EP2860154A4 - Verfahren und system zur charakterisierung von nano- und mikromechanischen strukturen - Google Patents

Verfahren und system zur charakterisierung von nano- und mikromechanischen strukturen

Info

Publication number
EP2860154A4
EP2860154A4 EP13799806.8A EP13799806A EP2860154A4 EP 2860154 A4 EP2860154 A4 EP 2860154A4 EP 13799806 A EP13799806 A EP 13799806A EP 2860154 A4 EP2860154 A4 EP 2860154A4
Authority
EP
European Patent Office
Prior art keywords
characterization
nano
micromechanical structures
micromechanical
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP13799806.8A
Other languages
English (en)
French (fr)
Other versions
EP2860154A1 (de
Inventor
De Miguel Francisco Javier Tamayo
Valerio Pini
Kosaka Priscila Monteiro
Gómez Montserrat Calleja
Castilla Sheila González
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consejo Superior de Investigaciones Cientificas CSIC
Original Assignee
Consejo Superior de Investigaciones Cientificas CSIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consejo Superior de Investigaciones Cientificas CSIC filed Critical Consejo Superior de Investigaciones Cientificas CSIC
Publication of EP2860154A1 publication Critical patent/EP2860154A1/de
Publication of EP2860154A4 publication Critical patent/EP2860154A4/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0085—Testing nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/003—Characterising MEMS devices, e.g. measuring and identifying electrical or mechanical constants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
EP13799806.8A 2012-06-07 2013-05-23 Verfahren und system zur charakterisierung von nano- und mikromechanischen strukturen Pending EP2860154A4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ES201230884 2012-06-07
PCT/ES2013/070331 WO2013182721A1 (es) 2012-06-07 2013-05-23 Método y sistema de caracterización de estructuras nano y micro mecánicas

Publications (2)

Publication Number Publication Date
EP2860154A1 EP2860154A1 (de) 2015-04-15
EP2860154A4 true EP2860154A4 (de) 2016-01-20

Family

ID=49711453

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13799806.8A Pending EP2860154A4 (de) 2012-06-07 2013-05-23 Verfahren und system zur charakterisierung von nano- und mikromechanischen strukturen

Country Status (3)

Country Link
US (1) US9829427B2 (de)
EP (1) EP2860154A4 (de)
WO (1) WO2013182721A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201212701D0 (en) * 2012-07-17 2012-08-29 Silixa Ltd Structure monitoring
CN105712314B (zh) * 2014-12-05 2017-12-01 清华大学 碳纳米管阵列的制备方法和碳纳米管膜的制备方法
DE102015006697B4 (de) * 2015-05-21 2018-08-02 Universität Stuttgart Optisches Verfahren und Anordnung zur Eigenspannungsmessung, insbesondere an beschichteten Objekten
CN109687757B (zh) * 2019-01-30 2020-04-17 宁波大学 六自由度大行程无耦合大中空串并联压电微动平台
CN112372036B (zh) * 2020-10-30 2023-05-23 东北林业大学 一种亚波长闪耀光栅结构的加工方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5929440A (en) * 1996-10-25 1999-07-27 Hypres, Inc. Electromagnetic radiation detector
US6169281B1 (en) * 1998-07-29 2001-01-02 International Business Machines Corporation Apparatus and method for determining side wall profiles using a scanning probe microscope having a probe dithered in lateral directions
WO2003019241A2 (en) * 2001-08-23 2003-03-06 Asylum Research Corporation Diffractive optical position detector
US7119645B2 (en) * 2003-02-25 2006-10-10 The University Of North Carolina Methods and systems for controlling motion of and tracking a mechanically unattached probe
EP1575058A1 (de) * 2004-03-08 2005-09-14 Consejo Superior De Investigaciones Cientificas Vorrichtung und Verfahren zur Erfassung von Verschiebungen einer Mehrheit von Mikro- und Nanomechanischen Bauelementen, wie Mikrocantilevern.
US20060075803A1 (en) * 2004-07-09 2006-04-13 Danmarks Tekniske Universitet Polymer-based cantilever array with optical readout
WO2009147452A1 (en) * 2008-06-06 2009-12-10 Infinitesima Ltd Method of probe alignment
US9297827B2 (en) * 2008-06-16 2016-03-29 Roger B. Proksch Quantitative measurements using multiple frequency atomic force microscopy
US20110041224A1 (en) * 2009-08-06 2011-02-17 Purdue Research Foundation Atomic force microscope including accelerometer
US8448261B2 (en) * 2010-03-17 2013-05-21 University Of Tennessee Research Foundation Mode synthesizing atomic force microscopy and mode-synthesizing sensing

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KOSAKA P ET AL: "Simultaneous imaging of the topography and dynamic properties of nanomechanical systems by optical beam deflection microscopy", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS, US, vol. 109, no. 6, 24 March 2011 (2011-03-24), pages 64315 - 64315, XP012147833, ISSN: 0021-8979, DOI: 10.1063/1.3561812 *

Also Published As

Publication number Publication date
EP2860154A1 (de) 2015-04-15
US9829427B2 (en) 2017-11-28
US20150177126A1 (en) 2015-06-25
WO2013182721A1 (es) 2013-12-12

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