EP2823890A1 - Method and installation for the wet chemical deposition of nickel layers - Google Patents
Method and installation for the wet chemical deposition of nickel layers Download PDFInfo
- Publication number
- EP2823890A1 EP2823890A1 EP13176174.4A EP13176174A EP2823890A1 EP 2823890 A1 EP2823890 A1 EP 2823890A1 EP 13176174 A EP13176174 A EP 13176174A EP 2823890 A1 EP2823890 A1 EP 2823890A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- nickel
- magnet
- nickel bath
- deposition
- bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims abstract description 164
- 229910052759 nickel Inorganic materials 0.000 title claims abstract description 82
- 238000000034 method Methods 0.000 title claims description 22
- 238000005234 chemical deposition Methods 0.000 title claims description 4
- 238000009434 installation Methods 0.000 title 1
- 239000002245 particle Substances 0.000 claims abstract description 35
- 238000000151 deposition Methods 0.000 claims description 16
- 230000008021 deposition Effects 0.000 claims description 15
- 238000004804 winding Methods 0.000 claims description 12
- 238000000926 separation method Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000011574 phosphorus Substances 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 239000000446 fuel Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 claims 2
- 239000011241 protective layer Substances 0.000 claims 1
- 229910052761 rare earth metal Inorganic materials 0.000 claims 1
- 150000002910 rare earth metals Chemical class 0.000 claims 1
- 239000000126 substance Substances 0.000 abstract description 7
- 238000000576 coating method Methods 0.000 description 9
- 239000000047 product Substances 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 4
- 238000001914 filtration Methods 0.000 description 3
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 3
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 3
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 239000008139 complexing agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 229910001172 neodymium magnet Inorganic materials 0.000 description 2
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 229940053662 nickel sulfate Drugs 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
- 229920006268 silicone film Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C1/00—Magnetic separation
- B03C1/02—Magnetic separation acting directly on the substance being separated
- B03C1/28—Magnetic plugs and dipsticks
- B03C1/286—Magnetic plugs and dipsticks disposed at the inner circumference of a recipient, e.g. magnetic drain bolt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C1/00—Magnetic separation
- B03C1/02—Magnetic separation acting directly on the substance being separated
- B03C1/16—Magnetic separation acting directly on the substance being separated with material carriers in the form of belts
- B03C1/22—Magnetic separation acting directly on the substance being separated with material carriers in the form of belts with non-movable magnets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C1/00—Magnetic separation
- B03C1/02—Magnetic separation acting directly on the substance being separated
- B03C1/28—Magnetic plugs and dipsticks
- B03C1/288—Magnetic plugs and dipsticks disposed at the outer circumference of a recipient
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1617—Purification and regeneration of coating baths
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
- C23C18/1628—Specific elements or parts of the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
- C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C2201/00—Details of magnetic or electrostatic separation
- B03C2201/18—Magnetic separation whereby the particles are suspended in a liquid
Definitions
- the wet-chemical deposition of nickel layers has been a well-known and extensively used process for a long time.
- the layers are also referred to as so-called chemical nickel layers, which distinguishes them from galvanic nickel layers.
- Products to be coated are suspended in a suitable manner, for example on a standard electroplating rack, and placed in a special nickel bath, e.g. nickel sulphate-based with a nickel content of e.g. 4g to 8g nickel per liter can be constructed.
- a special nickel bath e.g. nickel sulphate-based with a nickel content of e.g. 4g to 8g nickel per liter can be constructed.
- Hypophosphite can be used as the reducing agent;
- complexing agents are additionally provided.
- Such methods have been used, inter alia, for products which are to be given improved wear resistance or improved corrosion protection by the coating.
- a well-known example are housing of fuel pumps for internal combustion engines, for example in cars.
- the prior art is additionally referred to the EP 02 102 609 , which deals with a container for the chemical metallization, in particular the nickel deposition, and also deals with the filtering of particles from the nickel bath.
- the invention has for its object to provide an improved method for wet-chemical deposition of nickel layers.
- This object is achieved by providing a magnet for fixing nickel particles in the nickel bath in or on the nickel bath during the deposition.
- the inventor has found that the nickel particles are not only in terms of the mentioned in the EP 02 102 609
- Thematic wall deposits can be problematic. They can also adhere to the coated products or even grow by further deposition and thus at least affect the surface quality. This may affect the frictional properties, but it can also emanate from separating or separated during operation of the product further problems.
- the improvement of the invention consists of magnetically collecting nickel particles from the nickel bath by using a magnet in or on the nickel bath at least during the deposition.
- nickel particles also means particles which are originally based on materials or impurities other than those of nickel, but which have been or have been coated in the bath with nickel. They also have the property of being attracted to a magnet by the nickel coating and can thus be directed in the nickel bath to the magnet and fixed in its surroundings or on it. In any case, they are in fact deprived or immobilized in the part to which they migrate to the magnet and remain there. If necessary, they can be removed (with or without the magnet) from the nickel bath.
