EP2796726A1 - Stator element for a Holweck pump stage, vacuum pump with a Holweck pump stage and method of manufacturing a stator element for a Holweck pump stage - Google Patents

Stator element for a Holweck pump stage, vacuum pump with a Holweck pump stage and method of manufacturing a stator element for a Holweck pump stage Download PDF

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Publication number
EP2796726A1
EP2796726A1 EP20140159492 EP14159492A EP2796726A1 EP 2796726 A1 EP2796726 A1 EP 2796726A1 EP 20140159492 EP20140159492 EP 20140159492 EP 14159492 A EP14159492 A EP 14159492A EP 2796726 A1 EP2796726 A1 EP 2796726A1
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EP
European Patent Office
Prior art keywords
stator
stator element
holweckpumpstufe
kit
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20140159492
Other languages
German (de)
French (fr)
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EP2796726B1 (en
Inventor
Jan Hofmann
Mirko Mekota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2796726A1 publication Critical patent/EP2796726A1/en
Application granted granted Critical
Publication of EP2796726B1 publication Critical patent/EP2796726B1/en
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49316—Impeller making
    • Y10T29/4932—Turbomachine making
    • Y10T29/49323—Assembling fluid flow directing devices, e.g., stators, diaphragms, nozzles

Definitions

  • the present invention relates to a stator element for a Holweckpumptreatment, a vacuum pump with a Holweckpumptreatment and a method for producing a stator element for a Holweckpumpcut.
  • Vacuum pumps are used in various fields of technology, such as in semiconductor process engineering, in order to generate a vacuum which is necessary for the respective technical process in a volume to be evacuated.
  • An important pumping mechanism used in vacuum pumps is the Holweck pumping mechanism, which is particularly effective in the molecular flow regime and is referred to as a molecular pumping mechanism.
  • Holweck pump stages are e.g. used in turbomolecular pumps, which in addition to one or more turbomolecular pumping stages comprise one or more Holweckpumpmeasuren downstream of the turbomolecular pumping stages.
  • the Holweckpumpplant processn can pump in series or parallel to each other.
  • a Holweckpumptreatment typically comprises a substantially cylindrical jacket-shaped stator element and a likewise substantially cylindrical jacket-shaped rotor element, wherein a lateral surface of the stator and a lateral surface of the rotor element form the pumping active surfaces of the pumping stage and each other to form a narrow Opposed to gaps, which is referred to as Holweck gap.
  • a lateral surface of the stator and a lateral surface of the rotor element form the pumping active surfaces of the pumping stage and each other to form a narrow Opposed to gaps, which is referred to as Holweck gap.
  • a plurality of helically extending in the axial direction webs and between the webs are also formed, also helically extending in the axial direction grooves in the rule.
  • the opposite lateral surface of the rotor element may for example be smooth.
  • stator element Since, for a high pumping efficiency, inter alia the smallest possible gap dimension of the Holweck gap is necessary, the stator element must be manufactured with high precision and within close manufacturing tolerances. In addition, since the stator element of the Holweckpumptreatment is directly related to the pumped gases and is exposed to high thermal and mechanical stresses, the material of the stator must be selected so that contamination of the vacuum is excluded, sufficient vacuum tightness is ensured and the stator thermal and withstand mechanical loads. To meet this requirement, stator elements for Holweckpumpplantpumpgen are usually milled from solid cylinders or hollow cylinders of a vacuum-compatible metal, which is associated with a very high time and cost.
  • stator element or a kit for a stator element with the features of claim 1.
  • a stator element for a Holweckpumptreatment which has a substantially cylindrical shell-shaped basic shape, or a kit for a stator element for Holweckpumptreatment having a substantially cylindrical shell-shaped basic shape, comprising a plurality of separate stator parts, which are assembled to the stator or be assembled.
  • the stator element or the main body is thus not formed in one piece, but comprises a plurality of individual stator parts, which can be assembled to form the stator element.
  • stator parts are considerably easier than the production of a one-piece stator element, since the difficulties associated with one-piece production, such as the undercuts resulting from the cylinder jacket shape, inaccessibility and unfavorable machining angle, are avoided and instead stator components are used be made of a non-problematic shape.
  • stator parts as explained below, can be produced simply and cost-effectively by casting, without the demoulding of the stator parts being considerably impeded or impeded by any undercuts.
  • an outer and / or an inner lateral surface of the stator element forms in each case a pump-active surface with a plurality of webs extending helically in the axial direction and grooves arranged between the webs and running helically in the axial direction, wherein the stator parts respectively form a region of a pump-active surface of the pumping active surfaces.
  • the webs and grooves thus form a Holweckgewinde, under a helical shape and a shape is to be understood, which forms only a partial revolution of a helix.
  • the stator element may have such a pump-active surface on one of the aforementioned lateral surfaces or on both lateral surfaces.
  • Each pump-active surface can form a Holweckpumplay with the pump-active lateral surface of a rotating relative to the stator, also substantially cylinder jacket-shaped rotor element.
  • the advantage of the invention is particularly useful if at least on the inner circumferential surface of the stator a pump-active surface with a plurality of grooves and webs is formed, since in this case the one-piece production of a corresponding stator is particularly expensive.
  • the individual stator parts can be assembled to form the stator element and can essentially be embodied as a shard. At least one stator part or each stator part can form a section of the cylinder jacket-shaped basic shape of the stator element. Preferably, at least one stator part or each stator part has an outer side which forms a section of the outer jacket surface of the stator element forms, and an inside, which forms a section of the inner circumferential surface of the stator.
  • Each stator member may include, on an outer side and / or an inner side forming part of the outer surface of the stator member, one or more of the above-described helical lands and helical grooves therebetween, or at least portions thereof.
  • At least one stator part and in particular each stator part covers only a partial area of the circumferential angle of the stator element defined relative to the longitudinal axis of the stator element.
  • the stator element can be divided by the stator in several consecutive in the circumferential direction angle sections or segments. As a result, a closed geometric shape of the individual stator parts is avoided, whereby their manufacture is simplified and, for example, in a production by casting a simplified demouldability of the stator is guaranteed.
  • the stator element composed of the stator parts in total preferably has a circumferential angle of 360 °, i. the stator element may be formed annularly closed about its longitudinal axis and cover the full angular range defined relative to its longitudinal axis. At least one stator part or each stator part can extend over the entire lengthwise extent of the stator element that relates to the longitudinal axis direction of the stator element.
  • At least one stator part and in particular each stator part preferably covers a range of at most 180 ° and preferably less than 180 ° of the circumferential angle of the stator element defined relative to the longitudinal axis of the stator element. This allows even easier manufacturability and in particular an even easier demoulding of the stator parts are achieved during their production, since at an angle of less than 180 ° undercuts of the shaped stator are avoided, which would prevent removal or significantly more difficult.
  • the stator is divided by two adjacent stator parts parallel to the longitudinal axis of the stator and / or obliquely to the longitudinal axis of the stator.
  • the two adjacent stator parts may have opposite and mutually facing separating surfaces, which extend in the longitudinal axis direction of the stator through the stator, at least partially parallel and / or obliquely to the longitudinal axis of the stator.
  • a further embodiment provides that a pump-active surface of the stator is divided by two adjacent stator parts parallel to the longitudinal axis of the stator and / or obliquely to the longitudinal axis of the stator.
  • the two adjacent stator parts have mutually opposite and facing each other separating surfaces extending in the longitudinal axis direction of the stator through the pump-active surface of the stator and define a parting line of the pumping active surface which extends at least partially parallel and / or obliquely to the longitudinal axis of the stator.
  • At least a portion of a pump-active surface of the stator element is preferably along by two adjacent stator parts along a groove or along a web of the pump-active surface and in particular at least approximately parallel to the groove or to the web divided.
  • a dividing line of the pump-active surface defined by the adjacent stator parts therefore runs along a web or a groove and in particular substantially parallel to the web or to the groove.
  • the groove bottom of at least one longitudinal portion of the groove may be completely formed by the one stator part, and a land portion delimiting the longitudinal portion of the groove may be completely formed by the adjacent stator part, so that the stator element is divided along the edge of the bottom of the groove.
  • a land portion delimiting the longitudinal portion of the groove may be completely formed by the adjacent stator part, so that the stator element is divided along the edge of the bottom of the groove.
  • At least one stator part and in particular each stator part is designed such that a plurality of stator parts which are identical to the stator part can be assembled to form the stator element.
  • the production of the stator is further simplified, since no different stator elements must be made, but the stator can be composed of identical stator parts.
  • the stator element preferably comprises at least two substantially identical stator parts and in particular may consist entirely of substantially identical stator parts.
  • the advantages of which can also be seen from the following description relating to a production method are at least one stator and in particular each stator made by casting or producible. Casting represents a particularly simple and cost-effective method by means of which a stator element or stator part which satisfies the vacuum technical requirements can be produced.
  • At least one stator part and in particular each stator part is at least partially and in particular made entirely of a plastic or can be produced.
  • a further embodiment provides that at least one stator part and in particular each stator part can be produced or produced by blow molding or three-dimensional printing.
  • the shape of the webs of a stator part is preferably adapted so that the stator part has no undercuts which would prevent or substantially impede demolding of the stator part, e.g. when the stator is made by casting.
  • At least one stator part or each stator part can, in principle, at least partially and in particular completely consist of a metal, in particular a castable metal, which fulfills the respective vacuum-technical requirements.
  • stator element can be divided into any number of stator parts.
  • exactly two stator parts can be provided, each of which can be configured essentially in the form of a half shell and can be assembled to form the stator element.
  • stator parts can be assembled to form the stator element, that the stator parts can be positioned relative to one another in such a way that they form the stator element with the described shape.
  • the stator parts can be designed so that they hold each other in the assembled state in their desired relative positioning.
  • the stator parts may have mutually complementary surfaces which abut each other in the composite stator element and support each other.
  • the composite stator element can form a self-supporting mechanical structure.
  • the stator parts can also be designed such that, when they are used to form the stator element in a vacuum pump, they are fixed in their desired relative position to each other and thus form a self-supporting structure together with the vacuum pump.
  • stator parts may be present as individual non-interconnected parts or may be fixedly connected to one another and in particular materially bonded to form the stator element, in particular glued together.
  • stator parts which are separate from one another are to be understood as meaning stator parts which are manufactured or producible as individual parts and have subsequently been connected to one another.
  • substantially cylindrical shell-shaped basic shape is any shell shape with a preferably substantially rotationally symmetrical inner and / or outer contour to understand.
  • the basic shape can be formed by a straight cylindrical shell shape or by a truncated cone shell shape, that is, by the shape of a tapered in its longitudinal axis direction or widening cylinder jacket.
  • Another object of the invention is a method for producing a stator for Holweckpumptreatment which has a substantially cylindrical shell-shaped basic shape, or for the production of a kit for a stator for Holweckpumpcut, which has a substantially cylindrical shell-shaped basic shape.
  • the method comprises producing a plurality of stator parts separately from one another, wherein the stator parts can be assembled to form the stator element or to a base body for the stator element.
  • the method is preferably used for producing a stator element or kit according to the invention as described above.
  • An advantageous development of the method provides that for the production of at least one stator and in particular for the production of each stator each first a base body for the stator is made, wherein the body is subsequently reworked to form the stator.
  • the main body can be produced by a primary molding process and / or the main body can be reworked by a forming process to form the stator. In this way, with little effort and reliably a stator can be made with a sufficient geometrical precision.
  • casting, blow molding and three-dimensional printing (3D printing) are suitable as the primary molding process.
  • at least one stator part can also be produced completely without further processing by a primary molding method.
  • the stator parts can be provided as individual parts or fixedly connected to one another in particular to form the stator element and, in particular, connected in a material-locking manner, in particular adhesively bonded to one another.
  • a basic body for a stator element or stator part is to be understood as meaning a body which can be further processed to form the stator element or stator part.
  • the base body for the stator element is preferably formed substantially cylindrical jacket-shaped. If reference is made below to the production of the stator or the stator itself or to the production of a stator or a stator itself, the corresponding description refers to the production of a base body for the stator or, if applicable and not stated otherwise in a corresponding manner. Stator part or the main body itself.
  • this basic body preferably has an outer side which forms a section of an outer lateral surface of a substantially cylindrical jacket-shaped basic body for the stator element, and / or an inner side which forms a section of an inner lateral surface of a forms substantially cylindrical shell-shaped base body for the stator.
  • the outer side and / or the inner side of the main body for the stator part may already have a profiling with provisional webs or web sections and grooves or groove sections arranged therebetween, which are reshaped by post-processing into the final webs or web sections and grooves or groove sections arranged therebetween.
  • the post-processing may include, for example, the adaptation of the shape of the provisional webs or web portions of the main body of the stator.
  • the postprocessing can also serve to bring a predetermined by the respective stator outer and / or inner diameter of the outer and inner circumferential surface of the stator even more precisely to a predetermined value and thereby to allow the required for a high pumping efficiency narrow gap dimensions Holweckpumpcut.
  • existing preliminary webs or web sections can be reworked by a material-removing, in particular machining, method, in order to achieve the desired outer or inner diameter.
  • This post-processing may, for example, include over-rotation of the main body for the stator part.
  • the shape of the webs of a stator part is preferably adapted so that the stator part has no undercuts which would prevent or substantially make demolding of the stator part or the basic body for the stator part, e.g. when the stator or the body is made by casting.
  • the finished stator element may then either have such web shapes, which may differ from known web shapes, or the web shape may be subsequently changed as described above.
  • the production of at least one stator part and in particular the production of each stator part, that the stator or a base body for the stator is made by casting.
  • Casting therefore represents a possible primary shaping method in the sense of the above description.
  • Casting allows time-efficient and cost-effective series production of the stator parts, which considerably reduces the time and cost required for the production of a stator element.
  • a simple demolding of the stator after casting is possible because with the cylinder jacket-shaped Basic shape of the stator element associated Entformungsschwiermaschineen be avoided.
  • at least one stator part or each stator part can have a substantially undercut-free geometry in order to enable a problem-free demolding of the manufactured stator part.
  • a further embodiment provides that at least one stator part and in particular each stator part is at least partially and in particular completely made of a plastic.
  • plastic represents a material suitable for a stator element, which meets the vacuum-technical requirements and at the same time is more cost-effective and easier to process than conventional materials.
  • the production of the stator is thereby additionally facilitated by the division of the stator in several stator parts.
  • the production of at least one stator part, and in particular the production of each stator part means that the stator part or a base body for the stator part is produced by blow molding or three-dimensional printing.
  • Blow molding or three-dimensional printing thus represents a possible primary molding process in the sense of the preceding description.
  • These processes are particularly suitable for producing a stator part with a desired shape, which preferably consists at least partially and in particular completely of a plastic.
  • blow molding and three-dimensional are suitable for providing stator parts with sufficient geometrical precision which meet the existing vacuum-technical requirements.
  • the invention further relates to a method for producing a stator element for a Holweckpumpmeasure or for producing a multiple Stator parts kit for a stator for Holweckpumptreatment, the method comprising that the stator or at least one stator or a body for the stator or for the Stator part is produced by casting.
  • a stator element or a stator part or a main body can be produced with the vacuum-technical properties required for use in a Holweckpumpcut by this manufacturing method, which can be carried out with reduced time and cost.
  • An outer and / or an inner lateral surface of the stator element preferably forms in each case a pump-active surface with a Holweck thread, ie with a plurality of helically extending webs in the axial direction and between the webs and helically extending in the axial direction grooves.
  • the method may include that the casting first produces a base body for the stator element or for a stator part for the stator element, which is subsequently reworked to form the stator element or stator part, in particular by a forming process.
  • a base body produced by casting for a stator element preferably has a substantially cylinder jacket-shaped basic shape.
  • the main body may also already have one or more temporary webs and / or grooves on its inside and / or outside.
  • a post-processing can then include an adaptation of the web shape and / or an adaptation of the outer and / or inner diameter of the stator element predetermined by the main body.
  • the invention further relates to a method for producing a stator element for a Holweckpumpmeasure or for producing a multiple Stator parts kit for a stator for Holweckpumpcut, the method comprising that the stator or at least one stator or a body for the stator or for the Stator part is at least partially and in particular completely made of a plastic.
  • a stator element which has the vacuum-technical properties required for use in a Holweck pumping stage can be produced from a plastic which is available inexpensively and can be processed simply and inexpensively.
  • An outer and / or an inner circumferential surface of the stator element preferably forms in each case a pump-active surface with a Holweck thread, i. with a plurality of helically extending webs in the axial direction and between the webs arranged and helically extending in the axial direction grooves.
  • the invention further relates to a method for producing a stator element for a Holweckpumpmeasure or for producing a multiple Stator parts kit for a stator for Holweckpumpcut, the method comprising that the stator or at least one stator or a body for the stator or for the Stator part is made by blow molding or three-dimensional printing.
  • blow molding or three-dimensional printing which can be carried out with little effort, can produce a stator element or stator part which has the vacuum-technical properties required for use in a Holweck pumping stage.
  • the stator or stator part is preferably at least partially and in particular completely made of a plastic.
  • An outer and / or An inner lateral surface of the stator element preferably forms in each case a pump-active surface with a Holweck thread, ie with a plurality of helically extending webs in the axial direction and between the webs arranged and helically extending in the axial direction grooves.
  • the invention further relates to a stator element for a Holweckpumptreatment and / or a kit for a stator for Holweckpumptreatment, wherein the stator or the kit is prepared by a method according to the above description or can be produced.
  • a stator element fulfills the vacuum technical requirements for use in a Holweckpumptreatment and can be produced at the same time with little time and cost.
  • the advantageous embodiments and advantages of the stator element or of the kit described above in connection with the production method represent corresponding advantageous embodiments and advantages of the stator element or kit according to the invention.
  • the invention further provides a vacuum pump with at least one Holweckpumptreatment, which comprises at least one stator element according to the present description.
  • the stator element may together with at least one rotor element form the at least one Holweckpumpprocess the vacuum pump.
  • a pump-active surface of the stator element of a pump-active surface of the rotor element opposite and define a radial Holweckspalt with this surface.
  • the vacuum pump may in particular be designed as a turbomolecular pump, which one or more comprises turbomolecular pumping stages, which may be arranged in particular upstream of the one or more Holweckpumpprocessn and connected in fluid flow with these in series.
  • the Holweckpumpprocessn can pump in principle parallel or serially to each other. The time and cost required for the production of the vacuum pump is considerably reduced by the use of the stator according to the invention.
  • Fig. 1 shows a stator according to an embodiment of the invention in the assembled state.
  • the stator element has a substantially cylinder-jacket-shaped basic shape and comprises three separate stator parts 12, 12 ', 12 "which divide the stator element into three angular sections Fig. 1 are denoted by the reference numerals 18, 20, 22 and extend substantially parallel to the longitudinal axis 24 of the stator, so that each stator 12, 12 ', 12 "forms a cylinder jacket segment with a substantially rectangular outline seen from its flat side.
  • Each stator part 12, 12 ', 12 “comprises both on its outer side and on its inner side in each case a plurality of web portions 14, 14', 14", which form together helically in the direction of the longitudinal axis 24 extending webs, which on the inner and the outer lateral surface are arranged of the stator and between each of which helically in the direction of the longitudinal axis 24 extending grooves 16 are formed.
  • the webs and grooves 16 each form a Holweckgewinde on the inner and outer circumferential surface of the stator, which is adapted to form a Holweckpump process with a relative to the respective lateral surface rotating, designed as a Holweck cylinder rotor element, the rotor element in particular a smooth pump active Surface may have.
  • the segmentation of the stator element significantly simplifies its manufacture, since the individual stator parts 12, 12 ', 12 "can be produced substantially without undercuts, for example by casting, and can thus be easily removed from the mold.
  • Fig. 2 shows a stator according to another embodiment of the invention, which is substantially the in Fig. 1
  • the stator element is divided by the three stator parts 12, 12 ', 12 "transversely to the longitudinal axis 24, so that each stator part is divided by stator geometry of the stator element in stator parts 12, 12', 12" 12, 12 ', 12 “forms a cylinder jacket segment with a substantially diamond-shaped outline as seen from its flat side respective groove bottom and the respective adjacent web 14, 14 ', 14 "on the outer lateral surface by the separating surfaces 18, 20, 22 are not interrupted.

