nm and a shell thickness of 12.5 nm.
- the shell was characterized for elemental composition in the same way as the core-shell particles and found to contain fluorine, magnesium, and carbon.
- the core-shell particles prepared during the production of hollow particles in Example 6 were isolated by centrifugation.
- the isolated particles were washed by repeating the operations of adding water to the particles, stirring the resulting aqueous dispersion, and centrifuging the stirred dispersion.
- 1-methoxy-2-propanol was added, producing a coating dispersion containing the core-shell particles in 2 wt%.
- a drop of this coating liquid was formed into a film by spin coating on a BK7 flat substrate having a diameter of 39 mm.
- This film was coated with a film formed by spin coating of a drop of another coating liquid, a liquid silica sol-gel (CN-1110 available from JGC Catalysts and Chemicals Ltd.) diluted to 1 wt% in 1-methoxy-2-propanol.
- the films were fired at 300 degrees Celsius for 3 hours, producing the antireflection coating of this example.
- the substrate with an antireflection coating produced in Example 7 was analyzed for reflectance over the wavelength range of 400 nm to 700 nm using an Olympus reflectometer for lenses (USPM-RU).
- the refractive index determined from the reflectance at 550 nm was 1.26.
- the substrate was then rubbed with a piece of lens-cleaning paper in 20 back and forth motions under a load of 300 g/cm 2 , and the refractive index was measured in the way described above thereafter.
- the refractive index remained 1.26 and unchanged, with no flaws observed.
- Optical elements having an antireflection coating made using hollow particles according to an aspect of the invention, offering reduced reflection of light at the light-emitting and light-receiving surfaces thereof, can be used in imaging devices such as still and video cameras as well as in projectors such as liquid-crystal projectors and optical scanners for electrophotographic equipment.
- the present invention provides a hollow particle and a method for producing hollow particles.
- the shell of the particle(s) is a continuous layer containing magnesium fluoride and thus is strong.
- the present invention also provides an antireflection coating and an optical element having an antireflection coating.
- the antireflection coating is made using hollow particles having a strong shell containing magnesium fluoride and thus combines excellent strength and a low refractive index.
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Abstract
Description
- The present invention relates to a method for producing hollow particles, hollow particle, an antireflection coating made using the hollow particles, and an optical element having the antireflection coating.
- Antireflection coatings reduce the reflection of light occurring at the light-emitting and light-receiving surfaces of optical elements and ensure the desired optical characteristics of the devices, and such coatings are formed as a monolayer optical film having a certain refractive index and a thickness of several tens to several hundreds of nanometers or as a stack of two or more of such films having different refractive indices. Examples of methods used to produce antireflection coatings include vacuum film formation techniques such as vapor deposition or sputtering as well as wet film formation techniques such as dip coating or spin coating.
- The uppermost layer of an antireflection coating is made of a transparent and low-refractive-index material. Examples of such materials include inorganic ones such as silica, magnesium fluoride, and calcium fluoride as well as organic ones such as silicones and amorphous fluoropolymers.
- Some more recent antireflection coatings use the refractive index of air, 1.0, to be more effective in reducing the reflectance of optical elements than older ones. Pores in a layer of silica or magnesium fluoride reduce the refractive index of the layer. For example, a 30% (volume) space in a magnesium fluoride thin film having a refractive index of 1.38 reduces the refractive index of the film to 1.27.
- An example of a method used to form such pores is to prepare silica or magnesium fluoride fine particles and process these particles into a film with a binder. The pores are formed between the fine particles, giving a low refractive index to the resulting film (refer to PTL 1 and PTL 2).
- Another example used to form such pores is to use hollow silica particles, i.e., particles containing a void. Hollow particles of magnesium fluoride, a material having a lower refractive index than silica, can also be used to make antireflection coatings. Because of the low refractive index, magnesium fluoride allows the resulting antireflection coatings to have a lower refractive index than ones made using hollow silica particles. Furthermore, hollow particles of magnesium fluoride contain a smaller void than hollow silica particles if the refractive indices are equal; hollow magnesium fluoride particles can have a thicker wall (shell) and thus can be stronger than silica-based ones (refer to PTL 3 and PTL 4).
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Japanese Patent Laid-Open No. 2006-151800 International Publication No. 02/018982 Japanese Patent Laid-Open No. 2001-233611 International Publication No. 2007/148938 A1 - The hollow magnesium fluoride particles described in PTL 4 are produced by a method including preparing magnesium fluoride nanoparticles and then attaching the nanoparticles to core particles to form a layer of magnesium fluoride. The use of this magnesium fluoride layer, which is an assembly of particles, leads to the shell lacking sufficient strength, thereby causing the particles to be destroyed during subsequent operations such as hollowing out the particles or dispersing the particles in a medium to produce paint.