- the adverse effects of the particles are reduced, in particular, depending on the application, the load on the filter in the recirculation system , the growth on the tub walls and / or the adhesion and growth of particles on the coated products.
- the magnet can also be used to collect particles in size ranges which are not detected or poorly detected by the customary filters, in particular particles in a range between 0.1 ⁇ m and 3 ⁇ m (based on the smallest particle size; other dimensions can be larger ). Particles below the lower limit will not interfere significantly in many cases, and particles above the upper limit may also be detected by the filter. While such small particles disturb less than larger ones, they can grow within a short time, e.g. grow to 30 ⁇ m within one hour.
- the magnet is a permanent magnet, although an electromagnet is also conceivable.
- the permanent magnet is associated with less effort and experience is basically sufficient.
- relatively strong permanent magnets are to be preferred, in particular those made of alloys of rare earths such as neodymium or samarium. Good examples are NdFeB or SmCo.
- the magnet according to the invention can attract nickel particles in the nickel bath in various ways. For example, it may be externally supported on a wall of a tub containing the nickel bath. The magnetic field then passes through the wall into the nickel bath and produces the desired attractive effect. Further, the magnet could also be mounted outside, for example, a recirculation line that carries the nickel bath in a recirculation process. For example, in the case of a magnet arranged outside a circulation line, a line part could be exchangeable, it being possible to switch over between two lines in the sense of a mutual bypass ratio.
- the magnet is immersed in the nickel bath during deposition.
- the superficial liquid level in the nickel bath is at least higher than the underside of the magnet and preferably as its top side and the magnet at least one larger part of its environment (the full solid angle around it) surrounded by the nickel bath.
- the magnet when the magnet is immersed in a pocket, there may still be a free space without nickel bath above the magnet.
- the magnet is preferably coated, for example painted.
- the magnet can be clad with an interchangeable (including removable and cleanable) Abscheide Scheme for example from a film.
- this separation surface can also replace the coating just mentioned, but preferably both a coating (including a tight foil covering) of the magnet and an exchangeable separation surface are provided for safety.
- the latter then has, besides the separation of the magnetic material from the nickel bath, in particular the task of absorbing adhering and growing material on the surface facing the nickel bath and of making it easily removable by removing the separation surface.
- the Abscheide II can in principle be exchanged for a new or cleaned or even easily separated from the adhering material, the latter can be much easier after removing.
- a special case of the exchangeable separation surface is a separation surface which is movable during the coating process by a movement device, in particular a film web moved during the process.
- a movement device in particular a film web moved during the process.
- this can be moved between two windings (an unwinding and a winding winding), wherein the windings are preferably arranged above the bath and above the magnet.
- the film web therebetween may then travel in an approximate U-shape (not necessarily with parallel legs) from the windings downwardly, around the magnet and back up, preventing the film from adhering or growing too thickly be removed.
- the magnet can be arranged, for example, in a rod-shaped shape in the curvature of the U-shape.
- the remaining end openings are either tolerable, especially with additional coating of the magnet, or can be at least largely closed by fixed trim parts.
- Favorable web speeds for the moving separation surface are approximately in the range of tenths to tens of cm / h, that is approximately between 0.1 and 50 cm / h, where 0.5 cm / h and 1 cm / h. h as the lower limit and, on the other hand, 10 cm / h, 5 cm / h and 3 cm / h as the upper limit, respectively, are increasingly preferred.
- the invention is preferably used in combination with a pump and a filter for circulating the nickel bath.
- the magnet is preferably arranged in the vicinity of the suction port, that is to say it is intended, above all, to serve to reduce the particle concentration in this environment before it enters the filter. This relieves the filter on the one hand;
- the particles after their residence time in the bath are larger than before upon re-entry into the bath, so that the magnet is particularly effective there. He can supplement himself with the filter insofar as the filter typically only filters out particles of a certain minimum size and the magnet also collects particles below this minimum size in particular. In many cases, very small particles are tolerable and have negligible harmful effects.
- a trough shape with rounded corners is advantageous for the effectiveness of the pump-supported circulation of the nickel bath, wherein a minimum radius of curvature of approximately 5 cm, preferably 10 cm, is preferred.
- adhering to the magnet or its coating or Abscheide Scheme material is preferably supplied for reuse.
- hypophosphite can be used as a reducing agent in the nickel bath (in particular based on nickel sulphate).
- the phosphorus content is then in percent by weight and, based on the nickel content, preferably at most 6%. On the other hand, it should preferably be at least 3%.
- the invention is also directed to a product accordingly provided with a so-called chemical nickel layer, which, however, can be further processed beyond the nickel coating, in particular may have additional coatings. It is further directed to a suitable system for carrying out the method described, including the implicit disclosure of device details in the above, to the following embodiment and also to the content of the above-cited EP 02 102 609 can be referenced. Finally, the invention is also directed to a corresponding use of a magnet, in particular permanent magnet.
- FIG. 1 1 denotes a permanent magnet according to the invention, specifically a NdFeB magnet with a rod shape, the rod longitudinal axis being perpendicular to the plane of the drawing.