Abstract

Die Erfindung betrifft ein Statorelement für eine Holweckpumpstufe, welches eine im Wesentlichen zylindermantelförmige Grundform aufweist, oder einen Bausatz für ein Statorelement für eine Holweckpumpstufe, welches eine im Wesentlichen zylindermantelförmige Grundform aufweist, wobei das Statorelement oder der Bausatz mehrere voneinander getrennte Statorteile umfasst, die zu dem Statorelement zusammengesetzt sind oder zu dem Statorelement zusammensetzbar sind. Die Erfindung betrifft ferner eine Vakuumpumpe mit einer Holweckpumpstufe sowie ein Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe oder eines Bausatzes für ein Statorelement für eine Holweckpumpstufe.The invention relates to a stator element for a Holweckpumpstufe, which has a substantially cylinder jacket basic shape, or a kit for a stator for a Holweckpumpstufe, which has a substantially cylinder jacket basic shape, wherein the stator or the kit comprises a plurality of separate stator parts, which to the Stator element are composed or can be assembled to the stator. The invention further relates to a vacuum pump with a Holweckpumpstufe and a method for producing a stator element for a Holweckpumpstufe or a kit for a stator element for Holweckpumpstufe.

Description

Die vorliegende Erfindung betrifft ein Statorelement für eine Holweckpumpstufe, eine Vakuumpumpe mit einer Holweckpumpstufe und ein Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe.The present invention relates to a stator element for a Holweckpumpstufe, a vacuum pump with a Holweckpumpstufe and a method for producing a stator element for a Holweckpumpstufe.