- The present invention, made under these circumstances, provides a hollow particle and a method for producing hollow particles. The shell of the particle(s) is a continuous layer containing magnesium fluoride and thus is strong.
- The present invention also provides an antireflection coating and an optical element having an antireflection coating. The antireflection coating is made using hollow particles having a strong shell containing magnesium fluoride and thus combines excellent strength and a low refractive index.
- A method for producing hollow particles that solves the above problem includes obtaining core-shell particles having a core particle and a shell containing magnesium fluoride and removing at least a portion of the core particle from the core-shell particles. The core-shell particles can be obtained by mixing an aqueous dispersion containing the core particles, an aqueous solution containing magnesium, and an aqueous solution containing fluorine at a temperature of 10 degrees Celsius to 30 degrees Celsius, both inclusive, to form a mixture and then heating the mixture at a temperature of 50 degrees Celsius to 80 degrees Celsius, both inclusive.
- A hollow particle that solves the above problem has a continuous shell containing magnesium fluoride.
- Another aspect of the invention is an antireflection coating made using the aforementioned hollow particles.
- Yet another aspect of the invention is an optical element having the aforementioned antireflection coating.
- Further features of the present invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings.
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Fig. 1 is a schematic diagram illustrating an embodiment of the invention. Fig. 2 is a schematic diagram illustrating a method for producing hollow particles according to an embodiment of the invention. Fig. 3 is a transmission electron microscopic (TEM) image of the core-shell particles produced in Example 1. Fig. 4 is a TEM image of the hollow particles produced in Example 6. Fig. 5 is a TEM image of the core-shell particles produced in Comparative Example 1. Fig. 6 is a TEM image taken in Comparative Example 1 after the particles were hollowed out. - The following describes some preferred embodiments of the present invention in detail with reference to the drawings.
- A hollow particle according to an aspect of the invention has a continuous shell containing magnesium fluoride and an at least partially removed hollow core.
- Fig. 1 is a schematic diagram illustrating an embodiment of a hollow particle according to this aspect of the invention. A hollow particle 1 according to this embodiment has a hollow core 2 and a shell 3. The hollow core 2 has been removed at least in part, and the shell 3 is a continuous layer containing magnesium fluoride.
- Hollow particles according to this embodiment of the invention, which have a continuous shell containing magnesium fluoride, can be produced without damage despite treatment for hollowing out the core and are strong enough to be dispersed in a medium without being broken.
- The shell provided in this embodiment of the invention contains fluorine, leading to a low refractive index of the particle. Magnesium, coexisting with fluorine in the shell, stabilizes the particle with excellent resistance to environmental factors without affecting the low refractive index. The refractive index of the particle is as low as 1.2 to 1.3 because of the void existing in the particle. Thus, hollow particles according to this embodiment of the invention can be used in low-refractive-index layers for antireflection coatings to ensure low reflectance of the coatings.
- The shell of a hollow particle according to this embodiment of the invention is a continuous layer containing magnesium fluoride. The term continuous layer, as used herein, refers to a layer formed by crystal nuclei undergoing the aggregation and growth process and solid-state relaxation on the surface of a core particle. The continuous nature of the layer ensured by solid-state relaxation makes the layer a shell stronger than ones produced by attaching particles that have completed solid-state relaxation.
- The average particle diameter of hollow particles according to this embodiment of the invention can be in the range of 30 nm to 200 nm, both inclusive. It is difficult to produce core particles for hollow particles having an average particle diameter smaller than 30 nm in a consistent manner. An average particle diameter exceeding 200 nm causes the hollow particles to scatter light in antireflection coatings because of their large size.
- The thickness of the shell of hollow particles according to this embodiment of the invention can be in the range of 10% to 35%, both inclusive, of the average particle diameter of the hollow particles. A thickness of the shell smaller than 10% of the average particle diameter of the hollow particles renders the particles lacking sufficient strength. When the thickness of the shell exceeds 35% of the average particle diameter of the hollow particles, the void is too small to have significant effects on the refractive index.
- A method for producing hollow particles according to another embodiment of the invention includes obtaining core-shell particles having a core particle and a continuous shell containing magnesium fluoride and removing at least a portion of the core particle from the core-shell particles to form the hollow particles. The core-shell particles can be obtained by adding an aqueous solution containing magnesium and an aqueous solution containing fluorine to an aqueous dispersion containing the core particles at a temperature of 10 degrees Celsius to 30 degrees Celsius, both inclusive, and then heating the combined liquid at a temperature of 50 degrees Celsius to 80 degrees Celsius, both inclusive.