- a permanent magnet specifically a NdFeB magnet with a rod shape, the rod longitudinal axis being perpendicular to the plane of the drawing.
- These magnets have a cylindrical shape in the present example. They are protected with a varnish 2, which could also be a tight-fitting, perhaps glued, foil.
- the magnetic rod 1 is held by a mechanical support 3 from above (the vertical in FIG. 1 corresponds to the gravitational direction), where, for example, the in FIG. 1 below indicated circular plates could be adhered to the end of the holder 3.
- a suspension device At the upper end of the holder 3 is a suspension device, which can be brought in a suitable manner via a corresponding bath, but not shown here.
- the chemical nickel bath is merely indicated, by the horizontal line 4, which is to symbolize the liquid surface level; the magnetic rod 1 is so immersed.
- a typical speed is 2 cm / h, depending on the amount of nickel deposited.
- Nickel particles from the bath below the mirror 4 are attracted by the bar magnet 4 and thereby divide substantially outside of the film web 6, especially in the lower semicircular segment of the circular periphery of the bar magnet.
- the there precipitating material of nickel particles is thus drawn with the film web 6 upwards and on the winding 5b rolled up. It can be removed, for example, after a simple passage of the entire film web 6 with the winding 5b and, for example, by peeling off the films (at high bending of the same) or be replaced in another form and reused.
- the bath is a typical nickel-sulfate-based wet-chemical nickel plating bath having e.g. 6 g / l nickel.
- 4.5 percent by weight of phosphorus in the form of hypophosphite and also a conventional complexing agent are typically present with respect to nickel.
- FIG. 2 additionally shows the bath container, according to the EP 02 102 609 11 shows an outer container with a perforated plate intermediate container 12 and therein a silicone film 13.
- liquid 14 which is circulated by a pump 15 with not separately drawn particulate filter.
- the windings 5a, b are only indicated and the mechanical support 3 for the magnetic rod 1 for simplicity omitted.
- the nickel bath solution largely freed of particles adhering to the film web 6 is fed through the suction opening 16 of the pump 15 and downstream of it two pumping tubes 17 and 18. These also extend perpendicular to the plane and provide, as indicated in the drawing and in the cited EP 02 102 609 shown for an effective circulation within the inner container 12 and the film 13. Decisive are the rounded corners bottom left and right.
- the combination of the effective circulation, the particle filtration and the particle collection by the magnet 1 according to the invention ensures an extraordinarily low particle load.
- This wall deposits are low and are mainly the coated products of high quality. This may be important, for example, in fuel pumps for e.g. Motor vehicles in which adhering nickel particles can lead to malfunctions in the engine.
Abstract
Die Erfindung betrifft ein nasschemisches Nickelbad mit einem Magneten (1) zur Fixierung von Nickelpartikeln.The invention relates to a wet-chemical nickel bath with a magnet (1) for fixing nickel particles.
Description
Die nasschemische Abscheidung von Nickelschichten ist ein seit längerer Zeit allgemein bekannter und umfangreich eingesetzter Prozess. Die Schichten werden auch als sogenannte chemische Nickelschichten bezeichnet, womit man sie von galvanischen Nickelschichten unterscheidet.The wet-chemical deposition of nickel layers has been a well-known and extensively used process for a long time. The layers are also referred to as so-called chemical nickel layers, which distinguishes them from galvanic nickel layers.
Zu beschichtende Erzeugnisse werden in geeigneter Weise, beispielsweise an einem üblichen Galvanikgestell, aufgehängt und in ein spezielles Nickelbad eingebracht, das z.B. auf Nickelsulfat-Basis mit einem Nickelgehalt von z.B. 4g bis 8g Nickel pro Liter aufgebaut sein kann. Als Reduktionsmittel kann dabei Hypophosphit verwendet werden; im Allgemeinen sind zusätzlich Komplexbildner vorgesehen.Products to be coated are suspended in a suitable manner, for example on a standard electroplating rack, and placed in a special nickel bath, e.g. nickel sulphate-based with a nickel content of e.g. 4g to 8g nickel per liter can be constructed. Hypophosphite can be used as the reducing agent; In general, complexing agents are additionally provided.
Solche Verfahren sind unter anderem eingesetzt worden für Erzeugnisse, die durch die Beschichtung eine verbesserte Verschleißfestigkeit oder auch einen verbesserten Korrosionsschutz erfahren sollen. Ein an sich bekanntes Beispiel sind Gehäuse von Treibstoffpumpen für Verbrennungsmotoren beispielsweise in PKW.Such methods have been used, inter alia, for products which are to be given improved wear resistance or improved corrosion protection by the coating. A well-known example are housing of fuel pumps for internal combustion engines, for example in cars.
Zum Stand der Technik wird zusätzlich verwiesen auf die
Der Erfindung liegt die Aufgabe zugrunde, ein verbessertes Verfahren zum nasschemischen Abscheiden von Nickelschichten anzugeben.The invention has for its object to provide an improved method for wet-chemical deposition of nickel layers.