Vakuumpumpen werden in verschiedenen Bereichen der Technik wie zum Beispiel in der Halbleiterverfahrenstechnik eingesetzt, um in einem zu evakuierenden Volumen ein für den jeweiligen technischen Prozess notwendiges Vakuum zu erzeugen. Ein wichtiger in Vakuumpumpen eingesetzter Pumpmechanismus ist der Holweck-Pumpmechanismus, der im molekularen Strömungsbereich besonders wirksam ist und als molekularer Pumpmechanismus bezeichnet wird. Holweckpumpstufen werden z.B. in Turbomolekularpumpen eingesetzt, welche zusätzlich zu ein oder mehreren turbomolekularen Pumpstufen ein oder mehrere, den turbomolekularen Pumpstufen nachgeschaltete Holweckpumpstufen umfassen. Die Holweckpumpstufen können seriell oder parallel zueinander pumpen.Vacuum pumps are used in various fields of technology, such as in semiconductor process engineering, in order to generate a vacuum which is necessary for the respective technical process in a volume to be evacuated. An important pumping mechanism used in vacuum pumps is the Holweck pumping mechanism, which is particularly effective in the molecular flow regime and is referred to as a molecular pumping mechanism. Holweck pump stages are e.g. used in turbomolecular pumps, which in addition to one or more turbomolecular pumping stages comprise one or more Holweckpumpstufen downstream of the turbomolecular pumping stages. The Holweckpumpstufen can pump in series or parallel to each other.

Eine Holweckpumpstufe umfasst typischerweise ein im Wesentlichen zylindermantelförmiges Statorelement und ein ebenfalls im Wesentlichen zylindermantelförmiges Rotorelement, wobei eine Mantelfläche des Statorelements und eine Mantelfläche des Rotorelements die pumpaktiven Oberflächen der Pumpstufe bilden und einander unter Ausbildung eines engen Spalts gegenüberliegen, welcher als Holweckspalt bezeichnet wird. In der Mantelfläche des Statorelements sind in der Regel mehrere schraubenlinienförmig in axialer Richtung verlaufende Stege und zwischen den Stegen angeordnete, ebenfalls schraubenlinienförmig in axialer Richtung verlaufende Nuten ausgebildet. Die gegenüberliegende Mantelfläche des Rotorelements kann z.B. glatt ausgebildet sein. Die Pumpwirkung der Holweckpumpstufe beruht darauf, dass die zu fördernden Gasmoleküle durch die rotierende Bewegung des Rotorelements innerhalb der Nuten vorangetrieben und dadurch in axialer Richtung gefördert werden, wobei die zwischen den Nuten ausgebildeten Stege die Nuten abdichten und ein Ausströmen oder Rückströmen der Gasmoleküle entgegen der Pumprichtung verhindern bzw. reduzieren.A Holweckpumpstufe typically comprises a substantially cylindrical jacket-shaped stator element and a likewise substantially cylindrical jacket-shaped rotor element, wherein a lateral surface of the stator and a lateral surface of the rotor element form the pumping active surfaces of the pumping stage and each other to form a narrow Opposed to gaps, which is referred to as Holweck gap. In the lateral surface of the stator, a plurality of helically extending in the axial direction webs and between the webs are also formed, also helically extending in the axial direction grooves in the rule. The opposite lateral surface of the rotor element may for example be smooth. The pumping action of the Holweckpumpstufe based on the fact that the gas molecules to be pumped by the rotating movement of the rotor element within the grooves and thereby promoted in the axial direction, wherein the webs formed between the grooves seal the grooves and an outflow or backflow of the gas molecules against the pumping direction prevent or reduce.

Da für eine hohe Pumpeffizienz unter anderem ein möglichst geringes Spaltmaß des Holweckspalts notwendig ist, muss das Statorelement mit hoher Präzision und innerhalb enger Fertigungstoleranzen hergestellt werden. Da das Statorelement der Holweckpumpstufe außerdem unmittelbar mit den geförderten Gasen in Verbindung steht und hohen thermischen und mechanischen Belastungen ausgesetzt ist, muss der Werkstoff des Statorelements so gewählt sein, dass eine Verschmutzung des Vakuums ausgeschlossen ist, eine ausreichende Vakuumdichtheit gewährleistet ist und das Statorelement den thermischen und mechanischen Belastungen standhält. Um diese Anforderung zu erfüllen, werden Statorelemente für Holweckpumpstufen üblicherweise aus Vollzylindern oder aus Hohlzylindern aus einem vakuumkompatiblen Metall herausgefräst, was mit einem sehr hohen Zeit- und Kostenaufwand verbunden ist.Since, for a high pumping efficiency, inter alia the smallest possible gap dimension of the Holweck gap is necessary, the stator element must be manufactured with high precision and within close manufacturing tolerances. In addition, since the stator element of the Holweckpumpstufe is directly related to the pumped gases and is exposed to high thermal and mechanical stresses, the material of the stator must be selected so that contamination of the vacuum is excluded, sufficient vacuum tightness is ensured and the stator thermal and withstand mechanical loads. To meet this requirement, stator elements for Holweckpumpstufen are usually milled from solid cylinders or hollow cylinders of a vacuum-compatible metal, which is associated with a very high time and cost.

Eine Aufgabe der Erfindung besteht darin, ein den vakuumtechnischen Anforderungen genügendes Statorelement für eine Holweckpumpstufe anzugeben, das mit verringertem Zeit- und Kostenaufwand hergestellt werden kann, sowie ein Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe, welches mit verringertem Zeit- und Kostenaufwand durchgeführt werden kann.It is an object of the invention to provide a vacuum element satisfying stator element for a Holweckpumpstufe, which produced with reduced time and cost and a method for manufacturing a stator element for a Holweckpumpstufe, which can be carried out with reduced time and cost.

Die Aufgabe wird durch ein Statorelement oder einen Bausatz für ein Statorelement mit den Merkmalen des Anspruchs 1 gelöst.The object is achieved by a stator element or a kit for a stator element with the features of claim 1.

Ein Statorelement für eine Holweckpumpstufe, welches eine im Wesentlichen zylindermantelförmige Grundform aufweist, oder ein Bausatz für ein Statorelement für eine Holweckpumpstufe, welches eine im Wesentlichen zylindermantelförmige Grundform aufweist, umfasst mehrere voneinander getrennte Statorteile, die zu dem Statorelement zusammengesetzt sind oder zusammensetzbar sind.A stator element for a Holweckpumpstufe, which has a substantially cylindrical shell-shaped basic shape, or a kit for a stator element for Holweckpumpstufe having a substantially cylindrical shell-shaped basic shape, comprising a plurality of separate stator parts, which are assembled to the stator or be assembled.

Das Statorelement bzw. der Grundkörper ist also nicht einteilig ausgebildet, sondern umfasst mehrere einzelne Statorteile, die zu dem Statorelement zusammengesetzt werden können.The stator element or the main body is thus not formed in one piece, but comprises a plurality of individual stator parts, which can be assembled to form the stator element.

Im Rahmen der Erfindung wurde erkannt, dass die Herstellung einzelner Statorteile deutlich einfacher möglich als die Herstellung eines einteiligen Statorelements, da die mit einer einteiligen Herstellung einhergehenden Schwierigkeiten wie z.B. die sich aufgrund der Zylindermantelform ergebenden Hinterschneidungen, Unzugänglichkeiten und ungünstigen Bearbeitungswinkel vermieden werden und stattdessen Statorteile mit einer unproblematischen Form hergestellt werden. Beispielsweise lassen sich die Statorteile, wie nachfolgend erläutert, einfach und kostengünstig durch Gießen herstellen, ohne dass die Entformung der Statorteile durch etwaige Hinterschneidungen wesentlich erschwert oder behindert wird.In the context of the invention, it has been recognized that the production of individual stator parts is considerably easier than the production of a one-piece stator element, since the difficulties associated with one-piece production, such as the undercuts resulting from the cylinder jacket shape, inaccessibility and unfavorable machining angle, are avoided and instead stator components are used be made of a non-problematic shape. For example, the stator parts, as explained below, can be produced simply and cost-effectively by casting, without the demoulding of the stator parts being considerably impeded or impeded by any undercuts.

Vorteilhafte Ausführungsformen der Erfindung sind in den Unteransprüchen, der Beschreibung und den Figuren beschrieben.Advantageous embodiments of the invention are described in the subclaims, the description and the figures.

Gemäß einer vorteilhaften Ausführungsform bildet eine äußere und/oder eine innere Mantelfläche des Statorelements jeweils eine pumpaktive Oberfläche mit mehreren schraubenlinienförmig in axialer Richtung verlaufenden Stegen und zwischen den Stegen angeordneten und schraubenlinienförmig in axialer Richtung verlaufenden Nuten, wobei die Statorteile jeweils einen Bereich einer pumpaktiven Oberfläche bzw. der pumpaktiven Oberflächen bilden. Die Stege und Nuten bilden also ein Holweckgewinde, wobei unter einer Schraubenlinienform auch eine Form zu verstehen ist, die nur eine Teilumdrehung einer Schraubenlinie bildet. Das Statorelement kann prinzipiell an einer der genannten Mantelflächen oder an beiden Mantelflächen eine solche pumpaktive Oberfläche aufweisen. Jede pumpaktive Oberfläche kann mit der pumpaktiven Mantelfläche eines gegenüber dem Statorelement rotierenden, ebenfalls im Wesentlichen zylindermantelförmigen Rotorelements eine Holweckpumpstufe bilden.According to an advantageous embodiment, an outer and / or an inner lateral surface of the stator element forms in each case a pump-active surface with a plurality of webs extending helically in the axial direction and grooves arranged between the webs and running helically in the axial direction, wherein the stator parts respectively form a region of a pump-active surface of the pumping active surfaces. The webs and grooves thus form a Holweckgewinde, under a helical shape and a shape is to be understood, which forms only a partial revolution of a helix. In principle, the stator element may have such a pump-active surface on one of the aforementioned lateral surfaces or on both lateral surfaces. Each pump-active surface can form a Holweckpumpstufe with the pump-active lateral surface of a rotating relative to the stator, also substantially cylinder jacket-shaped rotor element.

Der Vorteil der Erfindung kommt besonders zum Tragen, wenn zumindest an der inneren Mantelfläche des Statorelements eine pumpaktive Oberfläche mit mehreren Nuten und Stegen ausgebildet ist, da in diesem Fall die einteilige Herstellung eines entsprechenden Statorelements besonders aufwendig ist.The advantage of the invention is particularly useful if at least on the inner circumferential surface of the stator a pump-active surface with a plurality of grooves and webs is formed, since in this case the one-piece production of a corresponding stator is particularly expensive.

Die einzelnen Statorteile sind zu dem Statorelement zusammensetzbar und können dabei im Wesentlichen scherbenförmig ausgebildet sein. Zumindest ein Statorteil oder jedes Statorteil kann dabei einen Ausschnitt der zylindermantelförmigen Grundform des Statorelements bilden. Vorzugsweise weist zumindest ein Statorteil oder jedes Statorteil eine Außenseite auf, welche einen Ausschnitt der äußeren Mantelfläche des Statorelements bildet, und eine Innenseite, welche einen Ausschnitt der inneren Mantelfläche des Statorelements bildet.The individual stator parts can be assembled to form the stator element and can essentially be embodied as a shard. At least one stator part or each stator part can form a section of the cylinder jacket-shaped basic shape of the stator element. Preferably, at least one stator part or each stator part has an outer side which forms a section of the outer jacket surface of the stator element forms, and an inside, which forms a section of the inner circumferential surface of the stator.