- Fig. 2 is a schematic diagram illustrating a method for producing hollow particles according to this embodiment of the invention. Core-shell particles 4 having a core particle 5 and a continuous shell 3 containing magnesium fluoride are first obtained. At least a portion of the core particle 5 of the core-shell particles 4 is then removed to form a hollow core 2 (hollowing out). As a result, hollow particles 1 are obtained.
- The production of continuous-shell hollow particles according to this embodiment of the invention begins with the formation of crystal nuclei containing at least fluorine and magnesium. The crystal nuclei adhere to core particles and cover them, and then magnesium and fluorine react with each other at the crystal nuclei to form a continuous layer around the core particles.
- The core particles may be made of any organic or inorganic material that allows at least a portion of the core particles to be removed later. Examples of inorganic materials that can be used include SiO2, which is soluble in alkalis, and calcium carbonate, which is soluble in acids.
- Examples of organic materials that can be used include vinyl polymers that are small in size and have a relatively narrow size distribution, such as polymers of styrene, acrylic esters, or vinyl esters. Polystyrene can make the resulting particles small and highly uniform in particle diameter.
- The average particle diameter of the core particles can be in the range of 10 nm to 500 nm, both inclusive, preferably 10 nm to 160 nm, both inclusive.
- The core particles used in this embodiment of the invention, which are fine particles, are required to have a negative zeta potential. Crystal nuclei containing fluorine and magnesium have a positive zeta potential, with which the crystal nuclei can adhere to the core fine particles and cover them.
- The potential of fine particles depends on the material of the particles. However, it is possible to change the potential of the fine particles by modifying the surface of the particles with a functional group. Polymer particles can be surface-modified with a functional group by preparing them using agents appropriate for the intended zeta potential, e.g., an appropriate polymerization initiator. The zeta potential of inorganic particles can also be controlled; this is achieved by introducing a functional group to the surface of the particles through chemical reaction. Examples of functional groups having a negative zeta potential include a sulfonate ion, a carboxylate ion, and a peroxodisulfate ion.
- The aqueous solution containing magnesium can be an aqueous solution of a magnesium salt. Examples of solutes for this aqueous solution include magnesium nitrate, magnesium chloride, magnesium sulfate, magnesium carbonate, magnesium phosphate, and hydrates of these salts.
- The aqueous solution containing fluorine can be an aqueous solution containing fluoride ions. Examples of solutes for this aqueous solution include sodium fluoride, potassium fluoride, hydrofluoric acid, and ammonium fluoride.
- The aqueous dispersion containing the core particles, the aqueous solution containing magnesium, and the aqueous solution containing fluorine are combined. For example, the aqueous solution containing magnesium is added to the aqueous dispersion containing the core particles, and the aqueous solution containing fluorine is added to the resulting mixture. The three liquids can be combined in any order; it is possible to add the aqueous dispersion containing the core particles to the aqueous solution containing magnesium and then add the aqueous solution containing fluorine to the resulting mixture. It is also possible to combine the three liquids at once and then mix. The liquids can be at a temperature of 10 degrees Celsius to 30 degrees Celsius at the time when they are combined. Crystal nuclei can form only when the reaction between magnesium and fluorine is sufficiently slow. The crystal nuclei start to form as soon as the aqueous solution containing magnesium fluoride and the aqueous solution containing fluorine come into contact. Thus, a typical scheme is to adjust the temperature of an aqueous solution of a magnesium salt and an aqueous solution containing fluoride ions within the range of 10 degrees Celsius to 30 degrees Celsius, both inclusive, and then add one solution to the other and allow the solutions to react with each other. A reaction temperature lower than 10 degrees Celsius causes the reaction and, therefore, the formation of the crystal nuclei to be too slow for practical production. Reaction at a temperature exceeding 30 degrees Celsius causes the crystal nuclei to grow into colloidal particles of magnesium fluoride before adhering to the core particles and covering them. These colloidal particles adhere to the core particles and cover them, and the shell will be insufficiently strong. The duration of the reaction can be in the range of 1 minute to 30 minutes, both inclusive.