Diese Aufgabe wird gelöst, indem in oder an dem Nickelbad während der Abscheidung ein Magnet zur Fixierung von Nickelpartikeln in dem Nickelbad vorgesehen ist.This object is achieved by providing a magnet for fixing nickel particles in the nickel bath in or on the nickel bath during the deposition.
Der Erfinder hat festgestellt, dass die Nickelpartikel nicht nur hinsichtlich der in der erwähnten
Ferner hat der Erfinder festgestellt, dass die in der zitierten Anmeldung bereits erwähnte Umwälzung und Filtrierung des Nickelbades in dieser Hinsicht erhebliche Verbesserungen bietet, aber Raum für weitere Verbesserungen bleibt. Diese weiteren Verbesserungen betreffen je nach individuellem Anwendungsfall die Entlastung des Filters und/oder die zusätzliche Verbesserung der Partikelfreiheit der Erzeugnisse. Die erfindungsgemäße Verbesserung besteht im magnetischen Sammeln von Nickelpartikeln aus dem Nickelbad durch Einsatz eines Magneten in oder an dem Nickelbad mindestens während der Abscheidung.Further, the inventor has found that the recirculation and filtration of the nickel bath already mentioned in the cited application offers considerable improvements in this regard, but leaves room for further improvement. These further improvements relate to the relief of the filter and / or the additional improvement of the particle freedom of the products, depending on the individual application. The improvement of the invention consists of magnetically collecting nickel particles from the nickel bath by using a magnet in or on the nickel bath at least during the deposition.
Dabei sind mit dem Begriff "Nickelpartikel" übrigens auch Partikel gemeint, die ursprünglich auf andere Materialien oder Verunreinigungen als solche aus Nickel zurückgehen, aber in dem Bad mit Nickel beschichtet worden sind oder werden. Durch die Nickelbeschichtung haben auch sie die Eigenschaft, von einem Magneten angezogen zu werden, und können damit in dem Nickelbad zu dem Magneten gelenkt und in dessen Umgebung oder an ihm fixiert werden. Damit sind sie jedenfalls zu dem Teil, zu dem sie zu dem Magneten wandern und dort verbleiben, dem Nickelbad faktisch entzogen bzw. darin immobilisiert. Bei Bedarf können sie (mit dem Magneten oder auch unabhängig davon) aus dem Nickelbad entfernt werden.By the way, the term "nickel particles" also means particles which are originally based on materials or impurities other than those of nickel, but which have been or have been coated in the bath with nickel. They also have the property of being attracted to a magnet by the nickel coating and can thus be directed in the nickel bath to the magnet and fixed in its surroundings or on it. In any case, they are in fact deprived or immobilized in the part to which they migrate to the magnet and remain there. If necessary, they can be removed (with or without the magnet) from the nickel bath.
Durch die Verringerung der Partikelkonzentration in dem Nickelbad und/oder die Verringerung der Konzentration zumindest der größeren der Partikel (die erfahrungsgemäß in der Regel stärker angezogen werden) werden die nachteiligen Auswirkungen der Partikel verringert, insbesondere, je nach Anwendungsfall, die Belastung des Filters im Umwälzsystem, das Wachstum an den Wannenwänden und/oder das Anhaften und Anwachsen von Partikeln an den beschichteten Erzeugnissen.By reducing the particle concentration in the nickel bath and / or reducing the concentration of at least the larger of the particles (which experience has shown to be more strongly attracted), the adverse effects of the particles are reduced, in particular, depending on the application, the load on the filter in the recirculation system , the growth on the tub walls and / or the adhesion and growth of particles on the coated products.
Insbesondere können mit dem Magneten auch Partikel in Größenbereichen gesammelt werden, die von den üblichen Filtern nicht oder schlecht erfasst werden, und zwar insbesondere Partikel in einem Bereich zwischen 0,1 µm und 3 µm (bezogen auf die kleinste Partikelabmessung, andere Dimensionen können größer sein). Partikel unter der Untergrenze stören in vielen Fällen nicht wesentlich und Partikel über der oberen Grenze können auch von dem Filter erfasst werden. Zwar stören solche kleinen Partikel weniger als größere, jedoch können sie innerhalb kurzer Zeit wachsen, z.B. innerhalb einer Stunde auf 30 µm anwachsen.In particular, the magnet can also be used to collect particles in size ranges which are not detected or poorly detected by the customary filters, in particular particles in a range between 0.1 μm and 3 μm (based on the smallest particle size; other dimensions can be larger ). Particles below the lower limit will not interfere significantly in many cases, and particles above the upper limit may also be detected by the filter. While such small particles disturb less than larger ones, they can grow within a short time, e.g. grow to 30 μm within one hour.
