EP2763182A3 - Multijunction solar cell with bonded transparent conductive interlayer - Google Patents
Multijunction solar cell with bonded transparent conductive interlayer Download PDFInfo
- Publication number
- EP2763182A3 EP2763182A3 EP14166914.3A EP14166914A EP2763182A3 EP 2763182 A3 EP2763182 A3 EP 2763182A3 EP 14166914 A EP14166914 A EP 14166914A EP 2763182 A3 EP2763182 A3 EP 2763182A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- solar cell
- transparent conductive
- multijunction solar
- bonded
- conductive interlayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011529 conductive interlayer Substances 0.000 title 1
- 239000011229 interlayer Substances 0.000 abstract 2
- 239000010410 layer Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000000712 assembly Effects 0.000 abstract 1
- 238000000429 assembly Methods 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
- H01L31/0725—Multiple junction or tandem solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0687—Multiple junction or tandem solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PIN type
- H01L31/076—Multiple junction or tandem solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/301,529 US11211510B2 (en) | 2005-12-13 | 2005-12-13 | Multijunction solar cell with bonded transparent conductive interlayer |
EP06077168A EP1798774A3 (en) | 2005-12-13 | 2006-12-05 | Multijunction solar cell with bonded transparent conductive interlayer |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06077168A Division EP1798774A3 (en) | 2005-12-13 | 2006-12-05 | Multijunction solar cell with bonded transparent conductive interlayer |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2763182A2 EP2763182A2 (en) | 2014-08-06 |
EP2763182A3 true EP2763182A3 (en) | 2016-08-31 |
Family
ID=37832072
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14166914.3A Pending EP2763182A3 (en) | 2005-12-13 | 2006-12-05 | Multijunction solar cell with bonded transparent conductive interlayer |
EP06077168A Withdrawn EP1798774A3 (en) | 2005-12-13 | 2006-12-05 | Multijunction solar cell with bonded transparent conductive interlayer |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06077168A Withdrawn EP1798774A3 (en) | 2005-12-13 | 2006-12-05 | Multijunction solar cell with bonded transparent conductive interlayer |
Country Status (2)
Country | Link |
---|---|
US (1) | US11211510B2 (en) |
EP (2) | EP2763182A3 (en) |
Families Citing this family (57)
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FR2894990B1 (en) | 2005-12-21 | 2008-02-22 | Soitec Silicon On Insulator | PROCESS FOR PRODUCING SUBSTRATES, IN PARTICULAR FOR OPTICS, ELECTRONICS OR OPTOELECTRONICS AND SUBSTRATE OBTAINED BY SAID PROCESS |
US7057256B2 (en) | 2001-05-25 | 2006-06-06 | President & Fellows Of Harvard College | Silicon-based visible and near-infrared optoelectric devices |
US7442629B2 (en) | 2004-09-24 | 2008-10-28 | President & Fellows Of Harvard College | Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate |
US20110108081A1 (en) * | 2006-12-20 | 2011-05-12 | Jds Uniphase Corporation | Photovoltaic Power Converter |
US8895839B2 (en) * | 2008-02-01 | 2014-11-25 | President And Fellows Of Harvard College | Multijunction photovoltaic device |
US20090223554A1 (en) * | 2008-03-05 | 2009-09-10 | Emcore Corporation | Dual Sided Photovoltaic Package |
EP2298032A4 (en) * | 2008-05-06 | 2012-06-20 | Agency Science Tech & Res | An electrically conducting structure for a light transmissible device |