- The reaction temperature after the three liquids are combined can be in the range of 50 degrees Celsius to 80 degrees Celsius, both inclusive, preferably 60 degrees Celsius to 75 degrees Celsius, both inclusive. The crystal nuclei covering the core particles can grow only when the reaction proceeds sufficiently fast. A reaction temperature lower than 50 degrees Celsius at this stage causes the crystal nuclei to tend to increase in number rather than growing in size. In this case there will be many crystal nuclei not adhering to the surface of the core particles, and these free crystal nuclei will form a large amount of magnesium fluoride colloid. A reaction temperature exceeding 80 degrees Celsius at this stage also causes the crystal nuclei to form too fast and a large amount of magnesium fluoride colloid to be formed. The duration of the reaction at this stage can be in the range of 1 minute to 2 hours, both inclusive.
- The concentration of the aqueous solution containing magnesium can be in the range of 0.05 mol/L to 0.2 mol/L, both inclusive. The concentration of the aqueous solution containing fluoride can be in the range of 0.1 mol/L to 0.4 mol/L, both inclusive. Too low a concentration of the magnesium source or the fluorine source causes the crystal nuclei to form and adhere to the surface of the core particles too slowly. Too high a concentration of the magnesium source or the fluorine source causes too many crystal nuclei to form. In this case there will be many crystal nuclei not adhering to the surface of the core particles, and these free crystal nuclei will form a large amount of magnesium fluoride colloid.
- At least a portion of the core particle is removed from the core-shell particles to form a hollow core. It is also possible to remove the entire core particle. The core particle of the core-shell fine particles can be removed by several ways. If the core particle is made of an inorganic material, the core particle can be removed by using an agent that dissolves the material such as an appropriate acid or alkali. If the core particle is made of an organic material, the core particle can be removed by dissolution in a solvent or firing to turn the core particle into a gas, for example. When the core is made of an organic material and removed by firing the core-shell particles to turn the core into a gas, the heating temperature can be in the range of 200 degrees Celsius to 350 degrees Celsius, both inclusive. Heating at a temperature lower than 200 degrees Celsius is insufficient to remove the core particle because the carbon-carbon bonds in the organic material cannot be broken at such a low temperature. Heating at a temperature of 350 degrees Celsius or less allows the organic material forming the core particle to stay between the fine particles of magnesium fluoride and reinforce the shell.
- The core does not always contain only one void; for example, it is also possible that two or more particles collectively form the core.
- Another embodiment of the invention is an antireflection coating made using the aforementioned hollow particles.
- Dispersions of hollow particles or core-shell particles obtained in accordance with the aforementioned production method can be used to prepare coating liquids for antireflection coatings. If hollow particles are used, slurry obtained by dispersing the hollow particles in a medium can be used as a coating liquid or as a raw material for coating liquids.
- If core-shell particles are used, the aqueous dispersion of the core-shell particles can be directly used as a coating liquid. It is also possible to isolate the core-shell particles by processes such as solvent displacement, centrifugation, or filtration, disperse the isolated particles in an organic solvent, and use the resulting dispersion as a coating liquid or as a raw material for coating liquids. The use of a coating liquid containing the core-shell particles allows a coating of hollow particles to be formed directly on a substrate. This is achieved by applying the coating liquid containing the core-shell particles to the substrate and then firing the applied liquid to hollow out the core-shell particles by removing the core particle. In this way, an antireflection coating formed using hollow particles obtained by the aforementioned method is produced.
- The coating liquid may contain a composition that serves as a binder for fixing the hollow particles to the substrate. This binder composition can be a material having a low refractive index and sufficiently high scratch resistance such as pencil hardness when hardened, and examples include sol-gel compositions of silica, crosslinking acrylic resins, and fluorinated acrylic resins. It is also possible to first apply a dispersion of the hollow particles to the substrate and then apply such a binder composition while allowing the binder composition to penetrate between the hollow particles to fix them to the substrate.
- If core-shell particles are used, the antireflection coating can also be obtained by first forming a layer of the core-shell particles, then forming a layer of the binder, and finally hardening the layers by firing or other processes so that the removal of the core particle also occurs.
- The dispersion of hollow particles or core-shell particles may further contain solid particles.
- The substrate to which the coating liquid is applied can be made of glass, a resin, or any other suitable material. The substrate can be in any shape; for example, flat, curved, concave, convex, and film-like substrates can be used.
- The coating liquid can be applied to the substrate by any suitable method. All methods commonly used with liquid coating agents can be used, including dip coating, spin coating, spray coating, and roll coating.
- The applied coating liquid is then fire-dried, using an oven, a hot plate, an electric furnace, or the like. The temperature and duration of fire-drying are so adjusted that the organic solvent contained in the hollow particles is evaporated without damage to the substrate. Usually, the fire-drying temperature can be 350 degrees Celsius or less.