Vorzugsweise handelt es sich bei dem Magneten um einen Dauermagneten, wenngleich ein Elektromagnet ebenfalls denkbar ist. Der Dauermagnet ist mit weniger Aufwand verbunden und reicht erfahrungsgemäß grundsätzlich aus. Allerdings sind relativ starke Dauermagnete zu bevorzugen, insbesondere solche aus Legierungen der Seltenen Erden wie Neodym oder Samarium. Gute Beispiele sind NdFeB oder SmCo.Preferably, the magnet is a permanent magnet, although an electromagnet is also conceivable. The permanent magnet is associated with less effort and experience is basically sufficient. However, relatively strong permanent magnets are to be preferred, in particular those made of alloys of rare earths such as neodymium or samarium. Good examples are NdFeB or SmCo.
Der erfindungsgemäße Magnet kann in verschiedener Weise Nickelpartikel in dem Nickelbad anziehen. Zum Beispiel kann er von außen an einer Wand einer Wanne gehalten sein, die das Nickelbad enthält. Das magnetische Feld reicht dann durch die Wand hindurch in das Nickelbad hinein und erzeugt die gewünschte anziehende Wirkung. Ferner könnte der Magnet auch außerhalb zum Beispiel einer Umwälzleitung angebracht sein, die das Nickelbad bei einem Umwälzprozess führt. Bei einem außerhalb einer Umwälzleitung angeordneten Magneten könnte zum Beispiel ein Leitungsteil austauschbar sein, wobei zwischen zwei Leitungen im Sinne eines gegenseitigen Bypass-Verhältnisses umgeschaltet werden kann.The magnet according to the invention can attract nickel particles in the nickel bath in various ways. For example, it may be externally supported on a wall of a tub containing the nickel bath. The magnetic field then passes through the wall into the nickel bath and produces the desired attractive effect. Further, the magnet could also be mounted outside, for example, a recirculation line that carries the nickel bath in a recirculation process. For example, in the case of a magnet arranged outside a circulation line, a line part could be exchangeable, it being possible to switch over between two lines in the sense of a mutual bypass ratio.
Insbesondere ist aber bevorzugt, dass der Magnet während der Abscheidung in dem Nickelbad eingetaucht ist. Das bedeutet wegen weiter unten noch erläuterten Möglichkeit von Trennschichten zwischen Magnet und Nickelbad nicht zwingend einen ummittelbaren Kontakt, sondern vielmehr, dass der oberflächliche Flüssigkeitsspiegel in dem Nickelbad mindestens höher liegt als die Unterseite des Magnets und vorzugsweise als dessen Oberseite und der Magnet dabei mindestens zu einem größeren Teil seiner Umgebung (des vollen Raumwinkels um ihn herum) von dem Nickelbad umgeben ist. So kann zum Beispiel beim Eintauchen des Magneten in einer Tasche auch über dem Magneten noch ein Freiraum ohne Nickelbad existieren.In particular, however, it is preferred that the magnet is immersed in the nickel bath during deposition. This means, because of the possibility of separating layers between the magnet and the nickel bath which will be explained below, that the superficial liquid level in the nickel bath is at least higher than the underside of the magnet and preferably as its top side and the magnet at least one larger part of its environment (the full solid angle around it) surrounded by the nickel bath. For example, when the magnet is immersed in a pocket, there may still be a free space without nickel bath above the magnet.
Da das Magnetmaterial insbesondere eines Dauermagneten mit dem Nickelbad reagieren oder von diesem beschädigt werden kann, wird der Magnet vorzugsweise beschichtet, zum Beispiel lackiert.Since the magnetic material, in particular of a permanent magnet, can react with or be damaged by the nickel bath, the magnet is preferably coated, for example painted.
Alternativ oder zusätzlich kann der Magnet mit einer auswechselbaren (einschließlich entnehmbaren und reinigbaren) Abscheidefläche beispielsweise aus einer Folie verkleidet werden. Diese Abscheidefläche kann im Prinzip die eben erwähnte Beschichtung auch ersetzen, vorzugsweise ist aber zur Sicherheit sowohl eine Beschichtung (einschließlich einer enganliegenden Folienabdeckung) des Magneten als auch eine auswechselbare Abscheidefläche vorgesehen. Letztere hat dann neben der Trennung des Magnetmaterials von dem Nickelbad vor allem die Aufgabe, anhaftendes und anwachsendes Material auf der dem Nickelbad zugewandten Oberfläche aufzunehmen und durch Abnehmen der Abscheidefläche leicht entfernbar zu machen. Dazu kann die Abscheidefläche grundsätzlich gegen eine neue oder gereinigte ausgetauscht werden oder auch einfach von dem anhaftenden Material getrennt werden, wobei letzteres nach Abnehmen deutlich einfacher sein kann.Alternatively or additionally, the magnet can be clad with an interchangeable (including removable and cleanable) Abscheidefläche for example from a film. In principle, this separation surface can also replace the coating just mentioned, but preferably both a coating (including a tight foil covering) of the magnet and an exchangeable separation surface are provided for safety. The latter then has, besides the separation of the magnetic material from the nickel bath, in particular the task of absorbing adhering and growing material on the surface facing the nickel bath and of making it easily removable by removing the separation surface. For this purpose, the Abscheidefläche can in principle be exchanged for a new or cleaned or even easily separated from the adhering material, the latter can be much easier after removing.