DE112009002056T5 (en) * | 2008-08-27 | 2011-07-14 | Mitsubishi Materials Corporation | Transparent electrically conductive film for solar cells, composition for transparent electrically conductive films and multiple solar cells |
EP2351097A2 (en) | 2008-10-23 | 2011-08-03 | Alta Devices, Inc. | Photovoltaic device |
US20120104460A1 (en) | 2010-11-03 | 2012-05-03 | Alta Devices, Inc. | Optoelectronic devices including heterojunction |
US8236600B2 (en) * | 2008-11-10 | 2012-08-07 | Emcore Solar Power, Inc. | Joining method for preparing an inverted metamorphic multijunction solar cell |
US20100319764A1 (en) * | 2009-06-23 | 2010-12-23 | Solar Junction Corp. | Functional Integration Of Dilute Nitrides Into High Efficiency III-V Solar Cells |
EP2454761A1 (en) * | 2009-07-17 | 2012-05-23 | Soitec | Method of bonding using a bonding layer based on zinc, silicon and oxygen and corresponding structures |
WO2011024534A1 (en) * | 2009-08-27 | 2011-03-03 | 独立行政法人産業技術総合研究所 | Multi-junction photoelectric converter, integrated multi-junction photoelectric converter, and method for manufacturing same |
US9691921B2 (en) | 2009-10-14 | 2017-06-27 | Alta Devices, Inc. | Textured metallic back reflector |
US20170141256A1 (en) | 2009-10-23 | 2017-05-18 | Alta Devices, Inc. | Multi-junction optoelectronic device with group iv semiconductor as a bottom junction |
US9768329B1 (en) * | 2009-10-23 | 2017-09-19 | Alta Devices, Inc. | Multi-junction optoelectronic device |
US9502594B2 (en) | 2012-01-19 | 2016-11-22 | Alta Devices, Inc. | Thin-film semiconductor optoelectronic device with textured front and/or back surface prepared from template layer and etching |
US20150380576A1 (en) | 2010-10-13 | 2015-12-31 | Alta Devices, Inc. | Optoelectronic device with dielectric layer and method of manufacture |
US11271128B2 (en) | 2009-10-23 | 2022-03-08 | Utica Leaseco, Llc | Multi-junction optoelectronic device |
US20110114163A1 (en) * | 2009-11-18 | 2011-05-19 | Solar Junction Corporation | Multijunction solar cells formed on n-doped substrates |
US20110232730A1 (en) | 2010-03-29 | 2011-09-29 | Solar Junction Corp. | Lattice matchable alloy for solar cells |
US8692198B2 (en) | 2010-04-21 | 2014-04-08 | Sionyx, Inc. | Photosensitive imaging devices and associated methods |
US8852994B2 (en) | 2010-05-24 | 2014-10-07 | Masimo Semiconductor, Inc. | Method of fabricating bifacial tandem solar cells |
US8975509B2 (en) * | 2010-06-07 | 2015-03-10 | The Governing Council Of The University Of Toronto | Photovoltaic devices with multiple junctions separated by a graded recombination layer |
CN106449684B (en) | 2010-06-18 | 2019-09-27 | 西奥尼克斯公司 | High speed photosensitive device and correlation technique |
US20120103419A1 (en) * | 2010-10-27 | 2012-05-03 | The Regents Of The University Of California | Group-iii nitride solar cells grown on high quality group-iii nitride crystals mounted on foreign material |
US9214580B2 (en) | 2010-10-28 | 2015-12-15 | Solar Junction Corporation | Multi-junction solar cell with dilute nitride sub-cell having graded doping |
US8822817B2 (en) | 2010-12-03 | 2014-09-02 | The Boeing Company | Direct wafer bonding |
US8962991B2 (en) | 2011-02-25 | 2015-02-24 | Solar Junction Corporation | Pseudomorphic window layer for multijunction solar cells |
US8766087B2 (en) | 2011-05-10 | 2014-07-01 | Solar Junction Corporation | Window structure for solar cell |