Jedes Statorteil kann an einer Außenseite und/oder einer Innenseite, welche einen Teil der äußeren bzw. inneren Mantelfläche des Statorelements bildet, einen oder mehrere der vorstehend beschriebenen schraubenlinienförmigen Stege und dazwischen verlaufenden schraubenlinienförmigen Nuten oder zumindest Abschnitte derselben aufweisen.Each stator member may include, on an outer side and / or an inner side forming part of the outer surface of the stator member, one or more of the above-described helical lands and helical grooves therebetween, or at least portions thereof.

Gemäß einer Ausführungsform deckt zumindest ein Statorteil und insbesondere jedes Statorteil nur einen Teilbereich des relativ zu der Längsachse des Statorelements definierten Umfangswinkels des Statorelements ab. Das Statorelement kann dabei durch die Statorteile in mehrere in Umfangsrichtung aufeinander folgende Winkelabschnitte bzw. Segmente unterteilt sein. Dadurch wird eine geschlossene geometrische Form der einzelnen Statorteile vermieden, wodurch deren Herstellung vereinfacht wird und zum Beispiel bei einer Herstellung durch Gießen eine vereinfachte Entformbarkeit der Statorteile gewährleistet wird. Das aus den Statorteilen zusammengesetzte Statorelement insgesamt weist vorzugsweise einen Umfangswinkel von 360° auf, d.h. das Statorelement kann um seine Längsachse ringförmig geschlossen ausgebildet sein und den vollen relativ zu seiner Längsachse definierten Winkelbereich abdecken. Zumindest ein Statorteil oder jedes Statorteil kann sich über die gesamte auf die Längsachsenrichtung des Statorelements bezogene Längserstreckung des Statorelements erstrecken.According to one embodiment, at least one stator part and in particular each stator part covers only a partial area of the circumferential angle of the stator element defined relative to the longitudinal axis of the stator element. The stator element can be divided by the stator in several consecutive in the circumferential direction angle sections or segments. As a result, a closed geometric shape of the individual stator parts is avoided, whereby their manufacture is simplified and, for example, in a production by casting a simplified demouldability of the stator is guaranteed. The stator element composed of the stator parts in total preferably has a circumferential angle of 360 °, i. the stator element may be formed annularly closed about its longitudinal axis and cover the full angular range defined relative to its longitudinal axis. At least one stator part or each stator part can extend over the entire lengthwise extent of the stator element that relates to the longitudinal axis direction of the stator element.

Bevorzugt deckt zumindest ein Statorteil und insbesondere jedes Statorteil einen Bereich von höchstens 180° und vorzugsweise von weniger als 180° des relativ zu der Längsachse des Statorelements definierten Umfangswinkels des Statorelements ab. Dadurch kann eine noch leichtere Herstellbarkeit und insbesondere eine noch leichtere Entformbarkeit der Statorteile bei deren Herstellung erreicht werden, da bei einem Winkel von weniger als 180° Hinterschneidungen des geformten Statorteils vermieden werden, welche ein Entformen verhindern oder erheblich erschweren würden.At least one stator part and in particular each stator part preferably covers a range of at most 180 ° and preferably less than 180 ° of the circumferential angle of the stator element defined relative to the longitudinal axis of the stator element. This allows even easier manufacturability and in particular an even easier demoulding of the stator parts are achieved during their production, since at an angle of less than 180 ° undercuts of the shaped stator are avoided, which would prevent removal or significantly more difficult.

Vorzugsweise ist das Statorelement durch zwei zueinander benachbarte Statorteile parallel zu der Längsachse des Statorelements und/oder schräg zu der Längsachse des Statorelements geteilt. Dabei können die beiden benachbarten Statorteile einander gegenüberliegende und zueinander weisende Trennflächen aufweisen, die in Längsachsenrichtung des Statorelements durch das Statorelement hindurch verlaufen, und zwar zumindest bereichsweise parallel und/oder schräg zu der Längsachse des Statorelements. Dadurch wird es ermöglicht, das Statorelement aus einer relativ geringen Anzahl von Statorteilen aufzubauen, die jeweils nur einen Teilbereich des Umfangswinkels des Statorelements abdecken.Preferably, the stator is divided by two adjacent stator parts parallel to the longitudinal axis of the stator and / or obliquely to the longitudinal axis of the stator. In this case, the two adjacent stator parts may have opposite and mutually facing separating surfaces, which extend in the longitudinal axis direction of the stator through the stator, at least partially parallel and / or obliquely to the longitudinal axis of the stator. This makes it possible to construct the stator element from a relatively small number of stator parts, each covering only a portion of the circumferential angle of the stator.

Eine weitere Ausführungsform sieht vor, dass eine pumpaktive Oberfläche des Statorelements durch zwei zueinander benachbarte Statorteile parallel zu der Längsachse des Statorelements und/oder schräg zu der Längsachse des Statorelements geteilt ist. Dabei weisen die beiden benachbarten Statorteile einander gegenüberliegende und zueinander weisende Trennflächen auf, die in Längsachsenrichtung des Statorelements durch die pumpaktive Oberfläche des Statorelements hindurch verlaufen und eine Trennlinie der pumpaktiven Oberfläche definieren, die zumindest bereichsweise parallel und/oder schräg zu der Längsachse des Statorelements verläuft.A further embodiment provides that a pump-active surface of the stator is divided by two adjacent stator parts parallel to the longitudinal axis of the stator and / or obliquely to the longitudinal axis of the stator. In this case, the two adjacent stator parts have mutually opposite and facing each other separating surfaces extending in the longitudinal axis direction of the stator through the pump-active surface of the stator and define a parting line of the pumping active surface which extends at least partially parallel and / or obliquely to the longitudinal axis of the stator.

Bevorzugt ist zumindest ein Abschnitt einer pumpaktiven Oberfläche des Statorelements durch zwei zueinander benachbarte Statorteile entlang einer Nut oder entlang eines Stegs der pumpaktiven Oberfläche und insbesondere zumindest näherungsweise parallel zu der Nut oder zu dem Steg geteilt. Eine durch die benachbarten Statorteile definierte Trennlinie der pumpaktiven Oberfläche verläuft also entlang eines Stegs oder einer Nut und insbesondere im Wesentlichen parallel zu dem Steg oder zu der Nut. Dadurch wird die Herstellung der einzelnen Statorteile vereinfacht, da die Anzahl der in jedem Statorteil auszubildenden Stege und Nuten bzw. Stegabschnitte und Nutabschnitte gering gehalten wird. Beispielsweise kann der Nutboden zumindest eines Längsabschnitts der Nut vollständig durch das eine Statorteil gebildet sein und ein den Längsabschnitt der Nut begrenzender Stegabschnitt kann vollständig durch das benachbarte Statorteil gebildet sein, so dass das Statorelement entlang des Rands des Bodens der Nut geteilt ist. Bei dieser Ausgestaltung führen geringfügige Abweichungen der Relativpositionen der Statorteile gegenüber ihrer Sollposition nicht zu einem die Pumpwirkung beeinträchtigenden Versatz der Nuten und Stegabschnitte zueinander.At least a portion of a pump-active surface of the stator element is preferably along by two adjacent stator parts along a groove or along a web of the pump-active surface and in particular at least approximately parallel to the groove or to the web divided. A dividing line of the pump-active surface defined by the adjacent stator parts therefore runs along a web or a groove and in particular substantially parallel to the web or to the groove. As a result, the production of the individual stator parts is simplified, since the number of webs and grooves or web sections and groove sections to be formed in each stator part is kept small. For example, the groove bottom of at least one longitudinal portion of the groove may be completely formed by the one stator part, and a land portion delimiting the longitudinal portion of the groove may be completely formed by the adjacent stator part, so that the stator element is divided along the edge of the bottom of the groove. In this embodiment, slight deviations of the relative positions of the stator parts with respect to their desired position do not lead to an offset of the grooves and web sections that impairs the pumping action.

Gemäß einer vorteilhaften Ausführungsform ist zumindest ein Statorteil und insbesondere jedes Statorteil so ausgebildet, dass mehrere mit dem Statorteil identische Statorteile zu dem Statorelement zusammensetzbar sind. Dadurch wird die Herstellung der Statorelemente noch weiter vereinfacht, da keine verschiedenen Statorelemente hergestellt werden müssen, sondern das Statorelement aus identischen Statorteilen zusammengesetzt sein kann. Dementsprechend umfasst das Statorelement vorzugsweise wenigstens zwei im Wesentlichen identische Statorteile und kann insbesondere vollständig aus im Wesentlichen identischen Statorteilen bestehen.According to an advantageous embodiment, at least one stator part and in particular each stator part is designed such that a plurality of stator parts which are identical to the stator part can be assembled to form the stator element. As a result, the production of the stator is further simplified, since no different stator elements must be made, but the stator can be composed of identical stator parts. Accordingly, the stator element preferably comprises at least two substantially identical stator parts and in particular may consist entirely of substantially identical stator parts.

Gemäß einer Ausführungsform, deren Vorteile auch aus der nachstehenden, ein Herstellungsverfahren betreffenden Beschreibung ersichtlich sind, ist zumindest ein Statorteil und insbesondere jedes Statorteil durch Gießen hergestellt oder herstellbar. Gießen stellt ein besonders einfaches und kostengünstiges Verfahren dar, mit dem sich ein den vakuumtechnischen Anforderungen genügendes Statorelement bzw. Statorteil herstellen lässt.According to one embodiment, the advantages of which can also be seen from the following description relating to a production method are at least one stator and in particular each stator made by casting or producible. Casting represents a particularly simple and cost-effective method by means of which a stator element or stator part which satisfies the vacuum technical requirements can be produced.

Gemäß einer weiteren Ausführungsform ist zumindest ein Statorteil und insbesondere jedes Statorteil zumindest teilweise und insbesondere vollständig aus einem Kunststoff hergestellt oder herstellbar. Eine weitere Ausführungsform sieht vor, dass zumindest ein Statorteil und insbesondere jedes Statorteil durch Blasformen oder dreidimensionales Drucken hergestellt oder herstellbar ist.According to a further embodiment, at least one stator part and in particular each stator part is at least partially and in particular made entirely of a plastic or can be produced. A further embodiment provides that at least one stator part and in particular each stator part can be produced or produced by blow molding or three-dimensional printing.

Die Form der Stege eines Statorteils ist vorzugsweise so angepasst, dass das Statorteil keine Hinterschneidungen aufweist, die ein Entformen des Statorteils verhindern oder wesentlich erschweren würden, z.B. wenn das Statorteil durch Gießen hergestellt wird.The shape of the webs of a stator part is preferably adapted so that the stator part has no undercuts which would prevent or substantially impede demolding of the stator part, e.g. when the stator is made by casting.

Zumindest ein Statorteil oder jedes Statorteil kann prinzipiell zumindest teilweise und insbesondere vollständig aus einem Metall, insbesondere einem gießbaren Metall, bestehen, welches die jeweiligen vakuumtechnischen Anforderungen erfüllt.At least one stator part or each stator part can, in principle, at least partially and in particular completely consist of a metal, in particular a castable metal, which fulfills the respective vacuum-technical requirements.