Ein Sonderfall der auswechselbaren Abscheidefläche ist eine während des Beschichtungsprozesses durch eine Bewegungseinrichtung bewegliche Abscheidefläche, insbesondere eine während des Prozesses bewegte Folienbahn. Beispielsweise kann diese zwischen zwei Wicklungen bewegt werden (einer abwickelnden und einer aufwickelnden Wicklung), wobei die Wicklungen vorzugsweise über dem Bad und über dem Magneten angeordnet sind. Die Folienbahn dazwischen kann dann in einer angenäherten U-Form (nicht notwendigerweise mit parallelen Schenkeln) von den Wicklungen nach unten, um den Magneten herum und wieder nach oben laufen, wobei durch die Bewegung ein zu dickes Anhaften oder Anwachsen verhindert bzw. entsprechend beschichtete Folienbahn entfernt werden.A special case of the exchangeable separation surface is a separation surface which is movable during the coating process by a movement device, in particular a film web moved during the process. For example, this can be moved between two windings (an unwinding and a winding winding), wherein the windings are preferably arranged above the bath and above the magnet. The film web therebetween may then travel in an approximate U-shape (not necessarily with parallel legs) from the windings downwardly, around the magnet and back up, preventing the film from adhering or growing too thickly be removed.
Dabei kann der Magnet zum Beispiel in stabförmiger Gestalt in der Krümmung der U-Form angeordnet sein. Die dabei stirnseitig verbleibenden Öffnungen (zwischen dem ablaufenden und dem auflaufenden Folienbahnteil) sind entweder tolerabel, insbesondere bei zusätzlicher Beschichtung des Magneten, oder können auch durch feststehende Verkleidungsteile zumindest weitgehend geschlossen werden.In this case, the magnet can be arranged, for example, in a rod-shaped shape in the curvature of the U-shape. The remaining end openings (between the expiring and the auflaufenden film web part) are either tolerable, especially with additional coating of the magnet, or can be at least largely closed by fixed trim parts.
Die vorstehenden Erläuterungen gelten auch für den Fall eines außerhalb des Nickelbades (der Wanne und der Umwälzleitung) angeordneten Magneten. Zum Beispiel kann ein Bahnmaterial innerhalb einer Wand einer Nickelbadwanne zwischen Abscheidungsprozessen ausgetauscht, und/oder während derselben bewegt werden. Grundsätzlich ist der Begriff des "Austauschens" im vorliegenden Zusammenhang nicht auf ein Ersetzen der entsprechenden Abscheidefläche durch eine andere beschränkt, sondern kann auch ein Reinigen derselben und Wiederverwenden bedeuten. Es geht letztlich darum, die abgeschiedenen Nickelpartikel aus dem Bad zu entfernen.The above explanations also apply to the case of a magnet arranged outside the nickel bath (the tub and the circulation pipe). For example, a sheet material within a wall of a nickel bath tub may be exchanged between and / or moved during deposition processes. Basically, the term "replacement" in the present context is not limited to replacing the corresponding separation surface with another, but may also mean cleaning it and reusing it. It is ultimately about removing the deposited nickel particles from the bath.
Günstige Bahngeschwindigkeiten für die bewegte Abscheidefläche, insbesondere in der eben beschriebenen konkreteren Ausgestaltung, liegen etwa im Bereich von Zehnteln bis Zig cm/h, also etwa zwischen 0,1 und 50 cm/h, wobei 0,5 cm/h und 1 cm/h als Untergrenze und andererseits 10 cm/h, 5 cm/h und 3 cm/h als Obergrenze jeweils zunehmend bevorzugt sind.Favorable web speeds for the moving separation surface, in particular in the concrete embodiment just described, are approximately in the range of tenths to tens of cm / h, that is approximately between 0.1 and 50 cm / h, where 0.5 cm / h and 1 cm / h. h as the lower limit and, on the other hand, 10 cm / h, 5 cm / h and 3 cm / h as the upper limit, respectively, are increasingly preferred.
Wie eingangs bereits erläutert, wird die Erfindung vorzugsweise in Kombination mit einer Pumpe und einem Filter zum Umwälzen des Nickelbades eingesetzt. In diesem Zusammenhang wird der Magnet vorzugsweise in der Nähe des Ansauganschlusses angeordnet, soll also vorzugsweise vor allem dazu dienen, die Partikelkonzentration in dieser Umgebung zu verringern, bevor sie in den Filter gelangt. Dies entlastet einerseits den Filter; andererseits sind die Partikel nach ihrer Verweilzeit im Bad größer als zuvor beim Wiedereintritt in das Bad, so dass der Magnet dort besonders effektiv wirkt. Er kann sich mit dem Filter insoweit ergänzen, als typischerweise der Filter nur Partikel mit einer bestimmten Mindestgröße ausfiltert und der Magnet besonders auch noch Partikel unterhalb dieser Mindestgröße einsammelt. In vielen Fällen sind ganz kleine Partikel tolerabel und von verschwindenden schädlichen Auswirkungen.As already explained, the invention is preferably used in combination with a pump and a filter for circulating the nickel bath. In this context, the magnet is preferably arranged in the vicinity of the suction port, that is to say it is intended, above all, to serve to reduce the particle concentration in this environment before it enters the filter. This relieves the filter on the one hand; On the other hand, the particles after their residence time in the bath are larger than before upon re-entry into the bath, so that the magnet is particularly effective there. He can supplement himself with the filter insofar as the filter typically only filters out particles of a certain minimum size and the magnet also collects particles below this minimum size in particular. In many cases, very small particles are tolerable and have negligible harmful effects.