US9496308B2 (en) | 2011-06-09 | 2016-11-15 | Sionyx, Llc | Process module for increasing the response of backside illuminated photosensitive imagers and associated methods |
WO2013010127A2 (en) | 2011-07-13 | 2013-01-17 | Sionyx, Inc. | Biometric imaging devices and associated methods |
CN103022058A (en) * | 2011-09-21 | 2013-04-03 | 索尼公司 | Multi-junction solar cell, compound semiconductor device, photovoltaic conversion component and compound semiconductor layer-by-layer structure |
FR2981195A1 (en) | 2011-10-11 | 2013-04-12 | Soitec Silicon On Insulator | MULTI-JUNCTION IN A SEMICONDUCTOR DEVICE FORMED BY DIFFERENT DEPOSITION TECHNIQUES |
WO2013074530A2 (en) | 2011-11-15 | 2013-05-23 | Solar Junction Corporation | High efficiency multijunction solar cells |
US11038080B2 (en) | 2012-01-19 | 2021-06-15 | Utica Leaseco, Llc | Thin-film semiconductor optoelectronic device with textured front and/or back surface prepared from etching |
US9153724B2 (en) | 2012-04-09 | 2015-10-06 | Solar Junction Corporation | Reverse heterojunctions for solar cells |
JP5890757B2 (en) * | 2012-06-29 | 2016-03-22 | 本田技研工業株式会社 | Chalcopyrite thin film solar cell |
SG2014013585A (en) * | 2012-07-26 | 2014-06-27 | Ev Group E Thallner Gmbh | Method for bonding of substrates |
DE102013002298A1 (en) * | 2013-02-08 | 2014-08-14 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Multiple solar cell, process for its preparation and use thereof |
WO2014142340A1 (en) | 2013-03-14 | 2014-09-18 | Ricoh Company, Ltd. | Compound semiconductor photovoltaic cell and manufacturing method of the same |
JP6446782B2 (en) * | 2013-03-14 | 2019-01-09 | 株式会社リコー | Compound semiconductor solar cell and method of manufacturing compound semiconductor solar cell |
JP2015038952A (en) * | 2013-07-16 | 2015-02-26 | 株式会社リコー | Compound semiconductor solar cell and compound semiconductor solar cell manufacturing method |
US9209345B2 (en) | 2013-06-29 | 2015-12-08 | Sionyx, Inc. | Shallow trench textured regions and associated methods |
JP6550691B2 (en) * | 2013-07-30 | 2019-07-31 | 株式会社リコー | Compound semiconductor solar cell |
US9331227B2 (en) * | 2014-01-10 | 2016-05-03 | The Boeing Company | Directly bonded, lattice-mismatched semiconductor device |
ES2831831T3 (en) | 2014-02-05 | 2021-06-09 | Array Photonics Inc | Monolithic Multi Junction Power Converter |
WO2016069758A1 (en) * | 2014-10-29 | 2016-05-06 | Sru Corporation | Tandem photovoltaic device |
US20170110613A1 (en) | 2015-10-19 | 2017-04-20 | Solar Junction Corporation | High efficiency multijunction photovoltaic cells |
US20170125621A1 (en) * | 2015-10-29 | 2017-05-04 | The Boeing Company | Multi-junction solar cell with self compensating sub-cells |
US10319868B2 (en) * | 2017-01-06 | 2019-06-11 | Nanoclear Technologies Inc. | Methods and systems to boost efficiency of solar cells |
US10017384B1 (en) | 2017-01-06 | 2018-07-10 | Nanoclear Technologies Inc. | Property control of multifunctional surfaces |
US10121919B2 (en) | 2017-01-06 | 2018-11-06 | Nanoclear Technologies Inc. | Control of surface properties by deposition of particle monolayers |
WO2019010037A1 (en) | 2017-07-06 | 2019-01-10 | Solar Junction Corporation | Hybrid mocvd/mbe epitaxial growth of high-efficiency lattice-matched multijunction solar cells |
WO2019067553A1 (en) | 2017-09-27 | 2019-04-04 | Solar Junction Corporation | Short wavelength infrared optoelectronic devices having a dilute nitride layer |