Prinzipiell kann das Statorelement in eine beliebige Anzahl von Statorteilen unterteilt sein. Beispielsweise können genau zwei Statorteile vorgesehen sein, die jeweils im Wesentlichen halbschalenförmig ausgestaltet sein können und zu dem Statorelement zusammensetzbar sind. Es können aber auch drei, vier, fünf, sechs oder mehr Statorteile hergestellt werden, die zusammengesetzt das Statorelement ergeben.In principle, the stator element can be divided into any number of stator parts. For example, exactly two stator parts can be provided, each of which can be configured essentially in the form of a half shell and can be assembled to form the stator element. However, it is also possible to produce three, four, five, six or more stator parts which, when assembled, produce the stator element.

Darunter, dass die Statorteile zu dem Statorelement zusammensetzbar sind, wird im Rahmen der vorliegenden Beschreibung verstanden, dass die Statorteile derart relativ zueinander positionierbar sind, dass sie das Statorelement mit der beschriebenen Form bilden. Die Statorteile können dabei so ausgebildet sein, dass sie sich im zusammengesetzten Zustand gegenseitig in ihrer gewünschten Relativpositionierung halten. Dazu können die Statorteile zueinander komplementäre Oberflächen besitzen, die bei dem zusammengesetzten Statorelement aneinander anliegen und einander stützen. Das zusammengesetzte Statorelement kann dabei eine selbsttragende mechanische Struktur bilden. Die Statorteile können auch so ausgebildet sein, dass sie, wenn sie zur Bildung des Statorelements in eine Vakuumpumpe eingesetzt werden, in ihrer gewünschten Relativpositionierung zueinander fixiert sind und somit gemeinsam mit der Vakuumpumpe eine selbsttragende Struktur bilden.In the context of the present description, it is understood that the stator parts can be assembled to form the stator element, that the stator parts can be positioned relative to one another in such a way that they form the stator element with the described shape. The stator parts can be designed so that they hold each other in the assembled state in their desired relative positioning. For this purpose, the stator parts may have mutually complementary surfaces which abut each other in the composite stator element and support each other. The composite stator element can form a self-supporting mechanical structure. The stator parts can also be designed such that, when they are used to form the stator element in a vacuum pump, they are fixed in their desired relative position to each other and thus form a self-supporting structure together with the vacuum pump.

Die Statorteile können prinzipiell als einzelne nicht miteinander verbundene Teile vorliegen oder zur Bildung des Statorelements fest und insbesondere materialschlüssig miteinander verbunden, insbesondere miteinander verklebt, sein. Unter "voneinander getrennten" Statorteilen sind im Falle einer festen Verbindung Statorteile zu verstehen, die als einzelne Teile hergestellt oder herstellbar sind und nachträglich miteinander verbunden wurden.In principle, the stator parts may be present as individual non-interconnected parts or may be fixedly connected to one another and in particular materially bonded to form the stator element, in particular glued together. In the case of a fixed connection, "stator parts which are separate from one another" are to be understood as meaning stator parts which are manufactured or producible as individual parts and have subsequently been connected to one another.

Unter einer im Wesentlichen zylindermantelförmigen Grundform ist eine beliebige Mantelform mit einer vorzugsweise im Wesentlichen rotationssymmetrischen Innen- und/oder Außenkontur zu verstehen. Die Grundform kann dabei durch eine gerade Zylindermantelform gebildet sein oder auch durch eine Kegelstumpfmantelform, das heißt durch die Form eines sich in seiner Längsachsenrichtung verjüngenden bzw. erweiternden Zylindermantels.Under a substantially cylindrical shell-shaped basic shape is any shell shape with a preferably substantially rotationally symmetrical inner and / or outer contour to understand. The basic shape can be formed by a straight cylindrical shell shape or by a truncated cone shell shape, that is, by the shape of a tapered in its longitudinal axis direction or widening cylinder jacket.

Weiterer Gegenstand der Erfindung ist ein Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe, welches eine im Wesentlichen zylindermantelförmige Grundform aufweist, oder zur Herstellung eines Bausatzes für ein Statorelement für eine Holweckpumpstufe, welches eine im Wesentlichen zylindermantelförmige Grundform aufweist. Das Verfahren umfasst, dass mehrere Statorteile getrennt voneinander hergestellt werden, wobei die Statorteile zu dem Statorelement oder zu einem Grundkörper für das Statorelement zusammensetzbar sind. Das Verfahren dient vorzugsweise zur Herstellung eines erfindungsgemäßen Statorelements oder Bausatzes gemäß der vorstehenden Beschreibung. Die vorstehend in Bezug auf das Statorelement und den Bausatz und deren Herstellung beschriebenen vorteilhaften Ausführungsformen und Vorteile stellen entsprechende vorteilhafte Ausführungsformen und Vorteile des Verfahrens dar.Another object of the invention is a method for producing a stator for Holweckpumpstufe which has a substantially cylindrical shell-shaped basic shape, or for the production of a kit for a stator for Holweckpumpstufe, which has a substantially cylindrical shell-shaped basic shape. The method comprises producing a plurality of stator parts separately from one another, wherein the stator parts can be assembled to form the stator element or to a base body for the stator element. The method is preferably used for producing a stator element or kit according to the invention as described above. The advantageous embodiments and advantages described above in relation to the stator element and the kit and their manufacture represent corresponding advantageous embodiments and advantages of the method.

Eine vorteilhafte Weiterbildung des Verfahrens sieht vor, dass zur Herstellung zumindest eines Statorteils und insbesondere zur Herstellung jedes Statorteils jeweils zunächst ein Grundkörper für das Statorteil hergestellt wird, wobei der Grundkörper anschließend nachbearbeitet wird, um das Statorteil zu bilden. Der Grundkörper kann dabei durch ein Urformverfahren hergestellt werden und/oder der Grundkörper kann durch ein Umformverfahren nachbearbeitet werden, um das Statorteil zu bilden. Auf diese Weise kann mit geringem Aufwand und zuverlässig ein Statorelement mit einer ausreichenden geometrischen Präzision hergestellt werden. Wie nachstehend beschrieben, kommen dabei als Urformverfahren insbesondere Gießen, Blasformen und dreidimensionales Drucken (3D-Drucken) in Frage. Prinzipiell kann zumindest ein Statorteil auch ohne Nachbearbeitung vollständig durch ein Urformverfahren hergestellt werden.An advantageous development of the method provides that for the production of at least one stator and in particular for the production of each stator each first a base body for the stator is made, wherein the body is subsequently reworked to form the stator. The main body can be produced by a primary molding process and / or the main body can be reworked by a forming process to form the stator. In this way, with little effort and reliably a stator can be made with a sufficient geometrical precision. As described below, casting, blow molding and three-dimensional printing (3D printing) are suitable as the primary molding process. In principle, at least one stator part can also be produced completely without further processing by a primary molding method.

Die Statorteile können als einzelne Teile bereitgestellt oder zur Bildung des Statorelements miteinander fest und insbesondere materialschlüssig verbunden, insbesondere miteinander verklebt, werden.The stator parts can be provided as individual parts or fixedly connected to one another in particular to form the stator element and, in particular, connected in a material-locking manner, in particular adhesively bonded to one another.

Unter einem Grundkörper für ein Statorelement bzw. Statorteil ist ein Körper zu verstehen, welcher zu dem Statorelement bzw. Statorteil weiter verarbeitet werden kann. Der Grundkörper für das Statorelement ist vorzugsweise im Wesentlichen zylindermantelförmig ausgebildet. Wenn nachfolgend auf die Herstellung des Statorelements oder das Statorelement selbst bzw. auf die Herstellung eines Statorteils oder ein Statorteil selbst Bezug genommen wird, bezieht sich die entsprechende Beschreibung sofern anwendbar und nicht anders angegeben in entsprechender Weise auf die Herstellung eines Grundkörpers für das Statorelement bzw. Statorteil bzw. den Grundkörper selbst.A basic body for a stator element or stator part is to be understood as meaning a body which can be further processed to form the stator element or stator part. The base body for the stator element is preferably formed substantially cylindrical jacket-shaped. If reference is made below to the production of the stator or the stator itself or to the production of a stator or a stator itself, the corresponding description refers to the production of a base body for the stator or, if applicable and not stated otherwise in a corresponding manner. Stator part or the main body itself.

Wenn zunächst in einem Urformverfahren ein Grundkörper für das Statorteil hergestellt wird, weist dieser Grundkörper vorzugsweise eine Außenseite auf, die einen Ausschnitt einer äußeren Mantelfläche eines im Wesentlichen zylindermantelförmigen Grundkörpers für das Statorelement bildet, und/oder eine Innenseite, die einen Ausschnitt einer inneren Mantelfläche eines im Wesentlichen zylindermantelförmigen Grundkörpers für das Statorelement bildet. Die Außenseite und/oder die Innenseite des Grundkörpers für das Statorteil kann dabei bereits eine Profilierung mit vorläufigen Stegen oder Stegabschnitten und dazwischen angeordneten Nuten bzw. Nutabschnitten aufweisen, welche durch Nachbearbeitung zu den endgültigen Stegen oder Stegabschnitten und dazwischen angeordneten Nuten oder Nutabschnitten umgeformt werden. Die Nachbearbeitung kann zum Beispiel die Anpassung der Form der vorläufigen Stege oder Stegabschnitte des Grundkörpers des Statorteils umfassen. Die Nachbearbeitung kann auch dazu dienen, einen durch das jeweilige Statorteil vorgegebenen Außen- und/oder Innendurchmesser der äußeren bzw. inneren Mantelfläche des Statorelements noch präziser auf einen vorgegebenen Wert zu bringen und dadurch die für eine hohe Pumpeffizienz erforderlichen engen Spaltmaße der Holweckpumpstufe zu ermöglichen. Zu diesem Zweck können z.B. vorhandene vorläufige Stege oder Stegabschnitte durch ein materialentfernendes, insbesondere spanabhebendes, Verfahren nachbearbeitet werden, um den jeweils gewünschten Außen- bzw. Innendurchmesser zu erreichen. Diese Nachbearbeitung kann zum Beispiel ein Überdrehen des Grundkörpers für das Statorteil umfassen.If a basic body for the stator part is first produced in a primary molding process, this basic body preferably has an outer side which forms a section of an outer lateral surface of a substantially cylindrical jacket-shaped basic body for the stator element, and / or an inner side which forms a section of an inner lateral surface of a forms substantially cylindrical shell-shaped base body for the stator. The outer side and / or the inner side of the main body for the stator part may already have a profiling with provisional webs or web sections and grooves or groove sections arranged therebetween, which are reshaped by post-processing into the final webs or web sections and grooves or groove sections arranged therebetween. The post-processing may include, for example, the adaptation of the shape of the provisional webs or web portions of the main body of the stator. The postprocessing can also serve to bring a predetermined by the respective stator outer and / or inner diameter of the outer and inner circumferential surface of the stator even more precisely to a predetermined value and thereby to allow the required for a high pumping efficiency narrow gap dimensions Holweckpumpstufe. For this purpose, existing preliminary webs or web sections can be reworked by a material-removing, in particular machining, method, in order to achieve the desired outer or inner diameter. This post-processing may, for example, include over-rotation of the main body for the stator part.