Wie schon in der eingangs zitierten
Ferner wird das auf dem Magneten bzw. dessen Beschichtung oder Abscheidefläche anhaftende Material vorzugsweise einer Wiederverwendung zugeführt.Further, the adhering to the magnet or its coating or Abscheidefläche material is preferably supplied for reuse.
Schließlich hat sich herausgestellt, dass die Erfindung besonders gut in Verbindung mit relativ phosphorarmen Nickelbädern funktioniert. Wie bereits eingangs festgestellt, kann Hypophosphit als Reduktionsmittel in dem Nickelbad (insbesondere auf Nickelsulfatbasis) eingesetzt werden. Der Phosphoranteil beträgt dann in Gewichtsprozent und bezogen auf den Nickelanteil vorzugsweise höchstens 6%. Andererseits sollte er vorzugsweise mindestens 3% betragen.Finally, it has been found that the invention works particularly well in conjunction with relatively low-phosphorus nickel baths. As already stated, hypophosphite can be used as a reducing agent in the nickel bath (in particular based on nickel sulphate). The phosphorus content is then in percent by weight and, based on the nickel content, preferably at most 6%. On the other hand, it should preferably be at least 3%.
Die Erfindung richtet sich schließlich auch auf ein dementsprechend mit einer sogenannten chemischen Nickelschicht versehenes Erzeugnis, das aber über die Nickelbeschichtung hinaus weiterverarbeitet sein kann, insbesondere zusätzliche Beschichtungen aufweisen kann. Sie richtet sich ferner auf eine zur Durchführung des beschriebenen Verfahrens geeignete Anlage, wozu auf die implizite Offenbarung von Vorrichtungsdetails im Vorstehenden, auf das nachfolgende Ausführungsbeispiel und auch auf den Inhalt der eingangs zitierten
Im Folgenden wird die Erfindung anhand eines Ausführungsbeispiels erläutert. Die dabei beschriebenen Merkmale können auch einzeln und in anderen Kombinationen zur Lösung der Aufgabe beitragen und sollen nicht nur in der folgenden Kombination offenbart sein. Sie gelten im Übrigen für alle Anspruchskategorien. Ergänzend wird zum besseren Verständnis auf die
- Fig. 1
- zeigt eine schematische Ansicht eines erfindungsgemäßen Magneten für ein nasschemisches Nickelbad und
- Fig. 2
- zeigt ebenfalls eine schematische Ansicht eines solchen Bades mit eingehängtem Magneten gemäß
.Figur 1
- Fig. 1
- shows a schematic view of a magnet according to the invention for a wet-chemical nickel bath and
- Fig. 2
- also shows a schematic view of such a bath with hinged magnet according to
FIG. 1 ,
In
Das chemische Nickelbad ist lediglich angedeutet, und zwar durch die horizontale Linie 4, die den Flüssigkeitsoberflächenspiegel symbolisieren soll; der Magnetstab 1 ist also eingetaucht. Über dem Flüssigkeitsspiegel 4 befinden sich zwei Wicklungen 5a und b, wobei die darauf aufgewickelte Kunststofffolienbahn in einer U-Form von der Wicklung 5a wie durch die Pfeile angedeutet nach unten abgerollt, unter dem Magnetstab 1 hindurchgeführt und auf der anderen Seite auf die Wicklung 5b aufgerollt wird. Eine typische Geschwindigkeit beträgt 2 cm/h, je nach abgeschiedener Nickelmenge.The chemical nickel bath is merely indicated, by the
Nickelpartikel aus dem Bad unter dem Spiegel 4 werden durch den Stabmagneten 4 angezogen und scheiden sich dabei im Wesentlichen außerhalb der Folienbahn 6 an, und zwar vor allem im unteren Halbkreissegment des kreisförmigen Umfangs des Stabmagneten. Das sich dort abscheidende Material aus Nickelpartikeln wird also mit der Folienbahn 6 nach oben gezogen und auf der Wicklung 5b aufgerollt. Es kann z.B. nach einfachen Durchlauf der gesamten Folienbahn 6 mit der Wicklung 5b entnommen und z.B. durch Abziehen der Folien (bei starker Biegung derselben) oder in anderer Form abgelöst werden und wiederverwendet werden.Nickel particles from the bath below the
Bei dem Bad handelt es sich um ein typisches nasschemisches Nickelbeschichtungsbad auf Nickelsulfat-Basis mit vorliegend z.B. 6 g/l Nickel. Dabei sind typischerweise bezogen auf Nickel 4,5 Gewichtsprozent Phosphor in Form von Hypophosphit und ferner ein üblicher Komplexbildner vorhanden.The bath is a typical nickel-sulfate-based wet-chemical nickel plating bath having e.g. 6 g / l nickel. In this case, 4.5 percent by weight of phosphorus in the form of hypophosphite and also a conventional complexing agent are typically present with respect to nickel.