- Usually, the coating liquid can be applied once. It is also possible to repeat several cycles of application and drying.
- There may be one or more additional layers, e.g., layers having a high or intermediate refractive index, between the substrate and the layer of the coating liquid. Examples of materials for such high- or intermediate-refractive-index layers include zirconium oxide, titanium oxide, tantalum oxide, niobium oxide, hafnium oxide, alumina, silica, and magnesium fluoride.
- The layer of the coating liquid may be further coated with a functional layer for purposes such as repelling water and oil. Such a functional layer can be formed using a paint containing fluorine or a silicone paint, for example.
- Such layers having a selected refractive index or functionality can be formed by processes such as vacuum deposition, sputtering, CVD, dip coating, spin coating, or spray coating.
- Forming such an antireflection coating on a transparent material such as a plastic or glass material significantly reduces the reflectance of the surface of the material.
- Another embodiment of the invention is an optical element having the aforementioned antireflection coating. Optical elements according to this embodiment of the invention, offering reduced reflection of light at the light-emitting and light-receiving surfaces thereof, can be used in imaging devices such as still and video cameras as well as in projectors such as liquid-crystal projectors and optical scanners for electrophotographic equipment.
- The following illustrates some examples of the present invention to describe some embodiments of the invention in more detail. The present invention is not limited to these examples within the scope thereof.
-
- In a nitrogen atmosphere 240 mL of water was heated at 80 degrees Celsius, 10 g of styrene was added thereto, and the mixture was stirred. After 1 mL of 0.1 g/mL aqueous solution of potassium persulfate was added, the solution was heated at 80 degrees Celsius for 4 hours. In this way, an aqueous dispersion of core particles having an average particle diameter of 300 nm (a polystyrene particle aqueous dispersion) was obtained.
- One (1) milliliter of the polystyrene particle aqueous solution was added to 80 mL of 0.05 mol/L aqueous solution of Mg(NO3)2.6H2O, and the mixture was cooled to 30 degrees Celsius and stirred. To the stirred solution 40 mL of 0.1 mol/L aqueous solution of ammonium fluoride was added. The resulting mixture was heated at 80 degrees Celsius for 1 hour.
- A dried film of the obtained solution was observed under a transmission electron microscope (TEM) and characterized for elemental composition using an energy-dispersive X-ray spectroscopy system (EDS), confirming that core-shell particles had been formed and the shell contained fluorine and magnesium. Fig. 3 is a TEM image. The resulting particles had a continuous shell as a result of solid-state relaxation, and the shell had grown outwards from the core like an array of pillars.
- The obtained core-shell particles were fired at 350 degrees Celsius for 1 hour. The fired particles were observed under a TEM and characterized for elemental composition using an EDS in the same way as the unfired core-shell particles, confirming that hollow particles had been formed. The hollow particles had an average particle diameter of 450 nm and a shell thickness of 75 nm. The shell contained fluorine, magnesium, and carbon.
- Production of Core Particles
- A polystyrene particle aqueous dispersion was obtained as in Example 1 except that the amount of styrene was 5 g. The average particle diameter of core particles in this example was 150 nm.
Production of Core-Shell Particles - Three (3) milliliters of the polystyrene particle aqueous dispersion was added to 80 mL of 0.1 mol/L aqueous solution of Mg(NO3)2.6H2O, and the mixture was cooled to 10 degrees Celsius and stirred. To the stirred solution 40 mL of 0.2 mol/L aqueous solution of ammonium fluoride was added. The resulting mixture was heated at 50 degrees Celsius for 1 hour.
- A dried film of the obtained solution was observed under a TEM and characterized for elemental composition using an EDS, confirming that core-shell particles had been formed and the shell contained fluorine and magnesium. The average particle diameter of the core-shell particles was 210 nm, and the shell was a continuous layer as in Example 1. The shell was also analyzed for elemental composition in the same way as the core-shell particles and found to contain fluorine and magnesium.
Production of Hollow Particles - The obtained core-shell particles were fired at 300 degrees Celsius for 1 hour. The fired particles were observed under a TEM in the same way as the unfired core-shell particles, confirming that hollow particles had been formed. The hollow particles had an average particle diameter of 210 nm and a shell thickness of 30 nm. The shell was characterized for elemental composition in the same way as the core-shell particles and found to contain fluorine, magnesium, and carbon.
- Production of Hollow Particles
- Eighty (80) milliliters of 0.1 mol/L aqueous solution of Mg(NO3)2.6H2O was cooled to 20 degrees Celsius and stirred, and 8 mL of an aqueous dispersion containing SO3-modified polystyrene latex particles (micromod micromer particles with an average particle diameter of 15 nm) as core particles was added. To the cooled and stirred solution 40 mL of 0.2 mol/L aqueous solution of ammonium fluoride was added. The resulting mixture was heated at 80 degrees Celsius for 1 hour.