Die Form der Stege eines Statorteils ist vorzugsweise so angepasst, dass das Statorteil keine Hinterschneidungen aufweist, die ein Entformen des Statorteils bzw. des Grundkörpers für das Statorteil verhindern oder wesentlich erschweren würden, z.B. wenn das Statorteil oder der Grundkörper durch Gießen hergestellt wird. Das fertige Statorelement kann dann entweder derartige, von bekannten Stegformen ggf. abweichende Stegformen besitzen oder die Stegform kann wie vorstehend beschrieben nachträglich geändert werden.The shape of the webs of a stator part is preferably adapted so that the stator part has no undercuts which would prevent or substantially make demolding of the stator part or the basic body for the stator part, e.g. when the stator or the body is made by casting. The finished stator element may then either have such web shapes, which may differ from known web shapes, or the web shape may be subsequently changed as described above.

Gemäß einer vorteilhaften Ausführungsform umfasst die Herstellung zumindest eines Statorteils und insbesondere die Herstellung jedes Statorteils, dass das Statorteil oder ein Grundkörper für das Statorteil durch Gießen hergestellt wird. Das Gießen stellt also ein mögliches Urformverfahren im Sinne der vorstehenden Beschreibung dar. Das Gießen erlaubt eine zeit- und kosteneffiziente Serienfertigung der Statorteile, wodurch der für die Herstellung eines Statorelements erforderliche Zeit- und Kostenaufwand erheblich reduziert wird. Durch die Aufteilung des Statorelements in mehrere Statorteile wird dabei eine einfache Entformung der Statorteile nach dem Gießen ermöglicht, da mit der zylindermantelförmigen Grundform des Statorelements einhergehende Entformungsschwierigkeiten vermieden werden. Wie vorstehend beschrieben, kann zumindest ein Statorteil oder jedes Statorteil eine im Wesentlichen hinterschneidungsfreie Geometrie besitzen, um eine problemlose Entformung des hergestellten Statorteils zu ermöglichen.According to an advantageous embodiment, the production of at least one stator part and in particular the production of each stator part, that the stator or a base body for the stator is made by casting. Casting therefore represents a possible primary shaping method in the sense of the above description. Casting allows time-efficient and cost-effective series production of the stator parts, which considerably reduces the time and cost required for the production of a stator element. By dividing the stator in several stator parts a simple demolding of the stator after casting is possible because with the cylinder jacket-shaped Basic shape of the stator element associated Entformungsschwierigkeiten be avoided. As described above, at least one stator part or each stator part can have a substantially undercut-free geometry in order to enable a problem-free demolding of the manufactured stator part.

Eine weitere Ausführungsform sieht vor, dass zumindest ein Statorteil und insbesondere jedes Statorteil zumindest teilweise und insbesondere vollständig aus einem Kunststoff hergestellt wird. Im Rahmen der Erfindung wurde erkannt, dass Kunststoff ein für ein Statorelement geeignetes Material darstellt, welches die vakuumtechnischen Anforderungen erfüllt und gleichzeitig kostengünstiger verfügbar und einfacher verarbeitbar ist als herkömmliche Werkstoffe. Die Herstellung der Statorteile wird dabei durch die Aufteilung des Statorelements in mehrere Statorteile noch zusätzlich erleichtert.A further embodiment provides that at least one stator part and in particular each stator part is at least partially and in particular completely made of a plastic. In the context of the invention, it has been recognized that plastic represents a material suitable for a stator element, which meets the vacuum-technical requirements and at the same time is more cost-effective and easier to process than conventional materials. The production of the stator is thereby additionally facilitated by the division of the stator in several stator parts.

Gemäß einer Ausführungsform umfasst die Herstellung zumindest eines Statorteils und insbesondere die Herstellung jedes Statorteils, dass das Statorteil oder ein Grundkörper für das Statorteil durch Blasformen oder dreidimensionales Drucken hergestellt wird. Blasformen oder dreidimensionales Drucken stellt also ein mögliches Urformverfahren im Sinne der vorstehenden Beschreibung dar. Diese Verfahren eignen sich besonders, um ein Statorteil mit einer gewünschten Form herzustellen, welches vorzugsweise zumindest teilweise und insbesondere vollständig aus einem Kunststoff besteht. Im Rahmen der Erfindung wurde erkannt, dass Blasformen und dreidimensionales geeignet sind, um Statorteile mit ausreichender geometrischer Präzision zu schaffen, welche den bestehenden vakuumtechnischen Anforderungen genügen.According to one embodiment, the production of at least one stator part, and in particular the production of each stator part, means that the stator part or a base body for the stator part is produced by blow molding or three-dimensional printing. Blow molding or three-dimensional printing thus represents a possible primary molding process in the sense of the preceding description. These processes are particularly suitable for producing a stator part with a desired shape, which preferably consists at least partially and in particular completely of a plastic. In the context of the invention, it has been recognized that blow molding and three-dimensional are suitable for providing stator parts with sufficient geometrical precision which meet the existing vacuum-technical requirements.

Weiterer Gegenstand der Erfindung ist ein Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe oder zur Herstellung eines mehrere Statorteile umfassenden Bausatzes für ein Statorelement für eine Holweckpumpstufe, wobei das Verfahren umfasst, dass das Statorelement oder zumindest ein Statorteil oder ein Grundkörper für das Statorelement oder für das Statorteil durch Gießen hergestellt wird. Im Rahmen der Erfindung wurde erkannt, dass sich durch dieses Herstellungsverfahren, welches mit verringertem Zeit- und Kostenaufwand durchführbar ist, ein Statorelement bzw. ein Statorteil oder ein Grundkörper mit den für die Verwendung in einer Holweckpumpstufe erforderlichen vakuumtechnischen Eigenschaften herstellen lässt.The invention further relates to a method for producing a stator element for a Holweckpumpstufe or for producing a multiple Stator parts kit for a stator for Holweckpumpstufe, the method comprising that the stator or at least one stator or a body for the stator or for the Stator part is produced by casting. In the context of the invention, it has been recognized that a stator element or a stator part or a main body can be produced with the vacuum-technical properties required for use in a Holweckpumpstufe by this manufacturing method, which can be carried out with reduced time and cost.

Eine äußere und/oder eine innere Mantelfläche des Statorelements bildet vorzugsweise jeweils eine pumpaktive Oberfläche mit einem Holweckgewinde, d.h. mit mehreren schraubenlinienförmig in axialer Richtung verlaufenden Stegen und zwischen den Stegen angeordneten und schraubenlinienförmig in axialer Richtung verlaufenden Nuten. Das Verfahren kann umfassen, dass durch das Gießen zuerst ein Grundkörper für das Statorelement oder für ein Statorteil für das Statorelement hergestellt wird, der anschließend zur Bildung des Statorelements oder Statorteils nachbearbeitet wird, insbesondere durch ein Umformverfahren. Ein durch Gießen hergestellter Grundkörper für ein Statorelement besitzt vorzugsweise eine im Wesentlichen zylindermantelförmige Grundform. Der Grundkörper kann an seiner Innen- und/oder Außenseite auch bereits ein oder mehrere vorläufige Stege und/oder Nuten aufweisen. Eine Nachbearbeitung kann dann eine Anpassung der Stegform und/oder eine Anpassung des durch den Grundkörper vorgegebenen Außen- und/oder Innendurchmessers des Statorelements umfassen.An outer and / or an inner lateral surface of the stator element preferably forms in each case a pump-active surface with a Holweck thread, ie with a plurality of helically extending webs in the axial direction and between the webs and helically extending in the axial direction grooves. The method may include that the casting first produces a base body for the stator element or for a stator part for the stator element, which is subsequently reworked to form the stator element or stator part, in particular by a forming process. A base body produced by casting for a stator element preferably has a substantially cylinder jacket-shaped basic shape. The main body may also already have one or more temporary webs and / or grooves on its inside and / or outside. A post-processing can then include an adaptation of the web shape and / or an adaptation of the outer and / or inner diameter of the stator element predetermined by the main body.

Weiterer Gegenstand der Erfindung ist ein Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe oder zur Herstellung eines mehrere Statorteile umfassenden Bausatzes für ein Statorelement für eine Holweckpumpstufe, wobei das Verfahren umfasst, dass das Statorelement oder zumindest ein Statorteil oder ein Grundkörper für das Statorelement oder für das Statorteil zumindest teilweise und insbesondere vollständig aus einem Kunststoff hergestellt wird. Im Rahmen der Erfindung wurde erkannt, dass sich aus einem Kunststoff, welcher kostengünstig verfügbar und einfach und kostengünstig verarbeitbar ist, ein Statorelement herstellen lässt, welches die für den Einsatz in einer Holweckpumpstufe erforderlichen vakuumtechnischen Eigenschaften besitzt. Eine äußere und/oder eine innere Mantelfläche des Statorelements bildet dabei vorzugsweise jeweils eine pumpaktive Oberfläche mit einem Holweckgewinde, d.h. mit mehreren schraubenlinienförmig in axialer Richtung verlaufenden Stegen und zwischen den Stegen angeordneten und schraubenlinienförmig in axialer Richtung verlaufenden Nuten.The invention further relates to a method for producing a stator element for a Holweckpumpstufe or for producing a multiple Stator parts kit for a stator for Holweckpumpstufe, the method comprising that the stator or at least one stator or a body for the stator or for the Stator part is at least partially and in particular completely made of a plastic. In the context of the invention, it has been recognized that a stator element which has the vacuum-technical properties required for use in a Holweck pumping stage can be produced from a plastic which is available inexpensively and can be processed simply and inexpensively. An outer and / or an inner circumferential surface of the stator element preferably forms in each case a pump-active surface with a Holweck thread, i. with a plurality of helically extending webs in the axial direction and between the webs arranged and helically extending in the axial direction grooves.

Weiterer Gegenstand der Erfindung ist ein Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe oder zur Herstellung eines mehrere Statorteile umfassenden Bausatzes für ein Statorelement für eine Holweckpumpstufe, wobei das Verfahren umfasst, dass das Statorelement oder zumindest ein Statorteil oder ein Grundkörper für das Statorelement oder für das Statorteil durch Blasformen oder dreidimensionales Drucken hergestellt wird. Im Rahmen der Erfindung wurde erkannt, dass sich durch Blasformen oder dreidimensionales Drucken, welches mit geringem Aufwand durchgeführt werden kann, ein Statorelement bzw. Statorteil herstellen lässt, welches die für den Einsatz in einer Holweckpumpstufe erforderlichen vakuumtechnischen Eigenschaften besitzt. Das Statorelement oder Statorteil besteht dabei vorzugsweise zumindest teilweise und insbesondere vollständig aus einem Kunststoff. Eine äußere und/oder eine innere Mantelfläche des Statorelements bildet vorzugsweise jeweils eine pumpaktive Oberfläche mit einem Holweckgewinde, d.h. mit mehreren schraubenlinienförmig in axialer Richtung verlaufenden Stegen und zwischen den Stegen angeordneten und schraubenlinienförmig in axialer Richtung verlaufenden Nuten.The invention further relates to a method for producing a stator element for a Holweckpumpstufe or for producing a multiple Stator parts kit for a stator for Holweckpumpstufe, the method comprising that the stator or at least one stator or a body for the stator or for the Stator part is made by blow molding or three-dimensional printing. In the context of the invention, it has been recognized that blow molding or three-dimensional printing, which can be carried out with little effort, can produce a stator element or stator part which has the vacuum-technical properties required for use in a Holweck pumping stage. The stator or stator part is preferably at least partially and in particular completely made of a plastic. An outer and / or An inner lateral surface of the stator element preferably forms in each case a pump-active surface with a Holweck thread, ie with a plurality of helically extending webs in the axial direction and between the webs arranged and helically extending in the axial direction grooves.