Die weitgehend von an der Folienbahn 6 anhaftenden Partikeln befreite Nickelbadlösung wird durch die Ansaugöffnung 16 der Pumpe 15 und stromabwärts davon zwei Pumprohren 17 und 18 zugeführt. Diese erstrecken sich auch senkrecht zur Zeichenebene und sorgen, wie zeichnerisch angedeutet und in der zitierten
Die Kombination aus der effektiven Umwälzung, der Partikelfilterung und der Partikelsammlung durch den erfindungsgemäßen Magneten 1 sorgt für eine außerordentlich geringe Partikelbelastung. Damit sind Wandabscheidungen gering und sind vor allem die beschichteten Erzeugnisse von hoher Qualität. Dies kann beispielsweise wichtig sein bei Treibstoffpumpen für z.B. Kraftfahrzeuge, bei denen anhaftende Nickelpartikel zu Betriebsstörungen im Motor führen können.The combination of the effective circulation, the particle filtration and the particle collection by the
Claims (15)
dadurch gekennzeichnet, dass in oder an dem Nickelbad (14) während der Abscheidung ein Magnet (1) zur Fixierung von Nickelpartikein in dem Nickelbad (14) vorgesehen ist.Process for the wet-chemical deposition of nickel layers from a nickel bath (14),
characterized in that in or on the nickel bath (14) during the deposition of a magnet (1) for fixing of Nickelpartikein in the nickel bath (14) is provided.
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EP13176174.4A EP2823890A1 (en) | 2013-07-11 | 2013-07-11 | Method and installation for the wet chemical deposition of nickel layers |
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EP13176174.4A EP2823890A1 (en) | 2013-07-11 | 2013-07-11 | Method and installation for the wet chemical deposition of nickel layers |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH129293A (en) * | 1927-11-25 | 1928-12-17 | Franz Von Wurstemberger | Process for keeping electrolytic baths, especially nickel baths, clean. |
GB1266729A (en) * | 1969-08-29 | 1972-03-15 | ||
JPH05306500A (en) * | 1992-04-28 | 1993-11-19 | Nkk Corp | Method for removing sludge from plating solution |
DE10221326C1 (en) * | 2002-05-08 | 2003-12-18 | S E A D Stromerzeugung Gmbh & | Assembly to denickel a bio-mass, e.g. a fuel emulsion, has a pressure vessel with structured pressures and temperatures, to deposit separated materials on its surfaces |
EP1422318A1 (en) * | 2002-11-20 | 2004-05-26 | FRANZ Oberflächentechnik GmbH & Co KG | Container for chemical metallisation |
US6800121B2 (en) * | 2002-06-18 | 2004-10-05 | Atotech Deutschland Gmbh | Electroless nickel plating solutions |
EP1780306A2 (en) * | 2005-10-25 | 2007-05-02 | Ebara Corporation | Apparatus and method for electroless plating |
EP1964642A1 (en) * | 2005-12-22 | 2008-09-03 | Bunri Incorporation | Dirty liquid treating apparatus |
-
2013
- 2013-07-11 EP EP13176174.4A patent/EP2823890A1/en not_active Withdrawn
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH129293A (en) * | 1927-11-25 | 1928-12-17 | Franz Von Wurstemberger | Process for keeping electrolytic baths, especially nickel baths, clean. |
GB1266729A (en) * | 1969-08-29 | 1972-03-15 | ||
JPH05306500A (en) * | 1992-04-28 | 1993-11-19 | Nkk Corp | Method for removing sludge from plating solution |
DE10221326C1 (en) * | 2002-05-08 | 2003-12-18 | S E A D Stromerzeugung Gmbh & | Assembly to denickel a bio-mass, e.g. a fuel emulsion, has a pressure vessel with structured pressures and temperatures, to deposit separated materials on its surfaces |
US6800121B2 (en) * | 2002-06-18 | 2004-10-05 | Atotech Deutschland Gmbh | Electroless nickel plating solutions |
EP1422318A1 (en) * | 2002-11-20 | 2004-05-26 | FRANZ Oberflächentechnik GmbH & Co KG | Container for chemical metallisation |
EP1780306A2 (en) * | 2005-10-25 | 2007-05-02 | Ebara Corporation | Apparatus and method for electroless plating |
EP1964642A1 (en) * | 2005-12-22 | 2008-09-03 | Bunri Incorporation | Dirty liquid treating apparatus |
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