- A dried film of the obtained solution was observed under a TEM and characterized for elemental composition using an EDS, confirming that core-shell particles had been formed and the shell contained fluorine and magnesium. The average particle diameter of the core-shell particles was 30 nm. The shell of the obtained particles was a layer of heteroaggregated magnesium fluoride fine particles.
- The obtained core-shell particles were fired at 350 degrees Celsius for 1 hour. The fired particles were observed under a TEM in the same way as the unfired core-shell particles, confirming that hollow particles had been formed. The hollow particles had an average particle diameter of 30 nm and a shell thickness of 7.5 nm. The shell was characterized for elemental composition in the same way as the core-shell particles and found to contain fluorine, magnesium, and carbon.
- A polystyrene particle aqueous dispersion was obtained as in Example 1 except that the amount of styrene was 2 g. The average particle diameter of core particles in this example was 100 nm.
- Sixty (60) milliliters of the polystyrene particle aqueous dispersion was added to 40 mL of 0.15 mol/L aqueous solution of Mg(NO3)2.6H2O, and the mixture was cooled to 20 degrees Celsius and stirred. To the stirred solution 40 mL of 0.3 mol/L aqueous solution of ammonium fluoride was added. The resulting mixture was heated at 70 degrees Celsius for 1 hour.
- A dried film of the obtained solution was observed under a TEM and characterized for elemental composition using an EDS, confirming that core-shell particles had been formed and the shell contained fluorine and magnesium. The average particle diameter of the core-shell particles was 330 nm, and the shell was a continuous layer formed as a result of solid-state relaxation.
- The obtained core-shell particles were fired at 350 degrees Celsius for 1 hour. The fired particles were observed under a TEM in the same way as the unfired core-shell particles, confirming that hollow particles had been formed. The hollow particles had an average particle diameter of 330 nm and a shell thickness of 115 nm. The shell was characterized for elemental composition in the same way as the core-shell particles and found to contain fluorine, magnesium, and carbon.
- Production of Core-Shell Particles
- Sixty (60) milliliters of the polystyrene particle aqueous dispersion prepared in Example 4 was added to 80 mL of 0.1 mol/L aqueous solution of Mg(NO3)2.6H2O, and the mixture was heated to 80 degrees Celsius and stirred. To the stirred solution 40 mL of 0.2 mol/L aqueous solution of ammonium fluoride was added. The resulting mixture was heated at 80 degrees Celsius for 1 hour.
- A dried film of the obtained solution was observed under a TEM and characterized for elemental composition using an EDS, confirming that core-shell particles had been formed and the shell contained fluorine and magnesium. The average particle diameter of the core-shell particles was 120 nm. Fig. 5 is a TEM image.
- The shell of the obtained particles was a layer of magnesium fluoride fine particles adhering to the core particle. The obtained core-shell particles were fired at 350 degrees Celsius for 1 hour. The fired particles were observed under a TEM in the same way as the unfired core-shell particle; however, no hollow particles were observed, with there being only a magnesium fluoride fine powder. Fig. 6 is a TEM image.
- A polystyrene particle aqueous dispersion was obtained as in Example 1 except that the amount of styrene was 1 g. The average particle diameter of core particles in this example was 50 nm.
- Sixty (60) milliliters of the polystyrene particle aqueous dispersion was added to 40 mL of 0.1 mol/L aqueous solution of magnesium phosphate, and the mixture was cooled to 30 degrees Celsius and stirred. To the stirred solution 40 mL of 0.2 mol/L aqueous solution of ammonium fluoride was added. The resulting mixture was heated at 70 degrees Celsius for 1 hour.
- The obtained core-shell particles were fired at 350 degrees Celsius for 1 hour. The fired particles were observed under a TEM, confirming that hollow particles had been formed. The hollow particles had an average particle diameter of 75 nm and a shell thickness of 12.5 nm. The shell was characterized for elemental composition and found to contain fluorine, magnesium, and carbon.
- Production of Core-Shell Particles
- A polystyrene particle aqueous dispersion was obtained as in Example 1 except that the amount of styrene was 1 g. The average particle diameter of core particles in this example was 50 nm.