EP3939085A1 (en) | 2019-03-11 | 2022-01-19 | Array Photonics, Inc. | Short wavelength infrared optoelectronic devices having graded or stepped dilute nitride active regions |
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US4643817A (en) * | 1985-06-07 | 1987-02-17 | Electric Power Research Institute, Inc. | Photocell device for evolving hydrogen and oxygen from water |
JP2004319934A (en) * | 2003-04-21 | 2004-11-11 | Sharp Corp | Multi-junction type solar cell and its manufacturing method |
WO2005081324A1 (en) * | 2004-02-20 | 2005-09-01 | Sharp Kabushiki Kaisha | Substrate for photoelectric converter, photoelectric converter, and multilayer photoelectric converter |
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FR2777116A1 (en) | 1998-04-03 | 1999-10-01 | Picogiga Sa | SEMICONDUCTOR STRUCTURE OF PHOTOVOLTAIC COMPONENT |
JP4127580B2 (en) | 1999-02-17 | 2008-07-30 | 株式会社東芝 | Treatment method of radioactive gas waste |
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JP4826066B2 (en) * | 2004-04-27 | 2011-11-30 | 住友金属鉱山株式会社 | Amorphous transparent conductive thin film and method for producing the same, and sputtering target for obtaining the amorphous transparent conductive thin film and method for producing the same |
CA2570718C (en) * | 2004-06-15 | 2010-10-19 | Dyesol Ltd. | Photovoltaic module with full utilization of surface area |
-
2005
- 2005-12-13 US US11/301,529 patent/US11211510B2/en active Active
-
2006
- 2006-12-05 EP EP14166914.3A patent/EP2763182A3/en active Pending
- 2006-12-05 EP EP06077168A patent/EP1798774A3/en not_active Withdrawn
Patent Citations (4)
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US4643817A (en) * | 1985-06-07 | 1987-02-17 | Electric Power Research Institute, Inc. | Photocell device for evolving hydrogen and oxygen from water |
JP2004319934A (en) * | 2003-04-21 | 2004-11-11 | Sharp Corp | Multi-junction type solar cell and its manufacturing method |
WO2005081324A1 (en) * | 2004-02-20 | 2005-09-01 | Sharp Kabushiki Kaisha | Substrate for photoelectric converter, photoelectric converter, and multilayer photoelectric converter |
EP1724840A1 (en) * | 2004-02-20 | 2006-11-22 | Sharp Kabushiki Kaisha | Substrate for photoelectric converter, photoelectric converter, and multilayer photoelectric converter |
Non-Patent Citations (1)
Title |
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SHARPS P R ET AL: "Wafer bonding for use in mechanically stacked multi-bandgap cells", CONFERENCE RECORD OF THE 26TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE 19970929; 19970929 - 19971003 NEW YORK, NY : IEEE, US, 29 September 1997 (1997-09-29), pages 895 - 898, XP010268023, ISBN: 978-0-7803-3767-1, DOI: 10.1109/PVSC.1997.654231 * |
Also Published As
Publication number | Publication date |
---|---|
EP1798774A3 (en) | 2011-05-18 |
EP2763182A2 (en) | 2014-08-06 |
US11211510B2 (en) | 2021-12-28 |
US20070131275A1 (en) | 2007-06-14 |
EP1798774A2 (en) | 2007-06-20 |
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Ipc: H01L 31/0224 20060101AFI20160420BHEP Ipc: H01L 31/0725 20120101ALI20160420BHEP Ipc: H01L 31/075 20120101ALI20160420BHEP Ipc: H01L 31/076 20120101ALI20160420BHEP Ipc: H01L 31/068 20120101ALI20160420BHEP Ipc: H01L 31/0687 20120101ALI20160420BHEP Ipc: H01L 31/18 20060101ALI20160420BHEP Ipc: H01L 31/072 20120101ALI20160420BHEP |
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