Gegenstand der Erfindung ist weiterhin ein Statorelement für eine Holweckpumpstufe und/oder ein Bausatz für ein Statorelement für eine Holweckpumpstufe, wobei das Statorelement oder der Bausatz durch ein Verfahren gemäß der vorstehenden Beschreibung hergestellt ist oder herstellbar ist. Ein solches Statorelement erfüllt die für den Einsatz in einer Holweckpumpstufe bestehenden vakuumtechnischen Anforderungen und ist gleichzeitig mit geringem Zeit- und Kostenaufwand herstellbar. Die vorstehend in Zusammenhang mit den Herstellungsverfahren beschriebenen vorteilhaften Ausführungsformen und Vorteile des Statorelements bzw. des Bausatzes stellen entsprechende vorteilhafte Ausführungsformen und Vorteile des erfindungsgemäßen Statorelements oder Bausatzes dar.The invention further relates to a stator element for a Holweckpumpstufe and / or a kit for a stator for Holweckpumpstufe, wherein the stator or the kit is prepared by a method according to the above description or can be produced. Such a stator element fulfills the vacuum technical requirements for use in a Holweckpumpstufe and can be produced at the same time with little time and cost. The advantageous embodiments and advantages of the stator element or of the kit described above in connection with the production method represent corresponding advantageous embodiments and advantages of the stator element or kit according to the invention.

Gegenstand der Erfindung ist ferner eine Vakuumpumpe mit wenigstens einer Holweckpumpstufe, welche wenigstens ein Statorelement gemäß der vorliegenden Beschreibung umfasst. Die vorstehend in Bezug auf das Statorelement und dessen Einsatz in einer Vakuumpumpe beschriebenen vorteilhaften Ausführungsformen stellen bei entsprechender Anwendung Vorteile und vorteilhafte Ausführungsformen der Vakuumpumpe dar. Das Statorelement kann gemeinsam mit wenigstens einem Rotorelement die wenigstens eine Holweckpumpstufe der Vakuumpumpe bilden. Dabei kann eine pumpaktive Oberfläche des Statorelements einer pumpaktiven Oberfläche des Rotorelements gegenüberliegen und mit dieser Oberfläche einen radialen Holweckspalt definieren. Die Vakuumpumpe kann insbesondere als Turbomolekularpumpe ausgebildet sein, welche ein oder mehrere turbomolekulare Pumpstufen umfasst, die insbesondere stromaufwärts der ein oder mehreren Holweckpumpstufen angeordnet und mit diesen strömungstechnisch in Serie geschaltet sein können. Die Holweckpumpstufen können dabei prinzipiell parallel oder seriell zueinander pumpen. Der Zeit- und Kostenaufwand für die Herstellung der Vakuumpumpe wird durch die Verwendung des erfindungsgemäßen Statorelements erheblich reduziert.The invention further provides a vacuum pump with at least one Holweckpumpstufe, which comprises at least one stator element according to the present description. The advantageous embodiments described above with respect to the stator element and its use in a vacuum pump, with appropriate application, constitute advantages and advantageous embodiments of the vacuum pump. The stator element may together with at least one rotor element form the at least one Holweckpumpstufe the vacuum pump. In this case, a pump-active surface of the stator element of a pump-active surface of the rotor element opposite and define a radial Holweckspalt with this surface. The vacuum pump may in particular be designed as a turbomolecular pump, which one or more comprises turbomolecular pumping stages, which may be arranged in particular upstream of the one or more Holweckpumpstufen and connected in fluid flow with these in series. The Holweckpumpstufen can pump in principle parallel or serially to each other. The time and cost required for the production of the vacuum pump is considerably reduced by the use of the stator according to the invention.

Nachfolgend wird die Erfindung beispielhaft anhand vorteilhafter Ausführungsformen unter Bezugnahme auf die beigefügten Figuren beschrieben. Es zeigen:

Fig. 1
ein Statorelement gemäß einer Ausführungsform der Erfindung in perspektivischer Ansicht, und
Fig. 2
ein Statorelement gemäß einer weiteren Ausführungsform der Erfindung in perspektivischer Ansicht.
The invention will be described by way of example with reference to advantageous embodiments with reference to the accompanying figures. Show it:
Fig. 1
a stator according to an embodiment of the invention in a perspective view, and
Fig. 2
a stator according to another embodiment of the invention in a perspective view.

Fig. 1 zeigt ein Statorelement gemäß einer Ausführungsform der Erfindung im zusammengesetzten Zustand. Das Statorelement besitzt eine im Wesentlichen zylindermantelförmige Grundform und umfasst drei separate Statorteile 12, 12', 12", die das Statorelement in drei Winkelabschnitte unterteilen. Die Trennflächen zwischen den einzelnen Statorteilen 12, 12', 12" sind in Fig. 1 mit den Bezugszeichen 18, 20, 22 bezeichnet und verlaufen im Wesentlichen parallel zu der Längsachse 24 des Statorelements, so dass jedes Statorteil 12, 12', 12" ein Zylindermantelsegment mit einer von seiner Flachseite her gesehen im Wesentlichen rechteckigen Umrissform bildet. Fig. 1 shows a stator according to an embodiment of the invention in the assembled state. The stator element has a substantially cylinder-jacket-shaped basic shape and comprises three separate stator parts 12, 12 ', 12 "which divide the stator element into three angular sections Fig. 1 are denoted by the reference numerals 18, 20, 22 and extend substantially parallel to the longitudinal axis 24 of the stator, so that each stator 12, 12 ', 12 "forms a cylinder jacket segment with a substantially rectangular outline seen from its flat side.

Jedes Statorteil 12, 12', 12" umfasst sowohl an seiner Außenseite als auch an seiner Innenseite jeweils mehrere Stegabschnitte 14, 14', 14", welche gemeinsam schraubenlinienförmig in Richtung der Längsachse 24 verlaufende Stege bilden, die an der inneren und der äußeren Mantelfläche des Statorelements angeordnet sind und zwischen denen jeweils schraubenlinienförmig in Richtung der Längsachse 24 verlaufende Nuten 16 ausgebildet sind. Die Stege und Nuten 16 bilden dabei jeweils ein Holweckgewinde an der inneren und äußeren Mantelfläche des Statorelements, welches dazu geeignet ist, mit einem gegenüber der jeweiligen Mantelfläche rotierenden, als Holweck-Zylinder ausgebildeten Rotorelement eine Holweckpumpstufe zu bilden, wobei das Rotorelement insbesondere eine glatte pumpaktive Oberfläche aufweisen kann. Durch die Segmentierung des Statorelements wird dessen Herstellung deutlich vereinfacht, da sich die einzelnen Statorteile 12, 12', 12" beispielsweise durch Gießen im Wesentlichen hinterschneidungsfrei herstellen und somit einfach Entformen lassen.Each stator part 12, 12 ', 12 "comprises both on its outer side and on its inner side in each case a plurality of web portions 14, 14', 14", which form together helically in the direction of the longitudinal axis 24 extending webs, which on the inner and the outer lateral surface are arranged of the stator and between each of which helically in the direction of the longitudinal axis 24 extending grooves 16 are formed. The webs and grooves 16 each form a Holweckgewinde on the inner and outer circumferential surface of the stator, which is adapted to form a Holweckpumpstufe with a relative to the respective lateral surface rotating, designed as a Holweck cylinder rotor element, the rotor element in particular a smooth pump active Surface may have. The segmentation of the stator element significantly simplifies its manufacture, since the individual stator parts 12, 12 ', 12 "can be produced substantially without undercuts, for example by casting, and can thus be easily removed from the mold.

Fig. 2 zeigt ein Statorelement gemäß einer weiteren Ausführungsform der Erfindung, welches im Wesentlichen dem in Fig. 1 gezeigten Statorelement entspricht und sich davon lediglich durch die Geometrie der Unterteilung des Statorelements in Statorteile 12, 12', 12" unterscheidet. Das Statorelement wird durch die drei Statorteile 12, 12', 12" quer zu der Längsachse 24 geteilt, so dass jedes Statorteil 12, 12', 12" ein Zylindermantelsegment mit einer von seiner Flachseite her gesehen im Wesentlichen rautenförmigen Umrissform bildet. Die Trennflächen 18, 20, 22 verlaufen jeweils entlang des Rands des Bodens einer an der äußeren Mantelfläche des Statorelements angeordneten Nut 16, so dass der jeweilige Nutboden und der jeweils benachbarte Steg 14, 14', 14" an der äußeren Mantelfläche durch die Trennflächen 18, 20, 22 nicht unterbrochen werden. Fig. 2 shows a stator according to another embodiment of the invention, which is substantially the in Fig. 1 The stator element is divided by the three stator parts 12, 12 ', 12 "transversely to the longitudinal axis 24, so that each stator part is divided by stator geometry of the stator element in stator parts 12, 12', 12" 12, 12 ', 12 "forms a cylinder jacket segment with a substantially diamond-shaped outline as seen from its flat side respective groove bottom and the respective adjacent web 14, 14 ', 14 "on the outer lateral surface by the separating surfaces 18, 20, 22 are not interrupted.

BezugszeichenlisteLIST OF REFERENCE NUMBERS

12, 12', 12"12, 12 ', 12 "
Statorteilstator
14, 14', 14"14, 14 ', 14 "
Stegabschnitt, StegBridge section, bridge
1616
Nutgroove
18, 20, 2218, 20, 22
Trennflächeinterface
2424
Längsachselongitudinal axis

Claims (15)