- Sixty (60) milliliters of the polystyrene particle aqueous dispersion was added to 40 mL of 0.1 mol/L aqueous solution of Mg(NO3)2.6H2O, and the mixture was cooled to 20 degrees Celsius and stirred. To the stirred solution 40 mL of 0.2 mol/L aqueous solution of ammonium fluoride was added. The resulting mixture was heated at 70 degrees Celsius for 1 hour.
- A dried film of the obtained solution was observed under a TEM and characterized for elemental composition using an EDS, confirming that core-shell particles had been formed and the shell contained fluorine and magnesium. The average particle diameter of the core-shell particles was 75 nm. Fig. 4 is a TEM image. The shell of the obtained particles was a continuous layer formed as a result of solid-state relaxation with a thickness of 12.5 nm.
- The obtained core-shell particles were fired at 350 degrees Celsius for 1 hour. The fired particles were observed under a TEM in the same way as the unfired core-shell particles, confirming that hollow particles had been formed. The hollow particles had an average particle diameter of 75 nm and a shell thickness of 12.5 nm. The shell was characterized for elemental composition in the same way as the core-shell particles and found to contain fluorine, magnesium, and carbon.
-
- The core-shell particles prepared during the production of hollow particles in Example 6 were isolated by centrifugation. The isolated particles were washed by repeating the operations of adding water to the particles, stirring the resulting aqueous dispersion, and centrifuging the stirred dispersion. To the washed particles 1-methoxy-2-propanol was added, producing a coating dispersion containing the core-shell particles in 2 wt%. A drop of this coating liquid was formed into a film by spin coating on a BK7 flat substrate having a diameter of 39 mm.
- This film was coated with a film formed by spin coating of a drop of another coating liquid, a liquid silica sol-gel (CN-1110 available from JGC Catalysts and Chemicals Ltd.) diluted to 1 wt% in 1-methoxy-2-propanol. The films were fired at 300 degrees Celsius for 3 hours, producing the antireflection coating of this example.
- The substrate with an antireflection coating produced in Example 7 was analyzed for reflectance over the wavelength range of 400 nm to 700 nm using an Olympus reflectometer for lenses (USPM-RU). The refractive index determined from the reflectance at 550 nm was 1.26.
- The substrate was then rubbed with a piece of lens-cleaning paper in 20 back and forth motions under a load of 300 g/cm2, and the refractive index was measured in the way described above thereafter. The refractive index remained 1.26 and unchanged, with no flaws observed.
- While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.
- This application claims the benefit of Japanese Patent Application No. 2012-161544, filed July 20, 2012, which is hereby incorporated by reference herein in its entirety.
- Optical elements having an antireflection coating made using hollow particles according to an aspect of the invention, offering reduced reflection of light at the light-emitting and light-receiving surfaces thereof, can be used in imaging devices such as still and video cameras as well as in projectors such as liquid-crystal projectors and optical scanners for electrophotographic equipment.
- The present invention provides a hollow particle and a method for producing hollow particles. The shell of the particle(s) is a continuous layer containing magnesium fluoride and thus is strong.
- The present invention also provides an antireflection coating and an optical element having an antireflection coating. The antireflection coating is made using hollow particles having a strong shell containing magnesium fluoride and thus combines excellent strength and a low refractive index.
Claims (11)
- A method for producing hollow particles comprising:
forming core-shell particles each having a core particle and a shell containing magnesium fluoride by combining an aqueous dispersion containing the core particles, an aqueous solution containing magnesium, and an aqueous solution containing fluorine to form a combined liquid and heating the combined liquid; and
removing at least a portion of the core particle from each of the core-shell particles. - The method for producing hollow particles according to Claim 1, wherein the aqueous dispersion and the aqueous solutions are combined at a temperature of 10 degrees Celsius to 30 degrees Celsius, both inclusive.
- The method for producing hollow particles according to Claim 1 or 2, wherein the combined liquid is heated to a temperature of 50 degrees Celsius to 80 degrees Celsius, both inclusive.
- The method for producing hollow particles according to any one of Claims 1 to 3, wherein the core particle is made of a vinyl polymer.
- The method for producing hollow particles according to any one of Claims 1 to 4, wherein the at least a portion of the core particle is removed by heating the core-shell particle to a temperature of 200 degrees Celsius to 350 degrees Celsius, both inclusive.
- A hollow particle comprising a continuous shell containing magnesium fluoride.
- The hollow particle according to Claim 6, wherein the shell contains carbon.
- The hollow particle according to Claim 6 or 7, wherein a particle diameter of the hollow particle is in a range of 30 nm to 200 nm, both inclusive.
- The hollow particle according to any one of Claims 6 to 8, wherein a thickness of the shell is in a range of 10% to 35%, both inclusive, of the particle diameter of the hollow particle.
- An antireflection coating comprising hollow particles produced by the method according to any one of Claims 1 to 5 or the hollow particle according to any one of Claims 6 to 9.
- An optical element comprising the antireflection coating according to Claim 10.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012161544A JP5943754B2 (en) | 2012-07-20 | 2012-07-20 | Hollow particle manufacturing method, antireflection film manufacturing method, and optical element manufacturing method |
| PCT/JP2013/004312 WO2014013708A1 (en) | 2012-07-20 | 2013-07-12 | Method for producing hollow particles, hollow particle, antireflection coating, and optical element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP2874947A1 true EP2874947A1 (en) | 2015-05-27 |
| EP2874947A4 EP2874947A4 (en) | 2016-05-11 |
Family
ID=49948551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP13819227.3A Withdrawn EP2874947A4 (en) | 2012-07-20 | 2013-07-12 | Method for producing hollow particles, hollow particle, antireflection coating, and optical element |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20150225569A1 (en) |
| EP (1) | EP2874947A4 (en) |
| JP (1) | JP5943754B2 (en) |
| CN (1) | CN104487386A (en) |
| WO (1) | WO2014013708A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6274924B2 (en) * | 2014-03-14 | 2018-02-07 | キヤノン株式会社 | Antireflection film, optical member, and method of manufacturing optical member |
| CN107652718B (en) * | 2017-09-27 | 2020-03-31 | 广东星星光电科技有限公司 | Antireflection coating liquid and preparation method thereof |
| CN110231727B (en) * | 2019-05-14 | 2020-11-24 | 深圳市华星光电半导体显示技术有限公司 | Membrane structure and method of making same |
| JP7644953B2 (en) | 2019-12-27 | 2025-03-13 | ステラケミファ株式会社 | Dispersion of fluoride particles, its manufacturing method, and optical film |
| JP7557214B2 (en) | 2022-12-01 | 2024-09-27 | 森田化学工業株式会社 | Core/shell type particles and their manufacturing method, and method for manufacturing hollow particles |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63258642A (en) * | 1987-04-15 | 1988-10-26 | Agency Of Ind Science & Technol | Hollow inorganic powder and grain materials and preparation of same |
| EP0972563A1 (en) * | 1998-07-15 | 2000-01-19 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Fabrication of multilayer-coated particles and hollow shells via electrostatic self-assembly of nanocomposite multilayers on decomposable colloidal templates |
| WO2002041987A2 (en) * | 2000-10-25 | 2002-05-30 | Tufts University | Polymeric microspheres |
| KR20030051548A (en) * | 2003-06-04 | 2003-06-25 | 성정환 | cellular phone battery with mirror and cap |
| KR100628033B1 (en) * | 2006-06-23 | 2006-09-27 | (주)화인졸테크 | Hollow magnesium fluoride particles, preparation method and antireflection coating solution using the same |
| WO2009023697A2 (en) * | 2007-08-14 | 2009-02-19 | The Regents Of The University Of California | Hollow silica nanospheres and methods of making same |
| CN101376514A (en) * | 2007-08-30 | 2009-03-04 | 多氟多化工股份有限公司 | A kind of production method of magnesium fluoride |
| KR100995401B1 (en) * | 2008-04-30 | 2010-11-19 | 주식회사 엘지화학 | Hollow magnesium fluoride particles, preparation method thereof and anti-reflective coating solution comprising the same |
| JP5751759B2 (en) * | 2009-04-06 | 2015-07-22 | キヤノン株式会社 | Method for producing optical film |
| JP5773605B2 (en) * | 2010-10-04 | 2015-09-02 | キヤノン株式会社 | Method for producing hollow magnesium fluoride particles, antireflection film using the particles, and optical element |
-
2012
- 2012-07-20 JP JP2012161544A patent/JP5943754B2/en active Active
-
2013
- 2013-07-12 US US14/415,576 patent/US20150225569A1/en not_active Abandoned
- 2013-07-12 CN CN201380038551.0A patent/CN104487386A/en active Pending
- 2013-07-12 EP EP13819227.3A patent/EP2874947A4/en not_active Withdrawn
- 2013-07-12 WO PCT/JP2013/004312 patent/WO2014013708A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| US20150225569A1 (en) | 2015-08-13 |
| EP2874947A4 (en) | 2016-05-11 |
| JP2014019626A (en) | 2014-02-03 |
| CN104487386A (en) | 2015-04-01 |
| WO2014013708A1 (en) | 2014-01-23 |
| JP5943754B2 (en) | 2016-07-05 |
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