Statorelement für eine Holweckpumpstufe, welches eine im Wesentlichen zylindermantelförmige Grundform aufweist, oder Bausatz für ein Statorelement für eine Holweckpumpstufe, welches eine im Wesentlichen zylindermantelförmige Grundform aufweist, wobei das Statorelement oder der Bausatz mehrere voneinander getrennte Statorteile (12, 12', 12") umfasst, die zu dem Statorelement zusammengesetzt sind oder zu dem Statorelement zusammensetzbar sind.Stator element for Holweckpumpstufe which has a substantially cylindrical shell-shaped basic form, or kit for a stator element for Holweckpumpstufe which has a substantially cylindrical shell-shaped basic shape, wherein the stator element or the kit comprises a plurality of separate stator (12, 12 ', 12 ") which are assembled to the stator element or are composable to the stator element. Vorrichtung nach Anspruch 1,
dadurch gekennzeichnet, dass eine äußere und/oder eine innere Mantelfläche des Statorelements jeweils eine pumpaktive Oberfläche mit mehreren schraubenlinienförmig in axialer Richtung verlaufenden Stegen (14, 14', 14") und zwischen den Stegen (14, 14', 14") angeordneten und schraubenlinienförmig in axialer Richtung verlaufenden Nuten (16) bilden, wobei die Statorteile (12, 12', 12") jeweils einen Bereich der pumpaktiven Oberfläche oder der pumpaktiven Oberflächen bilden.Device according to claim 1,
characterized in that an outer and / or inner circumferential surface of the stator in each case arranged a pump active surface with a plurality of helically extending in the axial direction webs (14, 14 ', 14 ") and between the webs (14, 14', 14") and form helically extending in the axial direction grooves (16), wherein the stator (12, 12 ', 12 ") each form a portion of the pump-active surface or the pump-active surfaces. Vorrichtung nach Anspruch 1 oder 2,
dadurch gekennzeichnet, dass zumindest ein Statorteil (12, 12', 12") und insbesondere jedes Statorteil (12, 12', 12") nur einen Teilbereich des relativ zu der Längsachse (24) des Statorelements definierten Umfangswinkels des Statorelements abdeckt.Apparatus according to claim 1 or 2,
characterized in that at least one stator part (12, 12 ', 12 ") and in particular each stator part (12, 12', 12") only a portion of the relative to the Longitudinal axis (24) of the stator element defined circumferential angle of the stator covering. Vorrichtung nach einem der vorstehenden Ansprüche,
dadurch gekennzeichnet, dass zumindest ein Statorteil (12, 12', 12") und insbesondere jedes Statorteil (12, 12', 12") einen Bereich von höchstens 180° und vorzugsweise von weniger als 180° des relativ zu der Längsachse (24) des Statorelements definierten Umfangswinkels des Statorelements abdeckt.Device according to one of the preceding claims,
characterized in that at least one stator part (12, 12 ', 12 ") and in particular each stator part (12, 12', 12") has a range of at most 180 ° and preferably less than 180 ° of the relative to the longitudinal axis (24) covering the stator element defined circumferential angle of the stator. Vorrichtung nach einem der vorstehenden Ansprüche,
dadurch gekennzeichnet, dass das Statorelement durch zwei zueinander benachbarte Statorteile (12, 12', 12") parallel zu der Längsachse (24) des Statorelements und/oder schräg zu der Längsachse (24) des Statorelements geteilt ist.Device according to one of the preceding claims,
characterized in that the stator element is divided by two adjacent stator parts (12, 12 ', 12 ") parallel to the longitudinal axis (24) of the stator element and / or obliquely to the longitudinal axis (24) of the stator element. Vorrichtung nach einem der vorstehenden Ansprüche,
dadurch gekennzeichnet, dass zumindest ein Abschnitt einer pumpaktiven Oberfläche des Statorelements durch zwei zueinander benachbarte Statorteile (12, 12', 12") entlang einer Nut (16) oder entlang eines Stegs (14, 14', 14") der pumpaktiven Oberfläche und insbesondere zumindest näherungsweise parallel zu der Nut (16) oder zu dem Steg (14, 14', 14") geteilt ist.Device according to one of the preceding claims,
characterized in that at least a portion of a pump-active surface of the stator by two adjacent stator parts (12, 12 ', 12 ") along a groove (16) or along a web (14, 14', 14") of the pump-active surface and in particular at least approximately parallel to the groove (16) or to the web (14, 14 ', 14 ") is divided. Vorrichtung nach einem der vorstehenden Ansprüche,
dadurch gekennzeichnet dass zumindest ein Statorteil (12, 12', 12") und insbesondere jedes Statorteil (12, 12', 12") so ausgebildet ist, dass mehrere mit dem Statorteil (12, 12', 12") identische Statorteile (12, 12', 12") zu dem Statorelement zusammensetzbar sind.Device according to one of the preceding claims,
characterized in that at least one stator part (12, 12 ', 12 ") and in particular each stator part (12, 12', 12") is designed so that a plurality of stator parts (12, 12 ', 12 ") identical to the stator part (12 , 12 ', 12 ") are composable to the stator element. Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe, welches eine im Wesentlichen zylindermantelförmige Grundform aufweist, oder zur Herstellung eines Bausatzes für ein Statorelement für eine Holweckpumpstufe, welches eine im Wesentlichen zylindermantelförmige Grundform aufweist, wobei das Statorelement oder der Bausatz vorzugsweise nach einem der vorstehenden Ansprüche ausgebildet ist, wobei das Verfahren umfasst, dass mehrere Statorteile (12, 12', 12") getrennt voneinander hergestellt werden, wobei die Statorteile (12, 12', 12") zu dem Statorelement oder zu einem Grundkörper für das Statorelement zusammensetzbar sind.A method for producing a stator element for a Holweckpumpstufe which has a substantially cylindrical shell-shaped basic shape, or for producing a kit for a stator element for a Holweckpumpstufe having a substantially cylinder-jacket basic shape, wherein the stator element or the kit preferably according to one of the preceding claims wherein the method comprises producing a plurality of stator parts (12, 12 ', 12 ") separately from each other, wherein the stator parts (12, 12', 12") are composable to the stator element or to a base member for the stator element. Verfahren nach Anspruch 8,
dadurch gekennzeichnet dass zur Herstellung zumindest eines Statorteils (12, 12', 12") und insbesondere zur Herstellung jedes Statorteils (12, 12', 12") jeweils zunächst, insbesondere durch ein Urformverfahren, ein Grundkörper für das Statorteil (12, 12', 12") hergestellt wird, wobei der Grundkörper anschließend, insbesondere durch ein Umformverfahren, nachbearbeitet wird, um das Statorteil (12, 12', 12") zu bilden.Method according to claim 8,
characterized in that for producing at least one stator part (12, 12 ', 12 ") and in particular for producing each stator part (12, 12', 12") in each case initially, in particular by a primary molding method, a base body for the stator part (12, 12 ' , 12 ") is produced, wherein the base body is subsequently, in particular by a forming process, reworked to form the stator (12, 12 ', 12"). Verfahren nach Anspruch 8 oder 9,
dadurch gekennzeichnet dass die Herstellung zumindest eines Statorteils (12, 12', 12") und insbesondere die Herstellung jedes Statorteils (12, 12', 12") umfasst, dass das Statorteil (12, 12', 12") oder ein Grundkörper für das Statorteil (12, 12', 12") durch Gießen hergestellt wird, und/oder dass ein Statorteil (12, 12', 12") und insbesondere jedes Statorteil (12, 12', 12") zumindest teilweise und insbesondere vollständig aus einem Kunststoff hergestellt wird, und/oder dass die Herstellung zumindest eines Statorteils (12, 12', 12") und insbesondere die Herstellung jedes Statorteils (12, 12', 12") umfasst, dass das Statorteil (12, 12', 12") oder ein Grundkörper für das Statorteil (12, 12', 12") durch Blasformen oder dreidimensionales Drucken hergestellt wird.Method according to claim 8 or 9,
characterized in that the production of at least one stator part (12, 12 ', 12 ") and in particular the production of each stator part (12, 12', 12") comprises that the stator part (12, 12 ', 12 ") or a base body for the stator part (12, 12 ', 12 ") is produced by casting, and / or that a stator part (12, 12', 12") and in particular each stator part (12, 12 ', 12 ") is at least partially and in particular completely made a plastic is produced, and / or that the production of at least one stator (12, 12 ', 12 ") and in particular the production of each stator (12, 12', 12"), that the stator (12, 12 ', 12 ") or a base body for the stator (12, 12 ', 12") is produced by blow molding or three-dimensional printing. Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe oder zur Herstellung eines mehrere Statorteile (12, 12', 12") umfassenden Bausatzes für ein Statorelement für eine Holweckpumpstufe, wobei das Statorelement oder der Bausatz vorzugsweise nach einem der Ansprüche 1 bis 7 ausgebildet ist, wobei das Verfahren umfasst, dass das Statorelement oder zumindest ein Statorteil (12, 12', 12") oder ein Grundkörper für das Statorelement oder für das Statorteil (12, 12', 12") durch Gießen hergestellt wird.A method for producing a stator element for a Holweckpumpstufe or for producing a multiple stator parts (12, 12 ', 12 ") comprising kit for a stator element for Holweckpumpstufe, wherein the stator element or the kit is preferably formed according to one of claims 1 to 7, wherein the method comprises producing the stator element or at least one stator part (12, 12 ', 12 ") or a basic body for the stator element or for the stator part (12, 12', 12") by casting. Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe oder zur Herstellung eines mehrere Statorteile (12, 12', 12") umfassenden Bausatzes für ein Statorelement für eine Holweckpumpstufe, wobei das Statorelement oder der Bausatz vorzugsweise nach einem der Ansprüche 1 bis 7 ausgebildet ist, wobei das Verfahren umfasst, dass das Statorelement oder zumindest ein Statorteil (12, 12', 12") oder ein Grundkörper für das Statorelement oder für das Statorteil (12, 12', 12") zumindest teilweise und insbesondere vollständig aus einem Kunststoff hergestellt wird.A method for producing a stator element for a Holweckpumpstufe or for producing a multiple stator parts (12, 12 ', 12 ") comprising kit for a stator element for Holweckpumpstufe, wherein the stator element or the kit is preferably formed according to one of claims 1 to 7, wherein the method comprises that the stator element or at least one stator part (12, 12 ', 12 ") or a base body for the stator element or for the stator part (12, 12 ', 12 ") at least partially and in particular completely made of a plastic. Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe oder zur Herstellung eines mehrere Statorteile (12, 12', 12") umfassenden Bausatzes für ein Statorelement für eine Holweckpumpstufe, wobei das Statorelement oder der Bausatz vorzugsweise nach einem der Ansprüche 1 bis 7 ausgebildet ist, wobei das Verfahren umfasst, dass das Statorelement oder zumindest ein Statorteil (12, 12', 12") oder ein Grundkörper für das Statorelement oder für das Statorteil (12, 12', 12") durch Blasformen oder dreidimensionales Drucken hergestellt wird.A method for producing a stator element for a Holweckpumpstufe or for producing a multiple stator parts (12, 12 ', 12 ") comprising kit for a stator element for Holweckpumpstufe, wherein the stator element or the kit is preferably formed according to one of claims 1 to 7, wherein the method comprises producing the stator element or at least one stator part (12, 12 ', 12 ") or a base element for the stator element or for the stator part (12, 12', 12") by blow molding or three-dimensional printing. Statorelement für eine Holweckpumpstufe oder Bausatz für ein Statorelement für eine Holweckpumpstufe, wobei das Statorelement oder der Bausatz durch ein Verfahren nach einem der Ansprüche 8 bis 13 hergestellt ist oder herstellbar ist.Stator element for a Holweckpumpstufe or kit for a stator element for a Holweckpumpstufe, wherein the stator element or the kit is prepared by a method according to any one of claims 8 to 13 or can be produced. Vakuumpumpe, insbesondere Turbomolekularpumpe, mit wenigstens einer Holweckpumpstufe, welche wenigstens ein Statorelement nach einem der Ansprüche 1 bis 7 oder nach Anspruch 14 umfasst.Vacuum pump, in particular turbomolecular pump, with at least one Holweckpumpstufe, which comprises at least one stator element according to one of claims 1 to 7 or claim 14.
EP14159492.9A 2013-04-22 2014-03-13 Stator element for a Holweck pump stage, vacuum pump with a Holweck pump stage and method of manufacturing a stator element for a Holweck pump stage Active EP2796726B1 (en)

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US9784284B2 (en) 2017-10-10
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JP6040195B2 (en) 2016-12-07
EP2796726B1 (en) 2018-01-17
CN104110392A (en) 2014-10-22
JP2014214745A (en) 2014-11-17
DE102013207269A1 (en) 2014-10-23

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